EP3931622A2 - Structure micromécanique, système micromécanique et procédé pour fournir une structure micromécanique - Google Patents

Structure micromécanique, système micromécanique et procédé pour fournir une structure micromécanique

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Publication number
EP3931622A2
EP3931622A2 EP20707087.1A EP20707087A EP3931622A2 EP 3931622 A2 EP3931622 A2 EP 3931622A2 EP 20707087 A EP20707087 A EP 20707087A EP 3931622 A2 EP3931622 A2 EP 3931622A2
Authority
EP
European Patent Office
Prior art keywords
movable element
gear
gear side
micromechanical
structure according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20707087.1A
Other languages
German (de)
English (en)
Inventor
Christian Drabe
André DREYHAUPT
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE102019202656.7A external-priority patent/DE102019202656A1/de
Priority claimed from DE102019202658.3A external-priority patent/DE102019202658B3/de
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of EP3931622A2 publication Critical patent/EP3931622A2/fr
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0808—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more diffracting elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/035—Microgears
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/037—Microtransmissions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0154—Torsion bars
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/04—Electrodes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/051—Translation according to an axis parallel to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Definitions

  • the present invention relates to a micromechanical structure, in particular to a micromechanical structure with a movable element that can be deflected from the reference plane.
  • the present invention also relates to a micromechanical system, to a device with a micromechanical structure or a micromechanical system and to a method for providing a micromechanical structure.
  • the present invention also relates to linearizable resonant components.
  • MEMS micro-electro-mechanical systems
  • micromirrors or microgrids out-of-plane
  • three basic methods in addition to various physical methods, such as magnetic, piezoelectric and acoustic electrostatic methods to:
  • FIG. 30 shows a schematic perspective view of a MEMS according to the prior art, in which a drive electrode 1002 is designed to deflect a mirror plate 1004, which is fastened via torsion springs 1006 to an armature 1012 fastened with a frame.
  • the drive electrode 1002 is electrically insulated from the frame 1008 with an oxide layer 1014.
  • FIG. 31 shows a perspective scanning electron microscope image of interdigital electrodes 1016a and 1016b, in which the interdigital electrodes 1016a and 1016b can be tilted relative to one another by applying an electrical voltage.
  • 32 shows a schematic side sectional view in which the mirror plate 1004 can be deflected by the angle f by applying an electrical voltage to the mirror plate 1004 and one of the opposing electrodes 1018a or 1018b, that is, a deflection of a rotatably mounted mirror plate 1004 can be deflected when applied an electrical voltage between plate capacitors.
  • FIG. 33 shows a schematic diagram for the resonant operation of micromechanical components.
  • a square wave voltage with twice the frequency of the resonance frequency generates the drive; the accelerating voltage is switched on at the upper and lower reversal point of the oscillation and switched off in the rest position.
  • Fig. 34 shows a response curve of a resonantly operated micromirror.
  • FIG. 35 shows a basic sketch and SEM recordings of a micromirror system for quasi-static operation.
  • the electrode combs are located on two levels, as shown in the right-hand area of FIG. 35, or are deflected in advance at an angle, as shown in the left-hand area of FIG. 35.
  • the application of a static electrical voltage leads to a deflection.
  • the plate 1004 can be deflected quasi-statically as well as resonantly there with parallel plate capacitors attached below a plate.
  • lateral forces can be converted into a movement out of the level, as for example in "Laterally Actuated Torsional Micromirrors for Large Static Deflection (Melanovic et al., IEEE Photonics Technology conductor, vol. 15, No. 2, February 2003) is inscribed be ⁇ .
  • MEMS that are easy to manufacture and that can be reliably controlled would be desirable.
  • One object of the present invention is to create MEMS that are easy to manufacture and can be reliably controlled.
  • the inventors have recognized that the inventive arrangement of a gear can produce MEMS which consist of a few, possibly only one functional level, and are therefore easy to manufacture and can be controlled simply and reliably due to the gear.
  • a micromechanical structure comprises a substrate or a frame and a movable element which is arranged in a reference plane in an undeflected state.
  • the micromechanical structure comprises a gear structure, with a first gear side, which is coupled to the substrate, and with a second gear side, which is coupled to the movable element.
  • the micromechanical structure comprises an actuator which is designed to provide a force along a force direction parallel to the reference plane and to apply it to the first transmission side.
  • the gear structure is designed to lead the force out of the reference plane along the force direction in a movement of the movable element. All elements can be in the reference plane in their rest position.
  • a micromechanical system comprises a first micromechanical structure according to an exemplary embodiment, which is arranged as a movable element of a second micromechanical structure according to one of the preceding claims. This enables several transmission structures to be coupled.
  • a device comprises a micromechanical structure or a micromechanical system according to an exemplary embodiment.
  • the device further comprises a control device which is configured to control the actuator.
  • the control device is designed to set an oscillation of the movable element with a target frequency.
  • the control device is designed to apply a control signal to the actuator which has a value of a start frequency, the value of the start frequency being greater or less than the target frequency.
  • the control device is configured to change the frequency of the control signal in a plurality of steps until the target frequency is reached. This enables the movable element to be excited with a high degree of accuracy.
  • a method for providing a micromechanical structure includes providing a substrate, arranging a movable element so that it is arranged in a reference plane in an undeflected state, arranging a gear structure so that a first gear side is coupled to the substrate and a second transmission side is coupled to the movable member.
  • the method includes arranging an actuator so that it is designed to provide a force along a direction of force parallel to the reference plane and to apply it to the first transmission side, so that the transmission structure is designed to convert the force along the direction of force into a movement of the movable one Element out of the reference plane.
  • FIGS. 2a-c show schematic views of an MQL according to an exemplary embodiment, in which the movable element is driven on both sides;
  • 3a-c show schematic views of an MMS with only six instead of eight spiral springs
  • FIG. 3d shows a schematic illustration of a quasi-harmonic oscillation according to an exemplary embodiment
  • FIGS. 3e-g show schematic views of an MMS which, compared to the MMS from FIGS.
  • 3a-c is suspended symmetrically on the substrate with a first gear side
  • FIGS. 4a-c show schematic views of an MMS according to an exemplary embodiment which is modified in relation to the MMS from FIGS. 2a-c with regard to a distance between torsion axes and the edge of the movable element.
  • FIGS. 5a-c show schematic views of an MQL according to an embodiment in which, compared to the MQL of FIGS. 2a-c, second transmission sides are formed in two parts;
  • 6a-c show schematic views of an MMS according to an exemplary embodiment at
  • a first transmission side is made in two parts
  • FIG. 7a-c show schematic views of an MMS in accordance with an exemplary embodiment, in which spiral springs are thinned compared with a substrate;
  • 9a-c show schematic views of an MMS according to an exemplary embodiment in which leaf springs and torsion springs are thinned; 10a-c show schematic views of an MQL according to an exemplary embodiment, in which at least one transmission side has a mechanical preload;
  • 11 a-c show schematic views of an MMS according to an exemplary embodiment without central torsion springs
  • FIGS. 12a-c show schematic views of an MMS according to an exemplary embodiment, which can correspond to a modified variant of the MMS in FIGS. 2a-c in that, for example, the central torsion springs are missing;
  • FIGS. 12a-c show schematic views of the MMS in FIGS. 12a-c when it is excited at a frequency that enables a translational deflection of the movable element along the positive and / or negative z-direction according to an embodiment
  • FIGS. 12a-c show schematic views of an MMS according to an exemplary embodiment which, compared to the MMS from FIGS. 12a-c, has an interchanged arrangement of the torsion axes;
  • FIGS. 13a-14c shows the structure from FIGS. 13a-14c with four-fold suspension according to a
  • FIGS. 14a-14c shows the structure from FIGS. 14a-14c with four-fold suspension according to a
  • FIG. 17a-b show schematic views of an MMS according to an exemplary embodiment, in which further base elements are coupled between the first transmission side and a second transmission side so that a pantograph structure is coupled overall;
  • 18a-b show schematic views of an MQL according to an embodiment, in which bar structures are arranged between the first gear side and the second gear side, which act as a pantograph spring;
  • 19a-c show schematic views of a micromechanical system according to an exemplary embodiment in which the MMS from FIGS. 2a-c is arranged orthogonally as a movable element of the MMS from FIGS. 2a-c;
  • 20a-c show schematic views of a micromechanical system according to a
  • 22a-c show schematic views of a micromechanical system according to a
  • 23a-c show schematic views of exemplary configurations of actuators in accordance with exemplary embodiments that can be used in MMS and micromechanical systems;
  • 24a-c are schematic views of advantageous designs of interdigital electrodes according to exemplary embodiments.
  • 25a-c show schematic views of three V variants of a torsion spring for increasing the lateral rigidity according to exemplary embodiments
  • 26 shows a schematic plan view of a spiral spring arrangement according to one
  • 27a-d show schematic views of torsion springs according to exemplary embodiments, which can be used at any location of the MMS described herein;
  • FIG. 30 shows a schematic view of MMS with laterally arranged electrodes according to the prior art
  • 35 shows scanning electron microscope images and a schematic view of a
  • micromechanical structures that have an actuator.
  • the actuator can be operated electrically or non-electrically be formed, for example as a thermal actuator. If the actuator is designed as an electrical actuator, for example as an electrostatic actuator, piezoelectric actuator, as a pneumatic actuator and / or as a hydraulic actuator, the MMS can also be referred to as a micro-electro-mechanical system (MEMS).
  • MMS and MEMS used here can therefore be combined or interchanged with one another as required and are used synonymously unless specific differences are discussed.
  • a transmission side is coupled to the substrate of the MMS and a second transmission side is coupled to the movable element.
  • a mechanical coupling may, but not necessarily, denote a direct mechanical coupling. Rather, it is also within the scope of the exemplary embodiments described herein that further elements are arranged between two coupled elements, that is, an indirect mechanical connection is established.
  • a transmission structure is also understood to be a structure in which essentially inelastic elements or rigid bodies are coupled to one another by means of spring elements in order to provide a leverage. This means that, unlike a spring element, the gear structure is essentially inelastic (i.e. within the scope of the material stiffness) so that a deformation of at least 50%, at least 70% or at least 90% occurs in spring elements coupled with rigid bodies and only in a smaller amount Circumference in the rigid bodies.
  • MEMS and / or MMS can be produced, for example, in the context of semiconductor production, for example as a complementary metal oxide semiconductor (CMOS) process.
  • CMOS complementary metal oxide semiconductor
  • This can include the formation of structures from a layer structure or a layer stack structure, for example by means of etching processes.
  • Suitable materials for the MEMS described herein can include, for example, silicon materials, such as silicon, silicon oxide, silicon nitride and / or silicon oxynitride, but can also comprise other materials, such as metals such as copper, aluminum or the like. Further or different semiconductor materials can also be used, for example gallium arsenide.
  • the MMS 10 comprises a substrate, for example made of a semiconductor material.
  • the substrate can also be referred to as a frame and can provide a reference structure.
  • the substrate or the frame is understood to be rigid or immobile.
  • the substrate can be arranged on or on a further substrate.
  • the MMS also includes a movable element, for example an optical mirror, an optical grating or another element, for example an element for electrical switching of currents.
  • FIG. 1b which shows a schematic side sectional view of the MMS 10 in an undeflected state in part of the sectional axis AA '
  • the movable element in an undeflected state which is shown in FIG. 1b, is arranged in a reference plane 16, which is arranged, for example, parallel to planes along which layers of the layer stack from which the MMS 10 is formed are arranged.
  • the MMS 10 comprises a transmission structure 18 which has a first transmission side 22a and a second transmission side 22b.
  • the two transmission sides 22a and 22b can be understood as rigid bodies.
  • the first gear side 22a can be coupled to the substrate 12, while the second gear side 22b can be coupled to the movable element 14.
  • a plurality or plurality of leaf spring elements 24i, 24 2 , 24 3 and 244 can be arranged between the first gear side 22a and the substrate 12, so that the first gear side 22a via the leaf spring elements 24, with is coupled to the substrate 12 and supported thereon.
  • Leaf spring elements 24i can be understood as asymmetrical spiral springs. The asymmetry can be adapted to an effective direction of an actuator 26 of the MMS 10.
  • the actuator 26 can have a first actuator side 28a and a second actuator side 28b, between which a force F is generated.
  • a first actuator side 28a can be coupled to the first transmission side 22a and a second actuator side 28b to the substrate 12.
  • the actuator 26 can be designed to generate the force F as a tensile force and / or compressive force, so that the force F essentially can be generated parallel to the reference plane 16.
  • the movable element 14 has a slight inclination with respect to the other layers or layer stacks, which is both an inclination of the movable element 14 with respect to the reference plane 16 in the rest state and an inclination of the reference plane 16 can be understood in relation to the arrangement of the other layers.
  • Such an inclination can be obtained, for example, by utilizing mechanical prestress, so that Deflections of, for example, at most 10 °, at most 8 °, at most 5 ° or at most 2 ° can be obtained.
  • the actuator 26 is still designed to generate at least one component of the force F generated parallel to the reference plane.
  • the actuator 26 is designed to apply the force F to the first gear side 22a, for example as a pressure force in order to increase a distance between the first gear side 22a and the substrate 12.
  • the leaf spring elements 24 can be made rigid within the plane, for example parallel to the z-direction and the y-direction, and soft perpendicular thereto, for example parallel to an x-direction, in order to prevent a movement of the gear side 22a along the x- Enable direction, d. i.e., parallel to the direction of force.
  • the gear structure 18 is designed to convert the force F along the direction of force, for example the x direction, into a movement of the movable element out of the reference plane 16. This includes both a tilting of the movable element 16 and a translational movement of the movable element 14 parallel to the z-direction.
  • FIG. 1c shows a schematic sectional side view of the MMS 10 in a deflected state.
  • the round representation of the spring profiles or cross-sections indicates that the torsion spring elements 32 2 , 32 4 and 32e are deflected, that is, twisted, although a polygonal cross section of the torsion springs 32 2 , 32 4 and 32 6 can remain essentially polygonal when viewed locally.
  • other geometries can also be implemented, for example a rectangular or round cross section. This can be used for example. Replaced by etching processes hold, so that embodiments are not limited to circular cross-sections.
  • torsion springs 32i and 32 2 Between the first side gear 22a and the second transmission side 22b of torsion springs may be arranged 32i and 32 2, which enable a power transmission between the gear sides 22a and 22b.
  • Torsion springs 32 3 and 32 can be arranged between the second gear side 22b and the movable element 14, which enable a power transmission from the second gear side 22b to the movable element 14.
  • the torsion springs 32i to 32 4 can each other enable a torsion or rotation of the elements coupled to one another in each case.
  • the torsion springs 321 and 32 2 are arranged along a common torsion axis 34i.
  • the torsion springs 32a and 324 are arranged along a common torsion axis 34 2 .
  • a tilting of the second transmission side 22b relative to the first transmission side 22a based on the force F can take place about the torsion axis 34.
  • a torsion of the movable element 14 relative to the second transmission side 22b based on the force F can take place about the torsion axis 34 2 .
  • the MMS 10 has, for example, torsion springs 32s and 32e that couple the movable element 14 directly to the substrate 12 so that a plane defined by the torsion springs 32 s and 32 s torsion axis 34 3, a torsion beam describes about which the movable member 14 with respect to of the substrate 12 is rotatably mounted.
  • the torsion springs 32 5 and 32 6 enable an out-of-plane movement.
  • the torsion springs 32s and 32e can also be omitted, such as in a symmetry of the structure with respect to the axis 34 3, resulting in that the movable member 14, depending on the control, can be rotated about the torsion axis 34 3 and / or in translation from the reference plane 16 can be moved out, for example along the positive and / or negative z-direction.
  • the utilization of the force F as a compressive force can be obtained in that the torsion axis 34i is arranged closer to an edge side 36 2 of the movable element 14 than the torsion axis 34 2 , whereby that edge side 36 can be used for this comparison, to which both torsion axes 34i and 34 2 have the smallest distance, and that this is not fulfilled for an edge side 36i of the movable element.
  • the edge side 36 2 like the edge side 36i, is arranged parallel to the torsion axes 34 and 34 2 .
  • the movable element 14 can have any geometry, for example polygonal, round, elliptical or according to a free-form surface.
  • edge side 36i and / or 36 2 can be viewed as a virtual edge side and form a tangent to an outer course of the movable element 14 that is parallel to the torsion axes 34i and 34 2 and in or parallel to the x / y plane is arranged.
  • a position of the torsion axes 34i and 34 2 can be interchanged relative to one another, so that the torsion axis 34 2 has a smaller distance than the torsion axis 34i with respect to the edge side 36 2 .
  • the force F can be applied as a tensile force, which means that the first gear side 22a is drawn in the direction of the substrate 12 along the positive x-direction.
  • FIG. 2a shows a schematic top view of an MMS 20 according to an exemplary embodiment in which the movable element 14 is driven on both sides.
  • the MMS 20 can have two or more gear structures 18i and 18 2 , each of which is driven via an actuator 26i or 26 2 , as is described for the MMS 10.
  • the design of the transmission structure 18 can be mirrored on an axis of symmetry, which can be arranged, for example, along the torsion axis 34a, in order to enable the movable element 14 to be actuated symmetrically.
  • the torsion axes 34i and 34 2 defined by the torsion springs 32i and 32 2 or 32s and 324 can be arranged in a mirrored manner as torsion axes 34 4 and 34 ⁇ , with these torsion axes being defined by torsion springs 327 and 32B or 32g and 32i 0 .
  • the torsion axes 34 and 34 2 as well as 34 4 and 34s can be arranged in such a way that the torsion axes 34 2 and 34 5 , which are defined by the torsion elements that connect the second gear side to the movable element 14, are closer the outer sides or edges 36i and 36 2 are arranged, as the torsion axes 34 and 344, which connect the first gear side with the second gear side.
  • a distance 42 between the torsion axis 34 and the edge 36 2 can be greater than a distance 44i between the torsion axis 34 2 and the edge 36 2 , the same for a distance 42 2 between the torsion axis 34 4 and the edge 36i and a distance 44 2 between the torsion axes 34s and the edge 36i can apply.
  • FIG. 2b shows a schematic side sectional view of the MMS 20 in a non-deflected reference state, in which, for example, all elements can be arranged within a common plane.
  • the suspension and actuation of the movable element 14 can be the same or symmetrical in areas 38i and 382.
  • the regions 38i and 382 can be separated from one another by a plane of symmetry 46, wherein the torsion axis 34s, about which the movable element 14 is rotatably mounted, can be arranged within the plane of symmetry 46.
  • the plane of symmetry 46 can be arranged parallel to a y / z plane, while the torsion axis 34 3 can be arranged parallel to the y direction.
  • the first gear side 22ai and / or 22a 2 and / or the second gear side 22bi and / or 22b 2 can be formed as a plate or beam structure.
  • the torsion spring elements 32i and 32 2 or 32 7 and 32 8 can be formed as narrow bar elements designed for torsion and, for example, have a rectangular cross section. A rectangular cross section can, for example, result from an etching process along or opposite to the z-construction.
  • the first gear side 22a and the second gear side 22b can each be formed as partially open frame structures.
  • the frame structures can be formed as a U-shaped structure and have different sizes, for example with regard to the tavern!
  • the U-shaped structures can, for example, be oriented in the same way, so that openings of the U-shape point in the same direction and / or a bulge of the U-shape (middle sections) can be arranged adjacent to one another and pointing in the same direction.
  • a U-shape can have a straight or bent shape, at least in sections, but also a continuous transition between straight and curved areas.
  • the frame structures can also be formed completely or partially round, for example as semicircular structures. The arrangement enables the first transmission side 22a to at least partially surround the second transmission side 22b.
  • the second gear side 22b can be arranged within a region that is enclosed by the first gear side 22a, which enables a high level of surface efficiency.
  • the gear side 22b can be formed in such a way that it partially encloses the movable element 14.
  • embodiments can enable lateral (inplane) forces to transmit a generated movement of first structures, which lie in a plane and move parallel to it, via gear elements to a second structure (movable element) in such a way that the movement of the second structure occurs the level is done.
  • This movement of the second structure can be a rotation about an axis lying in the plane and / or a translation orthogonal to the plane or in particular in the case of interleaved systems, combinations thereof, ie, rotation plus translation, translation plus translation, rotation plus rotation or multiple, act.
  • the rotation and / or the translation can be static or resonant, with the two versions also being able to be combined successively in time, that is to say being able to be implemented alternately.
  • An exemplary micro-mechanical-optical element is connected to the surrounding frame, the substrate 12, for example via two centrally arranged torsion axes of the springs 32 5 and 32 6 .
  • the exemplary micro-mechanical-optical element ie the movable element, can comprise a mirror and / or an optical grating.
  • the torsion axes of the springs 32s and 32 6 can jointly span the torsion axis 34 3 .
  • the gear elements 22bi and 22 b2 are connected on the outside at the end of the U via four further torsion axles 32i, 32 2 , 32 7 and 32s with two push frames, ie, first gear sides, 22ai and 22a 2 , which connect the gear elements 22bi and 22b 2 and that of this framed optical component 14 also encompass ring-shaped or U-shaped.
  • These push frames 22ai and 22a 2 are connected to the frame 12 at their respective outer corner points via four parallel spiral springs 24i, 24 2 , 24 3 and 24 4 or 24s, 24 6 , 24 7 and 24 s .
  • the torsion springs 32 and the spiral springs 24 can be arranged axially parallel to the torsion axis 34 3 .
  • the three torsion axes or the torsion springs 32 are located at a distance from one another or along an axial collinear alignment, the distance, for example the distance 42 and / or 44, enabling the optical element 14 to be mechanically deflected and the forces required for the deflection and their optimization.
  • the distances in particular whether the distances 42 are larger or smaller than the distances 44, it can also be defined whether the actuator has to provide a tensile force or a compressive force and vice versa, that is, with a fixed actuator its tensile force can be or compressive force must be taken into account accordingly.
  • all elements lie in one plane.
  • the optical element 14, the first transmission sides 22a and the second transmission sides 22b form a coupled oscillator, the total of four transmission sides and the movable Element 14 as a whole can be modeled as a five-mass oscillator.
  • the optical element 14 and the second transmission sides 22bi and 22bz as well as the torsion springs 32 3 , 32 4 , 32 9 and 32 i0 can be moved out of the plane, for example the reference plane 16.
  • the actuator or actuators can be used in the one shown in FIG. 2a explained pull configuration, ie, generating a tensile force, as well as in a frontal push-pull variant, as well as in a corresponding lateral variant.
  • FIG. 2a shows a top view of a rotatably linearizable resonant-oscillating micro-mechanical-optical element
  • FIG. 2b shows a side view of the movable elements at rest
  • FIG. 2c shows a side view of the movable elements in the deflected state.
  • the "linearizability" of the resonantly moving optical element refers to the ability of the vibration to be influenced by external forces acting on the optical element with the help of the gears. This influence is only possible outside of the rest position.
  • FIG 3a shows a schematic plan view of an MMS 30 according to an exemplary embodiment in which the first gear side 22ai and 22a 2 is connected to the substrate 12 via a three-point connection, that is, a number of three elements, for example spring elements 24j, are used, to hang the first gear side 22ai and 12 & on the substrate 12.
  • FIG. 3b shows a schematic side sectional view of the MMS 30 in an undeflected reference state along a section line B-B ‘in FIG. 3a.
  • 3c shows a schematic sectional side view of the MMS 30 along the section line B-B ‘in a deflected state.
  • FIGS. 3a-3c show a variant with only six instead of eight spiral springs 24 for guiding the push frame, the first gear side 22a. It can thus be achieved that less force is required for the deflection and the position of the third, central spring 242 or 24 5 can increase the stability of the push frame in relation to a rotation about the z-axis.
  • two central springs assigned to the respective upper and lower halves can also be used instead of a central spring.
  • Fig. 3a shows a schematic plan view of a rotatable linear Settably resonant-oscillating micro-mechanical-optical element
  • FIG. 3b shows a side view of the movable elements at rest
  • FIG. 3c shows a side view of the movable elements in a deflected state.
  • the MMS 10, 20 and / or the MMS 30 can be operated in different operating modes.
  • the MMS 10, 20 and / or 30 can be operated in a resonant mode.
  • FIG. 3d shows a graph of a harmonic oscillation with a quasi-linear region in the region of the points 48,.
  • An oscillation referred to as harmonic in this context is in reality not a harmonic oscillation, as is shown in FIG. 3d, but rather an oscillation form (quasi-harmonic) which deviates from the ideal sinusoidal shape.
  • the deviations are caused by various non-linear effects, e.g. B. the non-linear spring characteristics, the air damping and the pulsed drive by the actuator.
  • the electrode combs used for the drive remain permanently interlaced, in particular even in the case of large deflections, so that the damping at the electrode combs, which has previously dominated in part, does not change abruptly. This reduces these non-linear influences and the deviations from the harmonic waveform are lower at this point.
  • the actuator can be designed as an electrostatic drive.
  • the electrostatic drive can have interdigital electrodes, between which electrical fields are generated.
  • the interdigital electrodes can be formed in such a way that the electrodes move along an interlacing direction along which the interdigital electrodes are interlaced, so that immersion or emergence of the interdigital electrodes relative to one another can be prevented, especially if the movement of the actuator is arranged in-plane is. .
  • FIG. 3e shows a schematic top view of an MMS 30 ′ according to an exemplary embodiment in which the first transmission side 22a t and 22a 2 is connected to the substrate 12 via a three-point connection, as is described in connection with FIG. 3a.
  • a lateral suspension in the area of the actuator side 28a 2 of the actuator side 28ai can be symmetrical about fastening axes or fastening anchors 25i and / or 25 2. be ordered, which enables a high stability.
  • the fastening anchors 25i and 252 can be fastened or arranged on the first gear side 22ai and 22a 2 , so that a two-fold symmetrical fastening takes place on the substrate 12, or vice versa.
  • the additional compound for adjusting the symmetry, if the MMS is used comparatively 30 may be formed using a spiral spring 242 and preferably to 24 5 are identical with respect to the deformation forces and the bending spring 24 formed are obtained '2 and 24'. 5
  • FIG. 3f shows a schematic sectional side view of the MMS 30 Melt-B BB of FIG. 3e.
  • 3g shows a schematic sectional side view of the MMS 30 ′ along the section line B-B ‘in a deflected state.
  • FIG. 4a shows a schematic top view of an MMS 40, which is modified compared to the MMS 20 to the effect that the distance between the torsion axis 34 and the edge 36i and between the torsion axis 34i and the edge 36 2 is less than the distance between the torsion axes 34s and 34, respectively 2 , so that the actuator can be operated as an actuator generating pressure forces.
  • FIG. 4b shows a schematic side sectional view of the MMS 40 in the section line A-A ‘in a state of rest.
  • 4c shows a schematic sectional side view of the MMS 40 in a deflected one
  • FIGS. 4a to 4c show a rotatably linearizable resonant-oscillating micro-mechanical-optical element (1D) in a top view (FIG. 4a), a side view of the movable elements at rest (FIG. 4b), a Side view of the movable elements in a deflected state (FIG. 4c).
  • the MMS 40 can be understood as a symmetrical, two-sided variant of the MMS 10.
  • the torsion springs can also be swapped in order to increase the parameter space for optimizing the vibration behavior, i.e.
  • FIG. 5a shows a schematic top view of an MMS 50, in which, compared to the MMS 20, the second gear sides 22b are formed in two parts, so that each part 22br1, 22b 2, 22b 2 -1 and 22b 2 -2 between torsion springs 321 and 32 3 , 32 2 and 32 4 , 32 7 and 32g or 32e and 32io is arranged.
  • the second transmission sides can also be realized in several parts, without a direct connection between the individual parts 22bi-1 to 22b 2-2 , but rather only the movable element 14 is provided.
  • FIG. 5b shows a schematic sectional side view of the MMS 50 in an undeflected state
  • FIG. 5c shows a schematic sectional side view of the MMS 50 in a deflected state.
  • FIG. 6a shows a schematic plan view of an MMS 60, in which the first gear side 22ai or 22a 2 is made in two parts compared to the MMS 20, that is, between the spiral springs 24 2 and 24 4 and between the spiral springs 24e, and 24 8 , the frame structure of the first gear side can be at least partially removed, so that segments 22 ar 1, 22 a 2, 22 a 2 -1 and 22 a 2 -2 are still arranged in order to generate a movement of the movable element 14. This can lead to that, compared to the MMS 20 actuators are placed at other locations, for example adjacent to the remaining segments 22ai-1 to 22a 2 -2.
  • Actuators 26i to 26 can be designed to excite segments 22ar1 to 22a 2 -2 perpendicular to a direction of arrangement of the actuators or to introduce forces F in the x direction. Possible embodiments of such actuators are described in more detail later.
  • Fig. 6b shows a schematic side sectional view of the MMS 60 in the section line A-A 'in a state of rest
  • 6c shows a schematic side sectional view of the MMS 60 in a deflected state.
  • FIGS. 5a to 6c show variants in which the gear frame (second gear side) or the push frame (first gear side) are not closed.
  • a combination of the two variants with two open frames is also possible.
  • 7a shows a schematic top view of an MMS 70, which can correspond to the MMS 20 shown in the top view.
  • the spiral springs 24i to 24s can be made thinner along the z-direction compared to the substrate 12, the torsion springs 32i to 32io, the transmission sides 22ai, 22a 2 , 22bi and / or 22b 2 and / or the movable element 14 be, that is, a dimension fi2 of the spiral springs 24i can be smaller than a dimension hi of the other elements.
  • Fig. 7b shows a schematic side sectional view of the MMS 70 along the section line A-Atechnisch in an undeflected state.
  • FIG. 7c shows a schematic side sectional view of the MMS 70 in a deflected state.
  • FIGS. 7a-7c show a variant in which only the spiral springs 24 are locally thinned in relation to the remaining structures, ie. That is, they have a smaller layer thickness along the z-direction, with alternative exemplary embodiments also having thicker structures, i. i.e., provide a larger dimension along the z-direction.
  • FIG 8a shows a schematic top view of an MMS 80 in which, as an alternative to the MMS 70, the MMS 20 is modified to the effect that the torsion springs 32i to 32 ′′ are thinned to a height fi3, which may, but not necessarily, correspond to the height h2 can.
  • the height hi can be, for example, in a range of at least 1 pm and at most 500 pm, at least 20 pm and at most 300 pm and at least 50 pm and at most 100 pm, for example 75 pm
  • the heights h2 and / or h3 can for example be 50% , 40%, 30% or even less thereof.
  • the thinning of the spiral springs 24 and / or torsion springs 32 can result in a change in the reference plane with regard to their arrangement along the z-direction, since a position of the neutral fiber of the respective elements can also be changed.
  • the torsion springs 32s and 32e can, for example, remain at the height hi, but can alternatively also be thinned.
  • FIGS. 9b and 9c which show the MMS 90 in a rest position or in a deflected position, the leaf springs 24 and the torsion springs 32i to 32 10 in are thinned to the height h 2, for example .
  • FIGS. 9a to 9c show a variant in which all springs, the leaf springs and the torsion springs, are locally thinned in relation to the remaining structures.
  • the torsion spring elements can have a smaller dimension along the thickness direction z than the transmission sides 22a and 22b.
  • FIG. 10 a shows a schematic top view of an MMS 100 according to an exemplary embodiment that is different from the MMS 20.
  • At least one gear side 22ai, 22bi, 22a 2 or 22b 2 of a gear can have a mechanical preload, so that the movable element 14 is at least partially moved out of the reference plane 16 even in a rest position of the MMS 100 shown in a schematic sectional side view in FIG. 10b .
  • This can mean that the movable element 14 is arranged in an inclined reference plane 16 ′ which is inclined with respect to the reference plane 16.
  • an asymmetrical preload for tilting the movable element can be advantageous, in particular if the movable element 14 is to be torsion during later operation, for example about the torsion axis 34 3 . This is because in producing 'a vibration or oscillation in the movable member when the latter is in the rest position and having the rest position, little or no difference to the theoretical position of rest parallel to the reference plane 16, the phase of the vibration received from external influences such as a Rest vibration or the like can be influenced.
  • preload elements 52i and / or 52 2 can be provided, for example, which are arranged at least in regions on a part of the transmission structure, for example the second transmission side 22b, approximately in the segments 22b 1 and / or 22bi-2.
  • further mechanical pre-tensioning elements can be arranged on a side of the transmission I8 2 facing away from the viewer in FIG. 10a.
  • the pretensioning elements 52i and / or 52 2 can be mechanically fixedly connected to the second gear side 22b and can be designed, based on a second thermal expansion coefficient of a material of the pretensioning element 52i and / or 52, which differs from a first thermal expansion coefficient of a material of the second gear side 22b 2 provide the mechanical preload.
  • a silicon oxide material or a silicon nitride material which comprises a silicon material, for example, can be deposited on the transmission side 22b, for example at a processing temperature.
  • the materials of the mechanical prestressing element 52 and of the gear side 22b can deform or contract differently, so that the mechanical prestressing is induced.
  • Layer stress can be generated for example by silicon oxide (Si0 2 ) or silicon nitride (S 3 N4) but also by metals, for example copper or aluminum. It is advantageous to use materials that are CMOS-compatible in order to generate the biasing elements, which can also be referred to as stressors.
  • 10c shows a schematic sectional side view of the MMS 100 in a deflected state and along the section line A-A ‘.
  • FIGS. 10a to 10c show a variant with mechanical pre-tensioning elements which cause a slight asymmetrical pre-deflection in the rest position in order to enable deflection without prior resonant oscillation.
  • FIG. 1 1a shows a schematic plan view of an MMS 110 according to an exemplary embodiment, which can be formed, for example, in the absence of the torsion springs 34 s and 34 6 .
  • a tilting of the movable element 14 can be obtained.
  • a translational deflection of the movable element 14 in the positive or negative z-direction can also be obtained.
  • the actuators 18i and I 82 can be designed to generate a pressure force on the respective first transmission side 22ai and 22a2.
  • the second transmission sides 22bi, 22b 2 can, however, be formed in such a way that they are formed as bar structures which enclose the movable element by at least 270 °. This makes it possible to introduce the respective gear excitation on the opposite side of the movable element compared to the side on which the actuator 18 1 or 18 2 is arranged.
  • 11 b shows a schematic sectional side view of the MMS 110 in a rest position of the same.
  • 11c shows a schematic side sectional view of the MMS 110 in a deflected state of the same.
  • FIGS. 11 a to 11 c show a variant without torsion springs 32 s and 32 e , in which the forces act on the opposite side of the element 14.
  • FIG. 12 a shows a schematic top view of an MMS 120 according to an exemplary embodiment which can correspond to that of a modified variant of the MMS 20 in that, for example, the torsion springs 32 5 and 32 s have been removed.
  • the MMS 120 can correspond to the MMS 20.
  • An embodiment of the MMS 120 without torsion springs makes it possible to stimulate both a mode for the rotational deflection of the movable element 14 from the rest position shown in FIG. 12b, as shown in FIG. 12c, and also makes it possible to stimulate one of these different mode to obtain a translational deflection of the movable element 14. At the same time, however, this is accompanied by the requirement to precisely separate the corresponding control frequencies from one another in order to stimulate only one of the two movements, if desired.
  • the torsion springs 32s and 32 6 By arranging the torsion springs 32s and 32 6 , the translational deflection can be suppressed so that simple control can be obtained.
  • FIG. 13a shows a schematic top view of the MMS 120 from FIG. 12a, so that FIGS. 13a and 12a are the same.
  • FIG. 13b shows a schematic side sectional view of the MMS 120, as is also shown in FIG. 12b.
  • 13c shows a schematic side sectional view of the MMS 120 when it is excited at a frequency that enables a translational deflection of the movable element along the positive and / or negative z-direction.
  • the second transmission sides 22bi and 22bi can be deflected in phase, while in FIG. 12c a deflection in opposite phase leads to a tilting of the movable element 14.
  • FIGS. 12a-12c can also be operated in the translation mode using a different oscillation mode, which is shown in FIGS. 13a-c.
  • 14a shows a schematic top view of an MMS 140 which, compared to the MMS 120, has an interchanged arrangement of the torsion axes 341 and 34 2 as well as 34 4 and 34s, so that actuators 18a and 18b based on pressure can be used.
  • FIG. 14b shows a schematic sectional side view of the MMS 140 in a rest position of the same.
  • FIG. 14c shows a schematic side sectional view of the MMS 140 in a deflected state, in which the movable element 14 is moved in a translatory manner along the positive z-axis.
  • FIGS. 14a-14c show the structure from FIGS. 13a-13c with torsion axes 34 exchanged.
  • Fig. 15 shows a schematic plan view of an MMS 150 according to one embodiment, is disposed at the four sides of a gear structure 18 and an actuator 26, wherein in each case two transmission structures and actuators 18i / 26i and 18 3/26 3 or 18 2 / 26 2 and 184/264 can be opposite each other.
  • an opposing arrangement as shown, for example, in FIGS. 14a to 14c, can be executed again mirrored by 90 °.
  • a good mode separation is advantageous in a triple, quadruple or higher-order arrangement, which means that the resonance frequencies of different modes are at a large distance from one another.
  • the quadruple suspension enables at least partial avoidance of rotational movements of the movable element 14 and a translational movement that is well separated from rotations.
  • a higher number of gear structures 18 and / or actuators 26 can move with a large force, a large stroke or travel and / or provide high uniformity of motion.
  • FIG. 15 shows the structure from FIGS. 13a-14c with fourfold suspension. It should be noted that a different number of suspensions (gears) and / or actuators can also be used, for example 1, 2, 3, 5 or more.
  • FIG. 16 shows a schematic plan view of an MMS 160, which can be based on the MMS 140 and likewise has an exemplary quadruple suspension.
  • the actuators may be formed 26i to 26 4 to generate a compressive force.
  • the MMS 150 is described in such a way that the four actuators are designed to generate a tensile force and the MMS 160 is described in such a way that the four actuators are designed to generate a compressive force, it is pointed out that mixed forms can also exist .
  • FIG. 16 shows the structure from FIGS. 14a-14c with four-fold suspension, with triple or multiple suspension also being possible.
  • 17a shows a schematic top view of a section of an MMS 170, in which further bar elements 54a-54c are coupled between the first gear side 22a and a second gear side 22b, so that overall a pantograph structure is coupled, i.e. a lever structure or a lever mechanism, configured to increase a stroke of the transmission.
  • a pantograph structure i.e. a lever structure or a lever mechanism
  • 17b shows a schematic side sectional view of the MMS 170 in a deflected state, the deflected state being characterized by a translational displacement of the movable element 14 along the positive z-direction.
  • a preferably four-fold or multiple suspension increases the stability of the system.
  • the overall structure including the first gear side 22a, the second gear side 22b and the intermediate beam structures 54a, 54b and 54c can be formed as a multi-stage scissors gear.
  • lever mechanism in FIG. 17a comprises three bar structures 54a, 54b and 54c, any other desired lever structures can also be implemented which have the same or a different number of bar structures that are located at suitable locations on the substrate, on the first gear side 22a , on the second gear side 22b or on each other.
  • 18a shows a schematic plan view of an MMS 180 in which bar structures 54a and 54b are arranged between the first gear side 22a and the second gear side 22b, which act as pantograph springs, which also enables the stroke of the gear to be increased.
  • FIG. 18b shows a schematic side sectional view of the MMS 180 in a deflected state of the movable element 14, whereby the representation selected as a translational displacement of the movable element 14 by way of example can also be influenced by the deflection or actuation of other suspensions.
  • FIGS. 17a-b and 18a-b show two further variants of the suspensions shown in FIGS. 13a-c and 14a-c of a structure operated in translation.
  • FIG. 19a shows a schematic top view of a micromechanical system 190 according to an exemplary embodiment in which a micromechanical structure according to the embodiments described herein, for example an MMS 20i, which can correspond to the MMS 20, is arranged as a movable element of a further MMS 20 2 that for example can also correspond to the MMS 2O 2 .
  • An arrangement of the torsion axes 343-1 and 34 3 -2 of the inner MMS 20i suspended as a movable element and the outer MMS 2O 2 can be the same here, but also, as shown, be shifted to one another by an angle, approximately 90 °, so that by tilting the movable element 14 of the MMS 20i a tilting of the same along a first dimension, for example about the x-axis, and by tilting the MMS 20i about a second axis, for example the y-axis, a second dimension of the tilting of the movable Elements 14 can be obtained.
  • 19b shows a schematic side sectional view of the micromechanical system 190 in its rest position, in which all elements are arranged within the plane 16.
  • 19c shows a schematic side sectional view of the micromechanical system 190 in a deflected state of the MMS 20i with respect to the MMS 2O2.
  • FIGS. 19a-c show the structure from FIGS. 2a-2c in a 2D variant, in which the deflection can take place orthogonally to one another.
  • FIG. 20a shows a schematic top view of a micromechanical system 200 according to an exemplary embodiment, which likewise has the MMS 20i, which is suspended as a movable element of the MMS 2O2.
  • the torsion axes 34 3 -1 and 34 3 -2 can, however, be parallel and even congruent, which enables an increase in the deflection angle of the movable element 14 of the MMS 20i, since the movable element 1 is deflected as part of the MMS 20i in the MMS 20 2 and can also be deflected within the MMS 2Qi.
  • the different MMS can have different resonance frequencies, so that they can be operated at different frequencies and can have different operating points.
  • FIG. 20b shows a schematic side sectional view of the micromechanical system 200 in a rest position of the same, in which all elements are arranged within the plane 16.
  • FIGS. 20a-20c show the structure from FIGS. 2a-2c in a 2D variant in which the deflection takes place coaxially.
  • micromechanical systems 190 and 200 are described in such a way that the MMS
  • any combinations of MMS according to the exemplary embodiments described herein are possible, each MMS being able to be used as an inner and each MMS as an outer MMS.
  • the micromechanical structures 190 and 200 are described in such a way that two MMS are arranged and form nesting with one another, any other number can also be used be arranged by MMS in micromechanical systems, for example more than 2, more than 3, more than 4 or more than 5 or even a higher number.
  • 21a shows a schematic plan view of a micromechanical system 210 in which the MMS 20 is arranged as a movable element of an MMS 120.
  • 21b shows a schematic side sectional view of micromechanical system 210 in an undeflected state of the same, in which all elements are arranged in reference plane 16.
  • 21c shows a schematic side sectional view of the micromechanical system 210 in a deflected state of the micromechanical structure 20 with respect to the MMS 120.
  • the MMS 120 is configured, for example, to translate the MMS 20 along the z direction, which can be used, for example, to adjust a path length of the rotation axis of the movable member 14.
  • a comparatively broad structure of the substrate of the inner MQL to absorb large forces enables the inner gears to be supported.
  • FIGS. 21a-21c show the structure from FIGS. 13a-13c and FIGS. 2a-2c combined as a 2d variant, with a rotation through 90 ° also being possible.
  • 22a shows a schematic top view of a micromechanical system 220, which is formed inversely to micromechanical system 210 and in which MMS 120 is arranged as a movable element of MMS 20.
  • FIG. 22b shows a schematic side sectional view of the micromechanical system 220 in a rest position.
  • 22c shows a schematic side sectional view of the micromechanical system 220 in which the MMS 120 is deflected with respect to the MMS 20.
  • FIGS. 22a-22c show the structures from FIGS. 2a-2c and FIGS. 13a-13c combined as a 2D variant, whereby a rotation of the two elements by 90 ° to one another is also possible.
  • FIGS. 23a-23c exemplary configurations of actuators 26a, 26b and 26c will now be discussed, which can be used as actuators in the MMS and micromechanical systems described above.
  • FIG. 23a is a schematic plan view of the actuator 26a, in which insulators 56 t to 564 are arranged to electrically isolate individual sections of the substrate 12 by other, so that there 58t to 58 e electrically insulated from other electrodes arranged electrodes 58t to 58e are electrically isolated.
  • electric fields can be generated in electric power sources 62, for example, which can lead to a movement 64 which can be transmitted to the first transmission side 22a, for example.
  • a direction of the force sources 62 and a direction of movement 64 may be parallel to each other.
  • FIG. 23a shows a frontal capacitive drive in a push-pull arrangement.
  • the actuator 26b shows a schematic plan view of the actuator 26b, the electrodes 58 of which are arranged parallel to the direction of movement 64, which means that the force is generated parallel thereto.
  • the actuator can have a number of sections 66, for example four, the structure of the actuator 26b being explained in more detail with reference to sections 661 and 662.
  • the sections 66 3 and 66 4 can be formed in a comparable manner.
  • the electrodes 58i to 58 2 can be formed, for example, as interdigital electrodes which move in-plane to one another along the direction of movement 64 when an electric field is applied to the electrodes 58i to 68 24 .
  • the interdigital electrodes can, for example, be arranged next to one another along a direction perpendicular to a direction of force that lies parallel to the movement 64.
  • the advantage of this embodiment is that the occurrence of a mechanical impact (pull-in effect) can be reduced or prevented, since a distance between the electrodes along a surface normal thereof can remain unchanged, while, for example, in the actuator 26a a distance between the electrodes 58i to 58B is mutable.
  • FIG. 23b shows a frontal capacitive drive with an electrode comb in a push-pull arrangement.
  • MMS 20 is implemented, for example, in a frontal “PuH” variant
  • frontal “Push-Puir” variants as shown for example in FIGS. 23a and 23b, can also be implemented, as well as in a corresponding other variant, shown in Fig. 23C.
  • 23c shows a schematic top view of an actuator 26c, in which the electrodes are connected at any desired location to the first gear side 22a and are arranged adjacent to electrodes 58i and 58, which are connected to the substrate 12, in order to move the first To enable transmission side 22a along the direction of movement 64.
  • any other configurations in front of electrostatic actuators can be used in the exemplary embodiments described herein.
  • other actuator principles can also be implemented, for example piezoelectric, thermal or the like.
  • the actuators 26 is a C to 26 have in common that the actuator comprises an electrode structure which is supported on the substrate, for example, the electrodes 58i, 58a and 58e of the actuator 26a, the electrodes 58i, 58 4, 58s, 58 a, 58g and 58 ′′ of the actuator 26b or the electrodes 58i and 68 4 of the actuator 26c.
  • One of the other electrode structures is supported on the first transmission side, the actuator being designed to provide the force for generating the movement 64 between the electrode structures.
  • FIG. 23c shows a lateral capacitive drive with an electrode comb in a push-pull arrangement or a section thereof. It is noted that all the arrangements of FIGS. 23a-23c can also be arranged in series several times one behind the other and / or can have any number of electrodes.
  • interdigital electrodes are described with reference to FIGS. 24a-24c.
  • the arrangement of electrode structures does not have a restrictive effect to the effect that the electric fields can only be generated at these locations. Rather, areas of the gear structure or the gear sides and / or areas of the substrate 12 can be electrically conductive so that the respective area can act as an electrode. This is illustrated in FIGS. 24a-24c, in which 58i are each designed as a finger to 68 7 and can be brought together to an electrical potential.
  • 24a shows a schematic top view of an electrode structure 68a, in which electrodes 58i, 58 3 , 58s and 58 7 connected to substrate 12 are formed with constant dimensions along the y-direction, as are electrodes 58z, 68 4 and 58e, which are connected to the first transmission side 22a.
  • FIG. 24a shows an arrangement of frontal capacitive standard electrodes.
  • Fig. 24b shows a schematic plan view of an electrode assembly 68b, in which the electrodes 58i to 58 7 along the x-direction, that is, the direction of movement 64, having a stepped profile, that is, a discontinuously changing dimension along the y- Direction.
  • the first transmission side 22a moves, for example, along the positive x-direction.
  • Sections 72i to 72s of electrodes 68 2 , 58 4 and 58 e can immerse into areas 74i to 74 3 , which are narrow, that is, form narrow trenches, based on wide electrodes 58i, 58 3 , 58s and 58 7 .
  • a distance between the electrodes is reduced to 58 58i 7 at these locations enabling high force action as soon as the portions 72i to immerse 72s in the narrow trenches 74i to 74. 3
  • the ditches in which the electrodes are immersed during lateral movement can be narrower, as shown in FIG. 24b, so that the effective capacity takes place z. B. of 4 pm wide trenches of 3 pm, 2pm or even only 1 pm wide trenches is formed. This can lead to a significant increase in usable energy.
  • FIG. 24b shows an arrangement of frontal capacitive electrodes with narrow immersion trenches for increasing the capacity.
  • Fig. 24c shows a schematic plan view of an arrangement 68c, in which the electrodes are formed conically to 68 7 58i, which means have a continuously variable dimension along the x-direction so that the distance between the electrodes at a movement 64 along the positive x-direction decreases continuously, while it decreases discontinuously in FIG. 24b.
  • FIG. 24c shows an arrangement of frontal capacitive electrodes with a conical shape for enlarged capacity enlargement.
  • the described arrangements 68a and 68b and 68c can be combined in any desired manner with the actuators described herein.
  • a structure can be used for the torsion springs which exhibits a minimum resistance for the desired rotation and at the same time a maximum resistance for the parasitic translation in the plane orthogonal to the axis of rotation.
  • FIG. 25a to 25c show a schematic plan view of a torsion spring arrangement 76 comprising two or more torsion springs 32 which can be arranged in the place of simple torsion springs.
  • FIG. 25a shows an arrangement of the torsion spring arrangement 76 instead of the torsion spring 32e of the MMS 10.
  • FIG. 25b shows an arrangement of the torsion spring arrangement 76 instead of the torsion spring 32 2 of the MMS 10.
  • FIG. 25c shows an arrangement of the torsion spring arrangement 76 instead of the Torsion spring 324 of the MMS10, wherein the torsion spring arrangement 76 can also replace any other torsion springs of the MMS described herein or of micromechanical structures.
  • An opening angle ⁇ between the inclined torsion spring elements can, for example, have a value of at least 2 ° and at most 45 °, at least 10 ° and at most 30 ° or at least 12 ° and at most 25 °, for example 15 °.
  • the torsion spring arrangement 76 comprises at least a first torsion spring element 32e-1, 322-1 or 32 4 -1 and a second torsion spring element 32e-2, 32 2 -2 or 324-2, which are V-shaped are arranged inclined to one another, wherein preferably both torsion spring elements are arranged at an angle to a surface normal of both adjacent structural elements.
  • FIGS. 25a-25c show three V variants of a torsion spring for increasing the lateral rigidity.
  • lateral means along the direction of movement 64.
  • FIG. 26 shows a schematic plan view of a spiral spring arrangement 78, comprising at least two spiral springs 24i and 24 2 , which are arranged inclined to a surface normal 82 of the substrate 12 and / or the first gear side 22a.
  • the spiral spring arrangement 78 can be bistable along the direction of movement 64, which can be obtained, for example, by the inclined arrangement with respect to the surface normal 82 of the substrate 12 or, alternatively, the first gear side 22a.
  • the spiral springs 24i and 24 2 are preferably arranged parallel to one another, so that angles of inclination gi and g 2 with respect to the surface normal 82 can be the same.
  • the angles of inclination can have an angle of at least and at most 30 °, at least 5 ° and at most 20 ° or at least 10 ° and at most 15 °.
  • the spiral spring arrangement 78 can be arranged in place of any of the spiral springs of the MMS described herein.
  • FIG. 26 shows a special form of a spiral spring / spiral spring arrangement for bistable positioning of the push frame, that is, the first gear side 22a.
  • FIGS. 27a-27d show schematic exemplary embodiments of torsion springs 32 'and 32 ", which can be used at any location of the MMS described herein.
  • FIG. 27a shows an arrangement of the torsion spring 32 'between the movable element 14 and the substrate 12.
  • FIG. 27b shows the arrangement of the torsion spring 32' between the movable element 12 and the second gear side 22b.
  • 27c shows the arrangement of the torsion spring 32 'between the first gear side 22a and the second gear side 22b.
  • the torsion spring 32 ' is formed as an X-shaped spring, that is to say, on both structures, for example the movable element 14 and the substrate 12, there are two attachment areas, with individual spring elements crossing one another to provide the X-shape. It should be noted here that the torsion spring elements 32 ′ are preferably formed in one piece. The torsion spring elements 32 ′ enable an increase in the lateral rigidity along the direction of movement 64, for example parallel to the x direction.
  • 27d shows a schematic top view of the torsion spring 32 ′′, which is coupled, for example, between the first gear side 22a and the second gear side 22b, wherein it can also be positioned at any other point.
  • the torsion spring 32 ′′ has a dimension 84 that is variable along an axial course from the first gear side 22a to the second gear side 22b, for example diagonally along an x / y direction, which is referred to as width by way of example, but without restrictive effect can be.
  • This enables a local reduction in the width of the torsion spring 32 ′′, for example in a central region 86, by a high one there.
  • the high lateral rigidity can be retained.
  • FIG. 25 shows V variants of the torsion springs which can withstand the transverse forces explained in connection with FIGS. 24a-24c to a greater extent.
  • Fig. 26 a variant of the spiral springs is also shown, which enables a bistable locking of the push frame, similar to a cracking frog effect.
  • an X-spring can also be used, which is shown in Fig. d is shown.
  • Such X-variants of the torsion spring have a high resistance with regard to transverse forces.
  • FIGS. 28a-28d Another form of the torsion springs with a significantly higher resistance element to lateral displacement is shown in FIGS. 28a-28d, with FIG. 28d in any case showing an optimization of the profile course of the structures.
  • a torsion spring element arrangement 88 can also be arranged which comprises two, but also a larger number of torsion springs.
  • the torsion spring includes 32 'and 322'', respectively have a kinked course along an axial course and a first structure 14 or 22a to a second structure 12 or 22b, that is, they run at an angle to the center of the spring.
  • the torsion spring 32i ''' can be coupled to the movable element 14 at a first coupling location 92i, as shown in FIGS.
  • such a torsion spring just like the torsion springs 32, 32 ′ or 32 i ′′, can also be arranged on further bar structures, for example the bar structures 54.
  • the torsion spring 32 2 1 ′′ can be arranged in a similar manner between coupling locations 92 3 and 924, wherein the coupling location 92 3 can be arranged on the same structure as the coupling location 92 and wherein the coupling location 92 4 can be arranged on the same structure as the coupling point 92 2 .
  • a distance 94a can be arranged between the coupling locations or areas 92i and 92a, which is reduced in the axial course of the torsion spring elements 32i '"and 32 2 '" to a distance 94b which is, for example, at least 1 pm, at least 4 pm and at least 8 pm , but is at most half of the distance 94a, which can be, for example, a value of 500 pm, 200 pm or 50 pm.
  • the torsion spring element arrangement 88 can have a first and a second torsion spring element 32 ′ ′′, which are each bent along an axial course and are arranged in such a way that a first distance 94a between the first coupling locations 92 and 92 3 and a second The distance between the second coupling point 92 2 and 92 4 is greater than a minimum distance between the torsion spring elements along the axial course, that is, the distance 94b. It should be noted that the distance between the coupling locations 92 2 and 92 4 can be the same as the distance 94 a, but a different value can also be implemented.
  • Fig. 28d is a schematic plan view of the Torsionsfederelementanssen 88, wherein the torsion springs 32 "t" and 32 2 "” can be formed similar to the spring assembly 88 of FIGS. 28a to 28c, wherein the torsion springs 32i “" and 32 2 “”Additionally have the variable dimension 84 along the x-direction (alternatively the y-direction depending on the orientation), which is described in connection with the torsion spring 32".
  • FIGS. 28a-d can be arranged without contact over the entire axial course, ie they are without direct mechanical contact over the entire axial course, preferably also during the torsion being carried out.
  • FIGS. 28a to 28d show X-column variants of a torsion spring for increasing the lateral rigidity.
  • MMS were described in such a way that they comprise different structures or structural elements, for example the substrate 12, the movable element 14, the first gear side 22a and the second gear side 22b. It should be noted that these elements can be produced from the same layer stack, in particular by etching processes of a CMOS process. This enables some, some or all of the elements to be at least partially formed in one piece, which means that at least a part of the substrate 12, at least a part of the gear structure 18 and at least a part of the movable element 14 can be formed in one piece.
  • FIG. 29 shows a schematic block diagram of a device 290 according to an exemplary embodiment, which for example includes the MMS 10 and which also includes a control device 96 that is coupled to the MMS 10.
  • a control device 96 that is coupled to the MMS 10.
  • the control device 96 is configured to control the actuator of the MMS 10.
  • the control device can be designed to apply a decreasing or increasing control frequency for setting an oscillation (rotation and / or translational movement of the movable element of the MMS 10. If the MMS 10 has, for example, a certain resonance frequency for the operating mode formed, by means of which the operating mode can be set, the control device 96 can be designed to set a higher frequency and apply it to the MMS 10 or the actuator.
  • the control device 96 can be designed to set the frequency of a control signal 98 that is provided to the actuator in a Reduce a large number of steps until the target frequency is reached.
  • the control device can apply a lower or lower frequency than the resonance frequency and then increase the frequency. Both enable a fundamental oscillation to be excited by the frequency outside the resonance frequency n, even if this is not yet resonant. This fundamental oscillation can then be drawn step-by-step into the resonant oscillation.
  • the control device 96 can be designed to operate the MMS or micromechanical system. Such a system can be operated, for example, as follows. As an example, FIG. 33 and FIG. 34 will be discussed again.
  • a system is shown here whose parametric resonance f 3 corresponds approximately to twice the natural frequency of the spring-mass system and which, for example, can be excited at higher frequencies.
  • Alternative systems can be excited with lower frequencies, which can qualitatively mirror the curve between f 3 and fi at f 3 .
  • a start frequency greater than frequency f 2 is selected, for example, so that h is a maximum start frequency and f 2 is a minimum frequency at which good energy absorption is possible to start the oscillatable system.
  • disposed frequency range between fi and f 2 starts a frequency sweep that is, "a frequency variation, with the described frequency steps the mechanical vibration, and is continued until the system upon reaching of the frequency f 3, at least within a tolerance range, the maximum oscillation amplitude is reached, for which the signal according to FIG. 33 can be selected in order to accelerate the movable element twice per mechanical oscillation.
  • the movable structural element can be excited into parametric resonant oscillation from a reference plane by applying the control signal with the start frequency and / or by varying the frequency of the control signal.
  • the exemplary embodiments described herein can be designed in such a way that the frame (substrate), the gear structure, the movable element and / or the spring elements can be arranged in a common substrate plane and / or can be formed from the same substrate layers.
  • a height profile can be provided along a thickness direction in the MEMS, this can be done by subsequent thinning of individual elements that were previously formed from the same substrate layers, which in particular enables a one-piece design of the components mentioned.
  • control device 96 can be configured to set a multiplicity of operating modes in the MMS 10, alternatively, any other MMS and / or micromechanical system described herein. Some of these modes are explained below.
  • corresponding actuation devices can be provided, which are preferably arranged and / or in-plane Generate forces in-plane, so that the corresponding actuator elements remain in engagement with one another during the actuation and an “emergence” of the elements with respect to one another, as can occur for example with offset interdigital electrodes, see FIG. 35, is avoided.
  • the oscillation designated as harmonic is in reality not a harmonic oscillation (Fig. 3d), but an oscillation form that deviates from the ideal sinusoidal shape (quasi-harmonic).
  • the deviations are caused by various non-linear effects, e.g. the non-linear spring characteristics, damping and drive.
  • One of the non-linear effects results, especially with large deflections, from the gradually or abruptly changing damping by the surrounding medium when the electrode combs are "immersed" or "emerged” (FIG. 33, FIG. 31) in the course of the oscillation.
  • the electrode combs used for the drive remain permanently interlaced, especially even with large deflections, so that the damping at the electrode combs (previously partly dominant) does not change abruptly. This reduces these non-linear influences and the deviations from the harmonic waveform are lower at this point.
  • Quasi-static operation 2.A: Costs: In the case of systems deflected with the aid of external forces (FIG. 35), for example, two wafers are currently bonded together, or two planes are created during the manufacture of the wafers (eg epitaxially). This increases the material and process costs. a -the described invention enables a quasi-static operation using only a simple BSOI wafer.
  • the electrode combs which are arranged in two levels, place very high demands on the accuracy of their positioning relative to one another. Manufacturing the electrode combs in two levels (with external actuation or integrated manufacturing) is correspondingly complex. In the described invention, the electrode combs are manufactured in one process step in one plane, and are therefore self-adjusting and, like the classic resonant components described above, can be manufactured without additional effort.
  • a-the described invention enables the placement of further combs on previously unused areas within the component, since the optimal energy generation is not tied to a specific position. In this way, the energy made available can potentially be increased without necessarily increasing the size of the component.
  • exemplary embodiments enable the supply of additional electrical potentials. This enables a simplified connection or improvement of sensors or other electronic components on the vibrating body.
  • exemplary embodiments enable mechanical stabilization through additional mechanical suspensions. This enables the shock resistance to be improved and optimized through an expanded parameter space.
  • exemplary embodiments enable the nonlinearities of the spring system to be optimized by additional mechanical suspensions (extended parameter space).
  • exemplary embodiments include a position that is tilted compared to the rest position. Thus, potential parasitic optical reflections caused by a glass cover parallel to the mirror plate in the rest position can be avoided.
  • the effective spring stiffness can be varied by electrostatic attraction and thus for adjustment e.g. the frequency can be used.
  • the "extending" of the electrode combs during operation with increasing deflection leads to reduced efficiency.
  • the electrode combs are permanently interlaced and therefore fully electrostatically effective for all deflections.
  • the position can be measured capacitively via comb drives.
  • the problem here is that no or only a weakened signal of the position (change in capacitance) can no longer be measured when the combs emerge. This problem is solved with the described invention, since the combs can be permanently interlaced.
  • the mirror plate does not have to be operated with alternating fields, so the influence of the area exposed to alternating fields on the nonlinearities of the oscillation is very much less.
  • the system can be operated by a number of controls, for example by the control device 96.
  • a starting frequency of a driver can be selected to be greater than twice the frequency of the mechanical, i.e., parametric, resonance frequency. It can be within a tolerance range of 100%, preferably 50% and more preferably 20% or less, which can also be selected to be even smaller with increasing frequency.
  • the drive voltage or the drive voltages are modulated in frequency and / or amplitude and / or phase position in the course of the oscillation in such a way that there is a change in the waveform, ie the amplitude curve the time comes.
  • the quasi-linear range of a sinusoidal oscillation can be enlarged, or non-linear areas of the oscillation can be compensated / optimized.
  • both braking and accelerating forces can be coupled in in any position of the oscillation outside the zero crossing. This corresponds to the second operating mode, which becomes more effective, particularly with increasing distance from the resonance. 3.
  • the system is statically deflected when a voltage threshold is exceeded. This can e.g. with the help of mechanical "pre-tensioning" elements that bring the torsion axis (or the translation oscillator) into a slight pre-deflection. With this pre-deflection, a moment can also be generated outside of the central position in the plane, which deflects the structure, see FIG. 10. This static deflection corresponds to the fourth operating mode.
  • aspects have been described in connection with a device, it goes without saying that these aspects also represent a description of the corresponding method, so that a block or a component of a device is also to be understood as a corresponding method step or as a feature of a method step. Analogously, aspects that have been described in connection with or as a method step also represent a description of a corresponding block or details or features of a corresponding device.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)

Abstract

Un dispositif micromécanique comprenant un substrat, un élément mobile disposé dans un état non dévié dans un plan de référence, une structure de transmission ayant un premier côté de transmission couplé au substrat et un second côté de transmission couplé à l'élément mobile, et un actionneur configuré pour fournir et appliquer une force le long d'une direction de force parallèle au plan de référence au premier côté de transmission. La structure de transmission est conçue pour convertir la force le long de la direction de la force en un mouvement de l'élément mobile hors du plan de référence.
EP20707087.1A 2019-02-27 2020-02-25 Structure micromécanique, système micromécanique et procédé pour fournir une structure micromécanique Pending EP3931622A2 (fr)

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DE102019202656.7A DE102019202656A1 (de) 2019-02-27 2019-02-27 Mikromechanische Struktur, mikromechanisches System und Verfahren zum Bereitstellen einer mikromechanischen Struktur
DE102019202658.3A DE102019202658B3 (de) 2019-02-27 2019-02-27 Mikromechanische Struktur und Verfahren zum Bereitstellen derselben
PCT/EP2020/054863 WO2020173919A2 (fr) 2019-02-27 2020-02-25 Structure micromécanique, système micromécanique et procédé pour fournir une structure micromécanique

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WO2019138115A1 (fr) * 2018-01-12 2019-07-18 Barco N.V. Dispositif pour un pivotement élastique autour de deux axes orthogonaux
US11609419B2 (en) * 2019-05-29 2023-03-21 Texas Instruments Incorporated Microelectromechanical system contactor spring

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DE59804942C5 (de) 1998-10-28 2020-11-19 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Mikromechanisches bauelement mit schwingkörper
TW505614B (en) * 2000-06-09 2002-10-11 Speed Corp C Optical mirror system with multi-axis rotational control
JP4285005B2 (ja) 2003-01-16 2009-06-24 ソニー株式会社 三次元構造体およびその製造方法、並びに電子機器
US6995895B2 (en) * 2004-02-05 2006-02-07 Lucent Technologies Inc. MEMS actuator for piston and tilt motion
EP1591824B1 (fr) * 2004-04-26 2012-05-09 Panasonic Corporation Microactionneur
KR100624436B1 (ko) 2004-10-19 2006-09-15 삼성전자주식회사 2축 액츄에이터 및 그 제조방법
JP2006167860A (ja) * 2004-12-15 2006-06-29 Seiko Epson Corp アクチュエータ
US7355317B2 (en) * 2005-03-31 2008-04-08 Lucent Technologies Inc. Rocker-arm actuator for a segmented mirror
US7365613B2 (en) * 2006-08-21 2008-04-29 Lexmark International, Inc. Method of determining resonant frequency
DE102008012825B4 (de) 2007-04-02 2011-08-25 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., 80686 Mikromechanisches Bauelement mit verkippten Elektroden
US7535620B2 (en) 2007-04-04 2009-05-19 Precisely Microtechnology Corp. Micro-electro-mechanical system micro mirror
JP5184909B2 (ja) * 2008-02-13 2013-04-17 キヤノン株式会社 揺動体装置及び光偏向装置
US8803256B2 (en) * 2010-11-15 2014-08-12 DigitalOptics Corporation MEMS Linearly deployed actuators
JP5860066B2 (ja) * 2012-01-24 2016-02-16 パイオニア株式会社 アクチュエータ
JP6424477B2 (ja) * 2014-06-05 2018-11-21 株式会社豊田中央研究所 Ｍｅｍｓ装置
US9306475B1 (en) * 2014-08-01 2016-04-05 Faez Ba-Tis Piston-tube electrostatic microactuator
KR101894375B1 (ko) * 2016-07-13 2018-09-04 이화여자대학교 산학협력단 스캐닝 마이크로 미러

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EP3931623A1 (fr) 2022-01-05
WO2020173989A1 (fr) 2020-09-03
EP3931623B1 (fr) 2023-01-11
US20210387851A1 (en) 2021-12-16
WO2020173919A2 (fr) 2020-09-03
WO2020173919A3 (fr) 2020-10-22
US20210380401A1 (en) 2021-12-09

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