EP3965963B1 - Cleaning apparatus - Google Patents

Description

The present invention relates to a cleaning device for cleaning, in particular, electrical components using a gaseous cleaning medium.

Electrical components, for example for electrical circuits or electric motors, can have sensitive assemblies, for example assemblies comprising circuit boards, which must be specifically cleaned during and/or after production. For example, particulate contaminants must be removed, which can lead to electrical short circuits and breakdowns during operation of the components and are responsible for the failure of electrical components. Dry cleaning using a gaseous (gas or gas mixture) cleaning medium is desirable, although targeted cleaning of the components is advantageous.

It is known to blow off electrical components using compressed air and remove particles.

The DE 34 34 998 A1 discloses a cleaning device for cleaning components using a gaseous cleaning medium according to the preamble of claim 1.

The DE 10 2013 105 141 A1 , the DE 20 2018 100 550 U1 , the EP 0 506 171 A1 , the EP 2 135 687 A1 , the US 2007/283980 A1 , the US 2014/007371 A1 , the DE 195 32 576 A1 and the DE 20 2013 012 237 U1 disclose cleaning devices with a cylindrical cleaning chamber.

The object of the present invention is to provide a cleaning device for cleaning, in particular, electrical components, which has improved cleaning performance.

This object is achieved by a cleaning device for cleaning components using a gaseous cleaning medium according to claim 1.

By means of the flow device, in particular its pressure generating device, a pressure difference can be provided between the at least one inlet and the at least one outlet. In the present case, this can be achieved in particular in that the pressure generating device is designed to generate a negative pressure in the interior through suction via the at least one outlet and/or to generate an overpressure in the interior via the at least one inlet. As a result of the pressure difference, a flow of cleaning medium forms in the interior, which in the present case runs in a vortex shape at least in sections. In practice, it has been shown that particulate contaminants that adhere to the surfaces of electrical components can be captured particularly well by means of the eddy flow and removed from the component. In this way, an improved cleaning result can be achieved.

It can be advantageous if the cleaning chamber is designed to be cylindrical or essentially cylindrical, in particular in the form of a vertical cylinder and/or a circular cylinder, the wall comprising a bottom wall, a top wall and a circumferential side wall and the cylinder in particular from the bottom wall to the top wall is extended.

For example, a cleaning chamber with an elliptical basic shape can be advantageous. For example, the chamber cross section is elliptical and a cylinder extending from the bottom wall to the top wall is provided.

The bottom wall, the top wall and/or the side wall can each be designed in several parts or in one piece. Depending on the arrangement and/or nature of the at least one inlet and/or the at least one outlet, it can be provided that the bottom wall, the top wall and/or the side wall is interrupted in sections and divided into segments.

A diameter of the cleaning chamber can be, for example, approximately 5 cm to 100 cm, preferably approximately 10 cm to 50 cm. It can be provided that the diameter can be changed or is different over the height or extent of the cleaning chamber.

A height of the cleaning chamber can preferably be up to approximately 150 cm, preferably approximately 10 cm to 100 cm.

The cleaning chamber, in particular its wall, is preferably made of electrically conductive material in order to avoid electrostatic charges, for example due to particle friction, and thus electrostatic discharges.

Preferably, the cleaning chamber, in particular the wall, can be made of an abrasion-resistant material and made durable, for example metal or a plastic material such as PEEK.

Facing the interior, the wall is advantageously designed to be smooth in order to prevent particles from adhering, for example by means of a coating or in the manner of a “shark skin”.

It can be advantageous if the receptacle is arranged on a wall of the cleaning chamber, in particular on a bottom wall that is opposite a wall in which the at least one outlet is formed.

In the present case, orientation and position information such as “bottom wall” or “ceiling wall” are to be understood as referring to the intended use of the cleaning device, with the bottom wall being arranged at the bottom of the cleaning chamber in relation to the direction of gravity.

The at least one outlet is preferably formed centrally in a wall of the cleaning chamber, relative to an axis defined by the cleaning chamber, and/or the emerging cleaning medium can flow through the at least one outlet axially, relative to the aforementioned axis.

It can be provided that there are several outlets.

The at least one outlet can, for example, be formed eccentrically in the wall at a distance from the axis.

At least one outlet may be formed in a ceiling wall. At least one outlet may be formed in a bottom wall. At least one outlet may be formed in a side wall of the cleaning chamber. For example, at least one outlet is tangentially integrated into a side wall of the cleaning chamber.

It can be provided that a flow channel of the flow device, for example in the form of a dip tube, projects through the at least one outlet into the interior.

The pressure generating device is or in particular comprises a suction unit in order to apply negative pressure to the interior through the at least one outlet. If there are a plurality of outlets, several vacuum generating devices can be provided, which are assigned to a respective outlet.

The relative negative pressure in the interior can be, for example, up to approximately 1000 mbar, and it is advantageously from approximately 5 mbar to approximately 300 mbar.

The cross section for the application of negative pressure, for example the cross section of the at least one outlet, can be changed, for example manually or automatically without the user's intervention.

A time-dependent application of a pressure difference to the interior can be provided. For example, a frequency-dependent control of the pressure generating device is provided, in particular with regard to pulsed pressurization.

• ein Filterelement, beispielsweise ein Staubfilterelement oder ausgebildet als Zyklon;
• ein Gasabscheider, zum Beispiel mittels Absorptionsfiltration und/oder ein Gaswäscher;
• eine Speichereinrichtung für Unterdruck, die zum Beispiel wahlweise freigegeben werden kann, um den Innenraum mit Unterdruck zu beaufschlagen;
• ein Kondensator, zum Beispiel zum Anziehen von partikulären geladenen Verunreinigungen;
• eine Sensoreinrichtung zur Zustandsuntersuchung des abgesaugten Reinigungsmediums, die zum Beispiel einen Partikeldetektor, einen Gasdetektor, einen Differenzdrucksensor und/oder einen Volumenstromsensor umfassen kann.

At least one of the following can be connected between the at least one outlet and the pressure generating device, for example in a flow channel:

• a filter element, for example a dust filter element or designed as a cyclone;
• a gas separator, for example by means of absorption filtration and/or a gas scrubber;
• a negative pressure storage device which can, for example, be selectively released to apply negative pressure to the interior space;
• a capacitor, for example for attracting particulate charged impurities;
• a sensor device for examining the condition of the extracted cleaning medium, for example a particle detector, a gas detector, may include a differential pressure sensor and/or a volume flow sensor.

It can be provided that the pressure generating device is or includes an overpressure device which pressurizes the interior via the at least one inlet with pressurized cleaning medium. It is understood that the components described above can be provided on or in the flow channel even in the absence of the vacuum generating device.

In a preferred embodiment, the at least one inlet can be arranged or formed on a side wall of the cleaning chamber. The side wall can, for example, form a jacket of the cleaning chamber.

A plurality of inlets may be provided, for example two or more inlets, for example six inlets. A plurality of inlets may be positioned at a uniform angular distance from one another with respect to an axis of the cleaning chamber. For example, two inlets are provided which are positioned diametrically opposite one another with respect to an axis of the cleaning chamber.

The at least one inlet can be designed, for example, as a slot. It can be provided that the cross section of the inlet, in particular the slot width, is different over the extent of the inlet and can in particular be variable.

A manual or automatic adjustment of the opening cross section of the at least one inlet can be provided.

As an alternative to the slot-shaped design of the inlet, a round shape of the inlet can be provided, for example, in particular a circular shape or an elliptical shape. It goes without saying that inlets of different cross-sections can be provided.

In a preferred embodiment, the incoming cleaning medium can flow through the at least one inlet tangentially, relative to an axis defined by the cleaning chamber. Alternatively, an angle of the inflowing cleaning medium with respect to a tangent of approximately +/- 45° can be provided.

The at least one inlet can, for example, extend axially with respect to the axis of the cleaning chamber.

For example, the at least one inlet extends essentially from a bottom wall to a top wall of the cleaning chamber, the receptacle being arranged, for example, on the bottom wall and the at least one outlet being arranged or formed, for example, on the top wall.

In a preferred embodiment, it can be provided that at least one inlet is arranged or formed in a bottom wall and/or at least one inlet in a top wall of the cleaning chamber.

It proves to be advantageous if the flow of the cleaning medium in the interior runs along the wall of the cleaning chamber. This can advantageously be achieved in a structurally simple manner by a tangential flow of the cleaning medium into the interior.

Alternatively or additionally, it can be provided that the flow runs centrally in the interior around an axis of the cleaning chamber.

The flow of the cleaning medium can advantageously have at least one directional component along an axis of the cleaning chamber or parallel to this axis, in particular in the case of axial suction through the at least one outlet.

A concentric arrangement of individual flows around an axis of the cleaning chamber can be provided, which can be achieved, for example, by means of a plurality of inlets.

It can be provided that the flow of the cleaning medium in the interior is spiral-shaped, in particular around an axis of the cleaning chamber.

The cleaning device comprises a separation device for particles detached from the component and carried by the cleaning medium. The separation device allows the particles to be specifically removed from the flowing cleaning medium and collected.

At least one outlet opening for particles is formed in the wall, via which the interior opens into a separation space for the particles. The particles can pass through the at least one outlet opening into the separation space and be collected therein.

The at least one outlet opening is formed, for example, by a step in the wall as a result of two sections of the wall arranged at a distance from one another.

It can be provided that there is more than one outlet opening, for example two or more outlet openings. In a preferred embodiment, for example, there may be six outlet openings.

The at least one outlet opening is preferably arranged or formed on a side wall of the cleaning chamber. The side wall in particular forms a jacket of the cleaning chamber.

Alternatively or additionally, at least one outlet opening can be formed in a top wall and/or at least one outlet opening in a bottom wall of the cleaning chamber.

The at least one outlet opening is designed, for example, as a slot. It can be provided that a cross section of the outlet opening is variable or non-constant over the length of the slot.

Overall, it is conceivable that a cross section of at least one outlet opening can be changed, for example manually or automatically. For example, the width of the slot created by the above-mentioned step can be adjustable. A manually or automatically adjustable step width, a manually or automatically adjustable step offset in the direction of flow of the particles through the outlet opening is conceivable. The step, in particular the slot-shaped outlet opening, can be contoured, for example.

The above-mentioned embodiments advantageously favor the shape of the outlet opening, in particular the step on the wall to the interior, in order to achieve the most streamlined and low-turbulence change in direction of the flow of the cleaning medium with a view to targeted removal of the particles.

The step formed by the above-mentioned step can be, for example, up to approximately 25 mm, preferably approximately 1 mm to 10 mm.

The at least one outlet opening, for example with a slot-shaped shape and in particular formed by the above-mentioned step, can, for example, be continuous or alternatively interrupted. In the latter case, for example, a plurality of (partial) outlet openings arranged laterally next to one another is provided. The cross section of the continuous or, alternatively, the interrupted outlet opening(s) can be constant, for example with the same heel width of the step, or variable, for example with a variable heel width of the step.

The particles can flow through the at least one outlet opening tangentially, relative to an axis defined by the cleaning chamber, and/or extends axially with respect to the axis of the cleaning chamber.

It can be provided that the cleaning medium does not flow through the at least one outlet opening or only flows insignificantly. For example, the particles are thrown through the outlet opening into the separation space in which there is atmospheric pressure, whereas the cleaning medium is sucked out via the outlet by means of the pressure generating device. In this way, a separation can preferably take place, with the particles being removed from the cleaning medium. This can prove to be advantageous, for example, if the cleaning medium could pose any dangers, which is why suction is advantageous.

The separation device is advantageously designed to be inertia-based and/or filterless.

It is advantageous if the separation device is designed in such a way that the kinetic energy of the particles can be reduced over a short distance and/or in a short time and the particles remain trapped in the separation space. In this way, the risk of any particles getting back into the interior can be reduced.

The above-mentioned purpose is achieved, for example, by a structured surface of the flow-affected areas of the separation device with a relatively high coefficient of friction, whereby the particles can be slowed down. Alternatively or additionally, a relatively soft material can be provided for the separation device.

A baffle body is advantageously provided, for example a baffle plate, onto which the particles can impact. The impact body is preferably aligned non-parallel to the inflow plane and serves to deflect the particles.

A disruptive body for the particles can advantageously be provided at the at least one outlet opening and/or in the separation space, which largely prevents a backflow into the interior.

In the separation space, the kinetic energy of the particles can advantageously be reduced, as explained above.

The separation device advantageously comprises a collecting container for particles. It is advantageous if the particles can get into the collecting container using gravity. For this reason, the collecting container is advantageously arranged in the direction of gravity at the bottom of the separation space.

Preferably, the collecting container can be detached from the cleaning chamber. For this purpose, for example, quick-release fasteners are provided. Manual and, in particular, tool-free dismantling of the collecting container is an advantage.

Alternatively or additionally, a device for discharging particles from the separation space and in particular the collecting container can be provided. It is conceivable, for example, to use a sensor device to determine the level of particles. Alternatively or additionally, a time-controlled or component-controlled discharge of particles can be used.

Discharge of particles is possible, for example, by suction and/or by mechanical discharge. In the latter case, for example, a scraper or a screw conveyor is used to mechanically remove the particles.

In a preferred embodiment of the cleaning device, it can be provided that the at least one outlet is arranged on the separation device and is formed, for example, in a wall of the separation space. For example, the pressure generating device sucks the cleaning medium out of the interior through the separating device.

It can be provided that the at least one outlet opening forms the at least one outlet or vice versa.

It is advantageous if the cleaning device includes an adjusting device for moving the component. For example, the component can be moved and in particular displaced in at least one spatial direction. Alternatively or additionally, a rotation or pivoting of the component about at least one axis of rotation or one pivot axis is conceivable.

Preferably, a vibration device for vibrating the component directly or indirectly (e.g. via a support element of the receptacle) is advantageous. The vibration can remove adhering particles from the surface of the component. In the event of vibration, vibration is advantageously decoupled from the rest of the cleaning device.

The adjusting device and/or the vibration device are arranged, for example, on a bottom wall of the cleaning chamber on which the receptacle is positioned. It can be provided, for example, that the bottom wall can be rotated by means of the adjusting device. It is conceivable to set, manually or automatically, a rotation frequency of the bottom wall.

It can be advantageous, particularly when arranging the receptacle on the bottom wall, if the bottom wall can be detached from the rest of the wall, for example manually and/or without tools. By loosening the bottom wall, the receptacle for changing the component can be exposed.

The component is changed manually, for example. Alternatively or additionally, a mechanical change of the component can be provided, for example by means of a robot. Changing linked components, for example in the manner of an assembly line, is also conceivable.

It can be provided that the component can be secured to the receptacle, for example by force and/or positive locking. For example, the component is clamped to the holder. Determining the component on the holder can be done manually or automatically, for example. A quick-release device can be provided.

In a preferred embodiment of the cleaning device, a circulation operation for the cleaning medium can be provided. For example, cleaning medium flowing out via the at least one outlet is cleaned by means of a filter element, diverted and directed back into the interior via the at least one inlet.

It is advantageous if it is possible to specifically apply a cleaning medium to the component. Accordingly, the cleaning device can have an application device, for example in the form of a nozzle device or comprising a nozzle device. The fluidic cleaning medium can be gaseous and/or a liquid cleaning medium can be provided.

The cleaning device advantageously comprises a nozzle device with at least one nozzle element arranged in the receiving space, which can be acted upon with a preferably gaseous cleaning fluid, wherein the at least one nozzle element is preferably aligned or alignable with the component. Using the nozzle device, contamination of the component can be specifically applied and removed from it.

An adjusting device for moving the nozzle device relative to the component is advantageously provided. For example, the adjustment device designed for a translational and/or rotational movement of the nozzle device.

It can be advantageous to have a relative movement of the component and the nozzle device, which each execute a rotation and the axes of rotation are different from one another. For example, the axes of rotation can be aligned parallel to one another. Due to the resulting superimposed movement, comprehensive cleaning can be carried out using the cleaning fluid.

• Druckluft, optional ionisiert;
• ölfreies und/oder gefiltertes Reinigungsmedium;
• CO₂;
• gasförmiges Reinigungsmedium, zum Beispiel Ozon, Stickstoff etc.;
• Dampf;
• anorganisches Reinigungsmedium, vorzugsweise Wasser;
• organisches Reinigungsmedium und insbesondere Lösemittel wie zum Beispiel Isopropanol.

At least one of the following media can be provided for the cleaning fluid:

• Compressed air, optionally ionized;
• oil-free and/or filtered cleaning medium;
• _CO2 ;
• gaseous cleaning medium, for example ozone, nitrogen etc.;
• Steam;
• inorganic cleaning medium, preferably water;
• organic cleaning medium and in particular solvents such as isopropanol.

It is conceivable to use particles in the flow of the cleaning fluid.

Discharge electrodes (DC and/or AC) can be provided. Surrounding blown air to increase the effective depth of the cleaning electrodes can be used with the discharge electrodes.

In the interior, the cleaning device can advantageously comprise at least one mechanical cleaning tool for mechanically cleaning the component. For example, a cloth or sponge-like cleaning tool can be provided. This can optionally be wetted or soaked with a cleaning fluid. In addition to cleaning the component For example, the cleaning device can be prepared for reuse.

Further forms of mechanical cleaning of the component include the use of at least one brush, at least one tweezers and/or at least one milling cutter.

A plasma generation device can be provided to enable plasma-based cleaning of the component in the interior.

The nozzle device already mentioned can be designed in different ways. For example, nozzle elements are provided in the form of flat jet nozzles, full jet nozzles, round jet nozzles, jacket jet nozzles or nozzle lances. The nozzle elements can have angled outlet openings that can be adjusted manually and/or automatically. Nozzle elements with multiple openings can be provided.

The nozzle device can be rigid and immovable to the component. As already mentioned, a nozzle device that can be moved by means of the adjusting device can alternatively be provided. The adjusting device is, for example, pneumatically or electrically driven. A drive by means of recoil from escaping cleaning fluid is conceivable.

In a preferred embodiment, a robot-like or robotic adjustment device, for example in the form of a so-called "delta robot", is used to move the nozzle device, which preferably enables at least three-axis adjustment. A Cartesian portal for moving the nozzle device about, for example, one to three axes can be provided. Alternatively or additionally, a “Scara” or articulated robot can be provided.

A supply of cleaning fluid for the targeted application can take place, for example, via inlet openings in the wall, for example the bottom wall, the side wall and/or the top wall.

The application device can, for example, be manufactured entirely or partially generatively, in particular by means of 3D printing.

The holder for the component can be manufactured generatively, for example using 3D printing.

The cleaning device can be designed to be stationary or movable, for example by means of rollers.

A detection unit can be provided to examine the quality of the cleaning. For example, fluorescence measurement of the flowing cleaning medium, particle detection and, advantageously, monitoring of the cleaning result are conceivable. For this purpose, for example, a before and after comparison of the initial state of the component and the cleaned state of the component can be carried out using a recording unit.

The detection unit is designed in particular optically and includes, for example, at least one camera.

The cleaning device can be ESD-compliant and/or explosion-proof.

Automatic tracking of components is an advantage.

The control of the cleaning device can be autonomous.

A soundproofing device can be provided for the cleaning device. For example, there is a soundproof casing for the cleaning chamber available. The soundproofing device can, for example, have a filter element for cleaning the sucked in air.

The cleaning device according to the invention can be used with a wide variety of components, but it is particularly suitable for electrical components. For example, these are components for electric motors such as coil formers, housings, bearings or shafts, or alternatively components for power electronics or electrical circuit boards.

Figur 1:

eine perspektivische schematische Darstellung einer erfindungsgemäßen Reinigungsvorrichtung in einer Explosionsdarstellung;

Figur 2:

eine Teildarstellung der Reinigungsvorrichtung aus Figur 1, teilweise geschnitten;

Figur 3:

eine Reinigungskammer der Reinigungsvorrichtung aus Figur 1 im geöffneten Zustand mit Blickrichtung auf ein zu reinigendes Bauteil;

Figur 4:

eine Darstellung entsprechend Figur 3 während des Reinigungsvorgangs;

Figur 5:

eine schematische Teilschnittdarstellung einer Reinigungskammer einer erfindungsgemäßen Reinigungsvorrichtung in einer weiteren bevorzugten Ausführungsform;

Figur 6:

eine schematische Teilschnittdarstellung einer Reinigungskammer einer erfindungsgemäßen Reinigungsvorrichtung in einer weiteren bevorzugten Ausführungsform;

Figur 7:

beispielhaft eine Draufsicht auf ein zu reinigendes Bauteil mit einem Beaufschlagungsmuster entstehend bei Relativrotation einer Düseneinrichtung und des Bauteils um voneinander unterschiedliche Drehachsen; und

Figur 8:

eine schematische Teilschnittdarstellung einer Reinigungskammer einer erfindungsgemäßen Reinigungsvorrichtung in einer weiteren bevorzugten Ausführungsform.

The following description of preferred embodiments of the invention serves to explain the invention in more detail in conjunction with the drawing. Show it:

Figure 1:

a perspective schematic representation of a cleaning device according to the invention in an exploded view;

Figure 2:

a partial representation of the cleaning device Figure 1 , partially cut;

Figure 3:

a cleaning chamber of the cleaning device Figure 1 when open, looking towards a component to be cleaned;

Figure 4:

a representation accordingly Figure 3 during the cleaning process;

Figure 5:

a schematic partial sectional view of a cleaning chamber of a cleaning device according to the invention in a further preferred embodiment;

Figure 6:

a schematic partial sectional view of a cleaning chamber of a cleaning device according to the invention in a further preferred embodiment;

Figure 7:

By way of example, a top view of a component to be cleaned with an exposure pattern resulting from relative rotation of a nozzle device and the component about axes of rotation that differ from one another; and

Figure 8:

a schematic partial sectional view of a cleaning chamber of a cleaning device according to the invention in a further preferred embodiment.

The drawing shows in the Figures 1 to 4 an advantageous embodiment of a cleaning device according to the invention, designated overall by reference number 10, of which in the Figures 2 to 4 only a cleaning chamber and a separation device are shown.

The cleaning device 10 includes the already mentioned cleaning chamber 12 and a pressure generating device 14.

The cleaning chamber 12 comprises a wall 16 and an interior 18 enclosed by it.

In the present case, the cleaning chamber 12 is essentially of a cylindrical basic shape, in particular in the shape of a vertical circular cylinder.

The cleaning chamber 12 comprises a bottom wall 20, a ceiling wall 22 opposite this and a circumferential side wall 24, which forms a jacket 26. The bottom wall 20, the top wall 22 and the side wall 24 together form the wall 16.

A component to be cleaned, in particular an electrical component, can be positioned on a receptacle 30 and releasably secured to it. The recording 30 is presently arranged on the bottom wall 20 and can, for example, be formed by this.

The cleaning chamber 12 defines an axis 32, which is an axis of the cylinder.

The cleaning device 10 comprises a flow device 34 for a particularly gaseous cleaning medium for cleaning the component 28. The flow device 34 includes the pressure generating device 14. In the present case, the pressure generating device 14 is designed as a suction unit 38. By means of the suction unit 38, the interior 18 can be subjected to negative pressure. For this purpose, a flow channel 40 is provided (in Figure 1 shown schematically). The flow channel 40 provides a flow connection from the suction unit 38 to the interior 18.

The flow device 34 includes an outlet 42 for discharging cleaning medium from the interior 18. The flow channel 40 is connected to the outlet 42 and connects it to the suction unit 38, so that the negative pressure is applied to the interior 18 via the outlet 42.

In the present case, the outlet 42 is formed in the ceiling wall 22 and is arranged centrally with respect to the axis 32. The cleaning medium can flow axially through the outlet 42.

The flow device 34 further comprises at least one inlet for cleaning medium sucked in by the suction unit 38. The cleaning medium can flow into the interior 18 via the inlet. For example, the cleaning medium is sucked in from the environment. This is particularly air.

In the present case, two inlets 44, 46 are provided. The inlets 44, 46 are formed on the side wall 24. To form a respective inlet 44, 46, the side wall 24 has sections 48, 50 arranged radially at a distance from one another, between which a step 52 is formed.

The inlets 44, 46 are slot-shaped and in the present case extend from the bottom wall 20 to the top wall 22. The inlets 44, 46 are axially aligned.

With respect to the axis 32, the inlets 44, 46 are positioned diametrically to one another. This is particularly evident from the Figures 3 and 4 clearly.

As a result of the action by the pressure generating device 14, a pressure difference arises in the interior 18 between the inlets 44, 46 and the outlet 42. Due to the pressure difference, a flow of the cleaning medium arises from the inlets 44, 46 to the outlet 42.

Alternatively or in addition to the suction unit, a pump unit can be provided as a pressure generating device, with which the cleaning medium is pumped into the interior 18 with excess pressure.

The flow device 34 is designed such that the cleaning medium flowing in the interior 18 forms a vortex flow at least in sections. In particular, the cleaning medium ( Figure 4 ) flow tangentially with respect to the axis 32 through the inlets 44, 46. The cleaning medium initially flows along the side wall 24, on the side facing the interior 18.

Due to the central suction of the cleaning medium through the outlet 42, the flow of the cleaning medium is curved in the direction of the axis 32 (arrows 54 in the Figures 1 , 2 and 4 ). The axial suction additionally deflects the cleaning medium in the axial direction (arrows 56 in the Figures 1 and 2 ).

In practice it has been shown that due to the vortex flow of the cleaning medium that arises in the interior 18, particulate contaminants adhering to the surface of the component 28 can be captured particularly well and carried along with the cleaning medium. Points in the drawing symbolize impurities, where in the Figures 3 and 4 the component 28 is shown before cleaning or during cleaning.

The cleaning device 10 further comprises a separating device 58. The separating device 58 is arranged on the cleaning chamber 12. The separating device 58 comprises an outlet opening 60 arranged on the wall 16 and in particular the side wall 24 and a separating space 62. Furthermore, the separating device 58 comprises a collecting container 64 for separated particles.

In the present case, the outlet opening 60 is designed in the shape of a slot and is formed by two sections 66, 68 arranged radially at a distance from one another in a corresponding manner to the inlets 44, 46. The side wall 24 accordingly forms a step 70 between the sections 66, 68.

In the present case, the outlet opening 60 extends from the bottom wall 20 to the top wall 22 and is axially extended. In the circumferential direction around the axis 32, the outlet opening 60 is arranged approximately centrally between the inlets 44 and 46 ( Figures 3 and 4 ).

The particles detached from the component 28 can flow through the outlet opening 60. The particles initially guided along the side wall 24 by the vortex flow can be transferred tangentially from the interior 18 into the separation space 62. In the present case, the separation space 62 comprises a wall 72. The wall 72 is advantageously formed in one piece with the side wall 24, so that the separation space 62 can be viewed as a "start" or "extension" of the cleaning chamber 12, so to speak.

The ceiling wall 22 also closes the separation space 62 at the top.

The separation space 62 is designed in such a way that incoming particles are slowed down on the wall 72 and thereby lose their kinetic energy. A backflow of particles back into the interior 18 can thereby largely be avoided, especially since the backflow would have to be directed in the opposite direction to the feed stream through the outlet opening 60.

The separation space 62 is a dead space in which the previously decelerated particles sink to the ground due to gravity. The collecting container 64 is arranged on the bottom of the wall 72. The particles can be collected in the collection container 64. The collecting container 64 can be detached from the separating device 58 and emptied.

Before following on the in the Figures 5 , 6 and 7 Further cleaning devices shown will be discussed, reference should be made again to the above statements of the numerous optional and advantageous features of the cleaning device according to the invention. These optional features can be provided individually or in combination and in particular in any combination with one another in one of the advantageous embodiments of the cleaning device described with reference to the drawing. To avoid repetition, reference is made to what has already been said.

In the advantageous embodiments of the cleaning device according to the invention described below, identical reference numbers are used for identical or identical features and components. The advantages that can be achieved with the cleaning device 10 can also be achieved with the other cleaning devices, so that reference can be made to the above statements in order to avoid repetition.

The cleaning device 80 according to Figure 5 comprises an adjusting device 82 for moving the component 28. For example, by means of the adjusting device 82, the receptacle 30 can also be rotated about an axis of rotation 84 and thus the component 28.

The cleaning device 80 further comprises a nozzle device 86 for targeted loading of the component 28. The nozzle device 86 can comprise a plurality of nozzle elements 88. A gaseous or liquid cleaning fluid, for example, can be specifically applied to the component 28 via the nozzle elements 88 in order to remove particles adhering to it.

In the Figure 6 The cleaning device 90 shown schematically differs from the cleaning device 80 in that the nozzle device 86 is also assigned an adjusting device 92. The adjusting device 92 enables, for example, the rotation of the nozzle device 86 about an axis of rotation 94. It can be provided that the axes of rotation 84, 94 are different from one another, and they are preferably aligned parallel to one another. In this way, an in Figure 7 A schematically illustrated exposure pattern can be achieved as a result of the superimposed rotational movements of the component 28 and the nozzle device 86, with a view to cleaning the component 28 as comprehensively as possible.

By means of the adjusting device 82 and/or 92, a translational movement of the component 28 or the nozzle device 86 can also preferably be carried out, as shown in FIG Figure 6 is shown schematically on the nozzle device 86.

In the Figure 8 The cleaning device shown schematically and assigned the reference number 100 also has the nozzle device 86. In order to move this, an adjusting device 102 is provided, which in the present case is designed to be robotic. For example, the adjustment device 102 includes a so-called delta robot 104. The delta robot 104 can, for example a plurality of position-variable and/or length-variable support elements 106 for the nozzle device 86. This makes it possible to position the nozzle device 86 in the interior 18 in such a way that discharged cleaning fluid can be specifically aligned with the component 28. What is preferably possible is a rotation of the nozzle device 86, shown here as a rotation about an axis of rotation 108, and/or a translational movement in preferably three spatial directions independently of one another.

Reference symbol list

10, 80, 90, 100

Cleaning device

12

Cleaning chamber

14

Pressure generating device

16

wall

18

inner space

20

floor wall

22

ceiling wall

24

Side wall

26

Coat

28

Component

30

Recording

32

axis

34

Flow device

38

Suction unit

40

flow channel

42

outlet

44, 46

inlet

48, 50

Section

52

Level

54, 56

Arrow

58

Separation device

60

Exit opening

62

Separation room

64

collection container

66, 68

Section

70

Level

72

wall

82

Adjustment device

84

Axis of rotation

86

Nozzle device

88

Nozzle element

92

Adjustment device

94

Axis of rotation

102

Adjustment device

104

Delta robot

106

Support element

108

Axis of rotation

Claims (16)

1. Cleaning apparatus for cleaning components (28) by means of a gaseous cleaning medium,

   comprising a cleaning chamber (12) with an inner space (18) and a wall arrangement (16) enclosing same,

   a receptacle (30) for the component (28) in the inner space (18),

   and a flow device (34) for the cleaning medium, which comprises a pressurization device (14) and comprises or forms at least one inlet (44, 46) into the inner space (18) and at least one outlet (42) from the inner space (18), wherein a pressure difference between the at least one inlet (44, 46) and the at least one outlet (42) is providable by means of the flow device (34), and wherein the flow device (34) is formed such that the cleaning medium forms a vortex flow (54, 56) at least in sections in the inner space (18) from the at least one inlet (44, 46) to the at least one outlet (42),

   wherein the cleaning apparatus (10; 80; 90; 100) comprises a separating device (58) for particles that are detached from the component (28) and carried by the cleaning medium and

   wherein formed in the wall arrangement (16) is at least one outlet opening (60) for particles,

   characterized

   in that the inner space (18) opens via the outlet opening (60) into a separation space (62) for the particles, and

   in that the at least one outlet opening (60) can be flowed through tangentially by the particles, in relation to an axis (32) defined by the cleaning chamber (12), and/or is extended axially in relation to the axis (32).
2. Cleaning apparatus in accordance with Claim 1, characterized in that the cleaning chamber (12) is of cylindrical or substantially cylindrical configuration, in particular in the form of a vertical cylinder and/or a circular cylinder, wherein the wall arrangement (16) comprises a base wall (20), a top wall (22), and a circumferential side wall (24).
3. Cleaning apparatus in accordance with Claim 1 or 2, characterized in that a wall arrangement (16) of the cleaning chamber (12) is made of an electrically conductive material and/or of an abrasion-resistant material.
4. Cleaning apparatus in accordance with any one of the preceding Claims, characterized in that the receptacle (30) is arranged on a wall (20) of the cleaning chamber (12), in particular a base wall (20), that is opposite a wall (22) in which the at least one outlet (42) is formed.
5. Cleaning apparatus in accordance with any one of the preceding Claims, characterized in that the pressurization device (14) is or comprises at least one of the following:

   - a suction assembly (38) for acting upon the inner space (18) with underpressure by way of the at least one outlet (42);

   - an overpressure device for acting upon the inner space (18) with overpressure by way of the at least one inlet (44, 46).
6. Cleaning apparatus in accordance with any one of the preceding Claims, characterized in that the at least one inlet (44, 46) is arranged or formed on a side wall (24) of the cleaning chamber (12), wherein the side wall (24) preferably forms a shell (26) of the cleaning chamber (12).
7. Cleaning apparatus in accordance with any one of the preceding Claims, characterized in that two or more inlets (44, 46) are provided, in particular two or more inlets (44, 46) that are positioned at a uniform angular distance from one another in relation to an axis of the cleaning chamber (12).
8. Cleaning apparatus in accordance with any one of the preceding Claims, characterized in that the at least one inlet (44, 46) is of slit-shaped configuration,
   wherein preferably the at least one inlet (44, 46) can be flowed through tangentially by the entering cleaning medium, in relation to an axis (34) defined by the cleaning chamber (12), and/or preferably is extended axially in relation to the axis (32), and wherein preferably the flow of the cleaning medium in the inner space (18) runs along the wall arrangement (16) of the cleaning chamber (12) and/or centrally around an axis (32) of the cleaning chamber (12).
9. Cleaning apparatus in accordance with any one of the preceding Claims, characterized in that the at least one outlet opening (60) is arranged or formed on a side wall (24) of the cleaning chamber (12), wherein the side wall (24) preferably forms a shell (26) of the cleaning chamber (12), and
   wherein preferably the at least one outlet opening (60) is of slit-shaped configuration.
10. Cleaning apparatus in accordance with any one of the preceding Claims, characterized in that the separating device (58) is of inertia-based and/or filterless configuration.
11. Cleaning apparatus in accordance with any one of the preceding Claims, characterized in that the separating device (58) comprises a collection container (64) for separated particles.
12. Cleaning apparatus in accordance with any one of the preceding Claims, characterized in that the cleaning apparatus (10; 80; 90; 100) comprises an adjusting device (82) for moving the component (28), and/or in that the cleaning apparatus (10; 80; 90; 100) comprises a vibration device for vibrating the component (28) indirectly or directly.
13. Cleaning apparatus in accordance with Claim 12, characterized in that the adjusting device (82) and/or the vibration device is arranged on a base wall (20) of the cleaning chamber (12) on which the receptacle (30) is positioned, and/or in that the base wall (20) is rotatable by means of the adjusting device (82).
14. Cleaning apparatus in accordance with any one of the preceding Claims, characterized in that the cleaning apparatus (10; 80; 90; 100) comprises a nozzle device (86) with at least one nozzle element (88) arranged in the receiving space (18), which nozzle element can be acted upon with a preferably gaseous cleaning fluid, wherein the at least one nozzle element (88) is preferably directed or directable at the component (28).
15. Cleaning apparatus in accordance with Claim 14, characterized by an adjusting device (92, 102) for moving the nozzle device (86) relative to the component (28), wherein the adjusting device (92, 102) is preferably configured for a translational and/or rotational movement of the nozzle device (86).
16. Cleaning apparatus in accordance with any one of the preceding Claims, characterized in that the cleaning apparatus (10; 80; 90; 100) comprises at least one mechanical cleaning tool in the inner space (18) for mechanically cleaning the component (28).

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