EP3931541A4 - THERMAL BARRIER BETWEEN HIGH TEMPERATURE SENSOR AND ELECTRONICS IN A CAPACITY DIAPHRAGM METER - Google Patents

THERMAL BARRIER BETWEEN HIGH TEMPERATURE SENSOR AND ELECTRONICS IN A CAPACITY DIAPHRAGM METER Download PDF

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Publication number
EP3931541A4
EP3931541A4 EP20762781.1A EP20762781A EP3931541A4 EP 3931541 A4 EP3931541 A4 EP 3931541A4 EP 20762781 A EP20762781 A EP 20762781A EP 3931541 A4 EP3931541 A4 EP 3931541A4
Authority
EP
European Patent Office
Prior art keywords
electronics
temperature sensor
thermal barrier
diaphragm gauge
capacitance diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP20762781.1A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP3931541A1 (en
Inventor
Matt DATLEN
Kurt RUSTIN
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo SHI Cryogenics of America Inc
Original Assignee
Sumitomo SHI Cryogenics of America Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo SHI Cryogenics of America Inc filed Critical Sumitomo SHI Cryogenics of America Inc
Publication of EP3931541A1 publication Critical patent/EP3931541A1/en
Publication of EP3931541A4 publication Critical patent/EP3931541A4/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0681—Protection against excessive heat
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
EP20762781.1A 2019-02-26 2020-02-25 THERMAL BARRIER BETWEEN HIGH TEMPERATURE SENSOR AND ELECTRONICS IN A CAPACITY DIAPHRAGM METER Pending EP3931541A4 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201962810798P 2019-02-26 2019-02-26
PCT/US2020/019688 WO2020176495A1 (en) 2019-02-26 2020-02-25 Thermal barrier between high-temperature sensor and electronics in a capacitance diaphragm gauge

Publications (2)

Publication Number Publication Date
EP3931541A1 EP3931541A1 (en) 2022-01-05
EP3931541A4 true EP3931541A4 (en) 2022-11-23

Family

ID=72239893

Family Applications (1)

Application Number Title Priority Date Filing Date
EP20762781.1A Pending EP3931541A4 (en) 2019-02-26 2020-02-25 THERMAL BARRIER BETWEEN HIGH TEMPERATURE SENSOR AND ELECTRONICS IN A CAPACITY DIAPHRAGM METER

Country Status (7)

Country Link
US (1) US11768119B2 (ja)
EP (1) EP3931541A4 (ja)
JP (1) JP7140925B2 (ja)
KR (1) KR102539918B1 (ja)
CN (1) CN113260843B (ja)
TW (1) TWI741510B (ja)
WO (1) WO2020176495A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP1685892S (ja) * 2020-10-01 2021-05-24
WO2023101715A1 (en) * 2021-12-03 2023-06-08 Sumitomo (Shi) Cryogenics Of America, Inc. Thermal insulation system for a capacitance diaphragm gauge

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5808206A (en) * 1996-01-16 1998-09-15 Mks Instruments, Inc. Heated pressure transducer assembly
WO2007008388A1 (en) * 2005-07-13 2007-01-18 Mks Instruments, Inc. Thermal mounting plate for heated pressure transducer
US20100186516A1 (en) * 2007-06-19 2010-07-29 Hansjakob Hanselmann Vacuum measuring cell device having a heater

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5719646A (en) 1980-07-09 1982-02-01 Olympus Optical Co Ltd Calibration method for electrolyte measurement in automatic biochemical analyzer with builtin type flame light photometer
US5625152A (en) * 1996-01-16 1997-04-29 Mks Instruments, Inc. Heated pressure transducer assembly
JP4437336B2 (ja) * 1999-05-14 2010-03-24 キヤノンアネルバ株式会社 静電容量型真空センサ
EP1309840B1 (en) * 2000-08-11 2010-06-09 MKS Instruments, Inc. Capacitive based pressure sensor design
US6612176B2 (en) * 2000-12-28 2003-09-02 Mks Instruments, Inc. Pressure transducer assembly with thermal shield
US7201057B2 (en) * 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
WO2007019714A1 (de) * 2005-08-12 2007-02-22 Inficon Gmbh Optischer interferometrische drucksensor
CN100595022C (zh) * 2008-02-01 2010-03-24 黄崇贤 柱状散热器的制造方法
JP5576331B2 (ja) * 2011-03-31 2014-08-20 アズビル株式会社 圧力センサ装置
JP2014126503A (ja) * 2012-12-27 2014-07-07 Azbil Corp 静電容量型圧力センサ
CN103929925A (zh) * 2013-01-16 2014-07-16 欧司朗有限公司 散热装置和包括该散热装置的电子装置和照明装置
CN203848247U (zh) * 2014-04-30 2014-09-24 佛山市朗士照明有限公司 一种散热器

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5808206A (en) * 1996-01-16 1998-09-15 Mks Instruments, Inc. Heated pressure transducer assembly
WO2007008388A1 (en) * 2005-07-13 2007-01-18 Mks Instruments, Inc. Thermal mounting plate for heated pressure transducer
US20100186516A1 (en) * 2007-06-19 2010-07-29 Hansjakob Hanselmann Vacuum measuring cell device having a heater

Also Published As

Publication number Publication date
CN113260843B (zh) 2023-09-12
WO2020176495A1 (en) 2020-09-03
KR102539918B1 (ko) 2023-06-02
US20220090974A1 (en) 2022-03-24
JP2022522288A (ja) 2022-04-15
CN113260843A (zh) 2021-08-13
US11768119B2 (en) 2023-09-26
EP3931541A1 (en) 2022-01-05
TWI741510B (zh) 2021-10-01
JP7140925B2 (ja) 2022-09-21
TW202102826A (zh) 2021-01-16
KR20210101328A (ko) 2021-08-18

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