ES2389734T3 - Dispositivo de medición de posición - Google Patents

Dispositivo de medición de posición Download PDF

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Publication number
ES2389734T3
ES2389734T3 ES07007787T ES07007787T ES2389734T3 ES 2389734 T3 ES2389734 T3 ES 2389734T3 ES 07007787 T ES07007787 T ES 07007787T ES 07007787 T ES07007787 T ES 07007787T ES 2389734 T3 ES2389734 T3 ES 2389734T3
Authority
ES
Spain
Prior art keywords
measuring device
position measuring
light source
carrier substrate
materialized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
ES07007787T
Other languages
English (en)
Spanish (es)
Inventor
Ulrich Benner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Application granted granted Critical
Publication of ES2389734T3 publication Critical patent/ES2389734T3/es
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
ES07007787T 2006-05-05 2007-04-17 Dispositivo de medición de posición Active ES2389734T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006021017A DE102006021017A1 (de) 2006-05-05 2006-05-05 Positionsmesseinrichtung
DE102006021017 2006-05-05

Publications (1)

Publication Number Publication Date
ES2389734T3 true ES2389734T3 (es) 2012-10-31

Family

ID=38288545

Family Applications (1)

Application Number Title Priority Date Filing Date
ES07007787T Active ES2389734T3 (es) 2006-05-05 2007-04-17 Dispositivo de medición de posición

Country Status (6)

Country Link
US (1) US7473886B2 (OSRAM)
EP (1) EP1852684B1 (OSRAM)
JP (1) JP4982242B2 (OSRAM)
CN (1) CN101067560B (OSRAM)
DE (1) DE102006021017A1 (OSRAM)
ES (1) ES2389734T3 (OSRAM)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006021017A1 (de) * 2006-05-05 2007-11-08 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102007028943A1 (de) 2007-06-22 2008-12-24 Dr. Johannes Heidenhain Gmbh Abtasteinheit für eine optische Positionsmesseinrichtung
DE102008025870A1 (de) * 2008-05-31 2009-12-03 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
DE102009001262A1 (de) * 2009-03-02 2010-09-09 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
DE102010028725B4 (de) 2010-05-07 2023-05-25 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung
US8982361B2 (en) * 2010-08-19 2015-03-17 Elesta Relays Gmbh Position measuring device
WO2012050130A1 (ja) * 2010-10-12 2012-04-19 株式会社ニコン エンコーダ、駆動装置及びロボット装置
US9383229B2 (en) 2010-10-31 2016-07-05 Avego Technologies General Ip (Singapore) Pte. Ltd. Optical reflective encoder with multi-faceted flat-faced lens
DE102011007459B4 (de) * 2011-04-15 2023-05-11 Dr. Johannes Heidenhain Gmbh Optische Längenmesseinrichtung
DE102011082570A1 (de) * 2011-09-13 2013-03-14 Dr. Johannes Heidenhain Gmbh Rotatorische Positionsmesseinrichtung
CN102325233A (zh) * 2011-10-10 2012-01-18 朱杰 带有多扫描阵列的接触式图像传感器
ES2618855T3 (es) * 2014-10-14 2017-06-22 Dr. Johannes Heidenhain Gmbh Dispositivo de medición de posición con dispositivo para la compensación de errores por dilatación térmica de una regla graduada
DE102015219810A1 (de) * 2015-10-13 2017-04-13 Dr. Johannes Heidenhain Gmbh X-Y-Tisch mit einer Positionsmesseinrichtung
TW201741618A (zh) * 2016-05-23 2017-12-01 國立交通大學 光學感測裝置
GB201916641D0 (en) 2019-11-15 2020-01-01 Renishaw Plc Position measurement device
GB201916662D0 (en) * 2019-11-15 2020-01-01 Renishaw Plc Encoder apparatus

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5317149A (en) * 1992-11-12 1994-05-31 Hewlett-Packard Company Optical encoder with encapsulated electrooptics
US6424407B1 (en) * 1998-03-09 2002-07-23 Otm Technologies Ltd. Optical translation measurement
CN1144063C (zh) * 1998-03-09 2004-03-31 葛莱特有限公司 光学平移测量
JP4812189B2 (ja) * 2001-06-15 2011-11-09 オリンパス株式会社 光学式検出装置
US6723980B2 (en) * 2001-07-16 2004-04-20 Wai-Hon Lee Position sensor with grating to detect moving object with periodic pattern
JP4658452B2 (ja) * 2003-02-07 2011-03-23 オリンパス株式会社 光学式エンコーダ
JP4021382B2 (ja) * 2003-07-28 2007-12-12 オリンパス株式会社 光学式エンコーダ及びその製造方法並びに光学レンズモジュール
US20070120048A1 (en) * 2005-11-25 2007-05-31 Lum Chee F Reflective encoder module
DE102006021017A1 (de) * 2006-05-05 2007-11-08 Dr. Johannes Heidenhain Gmbh Positionsmesseinrichtung

Also Published As

Publication number Publication date
DE102006021017A1 (de) 2007-11-08
US20070262250A1 (en) 2007-11-15
CN101067560A (zh) 2007-11-07
EP1852684B1 (de) 2012-08-15
CN101067560B (zh) 2011-08-03
US7473886B2 (en) 2009-01-06
EP1852684A1 (de) 2007-11-07
JP4982242B2 (ja) 2012-07-25
JP2007298522A (ja) 2007-11-15

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