ES2553450T3 - Procedimiento y dispositivo para el revestimiento en continuo de sustratos - Google Patents

Procedimiento y dispositivo para el revestimiento en continuo de sustratos Download PDF

Info

Publication number
ES2553450T3
ES2553450T3 ES12746037.6T ES12746037T ES2553450T3 ES 2553450 T3 ES2553450 T3 ES 2553450T3 ES 12746037 T ES12746037 T ES 12746037T ES 2553450 T3 ES2553450 T3 ES 2553450T3
Authority
ES
Spain
Prior art keywords
substrates
procedure
substrate supports
continuous coating
coating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES12746037.6T
Other languages
English (en)
Inventor
Stefan Reber
Norbert Schillinger
David Pocza
Martin Arnold
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Application granted granted Critical
Publication of ES2553450T3 publication Critical patent/ES2553450T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
    • C23C16/4582—Rigid and flat substrates, e.g. plates or discs
    • C23C16/4587—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially vertically
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
  • Coating Apparatus (AREA)

Abstract

Procedimiento para el revestimiento en continuo de sustratos, en el que en un dispositivo de revestimiento los sustratos son transportados a través de un espacio de deposición (4) que está limitado por dos soportes de sustrato (1, 1') así como por un suelo (2) y una tapa (6), en donde el suelo (2) presenta un dispositivo (3) para guiar los soportes de sustrato (1, 1'), y los sustratos son transportados sobre los soportes de sustrato (1, 1') a través del dispositivo de revestimiento, durante el transporte se realiza el revestimiento en continuo de los sustratos, y en donde la tapa (6) está fijada a los soportes de sustrato (1, 1') y de esta manera se transporta junto con los soportes (1, 1') de sustrato mediante el dispositivo de revestimiento.

Description

imagen1
imagen2
imagen3
imagen4
imagen5

Claims (1)

  1. imagen1
    imagen2
ES12746037.6T 2011-07-07 2012-07-09 Procedimiento y dispositivo para el revestimiento en continuo de sustratos Active ES2553450T3 (es)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102011106859 2011-07-07
DE102011106859A DE102011106859A1 (de) 2011-07-07 2011-07-07 Verfahren und Vorrichtung zur kontinuierlichen Beschichtung von Substraten
PCT/EP2012/063425 WO2013004851A1 (de) 2011-07-07 2012-07-09 Verfahren und vorrichtung zur kontinuierlichen beschichtung von substraten

Publications (1)

Publication Number Publication Date
ES2553450T3 true ES2553450T3 (es) 2015-12-09

Family

ID=46650497

Family Applications (1)

Application Number Title Priority Date Filing Date
ES12746037.6T Active ES2553450T3 (es) 2011-07-07 2012-07-09 Procedimiento y dispositivo para el revestimiento en continuo de sustratos

Country Status (6)

Country Link
US (1) US9399818B2 (es)
EP (1) EP2729594B1 (es)
CN (1) CN103764870B (es)
DE (1) DE102011106859A1 (es)
ES (1) ES2553450T3 (es)
WO (1) WO2013004851A1 (es)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015118042A1 (de) 2015-10-22 2017-04-27 Nexwafe Gmbh Verfahren und Vorrichtung zum Herstellen einer Halbleiterschicht
DE102015121636A1 (de) 2015-12-11 2017-06-14 Nexwafe Gmbh Vorrichtung und Verfahren zum einseitigen Ätzen einer Halbleiterschicht
DE102016117912A1 (de) 2016-09-22 2018-03-22 Nexwafe Gmbh Verfahren zum Anordnen mehrerer Saatsubstrate an einem Trägerelement und Trägerelement mit Saatsubstraten
DE102017106373A1 (de) 2017-03-24 2018-09-27 Nexwafe Gmbh Prozesskammerführung, Prozesskammer und Verfahren zum Führen eines Substratträgers in eine Prozessposition

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN86102741A (zh) * 1986-03-17 1987-10-07 克朗纳公司 材料的沉积
JP3195492B2 (ja) * 1993-03-15 2001-08-06 株式会社神戸製鋼所 アークイオンプレーティング装置及びアークイオンプレーティングシステム
JP3615898B2 (ja) * 1997-02-28 2005-02-02 芝浦メカトロニクス株式会社 真空処理装置
DE50302862D1 (de) * 2002-05-24 2006-05-18 Schott Ag Vorrichtung für CVD-Beschichtungen
DE102005045582B3 (de) * 2005-09-23 2007-03-29 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Vorrichtung und Verfahren zur kontinuierlichen Gasphasenabscheidung unter Atmosphärendruck und deren Verwendung
DE102009038369B4 (de) * 2009-08-24 2012-05-24 Von Ardenne Anlagentechnik Gmbh Substrathalter für scheiben-oder plattenförmige Substrate und Vakuumbehandlungsanlage mit einer vertikalen Substrattransporteinrichtung

Also Published As

Publication number Publication date
CN103764870B (zh) 2016-05-18
US20140212583A1 (en) 2014-07-31
EP2729594A1 (de) 2014-05-14
EP2729594B1 (de) 2015-11-04
CN103764870A (zh) 2014-04-30
WO2013004851A1 (de) 2013-01-10
DE102011106859A8 (de) 2013-03-28
US9399818B2 (en) 2016-07-26
DE102011106859A1 (de) 2013-01-10

Similar Documents

Publication Publication Date Title
CL2014001062A1 (es) Metodo para tratar tumores del estroma gastrointestinal que comprende el uso de un inhibidor de c-hit y un inhibidor de pi3k o fgfr y combinacion que comprende a los compuestos.
ES2486615A2 (es) Formulación, resina o extruido para conformar una estructura celular aislante, polimérica y no aromática, artículo y material que se obtiene, recipiente conformado y proceso de obtención.
ES2553450T3 (es) Procedimiento y dispositivo para el revestimiento en continuo de sustratos
EP2663609A4 (en) CONNECTION FOR AN ORGANIC OPTOELECTRONIC DEVICE, ORGANIC LIGHT EMITTING DIODE THEREFOR AND DISPLAY WITH THE ORGANIC LIGHT EMITTING DIODE
TWI562995B (en) Material for organic optoelectronic device, organic light emitting diode including the same and display including the organic light emitting diode
EP2561037A4 (en) CONNECTION FOR AN OPTOELECTRONIC DEVICE, ORGANIC LIGHT EMITTING DIODE THEREFORE AND DISPLAY WITH THE ORGANIC LIGHT EMITTING DIODE
JP2013147754A5 (ja) 成膜方法および発光装置の作製方法
KR101820865B9 (ko) 유기광전자소자용 재료, 이를 포함하는 유기발광소자 및 상기 유기발광소자를 포함하는 표시장치
UY34132A (es) Terapias combinadas para el tratamiento de neoplasias malignas hematológicas utilizando inhibidores de piridopirimidinona de pi3k/mtor con bendamustina y/o rituximab.
EP2796530A4 (en) COMPOUND FOR AN ORGANIC OPTOELECTRONIC ELEMENT, ORGANIC LIGHT-EMITTING ELEMENT COMPRISING SAME, AND DISPLAY DEVICE COMPRISING THE ORGANIC LIGHT EMITTING ELEMENT
TW201614889A (en) Porous films for use in light-emitting devices
EP2508585A4 (en) CONNECTION FOR ORGANIC OPTOELECTRONIC DEVICE, ORGANIC LIGHT EMITTING DIODE THEREFOR AND DISPLAY DEVICE WITH ORGANIC LIGHT EMITTING DIODE
CL2013003650A1 (es) Composición para el tratamiento de una infección por staphylococcus aureus que contiene solo un anticuerpo anti leucocidina luke y un portador farmaceuticamente aceptable.
FR3002534B1 (fr) Substrat revetu d'un empilement bas-emissif.
ES2579339T3 (es) Máquina de cierre de bandejas con cuerpo de cinta intercambiable
ES2552517T3 (es) Luna trasera con caja de protección del sistema eléctrico
EP2796529A4 (en) CONNECTION FOR AN ORGANIC OPTOELECTRONIC DEVICE, ORGANIC LIGHT-EMITTING ELEMENT THEREFOR AND DISPLAY DEVICE WITH THE ORGANIC LIGHT-EMITTING ELEMENT
ES2525137A2 (es) Agentes para tratar el mieloma múltiple
CO6862110A2 (es) Anticuerpos anti-erbb3 en combinación con paclitaxel para el tratamiento de cánceres ginecológicos
ES2536990T3 (es) Aparato para el tratamiento de recipientes de plástico con dispositivos que reducen la fricción
CL2014000168A1 (es) Composicion para tratar un sustrato organico que comprende portador, especie preservante o biocida, menos boro, en forma de un glicolato; uso de la composicio para trara sustrato orgánico.
CL2011000367A1 (es) Sistema de recubrimiento eficiente desde el punto de vista de los recursos de una mazorca de maiz. que comprende un medio para desplazar dicha mazorca de maiz a traves del sistema y un medio para recubrir dicha mazorca de maiz con un recubrimiento; metodo para el recubrimiento de alto rendimiento de mazorcas; y maquina para el recubrimiento.
CL2015001244A1 (es) Transportadora
FI20105302A0 (fi) Järjestelmä ja menetelmä pientarvikevaraston täydentämiseksi
ES2571402T3 (es) Producto mejorado para el cuidado de heridas