ES2012377B3 - Dispositivo fotoelectrico para la medicion de longitudes u angulos - Google Patents

Dispositivo fotoelectrico para la medicion de longitudes u angulos

Info

Publication number
ES2012377B3
ES2012377B3 ES87111627T ES87111627T ES2012377B3 ES 2012377 B3 ES2012377 B3 ES 2012377B3 ES 87111627 T ES87111627 T ES 87111627T ES 87111627 T ES87111627 T ES 87111627T ES 2012377 B3 ES2012377 B3 ES 2012377B3
Authority
ES
Spain
Prior art keywords
graduation
scanning
measuring
support
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES87111627T
Other languages
English (en)
Inventor
Dieter Michel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dr Johannes Heidenhain GmbH
Original Assignee
Dr Johannes Heidenhain GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dr Johannes Heidenhain GmbH filed Critical Dr Johannes Heidenhain GmbH
Application granted granted Critical
Publication of ES2012377B3 publication Critical patent/ES2012377B3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
ES87111627T 1986-10-29 1987-08-11 Dispositivo fotoelectrico para la medicion de longitudes u angulos Expired - Lifetime ES2012377B3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3636744A DE3636744C1 (de) 1986-10-29 1986-10-29 Lichtelektrische Laengen- oder Winkelmesseinrichtung

Publications (1)

Publication Number Publication Date
ES2012377B3 true ES2012377B3 (es) 1990-03-16

Family

ID=6312699

Family Applications (1)

Application Number Title Priority Date Filing Date
ES87111627T Expired - Lifetime ES2012377B3 (es) 1986-10-29 1987-08-11 Dispositivo fotoelectrico para la medicion de longitudes u angulos

Country Status (6)

Country Link
US (1) US4843237A (es)
EP (1) EP0266499B1 (es)
JP (1) JP2561676B2 (es)
AT (1) ATE48699T1 (es)
DE (2) DE3636744C1 (es)
ES (1) ES2012377B3 (es)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5107130A (en) * 1989-12-22 1992-04-21 Synergy Computer Graphics Corporation Sensor assembly for sensing printed marks on a print medium
DE4033556A1 (de) * 1990-10-22 1992-04-23 Suess Kg Karl Messanordnung fuer x,y,(phi)-koordinatentische
JPH04208810A (ja) * 1990-12-03 1992-07-30 Omron Corp 変位信号出力装置
DE4104602C1 (es) * 1991-02-12 1992-06-04 E.M.S. Technik Gmbh, 2950 Leer, De
AT395914B (de) * 1991-04-18 1993-04-26 Rsf Elektronik Gmbh Photoelektrische positionsmesseinrichtung
DE59203396D1 (de) * 1992-07-18 1995-09-28 Heidenhain Gmbh Dr Johannes Optische Vorrichtung.
JPH0642914A (ja) * 1992-07-24 1994-02-18 Canon Inc 変位測定装置
DE4318129A1 (de) * 1993-06-01 1994-12-08 Bosch Gmbh Robert Vorrichtung zur Messung einer Bewegung zwischen zwei Teilen

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3768911A (en) * 1971-08-17 1973-10-30 Keuffel & Esser Co Electro-optical incremental motion and position indicator
DE2431551C2 (de) * 1974-07-01 1981-09-17 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Anordnung zur Messung von Bewegungen und Geschwindigkeiten
GB1516536A (en) * 1975-08-22 1978-07-05 Ferranti Ltd Measuring apparatus
US4332473A (en) * 1979-01-31 1982-06-01 Tokyo Shibaura Denki Kabushiki Kaisha Apparatus for detecting a mutual positional relationship of two sample members
CA1240757A (en) * 1983-12-05 1988-08-16 Toshiyasu Tanaka Light-reflector type encoding method and the encoder
JPH0758206B2 (ja) * 1984-03-30 1995-06-21 株式会社日立製作所 モワレ縞を用いた位置検出装置
US4614864A (en) * 1984-05-29 1986-09-30 The Perkin-Elmer Corporation Apparatus for detecting defocus

Also Published As

Publication number Publication date
JPS63117216A (ja) 1988-05-21
EP0266499B1 (de) 1989-12-13
US4843237A (en) 1989-06-27
EP0266499A1 (de) 1988-05-11
JP2561676B2 (ja) 1996-12-11
DE3761174D1 (de) 1990-01-18
ATE48699T1 (de) 1989-12-15
DE3636744C1 (de) 1988-03-24

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