EP3931622A2

EP3931622A2 - Micromechanical structure, micromechanical system and method for providing a micromechanical structure

Info

Publication number: EP3931622A2
Application number: EP20707087.1A
Authority: EP
Inventors: Christian Drabe; André DREYHAUPT
Original assignee: Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Current assignee: Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date: 2019-02-27
Filing date: 2020-02-25
Publication date: 2022-01-05
Also published as: WO2020173989A1; EP3931623A1; WO2020173919A3; EP3931623B1; US20210387851A1; US12071338B2; WO2020173919A2; US20210380401A1

Abstract

A micromechanical device comprises a substrate, a movable element, which is arranged in a reference plane in an undeflected state, a gearing structure having a first gearing side, which is coupled to the substrate, and having a second gearing side, which is coupled to the movable element, and an actuator configured to provide a force along a force direction parallel to the reference plane and to apply it to the first gearing side. The gearing structure is configured to convert the force along the force direction into a movement of the movable element out of the reference plane.

Description

Micromechanical structure, micromechanical system and method for preparing a micromechanical structure

description

The present invention relates to a micromechanical structure, in particular to a micromechanical structure with a movable element that can be deflected from the reference plane. The present invention also relates to a micromechanical system, to a device with a micromechanical structure or a micromechanical system and to a method for providing a micromechanical structure. The present invention also relates to linearizable resonant components.

In order to move micro-electro-mechanical systems (MEMS), such as micromirrors or microgrids, out-of-plane, there are three basic methods in addition to various physical methods, such as magnetic, piezoelectric and acoustic electrostatic methods to:

The components can be operated as follows with the aid of laterally arranged electrodes, as shown, for example, in FIG. 30 or laterally arranged interdigital electrode combs, as shown in FIG. 31 or plate capacitors, as shown in FIG. 32. 30 shows a schematic perspective view of a MEMS according to the prior art, in which a drive electrode 1002 is designed to deflect a mirror plate 1004, which is fastened via torsion springs 1006 to an armature 1012 fastened with a frame. For this purpose, the drive electrode 1002 is electrically insulated from the frame 1008 with an oxide layer 1014. By applying a pulsed voltage in the range of twice the natural frequency of the torsional oscillator shown in FIG. 30 to the drive electrode 1002, the mirror plate 1004 can be set into resonant oscillation.

In contrast, FIG. 31 shows a perspective scanning electron microscope image of interdigital electrodes 1016a and 1016b, in which the interdigital electrodes 1016a and 1016b can be tilted relative to one another by applying an electrical voltage. 32 shows a schematic side sectional view in which the mirror plate 1004 can be deflected by the angle f by applying an electrical voltage to the mirror plate 1004 and one of the opposing electrodes 1018a or 1018b, that is, a deflection of a rotatably mounted mirror plate 1004 can be deflected when applied an electrical voltage between plate capacitors.

Operation can take place in a classic resonant manner, as is described, for example, in EP 1 123 526 B1. If the electrodes (combs) lie in the same plane, the components can be set into resonant oscillation by applying a suitable square wave voltage in the vicinity of twice the resonance frequency, as is shown in FIG. 33 and FIG. Here, the electrode combs interlock in the rest position. In other words, FIG. 33 shows a schematic diagram for the resonant operation of micromechanical components. A square wave voltage with twice the frequency of the resonance frequency generates the drive; the accelerating voltage is switched on at the upper and lower reversal point of the oscillation and switched off in the rest position. Fig. 34 shows a response curve of a resonantly operated micromirror.

There is also a classic quasi-static drive that can also be used resonantly. Such concepts are described, for example, in DE 10 2008 012 825 B4, JP 4285005 B2, US 7,508,111 B2 or US 7,535,620 B2. If electrodes (combs) are located in two planes arranged one above the other or tilted to one another, the components can be moved quasi-statically (as well as resonantly in the range of the resonance frequency), as is shown in FIG. 35, for example. Here, the electrode combs interlock in the deflected state. In other words, FIG. 35 shows a basic sketch and SEM recordings of a micromirror system for quasi-static operation. In the rest position, the electrode combs are located on two levels, as shown in the right-hand area of FIG. 35, or are deflected in advance at an angle, as shown in the left-hand area of FIG. 35. The application of a static electrical voltage leads to a deflection.

Referring again to FIG. 32, the plate 1004 can be deflected quasi-statically as well as resonantly there with parallel plate capacitors attached below a plate. With a classic lever system attached in several levels, lateral forces can be converted into a movement out of the level, as for example in "Laterally Actuated Torsional Micromirrors for Large Static Deflection (Melanovic et al., IEEE Photonics Technology conductor, vol. 15, No. 2, February 2003) is inscribed be ^¬.

All of the methods mentioned bring with them a number of technical problems, especially the technologically complex production of several functional levels for operating the components.

MEMS that are easy to manufacture and that can be reliably controlled would be desirable.

One object of the present invention is to create MEMS that are easy to manufacture and can be reliably controlled.

This object is achieved by the subject matter of the independent patent claims.

The inventors have recognized that the inventive arrangement of a gear can produce MEMS which consist of a few, possibly only one functional level, and are therefore easy to manufacture and can be controlled simply and reliably due to the gear.

According to one exemplary embodiment, a micromechanical structure comprises a substrate or a frame and a movable element which is arranged in a reference plane in an undeflected state. The micromechanical structure comprises a gear structure, with a first gear side, which is coupled to the substrate, and with a second gear side, which is coupled to the movable element. The micromechanical structure comprises an actuator which is designed to provide a force along a force direction parallel to the reference plane and to apply it to the first transmission side. The gear structure is designed to lead the force out of the reference plane along the force direction in a movement of the movable element. All elements can be in the reference plane in their rest position.

This enables the actuator to be operated in the reference plane (in-plane) and the movement of the actuator via the gear structure to be used to move the movable element out of the reference plane. A high level of precision and reliability of the control can thus be obtained, as there is a dependency the actuator force from a deflection angle or a position of the movable member is small or can be prevented.

According to an exemplary embodiment, a micromechanical system comprises a first micromechanical structure according to an exemplary embodiment, which is arranged as a movable element of a second micromechanical structure according to one of the preceding claims. This enables several transmission structures to be coupled.

According to an exemplary embodiment, a device comprises a micromechanical structure or a micromechanical system according to an exemplary embodiment. The device further comprises a control device which is configured to control the actuator. The control device is designed to set an oscillation of the movable element with a target frequency. For this purpose, the control device is designed to apply a control signal to the actuator which has a value of a start frequency, the value of the start frequency being greater or less than the target frequency. The control device is configured to change the frequency of the control signal in a plurality of steps until the target frequency is reached. This enables the movable element to be excited with a high degree of accuracy.

According to one embodiment, a method for providing a micromechanical structure includes providing a substrate, arranging a movable element so that it is arranged in a reference plane in an undeflected state, arranging a gear structure so that a first gear side is coupled to the substrate and a second transmission side is coupled to the movable member. The method includes arranging an actuator so that it is designed to provide a force along a direction of force parallel to the reference plane and to apply it to the first transmission side, so that the transmission structure is designed to convert the force along the direction of force into a movement of the movable one Element out of the reference plane.

Further advantageous embodiments are defined in the dependent claims.

Preferred exemplary embodiments of the present invention are explained below with reference to the accompanying drawings. Show it: 1a-c schematic views of an MMS according to an exemplary embodiment with a movable element;

2a-c show schematic views of an MQL according to an exemplary embodiment, in which the movable element is driven on both sides;

3a-c show schematic views of an MMS with only six instead of eight spiral springs

Guiding a push frame according to an embodiment;

FIG. 3d shows a schematic illustration of a quasi-harmonic oscillation according to an exemplary embodiment; FIG.

FIGS. 3e-g show schematic views of an MMS which, compared to the MMS from FIGS

3a-c is suspended symmetrically on the substrate with a first gear side;

4a-c show schematic views of an MMS according to an exemplary embodiment which is modified in relation to the MMS from FIGS. 2a-c with regard to a distance between torsion axes and the edge of the movable element.

5a-c show schematic views of an MQL according to an embodiment in which, compared to the MQL of FIGS. 2a-c, second transmission sides are formed in two parts;

6a-c show schematic views of an MMS according to an exemplary embodiment at

a first transmission side is made in two parts;

7a-c show schematic views of an MMS in accordance with an exemplary embodiment, in which spiral springs are thinned compared with a substrate;

8a-c show schematic views of an MMS according to an exemplary embodiment in which torsion springs are thinned;

9a-c show schematic views of an MMS according to an exemplary embodiment in which leaf springs and torsion springs are thinned; 10a-c show schematic views of an MQL according to an exemplary embodiment, in which at least one transmission side has a mechanical preload;

11 a-c show schematic views of an MMS according to an exemplary embodiment without central torsion springs;

12a-c show schematic views of an MMS according to an exemplary embodiment, which can correspond to a modified variant of the MMS in FIGS. 2a-c in that, for example, the central torsion springs are missing;

13a-c show schematic views of the MMS in FIGS. 12a-c when it is excited at a frequency that enables a translational deflection of the movable element along the positive and / or negative z-direction according to an embodiment;

14a-c show schematic views of an MMS according to an exemplary embodiment which, compared to the MMS from FIGS. 12a-c, has an interchanged arrangement of the torsion axes;

15 shows the structure from FIGS. 13a-14c with four-fold suspension according to a

Embodiment;

16 shows the structure from FIGS. 14a-14c with four-fold suspension according to a

Embodiment;

17a-b show schematic views of an MMS according to an exemplary embodiment, in which further base elements are coupled between the first transmission side and a second transmission side so that a pantograph structure is coupled overall;

18a-b show schematic views of an MQL according to an embodiment, in which bar structures are arranged between the first gear side and the second gear side, which act as a pantograph spring; 19a-c show schematic views of a micromechanical system according to an exemplary embodiment in which the MMS from FIGS. 2a-c is arranged orthogonally as a movable element of the MMS from FIGS. 2a-c;

20a-c show schematic views of a micromechanical system according to a

further embodiment in which the MMS of Fig. 2a-c as a movable

Element of the MMS from FIGS. 2a-c is arranged coaxially;

21a-c schematic views of a micromechanical system according to a

Exemplary embodiment in which the MMS from FIGS. 2a-c is arranged as a movable element of the MMS from FIGS. 12a-c;

22a-c show schematic views of a micromechanical system according to a

Exemplary embodiment which is formed inversely to the micromechanical system from FIGS. 21a-c;

23a-c show schematic views of exemplary configurations of actuators in accordance with exemplary embodiments that can be used in MMS and micromechanical systems;

24a-c are schematic views of advantageous designs of interdigital electrodes according to exemplary embodiments;

25a-c show schematic views of three V variants of a torsion spring for increasing the lateral rigidity according to exemplary embodiments;

26 shows a schematic plan view of a spiral spring arrangement according to one

Embodiment;

27a-d show schematic views of torsion springs according to exemplary embodiments, which can be used at any location of the MMS described herein;

28a-d schematic views of further advantageous configurations of the torsion springs according to exemplary embodiments; 29 shows a schematic block diagram of a device according to an exemplary embodiment;

30 shows a schematic view of MMS with laterally arranged electrodes according to the prior art;

31 shows a scanning electron microscope image of laterally arranged interdigital electrode combs according to the prior art;

32 shows a schematic sectional side view of a plate capacitor drive according to the prior art;

33 shows a basic diagram for the resonant operation of micromechanical components according to the prior art;

34 shows a schematic response curve of a resonantly operated micromirror according to the prior art;

35 shows scanning electron microscope images and a schematic view of a

Drive with electrode combs, which are located in two planes arranged one above the other or tilted to one another, according to the prior art; and

36 family of measurement curves to illustrate the drive behavior of electrode combs from the prior art.

Before exemplary embodiments of the present invention are explained in more detail below with reference to the drawings, it is pointed out that identical, functionally identical or identically acting elements, objects and / or structures in the different figures are provided with the same reference numerals, so that those shown in different exemplary embodiments Description of these elements is interchangeable or can be applied to one another.

The following exemplary embodiments relate to micromechanical structures (MMS) that have an actuator. The actuator can be operated electrically or non-electrically be formed, for example as a thermal actuator. If the actuator is designed as an electrical actuator, for example as an electrostatic actuator, piezoelectric actuator, as a pneumatic actuator and / or as a hydraulic actuator, the MMS can also be referred to as a micro-electro-mechanical system (MEMS). The terms MMS and MEMS used here can therefore be combined or interchanged with one another as required and are used synonymously unless specific differences are discussed.

The following exemplary embodiments relate to a coupling of structures. For example, a first transmission side is coupled to the substrate of the MMS and a second transmission side is coupled to the movable element. A mechanical coupling may, but not necessarily, denote a direct mechanical coupling. Rather, it is also within the scope of the exemplary embodiments described herein that further elements are arranged between two coupled elements, that is, an indirect mechanical connection is established. A transmission structure is also understood to be a structure in which essentially inelastic elements or rigid bodies are coupled to one another by means of spring elements in order to provide a leverage. This means that, unlike a spring element, the gear structure is essentially inelastic (i.e. within the scope of the material stiffness) so that a deformation of at least 50%, at least 70% or at least 90% occurs in spring elements coupled with rigid bodies and only in a smaller amount Circumference in the rigid bodies.

MEMS and / or MMS, as shown in the exemplary embodiments described herein, can be produced, for example, in the context of semiconductor production, for example as a complementary metal oxide semiconductor (CMOS) process. This can include the formation of structures from a layer structure or a layer stack structure, for example by means of etching processes. Suitable materials for the MEMS described herein can include, for example, silicon materials, such as silicon, silicon oxide, silicon nitride and / or silicon oxynitride, but can also comprise other materials, such as metals such as copper, aluminum or the like. Further or different semiconductor materials can also be used, for example gallium arsenide.

1 a shows a schematic top view of an MMS 10 according to an exemplary embodiment. The MMS 10 comprises a substrate, for example made of a semiconductor material. The The substrate can also be referred to as a frame and can provide a reference structure. In the exemplary embodiments described herein, the substrate or the frame is understood to be rigid or immobile. Formed as a frame, the substrate can be arranged on or on a further substrate. The MMS also includes a movable element, for example an optical mirror, an optical grating or another element, for example an element for electrical switching of currents. With reference to FIG. 1b, which shows a schematic side sectional view of the MMS 10 in an undeflected state in part of the sectional axis AA ', it becomes clear that the movable element in an undeflected state, which is shown in FIG. 1b, is arranged in a reference plane 16, which is arranged, for example, parallel to planes along which layers of the layer stack from which the MMS 10 is formed are arranged.

The MMS 10 comprises a transmission structure 18 which has a first transmission side 22a and a second transmission side 22b. The two transmission sides 22a and 22b can be understood as rigid bodies. The first gear side 22a can be coupled to the substrate 12, while the second gear side 22b can be coupled to the movable element 14. Although any other mechanical coupling can be provided, a plurality or plurality of leaf spring elements 24i, 24 ₂ , 24 ₃ and 244 can be arranged between the first gear side 22a and the substrate 12, so that the first gear side 22a via the leaf spring elements 24, with is coupled to the substrate 12 and supported thereon. Leaf spring elements 24i can be understood as asymmetrical spiral springs. The asymmetry can be adapted to an effective direction of an actuator 26 of the MMS 10. For example, the actuator 26 can have a first actuator side 28a and a second actuator side 28b, between which a force F is generated. For example, a first actuator side 28a can be coupled to the first transmission side 22a and a second actuator side 28b to the substrate 12. The actuator 26 can be designed to generate the force F as a tensile force and / or compressive force, so that the force F essentially can be generated parallel to the reference plane 16. As will be explained in detail later, this does not exclude the fact that the movable element 14 has a slight inclination with respect to the other layers or layer stacks, which is both an inclination of the movable element 14 with respect to the reference plane 16 in the rest state and an inclination of the reference plane 16 can be understood in relation to the arrangement of the other layers. Such an inclination can be obtained, for example, by utilizing mechanical prestress, so that Deflections of, for example, at most 10 °, at most 8 °, at most 5 ° or at most 2 ° can be obtained.

If the reference plane 16 is now inclined by tilting the movable element 14, the actuator 26 is still designed to generate at least one component of the force F generated parallel to the reference plane. The actuator 26 is designed to apply the force F to the first gear side 22a, for example as a pressure force in order to increase a distance between the first gear side 22a and the substrate 12. In accordance with this, the leaf spring elements 24 can be made rigid within the plane, for example parallel to the z-direction and the y-direction, and soft perpendicular thereto, for example parallel to an x-direction, in order to prevent a movement of the gear side 22a along the x- Enable direction, d. i.e., parallel to the direction of force.

The gear structure 18 is designed to convert the force F along the direction of force, for example the x direction, into a movement of the movable element out of the reference plane 16. This includes both a tilting of the movable element 16 and a translational movement of the movable element 14 parallel to the z-direction.

1c shows a schematic sectional side view of the MMS 10 in a deflected state. The round representation of the spring profiles or cross-sections indicates that the torsion spring elements 32 ₂ , 32 ₄ and 32e are deflected, that is, twisted, although a polygonal cross section of the torsion springs 32 ₂ , 32 ₄ and 32 ₆ can remain essentially polygonal when viewed locally. Regardless of this, other geometries can also be implemented, for example a rectangular or round cross section. This can be used for example. Replaced by etching processes _hold, so that embodiments are not limited to circular cross-sections.

Between the first side gear 22a and the second transmission side 22b of torsion springs may be arranged 32i and 32 _2, which enable a power transmission between the gear sides 22a and 22b. Torsion springs 32 ₃ and 32 can be arranged between the second gear side 22b and the movable element 14, which enable a power transmission from the second gear side 22b to the movable element 14. The torsion springs 32i to 32 ₄ can each other enable a torsion or rotation of the elements coupled to one another in each case. According to one embodiment, the torsion springs 321 and 32 _{2 are arranged} along a common torsion axis 34i. According to one embodiment, the torsion springs 32a and 324 are arranged along a common torsion axis 34 ₂ . A tilting of the second transmission side 22b relative to the first transmission side 22a based on the force F can take place about the torsion axis 34. A torsion of the movable element 14 relative to the second transmission side 22b based on the force F can take place about the torsion axis 34 ₂ .

The MMS 10 has, for example, torsion springs 32s and 32e that couple the movable element 14 directly to the substrate 12 so that a plane defined by the torsion springs 32 _s and 32 _s torsion axis 34 _3, a torsion beam describes about which the movable member 14 with respect to of the substrate 12 is rotatably mounted. The torsion springs 32 ₅ and 32 ₆ enable an out-of-plane movement.

The torsion springs 32s and 32e can also be omitted, such as in a symmetry of the structure with respect to the axis 34 _3, resulting in that the movable member 14, depending on the control, can be rotated about the torsion axis 34 ₃ and / or in translation from the reference plane 16 can be moved out, for example along the positive and / or negative z-direction.

The utilization of the force F as a compressive force can be obtained in that the torsion axis 34i is arranged closer to an edge side 36 _{2 of} the movable element 14 than the torsion axis 34 ₂ , whereby that edge side 36 can be used for this comparison, to which both torsion axes 34i and 34 _{2 have} the smallest distance, and that this is not fulfilled for an edge side 36i of the movable element. At the same time, the edge side 36 ₂ , like the edge side 36i, is arranged parallel to the torsion axes 34 and 34 ₂ . It should be noted that the movable element 14 can have any geometry, for example polygonal, round, elliptical or according to a free-form surface. In this case, the edge side 36i and / or 36 ₂ can be viewed as a virtual edge side and form a tangent to an outer course of the movable element 14 that is parallel to the torsion axes 34i and 34 ₂ and in or parallel to the x / y plane is arranged.

According to alternative exemplary embodiments, a position of the torsion axes 34i and 34 ₂ can be interchanged relative to one another, so that the torsion axis 34 _{2 has} a smaller distance than the torsion axis 34i with respect to the edge side 36 ₂ . In this case, the force F can be applied as a tensile force, which means that the first gear side 22a is drawn in the direction of the substrate 12 along the positive x-direction. If she Torsion axis 34i starting from the torsion axis 34 ₂ on this side or on the other side of the edge side 36 ₂ has no major influence on the operating principle of converting a compressive force or a tensile force of the actuator 26 and can be varied based on other parameters, such as structural stability or force peaks.

2a shows a schematic top view of an MMS 20 according to an exemplary embodiment in which the movable element 14 is driven on both sides. The MMS 20 can have two or more gear structures 18i and 18 ₂ , each of which is driven via an actuator 26i or 26 ₂ , as is described for the MMS 10. The design of the transmission structure 18 can be mirrored on an axis of symmetry, which can be arranged, for example, along the torsion axis 34a, in order to enable the movable element 14 to be actuated symmetrically. The torsion axes 34i and 34 ₂ defined by the torsion springs 32i and 32 ₂ or 32s and 324 can be arranged in a mirrored manner as torsion axes 34 ₄ and 34 _Ö , with these torsion axes being defined by torsion springs 327 and 32B or 32g and 32i ₀ .

In contrast to the MMS 10, the torsion axes 34 and 34 ₂ as well as 34 ₄ and 34s can be arranged in such a way that the torsion axes 34 ₂ and 34 ₅ , which are defined by the torsion elements that connect the second gear side to the movable element 14, are closer the outer sides or edges 36i and 36 ₂ are arranged, as the torsion axes 34 and 344, which connect the first gear side with the second gear side. This means that a distance 42 between the torsion axis 34 and the edge 36 ₂ can be greater than a distance 44i between the torsion axis 34 ₂ and the edge 36 ₂ , the same for a distance 42 ₂ between the torsion axis 34 ₄ and the edge 36i and a distance 44 ₂ between the torsion axes 34s and the edge 36i can apply.

FIG. 2b shows a schematic side sectional view of the MMS 20 in a non-deflected reference state, in which, for example, all elements can be arranged within a common plane.

2c shows the MMS 20 in a deflected state in which the movable element

14 is at least partially moved out of the reference plane 16, that is, is arranged inclined thereto. The suspension and actuation of the movable element 14 can be the same or symmetrical in areas 38i and 382. The regions 38i and 382 can be separated from one another by a plane of symmetry 46, wherein the torsion axis 34s, about which the movable element 14 is rotatably mounted, can be arranged within the plane of symmetry 46. The plane of symmetry 46 can be arranged parallel to a y / z plane, while the torsion axis 34 ₃ can be arranged parallel to the y direction.

Based on the MMS / MEMS manufacturing technology, the first gear side 22ai and / or 22a ₂ and / or the second gear side 22bi and / or 22b _{2 can be formed} as a plate or beam structure. The torsion spring elements 32i and 32 ₂ or 32 ₇ and 32 ₈ can be formed as narrow bar elements designed for torsion and, for example, have a rectangular cross section. A rectangular cross section can, for example, result from an etching process along or opposite to the z-construction. The first gear side 22a and the second gear side 22b can each be formed as partially open frame structures. The frame structures can be formed as a U-shaped structure and have different sizes, for example with regard to the tavern! along the y-direction and / or the X-direction. The U-shaped structures can, for example, be oriented in the same way, so that openings of the U-shape point in the same direction and / or a bulge of the U-shape (middle sections) can be arranged adjacent to one another and pointing in the same direction. A U-shape can have a straight or bent shape, at least in sections, but also a continuous transition between straight and curved areas. As an alternative or in addition, the frame structures can also be formed completely or partially round, for example as semicircular structures. The arrangement enables the first transmission side 22a to at least partially surround the second transmission side 22b. In other words, the second gear side 22b can be arranged within a region that is enclosed by the first gear side 22a, which enables a high level of surface efficiency. Alternatively or additionally, the gear side 22b can be formed in such a way that it partially encloses the movable element 14.

In other words, embodiments can enable lateral (inplane) forces to transmit a generated movement of first structures, which lie in a plane and move parallel to it, via gear elements to a second structure (movable element) in such a way that the movement of the second structure occurs the level is done. This movement of the second structure can be a rotation about an axis lying in the plane and / or a translation orthogonal to the plane or in particular in the case of interleaved systems, combinations thereof, ie, rotation plus translation, translation plus translation, rotation plus rotation or multiple, act. The rotation and / or the translation can be static or resonant, with the two versions also being able to be combined successively in time, that is to say being able to be implemented alternately. All structures can be arranged in one plane. An exemplary micro-mechanical-optical element is connected to the surrounding frame, the substrate 12, for example via two centrally arranged torsion axes of the springs 32 ₅ and 32 ₆ . The exemplary micro-mechanical-optical element, ie the movable element, can comprise a mirror and / or an optical grating. The torsion axes of the springs 32s and 32 ₆ can jointly span the torsion axis 34 ₃ . Via four further torsion axes 32 ₃ , 32 ₄ , 32 ₉ and 32i ₀ attached to the outer edge of the optical element 14, the optical element 14 is connected to two ring-shaped or U-shaped gear elements 22bi and 22b ₂ which laterally surround the optical element. The gear elements 22bi and 22 b2 are connected on the outside at the end of the U via four further torsion axles 32i, 32 ₂ , 32 ₇ and 32s with two push frames, ie, first gear sides, 22ai and 22a ₂ , which connect the gear elements 22bi and 22b ₂ and that of this framed optical component 14 also encompass ring-shaped or U-shaped. These push frames 22ai and 22a ₂ are connected to the frame 12 at their respective outer corner points via four parallel spiral springs 24i, 24 ₂ , 24 ₃ and 24 ₄ or 24s, 24 ₆ , 24 ₇ and 24 _s .

The torsion springs 32 and the spiral springs 24 can be arranged axially parallel to the torsion axis 34 ₃ . The three torsion axes or the torsion springs 32 are located at a distance from one another or along an axial collinear alignment, the distance, for example the distance 42 and / or 44, enabling the optical element 14 to be mechanically deflected and the forces required for the deflection and their optimization. By choosing the distances, in particular whether the distances 42 are larger or smaller than the distances 44, it can also be defined whether the actuator has to provide a tensile force or a compressive force and vice versa, that is, with a fixed actuator its tensile force can be or compressive force must be taken into account accordingly.

According to exemplary embodiments, all elements lie in one plane. The optical element 14, the first transmission sides 22a and the second transmission sides 22b form a coupled oscillator, the total of four transmission sides and the movable Element 14 as a whole can be modeled as a five-mass oscillator. The optical element 14 and the second transmission sides 22bi and 22bz as well as the torsion springs 32 ₃ , 32 ₄ , 32 ₉ and 32 _i0 can be moved out of the plane, for example the reference plane 16. The actuator or actuators can be used in the one shown in FIG. 2a explained pull configuration, ie, generating a tensile force, as well as in a frontal push-pull variant, as well as in a corresponding lateral variant.

In other words, FIG. 2a shows a top view of a rotatably linearizable resonant-oscillating micro-mechanical-optical element, FIG. 2b shows a side view of the movable elements at rest and FIG. 2c shows a side view of the movable elements in the deflected state. The "linearizability" of the resonantly moving optical element refers to the ability of the vibration to be influenced by external forces acting on the optical element with the help of the gears. This influence is only possible outside of the rest position.

3a shows a schematic plan view of an MMS 30 according to an exemplary embodiment in which the first gear side 22ai and 22a _{2 is} connected to the substrate 12 via a three-point connection, that is, a number of three elements, for example spring elements 24j, are used, to hang the first gear side 22ai and 12 & on the substrate 12.

3b shows a schematic side sectional view of the MMS 30 in an undeflected reference state along a section line B-B ‘in FIG. 3a.

3c shows a schematic sectional side view of the MMS 30 along the section line B-B ‘in a deflected state.

In other words, FIGS. 3a-3c show a variant with only six instead of eight spiral springs 24 for guiding the push frame, the first gear side 22a. It can thus be achieved that less force is required for the deflection and the position of the third, central spring 242 or 24 ₅ can increase the stability of the push frame in relation to a rotation about the z-axis. In order to preserve the symmetry, two central springs assigned to the respective upper and lower halves can also be used instead of a central spring. Fig. 3a shows a schematic plan view of a rotatable linear Settably resonant-oscillating micro-mechanical-optical element, FIG. 3b shows a side view of the movable elements at rest and FIG. 3c shows a side view of the movable elements in a deflected state.

The MMS 10, 20 and / or the MMS 30 can be operated in different operating modes. For example, the MMS 10, 20 and / or 30 can be operated in a resonant mode. FIG. 3d shows a graph of a harmonic oscillation with a quasi-linear region in the region of the points 48,. An oscillation referred to as harmonic in this context is in reality not a harmonic oscillation, as is shown in FIG. 3d, but rather an oscillation form (quasi-harmonic) which deviates from the ideal sinusoidal shape. The deviations are caused by various non-linear effects, e.g. B. the non-linear spring characteristics, the air damping and the pulsed drive by the actuator. One of the non-linear effects results here, especially with large deflections of the movable element, on the gradually or abruptly changing damping by the surrounding medium, as can occur when "immersing" or "emerging" electrode combs in the course of the oscillation for example in the devices according to FIG. 31 and / or FIG. 33. According to exemplary embodiments, the electrode combs used for the drive remain permanently interlaced, in particular even in the case of large deflections, so that the damping at the electrode combs, which has previously dominated in part, does not change abruptly. This reduces these non-linear influences and the deviations from the harmonic waveform are lower at this point. This means that the actuator can be designed as an electrostatic drive. According to one exemplary embodiment, the electrostatic drive can have interdigital electrodes, between which electrical fields are generated. The interdigital electrodes can be formed in such a way that the electrodes move along an interlacing direction along which the interdigital electrodes are interlaced, so that immersion or emergence of the interdigital electrodes relative to one another can be prevented, especially if the movement of the actuator is arranged in-plane is. .

3e shows a schematic top view of an MMS 30 ′ according to an exemplary embodiment in which the first transmission side 22a _t and 22a _{2 is} connected to the substrate 12 via a three-point connection, as is described in connection with FIG. 3a. A lateral suspension in the area of the actuator side 28a _{2 of} the actuator side 28ai can be symmetrical about fastening axes or fastening anchors 25i and / or 25 _2. be ordered, which enables a high stability. The fastening anchors 25i and 252 can be fastened or arranged on the first gear side 22ai and 22a ₂ , so that a two-fold symmetrical fastening takes place on the substrate 12, or vice versa. The additional compound for adjusting the symmetry, if the MMS is used comparatively 30 may be formed using a spiral spring 242 and preferably to 24 _{5 are} identical with respect to the deformation forces and the bending spring 24 formed are obtained _'2 and 24'. ₅

FIG. 3f shows a schematic sectional side view of the MMS 30 einem in a non-deflected reference state along a section line B BB of FIG. 3e.

3g shows a schematic sectional side view of the MMS 30 ′ along the section line B-B ‘in a deflected state.

4a shows a schematic top view of an MMS 40, which is modified compared to the MMS 20 to the effect that the distance between the torsion axis 34 and the edge 36i and between the torsion axis 34i and the edge 36 _{2 is} less than the distance between the torsion axes 34s and 34, respectively ₂ , so that the actuator can be operated as an actuator generating pressure forces.

FIG. 4b shows a schematic side sectional view of the MMS 40 in the section line A-A ‘in a state of rest.

4c shows a schematic sectional side view of the MMS 40 in a deflected one

Status.

In other words, FIGS. 4a to 4c show a rotatably linearizable resonant-oscillating micro-mechanical-optical element (1D) in a top view (FIG. 4a), a side view of the movable elements at rest (FIG. 4b), a Side view of the movable elements in a deflected state (FIG. 4c). The MMS 40 can be understood as a symmetrical, two-sided variant of the MMS 10. In the MMS 10, which the other way round can be called a one-sided, asymmetrical variant of the MMS 40, the torsion springs can also be swapped in order to increase the parameter space for optimizing the vibration behavior, i.e. to use compressive forces instead of tensile forces and vice versa. Some of the variants shown can also be operated with the classically resonant operated elements described above. Fig. 5a shows a schematic top view of an MMS 50, in which, compared to the MMS 20, the second gear sides 22b are formed in two parts, so that each part 22br1, 22b 2, 22b ₂ -1 and 22b ₂ -2 between torsion springs 321 and 32 ₃ , 32 ₂ and 32 ₄ , 32 ₇ and 32g or 32e and 32io is arranged. In other words, the second transmission sides can also be realized in several parts, without a direct connection between the individual parts 22bi-1 to 22b _2-2 , but rather only the movable element 14 is provided.

FIG. 5b shows a schematic sectional side view of the MMS 50 in an undeflected state, while FIG. 5c shows a schematic sectional side view of the MMS 50 in a deflected state.

6a shows a schematic plan view of an MMS 60, in which the first gear side 22ai or 22a _{2 is made in} two parts compared to the MMS 20, that is, between the spiral springs 24 ₂ and 24 ₄ and between the spiral springs 24e, and 24 ₈ , the frame structure of the first gear side can be at least partially removed, so that segments 22 ar 1, 22 a 2, 22 a ₂ -1 and 22 a ₂ -2 are still arranged in order to generate a movement of the movable element 14. This can lead to that, compared to the MMS 20 actuators are placed at other locations, for example adjacent to the remaining segments 22ai-1 to 22a ₂ -2.

Actuators 26i to 26 can be designed to excite segments 22ar1 to 22a ₂ -2 perpendicular to a direction of arrangement of the actuators or to introduce forces F in the x direction. Possible embodiments of such actuators are described in more detail later.

Fig. 6b shows a schematic side sectional view of the MMS 60 in the section line A-A 'in a state of rest,

6c shows a schematic side sectional view of the MMS 60 in a deflected state.

In other words, FIGS. 5a to 6c show variants in which the gear frame (second gear side) or the push frame (first gear side) are not closed. A combination of the two variants with two open frames is also possible. 7a shows a schematic top view of an MMS 70, which can correspond to the MMS 20 shown in the top view. Compared to the MMS 20, the spiral springs 24i to 24s can be made thinner along the z-direction compared to the substrate 12, the torsion springs 32i to 32io, the transmission sides 22ai, 22a ₂ , 22bi and / or 22b ₂ and / or the movable element 14 be, that is, a dimension fi2 of the spiral springs 24i can be smaller than a dimension hi of the other elements.

Fig. 7b shows a schematic side sectional view of the MMS 70 along the section line A-A einem in an undeflected state.

7c shows a schematic side sectional view of the MMS 70 in a deflected state.

In other words, FIGS. 7a-7c show a variant in which only the spiral springs 24 are locally thinned in relation to the remaining structures, ie. That is, they have a smaller layer thickness along the z-direction, with alternative exemplary embodiments also having thicker structures, i. i.e., provide a larger dimension along the z-direction.

8a shows a schematic top view of an MMS 80 in which, as an alternative to the MMS 70, the MMS 20 is modified to the effect that the torsion springs 32i to 32 ″ are thinned to a height fi3, which may, but not necessarily, correspond to the height h2 can. While the height hi can be, for example, in a range of at least 1 pm and at most 500 pm, at least 20 pm and at most 300 pm and at least 50 pm and at most 100 pm, for example 75 pm, the heights h2 and / or h3 can for example be 50% , 40%, 30% or even less thereof. It should be noted that the thinning of the spiral springs 24 and / or torsion springs 32 can result in a change in the reference plane with regard to their arrangement along the z-direction, since a position of the neutral fiber of the respective elements can also be changed. The torsion springs 32s and 32e can, for example, remain at the height hi, but can alternatively also be thinned.

In other words, the Figure 8a show. 8c a variant are thinned in which only the torsion springs 32i to 32 ₄ and 327 to 32 "compared to the remaining structures locally. 9a shows a schematic top view of an MMS 90 according to an exemplary embodiment which corresponds to the MMS 20 in the top view shown. As is clear in the schematic side sectional views of FIGS. 9b and 9c, which show the MMS 90 in a rest position or in a deflected position, the leaf springs 24 and the torsion springs 32i to 32 ₁₀ in are thinned to the height h _{2, for} example .

In other words, FIGS. 9a to 9c show a variant in which all springs, the leaf springs and the torsion springs, are locally thinned in relation to the remaining structures. This means that the torsion spring elements can have a smaller dimension along the thickness direction z than the transmission sides 22a and 22b.

FIG. 10 a shows a schematic top view of an MMS 100 according to an exemplary embodiment that is different from the MMS 20. At least one gear side 22ai, 22bi, 22a ₂ or 22b _{2 of} a gear can have a mechanical preload, so that the movable element 14 is at least partially moved out of the reference plane 16 even in a rest position of the MMS 100 shown in a schematic sectional side view in FIG. 10b . This can mean that the movable element 14 is arranged in an inclined reference plane 16 ′ which is inclined with respect to the reference plane 16. Although the mechanical preload can also be arranged asymmetrically in both gears, an asymmetrical preload for tilting the movable element can be advantageous, in particular if the movable element 14 is to be torsion during later operation, for example about the torsion axis 34 ₃ . This is because in producing ^'a vibration or oscillation in the movable member when the latter is in the rest position and having the rest position, little or no difference to the theoretical position of rest parallel to the reference plane 16, the phase of the vibration received from external influences such as a Rest vibration or the like can be influenced. In simple terms, when the movable element is excited, there can be a high degree of inaccuracy as to whether the movable element deflects first to the left or first to the right, or whether one side or the other side of the movable element is deflected along the positive z-direction first. This inaccuracy can be eliminated by the mechanical preload or by the forward deflection of the movable element.

To maintain the mechanical preload, preload elements 52i and / or 52 _{2 can be} provided, for example, which are arranged at least in regions on a part of the transmission structure, for example the second transmission side 22b, approximately in the segments 22b 1 and / or 22bi-2. Alternatively or additionally, further mechanical pre-tensioning elements can be arranged on a side of the transmission I8 ₂ facing away from the viewer in FIG. 10a.

The pretensioning elements 52i and / or 52 ₂ can be mechanically fixedly connected to the second gear side 22b and can be designed, based on a second thermal expansion coefficient of a material of the pretensioning element 52i and / or 52, which differs from a first thermal expansion coefficient of a material of the second gear side 22b ₂ provide the mechanical preload. For this purpose, a silicon oxide material or a silicon nitride material, which comprises a silicon material, for example, can be deposited on the transmission side 22b, for example at a processing temperature. As a result of the overall structure cooling, the materials of the mechanical prestressing element 52 and of the gear side 22b can deform or contract differently, so that the mechanical prestressing is induced. Layer stress can be generated for example by silicon oxide (Si0 ₂ ) or silicon nitride (S ₃ N4) but also by metals, for example copper or aluminum. It is advantageous to use materials that are CMOS-compatible in order to generate the biasing elements, which can also be referred to as stressors.

10c shows a schematic sectional side view of the MMS 100 in a deflected state and along the section line A-A ‘.

In other words, FIGS. 10a to 10c show a variant with mechanical pre-tensioning elements which cause a slight asymmetrical pre-deflection in the rest position in order to enable deflection without prior resonant oscillation.

1 1a shows a schematic plan view of an MMS 110 according to an exemplary embodiment, which can be formed, for example, in the absence of the torsion springs 34 _s and 34 ₆ . Regardless of this, by activating the actuators 18 ₁ and / or 18 ₂ with a frequency which corresponds to a tilt mode, a tilting of the movable element 14 can be obtained. By controlling the movable element 14 with a frequency that corresponds to the resonance frequency of a translational mode, alternatively or additionally, a translational deflection of the movable element 14 in the positive or negative z-direction can also be obtained. Similar to the MMS 10 and / or the MMS 40, the actuators 18i and I 82 can be designed to generate a pressure force on the respective first transmission side 22ai and 22a2. In contrast to the exemplary embodiments described so far, the second transmission sides 22bi, 22b _{2 can,} however, be formed in such a way that they are formed as bar structures which enclose the movable element by at least 270 °. This makes it possible to introduce the respective gear excitation on the opposite side of the movable element compared to the side on which the actuator 18 ₁ or 18 _{2 is} arranged.

11 b shows a schematic sectional side view of the MMS 110 in a rest position of the same.

11c shows a schematic side sectional view of the MMS 110 in a deflected state of the same.

In other words, FIGS. 11 a to 11 c show a variant without torsion springs 32 _s and 32 _e , in which the forces act on the opposite side of the element 14.

FIG. 12 a shows a schematic top view of an MMS 120 according to an exemplary embodiment which can correspond to that of a modified variant of the MMS 20 in that, for example, the torsion springs 32 ₅ and 32 _{s have been} removed.

Apart from this, the MMS 120 can correspond to the MMS 20. An embodiment of the MMS 120 without torsion springs makes it possible to stimulate both a mode for the rotational deflection of the movable element 14 from the rest position shown in FIG. 12b, as shown in FIG. 12c, and also makes it possible to stimulate one of these different mode to obtain a translational deflection of the movable element 14. At the same time, however, this is accompanied by the requirement to precisely separate the corresponding control frequencies from one another in order to stimulate only one of the two movements, if desired. By arranging the torsion springs 32s and 32 ₆ , the translational deflection can be suppressed so that simple control can be obtained.

FIG. 13a shows a schematic top view of the MMS 120 from FIG. 12a, so that FIGS. 13a and 12a are the same. FIG. 13b shows a schematic side sectional view of the MMS 120, as is also shown in FIG. 12b.

13c shows a schematic side sectional view of the MMS 120 when it is excited at a frequency that enables a translational deflection of the movable element along the positive and / or negative z-direction. Compared with FIG. 12c, the second transmission sides 22bi and 22bi can be deflected in phase, while in FIG. 12c a deflection in opposite phase leads to a tilting of the movable element 14.

In other words, the structure from FIGS. 12a-12c can also be operated in the translation mode using a different oscillation mode, which is shown in FIGS. 13a-c.

14a shows a schematic top view of an MMS 140 which, compared to the MMS 120, has an interchanged arrangement of the torsion axes 341 and 34 ₂ as well as 34 ₄ and 34s, so that actuators 18a and 18b based on pressure can be used.

14b shows a schematic sectional side view of the MMS 140 in a rest position of the same.

14c shows a schematic side sectional view of the MMS 140 in a deflected state, in which the movable element 14 is moved in a translatory manner along the positive z-axis.

In other words, FIGS. 14a-14c show the structure from FIGS. 13a-13c with torsion axes 34 exchanged.

Fig. 15 shows a schematic plan view of an MMS 150 according to one embodiment, is disposed at the four sides of a gear structure 18 and an actuator 26, wherein in each case two transmission structures and actuators 18i / 26i and 18 _3/26 ₃ or 18 ₂ / 26 ₂ and 184/264 can be opposite each other. This means that an opposing arrangement, as shown, for example, in FIGS. 14a to 14c, can be executed again mirrored by 90 °. A good mode separation is advantageous in a triple, quadruple or higher-order arrangement, which means that the resonance frequencies of different modes are at a large distance from one another. The quadruple suspension enables at least partial avoidance of rotational movements of the movable element 14 and a translational movement that is well separated from rotations. If the movable element were controlled in such a way that it is translated along the positive or negative z-direction, then a higher number of gear structures 18 and / or actuators 26 can move with a large force, a large stroke or travel and / or provide high uniformity of motion.

In other words, FIG. 15 shows the structure from FIGS. 13a-14c with fourfold suspension. It should be noted that a different number of suspensions (gears) and / or actuators can also be used, for example 1, 2, 3, 5 or more.

16 shows a schematic plan view of an MMS 160, which can be based on the MMS 140 and likewise has an exemplary quadruple suspension. In contrast to the MMS 150, the actuators may be formed 26i to 26 ₄ to generate a compressive force. Although the MMS 150 is described in such a way that the four actuators are designed to generate a tensile force and the MMS 160 is described in such a way that the four actuators are designed to generate a compressive force, it is pointed out that mixed forms can also exist .

In other words, FIG. 16 shows the structure from FIGS. 14a-14c with four-fold suspension, with triple or multiple suspension also being possible.

17a shows a schematic top view of a section of an MMS 170, in which further bar elements 54a-54c are coupled between the first gear side 22a and a second gear side 22b, so that overall a pantograph structure is coupled, i.e. a lever structure or a lever mechanism, configured to increase a stroke of the transmission.

17b shows a schematic side sectional view of the MMS 170 in a deflected state, the deflected state being characterized by a translational displacement of the movable element 14 along the positive z-direction. It goes without saying that in comparison to a second suspension, a preferably four-fold or multiple suspension increases the stability of the system. The overall structure including the first gear side 22a, the second gear side 22b and the intermediate beam structures 54a, 54b and 54c can be formed as a multi-stage scissors gear.

Although the lever mechanism in FIG. 17a comprises three bar structures 54a, 54b and 54c, any other desired lever structures can also be implemented which have the same or a different number of bar structures that are located at suitable locations on the substrate, on the first gear side 22a , on the second gear side 22b or on each other.

18a shows a schematic plan view of an MMS 180 in which bar structures 54a and 54b are arranged between the first gear side 22a and the second gear side 22b, which act as pantograph springs, which also enables the stroke of the gear to be increased.

18b shows a schematic side sectional view of the MMS 180 in a deflected state of the movable element 14, whereby the representation selected as a translational displacement of the movable element 14 by way of example can also be influenced by the deflection or actuation of other suspensions.

In other words, FIGS. 17a-b and 18a-b show two further variants of the suspensions shown in FIGS. 13a-c and 14a-c of a structure operated in translation.

19a shows a schematic top view of a micromechanical system 190 according to an exemplary embodiment in which a micromechanical structure according to the embodiments described herein, for example an MMS 20i, which can correspond to the MMS 20, is arranged as a movable element of a further MMS 20 ₂ that for example can also correspond to the MMS 2O ₂ . An arrangement of the torsion axes 343-1 and 34 ₃ -2 of the inner MMS 20i suspended as a movable element and the outer MMS 2O ₂ can be the same here, but also, as shown, be shifted to one another by an angle, approximately 90 °, so that by tilting the movable element 14 of the MMS 20i a tilting of the same along a first dimension, for example about the x-axis, and by tilting the MMS 20i about a second axis, for example the y-axis, a second dimension of the tilting of the movable Elements 14 can be obtained. 19b shows a schematic side sectional view of the micromechanical system 190 in its rest position, in which all elements are arranged within the plane 16.

19c shows a schematic side sectional view of the micromechanical system 190 in a deflected state of the MMS 20i with respect to the MMS 2O2.

In other words, FIGS. 19a-c show the structure from FIGS. 2a-2c in a 2D variant, in which the deflection can take place orthogonally to one another.

20a shows a schematic top view of a micromechanical system 200 according to an exemplary embodiment, which likewise has the MMS 20i, which is suspended as a movable element of the MMS 2O2. The torsion axes 34 ₃ -1 and 34 ₃ -2 can, however, be parallel and even congruent, which enables an increase in the deflection angle of the movable element 14 of the MMS 20i, since the movable element 1 is deflected as part of the MMS 20i in the MMS 20 ₂ and can also be deflected within the MMS 2Qi. Furthermore, the different MMS can have different resonance frequencies, so that they can be operated at different frequencies and can have different operating points.

FIG. 20b shows a schematic side sectional view of the micromechanical system 200 in a rest position of the same, in which all elements are arranged within the plane 16.

20c shows a schematic side sectional view of the micromechanical system

200 in a deflected state of the MMS 20i compared to the MMS 20 ₂ .

In other words, FIGS. 20a-20c show the structure from FIGS. 2a-2c in a 2D variant in which the deflection takes place coaxially.

Although the micromechanical systems 190 and 200 are described in such a way that the MMS

20 _{1 is arranged} both as an inner and on an outer MMS, any combinations of MMS according to the exemplary embodiments described herein are possible, each MMS being able to be used as an inner and each MMS as an outer MMS. Although the micromechanical structures 190 and 200 are described in such a way that two MMS are arranged and form nesting with one another, any other number can also be used be arranged by MMS in micromechanical systems, for example more than 2, more than 3, more than 4 or more than 5 or even a higher number.

21a shows a schematic plan view of a micromechanical system 210 in which the MMS 20 is arranged as a movable element of an MMS 120.

21b shows a schematic side sectional view of micromechanical system 210 in an undeflected state of the same, in which all elements are arranged in reference plane 16.

21c shows a schematic side sectional view of the micromechanical system 210 in a deflected state of the micromechanical structure 20 with respect to the MMS 120. The MMS 120 is configured, for example, to translate the MMS 20 along the z direction, which can be used, for example, to adjust a path length of the rotation axis of the movable member 14. A comparatively broad structure of the substrate of the inner MQL to absorb large forces enables the inner gears to be supported.

In other words, FIGS. 21a-21c show the structure from FIGS. 13a-13c and FIGS. 2a-2c combined as a 2d variant, with a rotation through 90 ° also being possible.

22a shows a schematic top view of a micromechanical system 220, which is formed inversely to micromechanical system 210 and in which MMS 120 is arranged as a movable element of MMS 20.

22b shows a schematic side sectional view of the micromechanical system 220 in a rest position.

22c shows a schematic side sectional view of the micromechanical system 220 in which the MMS 120 is deflected with respect to the MMS 20.

In other words, FIGS. 22a-22c show the structures from FIGS. 2a-2c and FIGS. 13a-13c combined as a 2D variant, whereby a rotation of the two elements by 90 ° to one another is also possible. On the basis of FIGS. 23a-23c, exemplary configurations of actuators 26a, 26b and 26c will now be discussed, which can be used as actuators in the MMS and micromechanical systems described above.

FIG. 23a is a schematic plan view of the actuator 26a, in which insulators 56 _t to 564 are arranged to electrically isolate individual sections of the substrate 12 by other, so that there 58t to 58 _e electrically insulated from other electrodes arranged electrodes 58t to 58e are electrically isolated. Between two opposing electrodes 58i to 582, 583 and 584, 58s and 58B, electric fields can be generated in electric power sources 62, for example, which can lead to a movement 64 which can be transmitted to the first transmission side 22a, for example. As shown in FIG. 23a, a direction of the force sources 62 and a direction of movement 64 may be parallel to each other.

In other words, FIG. 23a shows a frontal capacitive drive in a push-pull arrangement.

23b shows a schematic plan view of the actuator 26b, the electrodes 58 of which are arranged parallel to the direction of movement 64, which means that the force is generated parallel thereto. The actuator can have a number of sections 66, for example four, the structure of the actuator 26b being explained in more detail with reference to sections 661 and 662. The sections 66 ₃ and 66 ₄ can be formed in a comparable manner. The electrodes 58i to 58 ₂ can be formed, for example, as interdigital electrodes which move in-plane to one another along the direction of movement 64 when an electric field is applied to the electrodes 58i to 68 ₂₄ . The interdigital electrodes can, for example, be arranged next to one another along a direction perpendicular to a direction of force that lies parallel to the movement 64. The advantage of this embodiment is that the occurrence of a mechanical impact (pull-in effect) can be reduced or prevented, since a distance between the electrodes along a surface normal thereof can remain unchanged, while, for example, in the actuator 26a a distance between the electrodes 58i to 58B is mutable.

In other words, FIG. 23b shows a frontal capacitive drive with an electrode comb in a push-pull arrangement. While the MMS 20 is implemented, for example, in a frontal “PuH” variant, frontal “Push-Puir” variants, as shown for example in FIGS. 23a and 23b, can also be implemented, as well as in a corresponding other variant, shown in Fig. 23C.

23c shows a schematic top view of an actuator 26c, in which the electrodes are connected at any desired location to the first gear side 22a and are arranged adjacent to electrodes 58i and 58, which are connected to the substrate 12, in order to move the first To enable transmission side 22a along the direction of movement 64.

In principle, any other configurations in front of electrostatic actuators can be used in the exemplary embodiments described herein. Alternatively, in addition to this, other actuator principles can also be implemented, for example piezoelectric, thermal or the like.

The actuators 26 is _a _C to 26 have in common that the actuator comprises an electrode structure which is supported on the substrate, for example, the electrodes 58i, 58a and 58e of the actuator 26a, the electrodes 58i, 58 _4, 58s, 58 _a, 58g and 58 ″ of the actuator 26b or the electrodes 58i and 68 _{4 of} the actuator 26c. One of the other electrode structures is supported on the first transmission side, the actuator being designed to provide the force for generating the movement 64 between the electrode structures.

In other words, FIG. 23c shows a lateral capacitive drive with an electrode comb in a push-pull arrangement or a section thereof. It is noted that all the arrangements of FIGS. 23a-23c can also be arranged in series several times one behind the other and / or can have any number of electrodes.

Advantageous embodiments of interdigital electrodes are described with reference to FIGS. 24a-24c. With reference again to FIGS. 23a-23c, it is pointed out that the arrangement of electrode structures, for example metallic coatings, does not have a restrictive effect to the effect that the electric fields can only be generated at these locations. Rather, areas of the gear structure or the gear sides and / or areas of the substrate 12 can be electrically conductive so that the respective area can act as an electrode. This is illustrated in FIGS. 24a-24c, in which 58i are each designed as a finger to 68 ₇ and can be brought together to an electrical potential.

24a shows a schematic top view of an electrode structure 68a, in which electrodes 58i, 58 ₃ , 58s and 58 ₇ connected to substrate 12 are formed with constant dimensions along the y-direction, as are electrodes 58z, 68 ₄ and 58e, which are connected to the first transmission side 22a. By applying an electric field between the electrode structures, a force between the electrodes and consequently the movement 64 can be obtained.

In other words, FIG. 24a shows an arrangement of frontal capacitive standard electrodes.

Fig. 24b shows a schematic plan view of an electrode assembly 68b, in which the electrodes 58i to 58 ₇ along the x-direction, that is, the direction of movement 64, having a stepped profile, that is, a discontinuously changing dimension along the y- Direction. When actuated, the first transmission side 22a moves, for example, along the positive x-direction. Sections 72i to 72s of electrodes 68 ₂ , 58 ₄ and 58 _{e can} immerse into areas 74i to 74 ₃ , which are narrow, that is, form narrow trenches, based on wide electrodes 58i, 58 ₃ , 58s and 58 ₇ . Thereby, a distance between the electrodes is reduced to 58 58i ₇ at these locations enabling high force action as soon as the portions 72i to immerse 72s in the narrow trenches 74i to 74. ₃

In contrast to the standard variant of an electrode comb, which is shown in FIG. 24a, to increase the drive capacity, the ditches in which the electrodes are immersed during lateral movement can be narrower, as shown in FIG. 24b, so that the effective capacity takes place z. B. of 4 pm wide trenches of 3 pm, 2pm or even only 1 pm wide trenches is formed. This can lead to a significant increase in usable energy.

In other words, FIG. 24b shows an arrangement of frontal capacitive electrodes with narrow immersion trenches for increasing the capacity.

In addition, the electrodes can be conical, as shown in FIG. 24c, so that the trench spacing is reduced when the combs move laterally and thus the usable capacitance and thus the energy can also be increased. A combination of the variants is also possible. Fig. 24c shows a schematic plan view of an arrangement 68c, in which the electrodes are formed conically to 68 ₇ 58i, which means have a continuously variable dimension along the x-direction so that the distance between the electrodes at a movement 64 along the positive x-direction decreases continuously, while it decreases discontinuously in FIG. 24b.

In other words, FIG. 24c shows an arrangement of frontal capacitive electrodes with a conical shape for enlarged capacity enlargement. The described arrangements 68a and 68b and 68c can be combined in any desired manner with the actuators described herein.

The following energy equilibrium results for the static state: B. energy introduced into the system by an electrostatic comb drive changes into a rotation f, which is desired in this case, and an undesired displacement x of the springs, which can be represented as

- CU ¹ => - tf ¹ + - kx ¹ (1)

2 2 2

In general, a structure can be used for the torsion springs which exhibits a minimum resistance for the desired rotation and at the same time a maximum resistance for the parasitic translation in the plane orthogonal to the axis of rotation.

25a to 25c show a schematic plan view of a torsion spring arrangement 76 comprising two or more torsion springs 32 which can be arranged in the place of simple torsion springs. Thus, FIG. 25a shows an arrangement of the torsion spring arrangement 76 instead of the torsion spring 32e of the MMS 10. FIG. 25b shows an arrangement of the torsion spring arrangement 76 instead of the torsion spring 32 _{2 of} the MMS 10. FIG. 25c shows an arrangement of the torsion spring arrangement 76 instead of the Torsion spring 324 of the MMS10, wherein the torsion spring arrangement 76 can also replace any other torsion springs of the MMS described herein or of micromechanical structures.

An opening angle β between the inclined torsion spring elements can, for example, have a value of at least 2 ° and at most 45 °, at least 10 ° and at most 30 ° or at least 12 ° and at most 25 °, for example 15 °. The torsion spring arrangement 76 comprises at least a first torsion spring element 32e-1, 322-1 or 32 ₄ -1 and a second torsion spring element 32e-2, 32 ₂ -2 or 324-2, which are V-shaped are arranged inclined to one another, wherein preferably both torsion spring elements are arranged at an angle to a surface normal of both adjacent structural elements.

In other words, FIGS. 25a-25c show three V variants of a torsion spring for increasing the lateral rigidity. In connection with the exemplary embodiments described herein, lateral means along the direction of movement 64.

26 shows a schematic plan view of a spiral spring arrangement 78, comprising at least two spiral springs 24i and 24 ₂ , which are arranged inclined to a surface normal 82 of the substrate 12 and / or the first gear side 22a. The spiral spring arrangement 78 can be bistable along the direction of movement 64, which can be obtained, for example, by the inclined arrangement with respect to the surface normal 82 of the substrate 12 or, alternatively, the first gear side 22a. The spiral springs 24i and 24 ₂ are preferably arranged parallel to one another, so that angles of inclination gi and g ₂ with respect to the surface normal 82 can be the same. The angles of inclination can have an angle of at least and at most 30 °, at least 5 ° and at most 20 ° or at least 10 ° and at most 15 °.

This enables an additional stiffening of the spiral springs from the previously described MEMS along the direction of movement 64.

The spiral spring arrangement 78 can be arranged in place of any of the spiral springs of the MMS described herein.

In other words, FIG. 26 shows a special form of a spiral spring / spiral spring arrangement for bistable positioning of the push frame, that is, the first gear side 22a.

FIGS. 27a-27d show schematic exemplary embodiments of torsion springs 32 'and 32 ", which can be used at any location of the MMS described herein. For example, FIG. 27a shows an arrangement of the torsion spring 32 'between the movable element 14 and the substrate 12. FIG. 27b shows the arrangement of the torsion spring 32' between the movable element 12 and the second gear side 22b. 27c shows the arrangement of the torsion spring 32 'between the first gear side 22a and the second gear side 22b. The torsion spring 32 'is formed as an X-shaped spring, that is to say, on both structures, for example the movable element 14 and the substrate 12, there are two attachment areas, with individual spring elements crossing one another to provide the X-shape. It should be noted here that the torsion spring elements 32 ′ are preferably formed in one piece. The torsion spring elements 32 ′ enable an increase in the lateral rigidity along the direction of movement 64, for example parallel to the x direction.

27d shows a schematic top view of the torsion spring 32 ″, which is coupled, for example, between the first gear side 22a and the second gear side 22b, wherein it can also be positioned at any other point. Compared to the torsion springs 32 ', the torsion spring 32 ″ has a dimension 84 that is variable along an axial course from the first gear side 22a to the second gear side 22b, for example diagonally along an x / y direction, which is referred to as width by way of example, but without restrictive effect can be. This enables a local reduction in the width of the torsion spring 32 ″, for example in a central region 86, by a high one there. To obtain elasticity or low torsional stiffness. At the same time, the high lateral rigidity can be retained.

In other words, FIG. 25 shows V variants of the torsion springs which can withstand the transverse forces explained in connection with FIGS. 24a-24c to a greater extent. In Fig. 26, a variant of the spiral springs is also shown, which enables a bistable locking of the push frame, similar to a cracking frog effect. Instead of a V-spring, an X-spring can also be used, which is shown in Fig. d is shown. Such X-variants of the torsion spring have a high resistance with regard to transverse forces. It is also possible to optimize the profile of the structures, as it can be adopted, for example, from the area of the wind turbines, as is shown for example in FIG. 27d. Another form of the torsion springs with a significantly higher resistance element to lateral displacement is shown in FIGS. 28a-28d, with FIG. 28d in any case showing an optimization of the profile course of the structures.

28a to 28d show further advantageous designs of the torsion springs. Thus, instead of individual torsion springs 32 or 32 'or 32 ", a torsion spring element arrangement 88 can also be arranged which comprises two, but also a larger number of torsion springs. For example, the torsion spring includes 32 'and 322'', respectively have a kinked course along an axial course and a first structure 14 or 22a to a second structure 12 or 22b, that is, they run at an angle to the center of the spring. The torsion spring 32i '''can be coupled to the movable element 14 at a first coupling location 92i, as shown in FIGS. 28a and 28b, but can also be coupled to the second transmission side 22a, as shown in FIG. 28c . As an alternative or in addition, such a torsion spring, just like the torsion springs 32, 32 ′ or 32 i ″, can also be arranged on further bar structures, for example the bar structures 54. The torsion spring 32 ₂ ¹ ″ can be arranged in a similar manner between coupling locations 92 ₃ and 924, wherein the coupling location 92 ₃ can be arranged on the same structure as the coupling location 92 and wherein the coupling location 92 ₄ can be arranged on the same structure as the coupling point 92 ₂ .

A distance 94a can be arranged between the coupling locations or areas 92i and 92a, which is reduced in the axial course of the torsion spring elements 32i '"and 32 ₂ '" to a distance 94b which is, for example, at least 1 pm, at least 4 pm and at least 8 pm , but is at most half of the distance 94a, which can be, for example, a value of 500 pm, 200 pm or 50 pm. This means that the torsion spring element arrangement 88 can have a first and a second torsion spring element 32 ′ ″, which are each bent along an axial course and are arranged in such a way that a first distance 94a between the first coupling locations 92 and 92 ₃ and a second The distance between the second coupling point 92 ₂ and 92 _{4 is} greater than a minimum distance between the torsion spring elements along the axial course, that is, the distance 94b. It should be noted that the distance between the coupling locations 92 ₂ and 92 ₄ can be the same as the distance 94 a, but a different value can also be implemented.

Fig. 28d is a schematic plan view of the Torsionsfederelementanordnung 88, wherein the torsion springs 32 _"t" and 32 ₂ "" can be formed similar to the spring assembly 88 of FIGS. 28a to 28c, wherein the torsion springs 32i "" and 32 ₂ ""Additionally have the variable dimension 84 along the x-direction (alternatively the y-direction depending on the orientation), which is described in connection with the torsion spring 32".

The torsion spring elements of FIGS. 28a-d can be arranged without contact over the entire axial course, ie they are without direct mechanical contact over the entire axial course, preferably also during the torsion being carried out. In other words, FIGS. 28a to 28d show X-column variants of a torsion spring for increasing the lateral rigidity.

In the previous exemplary embodiments, MMS were described in such a way that they comprise different structures or structural elements, for example the substrate 12, the movable element 14, the first gear side 22a and the second gear side 22b. It should be noted that these elements can be produced from the same layer stack, in particular by etching processes of a CMOS process. This enables some, some or all of the elements to be at least partially formed in one piece, which means that at least a part of the substrate 12, at least a part of the gear structure 18 and at least a part of the movable element 14 can be formed in one piece.

29 shows a schematic block diagram of a device 290 according to an exemplary embodiment, which for example includes the MMS 10 and which also includes a control device 96 that is coupled to the MMS 10. Alternatively or additionally, any other MMS or a micromechanical system described herein can be arranged and coupled to the control device 96. The control device 96 is configured to control the actuator of the MMS 10. The control device can be designed to apply a decreasing or increasing control frequency for setting an oscillation (rotation and / or translational movement of the movable element of the MMS 10. If the MMS 10 has, for example, a certain resonance frequency for the operating mode formed, by means of which the operating mode can be set, the control device 96 can be designed to set a higher frequency and apply it to the MMS 10 or the actuator. The control device 96 can be designed to set the frequency of a control signal 98 that is provided to the actuator in a Reduce a large number of steps until the target frequency is reached. Alternatively, the control device can apply a lower or lower frequency than the resonance frequency and then increase the frequency. Both enable a fundamental oscillation to be excited by the frequency outside the resonance frequency n, even if this is not yet resonant. This fundamental oscillation can then be drawn step-by-step into the resonant oscillation. The control device 96 can be designed to operate the MMS or micromechanical system. Such a system can be operated, for example, as follows. As an example, FIG. 33 and FIG. 34 will be discussed again. As an example, a system is shown here whose parametric resonance f ₃ corresponds approximately to twice the natural frequency of the spring-mass system and which, for example, can be excited at higher frequencies. Alternative systems can be excited with lower frequencies, which can qualitatively mirror the curve between f ₃ and fi at f ₃ . For the initial excitation from the rest position, a start frequency greater than frequency f _{2 is} selected, for example, so that h is a maximum start frequency and f _{2 is} a minimum frequency at which good energy absorption is possible to start the oscillatable system. In the above f ₂ (alternatively below) disposed frequency range between fi and f ₂ starts a frequency sweep that is, _"a frequency variation, with the described frequency steps the mechanical vibration, and is continued until the system upon reaching of the frequency f _3, at least within a tolerance range, the maximum oscillation amplitude is reached, for which the signal according to FIG. 33 can be selected in order to accelerate the movable element twice per mechanical oscillation.

The movable structural element can be excited into parametric resonant oscillation from a reference plane by applying the control signal with the start frequency and / or by varying the frequency of the control signal.

The exemplary embodiments described herein can be designed in such a way that the frame (substrate), the gear structure, the movable element and / or the spring elements can be arranged in a common substrate plane and / or can be formed from the same substrate layers. According to exemplary embodiments, although a height profile can be provided along a thickness direction in the MEMS, this can be done by subsequent thinning of individual elements that were previously formed from the same substrate layers, which in particular enables a one-piece design of the components mentioned.

The embodiments described herein solve the problems in the prior art.

In particular, the control device 96 can be configured to set a multiplicity of operating modes in the MMS 10, alternatively, any other MMS and / or micromechanical system described herein. Some of these modes are explained below. Depending on the particular type of drive, corresponding actuation devices can be provided, which are preferably arranged and / or in-plane Generate forces in-plane, so that the corresponding actuator elements remain in engagement with one another during the actuation and an “emergence” of the elements with respect to one another, as can occur for example with offset interdigital electrodes, see FIG. 35, is avoided.

1. Resonant operation

1.A: the oscillation designated as harmonic is in reality not a harmonic oscillation (Fig. 3d), but an oscillation form that deviates from the ideal sinusoidal shape (quasi-harmonic). The deviations are caused by various non-linear effects, e.g. the non-linear spring characteristics, damping and drive. One of the non-linear effects results, especially with large deflections, from the gradually or abruptly changing damping by the surrounding medium when the electrode combs are "immersed" or "emerged" (FIG. 33, FIG. 31) in the course of the oscillation. a - In the invention described here, the electrode combs used for the drive remain permanently interlaced, especially even with large deflections, so that the damping at the electrode combs (previously partly dominant) does not change abruptly. This reduces these non-linear influences and the deviations from the harmonic waveform are lower at this point.

1.B: In resonant operation, energy can usually only be coupled into the system in the period from the point of reversal to the swing through the rest position (Fig. 33). This is only possible by accelerating in the direction of the rest position, which in turn leads to non-linearities due to the sudden change in the drive torque when passing through the rest position. a -The invention described here enables energy to be coupled in in all oscillation positions outside of the rest position. This applies to both attractive and repulsive electrostatic forces. b -It is also possible with the system described here to accelerate and brake the actuators in both directions, both from the rest position and towards the rest position, energy can be coupled in in both directions (swing out and swing in). c - the advantages described under a and b therefore enable a (partial) compensation of other non-linearities of the system due to the permanently possible coupling with the exception of the rest position and the optimized variation of the forces in the course of the oscillation. d - the electrode combs are permanently interlaced in the variant from FIG. 23b. The resulting drive characteristics show significantly smaller deviations from linear behavior than the conventional arrangement (classic resonant)

1.C: the quasi-harmonic oscillation only has a very small quasi-linear area in the middle of the sine function (Fig. 3d). In the field of measurement technology and some other applications e.g. In the area of image projection, a larger quasi-linear area is desirable or even necessary. a - a linearization of the middle range of the harmonic oscillation is possible with the described invention, since the system can be influenced in both directions in the deflected state. This is especially true for vibration states far from resonance.

1.D: For a parametric resonance, an abrupt breakdown of the oscillation at the resonance point is typical; the oscillation can typically only be started by tuning the frequency in a (negative) direction (Fig. 34). a -The abrupt interruption of the oscillation, which is typical for parametric resonance, probably does not apply, the response curve probably shows more of a classic resonance exaggeration and could be approached from both sides.

2. Quasi-static operation 2.A: Costs: In the case of systems deflected with the aid of external forces (FIG. 35), for example, two wafers are currently bonded together, or two planes are created during the manufacture of the wafers (eg epitaxially). This increases the material and process costs. a -the described invention enables a quasi-static operation using only a simple BSOI wafer.

2.B: Precision: The electrode combs, which are arranged in two levels, place very high demands on the accuracy of their positioning relative to one another. Manufacturing the electrode combs in two levels (with external actuation or integrated manufacturing) is correspondingly complex. In the described invention, the electrode combs are manufactured in one process step in one plane, and are therefore self-adjusting and, like the classic resonant components described above, can be manufactured without additional effort.

2.C: When combining the classic quasi-static outer axis and the classic resonant inner axis of a 2D scanner, the outer drive must be decoupled from the deformations caused by the inner vibrating element, which results in a large space requirement. a -in the invention described, the drive is better decoupled from the internal movements by the parallel guide.

2.D: In the systems used up to now, the construction of a quasi-statically deflectable 2D variant is only possible with great difficulty and with great effort and associated with a large space requirement. This also applies to a hybrid solution (eg with magnetic drive) in which the advantages of microsystem technology (production of large quantities in a wafer assembly) are lost. a-the described invention enables the use of a 2D variant by interconnected combination of two of the systems described, these can be arranged in parallel or orthogonally. The manufacturing effort corresponds to that of classic resonant components. 2.E: In the systems used up to now, the electrode combs required to generate energy are tied to a specific position. When the energy made available is increased, the length of the combs must therefore inevitably be increased, which in turn automatically leads to an enlargement of the component. a-the described invention enables the placement of further combs on previously unused areas within the component, since the optimal energy generation is not tied to a specific position. In this way, the energy made available can potentially be increased without necessarily increasing the size of the component.

3. Plate capacitor system

3.A: Previous systems with parallel plate capacitors (Fig. 32) required very high drive voltages for large deflection angles (due to the "pull-in" effect from 1/3 of the gap distance). a-the invention described here enables a reduction of the required electrical voltage and an avoidance or reduction of the "pull-in" effect (e.g. also by stops in the plane).

4. Classic lever systems

4.A: The production of such lever systems is very complex: Either several separate layers are used (e.g. BSOI) (a) or structures of different depths are etched (b). The disadvantage here is the difficult access to buried layers (e.g. through oxide layers) (a) or poor homogeneity and thus yield (b). a -In the invention described here, all structures are in one plane and can therefore be manufactured very easily and with high yield.

4.B: Systems that are manufactured in Poly-Si using "Surface Micro Machining" technology are very fragile, distorted by mechanical stresses and the layers must first be moved out of the rest position in order to obtain free space for movement (e.g. Lucent ) In the case of the invention described here, the components are still stable, not warped due to the use of monocrystalline silicon (SCS) and do not have to be brought into a certain position before use.

5. General

5.A: In comparison to the suspension of vibrating bodies on two simple or parallel bar springs, exemplary embodiments enable the supply of additional electrical potentials. This enables a simplified connection or improvement of sensors or other electronic components on the vibrating body.

5.B: In comparison to the suspension of vibrating bodies on two simple or parallel bar springs, exemplary embodiments enable mechanical stabilization through additional mechanical suspensions. This enables the shock resistance to be improved and optimized through an expanded parameter space.

5.C: In comparison to the suspension of vibrating bodies on simple or parallel bar springs, exemplary embodiments enable the nonlinearities of the spring system to be optimized by additional mechanical suspensions (extended parameter space).

5.D: In quasi-static operation, exemplary embodiments include a position that is tilted compared to the rest position. Thus, potential parasitic optical reflections caused by a glass cover parallel to the mirror plate in the rest position can be avoided.

5.E: In systems operated with the help of electrode combs, the effective spring stiffness can be varied by electrostatic attraction and thus for adjustment e.g. the frequency can be used. In the previous systems, the "extending" of the electrode combs during operation with increasing deflection leads to reduced efficiency. With the system described here, the electrode combs are permanently interlaced and therefore fully electrostatically effective for all deflections.

5.Q: With conventional systems, the "extending" of the electrode combs during operation with increasing deflection leads to a reduced efficiency and thus to a Reduction of the bandwidth (see FIG. 36) With the system described here, the electrode combs are permanently interlaced, and the bandwidth is thus increased.

5.G: The suspension of optical mirror disks with torsion axes at only two points can lead to large dynamic deformations at high frequencies. The invention described here enables the dynamic deformation to be reduced by using additional suspension points.

5.H: Particularly at the edge of the wafer, narrow trenches produced by plasma etching (e.g. Bosch process) sometimes show a non-orthogonal position to the surface (obliquely accelerated ions). In the event of an “out-of-plane” movement (particularly when rotating) of electrode combs, this can lead to collisions or impairment of the component behavior. In the case of the invention described here, the parallelism of the electrode plates is retained even with oblique etching, since they are only shifted “in-plane” relative to one another. The rest of the mechanics of the suspension, on the other hand, are less sensitive than the electrode combs, which are necessarily as close as possible for a high capacity (wider trenches can be used for the transmission).

5.I The position can be measured capacitively via comb drives. The problem here is that no or only a weakened signal of the position (change in capacitance) can no longer be measured when the combs emerge. This problem is solved with the described invention, since the combs can be permanently interlaced.

5.J: When suspending micro-optical elements that are operated resonantly with torsion axes at only two points, it can be difficult to set the resonance frequency of neighboring "parasitic" oscillation modes far enough away from the useful mode. By using additional suspension points, the invention described here enables a greater spacing of the frequencies, in particular to “in-plane” rotation modes.

5.K: When micro-optical elements with torsion axes are suspended at only two points, which are operated resonantly with the aid of lateral electrode combs, the usable drive voltage of the "out-of-plane" rotation is often determined by the "pull-in" Voltage of an "in-plane" rotation mode is limited. The exemplary embodiments described here enable a higher stability of the in-plane mode by using additional suspension points. 5.L: In the case of 2D elements operated resonantly with the aid of lateral electrode combs, a square-wave voltage is applied to the mirror plate, since the inner frame usually forms the “ground” for the mirror AND the gimbal outer frame. In the course of the vibration of the plate, this leads to constantly changing fields and thus also to forces between the plate and the floor under the component. This can create vibration nonlinearities. In the case of the invention described here, the mirror plate does not have to be operated with alternating fields, so the influence of the area exposed to alternating fields on the nonlinearities of the oscillation is very much less.

The system can be operated by a number of controls, for example by the control device 96.

1 . By applying a square-wave voltage, as shown by way of example in FIG. 33, to the electrostatic drive, which is in the range of twice the frequency of the resonance frequency of the coupled oscillator, the micromechanical structure, the system is set into oscillation. This can e.g. done with the aid of frequency variation, as is shown by way of example in FIG. 34. This resorting oscillation corresponds to the first operating mode. As shown in Fig. 34, a starting frequency of a driver can be selected to be greater than twice the frequency of the mechanical, i.e., parametric, resonance frequency. It can be within a tolerance range of 100%, preferably 50% and more preferably 20% or less, which can also be selected to be even smaller with increasing frequency.

2. If there is an oscillation, as described under one, the drive voltage or the drive voltages are modulated in frequency and / or amplitude and / or phase position in the course of the oscillation in such a way that there is a change in the waveform, ie the amplitude curve the time comes. For example, the quasi-linear range of a sinusoidal oscillation can be enlarged, or non-linear areas of the oscillation can be compensated / optimized. With a corresponding "push-pull" arrangement, both braking and accelerating forces can be coupled in in any position of the oscillation outside the zero crossing. This corresponds to the second operating mode, which becomes more effective, particularly with increasing distance from the resonance. 3. When a vibration, as described below one exists, it is at the turning point, when the speed of the system is zero and speeds at times with low VELOCITY ^¬, a voltage is applied to the actuator, which is so large that the resultant forces are in equilibrium with the restoring forces resulting from the mechanical springs. The optical element is thus held in its deflected position. A modulation of the drive voltage can now be used for a quasi-static change in position of the optical element 14. This corresponds to the third operating mode and is only possible on one "side of the oscillation half" of the originally resonant oscillation. The usable angle can be increased by a coaxial arrangement of several systems.

4. By applying a static voltage to the electrostatic drive, the system is statically deflected when a voltage threshold is exceeded. This can e.g. with the help of mechanical "pre-tensioning" elements that bring the torsion axis (or the translation oscillator) into a slight pre-deflection. With this pre-deflection, a moment can also be generated outside of the central position in the plane, which deflects the structure, see FIG. 10. This static deflection corresponds to the fourth operating mode.

A corresponding combination of the operating modes and 2D variants described and shown here, as well as a combination with classic elements and operating variants is also possible.

Although some aspects have been described in connection with a device, it goes without saying that these aspects also represent a description of the corresponding method, so that a block or a component of a device is also to be understood as a corresponding method step or as a feature of a method step. Analogously, aspects that have been described in connection with or as a method step also represent a description of a corresponding block or details or features of a corresponding device.

The above-described embodiments are merely illustrative of the principles of the present invention. It is to be understood that modifications and variations of the arrangements and details described herein will be apparent to other skilled persons. Therefore, it is intended that the invention will be limited by the scope of the following claims and not by the specific details, those of the embodiments have been herein advantage presenta ^¬ from the description and the explanation is limited.

Claims

Claims 1. A micromechanical structure comprising: a substrate (12); a movable element (14) which is arranged in a reference plane (16) in an undeflected state; a gear structure (18) having a first gear side (22a) coupled to the substrate (12) and having a second gear side coupled to the movable member (14); an actuator (26) which is designed to provide a force (F) along a force direction parallel to the reference plane (16) and to apply it to the first transmission side (22a); wherein the gear structure (18) is designed to convert the force (F) along the direction of force into a movement of the movable element (14) out of the reference plane (16).

2. Micromechanical structure according to claim 1, wherein the movement of at least one of a resonant or static displacement of the movable element (14) from the reference plane (16) and a resonant or static rotation of the movable element (14) from the reference plane (16) includes.

3. Micromechanical structure according to claim 1 or 2, in which the first gear side (22a) is coupled to the second gear side (22b) along a first torsion axis (34i) via first torsion spring elements (32i, 32 ₂ ), and in which the second Gear side (22b) is coupled to the movable element (14) along a second torsion axis (34 ₂ ) via second torsion spring elements (32 ₃ , 32 ₄ ); wherein the first torsion axis (34i) is arranged parallel to the second torsion axis (34 ₂ ); and wherein the first torsion axis (34i) a higher distance (42) to an edge (36) of the movable element (14), to which the first torsion axis (341) and the second torsion axis (34 ₂ ) have the smallest distance and which is parallel to the first torsion axis (34 ₁ ) and the second torsion axis (34 ₂ ) is arranged, as the second torsion axis (34 ₂ ), wherein the actuator (26) is configured to at least temporarily apply a tensile force between the first transmission side (22a) and to provide the substrate (12).

4. Micromechanical structure according to claim 1 or 2, in which the first gear side (22a) along a first torsion axis (34) via first torsion spring elements (32i, 32 _S ) is coupled to the second gear side (22b), and in which the second Gear side (22b) is coupled to the movable element (14) along a second torsion axis (34 ₂ ) via second torsion spring elements (32 ₃ , 32 ₄ ); wherein the first torsion axis (34i) is arranged parallel to the second torsion axis (34 ₂ ); and wherein the first torsion axis (34 ₁ ) is a smaller distance (42) from an edge (36) of the movable element (14) to which the first torsion axis (34i) and the second torsion axis (34 ₂ ) have the smallest distance and the is arranged parallel to the first torsion axis (34i) and the second torsion axis (34 ₂ ), has as the second torsion axis ^' (342), wherein the actuator (26) is configured to at least temporarily apply a compressive force between the first transmission side (22a) and to provide the substrate (12).

5. Micromechanical structure according to one of the preceding claims, wherein the transmission structure (18) is a first transmission structure (181) and wherein the micromechanical structure comprises a second transmission structure (18 ₂ ), wherein the first and the second transmission structure (181, I82) are arranged symmetrically around the movable element (14) in a plane parallel to the reference plane (16); wherein the actuator (26) is a first actuator (26i) which is designed to actuate the first transmission structure (181), wherein the micromechanical structure has a second actuator (262) which is designed to operate the second transmission structure (18 ₂ ) to be activated.

6. Micromechanical structure according to claim 5, wherein the first gear structure (18 ₁ ) and the second gear structure (182) opposite each other with respect to the movable element (14) are arranged, wherein the actuators (26i, 262) are designed to generate a compressive force or simultaneously a tensile force.

7. Micromechanical structure according to one of the preceding claims, in which the gear structure (18) is a first gear structure (181), in which the actuator (26) is a first actuator (26i), and which further comprises: a second gear structure (I82 ), which is coupled between the movable element (14) and the substrate (12), and a second actuator (26 ₂ ) which is designed to actuate the second gear structure (18 ₂ ); a third gear structure (183), which is coupled between the movable element (14) and the substrate (12), and a third actuator (26 ₃ ) which is designed to actuate the third gear structure (183); a fourth gear structure (184) which is coupled between the movable element (14) and the substrate (12), and a fourth actuator (26) which is configured to actuate the fourth gear structure (18 ₄ ); wherein the first, second, third and fourth gear structures (181-4) are symmetrically arranged around the movable member (14); and wherein the movable element (14) is rotatably movable about two different axes of rotation (x, y).

8. Micromechanical structure according to one of the preceding claims, in which the first gear side or the second gear side is formed as a U-shaped or semicircular structure.

9. Micromechanical structure according to one of the preceding claims, in which the first gear side (22a) is formed as a first U-shaped structure and in which the second gear side (22b) is formed as a second U-shaped structure, the first U-shaped structure -shaped structure and the second U-shaped structure are oriented the same, wherein the first U-shaped structure is arranged in a rest position of the micromechanical structure that it encloses the second U-shaped structure.

10. Micromechanical structure according to one of claims 1 to 8, wherein the second gear side (22b) is formed as a beam structure which encloses the movable element (14) by at least 270 °.

1 1. Micromechanical structure according to one of the preceding claims, in which the first gear side (22a) and the second gear side (22b) are coupled to one another via torsion spring elements (32).

12. Micromechanical structure according to one of the preceding claims, in which the second gear side (22b) and the movable element (14) are coupled to one another via torsion spring elements (32).

13. Micromechanical structure according to claim 11 or 12, in which the torsion spring elements (32) along a thickness direction (z) perpendicular to the reference plane (16) have a smaller dimension (h2) than the first gear side (22a) and the second gear side (22b ).

14. Micromechanical structure according to one of the preceding claims, in which the second gear side (22b) has a mechanical preload, the mechanical preload being designed to move the movable element (14) at least partially out of the reference plane (16) when the micromechanical structure is in a state of rest ) to move out.

15. Micromechanical structure according to claim 14, which has a pretensioning element (52) which is mechanically fixedly connected to the second gear side (22b) and is designed to be based on a relative to a first thermal expansion coefficient of a material of the second gear side (22b) different second thermal expansion coefficients of a material of the prestressing element (52) to provide the mechanical prestress.

16. Micromechanical structure according to one of the preceding claims, in which the first gear side (22a) is formed as a beam structure, and in which the second gear side (22b) is formed as a beam structure, the second gear side (22b) via torsion spring elements (32) the first transmission side (22a) is coupled.

17. Micromechanical structure according to one of the preceding claims, in which the first gear side (22a) is formed as a first partially open frame structure, and in which the second gear side (22b) is formed as a second partially open frame structure which partially encloses the movable element (14).

18. Micromechanical structure according to one of the preceding claims, in which the gear structure (18) is formed as a scissor gear.

19. Micromechanical structure according to one of the preceding claims, in which between the first gear side (22a) and the second gear side (22b) a lever mechanism (54a-c) is arranged, which is configured to increase a stroke of the gear structure (18) .

20. Micromechanical structure according to one of the preceding claims, in which a first torsion spring element (32s) and a second torsion spring element (32e) are arranged between the movable element (14) and the substrate (12) along a torsion axis of the movable element (12) is.

21. Micromechanical structure according to one of the preceding claims, with a torsion spring element arrangement (88) between the first gear side (22a) and the second gear side (22b) or between the second gear side (22b) and the movable element (14) or between the movable element (14) and the substrate (12) is coupled, and a first torsion spring element (32, 32 ', 32 ", 32"', 32 "") and a second torsion spring element (32, 32 ', 32 " , 32 "', 32" "), which are arranged in a V-shape inclined to one another.

22. Micromechanical structure according to one of the preceding claims, with a torsion spring element arrangement (88) between first coupling locations (92i, 92s) on the first transmission side (22a) and second coupling locations (92 ₂ , 92 ₄ ) of the second transmission side (22b) or between first coupling locations on the second transmission side (22b) and second coupling locations on the movable element (14) or between first coupling locations on the movable element (14) and second coupling elements on the substrate (12), and the first one is coupled along an axial one Torsion spring element (32 "', 32"") bent along an axial course and a second torsion spring element (32"', 32 "") bent along an axial course, which are arranged in such a way that a first distance (94a) between the first Coupling locations (92i, 92 ₃ ) and a second distance between the second coupling locations (92 ₂ , 92 ₄ ) is greater than a minimum distance (94b) between the torsion spring elements along the axial course; wherein the torsion spring (32 "',32"") are arranged ^¬ be contact free with each other over the entire axial course.

23. Micromechanical structure according to one of the preceding claims, with a torsion spring element (32 ', 32 "), which is placed between the first gear side (22a) and the second gear side (22b) or between the second gear side (22b) and the movable element (14 ) or is coupled between the movable element (14) and the substrate (12), and which is formed in an X-shape.

24. Micromechanical structure according to one of the preceding claims, in which the actuator (26) comprises a first electrode structure (58) which is supported on the substrate (12), and a second electrode structure (58) which is located on the first transmission side (22a), wherein the actuator (26) is designed to provide the force between the first electrode structure and the second electrode structure.

25. Micromechanical structure according to one of the preceding claims, in which the actuator is formed as an electrostatic drive.

26. Micromechanical structure according to claim 25, wherein the electrostatic drive has interdigital electrodes which are arranged next to one another along a direction perpendicular to a direction of force of the actuator (26).

27. Micromechanical structure according to claim 25 or 26, in which the electrostatic drive has interdigital electrodes which have a variable electrode dimension.

28. Micromechanical structure according to one of the preceding claims, in which the first gear side (22a) is connected to the substrate (12) via a three-point suspension.

29. Micromechanical structure according to one of the preceding claims, in which the first gear side (22a) is connected to the substrate (12) by spiral spring elements (24), a bending direction of the spiral spring elements being arranged parallel to the direction of force.

30. Micromechanical structure according to claim 29, in which the spiral spring elements (24) have a smaller thickness along a thickness direction (z) perpendicular to the reference plane (16) Dimension (ha) have as the first gear side (22a) and the second gear side (22b).

31. Micromechanical structure according to one of the preceding claims, with a spiral spring arrangement (78) which is bistable along the direction of force and which is coupled between the substrate (12) and the first gear side (22a) and which has an inclined arrangement with respect to a surface normal (82) of the substrate (12) or alternatively the first gear side (22a).

32. Micromechanical structure according to one of the preceding claims, in which at least part of the substrate (12), at least part of the gear structure (18) and at least part of the movable element (14) are formed in one piece.

33. Micromechanical structure according to one of the preceding claims, in which the substrate (12), the movable element (14) and the gear structure (18) are formed in one piece.

34. Micromechanical structure according to one of the preceding claims, in which the substrate (12), the movable element (14) and the gear structure (18) are arranged in a common substrate plane.

35. Micromechanical system (190; 200; 210; 220) with a first micromechanical structure according to one of the preceding claims, which is arranged as a movable element of a second micromechanical structure according to one of the preceding claims.

36. Device (290) having: a micromechanical structure according to one of claims 1 to 34 or a micromechanical system according to claim 35; and a control device (96) which is configured to control the actuator (26); wherein the control device (96) is designed to set an oscillation of the movable element (14) with a target frequency in order to apply a control signal to the actuator (26) which has a value of a start frequency, the value the start frequency is greater than the target frequency, and to reduce the frequency of the drive signal in a plurality of steps until the target frequency is reached; or wherein the control device (96) is designed to set an oscillation of the movable element (14) at a target frequency in order to apply a control signal to the actuator (26) which has a value of a start frequency, the value of the start frequency being less than the target frequency, and to increase the frequency of the drive signal in a plurality of steps until the target frequency is reached.

37. The device according to claim 36, wherein the control device (96) is designed to select the target frequency so that it corresponds to twice a parametric resonance frequency of the micromechanical structure within a tolerance range of 100% and is designed to lower the micromechanical structure Using the drive signal to vibrate at the target frequency having a waveform; and to modulate at least one of the frequency, amplitude and phase position of the control signal in a course of the oscillation in order to bring about a change in an oscillation shape.

38. The device according to claim 37, wherein the control device (96) is designed to couple braking and / or accelerating forces at times when the oscillation of the movable element (14) is outside a zero crossing in relation to a rest position to cause the change in the waveform.

39. Device according to claim 37 or 38, in which the control device (96) is designed to apply the control signal within a tolerance range of 10% at a point in time at which the oscillation of the movable element (14) has a reversal point so that the movable element (14) is held in one position.

40. Device according to one of claims 36 to 39, in which the control device (96) is designed to apply a starting frequency when the movable element (14) is in a rest position and this is achieved by applying the control signal at the starting frequency or by varying the frequency of the control signal to excite parametric resonant oscillation from a reference plane.

41. A method for providing a micromechanical structure with the following steps:

Providing a substrate;

Arranging a movable element so that it is arranged in a reference plane in an undeflected state;

Arranging a transmission structure such that a first transmission side is coupled to the substrate and a second transmission side is coupled to the movable element;

Arranging an actuator so that it is designed to provide a force along a force direction parallel to the reference plane and to apply it to the first gear side; so that the gear structure is designed to convert the force along the direction of force into a movement of the movable element out of the reference plane.