ES2117232T3 - Dispositivo y procedimiento de inyeccion para la formacion de una atmosfera controlada en un espacio confinado. - Google Patents

Dispositivo y procedimiento de inyeccion para la formacion de una atmosfera controlada en un espacio confinado.

Info

Publication number
ES2117232T3
ES2117232T3 ES94402786T ES94402786T ES2117232T3 ES 2117232 T3 ES2117232 T3 ES 2117232T3 ES 94402786 T ES94402786 T ES 94402786T ES 94402786 T ES94402786 T ES 94402786T ES 2117232 T3 ES2117232 T3 ES 2117232T3
Authority
ES
Spain
Prior art keywords
formation
confined space
controlled atmosphere
gas injection
injection procedure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES94402786T
Other languages
English (en)
Inventor
Marc Leturmy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9454271&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ES2117232(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Application granted granted Critical
Publication of ES2117232T3 publication Critical patent/ES2117232T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00—Forming, maintaining or circulating atmospheres in heating chambers
    • F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K3/00—Tools, devices or special appurtenances for soldering, e.g. brazing, or unsoldering, not specially adapted for particular methods
    • B23K3/06—Solder feeding devices; Solder melting pans
    • B23K3/0646—Solder baths
    • B23K3/0653—Solder baths with wave generating means, e.g. nozzles, jets, fountains

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Furnace Details (AREA)
  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Measuring Volume Flow (AREA)
  • Structure Of Emergency Protection For Nuclear Reactors (AREA)
  • Endoscopes (AREA)

Abstract

LA INVENCION SE REFIERE A UN DISPOSITIVO DE INYECCION DE GAS PARA LA FORMACION DE UNA ATMOSFERA CONTROLADA EN UN ESPACIO CONFINADO, QUE COMPRENDE AL MENOS UN CONJUNTO DE CANALIZACIONES MONTADAS EN SERIE Y/O EN PARALELO, AL MENOS UNA PARTE DE (2) DE CANALIZACION COMPRENDE ORIFICIOS DE INYECCION DE GAS, ESTANDO DICHO CONJUNTO ALIMENTADO POR AL MENOS UN CONDUCTO DE TRAIDA DE GAS (9), ESTANDO CONECTADO CADA CONDUCTO AL CONJUNTO DE UN NUDO PRIMARIO (8) DE CONEXION, RESPETANDO EL DIMENSIONAMIENTO DEL CONJUNTO A LA SIGUIENTE RELACION: SUMATORIO/OMEGA/L/SUMATORIO/FI/L SUPERIOR O IGUAL A 1, PREFERENTEMENTE SUPERIOR O IGUAL A 1,5; DONDE SUMATORIO/OMEGA/L REPRESENTA LA SUMA DE LAS SECCIONES INTERNAS DE LOS CONDUCTOS DE TRAIDA DE GAS QUE ALIMENTAN EL CONJUNTO Y SUMATORIO/FI/L REPRESENTA LA SUMA DE LAS SECCIONES DE LOS ORIFICIOS DE INYECCION DE GAS DEL CONJUNTO DE CANALIZACIONES.
ES94402786T 1993-12-22 1994-12-05 Dispositivo y procedimiento de inyeccion para la formacion de una atmosfera controlada en un espacio confinado. Expired - Lifetime ES2117232T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9315503A FR2713952B1 (fr) 1993-12-22 1993-12-22 Dispositif et procédé d'injection de gaz pour la formation d'une atmosphère contrôlée dans un espace confiné.

Publications (1)

Publication Number Publication Date
ES2117232T3 true ES2117232T3 (es) 1998-08-01

Family

ID=9454271

Family Applications (1)

Application Number Title Priority Date Filing Date
ES94402786T Expired - Lifetime ES2117232T3 (es) 1993-12-22 1994-12-05 Dispositivo y procedimiento de inyeccion para la formacion de una atmosfera controlada en un espacio confinado.

Country Status (8)

Country Link
US (1) US5569075A (es)
EP (1) EP0659515B1 (es)
JP (1) JPH0819859A (es)
CN (1) CN1076240C (es)
DE (1) DE69410964T2 (es)
DK (1) DK0659515T3 (es)
ES (1) ES2117232T3 (es)
FR (1) FR2713952B1 (es)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19749185A1 (de) * 1997-11-07 1999-05-12 Messer Griesheim Gmbh Mit einer Gasversorgung verbindbare Gasverteilung
GB9801996D0 (en) * 1998-01-30 1998-03-25 Boc Group Plc Furnace brazing
FR2782068B1 (fr) 1998-08-05 2000-09-08 Air Liquide Procede et dispositif de stockage d'articles sous atmosphere
US6270705B1 (en) 1999-02-16 2001-08-07 Praxair Technology, Inc. Method and system for inerting polymeric film producing machines
DE19937513B4 (de) * 1999-08-09 2004-05-06 Infineon Technologies Ag Vorrichtungen und Verfahren zur gleichverteilten Gasinjektion bei der Behandlung von Halbleitersubstraten
FR2835917B1 (fr) * 2002-02-12 2004-07-09 Air Liquide Installation de mesure de mouillabilite
US6866182B2 (en) * 2002-10-08 2005-03-15 Asm Technology Singapore Pte Ltd. Apparatus and method to prevent oxidation of electronic devices
FR2847030B1 (fr) 2002-11-08 2005-12-02 Air Liquide Procede de sechage de matieres humides, notamment de boues, sans risque d'explosion
US6963044B2 (en) * 2003-10-08 2005-11-08 General Electric Compnay Coating apparatus and processes for forming low oxide coatings
US7182793B2 (en) * 2004-01-22 2007-02-27 Asm Technology Singapore Pty Ltd. System for reducing oxidation of electronic devices
US7504643B2 (en) * 2005-12-22 2009-03-17 Asml Netherlands B.V. Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
US7495239B2 (en) * 2005-12-22 2009-02-24 Asml Netherlands B.V. Method for cleaning a lithographic apparatus module, a cleaning arrangement and a lithographic apparatus comprising the cleaning arrangement
FR2926233B1 (fr) * 2008-01-10 2010-08-13 Air Liquide Dispositif d'alimentation en gaz d'une machine de brasage ou etamage a la vague.
US20140027495A1 (en) * 2012-04-18 2014-01-30 Air Products And Chemicals Inc. Apparatus And Method For Providing An Inerting Gas During Soldering
CN103212761B (zh) * 2012-06-26 2015-05-06 深圳市堃琦鑫华股份有限公司 一种焊接方法
SG10201405819TA (en) * 2013-09-27 2015-04-29 Air Prod & Chem Apparatus and method for providing an inerting gas during soldering
CN106881517A (zh) * 2017-03-30 2017-06-23 北京康普锡威科技有限公司 二氧化碳气体保护的电子产品焊接方法
CN118558678A (zh) * 2023-12-26 2024-08-30 拓荆创益(沈阳)半导体设备有限公司 一种管路吹扫组件、管路吹扫方法和半导体加工设备

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE676270C (de) * 1935-12-05 1939-05-31 Aeg Vorrichtung zum Zerteilen von Gasen in Fluessigkeiten
US3597833A (en) * 1969-09-03 1971-08-10 Gen Electric Method of performing a brazing operation on terminal structure of metal braid
JPS5299132A (en) * 1976-02-13 1977-08-19 Shiyouji Tomita Crossward game
JPS5395854A (en) * 1977-02-02 1978-08-22 Asahi Glass Co Ltd Method and apparatus for soldering with no flux
US4448616A (en) * 1981-07-20 1984-05-15 Union Carbide Corporation Process for reducing backmixing
DE3434669A1 (de) * 1984-09-21 1986-04-03 Helmut Grassinger Landtechnik GmbH, 7989 Argenbühl Verfahren und vorrichtung zum umwaelzen einer fluessigkeit
US4580716A (en) * 1984-10-17 1986-04-08 Rca Corporation Apparatus and method for vapor phase solder reflow
JPH03142065A (ja) * 1989-10-25 1991-06-17 Furukawa Alum Co Ltd 気相ろう付方法
US5121874A (en) * 1989-11-22 1992-06-16 Electrovert Ltd. Shield gas wave soldering
FR2670986B1 (fr) * 1990-12-20 1996-08-02 Air Liquide Dispositif d'inertage de bain de soudure d'une machine de soudage a la vague.
GB9121003D0 (en) * 1991-10-03 1991-11-13 Boc Group Plc Soldering
US5203489A (en) * 1991-12-06 1993-04-20 Electrovert Ltd. Gas shrouded wave soldering
US5364007A (en) * 1993-10-12 1994-11-15 Air Products And Chemicals, Inc. Inert gas delivery for reflow solder furnaces
US5393948A (en) * 1994-04-11 1995-02-28 Martin Marietta Open faced trailing welding shield

Also Published As

Publication number Publication date
FR2713952B1 (fr) 1996-01-12
US5569075A (en) 1996-10-29
EP0659515B1 (fr) 1998-06-10
FR2713952A1 (fr) 1995-06-23
EP0659515A1 (fr) 1995-06-28
DK0659515T3 (da) 1998-10-12
JPH0819859A (ja) 1996-01-23
DE69410964D1 (de) 1998-07-16
CN1117565A (zh) 1996-02-28
DE69410964T2 (de) 1998-12-10
CN1076240C (zh) 2001-12-19

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