EP4269804C0 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
EP4269804C0
EP4269804C0 EP23191349.2A EP23191349A EP4269804C0 EP 4269804 C0 EP4269804 C0 EP 4269804C0 EP 23191349 A EP23191349 A EP 23191349A EP 4269804 C0 EP4269804 C0 EP 4269804C0
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP23191349.2A
Other languages
English (en)
French (fr)
Other versions
EP4269804A1 (de
EP4269804B1 (de
Inventor
Florian Bader
Sönke Gilbrich
Jan Hofmann
Jonas Hölz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP23191349.2A priority Critical patent/EP4269804B1/de
Publication of EP4269804A1 publication Critical patent/EP4269804A1/de
Priority to JP2024005410A priority patent/JP2025027417A/ja
Application granted granted Critical
Publication of EP4269804C0 publication Critical patent/EP4269804C0/de
Publication of EP4269804B1 publication Critical patent/EP4269804B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/64—Mounting; Assembling; Disassembling of axial pumps
    • F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2260/00—Function
    • F05D2260/30—Retaining components in desired mutual position
    • F05D2260/33—Retaining components in desired mutual position with a bayonet coupling

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP23191349.2A 2023-08-14 2023-08-14 Vakuumpumpe Active EP4269804B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP23191349.2A EP4269804B1 (de) 2023-08-14 2023-08-14 Vakuumpumpe
JP2024005410A JP2025027417A (ja) 2023-08-14 2024-01-17 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP23191349.2A EP4269804B1 (de) 2023-08-14 2023-08-14 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP4269804A1 EP4269804A1 (de) 2023-11-01
EP4269804C0 true EP4269804C0 (de) 2025-10-29
EP4269804B1 EP4269804B1 (de) 2025-10-29

Family

ID=87571941

Family Applications (1)

Application Number Title Priority Date Filing Date
EP23191349.2A Active EP4269804B1 (de) 2023-08-14 2023-08-14 Vakuumpumpe

Country Status (2)

Country Link
EP (1) EP4269804B1 (de)
JP (1) JP2025027417A (de)

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6028298U (ja) * 1983-07-30 1985-02-26 株式会社島津製作所 タ−ボ分子ポンプ
JPS60134893U (ja) * 1984-02-20 1985-09-07 セイコー精機株式会社 タ−ボ分子ポンプにおけるステ−タ翼の固定構造
US20050029417A1 (en) * 2003-08-08 2005-02-10 Richard Scheps Mounting bracket for a rotary pump
JP2005133582A (ja) * 2003-10-28 2005-05-26 Shimadzu Corp 分子ポンプ
DE102005059208A1 (de) * 2005-12-12 2007-06-28 Pfeiffer Vacuum Gmbh Vakuumgehäuse
DE102005059636A1 (de) * 2005-12-14 2007-06-21 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP2017480A1 (de) * 2007-06-15 2009-01-21 VARIAN S.p.A. Geteilte Verbindung für Vakuumpumpen und Verfahren zur Gewinnung der besagten Verbindung
EP3051138B1 (de) * 2015-01-27 2021-03-10 Pfeiffer Vacuum Gmbh Vakuumpumpengehäuse, Vakuumpumpe und Verfahren zur Herstellung eines Vakuumpumpengehäuses
JP6606365B2 (ja) * 2015-07-09 2019-11-13 エドワーズ株式会社 真空ポンプとそのロータ及びロータ軸
JP7009274B2 (ja) * 2018-03-20 2022-01-25 エドワーズ株式会社 真空ポンプ及び真空ポンプ用ダンパ
EP3730802B1 (de) * 2019-04-23 2021-04-07 Pfeiffer Vacuum Gmbh Flanschelement

Also Published As

Publication number Publication date
EP4269804A1 (de) 2023-11-01
EP4269804B1 (de) 2025-10-29
JP2025027417A (ja) 2025-02-27

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