ES2084886T3 - Catodo para recubrir un substrato. - Google Patents
Catodo para recubrir un substrato.Info
- Publication number
- ES2084886T3 ES2084886T3 ES92111759T ES92111759T ES2084886T3 ES 2084886 T3 ES2084886 T3 ES 2084886T3 ES 92111759 T ES92111759 T ES 92111759T ES 92111759 T ES92111759 T ES 92111759T ES 2084886 T3 ES2084886 T3 ES 2084886T3
- Authority
- ES
- Spain
- Prior art keywords
- target
- coating chamber
- coating
- catode
- fund
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3488—Constructional details of particle beam apparatus not otherwise provided for, e.g. arrangement, mounting, housing, environment; special provisions for cleaning or maintenance of the apparatus
- H01J37/3497—Temperature of target
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
- H01J37/3408—Planar magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
- H01J37/3455—Movable magnets
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3411—Constructional aspects of the reactor
- H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
- H01J37/3458—Electromagnets in particular for cathodic sputtering apparatus
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electromagnetism (AREA)
- Physical Vapour Deposition (AREA)
Abstract
EN UN CATODO PARA EL REVESTIMIENTO DE UN SUBSTRATO (46), EL CUAL ESTA CONECTADO A UNA FUENTE DE CORRIENTE CONTINUA Y/O CORRIENTE ALTERNA (ALTA FRECUENCIA), Y ESTA DISPUESTO EN UNA CAMARA DE REVESTIMIENTO (2) EVACUABLE, Y EN CONTACTO ELECTRICO CON UN TARGET (29), Y QUE EL CATODO ESTA FORMADO ESENCIALMENTE DE UNA CARCASA (3) EN FORMA DE OLLA, CUYO FONDO CERRADO (58) CON SU SUPERFICIE EXTERIOR ESTA UNIDA RIGIDAMENTE CON EL TARGET (29), Y EL EXTREMO ABIERTO ORIENTADO HACIA EL TARGET (29), ESTA FIJADO DE FORMA HERMETICA EN UNA ABERTURA (48) EN LA PARED EXTERIOR (30) DE LA CAMARA DE REVESTIMIENTO (2) DE TAL MODO QUE, EL RECINTO INTERIOR (49) DE LA CARCASA (3) ESTA SIEMPRE SOMETIDO A LA PRESION ATMOSFERICA, MIENTRAS QUE EL TARGET (29) Y LA SUPERFICIE EXTERIOR (62), UNIDA CON LA PARTE DE LA CARCASA (3) EN FORMA DE CASQUILLO, INTRODUCIDA EN LA CAMARA DE REVESTIMIENTO (2), ESTAN SOMETIDOS POR LA RESPECTIVA PRESION EJERCIDA EN LA CAMARA DE REVESTIMIENTO (2), EN EL QUE EN EL RECINTO INTERIOR (49) DE LACARCASA (3), SE HA PREVISTO AL MENOS PARCIALMENTE LA INCORPORACION DE UN SUPLEMENTO (8), EL CUAL FORMA CON EL FONDO (58) UN ESPACIO CASI CILINDRICO CIRCULAR, EN EL CUAL PUEDE SER EMPLAZADO UN JUEGO DE IMANES (5, 4, 61) CON YUGO.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19914143135 DE4143135A1 (de) | 1991-11-14 | 1991-12-28 | Kathode zum beschichten eines substrats |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2084886T3 true ES2084886T3 (es) | 1996-05-16 |
Family
ID=6448213
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES92111759T Expired - Lifetime ES2084886T3 (es) | 1991-12-28 | 1992-07-10 | Catodo para recubrir un substrato. |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP0549854B1 (es) |
DE (1) | DE59205763D1 (es) |
ES (1) | ES2084886T3 (es) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4329155A1 (de) * | 1993-08-30 | 1995-03-02 | Bloesch W Ag | Magnetfeldkathode |
DE19508406A1 (de) * | 1995-03-09 | 1996-09-12 | Leybold Ag | Kathodenanordnung für eine Vorrichtung zum Zerstäuben eines Target-Paares |
US5683560A (en) * | 1995-07-08 | 1997-11-04 | Balzers Und Leybold Deutschland Holding Ag | Cathode assembly |
DE19913382C2 (de) | 1998-03-24 | 2002-08-14 | Quantum Corp | Mehrkanaliges Magnetbandsystem mit einem optischen Spur-Servo |
WO2000049604A1 (fr) | 1999-02-16 | 2000-08-24 | Quantum Corporation | Procede d'ecriture de signaux d'asservissement sur une bande magnetique |
WO2000049605A1 (fr) | 1999-02-17 | 2000-08-24 | Quantum Corporation | Procede d'ecriture de signaux d'asservissement sur une bande magnetique |
US6558774B1 (en) | 1999-08-17 | 2003-05-06 | Quantum Corporation | Multiple-layer backcoating for magnetic tape |
US6264804B1 (en) | 2000-04-12 | 2001-07-24 | Ske Technology Corp. | System and method for handling and masking a substrate in a sputter deposition system |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4401539A (en) * | 1981-01-30 | 1983-08-30 | Hitachi, Ltd. | Sputtering cathode structure for sputtering apparatuses, method of controlling magnetic flux generated by said sputtering cathode structure, and method of forming films by use of said sputtering cathode structure |
DE3727901A1 (de) * | 1987-08-21 | 1989-03-02 | Leybold Ag | Zerstaeubungskathode nach dem magnetronprinzip |
DE3812379A1 (de) * | 1988-04-14 | 1989-10-26 | Leybold Ag | Zerstaeubungskathode nach dem magnetron-prinzip |
DE4137483A1 (de) * | 1991-11-14 | 1993-05-19 | Leybold Ag | Kathode zum beschichten eines substrats |
-
1992
- 1992-07-10 ES ES92111759T patent/ES2084886T3/es not_active Expired - Lifetime
- 1992-07-10 DE DE59205763T patent/DE59205763D1/de not_active Expired - Fee Related
- 1992-07-10 EP EP92111759A patent/EP0549854B1/de not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
EP0549854B1 (de) | 1996-03-20 |
EP0549854A1 (de) | 1993-07-07 |
DE59205763D1 (de) | 1996-04-25 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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