EP4390145A3 - Vacuum pump - Google Patents
Vacuum pump Download PDFInfo
- Publication number
- EP4390145A3 EP4390145A3 EP24166459.8A EP24166459A EP4390145A3 EP 4390145 A3 EP4390145 A3 EP 4390145A3 EP 24166459 A EP24166459 A EP 24166459A EP 4390145 A3 EP4390145 A3 EP 4390145A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- rotor
- component
- holweck
- collar
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910000838 Al alloy Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/02—Selection of particular materials
- F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2300/00—Materials; Properties thereof
- F05D2300/10—Metals, alloys or intermetallic compounds
- F05D2300/17—Alloys
- F05D2300/173—Aluminium alloys, e.g. AlCuMgPb
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Die Erfindung betrifft eine Vakuumpumpe, insbesondere Turbomolekularpumpe, mit einer während des Betriebs um eine Drehachse rotierenden Rotorwelle und mit wenigstens einem auf der Rotorwelle befestigten Rotorbauteil, wobei das Rotorbauteil eine Rotorscheibe ist, die einen radial innen liegenden Bund, über den die Rotorscheibe auf der Rotorwelle befestigt ist, und mehrere Rotorschaufeln umfasst, die jeweils integral mit dem Bund verbunden sind und die sich jeweils ausgehend von einem Schaufelgrund am Bund radial nach außen erstrecken und radial außen ein freies Schaufelende aufweisen, oder wobei das Rotorbauteil ein Holweckbauteil ist, insbesondere eine Holwecknabe oder eine Holweckhülse, und wobei die Rotorscheibe und/oder das Holweckbauteil aus einer Aluminiumlegierung gefertigt sind bzw. ist, die folgende Elemente in Gewichts-% aufweist: Cu: 3,6-4,4; Mg: 1,2-1,4; Mn : 0,5-0,8; Zr: < 0,16; Ti : 0,01-0,05; Si < 0,21; Fe < 0,21; Zn < 0,26; andere Elemente < 0,06; Rest Aluminium.The invention relates to a vacuum pump, in particular a turbomolecular pump, with a rotor shaft that rotates about an axis of rotation during operation and with at least one rotor component fastened to the rotor shaft, wherein the rotor component is a rotor disk that comprises a radially inner collar, via which the rotor disk is fastened to the rotor shaft, and a plurality of rotor blades, each of which is integrally connected to the collar and which each extend radially outward from a blade base on the collar and have a free blade end radially outward, or wherein the rotor component is a Holweck component, in particular a Holweck hub or a Holweck sleeve, and wherein the rotor disk and/or the Holweck component are made of an aluminum alloy that has the following elements in weight percent: Cu: 3.6-4.4; Mg: 1.2-1.4; Mn: 0.5-0.8; Zr: <0.16; Ti: 0.01-0.05; Si <0.21; Fe < 0.21; Zn < 0.26; other elements < 0.06; balance aluminum.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP24166459.8A EP4390145A3 (en) | 2022-12-22 | 2022-12-22 | Vacuum pump |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP22216232.3A EP4151860A3 (en) | 2022-12-22 | 2022-12-22 | Vacuum pump |
EP24166459.8A EP4390145A3 (en) | 2022-12-22 | 2022-12-22 | Vacuum pump |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP22216232.3A Division EP4151860A3 (en) | 2022-12-22 | 2022-12-22 | Vacuum pump |
Publications (2)
Publication Number | Publication Date |
---|---|
EP4390145A2 EP4390145A2 (en) | 2024-06-26 |
EP4390145A3 true EP4390145A3 (en) | 2024-09-18 |
Family
ID=84569606
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP24166459.8A Pending EP4390145A3 (en) | 2022-12-22 | 2022-12-22 | Vacuum pump |
EP22216232.3A Pending EP4151860A3 (en) | 2022-12-22 | 2022-12-22 | Vacuum pump |
EP24166455.6A Pending EP4390144A3 (en) | 2022-12-22 | 2022-12-22 | Vacuum pump |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP22216232.3A Pending EP4151860A3 (en) | 2022-12-22 | 2022-12-22 | Vacuum pump |
EP24166455.6A Pending EP4390144A3 (en) | 2022-12-22 | 2022-12-22 | Vacuum pump |
Country Status (2)
Country | Link |
---|---|
EP (3) | EP4390145A3 (en) |
JP (1) | JP2024091224A (en) |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4806075A (en) * | 1983-10-07 | 1989-02-21 | Sargent-Welch Scientific Co. | Turbomolecular pump with improved bearing assembly |
DE10113329A1 (en) * | 2001-03-20 | 2002-09-26 | Leybold Vakuum Gmbh | Turbo-molecular pump stator radiate heat to rotor |
JP2004019493A (en) * | 2002-06-13 | 2004-01-22 | Fujitsu Ltd | Exhaust system |
EP1408237A1 (en) * | 2002-10-11 | 2004-04-14 | Alcatel | Turbomolecular pump |
DE10354204A1 (en) * | 2003-11-20 | 2005-06-23 | Leybold Vakuum Gmbh | molecular pump |
DE102006031965A1 (en) * | 2005-07-15 | 2007-01-18 | Leybold Vacuum Gmbh | Rotor for turbo molecular pump has rotor blades made from an aluminium alloy comprising aluminium, copper, manganese, magnesium cut and shaped by reforming |
EP1330606B1 (en) * | 2000-10-28 | 2011-07-13 | Oerlikon Leybold Vacuum GmbH | Mechanical kinetic vacuum pump |
EP3002459A1 (en) * | 2014-10-02 | 2016-04-06 | Pfeiffer Vacuum GmbH | Method for manufacturing a rotor or stator disc for a vacuum pump and rotor or stator disc for a vacuum pump |
KR101758033B1 (en) * | 2013-11-30 | 2017-07-14 | 라이볼트 게엠베하 | Rotor disc and rotor for a vacuum pump |
US20200378857A1 (en) * | 2019-05-30 | 2020-12-03 | Shimadzu Corporation | Vacuum pump and leak detector |
WO2021245345A1 (en) * | 2020-06-04 | 2021-12-09 | Constellium Issoire | Use of products made from aluminium copper magnesium alloy that perform well at high temperature |
EP4006349A1 (en) * | 2019-07-22 | 2022-06-01 | Edwards Japan Limited | Vacuum pump, and rotor and rotary vane for use in vacuum pump |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3650702B1 (en) | 2018-11-12 | 2020-09-16 | Pfeiffer Vacuum Gmbh | Use of a synthetic oil in a vacuum pump and vacuum pump |
-
2022
- 2022-12-22 EP EP24166459.8A patent/EP4390145A3/en active Pending
- 2022-12-22 EP EP22216232.3A patent/EP4151860A3/en active Pending
- 2022-12-22 EP EP24166455.6A patent/EP4390144A3/en active Pending
-
2023
- 2023-05-02 JP JP2023076120A patent/JP2024091224A/en active Pending
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4806075A (en) * | 1983-10-07 | 1989-02-21 | Sargent-Welch Scientific Co. | Turbomolecular pump with improved bearing assembly |
EP1330606B1 (en) * | 2000-10-28 | 2011-07-13 | Oerlikon Leybold Vacuum GmbH | Mechanical kinetic vacuum pump |
DE10113329A1 (en) * | 2001-03-20 | 2002-09-26 | Leybold Vakuum Gmbh | Turbo-molecular pump stator radiate heat to rotor |
JP2004019493A (en) * | 2002-06-13 | 2004-01-22 | Fujitsu Ltd | Exhaust system |
EP1408237A1 (en) * | 2002-10-11 | 2004-04-14 | Alcatel | Turbomolecular pump |
DE10354204A1 (en) * | 2003-11-20 | 2005-06-23 | Leybold Vakuum Gmbh | molecular pump |
DE102006031965A1 (en) * | 2005-07-15 | 2007-01-18 | Leybold Vacuum Gmbh | Rotor for turbo molecular pump has rotor blades made from an aluminium alloy comprising aluminium, copper, manganese, magnesium cut and shaped by reforming |
KR101758033B1 (en) * | 2013-11-30 | 2017-07-14 | 라이볼트 게엠베하 | Rotor disc and rotor for a vacuum pump |
EP3002459A1 (en) * | 2014-10-02 | 2016-04-06 | Pfeiffer Vacuum GmbH | Method for manufacturing a rotor or stator disc for a vacuum pump and rotor or stator disc for a vacuum pump |
US20200378857A1 (en) * | 2019-05-30 | 2020-12-03 | Shimadzu Corporation | Vacuum pump and leak detector |
EP4006349A1 (en) * | 2019-07-22 | 2022-06-01 | Edwards Japan Limited | Vacuum pump, and rotor and rotary vane for use in vacuum pump |
WO2021245345A1 (en) * | 2020-06-04 | 2021-12-09 | Constellium Issoire | Use of products made from aluminium copper magnesium alloy that perform well at high temperature |
Also Published As
Publication number | Publication date |
---|---|
EP4390144A3 (en) | 2024-07-10 |
EP4151860A3 (en) | 2023-04-05 |
EP4390145A2 (en) | 2024-06-26 |
EP4151860A2 (en) | 2023-03-22 |
JP2024091224A (en) | 2024-07-04 |
EP4390144A2 (en) | 2024-06-26 |
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Legal Events
Date | Code | Title | Description |
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PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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Ipc: F04D 29/32 20060101ALI20240604BHEP Ipc: F04D 29/02 20060101ALI20240604BHEP Ipc: F04D 19/04 20060101AFI20240604BHEP |
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Ipc: F04D 29/32 20060101ALI20240809BHEP Ipc: F04D 29/02 20060101ALI20240809BHEP Ipc: F04D 19/04 20060101AFI20240809BHEP |