EP4367284A1 - Installation de revêtement pour revêtir un objet - Google Patents

Installation de revêtement pour revêtir un objet

Info

Publication number
EP4367284A1
EP4367284A1 EP22732456.3A EP22732456A EP4367284A1 EP 4367284 A1 EP4367284 A1 EP 4367284A1 EP 22732456 A EP22732456 A EP 22732456A EP 4367284 A1 EP4367284 A1 EP 4367284A1
Authority
EP
European Patent Office
Prior art keywords
nozzle
coated
coating
gas phase
coating system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP22732456.3A
Other languages
German (de)
English (en)
Inventor
Christian Schwerdt
Axel Zwick
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ThyssenKrupp Steel Europe AG
Original Assignee
ThyssenKrupp Steel Europe AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ThyssenKrupp Steel Europe AG filed Critical ThyssenKrupp Steel Europe AG
Publication of EP4367284A1 publication Critical patent/EP4367284A1/fr
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Definitions

  • the invention relates to a coating system for coating an object.
  • the coating system is particularly suitable for coating a metal strip, preferably a steel strip.
  • Gas phase deposition is based on the principle of coating a surface of the flat object, for example a steel strip or a pane of glass, by depositing material that is present in the gas phase.
  • the material is initially provided as the starting material.
  • the starting material is then brought into a gas phase.
  • the components of the material present in the gas phase in particular atoms and/or ions, are deposited on the surface to be coated and thereby form a coating.
  • Known methods of vapor deposition are chemical vapor deposition (CVD), physical vapor deposition (PVD) and arc evaporation. The methods mentioned differ in particular in the mechanisms with which the gas phase is brought about.
  • the present invention is concerned with coating systems which have a device for gas-phase deposition of the material, in which vaporization is also or exclusively used for gas-phase deposition.
  • the material which is also or exclusively brought into the gas phase by means of vaporization, is then, as soon as it is in the gas phase, directed with a nozzle in the direction of the surface of the object to be coated.
  • the challenge lies in being able to produce layers with high quality in terms of layer homogeneity and the utilization of the starting material, known as output, not exceeding an acceptable level measure out.
  • the object is achieved with a coating system for coating an object with the features of claim 1.
  • a coating system according to the invention serves the purpose of coating an object, in particular a flat object such as a strip or a metallic strip, in particular a steel strip.
  • the coating takes place with a material present in the gas phase.
  • the coating system has a coating chamber.
  • the coating chamber is designed in such a way that the object to be coated can be guided through it.
  • the coating chamber is designed as an elongate chamber which has an inlet opening on a first end face and an outlet opening on the second, preferably opposite, end face.
  • the object for example the strip, can be guided through the entry opening into the coating chamber and through the exit opening out of the coating chamber by means of a transport mechanism.
  • the transport mechanism can, for example, be one known to those skilled in the art
  • Be tape transport device with support and transport rollers, the transport and support rollers, for example, outside of the coating chamber, that is: seen in the tape transport direction in front of the inlet opening and behind the outlet opening can be arranged.
  • the coating system also has a device for gas phase deposition of the material.
  • the device for In particular, vapor deposition includes an evaporation section and a nozzle section.
  • the evaporation section is designed, for example, as an evaporation crucible, preferably with a cylindrically shaped, in particular circular-cylindrically shaped, section.
  • the evaporation section is preferably partially or fully made of graphite or CFC.
  • Evaporation section are designed to be heatable, for example by means of heating coils, so that the evaporation section can be heated to a temperature above the evaporation temperature of the starting material.
  • gas phase and vaporization are used throughout the description because they are common in the field of technology described.
  • gas phase preferably includes that a small proportion by weight, for example up to 30 percent by weight, preferably not more than 10 percent by weight, of the material present in the gas phase is not in the gas phase in the physical sense, but instead as an aerosol, as a cluster or as a mixture of the aforementioned may exist.
  • vaporization includes the fact that, depending on the material used and the technology used, the transition of the particles into the gas phase takes place at least partially by means of mechanisms other than vaporization in the strictly physical sense, for example by sublimation.
  • the term vaporization thus includes, in addition to vaporization in a strictly physical sense, i.e. a transition "liquid - ⁇ gas phase", also other mechanisms, such as sublimation in particular.
  • the nozzle section is directly or indirectly coupled to the evaporation section.
  • the nozzle section has a nozzle that has a nozzle outlet that opens out inside the coating chamber.
  • the nozzle section consists of the nozzle, generally has however, the nozzle section has other elements, for example coupling members for coupling to the evaporation section.
  • the nozzle exit is an opening from which the components of the material present in the gas phase can exit the nozzle.
  • the material present in the gas phase is thus conducted by means of the nozzle section from an outlet of the evaporation section to the nozzle outlet, with the nozzle outlet being arranged in the coating system in such a way that gas-phase particles emerging from the nozzle outlet are directed towards the location at which the material to be coated Surface is passed for coating.
  • the object ie, for example, the metal strip
  • the nozzle section thus serves to direct material brought into the vapor phase in the vaporization section to a vicinity of the surface to be coated at a location within the coating chamber, the nozzle section being designed to guide and discharge the material in the gas phase in a directed manner so that it is coming in a specified direction, moves through the coating chamber and then settles on the surface to be coated with a specified main direction of movement.
  • the material in the gas phase thus reaches a coating zone, with the object, for example in the form of a strip, being continuously guided through the coating zone, so that, using the strip as an example, an entire strip surface has finally been coated with the material by placing it on the Surface condenses and thereby forms the coating.
  • the nozzle is oriented and designed in such a way that the material present in the gas phase faces a surface normal of the surface to be coated exits the nozzle outlet at an exit angle a oriented obliquely towards the surface.
  • the material present in the gas phase does not reach the surface perpendicularly but in an oblique orientation, namely with an exit angle between the normal to the surface and the direction of exit which is greater than zero.
  • the nozzle exit is in the form of a slit.
  • Designing a nozzle exit as a slit has the particular advantage that the nozzle section can be used in a particularly simple manner for different, ie in particular adjustable, exit angles, with comparable surface qualities being able to be obtained for different exit angles.
  • the nozzle can also be regarded as a one-dimensional opening, as a result of which the coating result can be regarded as largely independent of an angle of the longitudinal extension of the nozzle outlet to a transport direction of the surface to be coated.
  • the exit angle to the surface normal of the surface to be coated is set to between 20 and 50 degrees, preferably between 25 and 40 degrees. At these angles it could be observed that they lead to a good compromise between improved coating quality and high degree of coating.
  • the nozzle section is oriented such that the material present in the gas phase exits the nozzle outlet with a transport direction of the object, ie a transport direction of the surface to be coated, directed obliquely towards the surface.
  • reaction of the exit of the material present in the gas phase can take place in any manner to be chosen by the person skilled in the art.
  • a nozzle with a gas outlet occurring in the direction of a longitudinal axis of the nozzle can be arranged at an angle in the coating chamber.
  • a nozzle can bring about the inclined outlet through the shaping of the nozzle cavity. Reactions in which both approaches are envisaged cumulatively can also be selected by a person skilled in the art depending on the circumstances at hand.
  • the nozzle is designed in such a way that it has a nozzle cavity which, viewed in the direction of gas transport, tapers, preferably tapers continuously, and opens into the nozzle outlet.
  • the nozzle cavity at least in sections, preferably in end sections (i.e. with a section that opens into the nozzle outlet), alternatively along the entire longitudinal extension of the nozzle, has inner walls oriented obliquely with respect to a surface normal of the surface to be coated.
  • the inner walls are oriented obliquely relative to a perpendicular to the surface to be coated, preferably with the emergence angle as the oblique position.
  • the obliquely oriented inner walls are preferably planar surfaces oriented parallel to one another, so that the exit angle of the material present in the gas phase can be defined in a structurally simple manner.
  • the nozzle is rotatably mounted.
  • the purpose of the rotatable mounting of the nozzle is to change the orientation of the nozzle outlet relative to the surface to be coated. Due to the fact that the nozzle is rotatably mounted and the orientation of the nozzle outlet relative to the surface to be coated is variable, the way in which the material present in the gas phase is directed onto the surface of the object to be coated, for example the strip, is targeted can be influenced or adjusted.
  • An embodiment is particularly preferred in which the nozzle is rotatably mounted adjacent to the evaporation section, so that the evaporation section acts as a plain bearing for the nozzle.
  • an evaporation section made partially or entirely of graphite and/or CFC has the advantage that carbon is present as a natural lubricant, so that there is an elegant and equally robust solution for lubricating the rotatable nozzle.
  • graphite in powder and/or paste form as a lubricant between Evaporation section and nozzle section are introduced and are thereby introduced between the surfaces of the evaporation section and nozzle section lying against one another and sliding on one another.
  • the nozzle outlet can be oriented in such a way that it lies in a plane which lies parallel to the surface to be coated, at least in that section of the surface to be coated in which the coating takes place.
  • the nozzle is particularly preferably designed in such a way that it can assume a position in which the nozzle outlet is designed as a slot and this is oriented perpendicular to a direction of movement and perpendicular to a transport direction of the surface to be coated and can be rotated about with an axis of rotation which is perpendicular is oriented to the surface to be coated.
  • the length of the slit-like nozzle outlet is selected such that at an angle ß of 90 degrees between the transport direction and the slit-like nozzle, a width of the flat object, for example a strip width, is completely covered, in particular for those strips which have the maximum width for the implementation of which the coating chamber is designed.
  • a width of the flat object for example a strip width
  • the effective coating width can then be changed perpendicularly to the direction of travel of the strip with the factor sin( ⁇ ), where ⁇ is the angle between the transport direction and the longitudinal extension of the nozzle.
  • a device provided in this way is particularly suitable for enabling the coating of flat objects, in particular strips, with a bandwidth that is smaller than the longitudinal extension of a slit-like nozzle outlet with high efficiency, so that no portion of the material present in the gas phase flows past the two wall edges and rises Inner walls of the coating chamber deposits without being available for coating the surface.
  • the existing starting material is used and used as efficiently as possible; on the other hand, contamination of the coating chamber when coating narrower objects, in particular narrower strips, is avoided.
  • the development of the coating installation mentioned achieves a high level of flexibility with regard to the possible width of an object to be coated.
  • the nozzle is mounted in such a way that when the nozzle is rotated, the nozzle outlet performs a rotary movement in a plane parallel to the surface.
  • the nozzle outlet describes a surface during rotation which lies in a plane parallel to the surface to be coated - it is ensured that, regardless of the angle at which the nozzle is rotated in relation to the transport direction, a homogeneous coating of the surface to be coated in the transverse direction - i.e. in the direction perpendicular to the transport direction - is guaranteed.
  • an axis of rotation for rotating the nozzle is oriented perpendicularly to the surface to be coated, which is always possible by the person skilled in the art commissioned to carry out the present development by positioning the device for vapor phase deposition within the coating chamber, taking into account the transport of the object to be coated usual constructive measures can be implemented.
  • the inclined position of the exit angle relative to the surface to be coated which is also to be ensured, preferably takes place in the Essentially, particularly preferably exclusively, by the design of the interior of the nozzle, that is by the shape of the nozzle cavity, for example in one of the preferred embodiments mentioned above.
  • the inner walls of the nozzle cavity are oriented at an angle to a perpendicular to the surface to be coated with the exit angle as an inclined position and, on the other hand, the nozzle is rotatably mounted with an axis of rotation perpendicular to the surface to be coated, there is a constellation in which the exit angle is exclusively determined by the formation of the internal cavity is brought about and it remains the same as the nozzle is rotated.
  • This constellation is preferred because it creates coatings with essentially constant properties, for example with regard to their appearance, when the angle of rotation of the nozzle changes.
  • the axis of rotation of the nozzle is shifted relative to a center of the nozzle outlet, preferably: parallel shifted, preferably in the plane that contains a perpendicular to the direction of movement of the object to be coated and the center of the nozzle outlet .
  • the center of the nozzle exit is the point that bisects the distance between two most distant extensions of the nozzle exit.
  • the center of the nozzle exit is the point that bisects both the length of the slot and the width of the slot.
  • the axis of rotation is therefore displaced from the above-described perpendicular on the surface to be coated in a direction also or only perpendicular to the transport direction, parallel to a perpendicular standing on the center of the surface to be coated, for example a line of symmetry of a strip to be coated.
  • the advantage is obtained that the asymmetrical coating caused by oblique exit during rotation is largely compensated .
  • the displacement of the asymmetrical displacement of the coating must be implemented in the opposite direction, which can be implemented without problems by a person skilled in the art depending on the coating requirements.
  • the displacement of the axis of rotation is therefore carried out in such a way that, during an intended rotation, a coating occurring past a first boundary of the object, for example a first belt edge, is reduced in extent or completely avoided by a displacement of the axis of rotation in a direction pointing away from the first belt edge or in the case of an intended rotation, a coating occurring past a second boundary of the object, for example a second belt edge, is reduced in extent or completely avoided by shifting the axis of rotation in a direction pointing away from the second belt edge.
  • the displacement of the axis of rotation is a fixed displacement X0 dependent on the exit angle ⁇ and the distance A of the nozzle exit from the surface to be coated.
  • a fixed displacement X0 dependent on the exit angle ⁇ and the distance A of the nozzle exit from the surface to be coated.
  • the angle a is the exit angle at which the material present in the gas phase emerges from the nozzle outlet, oriented obliquely towards the surface and directed towards a surface normal of the surface to be coated.
  • A is the distance of the nozzle exit from the surface to be coated.
  • the nozzle outlet is a slit, and that the nozzle outlet and the nozzle are arranged in the coating chamber in such a way that a plumb line is drawn from the center of the nozzle outlet onto the surface of the object to be coated, for example a strip surface, from both edges of the Object has the same distance.
  • the nozzle outlet is particularly preferably dimensioned in such a way that it covers the entire width of the strip, but—even more preferably—it does not protrude significantly beyond this, ie for example not by more than 10% of the strip width per side.
  • the axis of rotation is spaced from the center of the nozzle exit by a distance X0, X0 in a direction oriented perpendicular to the direction of travel and parallel to the surface.
  • a nozzle with a circular-cylindrical bearing section and an axis of symmetry is provided as the axis of rotation, and the displacement of the axis of rotation is implemented by the positioning of the nozzle outlet.
  • This solution has the advantage of being easy to implement and inexpensive.
  • the nozzle is rotationally symmetrical with a nozzle outlet cut through the axis of symmetry in half the longitudinal extension, and the displacement of the axis of rotation by actually converting the axis of rotation by means of correspondingly more complex slide bearings or something else
  • Position change mechanism is provided with the disadvantage of a higher design effort but the potential advantage of a space-saving implementation.
  • the exact implementation is not important, since it is possible in many different ways. What is essential for the preferred development of a nozzle with a shifted axis of rotation is that the material present in the gas phase exits at an angle when rotating deflection caused by the nozzle in the plane of the surface to be coated by repositioning the axis of rotation relative to the nozzle outlet compared to a constellation in which the material present in the gas phase would arrive perpendicularly on the surface.
  • a particularly preferred embodiment of the coating system described above or one of its developments is characterized in that, in addition to the device for gas-phase deposition of the material, a second device for gas-phase deposition of the material is arranged on the coating system, which has a second evaporation section and a second nozzle section.
  • the second nozzle of the second nozzle section is designed and oriented in such a way that the material present in the gas phase exits the second nozzle outlet at an exit angle oriented obliquely towards the surface with respect to a surface normal of the surface to be coated.
  • the nozzle section is designed and oriented in such a way that the material present in the gas phase exits the nozzle outlet with a transport direction of the object directed obliquely towards the surface, and the second nozzle section is oriented in such a way that the material present in the gas phase runs counter to a transport direction of the object directed obliquely to the surface and emerges from the second nozzle outlet.
  • the coating system makes it possible to carry out a coating from the first device for gas-phase deposition of the material in the opposite direction to a coating with the second device for gas-phase deposition of the material. It is then particularly preferred that, viewed in the direction of transport of the surface to be coated, the coating is first carried out diagonally towards the surface and only then is the coating carried out diagonally in the opposite direction towards the surface, for the reasons already explained at the outset with reference to cluster and/or droplet formation.
  • the device for gas phase deposition of material is a jet vapor deposition system.
  • the evaporation section is then particularly preferably designed as a crucible.
  • the device for gas phase deposition of material is a jet vapor deposition system, with the evaporation section preferably being designed as a crucible.
  • jet vapor deposition system is understood by those skilled in the art as a system in which the coating material is thermally brought into the gas phase and then, in modifications, optionally with a carrier gas stream of inert gas, is transported to the substrate, preferably with a gas flow rate above the
  • the evaporation section is preceded by a pre-evaporation section, which in particular has an injection head including a carrier gas flow feed to the injection head and an injector tube from the injection head to the evaporation section.
  • the starting material is fed to the extrusion head, preferably in the form of wire or strip.
  • the starting material is processed in the spray head, which means that components of the starting material are vaporized and/or separated from the starting material as particles present in the liquid phase, preferably by means of arc vaporization between Cathode switched feedstock and anode switched feedstock.
  • the processed starting material is not completely in the gas phase, but consists of a mixture, in particular of gas phase and liquid or partially liquid particles, which is suitable for being guided through the evaporation section in order to be post-evaporated there, i.e. completely or largely completely by heating that takes place there to go into the gas phase.
  • a device for the gas phase deposition of material is to be regarded as a variant of jet vapor deposition if the material present in the gas phase is transported at a speed above the speed of sound, particularly preferably above 500 meters per second, with reference to the precise classification does not matter as long as material present in the gas phase is provided and this material present in the gas phase is transported through a nozzle section, exiting a nozzle outlet, directed towards a surface to be coated.
  • 2a, 2b schematic representations of an embodiment of an optionally rotatably mounted nozzle.
  • a coating system 1 can be seen in FIG.
  • the coating system 1 is designed as a strip coating system and for this reason includes a device for transporting the strip, as is known in the field of the production and coating of metal strips, in particular steel strips.
  • the tape is transported by means of transport rollers 3a, 3b.
  • the tape is introduced into a coating chamber 4 and through the
  • Coating chamber passed in which a technical vacuum is present, for example, with a pressure between 0.01 mbar and 20 mbar, optionally kept constant with the continuous supply of protective gas such as Ar or N 2 .
  • the strip is guided along a transport direction 5 through the coating chamber 4 and past a device 6 for gas phase deposition of the material, which in the present embodiment is designed as a jet PVD device 6 known to those skilled in the art in terms of its basic mode of operation.
  • a vapor phase material is directed onto the surface of the metal strip to form a coating there by condensation.
  • the device 6 has an evaporation section 7 for evaporating the material into the gas phase and a nozzle section 8 coupled to the evaporation section 7 .
  • the nozzle section 8 comprises in particular a nozzle 9 arranged inside the coating chamber 4 with a nozzle outlet which is directed towards the surface of the strip to be coated, in order to
  • the nozzle 8 is rotatably mounted here, but optionally, and is coupled to the evaporation section 7 .
  • the evaporation section 7 partially also extends into the coating chamber 4, although this neither is still absolutely necessary and can be carried out as required by the person skilled in the art entrusted with implementing the invention.
  • the nozzle 9 with the nozzle outlet is arranged inside the coating chamber 4 in order to ensure the coating of the surface of the strip.
  • the nozzle 9 is rotatably mounted, as is symbolized by the arrows 10 .
  • the orientation of the nozzle outlet can be changed relative to the surface of the strip 2 to be coated, with the axis of rotation of the nozzle 9 being oriented perpendicularly to the surface to be coated in the embodiment shown.
  • the nozzle 9 has a nozzle outlet designed in the form of a slit with a longitudinal extent DO.
  • the nozzle is mounted or the nozzle outlet is arranged in the nozzle 9 in such a way that when the nozzle 9 rotates about its axis of rotation, the rotary motion of the nozzle 9 would take place in a plane parallel to the strip surface.
  • the nozzle 9 is oriented at an angle ⁇ of zero to the tape transport direction. In the orientation shown, only a narrow strip of tape would be coated.
  • a strip With a rotation of 90 degrees around the axis of rotation shown, on the other hand, a strip would be coated with a width, i.e. with an extent in its transverse direction, which in the present illustration is oriented perpendicularly into the plane of the paper, that corresponds to the longitudinal extent DO of the strip corresponds, whereby slight deviations are possible due to the flow profile of the particles flowing out of the nozzle outlet.
  • Fig. lb is a representation of the coating system 1 shown in Fig. La shown in plan view.
  • the nozzle outlet 11 of the nozzle 9 designed as a slot 11 occupies an angle ⁇ of 90 degrees to the transport direction of the strip 2, ie compared to the position from FIG rotated 90 degrees.
  • the longitudinal extent of the nozzle outlet 11 is greater than the width of the strip in its transverse direction. If the strip 2 had a smaller width in the transverse direction than that shown in FIG past into the coating chamber 4, in particular in an area of the coating chamber 4 located below the strip, and is therefore no longer available for the formation of a coating.
  • the optional provision of a rotatable nozzle thus ensures that efficient coating of a strip is possible for different strip widths and even with variable strip widths within the same strip.
  • FIG. 2a shows a side plan view of an exemplary embodiment of a nozzle 9.
  • the strip 2 is shown as a specific example of an article, the surface 2a being the surface to be coated.
  • the nozzle 9 is designed in such a way that the material present in the gas phase emerges from the nozzle outlet 11 in relation to a surface normal 12 of the surface 2a to be coated with an exit angle oriented obliquely towards the surface.
  • the nozzle 9 has a nozzle cavity 13 which tapers in a section AA in the gas transport direction 14 . The purpose of the tapered section is to compress the material vapor to increase aim and speed.
  • the nozzle section in the present case congruent with the nozzle 9, is oriented in such a way that the material 15 present in the gas phase exits the nozzle outlet 11 with a transport direction 16 of the object designed as a strip 2 directed obliquely towards the surface 2a.
  • the oblique outlet of the material vapor 15 with the angle relative to the band solder is ensured by the fact that obliquely oriented inner walls 17 and 18 are designed as flat surfaces oriented parallel to one another, and thereby define the exit angle of the material 15 present in the gas phase.
  • the material 15 present in the gas phase arrives with a transport direction 16 of the belt obliquely on the belt surface.
  • FIG. 2b shows a plan view of the nozzle 9 looking in the direction of the arrow P shown in FIG. 2a. It can be seen that the axis of rotation 19 of the nozzle is shifted relative to a center M of the nozzle outlet 11 . The displacement is provided by a distance X0 and takes place in the plane formed by the perpendicular to the direction of movement of the object to be coated and also containing the center M. With the nozzle 9 shown, with a clockwise rotation, indicated by the arrow U about the axis 19, extensive compensation of the asymmetry can be obtained which would result in the coating on the strip surface without displacement X0 in the case shown in FIG. 2a oblique outlet of the material in the gas phase. If a counter-clockwise rotation had been planned, the X0 shift should have been in the exact opposite direction.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Coating Apparatus (AREA)

Abstract

L'invention concerne une installation de revêtement (1) pour revêtir un objet (2), par exemple une bande métallique (2), avec un matériau présent dans la phase gazeuse. La bande (2) peut, par exemple, être transportée dans une direction de transport (5) au moyen de rouleaux de transport (3a, 3b). L'installation de revêtement (1) comprend : - une chambre de revêtement (4), - un dispositif de dépôt en phase vapeur du matériau (6), comprenant une partie d'évaporation (7) et une partie buse (8) comportant une buse (9) et une sortie de buse dotée d'une extension (D0), la buse (9) étant orientée et conçue de sorte que le matériau présent dans la phase gazeuse sorte de la sortie de buse par rapport à une normale à la surface de la surface à revêtir avec un angle de sortie orienté obliquement par rapport à l'objet. La buse peut éventuellement tourner dans la direction des flèches (10).
EP22732456.3A 2021-07-07 2022-05-30 Installation de revêtement pour revêtir un objet Pending EP4367284A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102021117576.3A DE102021117576B4 (de) 2021-07-07 2021-07-07 Beschichtungsanlage zur Beschichtung eines Gegenstands
PCT/EP2022/064538 WO2023280465A1 (fr) 2021-07-07 2022-05-30 Installation de revêtement pour revêtir un objet

Publications (1)

Publication Number Publication Date
EP4367284A1 true EP4367284A1 (fr) 2024-05-15

Family

ID=82156776

Family Applications (1)

Application Number Title Priority Date Filing Date
EP22732456.3A Pending EP4367284A1 (fr) 2021-07-07 2022-05-30 Installation de revêtement pour revêtir un objet

Country Status (3)

Country Link
EP (1) EP4367284A1 (fr)
DE (1) DE102021117576B4 (fr)
WO (1) WO2023280465A1 (fr)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2048261A1 (fr) * 2007-10-12 2009-04-15 ArcelorMittal France Générateur de vapeur industriel pour le dépôt d'un revêtement d'alliage sur une bande métallique
DE102010041380A1 (de) 2009-09-25 2011-04-28 Von Ardenne Anlagentechnik Gmbh Verdampfereinrichtung für eine Beschichtungsanlage
DE102013206598B4 (de) 2013-04-12 2019-06-27 VON ARDENNE Asset GmbH & Co. KG Vakuumbeschichtungsanlage
EP3559304A1 (fr) * 2016-12-22 2019-10-30 Flisom AG Source de vapeur linéaire
WO2019239186A1 (fr) 2018-06-13 2019-12-19 Arcelormittal Installation de dépôt sous vide et procédé de revêtement d'un substrat
JP2022512348A (ja) * 2018-12-11 2022-02-03 アプライド マテリアルズ インコーポレイテッド 蒸発材料を堆積するための蒸気源、蒸気源のためのノズル、真空堆積システム、及び蒸発材料を堆積するための方法

Also Published As

Publication number Publication date
WO2023280465A1 (fr) 2023-01-12
DE102021117576B4 (de) 2023-02-09
DE102021117576A1 (de) 2023-01-12

Similar Documents

Publication Publication Date Title
EP2655686B1 (fr) Source de vaporisateur et procédé de revêtement
EP0282836B1 (fr) Procédé et appareil pour déposer des couches à haute résistance ohmique par pulvérisation cathodique
DE69406084T2 (de) Vakuumbeschichtung von Bahnen
AT396927B (de) Vorrichtung und verfahren zum ausbilden eines überzuges auf einem glassubstrat
DE3638435C2 (de) Verfahren und Vorrichtung zur pyrolytischen Bildung eines Metalloxidüberzugs auf Glas
DE69405513T2 (de) Vakuumverdampfer zum Beschichten einer Bahn
DE102021117576B4 (de) Beschichtungsanlage zur Beschichtung eines Gegenstands
EP1422313A1 (fr) Dispositif et méthode de depot en phase vapeur sous vide d'un matériau de revêtement avec remplissage de matériau automatique
EP0282540B1 (fr) Procede et dispositif pour metalliser des surfaces de feuilles plastique
WO2006037516A1 (fr) Dispositif pour revetir un substrat se presentant sous la forme d'une bande
EP4200459B1 (fr) Procédé de dépôt physique en phase vapeur et dispositif associé
EP3460092A1 (fr) Revêtement à faible émissivité
DE69314770T2 (de) Reaktives Abscheidungsverfahren mittels ionisiertem Cluster-Strahl
EP1493836A1 (fr) Procédé et dispositif pour la déposition localisée des agents de démoulage
DE102021117574A1 (de) Beschichtungsanlage zur Beschichtung eines flächigen Gegenstands sowie ein Verfahren zum Beschichten eines flächigen Gegenstands
DE10347119B4 (de) Beschichtungsvorrichtung, Beschichtungsverfahren und beschichtetes Objekt
EP1633495A1 (fr) Systeme de pulverisation ultrasonore a ondes stationnaires
WO2023174691A1 (fr) Procédé d'application d'un revêtement en alliage métallique contenant au moins deux métaux sur un substrat
EP4185730B1 (fr) Procédé de dépôt de matériaux métalliques
DE102021110394A1 (de) Beschichtungsanlage zum Beschichten eines Bands und Verfahren zum Beschichten eines Bands
WO2022156921A1 (fr) Procédé de revêtement continu d'une bande et installation de revêtement
EP0520133B1 (fr) Dispositif pour le revêtement en continu des substrats en bande
WO2024188383A1 (fr) Kit d'extension d'un dispositif d'application de revêtement liquide, dispositif d'application de revêtement liquide et procédé de séchage d'une surface
DE1771629C (de) Verdampfungsvorrichtung für Aluminium
DE1771629B1 (de) Verdampfungsvorrichtung fuer aluminiunm

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: UNKNOWN

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20240207

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)