EP4361449C0 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
EP4361449C0
EP4361449C0 EP24160525.2A EP24160525A EP4361449C0 EP 4361449 C0 EP4361449 C0 EP 4361449C0 EP 24160525 A EP24160525 A EP 24160525A EP 4361449 C0 EP4361449 C0 EP 4361449C0
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
EP24160525.2A
Other languages
English (en)
French (fr)
Other versions
EP4361449A1 (de
EP4361449B1 (de
Inventor
Maximilian Birkenfeld
Mirko Mekota
Michael Schweighöfer
Peter Vorwerk
Robert Watz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum Technology AG
Original Assignee
Pfeiffer Vacuum Technology AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Technology AG filed Critical Pfeiffer Vacuum Technology AG
Priority to EP24160525.2A priority Critical patent/EP4361449B1/de
Publication of EP4361449A1 publication Critical patent/EP4361449A1/de
Priority to JP2024224867A priority patent/JP2025133027A/ja
Application granted granted Critical
Publication of EP4361449C0 publication Critical patent/EP4361449C0/de
Publication of EP4361449B1 publication Critical patent/EP4361449B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/90—Coating; Surface treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
EP24160525.2A 2024-02-29 2024-02-29 Vakuumpumpe Active EP4361449B1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP24160525.2A EP4361449B1 (de) 2024-02-29 2024-02-29 Vakuumpumpe
JP2024224867A JP2025133027A (ja) 2024-02-29 2024-12-20 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP24160525.2A EP4361449B1 (de) 2024-02-29 2024-02-29 Vakuumpumpe

Publications (3)

Publication Number Publication Date
EP4361449A1 EP4361449A1 (de) 2024-05-01
EP4361449C0 true EP4361449C0 (de) 2026-02-11
EP4361449B1 EP4361449B1 (de) 2026-02-11

Family

ID=90123878

Family Applications (1)

Application Number Title Priority Date Filing Date
EP24160525.2A Active EP4361449B1 (de) 2024-02-29 2024-02-29 Vakuumpumpe

Country Status (2)

Country Link
EP (1) EP4361449B1 (de)
JP (1) JP2025133027A (de)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000161286A (ja) * 1998-11-25 2000-06-13 Shimadzu Corp ターボ分子ポンプ
JP2005320905A (ja) * 2004-05-10 2005-11-17 Boc Edwards Kk 真空ポンプ
WO2010116747A1 (ja) * 2009-04-10 2010-10-14 株式会社アルバック メカニカルブースターポンプ、ターボ分子ポンプ又はドライポンプを構成する部材の表面処理方法及びこの表面処理方法により処理されたメカニカルブースターポンプ、ターボ分子ポンプ又はドライポンプ
WO2013065440A1 (ja) * 2011-10-31 2013-05-10 エドワーズ株式会社 固定部材及び真空ポンプ
JP6398337B2 (ja) * 2014-06-04 2018-10-03 株式会社島津製作所 ターボ分子ポンプ
EP3557073A1 (de) * 2019-03-07 2019-10-23 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP7428101B2 (ja) * 2020-08-14 2024-02-06 株式会社島津製作所 ターボ分子ポンプ

Also Published As

Publication number Publication date
EP4361449A1 (de) 2024-05-01
JP2025133027A (ja) 2025-09-10
EP4361449B1 (de) 2026-02-11

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