ES2065558T3 - Componente de guia de ondas opticas y metodo de fabricacion de un componente de guia de ondas opticas. - Google Patents

Componente de guia de ondas opticas y metodo de fabricacion de un componente de guia de ondas opticas.

Info

Publication number
ES2065558T3
ES2065558T3 ES91101404T ES91101404T ES2065558T3 ES 2065558 T3 ES2065558 T3 ES 2065558T3 ES 91101404 T ES91101404 T ES 91101404T ES 91101404 T ES91101404 T ES 91101404T ES 2065558 T3 ES2065558 T3 ES 2065558T3
Authority
ES
Spain
Prior art keywords
optical
wave guide
optical wave
guide component
protective layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91101404T
Other languages
English (en)
Inventor
Johann Dr Springer
Helmut Hanisch
Elke Holl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent NV
Original Assignee
Alcatel NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel NV filed Critical Alcatel NV
Application granted granted Critical
Publication of ES2065558T3 publication Critical patent/ES2065558T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/061—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-optical organic material
    • G02F1/065—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on electro-optical organic material in an optical waveguide structure
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching

Abstract

EN UN SISTEMA PARA LA FABRICACION DE UN ELEMENTO DE CONSTRUCCION DE GUIA DE ONDAS, EN EL QUE UN SUSTRATO DE VIDRIO SE EQUIPA CON UNA GUIA DE ONDAS DE LUZ DE POLIMERO OPTICO; LA SUPERFICIE ESTA DOTADA DE UN SUSTRATO DE VIDRIO CON UNA CAPA PROTECTORA Y DICHA CAPA PROTECTORA SE SOMETE A UN PROCESO FOTOLITOGRAFICO PARA LA CONSTRUCCION DE UNA ESTRUCTURA LINEAL CON RESPECTO A LA POSICION, EN LA QUE ESTAN DISPUESTAS LAS GUIAS DE ONDA DE LUZ. DE ESTA MANERA, EN LAS DISOCIACIONES DE LINEAS DENTRO DE LA CAPA PROTECTORA FLUYE ACIDO FLUORIDRICO POR ENCIMA DEL SUSTRATO DE VIDRIO PARA EN UN CANAL DE TIPO CAPILAR Y EL CANAL CON EL POLIMERO OPTICO SE LLENA. DE ESTA MANERA PUEDEN LLEGAR A SER DISPUESTOS GUIAS DE ONDAS DE LUZ DENTRO DE ELEMENTOS DE CONSTRUCCION PARA GUIA DE ONDAS, CUYA GEOMETRIA DE LA SECCION TRANSVERSAL SE APROXIMA A LA DE LA FIBRA DE VIDRIO DE TRANSMISION QUE SE EMPLEA PARA LA GUIA DE ONDA OPTICA.
ES91101404T 1990-03-05 1991-02-02 Componente de guia de ondas opticas y metodo de fabricacion de un componente de guia de ondas opticas. Expired - Lifetime ES2065558T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4006863A DE4006863A1 (de) 1990-03-05 1990-03-05 Optisches wellenleiterbauelement und verfahren zum herstellen eines optischen wellenleiterbauelementes

Publications (1)

Publication Number Publication Date
ES2065558T3 true ES2065558T3 (es) 1995-02-16

Family

ID=6401451

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91101404T Expired - Lifetime ES2065558T3 (es) 1990-03-05 1991-02-02 Componente de guia de ondas opticas y metodo de fabricacion de un componente de guia de ondas opticas.

Country Status (4)

Country Link
EP (1) EP0445527B1 (es)
AT (1) ATE112859T1 (es)
DE (2) DE4006863A1 (es)
ES (1) ES2065558T3 (es)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4200396C1 (es) * 1992-01-10 1993-02-04 Imm Institut Fuer Mikrotechnik Gmbh, 6500 Mainz, De
DE4200397C1 (es) * 1992-01-10 1993-03-04 Imm Institut Fuer Mikrotechnik Gmbh, 6500 Mainz, De
DE4206328A1 (de) * 1992-02-29 1993-09-02 Sel Alcatel Ag Verfahren zur herstellung optoelektronischer bauelemente
KR100263195B1 (ko) * 1996-09-16 2000-08-01 윤종용 광도파로 소자의 제작 방법
DE19707093A1 (de) * 1997-02-24 1998-09-03 Daimler Benz Ag Verfahren zur Herstellung integrierter planarer optischer Strukturen
US5970186A (en) * 1997-03-11 1999-10-19 Lightwave Microsystems Corporation Hybrid digital electro-optic switch
US6144779A (en) 1997-03-11 2000-11-07 Lightwave Microsystems Corporation Optical interconnects with hybrid construction
US6022671A (en) * 1997-03-11 2000-02-08 Lightwave Microsystems Corporation Method of making optical interconnects with hybrid construction
EP1129385A2 (en) 1998-11-10 2001-09-05 Lightwave Microsystems Corporation Photonic devices comprising thermo-optic polymer
US6625366B2 (en) * 2001-02-20 2003-09-23 Ramot At Tel-Aviv University Ltd. Polymer on substrate waveguide structure and corresponding production method
WO2013095426A1 (en) * 2011-12-21 2013-06-27 Intel Corporation Fabrication of planar light-wave circuits (plcs) for optical i/o
FR3057677B1 (fr) * 2016-10-13 2019-12-13 Stmicroelectronics Sa Procede de fabrication d'un guide d'onde
US10067291B2 (en) 2016-10-13 2018-09-04 Stmicroelectronics Sa Method of manufacturing a waveguide
DE102021003426A1 (de) 2021-06-21 2022-12-22 OptoGenTech GmbH Verfahren zur Herstellung eines optischen Wellenleiters, ein mit diesem Verfahren hergestellter optischer Wellenleiter sowie ein medizinisches Implantat mit einem solchen optischen Wellenleiter

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60129711A (ja) * 1983-12-16 1985-07-11 Oki Electric Ind Co Ltd 光導波路形成方法
JPS6142140A (ja) * 1984-07-30 1986-02-28 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 自己整合構造の形成方法
NL8801377A (nl) * 1988-05-30 1989-12-18 Nederland Ptt Electro-optische component en een methode ten behoeve van de vervaardiging ervan.

Also Published As

Publication number Publication date
DE59103192D1 (de) 1994-11-17
EP0445527A2 (de) 1991-09-11
ATE112859T1 (de) 1994-10-15
EP0445527A3 (en) 1992-04-29
DE4006863A1 (de) 1991-09-12
EP0445527B1 (de) 1994-10-12

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