ES2182861T3 - Captador piezoelectrico de la aceleracion. - Google Patents

Captador piezoelectrico de la aceleracion.

Info

Publication number
ES2182861T3
ES2182861T3 ES95117202T ES95117202T ES2182861T3 ES 2182861 T3 ES2182861 T3 ES 2182861T3 ES 95117202 T ES95117202 T ES 95117202T ES 95117202 T ES95117202 T ES 95117202T ES 2182861 T3 ES2182861 T3 ES 2182861T3
Authority
ES
Spain
Prior art keywords
substrate
support
flexion element
contact
acceleration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES95117202T
Other languages
English (en)
Inventor
Thomas Ohgke
Dieter Nagele
Gerald Brinks
Manfred Weinacht
Viktor Tiederle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Conti Temic Microelectronic GmbH
Original Assignee
Conti Temic Microelectronic GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Conti Temic Microelectronic GmbH filed Critical Conti Temic Microelectronic GmbH
Application granted granted Critical
Publication of ES2182861T3 publication Critical patent/ES2182861T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
    • G01P15/0922—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up of the bending or flexing mode type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Micromachines (AREA)

Abstract

SE DESCRIBE UN RECEPTOR DE ACELERACION PIEZOELECTRICO, QUE ESTA MONTADO POR MEDIO DE UN SOPORTE MECANICAMENTE SOBRE UN SUBSTRATO DE TAL MODO, QUE EL EJE DE SENSIBILIDAD PRINCIPAL DEL ELEMENTO DE FLEXION SE ENCUENTRA EN EL PLANO DEL SUBSTRATO. EL SOPORTE SIRVE AL MISMO TIEMPO PARA EL CONTACTADO ELECTRICO DEL ELEMENTO DE FLEXION, DONDE EL CONTACTO MECANICO ESTA CONFIGURADO COMO UNION ELECTRICA. LA VENTAJA DE UN RECEPTOR DE ACELERACION DE ESTE TIPO EN CONTRA DE UN SENSOR CONOCIDO SE ENCUENTRA EN UN BUEN DESACOPLAMIENTO MECANICO Y TERMICO Y EN UN CONTACTADO SENCILLO DEL ELEMENTO DE FLEXION AL SUBSTRATO MEDIANTE SUPRESION DEL FONDO DE ALAMBRE Y FINALMENTE CONSIDERANDO TAMBIEN LA SUPRESION DE DISPOSITIVOS DE MONTAJE MECANICOS COSTOSOS.
ES95117202T 1994-11-10 1995-11-02 Captador piezoelectrico de la aceleracion. Expired - Lifetime ES2182861T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4440078A DE4440078A1 (de) 1994-11-10 1994-11-10 Piezoelektrischer Beschleunigungsaufnehmer

Publications (1)

Publication Number Publication Date
ES2182861T3 true ES2182861T3 (es) 2003-03-16

Family

ID=6532916

Family Applications (1)

Application Number Title Priority Date Filing Date
ES95117202T Expired - Lifetime ES2182861T3 (es) 1994-11-10 1995-11-02 Captador piezoelectrico de la aceleracion.

Country Status (5)

Country Link
US (1) US5631421A (es)
EP (1) EP0712005B1 (es)
JP (1) JPH08220130A (es)
DE (2) DE4440078A1 (es)
ES (1) ES2182861T3 (es)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5732289A (en) * 1993-12-28 1998-03-24 Nikon Corporation Detecting apparatus
US6050144A (en) 1997-06-04 2000-04-18 Matsushita Electric Industrial Co., Ltd. Acceleration sensor
US6898550B1 (en) * 1997-10-02 2005-05-24 Fitsense Technology, Inc. Monitoring activity of a user in locomotion on foot
US6336365B1 (en) * 1999-08-24 2002-01-08 Personal Electronic Devices, Inc. Low-cost accelerometer
DE19816802C2 (de) * 1998-04-16 2000-08-31 Daimler Chrysler Ag Piezoelektrischer Beschleunigungssensor
DE19962623B4 (de) * 1999-12-23 2009-09-10 Continental Automotive Gmbh Sensoreinrichtung
AU2002255568B8 (en) 2001-02-20 2014-01-09 Adidas Ag Modular personal network systems and methods
CA2366030A1 (en) * 2001-12-20 2003-06-20 Global E Bang Inc. Profiling system
US20070121423A1 (en) * 2001-12-20 2007-05-31 Daniel Rioux Head-mounted display apparatus for profiling system
JP2005106584A (ja) * 2003-09-30 2005-04-21 Mitsubishi Electric Corp 加速度センサユニット
FR2883073B1 (fr) * 2005-03-09 2009-07-10 Commissariat Energie Atomique Procede et dispositif d'acquisition d'une forme geometrique.
US8386042B2 (en) * 2009-11-03 2013-02-26 Medtronic Minimed, Inc. Omnidirectional accelerometer device and medical device incorporating same
WO2017093099A1 (de) 2015-12-04 2017-06-08 Kistler Holding Ag Beschleunigungs-messgerät und verfahren zur herstellung eines solchen beschleunigungs-messgerätes
CN111059206A (zh) * 2019-12-28 2020-04-24 中国科学院沈阳自动化研究所 一种柔性太阳翼支承结构的压电主动减振装置

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3167668A (en) * 1961-10-02 1965-01-26 Nesh Florence Piezoelectric transducers
US3609417A (en) * 1970-01-20 1971-09-28 Matsushita Electric Ind Co Ltd Piezoelectric ceramic ring resonator
DK138768B (da) * 1976-03-29 1978-10-23 Brueel & Kjaer As Elektromekanisk kraftmåler.
JPS6038049B2 (ja) * 1978-06-02 1985-08-29 能登電子工業株式会社 圧電装置
DE2846371A1 (de) * 1978-10-25 1980-05-08 Bosch Gmbh Robert Beschleunigungsaufnehmer zum ausloesen von sicherheitseinrichtungen
DD144482A1 (de) * 1979-07-13 1980-10-15 Guenther Steimann Piezoelektrischer beschleunigungsaufnehmer
DE3328114A1 (de) * 1983-08-04 1985-02-14 Robert Bosch Gmbh, 7000 Stuttgart Ausloesevorrichtung fuer rueckhaltesysteme in kraftfahrzeugen
ATE75054T1 (de) * 1987-06-18 1992-05-15 Kellett Michael A Akzelerometer und zugehoerige steuerschaltungen.
JPH0274868A (ja) * 1988-09-09 1990-03-14 Nissan Motor Co Ltd 圧電型力学量センサ
KR930001165Y1 (ko) * 1989-05-24 1993-03-13 미쓰비시덴키 가부시키가이샤 가속도 센서
DE69104349T2 (de) * 1990-02-14 1995-05-24 Endevco Corp Oberflächenmontierbarer piezokeramischer beschleunigungsmesser sowie verfahren zu seiner herstellung.
DE9116730U1 (de) * 1991-09-28 1993-11-11 DaimlerChrysler Aerospace Aktiengesellschaft, 80995 München Beschleunigungssensor mit integrierter Empfindlichkeitskontrolle
DE4135369A1 (de) * 1991-10-26 1993-05-13 Bosch Gmbh Robert Testbarer piezoelektrischer beschleunigungssensor
EP0572657B1 (en) * 1991-12-23 1998-08-05 Elf Atochem North America, Inc. Multi-mode accelerometer
JPH06148228A (ja) * 1992-10-30 1994-05-27 Fujikura Ltd 圧電型振動センサ装置
DE69414739T2 (de) * 1993-03-19 1999-07-01 Murata Mfg. Co., Ltd., Nagaokakyo, Kyoto Beschleunigungsmessaufnehmer

Also Published As

Publication number Publication date
EP0712005A2 (de) 1996-05-15
US5631421A (en) 1997-05-20
DE4440078A1 (de) 1996-05-15
DE59510401D1 (de) 2002-11-07
EP0712005B1 (de) 2002-10-02
JPH08220130A (ja) 1996-08-30
EP0712005A3 (de) 1998-08-12

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