EP4392164A1 - Procédé et dispositif pour éliminer l'oxygène résiduel de gaz inertes par synthèse de nanoparticules métalliques - Google Patents

Procédé et dispositif pour éliminer l'oxygène résiduel de gaz inertes par synthèse de nanoparticules métalliques

Info

Publication number
EP4392164A1
EP4392164A1 EP22768693.8A EP22768693A EP4392164A1 EP 4392164 A1 EP4392164 A1 EP 4392164A1 EP 22768693 A EP22768693 A EP 22768693A EP 4392164 A1 EP4392164 A1 EP 4392164A1
Authority
EP
European Patent Office
Prior art keywords
inert gas
residual oxygen
electrodes
nanoparticles
ppm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22768693.8A
Other languages
German (de)
English (en)
Inventor
Vinzent OLSZOK
Malte BIERWIRTH
Alfred P. Weber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Technische Universitaet Clausthal
Original Assignee
Technische Universitaet Clausthal
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Technische Universitaet Clausthal filed Critical Technische Universitaet Clausthal
Publication of EP4392164A1 publication Critical patent/EP4392164A1/fr
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/10—Single element gases other than halogens
    • B01D2257/104—Oxygen
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma

Definitions

  • the invention relates to a method and a device for removing residual oxygen from an inert gas.
  • UHV ultra-high vacuum
  • UHV systems are expensive to purchase and operate.
  • the implementation of processes in UHV systems is time-consuming because the formation of an ultra-high vacuum requires a long pumping time that increases with falling residual pressure.
  • materials with a low vapor pressure, for example cannot be processed in an ultra-high vacuum.
  • Magnesium has an outstanding effect that can be used in particular for argon and other noble gases as inert gases. However, magnesium has no long-term stability under nitrogen due to nitride formation on electrode surfaces.
  • metal is to be removed from the at least one electrode in a significantly more than stoichiometric amount in order to form a sufficient number of nanoparticles with a sufficiently large reactive surface area to remove the residual oxygen from the inert gas to the desired extent.
  • 4 mol to 100 mol, preferably 8 mol to 40 mol, of the metal can be removed per 1 mol molecule of residual oxygen.
  • metal in the order of 1 pg can be removed in order to form the nanoparticles from it.
  • the oxidized nanoparticles are inert. Nevertheless, it is usually useful to filter the oxidized nanoparticles from the inert gas. This can easily be achieved with a series connection of particle filters with increasing degrees of separation.
  • the series connection of two 99.5% particle filters and one 99.999% particle filter has proven itself to essentially completely remove the oxidized nanoparticles from the inert gas without the 99.999% particle filter having to be changed frequently because it becomes contaminated with the filtered nanoparticles added.
  • the residual oxygen content can even be reduced to below 1 ⁇ 10′ 14 ppm. Concrete a residual oxygen content of 3.5 ⁇ 10′15 ppm was achieved when the process according to the invention was carried out twice.
  • a filter device which is designed to filter the oxidized nanoparticles from the inert gas, is preferably arranged downstream of the reaction space.
  • the filter device can have a series connection of particle filters with increasing degrees of separation, as has already been explained in connection with the method according to the invention.
  • a Changing the particle filter is only seldom necessary during operation of the device according to the invention because the particle filters only clog very slowly if their degree of separation is designed appropriately due to the small absolute number of nanoparticles formed and correspondingly to be filtered off with the particle filters.
  • the gas discharge 9 leads to a removal of metal from the electrodes 5 and 6, from which nanoparticles 12 form within the inert gas 8 in the reaction chamber 2.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

Pour éliminer l'oxygène résiduel d'un gaz inerte (8), une tension est appliquée entre deux électrodes adjacentes au gaz inerte (8), cette tension provoquant une décharge gazeuse (9) directe dans le gaz inerte (8). Consécutivement à la décharge gazeuse (9), du métal est enlevé par au moins l'une des électrodes (5, 6). Le métal forme des nanoparticules (12) dans le gaz inerte (8) qui s'oxydent spontanément par consommation de l'oxygène résiduel.
EP22768693.8A 2021-08-24 2022-08-22 Procédé et dispositif pour éliminer l'oxygène résiduel de gaz inertes par synthèse de nanoparticules métalliques Pending EP4392164A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102021121928.0A DE102021121928A1 (de) 2021-08-24 2021-08-24 Verfahren und Vorrichtung zum Entfernen von Restsauerstoff aus Inertgasen mittels Synthese von Metallnanopartikeln
PCT/EP2022/073308 WO2023025716A1 (fr) 2021-08-24 2022-08-22 Procédé et dispositif pour éliminer l'oxygène résiduel de gaz inertes par synthèse de nanoparticules métalliques

Publications (1)

Publication Number Publication Date
EP4392164A1 true EP4392164A1 (fr) 2024-07-03

Family

ID=83280394

Family Applications (1)

Application Number Title Priority Date Filing Date
EP22768693.8A Pending EP4392164A1 (fr) 2021-08-24 2022-08-22 Procédé et dispositif pour éliminer l'oxygène résiduel de gaz inertes par synthèse de nanoparticules métalliques

Country Status (3)

Country Link
EP (1) EP4392164A1 (fr)
DE (1) DE102021121928A1 (fr)
WO (1) WO2023025716A1 (fr)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5492678A (en) 1993-07-23 1996-02-20 Hokushin Industries, Inc. Gas-cleaning equipment and its use
CN111617714B (zh) * 2020-05-27 2021-10-01 常州大学 一种催化反应装置及催化剂带电研究用仪器和使用方法

Also Published As

Publication number Publication date
WO2023025716A1 (fr) 2023-03-02
DE102021121928A1 (de) 2023-03-02

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