ES328726A1 - Perfeccionamientos en la formacion de resistencias de pelicula delgada. - Google Patents
Perfeccionamientos en la formacion de resistencias de pelicula delgada.Info
- Publication number
- ES328726A1 ES328726A1 ES0328726A ES328726A ES328726A1 ES 328726 A1 ES328726 A1 ES 328726A1 ES 0328726 A ES0328726 A ES 0328726A ES 328726 A ES328726 A ES 328726A ES 328726 A1 ES328726 A1 ES 328726A1
- Authority
- ES
- Spain
- Prior art keywords
- thin film
- translation
- formation
- machine
- legally binding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
- H01C7/006—Thin film resistors
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Non-Adjustable Resistors (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Electronic Switches (AREA)
- Liquid Crystal (AREA)
- Electron Beam Exposure (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US470981A US3391373A (en) | 1965-07-12 | 1965-07-12 | Beta tantalum resistors |
Publications (1)
Publication Number | Publication Date |
---|---|
ES328726A1 true ES328726A1 (es) | 1967-04-01 |
Family
ID=23869822
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES0328726A Expired ES328726A1 (es) | 1965-07-12 | 1966-06-21 | Perfeccionamientos en la formacion de resistencias de pelicula delgada. |
Country Status (10)
Country | Link |
---|---|
US (1) | US3391373A (es) |
AT (1) | AT263942B (es) |
BE (1) | BE683045A (es) |
CH (1) | CH511501A (es) |
DE (1) | DE1615051A1 (es) |
ES (1) | ES328726A1 (es) |
FR (1) | FR1484134A (es) |
GB (1) | GB1153485A (es) |
NL (1) | NL6609533A (es) |
SE (1) | SE341422B (es) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3473146A (en) * | 1967-10-10 | 1969-10-14 | Trw Inc | Electrical resistor having low resistance values |
US3805210A (en) * | 1969-12-04 | 1974-04-16 | M Croset | Integrated circuit resistor and a method for the manufacture thereof |
JPS5535843B2 (es) * | 1972-12-28 | 1980-09-17 | ||
US4713529A (en) * | 1986-09-15 | 1987-12-15 | Gte Products Corporation | Electroceramic heating devices with welded leads |
JP4207951B2 (ja) * | 2005-12-06 | 2009-01-14 | Tdk株式会社 | β相Ta薄膜抵抗体及び該薄膜抵抗体を備えた薄膜磁気ヘッド |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3275915A (en) * | 1966-09-27 | Beta tantalum thin-film capacitors | ||
NL286998A (es) * | 1961-12-27 |
-
1965
- 1965-07-12 US US470981A patent/US3391373A/en not_active Expired - Lifetime
-
1966
- 1966-06-20 FR FR66111A patent/FR1484134A/fr not_active Expired
- 1966-06-21 ES ES0328726A patent/ES328726A1/es not_active Expired
- 1966-06-23 BE BE683045D patent/BE683045A/xx unknown
- 1966-07-05 DE DE19661615051 patent/DE1615051A1/de active Pending
- 1966-07-07 NL NL6609533A patent/NL6609533A/xx unknown
- 1966-07-07 GB GB30536/66A patent/GB1153485A/en not_active Expired
- 1966-07-08 CH CH992966A patent/CH511501A/de not_active IP Right Cessation
- 1966-07-11 AT AT665466A patent/AT263942B/de active
- 1966-07-11 SE SE09473/66A patent/SE341422B/xx unknown
Also Published As
Publication number | Publication date |
---|---|
SE341422B (es) | 1971-12-27 |
US3391373A (en) | 1968-07-02 |
NL6609533A (es) | 1967-01-13 |
GB1153485A (en) | 1969-05-29 |
BE683045A (es) | 1966-12-01 |
FR1484134A (fr) | 1967-06-09 |
CH511501A (de) | 1971-08-15 |
DE1615051A1 (de) | 1970-05-27 |
AT263942B (de) | 1968-08-12 |
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