EP4189135A1 - Procédé de changement d'un dispositif porte-pièce à travailler, dispositif porte-pièce à travailler et installation de production pour le revêtement de substrats - Google Patents

Procédé de changement d'un dispositif porte-pièce à travailler, dispositif porte-pièce à travailler et installation de production pour le revêtement de substrats

Info

Publication number
EP4189135A1
EP4189135A1 EP21748538.2A EP21748538A EP4189135A1 EP 4189135 A1 EP4189135 A1 EP 4189135A1 EP 21748538 A EP21748538 A EP 21748538A EP 4189135 A1 EP4189135 A1 EP 4189135A1
Authority
EP
European Patent Office
Prior art keywords
workpiece carrier
carrier device
drive shaft
bore
production plant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP21748538.2A
Other languages
German (de)
English (en)
Inventor
Jörg WITTICH
Simon Oberle
Jürgen HOTZ
Stefan Kunkel
Wolfgang Rieth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ALD Vacuum Technologies GmbH
Original Assignee
ALD Vacuum Technologies GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ALD Vacuum Technologies GmbH filed Critical ALD Vacuum Technologies GmbH
Publication of EP4189135A1 publication Critical patent/EP4189135A1/fr
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J11/00—Manipulators not otherwise provided for
    • B25J11/0075—Manipulators for painting or coating

Definitions

  • the present invention relates to a method for the automated or fully automated changing of a workpiece carrier device in a production plant for coating substrates, in particular for coating turbine blades, vanes, air baffles, etc. using an EB PVD method (EB PVD: Electron-Beam Physical Vapor Deposition). Furthermore, the present invention relates to a corresponding workpiece carrier device and a corresponding production system that enable fully automated changing of the workpiece carrier device.
  • a workpiece carrier device for a production plant for coating substrates can also be referred to as a rake, rake, TBC rake or the like (TBC: Turbine Blade Coating).
  • the workpiece carriers (so-called rakes or rakes) are loaded and unloaded manually by the system operator in a loading chamber of a coating chamber.
  • the coated substrates in the loading chamber are removed individually from the workpiece carrier.
  • the substrates to be newly coated are also placed individually on the workpiece carrier in the loading chamber.
  • the manual loading and unloading of the individual substrates makes these substrate changing processes time-consuming.
  • the substrates reach temperatures of up to 1000°C during the coating process, a certain cooling time must also be allowed to pass before they are removed. At a temperature of around 600 °C, the individual substrates are then removed manually by the operator using heat gloves.
  • One object of the invention is therefore to provide a method, a workpiece carrier device and a production system which have the disadvantages of the prior art overcome.
  • the object of the invention is to provide a solution that enables a quick and reproducible substrate change in a coating system.
  • One aspect of the invention relates to a method for changing a workpiece carrier device in a production plant for coating substrates, preferably for coating substrates such as turbine blades, blades, air baffles, etc., preferably using an EB PVD method (EB PVD: Electron-Beam Physical Vapor Deposition ).
  • the method can include an automated or fully automated changing of the workpiece carrier device.
  • a workpiece carrier device for a production plant for coating substrates can also be referred to as a workpiece carrier, rake, rake, TBC rake or the like (TBC: Turbine Blade Coating).
  • the method includes moving the workpiece carrier device by means of a robot from a staging area on the production facility to a processing zone in the production facility.
  • the displacement can include gripping the workpiece carrier device by means of a robot gripper of the robot, lifting the workpiece carrier device and pivoting the workpiece carrier device.
  • the robot can be, for example, an articulated arm robot, a portal robot, a handling system (a handling device) with several axes or the like.
  • the robot gripper can be designed to grip at least one, at least two or more than two workpiece carrier devices.
  • the method includes a detachable coupling of the workpiece carrier device to the production system via a coupling interface of the workpiece carrier device and a connection section of the production system in the processing zone.
  • the detachable coupling is realized by further moving the workpiece carrier device by means of the robot.
  • the further displacement can be a vertical displacement, more precisely a lowering, of the workpiece carrier device.
  • the further relocation usually takes place after the workpiece carrier device has been relocated to a designated position in the processing zone, in particular into a loading chamber.
  • a connecting arm of the workpiece carrier device is mechanically coupled to a connection section of the production system, as a result of which the connection arm is fixed or held in a fixed position relative to the connection section.
  • the entire frame structure of the workpiece carrier device is fixed or held in a fixed position relative to the connection section, since the connecting arm is preferably formed in one piece with the frame structure or can be part of the frame structure or can at least be firmly connected to the frame structure.
  • This fixed mechanical coupling can be released, in particular by a vertical displacement in the form of a lifting movement of the workpiece carrier device using the robot.
  • a drive shaft of the workpiece carrier device is mechanically coupled to a driving shaft of the production plant, as a result of which the drive shaft is rotatably connected to the driving shaft.
  • This mechanical coupling can also be released, in particular by the vertical displacement in the form of the lifting movement of the workpiece carrier device by means of the robot.
  • the method according to the invention thus enables the entire workpiece carrier device, which comprises a large number of individual holders or substrate holders with substrates arranged on them, to be changed in a simple manner.
  • the entire workpiece carrier device, including a large number of substrates can thus be automatically decoupled as a unit from the other components of the production system and relocated to the staging area or a removal zone by means of the robot and thanks to the mechanical coupling interface provided on the workpiece carrier device. From there, the workpiece carrier device can be transported further and loaded and unloaded in a loading and unloading zone. Meanwhile, the robot can be used to move a newly prepared workpiece carrier device with substrates to be coated from a staging area to the processing area and couple it to the production system.
  • Loading and unloading within the system is therefore no longer carried out individually and manually, as is the case with conventional production systems. Rather, a large number of substrates are automatically changed at the same time. Due to the robot-actuated mechanical coupling and relocation, the change can be implemented reproducibly, faster and safely. This relieves the plant operator.
  • the robot can include a displaceable locking bolt.
  • the displaceable locking bolt can be locked in a first position formed in the connecting arm prior to displacing the workpiece carrier device to the machining zone Through hole and simultaneously introduced into a first drive shaft hole formed in the drive shaft.
  • a relative rotation between the drive shaft and the connecting arm can be blocked, in particular during the displacement and the coupling of the workpiece carrier device.
  • the displaceable locking bolt can be removed or pulled out of the first through hole and the first drive shaft hole after the workpiece carrier device has been detachably coupled to the production system.
  • a relative rotation between the drive shaft and the connection arm can be allowed, which for example may be necessary during the subsequent coating of the substrates in order to move them according to an intended program.
  • the displaceable locking bolt can be displaced automatically into and out of the first bores.
  • the robot's displaceable locking bolt may be pneumatically, hydraulically, and/or electromechanically displaceable. By inserting and pulling out the displaceable locking bolt in associated first bores, the reproducibility of the coupling and thus the change can be further improved and thus safety can be further increased.
  • the locking bolt can be linearly displaceable, in particular vertically displaceable.
  • the workpiece carrier device can be arranged in the staging area on a centering tray or a centering platform with a centering bolt formed thereon in such a way that the centering bolt engages in a second through bore formed in the connecting arm and in a second drive shaft bore formed in the drive shaft.
  • the centering bolt can in particular be a stationary centering bolt.
  • the second bores can be spaced apart from the first bores in the circumferential direction of the connecting arm or the drive shaft, for example offset by 180°.
  • the second bores can preferably be arranged coaxially to the first bores.
  • the centering pin can be introduced into the associated first bores in that the workpiece carrier device is positioned precisely in a predetermined position on the centering tray by means of the robot.
  • the centering pin can be introduced into the associated second bores by lowering the workpiece carrier device by means of the robot.
  • the centering bolt can be fully inserted into the second bores before the displaceable locking bolt is pulled out of the associated first bores and preferably before the robot releases the workpiece carrier device.
  • the centering tray can be displaceable or mobile, so that it, together with the workpiece carrier device positioned thereon, including substrates, can be moved from the staging zone to a loading and unloading zone remote from the production plant.
  • the driving shaft of the production plant can be brought into a predetermined rotational position relative to the drive shaft by means of a controller.
  • the controller can, for example, be a programmable logic controller or include a PLC program.
  • the alignment of the driving shaft in the predetermined rotational position relative to the drive shaft can already be realized by an alignment for the previous decoupling of a workpiece carrier device, with the driving shaft remaining in the aligned rotational position during the change in this case.
  • the alignment of the driving shaft for the previous decoupling includes a simultaneous alignment of the drive shaft, which is still mechanically coupled thereto. This also places the drive shaft in a predetermined rotational position of the drive shaft relative to the link arm, thereby bringing the first drive shaft bore into alignment with the first through bore of the link arm and bringing the second drive shaft bore into alignment with the second through bore of the link arm.
  • automated tracking of the substrates to be coated and/or the coated substrates can also be carried out, for example in order to determine their position, coating status, quality, etc.
  • the method can include status monitoring of the substrates.
  • the status monitoring can be implemented by image processing processes and/or by measuring properties of the substrates. Measuring the properties of the substrates can include, for example, measuring and comparing the weight of the workpiece carrier device including the substrates before and after coating.
  • the method can be carried out in particular by means of a workpiece carrier device of the type described below and/or a production plant of the type described below.
  • the method can include changing more than one workpiece carrier device, for example two, three or more than three workpiece carrier devices, at the same time.
  • the features, functions and aspects described above in relation to the workpiece carrier device apply correspondingly to the additional workpiece carrier device(s).
  • a workpiece carrier device for a production plant for coating substrates, preferably for coating turbine blades, vanes, air baffles, etc., preferably using an EB PVD method (EB PVD: Electron Beam Physical Vapor Deposition).
  • the workpiece carrier device can also be referred to here as a workpiece carrier, rake, rake, TBC rake or the like.
  • the workpiece carrier device comprises a frame structure with a plurality of individual holders or substrate holders formed thereon for holding a plurality of substrates. Each individual holder can be designed to hold a substrate.
  • the workpiece carrier device comprises an elongate connection arm which connects the frame structure and thus the plurality of individual holders to a connection section of the production plant.
  • the link arm has a longitudinal axis along which the link arm extends.
  • the connecting arm can in particular be tubular.
  • the link arm preferably has a circular cross-sectional area.
  • the connecting arm and the frame structure can in particular be designed in one piece.
  • the linkage arm may be a part, portion, or section of the frame structure.
  • the connecting arm can be an end section of the frame structure or the workpiece carrier device.
  • the workpiece carrier device comprises a drive shaft which is rotatably mounted in the connecting arm and is mechanically coupled to the plurality of individual holders in order to drive or move the plurality of substrates.
  • the drive shaft is therefore in the connecting arranged arm and extends at least in sections through the connecting arm along the longitudinal axis of the connecting arm or has a common longitudinal axis with the connecting arm.
  • the workpiece carrier device comprises a coupling interface via which the workpiece carrier device can be detachably coupled to the production system by means of a robot.
  • the coupling interface can be formed in particular on an end of the connecting arm that faces away from the plurality of individual holders.
  • the connection arm can be mechanically coupled to the connection section of the production system by means of the coupling interface in order to hold the connection arm and the frame structure (i.e. the workpiece carrier device) that is firmly connected to it or formed in one piece with it (i.e. the workpiece carrier device) in a fixed position relative to the connection section.
  • the drive shaft can be mechanically coupled to a driving shaft of the production plant by means of the coupling interface in order to connect the drive shaft to the driving shaft in a rotationally drivable manner.
  • the coupling interface thus implements both a fixed static connection for holding and fixing the workpiece carrier device and a mechanical connection for transmitting dynamic movements (in particular rotational movements). It goes without saying that the mechanical couplings described are detachable connections.
  • the mechanical couplings can be released or established in particular by a lifting/lowering movement of the workpiece carrier device, i.e. by a vertical displacement of the workpiece carrier device transversely to the longitudinal axis of the connecting arm.
  • the lifting/lowering movement of the workpiece carrier device can be carried out by moving the workpiece carrier device using the robot.
  • the workpiece carrier device enables automated and/or fully automated changing of the entire workpiece carrier device including the frame structure with the plurality of individual holders and the plurality of substrates arranged thereon due to the mechanical coupling interface formed thereon.
  • a mechanical coupling interface can also be used at high temperatures and allows reliable and safe coupling and decoupling even under the ambient conditions in a processing zone of a coating system.
  • the coupling interface comprises two gripping surfaces, formed on a peripheral surface of the connecting arm, for a robot gripper of the robot.
  • the two attack surfaces can be arranged essentially opposite one another.
  • two contact surfaces can be recesses milled into the peripheral surface of the connecting arm, each of which has a substantially flat, non-rounded base surface, so that a complementary robot gripper can optimally grip these base surfaces.
  • the coupling interface can comprise a first through hole formed in the connecting arm for a locking bolt of the robot.
  • the docking interface may include a first drive shaft bore formed in the drive shaft for the robot locking bolt, the first through bore and the first drive shaft bore being aligned at a predetermined rotational position of the drive shaft relative to the link arm. Aligned with one another means here that these two bores are arranged essentially coaxially with one another and are spaced apart from one another along their axis of rotation, so that the locking bolt can be introduced through the first through bore into the first drive shaft bore, as a result of which the locking bolt can simultaneously engage with the first through bore and the first drive shaft bore in intervention.
  • the locking bolt can thus block or prevent a relative movement, in particular a rotary movement, between the drive shaft and the connecting arm during the engagement.
  • the locking bolt can also be referred to as a locking pin, locking mandrel or the like.
  • the coupling interface can comprise a second through-bore formed in the connecting arm for a centering pin of a centering tray.
  • the docking interface may include a second drive shaft bore formed in the drive shaft for a centering pin of a centering tray, the second through bore and the second drive shaft bore being aligned in a predetermined rotational position of the drive shaft relative to the link arm.
  • the predetermined rotational position can in particular correspond to the predetermined rotational position described above in relation to the first bores.
  • the centering bolt can be introduced through the second through bore into the second drive shaft bore, as a result of which the centering bolt simultaneously with the second through bore and the second drive shaft bore in intervention.
  • the centering bolt can thus block or prevent a relative movement, in particular a rotary movement, between the drive shaft and the connecting arm during the engagement.
  • the centering pin can also be referred to as a centering pin, centering mandrel or the like.
  • the docking interface may include a sword-shaped section formed on an end of the drive shaft.
  • the docking interface may include a key or protrusion formed on an end of the drive shaft.
  • the sword-shaped section or the projection/key can be formed on an end face of the end of the drive shaft.
  • the end of the drive shaft described here can be a free end of the drive shaft when the workpiece carrier device is in a non-assembled state.
  • the sword-shaped section or the projection/key is designed to engage with a complementary recess (e.g. groove or slot) of the driving shaft, so that a positive connection between the driving shaft and the drive shaft can be realized, which at least one transmission of rotary movements from the driving shaft to the drive shaft.
  • the drive shaft and the driving shaft can each be brought into a predetermined rotational position and thus aligned with one another in order to enable the sword-shaped section or the projection/key to engage in the complementary recess.
  • the predetermined rotational position of the drive shaft described here can in particular correspond to the predetermined rotational position described above in relation to the first and/or second bores.
  • the coupling interface can comprise a collar formed on one end of the connecting arm, in particular on a free end of the connecting arm when the workpiece carrier device is in a non-assembled state.
  • the collar may be in the form of a segment of an annulus which extends axially beyond the end of the connecting arm.
  • the ring segment can have the same outer diameter as the adjoining peripheral surface of the connecting arm.
  • the annulus segment may extend the peripheral surface beyond the end of the connecting arm and be integral with the peripheral surface.
  • the collar may include a retaining projection formed on its inner peripheral surface and extending from the inner peripheral surface of the collar in the direction of the longitudinal axis.
  • the holding projection thus represents a type of flange section.
  • the holding projection can be designed to engage behind a section or a component of the connection section, in particular a flange of the connection section, when the workpiece carrier device is coupled.
  • a further aspect of the invention relates to a production plant for coating substrates, in particular for coating turbine blades, vanes, air baffles, etc., preferably by means of an EB PVD process.
  • the production plant comprises at least one workpiece carrier device of the type described above, which is detachably connected or can be connected to a connection section of a rake arm of the production plant.
  • the production plant includes a driving shaft, which is rotatably mounted in the connection section and can be driven in rotation by a motor.
  • the motor can be integrated into the production plant or arranged externally.
  • the production system can include a robot which is designed to connect the workpiece carrier device to the connection section, to decouple the workpiece carrier device from the connection section and to relocate the workpiece carrier device.
  • the robot can be, for example, an articulated arm robot, a portal robot, a handling system (a handling device) with several axes or the like.
  • the robot can be designed to connect or couple the workpiece carrier device to the connection section of the rake arm by positioning and lowering it.
  • the robot can be designed to decouple or release the workpiece carrier device by lifting it from the connection section of the rake arm.
  • the robot may include a translatable locking bolt insertable into and removable from the first through bore and the first drive shaft bore.
  • the locking bolt can be displaced pneumatically, hydraulically and/or electromechanically, it being possible for the displacement of the locking bolt to be activated automatically via a control program.
  • the locking bolt can be linearly displaceable, in particular vertically displaceable.
  • the connection section can comprise an annular ring which extends in the axial direction from an end face of the rake arm and has a flange formed thereon.
  • the rake arm describes a frame section of the production system for carrying or supporting a workpiece carrier device that can be attached thereto.
  • the flange extends in a direction away from a longitudinal axis of the circular ring, more precisely in an assembled operating state of the production plant, generally upwards.
  • the annulus and flange may include a common axial recess formed in the annulus and flange.
  • the axial recess can be formed in an assembled operating state of the production plant in an upper area of the circular ring and the flange.
  • a section of the drive shaft can be introduced into the connection section (into the annular ring and the flange) via the axial recess in order to connect the drive shaft to the driving shaft.
  • the sword-shaped section or the projection/key of the drive shaft can be inserted through the axial recess into the complementary recess (e.g. groove or slot) of the driving shaft if the driving shaft and the drive shaft are in a predetermined rotational position relative to one another and towards each other aligned with the axial recess.
  • the driving shaft can have the complementary recess (e.g. groove or slot) formed in the end face, into which the sword-shaped section or the projection/key of the drive shaft can be introduced.
  • the end face can be an end face of the driving shaft facing the drive shaft.
  • the production plant can include a centering tray with a centering pin formed thereon.
  • the centering tray can be or can be arranged at a predetermined position on the production plant, in particular in a staging zone.
  • the workpiece carrier device can be positioned on the centering tray.
  • the centering tray provides a platform for temporarily receiving the workholding fixture.
  • the centering pin may be a fixed bolt, pin or the like which is insertable into the second bores of the link arm and the drive shaft to prevent relative rotation between the drive shaft and the link arm.
  • the workpiece carrier device can be placed on the centering tray by means of the robot.
  • the production plant can include more than one workpiece carrier device, for example two, three or more than three workpiece carrier devices.
  • workpiece carrier device for example two, three or more than three workpiece carrier devices.
  • the method and the workpiece carrier device are also suitable for other applications and production systems in which high temperatures prevail and mechanical movement interfaces are required.
  • FIG. 1 shows a schematic representation of a production plant according to an embodiment of the invention in a first state.
  • FIG. 2 shows a schematic representation of the production plant from FIG. 1 in a second state.
  • FIG. 3 shows a schematic plan view of a production plant according to a further embodiment of the invention.
  • FIG. 4 shows a schematic side view of a robot of the production plant from FIG. 3.
  • FIG. 5 shows a schematic detailed view of the production plant from FIG. 1 in the area of the coupling interface in a non-coupled state.
  • FIG. 6 shows a further schematic detailed view of the production plant from FIG. 1 in the area of the coupling interface in a non-coupled state.
  • FIG. 7 shows a schematic detailed view of the production plant from FIG. 1 in the area of the coupling section in a coupled state.
  • FIG. 8 shows a schematic detailed view of the production plant from FIG. 1 , which shows a section of a workpiece carrier device positioned on a centering tray.
  • FIG. 9 is a sectional view showing the detailed view shown in FIG. 9.
  • FIG. 9 is a sectional view showing the detailed view shown in FIG. 9.
  • FIG. 10 shows a gripper of the robot with a displaceable locking bolt.
  • FIGS. 1 and 2 show a production system 10 for coating a multiplicity of substrates 12, of which only one is provided with a reference symbol for reasons of clarity.
  • the production plant 10 in the embodiment shown is a coating plant for coating substrates 12 in the form of turbine blades.
  • the coating system can also be used to coat blades, air baffles or other components using an EB PVD process.
  • the substrates 12 are attached to a workpiece carrier device 50 of the production system 10 or are carried by it.
  • a workpiece carrier device 50 of the production system 10 In the embodiment of Figures 1 and 2, four workpiece carrier devices 50 are shown. Two workpiece carrier devices 50 together form a double rake arrangement. For the sake of clarity, only the subcomponents of one of the workpiece carrier devices are individually provided with reference numbers. The features described in relation to this workpiece carrier device 50, etc. apply accordingly to the other workpiece carrier devices 50.
  • Each of the workpiece carrier devices 50 comprises a frame structure 52 with a large number of individual holders 54 or substrate receptacles 54 formed thereon.
  • One substrate 12 is held by an associated individual holder 54, the individual holders 54 being connected via a drive shaft 56 (see Fig. 6 and 7 to 9 ) of the workpiece carrier device 50 are movable in order to move the substrates 12 during the coating according to a predetermined movement sequence.
  • the workpiece carrier device 50 includes an elongate connecting arm 58.
  • This elongate connecting arm 58 connects to the frame structure 52 or is here formed in one piece with the frame structure 52 and is thus part of the frame structure 52.
  • the connecting arm 58 is designed to connect the frame structure 52 with a here to connect L-shaped rake arm 24 of the production plant 10.
  • the connecting arm 58 is provided with a special coupling interface 60 at one end.
  • the rake arm 24 itself is in turn coupled to a manipulator 25 of the production plant 10 and can be moved by means of the manipulator 25 .
  • the processing zone is a loading chamber of the production plant 10, from which the workpiece carrier devices 50 can be introduced into a coating chamber by linear displacement of the manipulator 25.
  • the substrates 12 in the production system 10 according to the invention are not introduced individually into the processing zone 14, but a large number of substrates 12 are introduced into the processing zone 14 at the same time by moving the entire workpiece carrier device 50. More precisely, in the production plant 10 shown, two workpiece carrier devices 50 are moved into the processing zone 14 at the same time.
  • the production plant 10 includes a robot 16.
  • the robot 16 is shown in FIG Embodiment an articulated arm robot.
  • the robot 16 comprises two robot grippers 18, by means of which two separate workpiece carrier devices 50 can be gripped simultaneously in order to subsequently displace them, ie lift, pivot and lower them.
  • the robot 16 may include only one robotic gripper 18 for gripping one workholding device 50 or more than two robotic grippers for gripping more than two separate workholding devices.
  • the gripping, lifting, pivoting and lowering can be automated and specified by a control program.
  • the robot 16 is designed and set up to move the workpiece carrier devices 50 from a staging area 20 into the processing area 14 .
  • Workpiece carrier devices 50 preloaded with substrates 12 to be coated can thus be provided in the staging zone 20 .
  • the workpiece carrier devices 50 can be placed on a centering tray 80 in the staging zone 20 in order to ensure a predetermined position, rotational position and orientation of the workpiece carrier devices 50 in the staging zone 20 .
  • the robot 16 is designed and set up to move the workpiece carrier devices 50 after processing from the processing zone 14 to a removal zone 22 .
  • the workpiece carrier devices 50 equipped with the now coated substrates 12 can be transported away from the removal zone 20 .
  • the workpiece carrier devices 50 can also be placed on a centering tray 82 in the removal zone 22 in order to again ensure a predetermined position, rotational position and orientation of the workpiece carrier devices 50 .
  • the centering trays 80, 82 to ensure the predetermined position, rotational position and orientation of the workpiece carrier devices 50 each comprise at least one seat 84 and one centering pin 86 (in the embodiment shown two seats 84 and two centering pins 86).
  • the workpiece carrier devices 50 can be positioned in the respectively associated receptacle 84 by means of the robot 16 so that the associated centering pin 86 engages in a bore (see FIGS. 8 and 9) of the workpiece carrier device 50 .
  • the function of the centering bolts 86 is described in more detail in connection with FIGS.
  • work steps can be carried out in parallel, so that, for example, one or more new workpiece carrier devices 50 with uncoated substrates 12 can already be available in the staging zone 20, while one or more workpiece carrier devices 50 with just coated substrates 12 is/are shifted from the processing zone 14 to the removal zone 22.
  • the loading of the workpiece carrier devices 50 with substrates 12 to be coated can take place either in the staging zone 20 or in a loading zone (not shown) that is at a distance from the staging zone 20 .
  • the coated substrates 12 can be removed either in the removal zone 22 or in a removal zone (not shown) spaced apart from the removal zone 22 .
  • the associated centering trays can be displaceable, e.g. mobile, slidable or the like.
  • FIG. Two further workpiece carrier devices 50 with substrates intended for coating are positioned in the staging zone 20 .
  • the robot 16 does not hold or carry any workpiece carrier devices.
  • Fig. 2 shows a state of the production plant 10 shortly after the removal of two workpiece carrier devices 50 with coated substrates 12 from the processing zone 14.
  • the robot 16 holds or carries the two workpiece carrier devices 50 by means of the two robot grippers 18 in order to move them to the removal zone 22 move and position it there on the centering tray 82.
  • the robot 16 then uses the two robot grippers 18 to grip the workpiece carrier devices 50 with substrates to be coated that have been prepared in the staging zone 20 and positioned on the centering tray 80 in order to bring them into the processing zone 14 .
  • FIGS. 3 and 4 show a production plant 100 according to a further exemplary embodiment.
  • the production plant 100 essentially corresponds to the production plant 10 of FIGS. 1 and 2, only has a slightly modified arrangement of the components.
  • the components of the production system 100 are therefore provided with the same reference numbers as in FIGS.
  • the explanations for production plant 10 apply accordingly to production plant 100.
  • Figs. 5 and 6 show the coupling interface 60 in a non-coupled state, ie shortly before or shortly after a coupling with the rake arm 24 of the Production plant 10.
  • Fig. 7 shows the coupling interface 60 in a coupled state.
  • the coupling interface 60 is designed in such a way that the workpiece carrier device 50 can be detachably coupled to the production system 10 by means of the robot 16, in particular to a rake arm 24 of the production system 10.
  • Detachable means that by coupling the workpiece carrier device 50 to the production system 10 by means of the coupling interface 60 a fixed connection between the workpiece carrier device 50 and the production system 10 can be produced temporarily. This fixed connection can be released again to change the workpiece carrier device 50 without having to damage components for this purpose.
  • the structural design of the workpiece carrier device 50 in the area of its coupling interface 60 allows simple coupling and uncoupling to and from the rake arm 24 of the production system 10 and thus enables automated changing of the entire workpiece carrier device 50 together with a large number of substrates 12 for the first time.
  • the connecting arm 58 can be statically coupled to a connecting section 26 of the rake arm 24 of the production system 10 by means of the coupling interface 60 in order to position the connecting arm 58 in a fixed manner relative to the connecting section 26 and thus to the rake arm 24 to hold position.
  • the frame structure 52 or the entire workpiece carrier device 50 is held in a fixed position relative to the rake arm 24 .
  • the drive shaft 56 can be mechanically coupled to a driving shaft 28 of the production system 10 by means of the coupling interface 60 in order to connect the drive shaft 56 to the driving shaft 28 in a rotationally drivable manner.
  • the driving shaft 28 is rotatably mounted in the connection section 26 or the rake arm 24 and can in turn be driven in rotation by means of a motor (not shown) of the production plant 10 .
  • the drive shaft 56 is rotatably mounted in the link arm 58 and mechanically coupled to the plurality of individual brackets 54 .
  • the plurality of substrates 12 can be driven in the desired manner by means of the motor.
  • the coupling interface 60 comprises a collar 62 for releasably coupling the connecting arm 58 to the connecting section 26 of the rake arm 24 , which collar protrudes beyond a free end of the connecting arm 58 in the direction of the rake arm 24 .
  • the collar 62 extends a part of the outer peripheral surface of the connecting arm 58 in the axial direction.
  • the connecting arm 58 is tubular, so that the collar 62 itself has the shape of a circular ring segment.
  • the collar 62 is provided with a retaining projection 64 (see FIGS. 6 and 7) which protrudes from the inner peripheral surface in the direction of the longitudinal axis, ie protrudes downwards in FIGS. 5 to 7.
  • the holding projection 64 is designed to engage behind a flange 30 of the connection section 26 when the workpiece carrier device 60 is coupled to the rake arm 24 .
  • the flange 30 is formed on a circular ring 32 of the connection section 26 , the circular ring 32 extending from an end face 34 of the rake arm 24 in the axial direction toward the connecting arm 58 .
  • the flange 30 extends upwards from an outer peripheral surface of the annulus 32 in the illustration shown in FIGS.
  • the annulus 32 and the flange 30 formed thereon are provided with a common axial recess 36 . As can be seen by looking at FIGS.
  • the detachable coupling can be implemented in a simple manner by lowering the workpiece carrier device 50 in the direction of the longitudinal axis of the rake arm 24 . It goes without saying that the decoupling can be implemented in a similar manner by lifting the workpiece carrier device 50 .
  • the drive shaft 56 is provided with a sword-shaped end portion 66 for releasably coupling to the driving shaft 28 . That is, at one end of the drive shaft 56, the end face has an elongated projection 66 or a feather key 66 (sword-shaped end portion 66), which protrudes in the direction of the driving shaft 28.
  • the length of the projection 66/key 66 here corresponds to the diameter of the drive shaft 56.
  • the projection 66 or the key 66 is designed to engage with a complementary recess 38 (or groove or slot) of the driving shaft 28, so that a form-fitting connection between the driving shaft 28 and the drive shaft 56 can be realized, which enables rotary movements to be transmitted from the driving shaft 28 to the drive shaft 56 .
  • the projection 66/the feather key 66 can be introduced through the axial recess 36 into the groove 38/slot 38 of the driving shaft.
  • this intervention can be implemented by lowering the workpiece carrier device 50 in the direction of the longitudinal axis of the rake arm 24 .
  • the decoupling of the shafts 28, 56 can be realized in a similar manner by lifting the workpiece carrier device 50.
  • the drive shaft 56 and the driving shaft 28 are previously brought into a predetermined rotational position with respect to each other. This mutual alignment is shown in Figures 5-7.
  • the driving shaft 28 is brought into the rotational position shown before the coupling and/or the decoupling by means of the motor and a PLC program.
  • the rotational position of the drive shaft 56 is realized with the aid of centering/locking bolts and associated bores.
  • the connecting arm 58 comprises a first through bore 68 which extends through the wall of the connecting arm 58 .
  • the drive shaft 56 includes an associated first drive shaft bore 70 (FIG. 7).
  • the first through hole 68 and the first drive shaft hole 70 are spaced the same distance from the end face of the drive shaft 56 in the axial direction. Since the drive shaft 56 is rotatable relative to the link arm 58, the first through bore 68 and the first drive shaft bore 70 are coaxial with each other only in a predetermined relative rotational position of the drive shaft 56 and the link arm 58 of the frame structure 52.
  • the link arm 58 further includes a second through bore 72 which extends through the wall of the link arm 58 (indicated in Figure 5 and shown in Figure 9).
  • the drive shaft 56 includes an associated second drive shaft bore 74 (see Figure 9).
  • the second through hole 72 and the second drive shaft hole 74 are equidistant from the end face of the drive shaft 56 in the axial direction.
  • the second through bore 72 and the second drive shaft bore 74 are coaxial only in the predetermined relative rotational position of the drive shaft 56 and the link arm 58.
  • the predetermined relative rotational position is shown in Figures 5-9.
  • the second through bore 72 and the second drive shaft bore 74 are both spaced the same distance from the end face of the drive shaft 56 in the axial direction as are the first through bore 68 and the first drive shaft bore 70.
  • the second through bore 72 and the second drive shaft bore 74 are on one of the first through bores 68 and the first drive shaft bore 70 in opposite positions of the peripheral surface of the connecting arm 58 and the peripheral surface of the drive shaft 56, respectively. More specifically, the second through bore 72 is circumferentially offset from the first through bore 68 by 180° and the second drive shaft bore 74 is circumferentially offset from the first drive shaft bore 70 by 180°.
  • the drive shaft 56 can be rotated in a coupled state by means of the driving shaft 28 by the motor and the PLC program in the rotational position shown.
  • the drive shaft 56 is then fixed in this rotational position with the aid of a locking bolt 88 (see Fig. 10) of the robot 16, which is inserted through the first through bore 68 in engages the first drive shaft bore 70 to fix the drive shaft 56 relative to the link arm 28 and block relative rotation.
  • the locking bolt 88 can be displaced automatically into and out of the first bores, for example effected pneumatically, hydraulically and/or electromechanically.
  • the locking bolt 88 is introduced into the first bores 68, 70 before the workpiece carrier device 50 is lifted and thus decoupled from the rake arm 24.
  • the drive shaft 56 is therefore briefly fixed in its rotational position by the locking bolt 88 and by the coupling of the drive shaft 56 to the driving shaft 28 .
  • centering bolt 86 can be introduced into second bores 72, 74 by lowering or depositing workpiece carrier device 50 on centering tray 80, 82, with centering bolt 86 being able to be fixed on centering tray 80, 82 in one embodiment (such as shown in Figures 1, 2, 8 and 9).
  • the workpiece carrier device 50 is positioned in a targeted manner on the centering tray 80, 82 by means of the robot 16.
  • the connecting arm 58 has two lateral engagement surfaces 76 in the area of the coupling interface 60 .
  • the engaging surfaces 76 are machined into the peripheral surface of the connecting arm 58 and are formed opposite one another (only one engaging surface is visible in Figures 5 to 7 and 8).
  • the displaceable locking bolt 88 of the robot 16 can be formed in particular in the area of the robot gripper 18, as shown in FIG. 10 by way of example.
  • the locking bolt 88 is arranged between the gripping arms or gripping jaws 90 on a base body 96 of the robot gripper 18 and can be linearly displaced relative to the base body 96, which is indicated by the double arrow 92 (here a vertical displaceability).
  • the gripping arms or gripping jaws 90 in the exemplary embodiment shown can also be displaced toward and away from one another, which is indicated by the double arrow 94 .
  • the gripping arms or gripping jaws 90 can be guided in a linearly displaceable manner in the base body 96 of the robot gripper 18 or can be pivotably connected thereto.
  • staging zone 70 first driveshaft bore

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Robotics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Automatic Assembly (AREA)
  • Manipulator (AREA)
  • Specific Conveyance Elements (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

L'invention concerne un procédé de changement d'un dispositif porte-pièce à travailler (50) dans une installation de production (10) pour le revêtement de substrats (12). Le procédé comprend les étapes suivantes consistant à : transférer un dispositif porte-pièce à travailler (50) au moyen d'un robot (16) d'une zone de fourniture (20) vers une zone de traitement (14); coupler de manière amovible le dispositif porte-pièce à travailler (50) à l'installation de production (10) par l'intermédiaire d'une interface de couplage (60) du dispositif porte-pièce à travailler (50) par transfert à nouveau du dispositif porte-pièce à travailler (50) au moyen du robot (16); dans le but de coupler de manière amovible le dispositif porte-pièce à travailler (50) à l'installation de production (10), un bras de liaison (58) du dispositif porte-pièce à travailler (50) est couplé à une partie d'attache (26) de l'installation de production (10), en conséquence de quoi le bras de liaison (58) est fixe dans une position immobile par rapport à la partie d'attache (26), et, afin de coupler de manière amovible le dispositif porte-pièce à travailler (50) à l'installation de production (10), un arbre de transmission (56) du dispositif porte-pièce à travailler (50) est couplé à un arbre d'entraînement (28) de l'installation de production (10), en conséquence de quoi l'arbre de transmission (56) est raccordé avec faculté d'entraînement en rotation à l'arbre d'entraînement (28).
EP21748538.2A 2020-08-12 2021-07-14 Procédé de changement d'un dispositif porte-pièce à travailler, dispositif porte-pièce à travailler et installation de production pour le revêtement de substrats Pending EP4189135A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102020121241.0A DE102020121241B4 (de) 2020-08-12 2020-08-12 Verfahren zum Wechseln einer Werkstückträgervorrichtung, Werkstückträgervorrichtung und Produktionsanlage zum Beschichten von Substraten
PCT/EP2021/069596 WO2022033792A1 (fr) 2020-08-12 2021-07-14 Procédé de changement d'un dispositif porte-pièce à travailler, dispositif porte-pièce à travailler et installation de production pour le revêtement de substrats

Publications (1)

Publication Number Publication Date
EP4189135A1 true EP4189135A1 (fr) 2023-06-07

Family

ID=77126794

Family Applications (1)

Application Number Title Priority Date Filing Date
EP21748538.2A Pending EP4189135A1 (fr) 2020-08-12 2021-07-14 Procédé de changement d'un dispositif porte-pièce à travailler, dispositif porte-pièce à travailler et installation de production pour le revêtement de substrats

Country Status (6)

Country Link
US (1) US20230302487A1 (fr)
EP (1) EP4189135A1 (fr)
JP (1) JP2023541794A (fr)
CN (1) CN116057201A (fr)
DE (1) DE102020121241B4 (fr)
WO (1) WO2022033792A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117000522A (zh) * 2023-08-31 2023-11-07 中山市博测达电子科技有限公司 隔光片自动组装设备及其组装方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117225929B (zh) * 2023-11-10 2024-04-12 成都飞机工业（集团）有限责任公司 一种高精度弯管成型检测一体机

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6946034B1 (en) 1999-08-04 2005-09-20 General Electric Company Electron beam physical vapor deposition apparatus
US7997227B2 (en) 2007-03-13 2011-08-16 General Electric Company Vacuum coater device and mechanism for supporting and manipulating workpieces in same
US10889895B2 (en) 2014-06-12 2021-01-12 Raytheon Technologies Corporation Deposition apparatus and use methods

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117000522A (zh) * 2023-08-31 2023-11-07 中山市博测达电子科技有限公司 隔光片自动组装设备及其组装方法
CN117000522B (zh) * 2023-08-31 2024-04-05 中山市博测达电子科技有限公司 隔光片自动组装设备及其组装方法

Also Published As

Publication number Publication date
WO2022033792A1 (fr) 2022-02-17
DE102020121241B4 (de) 2024-07-04
DE102020121241A1 (de) 2022-02-17
JP2023541794A (ja) 2023-10-04
CN116057201A (zh) 2023-05-02
US20230302487A1 (en) 2023-09-28

Similar Documents

Publication Publication Date Title
EP4189135A1 (fr) Procédé de changement d'un dispositif porte-pièce à travailler, dispositif porte-pièce à travailler et installation de production pour le revêtement de substrats
EP3416787B1 (fr) Dispositif effecteur pour un robot, dispositif de travail pourvu d'un robot et procédé de changement d'effecteur dans des robots
DE3942662C2 (fr)
EP3140077B1 (fr) Système de machine-outil et procédé pour faire fonctionner un système de machine-outil
DE602004003223T2 (de) Werkstückhaltevorrichtung für Arbeitsstationen, Transfermaschinen, usw.
EP1470747A1 (fr) Dispositif de prelevement de puce, systeme d'equipement et procede pour prelever des puces d'une plaquette
DE102015217132B4 (de) Halterungssystem, Behandlungsvorrichtung und Beschickungsverfahren für scheibenförmige Objekte
DE102017121557B4 (de) Verfahren und Vorrichtung zur Förderung und Positionierung von Werkstücken
DE102004012592B4 (de) Verfahren zum lagegenauen Positionieren von Bauteilen und hierzu geeignete Positioniervorrichtung
EP3704044B1 (fr) Arrangement de roue de transport pour la manutention de corps cylindriques
EP3800014A1 (fr) Robots de préhension et / ou de retenue d'objets
DE102011106981B4 (de) Verfahren und Vorrichtung zum Herstellen von Fügeverbindungen
EP2111091B1 (fr) Agencement de transport de substrats, agencement de manipulation de substrats, agencement de fabrication de composants électroniques ainsi que procédé de manipulation de substrats
DE19933195A1 (de) Vorrichtung und Verfahren zum Reinigen und/oder Beschichten der Formoberfläche einer Form
DE102018213131A1 (de) Bearbeitungssystem zur spanenden Bearbeitung von Werkstücken mit Bohrung
DE3784254T2 (de) Vorrichtung zum foerdern von gegenstaenden.
DE202018006679U1 (de) Bearbeitungssystem zur spanenden Bearbeitung von Werkstücken mit Bohrung
WO2020098944A1 (fr) Unité robotisée, en particulier robot delta, comprenant des bras rotatifs
EP4124418A1 (fr) Dispositif préhenseur
DE102007050905B4 (de) Handhabungsvorrichtung mit Dreiringlager zwischen zwei äußeren Schwenkarmen und einer Plattform
DE102014112208B4 (de) Werkzeugmaschine und Verfahren zur automatischen Bestückung
DE202020004206U1 (de) Flexibler adaptiver Greifer von Bauteilen und Komponenten jeder Art
DE69010081T2 (de) Fernbedienbare Handhabungsvorrichtung.
EP4025391B1 (fr) Dispositif de manipulation et méthode pour plier une pièce
DE3242660A1 (de) Verfahren zum zusammensetzen eines gleichlaufgelenks

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: UNKNOWN

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20230301

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)