ES2093070T3 - Metodo y aparato para efectuar mediciones de resistencia en un elemento semiconductor. - Google Patents

Metodo y aparato para efectuar mediciones de resistencia en un elemento semiconductor.

Info

Publication number
ES2093070T3
ES2093070T3 ES91201794T ES91201794T ES2093070T3 ES 2093070 T3 ES2093070 T3 ES 2093070T3 ES 91201794 T ES91201794 T ES 91201794T ES 91201794 T ES91201794 T ES 91201794T ES 2093070 T3 ES2093070 T3 ES 2093070T3
Authority
ES
Spain
Prior art keywords
resistance measurements
conductors
semiconductive element
perform resistance
semiconductor element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91201794T
Other languages
English (en)
Spanish (es)
Inventor
Wilfried Vandervorst
Marc Meuris
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Interuniversitair Microelektronica Centrum vzw IMEC
Original Assignee
Interuniversitair Microelektronica Centrum vzw IMEC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from NL9002749A external-priority patent/NL9002749A/nl
Application filed by Interuniversitair Microelektronica Centrum vzw IMEC filed Critical Interuniversitair Microelektronica Centrum vzw IMEC
Application granted granted Critical
Publication of ES2093070T3 publication Critical patent/ES2093070T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y35/00—Methods or apparatus for measurement or analysis of nanostructures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/20—Measuring earth resistance; Measuring contact resistance, e.g. of earth connections, e.g. plates
    • G01R27/205—Measuring contact resistance of connections, e.g. of earth connections
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2648—Characterising semiconductor materials

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
ES91201794T 1990-07-09 1991-07-09 Metodo y aparato para efectuar mediciones de resistencia en un elemento semiconductor. Expired - Lifetime ES2093070T3 (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP90201853 1990-07-09
NL9002749A NL9002749A (nl) 1990-07-09 1990-12-13 Werkwijze en inrichting voor weerstandsmetingen aan een halfgeleiderelement.

Publications (1)

Publication Number Publication Date
ES2093070T3 true ES2093070T3 (es) 1996-12-16

Family

ID=26125945

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91201794T Expired - Lifetime ES2093070T3 (es) 1990-07-09 1991-07-09 Metodo y aparato para efectuar mediciones de resistencia en un elemento semiconductor.

Country Status (5)

Country Link
JP (1) JP3069129B2 (fr)
AT (1) ATE144328T1 (fr)
DE (1) DE69122681T2 (fr)
ES (1) ES2093070T3 (fr)
WO (1) WO1992001233A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2916856B1 (fr) * 2007-06-01 2009-12-04 Commissariat Energie Atomique Dispositif de mesure de resistivite de contact metal/semi-conducteur.

Also Published As

Publication number Publication date
JP3069129B2 (ja) 2000-07-24
ATE144328T1 (de) 1996-11-15
DE69122681D1 (de) 1996-11-21
DE69122681T2 (de) 1997-03-06
JPH05502947A (ja) 1993-05-20
WO1992001233A1 (fr) 1992-01-23

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