Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
  • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING, OR HOLDING
  • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
  • C23C14/225—Oblique incidence of vaporised material on substrate
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
  • C23C14/50—Substrate holders
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
  • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
  • C23C14/54—Controlling or regulating the coating process
  • C23C14/542—Controlling the film thickness or evaporation rate
  • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
  • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods

Definitions

• the invention relates to the field of surface treatments of optical parts and relates in particular to a system for fixing optical parts with a view to carrying out treatments on their surface.
• the savings zone created by conventional deposits - with the optical parts normal to the evaporation flow - is generally not critical when the optical parts are finally assembled in barrels and there is no no need for contact between the treated surface and the barrel or the support. In other cases, it is necessary to trim the parts after treatment to eliminate the savings zone. Such a trimming is undesirable or even impossible on high performance optical parts, and therefore at high cost, for which the trimming operations are almost always carried out before treatment or finishing of the part.
• the present invention solves these problems and relates to a fastening system making it possible to implement deposits without savings zone and without shading zone, whatever the experimental conditions (maximum incidence and azimuthal rotational movement of the parts. optical).
• the principle of the invention is based on a system for fixing by clamping / clamping the edge of the optical parts by means of a clamping / clamping device which is applied on the edge or the periphery of a part optical and which comprises a front face set back or possibly flush with a face to be treated but not extending beyond this face to be treated of the part.
• the fastening system is also a system for holding parts in position for processing.
• a system for fixing optical parts for carrying out treatments and deposits on at least one surface of said parts without a savings zone on said surface which comprises a door -optical part in the form of a flange provided with two facing branches shaped to be applied on two sides of the edge of the optical part, connected at a first of their ends by a spring link and provided at a second of their ends vis-à-vis legs and means for bringing said legs together adapted to clamp the branches on a periphery of said parts.
• This easy-to-make optical part holder allows said part to be held while leaving the surface to be treated completely free and without interfering with one side of the part to be treated.
• the characteristics of the system exposed in the following paragraphs can, optionally, be implemented. They can be implemented independently of each other or in combination with each other.
• the workpiece carrier is advantageously metallic and preferably stainless steel. This material, which offers good grip on optical parts, conducts heat perfectly and homogenizes the temperature of the treated parts.
• the spring link is advantageously U-shaped.
• the workpiece carrier is preferably of reduced thickness compared to the branches, comprises two segments which extend radially outwardly of the flange, which are connected to the branches at a first of their ends, and which are connected at one second from their ends to an arcuate segment giving the elasticity of the spring link.
• the spring link of reduced thickness compared to the curved branches is thus more elastic than the branches and the segments forming the branches of the U can flex towards each other when the legs are tightened by the approximation means which tightens the flange on the optical part.
• the approximation means may comprise a screw passing through one of the legs and cooperating with an internal thread of the other of the legs to tighten said branches around said periphery.
• the system may include a template for mounting one or more of said flanges on one or more of said optical parts, consisting of a block provided with an upper face, in which a groove provided with a lower surface is hollowed out. , surrounded on two opposite sides by converging walls and which constitutes a plane for laying optical parts of different diameters in the retaining position wedged between said walls, said upper face forming a reference surface for fitting said flanges on the periphery of said optical parts .
• the template makes it possible to equip with their flange one or more optical parts of different diameter.
• the fixing system may include one or more annular wedges adapted to be inserted between the laying plane and optical parts with a convex face to be treated.
• the system may include a support in which are arranged one or more optical parts to be treated equipped with a flange of the request and which comprises a front face formed by a front face of a deposit plate pierced with openings in the through which the treated faces of said optical parts are fully accessible.
• the optical parts are advantageously positioned in their flanges and mounted on the deposit plate so as to be flush with the front face of the deposit plate.
• the flange will be mounted set back from the face to be treated of the optical part to at least compensate for the thickness of the plate under the flanges.
• the support can be used with a clamping / clamping device consisting of a flange provided with two branches connected to a first of their ends by a spring link and provided at a second with their ends of lugs in vis-à-vis and means of bringing together said legs, however a clamping device such as a clamp equipped with a clamping means or a different spring device can be used with this support.
• the fixing system may include a rear cover provided with a means for fixing the support on a gripping module.
• Said cover may include a peripheral wall adapted to house the optical parts and their flange between the cover and the deposit plate.
• a front face of the flanges is received in knockouts of a rear face of the deposit plate while a backplate housed in the support and fixed to the rear of the plate comprises an annular crown resting on a rear face of the flanges on the side opposite to the side to be treated of the optical parts and a rear wall facing the rear faces of the optical parts protecting said rear face so as to avoid parasitic deposits on said rear face.
• the cover and the deposit plate are secured together by screws such as knurled screws passing through the cover and screwed into the first threaded holes of the deposit plate.
• the present application further proposes a method for fixing one or more optical parts for their preparation for a deposition process on at least one optical face to be treated of said part which comprises a step of positioning of. an optical part holder in the form of a flange according to the present application on the periphery of said optical part, a front face of said flange being positioned set back from the face to be treated or flush with the face to be treated and a clamping step of the flange around the periphery of the optical part.
• the characteristics of the method exposed in the following paragraphs can, optionally, be implemented. They can be implemented independently of each other or in combination with each other.
• the method may include a step of supplying and wedging the optical part between the walls of a template according to the request by sliding the part, supported or not by an annular wedge depending on whether the side to be treated of the part is convex or not, on a layout plane of the jig, the steps of positioning and clamping the optical part holder on the optical part being made part wedged between said wall and flange resting on the upper face of the jig and followed by a step removal of the jig from the part fitted with its flange.
• clamp clamped on the periphery of the optical part is positioned precisely relative to the face to be treated of the optical part.
• optical parts can be positioned in their flanges by the template so as to be flush with the front face of a deposit plate once mounted with their flanges on this deposit plate.
• the method may include, for one or more optical parts:
• the back plate comprising for each of said optical parts an annular ring resting on a rear face of the flanges on the side opposite to the side to treat optical parts
• the method may further include fixing the support on a gripping module of a deposition machine.
• the device and the method of the invention thus make it possible to ensure optimum maintenance of the optical parts on a deposition machine comprising means for moving the supports, in particular in azimuthal rotations, to ensure the alignment of the part. optics in its support, to deposit on 100% of the treated surface and to avoid a shading effect.
• the device and the method of the present application make it possible to produce deposits on both sides of the optical parts; one after the other.
• FIG. 1 shows a schematic view of part of a prior art support device
• FIG. 2 shows a schematic view of a principle of the invention
• FIG. 3 shows a clamping device of the invention in perspective
• FIG. 4A shows a first embodiment of a mounting bracket for devices of Figure 1 on optical parts in perspective and in exploded view;
• FIG. 5A shows a second embodiment of a mounting bracket for devices of Figure 1 on optical parts in perspective and in exploded view;
• FIG. 6A [Fig. 6B] show an optical part support for perspective deposition from above and below;
• FIG. 7 is an exploded view of the support of FIGS. 6A, 6B. Description of the embodiments
• the principle of the invention is to use a clamping / clamping device 10 which is applied on the edge or the periphery 2 of an optical part 1 to be treated by a deposition process such than a GLAD process.
• the device 10 comprises a front face 16 recessed or flush but not protruding from a face to be treated 3 of the part. Thus, no obstacle disturbs the deposition by a flow of vapor 100.
• the workpiece holder 10 consists of a spring-loaded flange.
• the flange is provided with two branches 11a, 11b, intended to grip the edge of the optical parts. These branches are connected to a first of their ends by a spring link 12.
• the U-shaped spring link has two segments 12a, 12b, the free ends of which are connected radially to the branches and a segment 12c of an arc of a circle giving the elasticity of the spring link.
• the spring link is thinner than the branches to bend more easily than the latter.
• the branches each have a tab 15a, 15b radial outwardly of a contour formed by the branches.
• the flange is provided with complementary tightening means 13, 14 which are, in the example shown, made with a screw 14 passing through a hole in the tab 15b and which is screwed into a threaded hole 13 in the tab 15a.
• These tightening means can also be of another type, for example a notched tongue resulting from one of the tabs and which engages with complementary notches made in the other tab.
• the flanges are adapted in thickness with respect to the optical parts to be treated and in particular the thickness of the flange can be chosen less than the thickness of the lens, as well as the shape and the length of the branches of the flange are adapted to the lens to be held. They are made of metal and preferably stainless steel.
• the optical parts are circular lenses and the branches are curved and follow the periphery of the lenses.
• the optical parts can also be oval or polygonal, the branches then being adapted to the contour of said parts.
• the essential characteristics of the part holder are to be able to be easily positioned on the periphery of the optical part, to firmly hold the optical part once tight on the optical part, to have rigidity in a axial direction sufficient not to collapse when the workpiece holder is fixed in a processing support of the optical part, to facilitate gripping of the part without touching it.
• the realization of the stainless steel flange in addition to its low cost, allows multiple tightening and loosening, allows heating of the optical parts if necessary because stainless steel is a good thermal conductor and allows easy cleaning of the flange.
• FIGs 4A and 4B show a first embodiment of a device for fitting flanges on circular optical parts.
• This embodiment is suitable for optical parts such as lenses comprising a concave or planar face to be treated.
• the installation device comprises a template 20 consisting of a block provided with an upper face 25 in which is hollowed a groove provided with a lower surface 23 surrounded on two opposite sides by converging walls 21, 22 identified in FIG. 4B.
• the groove is thus a groove of decreasing width which constitutes a laying plane making it possible to bring, by sliding on the laying plane, the lenses 1a, 1b, 1c of different diameters in the retaining position wedged between the walls to equip them with the flange 10a, 10b, 10c which corresponds to their diameter.
• the invention can be applied to optical parts such as glued optical lenses or doublets.
• the height of the walls 21, 22 of the groove is calibrated so that the flangeslOa, 10b, 10c placed on the upper face 25 of the template are at a fixed distance from the face to be treated lenses which is on the plane of pose.
• the laying surface 23 and the walls 21, 22 are preferably covered with an anti-scratch material such as PTFE.
• Figures 5A and 5B correspond to a second embodiment of the device for fitting flanges on optical parts.
• This embodiment is this time suitable for optical parts such as lenses 1 d, 1e comprising a convex face to be treated.
• the laying device again comprises a template 20 'provided with an upper face 25' and a groove of decreasing width defining a surface 23 'surrounded on two opposite sides by walls. convergent 21 ', 22' to form a plane of installation of the optical parts.
• the surface of the lenses 1d, 1e is convex, it is not possible to slide them directly on the laying plane in order to wedge them between the walls 21 ', 22'.
• the device further comprises in this case annular wedges 24a, 24b on which is placed the edge of the face to be treated lenses.
• annular wedges 24a, 24b on which is placed the edge of the face to be treated lenses.
• These are the lenses placed on their annular wedges which are brought by sliding on the laying plane in the retained position between the walls to equip them with the flange 10d, 10e which corresponds to their diameter.
• the annular wedges make it possible to compensate for the curvature of the convex lens in order to adjust the relative height between the face 3 of the lens and the front face 16 of the flange 10 shown in FIG. 1.
• annular wedges 24a, 24b like the jig installation plane, are covered with an anti-scratch material.
• the height of the walls 21 ', 22' is here chosen to compensate for the height of the wedges 24a, 24b so that when the flanges rest on the upper surface 25 'of the template, they can retain the optical parts without protruding from the side of their convex face to be treated.
• the method for equipping the optical parts with their flange comprises the wedging of the optical parts by sliding the parts or sliding wedges carrying the parts on the surface of the laying plane between the walls of the laying plane until the parts are wedged between the walls and then the sliding of the flanges around the optical parts until the flanges rest on an upper wall of the jig and the clamping means of the flanges on the periphery of the optical parts are tightened.
• the positioning of the flanges as a function of the thickness of the optical parts is thus achieved by means of specifically machined templates and comprising a PTFE coating to prevent scratches during the installation of the flanges and the tightening of the flanges on the optical parts.
• Different widths and different The engraving depths of the grooves of these templates make it possible to choose a template suitable for any optical part.
• optical parts fixing system of the present application allows thin film deposits on optical parts over their entire surface, on both sides, for all possible angles of incidence without saving zone and without shading area.
• This system designed not to scratch the optical parts during their handling, can be used for many shapes of flat blades, concave and convex lenses, filters, mirrors or others and can be easily adapted to any type of thin film deposition machine.
• a simple screwing on of the spring-loaded flange allows reliable fixing for deposits up to 200 ° C.
• Figures 6A, 6B and 7 show an example of support 30 of optical parts for the treatment of these parts.
• This support is designed to hold optical parts equipped with clamping / clamping devices which apply to the edge or the periphery of the optical parts and which have a front face recessed or flush but not exceeding one face to be treated pieces.
• the support is rectangular and receives three optical parts of different diameters.
• the support 30 in FIG. 6A and 6B comprises a rear cover 31 provided with a fixing means 36 on a module 40 for gripping and operating the support for a depositing machine.
• the fixing means 36 can be a keyed hole which receives a pin 41 of the module, a screw 42 being screwed into an axial thread of the pin 41 from the inside of the cover 31 to retain the pin in the hole 36.
• the hole 36 may be a threaded hole which receives a threaded axis of the module.
• FIG. 7 which represents the support 30 in exploded view, the support in which the optical parts 1 to be treated are arranged comprises a front face pierced with openings 320 through which the faces to be treated 3 of the optical parts are accessible.
• This front face is formed by a deposit plate 32.
• the cover 31 has a peripheral wall 31a which can accommodate the optical parts 1 and their flange 10 as well as a backplate 33 between the cover 31 and the deposit plate 32.
• the cover 31 and the deposit plate are secured together by screws 35 such as knurled screws passing through the cover 31 and screwing into the first threaded holes 37 of the deposit plate 32, these screws allowing easy removal of the deposit plate and the cover, the deposit plate remaining equipped with optical parts and backplate.
• the rear face of the deposit tray has knockouts 32a reproducing the contour of the flanges and the front of the flanges is received in these knockouts 32a.
• the deposit tray is shown at a different angle from the other parts in Figure 7. The knockouts hold the flanges laterally preventing them from moving in the plane of the deposit tray.
• the face to be treated of the latter received in the openings of the front face so as to be flush with the front face of the deposit plate which allows to process the entire optical surface.
• the back plate 33 On the rear face of the optical parts is applied the back plate 33.
• This back plate comprises, for each optical part, an annular ring 33a which is applied to the flanges on the side opposite to the side to be treated. optical parts.
• the backing plate is fixed to the rear of the deposit plate here by means of screws 34 received in second threaded holes 38 of the deposit plate.
• the deposit plate is preferably made of stainless steel like the flanges.
• the knockouts are adapted to receive flanges provided with two curved branches 11a, 11b, intended to enclose the edge of the optical parts, connected to a first of their ends by a spring link 12 and each comprising a second of their ends a tab 15a, 15b with complementary clamping means 13, 14 as defined above.
• the knockouts may be shaped to receive workpiece carriers whose spring means and clamping means are configured differently, for example a flange whose curved branches are connected at each of their ends by a spring link or comprising a clamping means at each of their ends .
• the backing plate further comprises a rear wall 33b protecting the rear of the optical parts avoiding parasitic deposits on the rear face of the optical parts 1.
• the materials chosen for the flanges and the support elements are suitable for making deposits in a wide temperature range of 20 ° C to 200 ° C.
• the flanges are made of stainless steel. This material conducts heat perfectly and homogenizes the temperature of the treated parts.
• the deposit plate is also advantageously made of stainless steel.
• the plywood is made of a polymer material or a resin suitable for withstanding temperatures of the order of 200 ° C and for example in a material that can be used in stereo lithography known under the trademark PerFORM or in PEEK.
• the rear cover 31 can advantageously be made of PEEK to withstand 200 ° C without deformation.
• the invention applies to optical parts treated when it is desired that the treatment of the optical part extends up to its edge, for example for a window provided with a conductive treatment which must be in electrical contact with a support of the part.
• the support 30 can also be round or oval and receive a different number of optical parts, for example depending on the surface of the support and the diameter of said parts.

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• Chemical & Material Sciences (AREA)
• Engineering & Computer Science (AREA)
• Mechanical Engineering (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Materials Engineering (AREA)
• Metallurgy (AREA)
• Organic Chemistry (AREA)
• Physical Vapour Deposition (AREA)
• Mounting And Adjusting Of Optical Elements (AREA)

Applications Claiming Priority (2)

Publications (1)

Family

ID=70295195

Family Applications (1)

Country Status (5)

Family Cites Families (12)

• 2019
  • 2019-11-14 FR FR1912703A patent/FR3103287B1/fr active Active
• 2020
  • 2020-11-10 EP EP20861947.8A patent/EP4058615A1/de active Pending
  • 2020-11-10 US US17/776,782 patent/US20220389563A1/en not_active Abandoned
  • 2020-11-10 CN CN202080089709.7A patent/CN114846173B/zh active Active
  • 2020-11-10 WO PCT/FR2020/052052 patent/WO2021094682A1/fr not_active Ceased

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