ES2057735T3 - Metodo y dispositivo para medir radiacion de temperatura empleando un pirometro en el que se usan lamparas de compensacion. - Google Patents

Metodo y dispositivo para medir radiacion de temperatura empleando un pirometro en el que se usan lamparas de compensacion.

Info

Publication number
ES2057735T3
ES2057735T3 ES91201121T ES91201121T ES2057735T3 ES 2057735 T3 ES2057735 T3 ES 2057735T3 ES 91201121 T ES91201121 T ES 91201121T ES 91201121 T ES91201121 T ES 91201121T ES 2057735 T3 ES2057735 T3 ES 2057735T3
Authority
ES
Spain
Prior art keywords
pyrometer
radiation
measuring temperature
temperature radiation
compensation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES91201121T
Other languages
English (en)
Spanish (es)
Inventor
Peter Michel Noel Vandenabeele
Karen Irma Jozef Maex
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Interuniversitair Microelektronica Centrum vzw IMEC
Original Assignee
Interuniversitair Microelektronica Centrum vzw IMEC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Interuniversitair Microelektronica Centrum vzw IMEC filed Critical Interuniversitair Microelektronica Centrum vzw IMEC
Application granted granted Critical
Publication of ES2057735T3 publication Critical patent/ES2057735T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0003—Radiation pyrometry, e.g. infrared or optical thermometry for sensing the radiant heat transfer of samples, e.g. emittance meter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J5/061—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity by controlling the temperature of the apparatus or parts thereof, e.g. using cooling means or thermostats
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0801—Means for wavelength selection or discrimination
    • G01J5/0802—Optical filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0875—Windows; Arrangements for fastening thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0878—Diffusers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0896—Optical arrangements using a light source, e.g. for illuminating a surface
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/80—Calibration
    • G01J5/802—Calibration by correcting for emissivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/06—Arrangements for eliminating effects of disturbing radiation; Arrangements for compensating changes in sensitivity
    • G01J2005/066—Differential arrangement, i.e. sensitive/not sensitive

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
ES91201121T 1990-05-23 1991-05-09 Metodo y dispositivo para medir radiacion de temperatura empleando un pirometro en el que se usan lamparas de compensacion. Expired - Lifetime ES2057735T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL9001200A NL9001200A (nl) 1990-05-23 1990-05-23 Werkwijze en inrichting voor het met behulp van een pyrometer meten van temperatuurstraling waarbij compensatielampen worden toegepast.

Publications (1)

Publication Number Publication Date
ES2057735T3 true ES2057735T3 (es) 1994-10-16

Family

ID=19857144

Family Applications (1)

Application Number Title Priority Date Filing Date
ES91201121T Expired - Lifetime ES2057735T3 (es) 1990-05-23 1991-05-09 Metodo y dispositivo para medir radiacion de temperatura empleando un pirometro en el que se usan lamparas de compensacion.

Country Status (7)

Country Link
EP (1) EP0458388B1 (de)
JP (1) JPH0629365A (de)
AT (1) ATE109559T1 (de)
DE (1) DE69103207T2 (de)
DK (1) DK0458388T3 (de)
ES (1) ES2057735T3 (de)
NL (1) NL9001200A (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL9201155A (nl) * 1992-06-29 1994-01-17 Imec Inter Uni Micro Electr Inrichting en werkwijze voor het verwarmen van voorwerpen waarbij de temperatuur van het voorwerp wordt gemeten.
JP4518463B2 (ja) * 2001-05-23 2010-08-04 マットソン サーマル プロダクツ ゲゼルシャフト ミット ベシュレンクテル ハフツング 基板の熱処理方法および熱処理装置
US7422988B2 (en) 2004-11-12 2008-09-09 Applied Materials, Inc. Rapid detection of imminent failure in laser thermal processing of a substrate
US7438468B2 (en) 2004-11-12 2008-10-21 Applied Materials, Inc. Multiple band pass filtering for pyrometry in laser based annealing systems
US7910499B2 (en) 2004-11-12 2011-03-22 Applied Materials, Inc. Autofocus for high power laser diode based annealing system
US7659187B2 (en) 2006-11-03 2010-02-09 Applied Materials, Inc. Method of forming PN junctions including a post-ion implant dynamic surface anneal process with minimum interface trap density at the gate insulator-silicon interface
JP5780002B2 (ja) * 2011-06-08 2015-09-16 株式会社ニコン 基板貼り合わせ装置及び基板貼り合わせ方法
DE102012024418A1 (de) * 2012-12-14 2014-06-18 Sikora Ag Verfahren und Vorrichtung zum berührungslosen Bestimmen der Temperatur eines bewegten Gegenstands mit unbekanntem Emissionsgrad
US9698041B2 (en) 2014-06-09 2017-07-04 Applied Materials, Inc. Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methods
KR102163083B1 (ko) 2014-07-02 2020-10-07 어플라이드 머티어리얼스, 인코포레이티드 홈 라우팅 광섬유 가열을 포함하는 온도 제어 장치, 기판 온도 제어 시스템들, 전자 디바이스 처리 시스템들 및 처리 방법들
US10736182B2 (en) 2014-07-02 2020-08-04 Applied Materials, Inc. Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers
US10973088B2 (en) 2016-04-18 2021-04-06 Applied Materials, Inc. Optically heated substrate support assembly with removable optical fibers
JP6820717B2 (ja) * 2016-10-28 2021-01-27 株式会社日立ハイテク プラズマ処理装置
SG10201705708YA (en) * 2017-05-26 2018-12-28 Applied Materials Inc Detector for low temperature transmission pyrometry

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH547487A (de) * 1972-07-27 1974-03-29 Bbc Brown Boveri & Cie Verfahren zur beruehrungslosen und materialunabhaengigen temperaturmessung an oberflaechen mittels infrarot-pyrometer.
US4890245A (en) * 1986-09-22 1989-12-26 Nikon Corporation Method for measuring temperature of semiconductor substrate and apparatus therefor
NL8701479A (nl) * 1987-06-25 1989-01-16 Hoogovens Groep Bv Werkwijze en inrichting voor het bepalen van een emissiecoefficient van een stralend lichaam.

Also Published As

Publication number Publication date
DE69103207D1 (de) 1994-09-08
DK0458388T3 (da) 1994-10-17
DE69103207T2 (de) 1994-12-08
ATE109559T1 (de) 1994-08-15
EP0458388A1 (de) 1991-11-27
EP0458388B1 (de) 1994-08-03
JPH0629365A (ja) 1994-02-04
NL9001200A (nl) 1991-12-16

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