ES2137847B1 - Acelerometro triaxial. - Google Patents

Acelerometro triaxial.

Info

Publication number
ES2137847B1
ES2137847B1 ES9701154A ES9701154A ES2137847B1 ES 2137847 B1 ES2137847 B1 ES 2137847B1 ES 9701154 A ES9701154 A ES 9701154A ES 9701154 A ES9701154 A ES 9701154A ES 2137847 B1 ES2137847 B1 ES 2137847B1
Authority
ES
Spain
Prior art keywords
bridges
triaxial accelerometer
external
technologies
masses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
ES9701154A
Other languages
English (en)
Other versions
ES2137847A1 (es
Inventor
Plaza Jose Antonio Plaza
I Tinto Jaume Esteve
D Ocon Emilio Lora-Tamayo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Consejo Superior de Investigaciones Cientificas CSIC
Original Assignee
Consejo Superior de Investigaciones Cientificas CSIC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Consejo Superior de Investigaciones Cientificas CSIC filed Critical Consejo Superior de Investigaciones Cientificas CSIC
Priority to ES9701154A priority Critical patent/ES2137847B1/es
Publication of ES2137847A1 publication Critical patent/ES2137847A1/es
Application granted granted Critical
Publication of ES2137847B1 publication Critical patent/ES2137847B1/es
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

Acelerómetro triaxial. Acelerómetro triaxial que combina en su fabricación tecnologías de micro mecanización en volumen de silicio con tecnologías de micro mecanización superficial, utilizando obleas tipo BESOI (Bond and Etch Back Silicon On Insulator), y con una estructura que consiste en dos masas unidas por uno o varios puentes entre si y cada una de las cuales unidas al marco del dispositivo por dos puentes exteriores, colocando piezoresistencias en los puentes centrales y exteriores que formen un puente de Wheatstone, y siendo los puentes exteriores perpendiculares a los dos puentes que unen las masas. Aplicaciones en medicina, navegación y campos relacionados.
ES9701154A 1997-05-28 1997-05-28 Acelerometro triaxial. Expired - Fee Related ES2137847B1 (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ES9701154A ES2137847B1 (es) 1997-05-28 1997-05-28 Acelerometro triaxial.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES9701154A ES2137847B1 (es) 1997-05-28 1997-05-28 Acelerometro triaxial.

Publications (2)

Publication Number Publication Date
ES2137847A1 ES2137847A1 (es) 1999-12-16
ES2137847B1 true ES2137847B1 (es) 2000-10-01

Family

ID=8299471

Family Applications (1)

Application Number Title Priority Date Filing Date
ES9701154A Expired - Fee Related ES2137847B1 (es) 1997-05-28 1997-05-28 Acelerometro triaxial.

Country Status (1)

Country Link
ES (1) ES2137847B1 (es)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5095401A (en) * 1989-01-13 1992-03-10 Kopin Corporation SOI diaphragm sensor
WO1992015018A1 (en) * 1991-02-14 1992-09-03 Endevco Corporation Piezoresistive accelerometer and method of fabrication
US5121180A (en) * 1991-06-21 1992-06-09 Texas Instruments Incorporated Accelerometer with central mass in support
JP3303038B2 (ja) * 1993-12-02 2002-07-15 日本航空電子工業株式会社 ３軸検出ブリッジ型加速度センサ
JPH0945937A (ja) * 1995-07-26 1997-02-14 Matsushita Electric Works Ltd ３軸加速度センサの製造方法

Also Published As

Publication number Publication date
ES2137847A1 (es) 1999-12-16

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