ES2602205T3 - Sistema de medición óptico con compensación de polarización, así como procedimiento correspondiente - Google Patents

Sistema de medición óptico con compensación de polarización, así como procedimiento correspondiente Download PDF

Info

Publication number
ES2602205T3
ES2602205T3 ES13726550.0T ES13726550T ES2602205T3 ES 2602205 T3 ES2602205 T3 ES 2602205T3 ES 13726550 T ES13726550 T ES 13726550T ES 2602205 T3 ES2602205 T3 ES 2602205T3
Authority
ES
Spain
Prior art keywords
measurement system
differential signal
beam splitter
optical
optical measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES13726550.0T
Other languages
English (en)
Inventor
Thorbjörn BUCK
Lars Hoffmann
Mathias Müller
Rolf Wojtech
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technische Universitaet Muenchen
Original Assignee
Technische Universitaet Muenchen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technische Universitaet Muenchen filed Critical Technische Universitaet Muenchen
Application granted granted Critical
Publication of ES2602205T3 publication Critical patent/ES2602205T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
    • G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
    • G01L1/246—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre using integrated gratings, e.g. Bragg gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/042—Calibration or calibration artifacts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
    • G01D5/35316—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Bragg gratings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35303—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using a reference fibre, e.g. interferometric devices

Abstract

Procedimiento para el ajuste de un sistema de medición óptico, que comprende: - puesta a disposición de un sistema de medición óptico, que comprende como elementos ópticos: - un divisor de haz (120); - un primer fotosensor (122), que se expone a un primer haz parcial (204) del divisor de haz (120); - un filtro óptico (123); - un segundo fotosensor (124) que se encuentra en dirección de haz por detrás del filtro óptico, expuesto a un segundo haz parcial (206) del divisor de haz (120), estando configuradas la posición angular y la posición relativa entre varios de los elementos ópticos (120, 122, 123, 124) de forma ajustable; - puesta a disposición de un dispositivo para la formación de una señal diferencial a partir de la señal de los dos fotosensores (122, 124); - puesta a disposición de una fuente de luz con polarización que varía a lo largo del tiempo, - irradiación de la luz (203) en el divisor de haz (120), de manera que los dos fotosensores (122, 124) quedan expuestos respectivamente a un haz parcial (204, 206); - generación de una señal diferencial de las señales de salida de los fotosensores (122, 124); - variación de la posición y/o de la posición angular de al menos uno de los elementos ópticos (120, 122, 123, 124) y observación de la señal diferencial - determinación de la combinación de posiciones angulares/posición de los elementos (120, 122, 123, 124), en las que la señal diferencial ha alcanzado un mínimo.

Description

imagen1
imagen2
imagen3
imagen4
imagen5

Claims (1)

  1. imagen1
    imagen2
ES13726550.0T 2012-06-05 2013-06-04 Sistema de medición óptico con compensación de polarización, así como procedimiento correspondiente Active ES2602205T3 (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102012104874.6A DE102012104874B4 (de) 2012-06-05 2012-06-05 Optisches Messsystem mit Polarisationskompensation, sowie entsprechendes Verfahren
DE102012104874 2012-06-05
PCT/EP2013/061499 WO2013182567A2 (de) 2012-06-05 2013-06-04 Optisches messsystem mit polarisationskompensation, sowie entsprechendes verfahren

Publications (1)

Publication Number Publication Date
ES2602205T3 true ES2602205T3 (es) 2017-02-20

Family

ID=48570162

Family Applications (1)

Application Number Title Priority Date Filing Date
ES13726550.0T Active ES2602205T3 (es) 2012-06-05 2013-06-04 Sistema de medición óptico con compensación de polarización, así como procedimiento correspondiente

Country Status (7)

Country Link
US (1) US9383272B2 (es)
EP (1) EP2856096B1 (es)
CN (1) CN104508445B (es)
CA (1) CA2875740C (es)
DE (1) DE102012104874B4 (es)
ES (1) ES2602205T3 (es)
WO (1) WO2013182567A2 (es)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105784332B (zh) * 2016-03-25 2018-10-02 中国科学院上海光学精密机械研究所 真空压缩室光栅失调的监控调节装置及方法
US10364663B2 (en) 2016-04-01 2019-07-30 Baker Hughes, A Ge Company, Llc Downhole operational modal analysis
CN106989868B (zh) * 2017-03-02 2022-11-18 天津大学 一种减速器检测仪输出扭矩的校准方法
DE102017011730B4 (de) * 2017-12-18 2020-06-18 Hottinger Baldwin Messtechnik Gmbh Interrogator für zwei Faser-Bragg-Gitter Messstellen
US11683092B2 (en) * 2020-02-24 2023-06-20 Ciena Corporation Loss-based wavelength meter
CN113933268B (zh) * 2020-07-13 2024-03-19 中移物联网有限公司 一种光学检测装置及光学检测方法
WO2023213851A1 (de) 2022-05-04 2023-11-09 Gts Deutschland Gmbh Messverfahren zur erfassung von einer auf einen gegenstand einwirkenden mechanischen kraft, messvorrichtung mit faseroptischer sensoreinheit

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5380995A (en) * 1992-10-20 1995-01-10 Mcdonnell Douglas Corporation Fiber optic grating sensor systems for sensing environmental effects
US5397891A (en) * 1992-10-20 1995-03-14 Mcdonnell Douglas Corporation Sensor systems employing optical fiber gratings
US5748312A (en) * 1995-09-19 1998-05-05 United States Of American As Represented By The Secretary Of The Navy Sensing apparatus and method for detecting strain between fiber bragg grating sensors inscribed into an optical fiber
US5646401A (en) * 1995-12-22 1997-07-08 Udd; Eric Fiber optic grating and etalon sensor systems
DE19628200B4 (de) * 1996-07-12 2007-03-01 Deutsches Zentrum für Luft- und Raumfahrt e.V. Vorrichtung zur Durchführung interferometrischer Messungen
US5828059A (en) * 1996-09-09 1998-10-27 Udd; Eric Transverse strain measurements using fiber optic grating based sensors
US6212310B1 (en) * 1996-10-22 2001-04-03 Sdl, Inc. High power fiber gain media system achieved through power scaling via multiplexing
US6204920B1 (en) * 1996-12-20 2001-03-20 Mcdonnell Douglas Corporation Optical fiber sensor system
US6335524B1 (en) * 1997-10-22 2002-01-01 Blue Road Research High speed demodulation systems for fiber optic grating sensors
US6566648B1 (en) * 1999-03-25 2003-05-20 The United States Of America As Represented By The United States National Aeronautics And Space Administration Edge triggered apparatus and method for measuring strain in bragg gratings
US6891610B2 (en) * 2000-09-20 2005-05-10 Kla-Tencor Technologies Corp. Methods and systems for determining an implant characteristic and a presence of defects on a specimen
KR100350458B1 (ko) * 2001-01-16 2002-08-29 삼성전자 주식회사 광섬유 잔여 응력 및 포토일래스틱 효과를 측정하기 위한장치 및 그 방법
US6795599B2 (en) * 2001-05-11 2004-09-21 Vasilii V. Spirin Differential fiber optical sensor with interference energy analyzer
US7038190B2 (en) * 2001-12-21 2006-05-02 Eric Udd Fiber grating environmental sensing system
US7088441B2 (en) * 2002-09-19 2006-08-08 Mitutoyo Corporation Method and apparatus for measuring wavelength changes in a high-resolution measurement system
US6876786B2 (en) * 2002-10-02 2005-04-05 Cicese-Centro De Investigation Fiber-optic sensing system for distributed detection and localization of alarm conditions
US7004911B1 (en) * 2003-02-24 2006-02-28 Hosheng Tu Optical thermal mapping for detecting vulnerable plaque
US6943881B2 (en) * 2003-06-04 2005-09-13 Tomophase Corporation Measurements of optical inhomogeneity and other properties in substances using propagation modes of light
US7253902B2 (en) * 2004-03-31 2007-08-07 Mitutoyo Corporation Wavelength detector
GB2427910B (en) 2005-07-02 2008-03-12 Sensor Highway Ltd Fiber optic temperature and pressure sensor and system incorporating same
US7872759B2 (en) * 2005-09-29 2011-01-18 The General Hospital Corporation Arrangements and methods for providing multimodality microscopic imaging of one or more biological structures
EP2626027B1 (en) * 2007-08-14 2020-04-29 Koninklijke Philips N.V. Robotic instrument systems utilizing optical fiber sensors
CN101680781B (zh) * 2008-02-29 2011-11-23 株式会社藤仓 光频域反射测定方式的物理量测量装置、及使用了其的温度和应变的同时测量方法
US9417127B2 (en) * 2012-10-23 2016-08-16 Eric Udd Fiber grating sensor system for measuring key parameters during high speed

Also Published As

Publication number Publication date
CA2875740C (en) 2018-01-09
US9383272B2 (en) 2016-07-05
EP2856096A2 (de) 2015-04-08
EP2856096B1 (de) 2016-08-10
DE102012104874B4 (de) 2016-05-19
WO2013182567A3 (de) 2014-03-20
CN104508445A (zh) 2015-04-08
US20150146192A1 (en) 2015-05-28
CN104508445B (zh) 2016-04-13
WO2013182567A2 (de) 2013-12-12
DE102012104874A1 (de) 2013-12-05
CA2875740A1 (en) 2013-12-12

Similar Documents

Publication Publication Date Title
ES2602205T3 (es) Sistema de medición óptico con compensación de polarización, así como procedimiento correspondiente
BR112013024278A2 (pt) sistema e método de formação de imagens multiespectrais de inspeção de superfície com os mesmos
MY165181A (en) Optical coherence tomographic apparatus
CY1124065T1 (el) Διαταξη προβολης
WO2013019322A3 (en) Differential phase contrast x-ray imaging system and components
WO2014197786A3 (en) Apparatus and methods for detecting optical signals from implanted sensors
ES2611931T3 (es) Dispositivo de determinación de la velocidad del viento que incluye una pluralidad de fuentes láser
WO2012141544A3 (ko) Ｔｓｖ 측정용 간섭계 및 이를 이용한 측정방법
MX340570B (es) Aparato de imagen estereoscopica.
GB2505353A (en) Gimbal instrument having a prealigned and replaceable optics bench
GB2526038A (en) Multi-mode optical measurement device and method of operation
EP2770370A3 (en) A supercontinuum source
MX356121B (es) Sístema y método para medir dimensiones internas de un objeto mediante tomografía de coherencia óptica.
EA201291288A1 (ru) Способ и устройство измерения оптических характеристик оптически изменяемой маркировки, нанесенной на объект
AR105105A1 (es) Lidiar de alta resolución espectral multimodo
RU2015135177A (ru) Лазерное геодезическое устройство
SG152162A1 (en) An optical focus sensor, an inspection apparatus and a lithographic apparatus
JP2015049204A5 (es)
JP2014240782A5 (es)
WO2012018674A3 (en) Optics symmetrization for metrology
BR112015026575A2 (pt) sistema para reduzir reflexões de display eletrônico
BR112016001872A8 (pt) dispositivo de inspeção de ângulo de eixo óptico".
ES2531317T3 (es) Dispositivo de medición óptica de un parámetro físico
BR112015008404A2 (pt) instalação para medir a espessura da parede de recipientes transparentes ou translúcidos
MX338030B (es) Dispositivo para determinar la ubicacion de elementos mecanicos.