EP4474654C0 - Turbomolekularvakuumpumpe - Google Patents

Turbomolekularvakuumpumpe

Info

Publication number
EP4474654C0
EP4474654C0 EP24162769.4A EP24162769A EP4474654C0 EP 4474654 C0 EP4474654 C0 EP 4474654C0 EP 24162769 A EP24162769 A EP 24162769A EP 4474654 C0 EP4474654 C0 EP 4474654C0
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
turbomolecular vacuum
turbomolecular
pump
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP24162769.4A
Other languages
English (en)
French (fr)
Other versions
EP4474654B1 (de
EP4474654A1 (de
Inventor
Maximilian Birkenfeld
Michael Schweighöfer
Martin Lohse
Jan Hofmann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP24162769.4A priority Critical patent/EP4474654B1/de
Priority to JP2024185737A priority patent/JP2025138558A/ja
Publication of EP4474654A1 publication Critical patent/EP4474654A1/de
Application granted granted Critical
Publication of EP4474654B1 publication Critical patent/EP4474654B1/de
Publication of EP4474654C0 publication Critical patent/EP4474654C0/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/20—Three-dimensional
    • F05D2250/23—Three-dimensional prismatic
    • F05D2250/232—Three-dimensional prismatic conical

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP24162769.4A 2024-03-11 2024-03-11 Turbomolekularvakuumpumpe Active EP4474654B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP24162769.4A EP4474654B1 (de) 2024-03-11 2024-03-11 Turbomolekularvakuumpumpe
JP2024185737A JP2025138558A (ja) 2024-03-11 2024-10-22 ターボ分子真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP24162769.4A EP4474654B1 (de) 2024-03-11 2024-03-11 Turbomolekularvakuumpumpe

Publications (3)

Publication Number Publication Date
EP4474654A1 EP4474654A1 (de) 2024-12-11
EP4474654B1 EP4474654B1 (de) 2026-02-11
EP4474654C0 true EP4474654C0 (de) 2026-02-11

Family

ID=90364654

Family Applications (1)

Application Number Title Priority Date Filing Date
EP24162769.4A Active EP4474654B1 (de) 2024-03-11 2024-03-11 Turbomolekularvakuumpumpe

Country Status (2)

Country Link
EP (1) EP4474654B1 (de)
JP (1) JP2025138558A (de)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2657164B1 (fr) * 1990-01-16 1992-04-03 Cit Alcatel Installation de detection de fuite a pompe holweck a prise intermediaire.
DE10055057A1 (de) * 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leckdetektorpumpe
DE10302987A1 (de) * 2003-01-25 2004-08-05 Inficon Gmbh Lecksuchgerät mit einem Einlass
JP3935865B2 (ja) * 2003-07-07 2007-06-27 三菱重工業株式会社 真空ポンプ
EP2671060B1 (de) * 2011-02-03 2015-08-19 Oerlikon Leybold Vacuum GmbH Lecksucheinrichtung
DE102012003680A1 (de) * 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3327293B1 (de) * 2016-11-23 2019-11-06 Pfeiffer Vacuum Gmbh Vakuumpumpe mit mehreren einlässen
EP3657021B1 (de) * 2018-11-21 2020-11-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3845764B1 (de) 2021-03-31 2023-05-03 Pfeiffer Vacuum Technology AG Vakuumpumpe und vakuumpumpensystem
EP4194700B1 (de) * 2023-04-18 2025-02-12 Pfeiffer Vacuum Technology AG Vakuumpumpe mit einer holweck-pumpstufe mit veränderlicher holweck-geometrie

Also Published As

Publication number Publication date
EP4474654B1 (de) 2026-02-11
JP2025138558A (ja) 2025-09-25
EP4474654A1 (de) 2024-12-11

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