ES2047322T3 - Procedimiento para la fabricacion de un sensor para la determinacion de fuerzas de presion. - Google Patents

Procedimiento para la fabricacion de un sensor para la determinacion de fuerzas de presion.

Info

Publication number
ES2047322T3
ES2047322T3 ES90904597T ES90904597T ES2047322T3 ES 2047322 T3 ES2047322 T3 ES 2047322T3 ES 90904597 T ES90904597 T ES 90904597T ES 90904597 T ES90904597 T ES 90904597T ES 2047322 T3 ES2047322 T3 ES 2047322T3
Authority
ES
Spain
Prior art keywords
sensor
manufacture
pressure forces
determination
procedure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES90904597T
Other languages
English (en)
Inventor
Herbert Zimmermann
Werner Gruenwald
Hans Hecht
Martin Mast
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Application granted granted Critical
Publication of ES2047322T3 publication Critical patent/ES2047322T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Force In General (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Abstract

SE TRATA DE UN INVENTO PARA LA FABRICACION DE UN SENSOR DE DISTINTAS FUERZAS DE PRESION POR MEDIO DE LAS CUALES EL SENSOR SE PONE EN FUNCIONAMIENTO. EN ESTE PROCESO LAS RESISTENCIAS DE CAPA DENSA SE APLICAN A UN SUBSTRATO METALICO A TRAVES DE VIAS DE CONDUCCION O, SI SE PREFIERE, A UN A CAPA DE AISLAMIENTO. FINALMENTE LA SUPERFICIE DEL SENSOR ES TRATADA DE TAL MANERA QUE ES SITUADO EN PARALELO CON RESPECTO A LA SUPERFICIE INFERIOR DEL SUBSTRATO
ES90904597T 1989-04-14 1990-03-23 Procedimiento para la fabricacion de un sensor para la determinacion de fuerzas de presion. Expired - Lifetime ES2047322T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3912280A DE3912280A1 (de) 1989-04-14 1989-04-14 Verfahren zum herstellen eines sensors zum bestimmen von druckkraeften

Publications (1)

Publication Number Publication Date
ES2047322T3 true ES2047322T3 (es) 1994-02-16

Family

ID=6378672

Family Applications (1)

Application Number Title Priority Date Filing Date
ES90904597T Expired - Lifetime ES2047322T3 (es) 1989-04-14 1990-03-23 Procedimiento para la fabricacion de un sensor para la determinacion de fuerzas de presion.

Country Status (4)

Country Link
EP (1) EP0419611B1 (es)
DE (2) DE3912280A1 (es)
ES (1) ES2047322T3 (es)
WO (1) WO1990013011A1 (es)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59102443D1 (de) * 1990-05-07 1994-09-08 Bosch Gmbh Robert Verfahren zum herstellen eines sensors zum bestimmen von druckkräften.
DE4111148A1 (de) * 1991-04-06 1992-10-08 Bosch Gmbh Robert Sensor
DE4124662A1 (de) * 1991-07-25 1993-01-28 Fibronix Sensoren Gmbh Relativdrucksensor
DE4221426C1 (en) * 1992-06-30 1993-09-02 Robert Bosch Gmbh, 70469 Stuttgart, De Force sensor mfr. using screen printing of superimposed measuring resistance layers - forming layers such that upper layer compensates for thickness variation at edges of lower layer, where they overlap conductive tracks
DE4300995C2 (de) * 1993-01-15 1994-10-27 Lucas Ind Plc Kraftsensor und Verfahren zu seiner Herstellung
DE9310968U1 (de) * 1993-07-22 1994-11-24 Robert Bosch Gmbh, 70469 Stuttgart Einrichtung zum Messen einer Kraft
FR2717262B1 (fr) * 1994-03-14 1997-09-26 Nippon Denso Co Détecteur de pression.
CN1133872C (zh) * 1997-04-21 2004-01-07 迈克尔·范·伯根 力传感器
DE10035346B4 (de) * 2000-07-20 2007-08-09 Vega Grieshaber Kg Druckmesszelle mit Temperatursensor
US7884432B2 (en) * 2005-03-22 2011-02-08 Ametek, Inc. Apparatus and methods for shielding integrated circuitry
DE102006021707A1 (de) * 2006-05-10 2007-11-15 Schaeffler Kg Lageranordnung mit einem piezoelektrischen Sensor

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2150695B2 (de) * 1971-10-12 1977-09-15 Robert Bosch Gmbh, 7000 Stuttgart Verfahren zum isolierten aufbau von halbleiterelementen, gedruckten und/ oder monolithisch und/oder hybrid integrierten schaltungen
DE2240286A1 (de) * 1972-08-16 1974-03-14 Matsushita Electric Ind Co Ltd Druckempfindliches widerstandselement und verfahren zu seiner herstellung
DE2727221A1 (de) * 1977-06-16 1978-12-21 Kuhn Goetz Gerd Prof Dr Med Druckmessvorrichtung
DE3125640A1 (de) * 1981-06-30 1983-01-13 Robert Bosch Gmbh, 7000 Stuttgart Sensor
DE8326488U1 (de) * 1983-09-15 1985-02-28 Robert Bosch Gmbh, 7000 Stuttgart Kraft- bzw. druckmessgeber
DE3333285A1 (de) * 1983-09-15 1985-04-18 Robert Bosch Gmbh, 7000 Stuttgart Einrichtung zum erfassen von kraeften, spannungen bzw. beschleunigungen an maschinen, geraeten oder dgl.
DE3426804A1 (de) * 1984-07-10 1986-01-16 W.C. Heraeus Gmbh, 6450 Hanau Substrat fuer gedruckte schaltungen
FR2615618B1 (fr) * 1987-05-22 1990-11-30 Crouzet Sa Capteur de pression a compensation numerique
EP0338180B1 (en) * 1988-04-21 1992-09-23 MAGNETI MARELLI S.p.A. An electrical force and/or deformation sensor, particularly for use as a pressure sensor
DE3818191A1 (de) * 1988-05-28 1989-11-30 Bosch Gmbh Robert Sensor

Also Published As

Publication number Publication date
DE3912280A1 (de) 1990-10-18
DE59003448D1 (de) 1993-12-16
EP0419611A1 (de) 1991-04-03
EP0419611B1 (de) 1993-11-10
WO1990013011A1 (de) 1990-11-01

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