CN104359547B - 差动隔振式mems矢量水听器 - Google Patents
差动隔振式mems矢量水听器 Download PDFInfo
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- CN104359547B CN104359547B CN201410626399.4A CN201410626399A CN104359547B CN 104359547 B CN104359547 B CN 104359547B CN 201410626399 A CN201410626399 A CN 201410626399A CN 104359547 B CN104359547 B CN 104359547B
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CN104359547A CN104359547A (zh) | 2015-02-18 |
CN104359547B true CN104359547B (zh) | 2017-01-11 |
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Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
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CN107063438B (zh) * | 2017-03-10 | 2023-04-28 | 中北大学 | 基于压电效应的mems三维同振型矢量水听器 |
CN106706108B (zh) * | 2017-03-10 | 2023-04-28 | 中北大学 | 基于压电效应的mems同振型球形振子矢量水听器 |
CN110261894A (zh) * | 2019-07-29 | 2019-09-20 | 南昌航空大学 | 一种二维仿生矢量水听器 |
CN112903088B (zh) * | 2021-01-18 | 2023-06-02 | 中国兵器工业集团第二一四研究所苏州研发中心 | “十”字形敏感结构mems仿生矢量声波传感器及其加工方法 |
CN113029321B (zh) * | 2021-02-26 | 2023-08-04 | 中国兵器工业集团第二一四研究所苏州研发中心 | 可抑制振动干扰的电容式mems矢量声波传感器及其加工方法 |
US11761977B1 (en) | 2022-04-29 | 2023-09-19 | Invensense, Inc. | MEMS design with shear force rejection for reduced offset |
CN116577523B (zh) * | 2023-07-13 | 2023-09-22 | 中北大学 | 一种基于振动微球的加速度传感器及制备方法 |
CN118188730A (zh) * | 2024-04-09 | 2024-06-14 | 崂山国家实验室 | 一种矢量水听器用声学减振装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN102103013A (zh) * | 2010-12-10 | 2011-06-22 | 中北大学 | 三维矢量水听器 |
CN102426054A (zh) * | 2011-10-29 | 2012-04-25 | 中北大学 | 单片集成复合量程矢量水听器 |
CN103064060A (zh) * | 2012-12-20 | 2013-04-24 | 中北大学 | 四元列阵mems矢量水听器微结构 |
CN104121984A (zh) * | 2014-08-16 | 2014-10-29 | 中北大学 | 一种高灵敏度谐振式mems矢量水听器结构 |
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102103013A (zh) * | 2010-12-10 | 2011-06-22 | 中北大学 | 三维矢量水听器 |
CN102426054A (zh) * | 2011-10-29 | 2012-04-25 | 中北大学 | 单片集成复合量程矢量水听器 |
CN103064060A (zh) * | 2012-12-20 | 2013-04-24 | 中北大学 | 四元列阵mems矢量水听器微结构 |
CN104121984A (zh) * | 2014-08-16 | 2014-10-29 | 中北大学 | 一种高灵敏度谐振式mems矢量水听器结构 |
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