ES2083014T3 - Procedimiento para la fabricacion de estructuras en forma de cuña. - Google Patents

Procedimiento para la fabricacion de estructuras en forma de cuña.

Info

Publication number
ES2083014T3
ES2083014T3 ES92105756T ES92105756T ES2083014T3 ES 2083014 T3 ES2083014 T3 ES 2083014T3 ES 92105756 T ES92105756 T ES 92105756T ES 92105756 T ES92105756 T ES 92105756T ES 2083014 T3 ES2083014 T3 ES 2083014T3
Authority
ES
Spain
Prior art keywords
substrate
wedge
elaboration
mask
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES92105756T
Other languages
English (en)
Spanish (es)
Inventor
Thomas Dipl-Ing Schwander
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bosch Telecom GmbH
Original Assignee
ANT Nachrichtentechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ANT Nachrichtentechnik GmbH filed Critical ANT Nachrichtentechnik GmbH
Application granted granted Critical
Publication of ES2083014T3 publication Critical patent/ES2083014T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G02B6/305—Optical coupling means for use between fibre and thin-film device and having an integrated mode-size expanding section, e.g. tapered waveguide
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F4/00—Processes for removing metallic material from surfaces, not provided for in group C23F1/00 or C23F3/00
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12195—Tapering

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Optical Integrated Circuits (AREA)
  • Physical Vapour Deposition (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Measurement Of Radiation (AREA)
  • Optical Couplings Of Light Guides (AREA)
ES92105756T 1991-04-11 1992-04-03 Procedimiento para la fabricacion de estructuras en forma de cuña. Expired - Lifetime ES2083014T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19914111783 DE4111783C1 (enExample) 1991-04-11 1991-04-11

Publications (1)

Publication Number Publication Date
ES2083014T3 true ES2083014T3 (es) 1996-04-01

Family

ID=6429332

Family Applications (1)

Application Number Title Priority Date Filing Date
ES92105756T Expired - Lifetime ES2083014T3 (es) 1991-04-11 1992-04-03 Procedimiento para la fabricacion de estructuras en forma de cuña.

Country Status (4)

Country Link
EP (1) EP0509342B1 (enExample)
DE (2) DE4111783C1 (enExample)
DK (1) DK0509342T3 (enExample)
ES (1) ES2083014T3 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0628173A1 (de) * 1992-12-29 1994-12-14 BRENNER, Tomas Verfahren zur herstellung optischer modenformadapter
JPH07333450A (ja) * 1994-06-08 1995-12-22 Hoechst Japan Ltd 光結合用導波路の形成方法及び光結合用導波路を有する光導波路素子
DE19518185C2 (de) * 1995-05-21 2000-02-17 Juergen Gspann Verfahren zur Agglomeratstrahl-Mikrostrukturierung
DE19607671B4 (de) * 1996-02-29 2004-08-26 INSTITUT FüR MIKROTECHNIK MAINZ GMBH Verfahren zur Herstellung optischer Bauelemente mit angekoppelten Lichtwellenleitern und nach diesem Verfahren hergestellte Bauelemente
DE19613745B4 (de) * 1996-04-01 2004-02-26 Forschungsverbund Berlin E.V. Verfahren zur Herstellung anamorphotischer mikrooptischer Arrays und damit ausgestattete Faserlinse
DE19833756A1 (de) * 1998-07-16 2000-01-27 Hertz Inst Heinrich Anordnung zur Herstellung vertikaler Strukturen in Halbleitermaterialien
US6922287B2 (en) * 2001-10-12 2005-07-26 Unaxis Balzers Aktiengesellschaft Light coupling element
JP4219668B2 (ja) 2001-12-13 2009-02-04 パナソニック株式会社 フォトニック結晶の作製方法及び光デバイス作製方法
DE10351034A1 (de) * 2003-10-31 2005-06-09 Infineon Technologies Ag Verfahren zum Ausbilden eines keilförmigen Werkstücks
CN104597550B (zh) * 2015-02-02 2017-05-31 上海理工大学 一种线性渐变滤光片中间楔形谐振腔层的制备方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2416029A1 (de) * 1974-04-02 1975-10-23 Siemens Ag Verfahren zur herstellung keilfoermiger vertiefungen oder flaechen mit kleinem neigungswinkel in einer festkoerperoberflaeche
US4092166A (en) * 1976-12-27 1978-05-30 International Business Machines Corporation Double exposure and double etch technique for producing precision parts from crystallizable photosensitive glass
EP0007108B1 (en) * 1978-07-18 1983-04-13 Nippon Telegraph and Telephone Public Corporation A method of manufacturing a diffraction grating structure
DD251212A1 (de) * 1981-12-01 1987-11-04 Peter Voigt Verfahren zur herstellung von wellenleitern fuer stirnflaecheneinkopplung
US4970600A (en) * 1989-04-04 1990-11-13 Melco Industries, Inc. Laser engraver with X-Y assembly and cut control
US4940881A (en) * 1989-09-28 1990-07-10 Tamarack Scientific Co., Inc. Method and apparatus for effecting selective ablation of a coating from a substrate, and controlling the wall angle of coating edge portions

Also Published As

Publication number Publication date
DE59205061D1 (de) 1996-02-29
DE4111783C1 (enExample) 1992-05-27
EP0509342A3 (en) 1993-09-15
EP0509342A2 (de) 1992-10-21
DK0509342T3 (da) 1996-07-15
EP0509342B1 (de) 1996-01-17

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