EP3852199A1 - Hermetic terminal - Google Patents
Hermetic terminal Download PDFInfo
- Publication number
- EP3852199A1 EP3852199A1 EP19861121.2A EP19861121A EP3852199A1 EP 3852199 A1 EP3852199 A1 EP 3852199A1 EP 19861121 A EP19861121 A EP 19861121A EP 3852199 A1 EP3852199 A1 EP 3852199A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- tube body
- ceramic substrate
- hermetic terminal
- terminal according
- alloy
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 claims abstract description 60
- 239000000758 substrate Substances 0.000 claims abstract description 55
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 32
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 25
- 239000000956 alloy Substances 0.000 claims abstract description 25
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 16
- 229910000963 austenitic stainless steel Inorganic materials 0.000 claims abstract description 9
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 claims abstract description 6
- 229910000599 Cr alloy Inorganic materials 0.000 claims abstract description 5
- 229910002060 Fe-Cr-Al alloy Inorganic materials 0.000 claims abstract description 5
- 229910004349 Ti-Al Inorganic materials 0.000 claims abstract description 5
- 229910004692 Ti—Al Inorganic materials 0.000 claims abstract description 5
- 239000010410 layer Substances 0.000 claims description 27
- 239000011148 porous material Substances 0.000 claims description 24
- 230000002093 peripheral effect Effects 0.000 claims description 20
- 239000011247 coating layer Substances 0.000 claims description 16
- 230000005484 gravity Effects 0.000 claims description 12
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- 229910000570 Cupronickel Inorganic materials 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 claims description 8
- 238000005219 brazing Methods 0.000 description 14
- 238000000034 method Methods 0.000 description 14
- 229910052739 hydrogen Inorganic materials 0.000 description 11
- 239000001257 hydrogen Substances 0.000 description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 239000000843 powder Substances 0.000 description 9
- 238000009616 inductively coupled plasma Methods 0.000 description 8
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 238000003466 welding Methods 0.000 description 5
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000004332 silver Substances 0.000 description 3
- 229920003171 Poly (ethylene oxide) Polymers 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 239000004372 Polyvinyl alcohol Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 2
- 229910000019 calcium carbonate Inorganic materials 0.000 description 2
- 238000009694 cold isostatic pressing Methods 0.000 description 2
- 239000008187 granular material Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- VTHJTEIRLNZDEV-UHFFFAOYSA-L magnesium dihydroxide Chemical compound [OH-].[OH-].[Mg+2] VTHJTEIRLNZDEV-UHFFFAOYSA-L 0.000 description 2
- 239000000347 magnesium hydroxide Substances 0.000 description 2
- 229910001862 magnesium hydroxide Inorganic materials 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920002451 polyvinyl alcohol Polymers 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000001993 wax Substances 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910017309 Mo—Mn Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 1
- 239000006061 abrasive grain Substances 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 239000000306 component Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003995 emulsifying agent Substances 0.000 description 1
- 239000000839 emulsion Substances 0.000 description 1
- 229910000830 fernico Inorganic materials 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000011777 magnesium Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000003550 marker Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 230000005405 multipole Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/40—Securing contact members in or to a base or case; Insulating of contact members
- H01R13/405—Securing in non-demountable manner, e.g. moulding, riveting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/46—Bases; Cases
- H01R13/53—Bases or cases for heavy duty; Bases or cases for high voltage with means for preventing corona or arcing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/73—Means for mounting coupling parts to apparatus or structures, e.g. to a wall
- H01R13/74—Means for mounting coupling parts in openings of a panel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/02—Contact members
- H01R13/03—Contact members characterised by the material, e.g. plating, or coating materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
- H01R13/00—Details of coupling devices of the kinds covered by groups H01R12/70 or H01R24/00 - H01R33/00
- H01R13/46—Bases; Cases
- H01R13/502—Bases; Cases composed of different pieces
- H01R13/504—Bases; Cases composed of different pieces different pieces being moulded, cemented, welded, e.g. ultrasonic, or swaged together
Definitions
- the present disclosure relates to a hermetic terminal.
- hermetic terminals used in a vacuum equipment, a nuclear equipment, or the like a contact pin 21, a heat-resistant insulator 22, and a pipe flange (tube body) 23 are hermetically connected to each other as a hermetic terminal 30 shown in Fig. 5 to obtain a high leakage resistance, and the connecting is performed by brazing or the like, and it is required to have a necessary mechanical strength, and withstand impact and high temperature sufficiently.
- alumina is used as the heat-resistant insulator 22, its surface is metallized, it is hermetically connected to the contact pin 21 and the pipe flange 23 by brazing, and to reduce difference of thermal expansion coefficients of the contact pin 21 and the pipe flange 23 with respect to the alumina, the contact pin 22 and the pipe flange 23 are normally formed by an iron-nickel alloy or an iron-nickel cobalt alloy.
- Non-Patent Document 1 a multi-pole terminal is used as a hermetic terminal for extracting signal of a liquid hydrogen tank of a rocket.
- Patent Document 1 Japanese Patent Publication No. 2519642
- Non-Patent Document 1 Hajime Ishimaru, Hermetic Seal for Low Temperature, TEION KOGAKU 17(1), pp. 61-62 (1982 )
- a hermetic terminal of the present disclosure includes a plate-shaped ceramic substrate in a plate shape provided with a through hole for inserting a columnar conductive member in a thickness direction, a first tube body surrounding the ceramic substrate, and a second tube body coaxially connected with the first tube body , and the first tube body includes a fernico-type alloy, an Fe-Ni alloy, an Fe-Ni-Cr-Ti-Al alloy, an Fe-Cr-Al alloy or an Fe-Co-Cr alloy, and the second tube body includes an austenitic stainless steel with a nickel content of 10.4 mass% or more.
- FIG. 1(a) is a perspective view at a side of a first tube body
- FIG. 1(b) is a perspective view at a side of a second tube body, illustrating one embodiment of a hermetic terminal of the present disclosure.
- FIG. 2(a) is a drawing illustrating one embodiment of a sectional view along an axis direction of the first tube body and the second tube body
- FIG. 2(b) is a side view of FIG. 2(a)
- FIG. 2(c) is a sectional view illustrating one embodiment enlarging the part A shown in FIG. 2(a)
- FIG. 2(d) is a sectional view illustrating another embodiment enlarging the part A shown in FIG. 2(a)
- FIG. 2(e) is a sectional view illustrating one embodiment enlarging the part B shown in FIG. 2(a) , illustrating the hermetic terminal of FIG. 1 .
- a hermetic terminal 20 illustrated in FIGs. 1 and 2 includes a plate shape ceramic substrate 3 provided with a through hole 2 for inserting a columnar conductive member 1 in a thickness direction, a first tube body 4 surrounding the ceramic substrate 3, and a second tube body 5 coaxially connected with the first tube body 4.
- the conductive member 1 includes a columnar base part 1a inserted into the through hole 2, and a collar part 1b opposing to the ceramic substrate 3 on the midway in an axis direction of the columnar base part 1a.
- the conductive member 1 includes a fernico-type alloy, an Fe-Ni alloy, an Fe-Ni-Cr-Ti-Al alloy, an Fe-Co-Cr alloy or an Fe-Cr-Al alloy
- the ceramic substrate 3 includes ceramics including aluminum oxide as a main component
- the conductive member 1 is supported by the ceramic substrate 3 provided with a metallized layer 10 formed on the surface by a brazing material including silver such as BAg-8, BAg-8A, BAg-8B or the like as a main component.
- main component in the ceramics denotes a component of 85 mass% or more in 100 mass% of the components constituting the ceramics
- main component in the brazing material denotes a component of 60 mass% or more in 100 mass% of the components constituting the brazing material.
- the ceramics may include at least one of silicon, calcium and magnesium as an oxide in addition to aluminum oxide which is a main component.
- the components constituting the ceramics may be identified by using an X-ray diffractometer (XRD), and then the content of components may be determined by using an X-ray fluorescent analyzer (XRF) or an ICP emission spectrometer (ICP), and converted it into the content of the identified components.
- XRD X-ray diffractometer
- XRF X-ray fluorescent analyzer
- ICP ICP emission spectrometer
- the content of the components constituting the brazing material may be determined by using an X-ray fluorescent analyzer (XRF) or an ICP emission spectrometer (ICP).
- XRF X-ray fluorescent analyzer
- ICP ICP emission spectrometer
- the first tube body 4 includes a shaft part 4a and a head part 4b having an outer diameter larger than the outer diameter of the shaft part 4a.
- the second tube body 5 includes a shaft part 5a and a head part 5b having an outer diameter larger than the outer diameter of the shaft part 5a.
- the hermetic terminal 20 includes a flange 6 provided with a plurality of through holes 6a for inserting the second tube body 5, and a plurality of through holes 6b for inserting fastening members such as bolts or the like on the outer peripheral side to fix a storage container for low temperature liquid or the like (not shown).
- the flange 6, for example, includes an austenitic stainless steel.
- the flange 6 surrounds the shaft part 4a of the first tube body 4 and the shaft part 5a of the second tube body 5, and separates an environment different on the left and right sides with the flange 6 as a boundary.
- the side of the head part 4b of the head part 4b and the shaft part 4a of the first tube body 4 located on the left side of the ceramic substrate 3 is used in an environment exposed to the atmosphere
- the second tube body 5 located on the right side of the ceramic substrate 3 is used in an environment exposed to liquid hydrogen.
- the shaft part 4a of the first tube body 4 located on the right side of the ceramic substrate 3 is configured not to be directly exposed to the liquid hydrogen by the second tube body 5.
- the first tube body 4 includes a fernico alloy, an Fe-Ni alloy, an Fe-Ni-Cr-Ti-Al alloy, an Fe-Cr-Al alloy or an Fe-Co-Cr alloy
- the second tube body 5 includes an austenitic stainless steel with a nickel content of 10.4 mass% or more.
- the first tube body 4 includes the above-described alloys, even if heating and cooling are repeated, linear expansion coefficients of these alloys have a small difference from a linear expansion coefficient of aluminum oxide, so residual stress is less likely to accumulate in the ceramic substrate 3, and thus cracks are less likely to occur in the ceramic substrate 3. Additionally, if the second tube body 5 includes the austenitic stainless steel with the nickel content of 10.4 mass% or more, it is less likely to be embrittled by hydrogen and can therefore be used for a long period of time.
- the second tube body 5 includes, for example, SUS310S, SUS316L, SUS316LN, SUS316J1L or SUS317L.
- the first tube body 4 and the second tube body 5 are both circular cylindrical bodies, and the ceramic substrate 3 is a disk, but the first tube body 4 and the second tube body 5 may be both square cylindrical bodies, and the ceramic substrate 3 may be a square plate.
- an end of the second tube body 5 on the side of the first tube body 4 includes a step surface 5c.
- an end of the first tube body 4 on the side of the second tube body 5 includes a step surface 4c.
- At least one of the end of the second tube body 5 on the side of the first tube body 4 and the end of the first tube body 4 on the side of the second tube body 5 may include the step surfaces 4c and 5c.
- the step surface 5c is included on the outer peripheral surface of the second tube body 5, but the step surface may be included on the inner peripheral surface of the second tube body 5.
- the step surface 4c is included on the outer peripheral surface of the first tube body 4, but the step surface may be included on the inner peripheral surface of the first tube body 4.
- FIG. 3 is a sectional view illustrating another embodiment enlarging the part A of the hermetic terminal shown in FIG. 2 .
- the second tube body 5 may include a coating layer 5d composed of nickel, copper or a copper-nickel alloy as a main component at least on a connecting part with the first tube body 4.
- the first tube body 4 and the second tube body 5 can be connected firmly by a connecting layer 7 including a brazing material, and thus reliability is improved.
- the second tube body 5 may include the coating layer 5d composed of nickel, copper or a copper-nickel alloy as a main component on at least one of the surfaces exposed to the liquid hydrogen such as the inner peripheral surface, the outer peripheral surface, and the end surface in addition to the connecting part.
- embrittlement due to hydrogen of the austenitic stainless steel constituting the second tube body 5 can be delayed, so that it can be used for a longer period of time.
- the second tube body 5 shown in FIG. 3 includes the coating layer 5d on the inner peripheral surface, the outer peripheral surface, and the end surface.
- the first tube body 4 may include a coating layer 4d composed of nickel, copper or a copper-nickel alloy as a main component at least on a connecting part with the second tube body 5.
- the first tube body 4 and the second tube body 5 can be connected firmly by a brazing material, and thus reliability is improved.
- the inner peripheral surface of the first tube body 4 may be located outward rather than the outer peripheral surface of the second tube body 5.
- the first tube body 4 has a linear expansion coefficient smaller than the second tube body 5, so the gap is less likely to expand even if heating and cooling are repeated, and thus the volatilized hydrogen is less likely to leak to the outside through the internal space of the first tube body 4.
- the second tube body 5 includes the step surface 5c on the end of the second tube body 5 on the side of the first tube body 4, the outer peripheral surface corresponds to the step surface 5c.
- the flange 6 connected to the outer peripheral surface of the second tube body 5 and surrounding the second tube body 5 may be further included.
- the flange 6 includes a second recessed part 6d at the side of the second tube body 5, a collar part 8 having a U-shaped cross section along an axial direction of the second tube body 5 is attached to the second recessed part 6d, and the second tube body 5 and the flange 6 are connected via the collar part 8.
- the collar part 8 may include a coating layer (not shown) including nickel, copper or a copper-nickel alloy as a main component at least on the connecting part with the second tube body 5, and the coating layer (not shown) may be included on entire surface of the collar part 8.
- a coating layer including nickel, copper or a copper-nickel alloy as a main component at least on the connecting part with the second tube body 5, and the coating layer (not shown) may be included on entire surface of the collar part 8.
- main component in the coating layer denotes a component of 88 mass% or more in 100 mass% of the components constituting the coating layer, and may include phosphorus or the like in addition to the main component. If the coating layer including the copper-nickel alloy as a main component, the total content of copper and nickel is the content of the main component.
- the content of the components in the coating layer may be determined by using an X-ray fluorescent analyzer (XRF) or an ICP emission spectrometer (ICP).
- XRF X-ray fluorescent analyzer
- ICP ICP emission spectrometer
- the collar part 8 and the second tube body 5 are connected by the brazing material including silver such as BAg-8, BAg-8A, BAg-8B or the like as a main component, and the flange 6 and the collar part 8 are welded by a TIG (Tungsten Inert Gas) welding method, and this welding is performed after each member is connected with the brazing material.
- the brazing material including silver such as BAg-8, BAg-8A, BAg-8B or the like as a main component
- the flange 6 includes a first recessed part 6c at the side of the first tube body 4, and it is preferable that the connecting part between the ceramic substrate 3 and the first tube body 4 is located away from the second tube body 5 than a bottom surface 6c1 of the first recessed part 6c (that is, in FIG. 2(a) , it is preferable that the connecting part between the ceramic substrate 3 and the first tube body 4 is located on the left side of the drawing with respect to a virtual plane where the bottom surface 6c1 of the first recessed part 6c is located, and the second tube body 5 is located on the right side of the drawing with respect to the virtual plane).
- the connecting part between the ceramic substrate 3 and the first tube body 4 is at this position, the heat generated by welding is less likely to be transferred to the ceramic substrate 3, so that residual stress is less likely to be generated in the ceramic substrate 3, and cracks are less likely to occur in the ceramic substrate 3.
- the first recessed part 6c is a counterbore for facilitating the attachment of the first tube body 4.
- the collar part 8 may include the austenitic stainless steel with the nickel content of 10.4 mass% or more. If the collar part 8 has such a configuration, it is less likely to be embrittled by hydrogen and can therefore be used for a long period of time.
- the collar part 8 includes, for example, SUS310S, SUS316L, SUS316LN, SUS316J1L or SUS317L.
- the nickel content in the second tube body 5 and the collar part 8 can be measured by using an ICP (Inductively Coupled Plasma) emission spectrometer or an X-ray fluorescent analyzer (XRF).
- ICP Inductively Coupled Plasma
- XRF X-ray fluorescent analyzer
- FIG. 4(a) is a drawing illustrating another embodiment of a sectional view along the axis direction of the first tube body and the second tube body
- FIG. 4(b) is a side view of FIG. 4(a)
- FIG. 4(c) is a sectional view illustrating one embodiment enlarging the part A shown in FIG. 4(a)
- FIG. 4(d) is a sectional view illustrating another embodiment enlarging the part A shown in FIG. 4(a)
- FIG. 4(e) is a sectional view illustrating one embodiment enlarging the part B shown in FIG. 4(a) , illustrating the hermetic terminal of FIG. 1 .
- a plurality of conductive members 1 are individually inserted into a plurality of through holes 2, and the ceramic substrate 3 includes step parts 9 (9a, 9b) recessed from at least one of the main surfaces 3b, 3c around the through holes 2.
- the ceramic substrate 3 includes the step parts 9 recessed from both of the main surfaces 3b, 3c around the through holes 2, and one of the step parts 9a further includes a metallized layer 10 on the step surface, and the step part 9a on the side provided with the metallized layer 10 may be deeper than the step part 9b on the side not provided with the metallized layer 10.
- the metallized layer 10 is for fixing the conductive member 1 to the ceramic substrate 3 by brazing, and the thickness thereof is, for example, 5 ⁇ m or more and 55 ⁇ m or less.
- the step part 9a on the side provided with the metallized layer 10 is deeper than the step part 9b on the side provided with the metallized layer 10, the creepage distance between the columnar base parts 1a of the conductive members 1 adjacent to each other can be lengthened, so that even if the metallized layer 10 is made thicker, generation of creepage discharge between the conductive members 1 can be suppressed.
- the depth of the step part 9a is a distance from the main surface to the step surface, and it does not include the thickness of the metallized layer 10.
- the depth of the step part 9a on the side provided with the metallized layer 10 may be 45% or less of the thickness of the ceramic substrate 3. If the depth of the step part 9a is in this range, mechanical strength of the ceramic substrate 3 around the through holes 2 can be ensured.
- the thickness of the ceramic substrate 3 is a distance between both main surfaces 3b, 3c of the ceramic substrate 3.
- the plurality of conductive members 1 are individually inserted into the plurality of through holes 2, and the ceramic substrate 3 includes a protrusion part 3a extending from at least one of the main surfaces (the main surface 3c in the example shown in FIG. 2 ) around the through holes 2.
- the metallized layer 10 opposing to the conductive member 1 can be lengthened, so that reliability of the connecting of the conductive member 1 to the ceramic substrate 3 can be increased.
- the ceramic substrate 3 includes a plurality of open pores on the step surface where the metallized layer 10 is included or the tip end surface of the protrusion part 3a, and the value obtained by subtracting an average value of the equivalent circle diameters of the open pores from the distance between the centers of gravity of the open pores may be 20 ⁇ m or more and 50 ⁇ m or less.
- the value obtained by subtracting the average value of the equivalent circle diameters of the open pores from the distance between the centers of gravity of the open pores is 20 ⁇ m or more, it becomes difficult for the open pores to communicate with each other even if used in an environment where heating and cooling are repeated, so that the mechanical strength can be maintained, and cracks are less likely to occur in the metallized layer 10. Further, if the value obtained by subtracting the average value of the equivalent circle diameters of the open pores from the distance between the centers of gravity of the open pores is 50 ⁇ m or less, the density of the open pores is increased, so that an anchor effect of the metallized layer 10 to the ceramic substrate 3 is improved, and adhesion strength of the metallized layer 10 is increased.
- the mechanical strength of the ceramic substrate 3 can be maintained, cracks can be suppressed in the metallized layer 10, and the adhesion strength of the metallized layer 10 can be improved.
- the step surface of the ceramic substrate 3 or the tip end surface of the protrusion part 3a is polished with diamond abrasive grains to obtain a mirror surface.
- an arithmetic mean roughness Ra of the mirror surface is set to 0.2 ⁇ m or less by using a measurement method in accordance with JIS B 0601: 2013.
- a part where the size and distribution of the open pores are observed on average is selected from the mirror surface, and an optical microscope is used with a magnification of 200 times to measure an area of, for example, 1.5 ⁇ 10 5 ⁇ m 2 as a measurement area.
- a method called a distance between centers of gravity of an image analysis software "A-ZOKUN (ver 2.52)" (registered trademark, produced by Asahi Kasei Engineering Corporation, and hereinafter, indicated by the image analysis software) is applied, and the distance between the centers of gravity of the open pores adjacent to each other can be obtained.
- the distance between the centers of gravity of the open pores in the present disclosure is a linear distance connecting the centers of gravity of the open pores.
- a threshold value should be set in such a way that a marker appearing on the screen matches the shape of the open pore.
- the threshold value is, for example, 155.
- a first tube body, a second tube body, and a ceramic substrate in which a conductive member is inserted into a through hole are prepared.
- the ceramic substrate can be obtained by the following manufacturing method.
- aluminum oxide powder which is the main component, magnesium hydroxide, silicon oxide, calcium carbonate, and zirconium oxide powders, a dispersant to disperse the aluminum oxide powder as needed, and an organic binder are wet-mixed by a ball mill, a bead mill, or a vibration mill to obtain a slurry.
- the mean particle size (D 50 ) of the aluminum oxide powder is 3 ⁇ m or less, preferably 1 ⁇ m or less, and in a total of 100 mass% of the above-described powders, the content of the magnesium hydroxide powder is 0.87 mass% to 1.07 mass%, the content of the silicon oxide powder is 6.1 mass% to 7.5 mass%, the content of the calcium carbonate powder is 2.5 mass% to 3.1 mass%, and the content of the zirconium oxide is 1.0 mass% to 1.3 mass%.
- the time for wet mixing is, for example, 40 to 50 hours.
- the organic binder include paraffin wax, wax emulsion (wax and emulsifier), PVA (polyvinyl alcohol), PEG (polyethylene glycol), and PEO (polyethylene oxide).
- the slurry obtained by the above-described method is spray-granulated to obtain granules, and then the granules are molded by a powder press molding method or a cold isostatic pressing method to obtain a molded body in a disk shape.
- a ceramic substrate can be obtained by forming a through hole and step parts or a protrusion part by a cutting process, and sintering the molded body in which the through holes and the like are formed at a temperature of 1550°C or more and 1750°C or less.
- a molded body is manufactured by the cold isostatic pressing method with a molding pressure of 98 MPa or more and 147 MPa or less, and sintered at a temperature of 1580°C or more and 1750°C or less.
- a coating layer composed of nickel, copper, or a copper-nickel alloy as a main component may be formed in advance on at least one of the connecting part of the conductive member with the ceramic substrate, the connecting part of the first tube body with the second tube body, the connecting part of the first tube body with the ceramic substrate, the connecting part of the second tube body with the first tube body, and the connecting part of the ceramic substrate with the first tube body by a plating method.
- the above-described coating layer may be formed on the entire surface of each of the conductive member, the first tube body, and the second tube body.
- the above-described coating layer may be formed on the step surface.
- the metallized layer may be formed in advance by a Mo-Mn method, and then a coating layer composed of nickel, copper or the copper-nickel alloy as a main component by the plating method.
- the above-described coating layer may be formed on the entire outer peripheral surface of the ceramic substrate.
- the appropriate temperature is the brazing temperature described in JIS Z 3281: 1998.
- a hermetic terminal provided with a flange, a first tube body, a ceramic substrate in which a conductive member is inserted into a through hole, and a second tube body to which a collar part is attached are prepared.
- the flange is attached to the outer peripheral side of the collar part, and the hermetic terminal of the present disclosure can be obtained by welding and fixing by the TIG (Tungsten Inert Gas) welding method.
- TIG Tungsten Inert Gas
- the hermetic terminals of the present disclosure obtained by the above-mentioned manufacturing method have high embrittlement to hydrogen, and can therefore be used for a long period of time.
- the second tube body 5 is connected to the flange 6 via the collar part 8 is shown, but the second tube body 5 may be directly connected to the flange 6.
- the collar part 8 has a U-shaped cross section is shown, but the collar part 8 may have another shape such as an L-shaped cross section or the like. If the collar part 8 has a U-shape, an L-shape, or the like, the bent part may be curved.
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Abstract
Description
- The present disclosure relates to a hermetic terminal.
- Conventionally, in hermetic terminals used in a vacuum equipment, a nuclear equipment, or the like, a
contact pin 21, a heat-resistant insulator 22, and a pipe flange (tube body) 23 are hermetically connected to each other as ahermetic terminal 30 shown inFig. 5 to obtain a high leakage resistance, and the connecting is performed by brazing or the like, and it is required to have a necessary mechanical strength, and withstand impact and high temperature sufficiently. Therefore, alumina is used as the heat-resistant insulator 22, its surface is metallized, it is hermetically connected to thecontact pin 21 and thepipe flange 23 by brazing, and to reduce difference of thermal expansion coefficients of thecontact pin 21 and thepipe flange 23 with respect to the alumina, thecontact pin 22 and thepipe flange 23 are normally formed by an iron-nickel alloy or an iron-nickel cobalt alloy. - Further, recently, as shown in Non-Patent
Document 1, a multi-pole terminal is used as a hermetic terminal for extracting signal of a liquid hydrogen tank of a rocket. - Patent Document 1:
Japanese Patent Publication No. 2519642 - Non-Patent Document 1: Hajime Ishimaru, Hermetic Seal for Low Temperature, TEION KOGAKU 17(1), pp. 61-62 (1982)
- A hermetic terminal of the present disclosure includes a plate-shaped ceramic substrate in a plate shape provided with a through hole for inserting a columnar conductive member in a thickness direction, a first tube body surrounding the ceramic substrate, and a second tube body coaxially connected with the first tube body , and the first tube body includes a fernico-type alloy, an Fe-Ni alloy, an Fe-Ni-Cr-Ti-Al alloy, an Fe-Cr-Al alloy or an Fe-Co-Cr alloy, and the second tube body includes an austenitic stainless steel with a nickel content of 10.4 mass% or more.
-
-
FIG. 1(a) is a perspective view at a side of a first tube body, andFIG. 1(b) is a perspective view at a side of a second tube body, illustrating one embodiment of a hermetic terminal of the present disclosure. -
FIG. 2(a) is a drawing illustrating one embodiment of a sectional view along an axis direction of the first tube body and the second tube body,FIG. 2(b) is a side view ofFIG. 2(a), FIG. 2(c) is a sectional view illustrating one embodiment enlarging the part A shown inFIG. 2(a), FIG. 2(d) is a sectional view illustrating another embodiment enlarging the part A shown inFIG. 2(a), and FIG. 2(e) is a sectional view illustrating one embodiment enlarging the part B shown inFIG. 2(a) , illustrating the hermetic terminal ofFIG. 1 . -
FIG. 3 is a sectional view illustrating another embodiment enlarging the part A of the hermetic terminal shown inFIG. 2 . -
FIG. 4(a) is a drawing illustrating another embodiment of a sectional view along the axis direction of the first tube body and the second tube body,FIG. 4(b) is a side view ofFIG. 4(a), FIG. 4(c) is a sectional view illustrating one embodiment enlarging the part A shown inFIG. 4(a), FIG. 4(d) is a sectional view illustrating another embodiment enlarging the part A shown inFIG. 4(a), and FIG. 4(e) is a sectional view illustrating one embodiment enlarging the part B shown inFIG. 4(a) , illustrating the hermetic terminal ofFIG. 1 . -
FIG. 5 is a perspective view illustrating one embodiment of a conventional hermetic terminal. - Embodiments of the present invention are described in detail below with reference to the drawings. In all the drawings of the present description, the same parts are designated by the same reference numerals unless confusion occurs, and the description thereof will be omitted as appropriate.
-
FIG. 1(a) is a perspective view at a side of a first tube body, andFIG. 1(b) is a perspective view at a side of a second tube body, illustrating one embodiment of a hermetic terminal of the present disclosure. -
FIG. 2(a) is a drawing illustrating one embodiment of a sectional view along an axis direction of the first tube body and the second tube body,FIG. 2(b) is a side view ofFIG. 2(a), FIG. 2(c) is a sectional view illustrating one embodiment enlarging the part A shown inFIG. 2(a), FIG. 2(d) is a sectional view illustrating another embodiment enlarging the part A shown inFIG. 2(a), and FIG. 2(e) is a sectional view illustrating one embodiment enlarging the part B shown inFIG. 2(a) , illustrating the hermetic terminal ofFIG. 1 . - A
hermetic terminal 20 illustrated inFIGs. 1 and2 includes a plate shapeceramic substrate 3 provided with athrough hole 2 for inserting a columnarconductive member 1 in a thickness direction, afirst tube body 4 surrounding theceramic substrate 3, and asecond tube body 5 coaxially connected with thefirst tube body 4. - The
conductive member 1 includes acolumnar base part 1a inserted into the throughhole 2, and acollar part 1b opposing to theceramic substrate 3 on the midway in an axis direction of thecolumnar base part 1a. Theconductive member 1 includes a fernico-type alloy, an Fe-Ni alloy, an Fe-Ni-Cr-Ti-Al alloy, an Fe-Co-Cr alloy or an Fe-Cr-Al alloy, theceramic substrate 3 includes ceramics including aluminum oxide as a main component, and theconductive member 1 is supported by theceramic substrate 3 provided with a metallizedlayer 10 formed on the surface by a brazing material including silver such as BAg-8, BAg-8A, BAg-8B or the like as a main component. - The term "main component in the ceramics" denotes a component of 85 mass% or more in 100 mass% of the components constituting the ceramics, the term "main component in the brazing material" denotes a component of 60 mass% or more in 100 mass% of the components constituting the brazing material.
- The ceramics may include at least one of silicon, calcium and magnesium as an oxide in addition to aluminum oxide which is a main component.
- The components constituting the ceramics may be identified by using an X-ray diffractometer (XRD), and then the content of components may be determined by using an X-ray fluorescent analyzer (XRF) or an ICP emission spectrometer (ICP), and converted it into the content of the identified components.
- The content of the components constituting the brazing material may be determined by using an X-ray fluorescent analyzer (XRF) or an ICP emission spectrometer (ICP).
- The
first tube body 4 includes ashaft part 4a and ahead part 4b having an outer diameter larger than the outer diameter of theshaft part 4a. Similarly, thesecond tube body 5 includes ashaft part 5a and ahead part 5b having an outer diameter larger than the outer diameter of theshaft part 5a. - The
hermetic terminal 20 includes aflange 6 provided with a plurality of throughholes 6a for inserting thesecond tube body 5, and a plurality of throughholes 6b for inserting fastening members such as bolts or the like on the outer peripheral side to fix a storage container for low temperature liquid or the like (not shown). Theflange 6, for example, includes an austenitic stainless steel. - As shown in
FIG. 2(a) , theflange 6 surrounds theshaft part 4a of thefirst tube body 4 and theshaft part 5a of thesecond tube body 5, and separates an environment different on the left and right sides with theflange 6 as a boundary. - In
FIG. 2(a) , the side of thehead part 4b of thehead part 4b and theshaft part 4a of thefirst tube body 4 located on the left side of theceramic substrate 3 is used in an environment exposed to the atmosphere, thesecond tube body 5 located on the right side of theceramic substrate 3 is used in an environment exposed to liquid hydrogen. Theshaft part 4a of thefirst tube body 4 located on the right side of theceramic substrate 3 is configured not to be directly exposed to the liquid hydrogen by thesecond tube body 5. - The
first tube body 4 includes a fernico alloy, an Fe-Ni alloy, an Fe-Ni-Cr-Ti-Al alloy, an Fe-Cr-Al alloy or an Fe-Co-Cr alloy, and thesecond tube body 5 includes an austenitic stainless steel with a nickel content of 10.4 mass% or more. - If the
first tube body 4 includes the above-described alloys, even if heating and cooling are repeated, linear expansion coefficients of these alloys have a small difference from a linear expansion coefficient of aluminum oxide, so residual stress is less likely to accumulate in theceramic substrate 3, and thus cracks are less likely to occur in theceramic substrate 3. Additionally, if thesecond tube body 5 includes the austenitic stainless steel with the nickel content of 10.4 mass% or more, it is less likely to be embrittled by hydrogen and can therefore be used for a long period of time. - The
second tube body 5 includes, for example, SUS310S, SUS316L, SUS316LN, SUS316J1L or SUS317L. - In
FIGs. 1 and2 , thefirst tube body 4 and thesecond tube body 5 are both circular cylindrical bodies, and theceramic substrate 3 is a disk, but thefirst tube body 4 and thesecond tube body 5 may be both square cylindrical bodies, and theceramic substrate 3 may be a square plate. - As shown in
FIG. 2(c) , an end of thesecond tube body 5 on the side of thefirst tube body 4 includes astep surface 5c. - As shown in
FIG. 2(d) , an end of thefirst tube body 4 on the side of thesecond tube body 5 includes astep surface 4c. - As shown in
FIGs. 2(c) and 2(d) , at least one of the end of thesecond tube body 5 on the side of thefirst tube body 4 and the end of thefirst tube body 4 on the side of thesecond tube body 5 may include thestep surfaces FIG. 2(c) , thestep surface 5c is included on the outer peripheral surface of thesecond tube body 5, but the step surface may be included on the inner peripheral surface of thesecond tube body 5. Additionally, inFIG. 2(d) , thestep surface 4c is included on the outer peripheral surface of thefirst tube body 4, but the step surface may be included on the inner peripheral surface of thefirst tube body 4. - With such a configuration, hydrogen volatilized by applying a high pressure is difficult to pass through a gap between the
first tube body 4 and thesecond tube body 5, so that the volatilized hydrogen becomes difficult to leak to the outside through an internal space of thefirst tube body 4. -
FIG. 3 is a sectional view illustrating another embodiment enlarging the part A of the hermetic terminal shown inFIG. 2 . - As shown in
FIG. 3 , thesecond tube body 5 may include acoating layer 5d composed of nickel, copper or a copper-nickel alloy as a main component at least on a connecting part with thefirst tube body 4. - With such a configuration, the
first tube body 4 and thesecond tube body 5 can be connected firmly by a connectinglayer 7 including a brazing material, and thus reliability is improved. - The
second tube body 5 may include thecoating layer 5d composed of nickel, copper or a copper-nickel alloy as a main component on at least one of the surfaces exposed to the liquid hydrogen such as the inner peripheral surface, the outer peripheral surface, and the end surface in addition to the connecting part. - With such a configuration, embrittlement due to hydrogen of the austenitic stainless steel constituting the
second tube body 5 can be delayed, so that it can be used for a longer period of time. - The
second tube body 5 shown inFIG. 3 includes thecoating layer 5d on the inner peripheral surface, the outer peripheral surface, and the end surface. - The
first tube body 4 may include acoating layer 4d composed of nickel, copper or a copper-nickel alloy as a main component at least on a connecting part with thesecond tube body 5. - With such a configuration, the
first tube body 4 and thesecond tube body 5 can be connected firmly by a brazing material, and thus reliability is improved. - As shown in
FIG. 3 , the inner peripheral surface of thefirst tube body 4 may be located outward rather than the outer peripheral surface of thesecond tube body 5. - With such a configuration, the
first tube body 4 has a linear expansion coefficient smaller than thesecond tube body 5, so the gap is less likely to expand even if heating and cooling are repeated, and thus the volatilized hydrogen is less likely to leak to the outside through the internal space of thefirst tube body 4. - As shown in
FIG. 3(a) , if thesecond tube body 5 includes thestep surface 5c on the end of thesecond tube body 5 on the side of thefirst tube body 4, the outer peripheral surface corresponds to thestep surface 5c. - As shown in
FIGs. 1 and2 , theflange 6 connected to the outer peripheral surface of thesecond tube body 5 and surrounding thesecond tube body 5 may be further included. - With such a configuration, different environments can be separated on the outer peripheral side of the
second tube body 5 with theflange 6 as a boundary. - Then, as shown in
FIG. 2 , theflange 6 includes a second recessedpart 6d at the side of thesecond tube body 5, acollar part 8 having a U-shaped cross section along an axial direction of thesecond tube body 5 is attached to the second recessedpart 6d, and thesecond tube body 5 and theflange 6 are connected via thecollar part 8. - The
collar part 8 may include a coating layer (not shown) including nickel, copper or a copper-nickel alloy as a main component at least on the connecting part with thesecond tube body 5, and the coating layer (not shown) may be included on entire surface of thecollar part 8. - The term "main component in the coating layer" in the present disclosure denotes a component of 88 mass% or more in 100 mass% of the components constituting the coating layer, and may include phosphorus or the like in addition to the main component. If the coating layer including the copper-nickel alloy as a main component, the total content of copper and nickel is the content of the main component.
- The content of the components in the coating layer may be determined by using an X-ray fluorescent analyzer (XRF) or an ICP emission spectrometer (ICP).
- The
collar part 8 and thesecond tube body 5 are connected by the brazing material including silver such as BAg-8, BAg-8A, BAg-8B or the like as a main component, and theflange 6 and thecollar part 8 are welded by a TIG (Tungsten Inert Gas) welding method, and this welding is performed after each member is connected with the brazing material. - The
flange 6 includes a first recessedpart 6c at the side of thefirst tube body 4, and it is preferable that the connecting part between theceramic substrate 3 and thefirst tube body 4 is located away from thesecond tube body 5 than a bottom surface 6c1 of the first recessedpart 6c (that is, inFIG. 2(a) , it is preferable that the connecting part between theceramic substrate 3 and thefirst tube body 4 is located on the left side of the drawing with respect to a virtual plane where the bottom surface 6c1 of the first recessedpart 6c is located, and thesecond tube body 5 is located on the right side of the drawing with respect to the virtual plane). - If the connecting part between the
ceramic substrate 3 and thefirst tube body 4 is at this position, the heat generated by welding is less likely to be transferred to theceramic substrate 3, so that residual stress is less likely to be generated in theceramic substrate 3, and cracks are less likely to occur in theceramic substrate 3. - Here, the first recessed
part 6c is a counterbore for facilitating the attachment of thefirst tube body 4. - Further, the
collar part 8 may include the austenitic stainless steel with the nickel content of 10.4 mass% or more. If thecollar part 8 has such a configuration, it is less likely to be embrittled by hydrogen and can therefore be used for a long period of time. - The
collar part 8 includes, for example, SUS310S, SUS316L, SUS316LN, SUS316J1L or SUS317L. - The nickel content in the
second tube body 5 and thecollar part 8 can be measured by using an ICP (Inductively Coupled Plasma) emission spectrometer or an X-ray fluorescent analyzer (XRF). -
FIG. 4(a) is a drawing illustrating another embodiment of a sectional view along the axis direction of the first tube body and the second tube body,FIG. 4(b) is a side view ofFIG. 4(a), FIG. 4(c) is a sectional view illustrating one embodiment enlarging the part A shown inFIG. 4(a), FIG. 4(d) is a sectional view illustrating another embodiment enlarging the part A shown inFIG. 4(a), and FIG. 4(e) is a sectional view illustrating one embodiment enlarging the part B shown inFIG. 4(a) , illustrating the hermetic terminal ofFIG. 1 . - As shown in
FIG. 4 , a plurality ofconductive members 1 are individually inserted into a plurality of throughholes 2, and theceramic substrate 3 includes step parts 9 (9a, 9b) recessed from at least one of themain surfaces - With such a configuration, a creepage distance between
columnar base parts 1a of theconductive members 1 adjacent to each other becomes long, so that generation of creepage discharge between thecolumnar base parts 1a can be suppressed. - The
ceramic substrate 3 includes the step parts 9 recessed from both of themain surfaces holes 2, and one of thestep parts 9a further includes a metallizedlayer 10 on the step surface, and thestep part 9a on the side provided with the metallizedlayer 10 may be deeper than thestep part 9b on the side not provided with the metallizedlayer 10. Here, the metallizedlayer 10 is for fixing theconductive member 1 to theceramic substrate 3 by brazing, and the thickness thereof is, for example, 5 µm or more and 55 µm or less. - If the
step part 9a on the side provided with the metallizedlayer 10 is deeper than thestep part 9b on the side provided with the metallizedlayer 10, the creepage distance between thecolumnar base parts 1a of theconductive members 1 adjacent to each other can be lengthened, so that even if the metallizedlayer 10 is made thicker, generation of creepage discharge between theconductive members 1 can be suppressed. Here, the depth of thestep part 9a is a distance from the main surface to the step surface, and it does not include the thickness of the metallizedlayer 10. - The depth of the
step part 9a on the side provided with the metallizedlayer 10 may be 45% or less of the thickness of theceramic substrate 3. If the depth of thestep part 9a is in this range, mechanical strength of theceramic substrate 3 around the throughholes 2 can be ensured. Here, the thickness of theceramic substrate 3 is a distance between bothmain surfaces ceramic substrate 3. - Further, as shown in
FIG. 2 , the plurality ofconductive members 1 are individually inserted into the plurality of throughholes 2, and theceramic substrate 3 includes aprotrusion part 3a extending from at least one of the main surfaces (themain surface 3c in the example shown inFIG. 2 ) around the through holes 2. With such a configuration, the metallizedlayer 10 opposing to theconductive member 1 can be lengthened, so that reliability of the connecting of theconductive member 1 to theceramic substrate 3 can be increased. - The
ceramic substrate 3 includes a plurality of open pores on the step surface where the metallizedlayer 10 is included or the tip end surface of theprotrusion part 3a, and the value obtained by subtracting an average value of the equivalent circle diameters of the open pores from the distance between the centers of gravity of the open pores may be 20 µm or more and 50 µm or less. - If the value obtained by subtracting the average value of the equivalent circle diameters of the open pores from the distance between the centers of gravity of the open pores is 20 µm or more, it becomes difficult for the open pores to communicate with each other even if used in an environment where heating and cooling are repeated, so that the mechanical strength can be maintained, and cracks are less likely to occur in the metallized
layer 10. Further, if the value obtained by subtracting the average value of the equivalent circle diameters of the open pores from the distance between the centers of gravity of the open pores is 50 µm or less, the density of the open pores is increased, so that an anchor effect of the metallizedlayer 10 to theceramic substrate 3 is improved, and adhesion strength of the metallizedlayer 10 is increased. - If the value obtained by subtracting the average value of the equivalent circle diameters of the open pores from the distance between the centers of gravity of the open pores is 20 µm or more and 50 µm or less, the mechanical strength of the
ceramic substrate 3 can be maintained, cracks can be suppressed in the metallizedlayer 10, and the adhesion strength of the metallizedlayer 10 can be improved. - In case of obtaining the distance between the centers of gravity of the open pores, the step surface of the
ceramic substrate 3 or the tip end surface of theprotrusion part 3a is polished with diamond abrasive grains to obtain a mirror surface. Here, an arithmetic mean roughness Ra of the mirror surface is set to 0.2 µm or less by using a measurement method in accordance with JIS B 0601: 2013. A part where the size and distribution of the open pores are observed on average is selected from the mirror surface, and an optical microscope is used with a magnification of 200 times to measure an area of, for example, 1.5 × 105 µm2 as a measurement area. - By using the measurement area as a measurement object, a method called a distance between centers of gravity of an image analysis software "A-ZOKUN (ver 2.52)" (registered trademark, produced by Asahi Kasei Engineering Corporation, and hereinafter, indicated by the image analysis software) is applied, and the distance between the centers of gravity of the open pores adjacent to each other can be obtained. The distance between the centers of gravity of the open pores in the present disclosure is a linear distance connecting the centers of gravity of the open pores.
- To measure the equivalent circle diameter of the open pores, a method called a particle analysis of the image analysis software is applied to the above measurement area as an object
- As setting conditions for the distance between the center of gravity method and the particle analysis, for example, brightness is set to be dark, binarization method is set to be manual, a small figure removal area is set to be 1 µm2, and a noise removal filter is set to be present, and then a threshold value should be set in such a way that a marker appearing on the screen matches the shape of the open pore. The threshold value is, for example, 155.
- One of embodiments of a method for manufacturing the hermetic terminal of the present disclosure is described below.
- A first tube body, a second tube body, and a ceramic substrate in which a conductive member is inserted into a through hole are prepared.
- The ceramic substrate can be obtained by the following manufacturing method.
- First, aluminum oxide powder, which is the main component, magnesium hydroxide, silicon oxide, calcium carbonate, and zirconium oxide powders, a dispersant to disperse the aluminum oxide powder as needed, and an organic binder are wet-mixed by a ball mill, a bead mill, or a vibration mill to obtain a slurry.
- Here, the mean particle size (D50) of the aluminum oxide powder is 3 µm or less, preferably 1 µm or less, and in a total of 100 mass% of the above-described powders, the content of the magnesium hydroxide powder is 0.87 mass% to 1.07 mass%, the content of the silicon oxide powder is 6.1 mass% to 7.5 mass%, the content of the calcium carbonate powder is 2.5 mass% to 3.1 mass%, and the content of the zirconium oxide is 1.0 mass% to 1.3 mass%.
- The time for wet mixing is, for example, 40 to 50 hours. Examples of the organic binder include paraffin wax, wax emulsion (wax and emulsifier), PVA (polyvinyl alcohol), PEG (polyethylene glycol), and PEO (polyethylene oxide).
- Next, the slurry obtained by the above-described method is spray-granulated to obtain granules, and then the granules are molded by a powder press molding method or a cold isostatic pressing method to obtain a molded body in a disk shape. Then, a ceramic substrate can be obtained by forming a through hole and step parts or a protrusion part by a cutting process, and sintering the molded body in which the through holes and the like are formed at a temperature of 1550°C or more and 1750°C or less.
- To obtain a ceramic substrate provided with a plurality of open pores on the step surface where the metallized layer is included or on the tip end surface of the protrusion part, and where the value obtained by subtracting an average value of the equivalent circle diameters of the open pores from a distance between centers of gravity of the open pores is 20 µm or more and 50 µm or less, a molded body is manufactured by the cold isostatic pressing method with a molding pressure of 98 MPa or more and 147 MPa or less, and sintered at a temperature of 1580°C or more and 1750°C or less.
- A coating layer composed of nickel, copper, or a copper-nickel alloy as a main component may be formed in advance on at least one of the connecting part of the conductive member with the ceramic substrate, the connecting part of the first tube body with the second tube body, the connecting part of the first tube body with the ceramic substrate, the connecting part of the second tube body with the first tube body, and the connecting part of the ceramic substrate with the first tube body by a plating method.
- The above-described coating layer may be formed on the entire surface of each of the conductive member, the first tube body, and the second tube body.
- If at least one of the end of the second tube body on the side of the first tube body and the end of the first tube body on the side of the second tube body includes a step surface, the above-described coating layer may be formed on the step surface.
- In at least one of the connecting part of the ceramic substrate with the conductive member and the connecting part of the ceramic substrate with the first tube body the metallized layer may be formed in advance by a Mo-Mn method, and then a coating layer composed of nickel, copper or the copper-nickel alloy as a main component by the plating method.
- The above-described coating layer may be formed on the entire outer peripheral surface of the ceramic substrate.
- Then, by applying a brazing material including silver such as BAg-8, BAg-8A, BAg-8B as a main component to each of the opposing connecting parts and performing a heat treatment at an appropriate temperature, the connecting parts are connected, and the hermetic terminal of the present disclosure can be obtained.
- Here, the appropriate temperature is the brazing temperature described in JIS Z 3281: 1998.
- Further, to obtain a hermetic terminal provided with a flange, a first tube body, a ceramic substrate in which a conductive member is inserted into a through hole, and a second tube body to which a collar part is attached are prepared.
- Then, after connecting each of the opposing connecting parts with the above-mentioned brazing material, the flange is attached to the outer peripheral side of the collar part, and the hermetic terminal of the present disclosure can be obtained by welding and fixing by the TIG (Tungsten Inert Gas) welding method.
- The hermetic terminals of the present disclosure obtained by the above-mentioned manufacturing method have high embrittlement to hydrogen, and can therefore be used for a long period of time.
- The present invention is not limited to the foregoing embodiment, and various changes and improvements can be made in accordance with the technical idea of the present invention.
- For example, in the above-described embodiment, an example that the
second tube body 5 is connected to theflange 6 via thecollar part 8 is shown, but thesecond tube body 5 may be directly connected to theflange 6. Further, in the above-described embodiment, an example that thecollar part 8 has a U-shaped cross section is shown, but thecollar part 8 may have another shape such as an L-shaped cross section or the like. If thecollar part 8 has a U-shape, an L-shape, or the like, the bent part may be curved. Additionally, in the above-described embodiment, an example that thecollar part 8 is connected to the second recessedpart 6d of theflange 6 is shown, but theflange 6 may not include the second recessedpart 6d, and thecollar part 8 may be connected to the inner peripheral surface of theflange 6 or the main surface at the side of thesecond tube body 5. Description of the Reference Numeral -
- 1
- conductive member
- 2
- through hole
- 3
- ceramic substrate
- 3a
- protrusion part
- 3b, 3c
- main surface
- 4
- first tube body
- 5
- second tube body
- 6
- flange
- 7
- connecting layer
- 8
- collar part
- 9
- step part
- 10
- metallized layer
- 20
- hermetic terminal
Claims (12)
- A hermetic terminal comprising a plate-shaped ceramic substrate provided with a through hole for inserting a columnar conductive member in a thickness direction, a first tube body surrounding the ceramic substrate, and a second tube body coaxially connected with the first tube body, wherein the first tube body comprises a fernico-type alloy, an Fe-Ni alloy, an Fe-Ni-Cr-Ti-Al alloy, an Fe-Cr-Al alloy or an Fe-Co-Cr alloy, and the second tube body comprises an austenitic stainless steel with a nickel content of 10.4 mass% or more.
- The hermetic terminal according to claim 1, wherein at least one of the end of the second tube body on the side of the first tube body and the end of the first tube body on the side of the second tube body has a step surface.
- The hermetic terminal according to claim 1 or 2, wherein the second tube body is provided with a coating layer composed of nickel, copper or a copper-nickel alloy as a main component at least on a connecting part with the first tube body.
- The hermetic terminal according to any one of claims 1 to 3, wherein an inner peripheral surface of the first tube body is located outward rather than an outer peripheral surface of the second tube body.
- The hermetic terminal according to any one of claims 1 to 4, further comprising a flange connected to the outer peripheral surface of the second tube body and surrounding the second tube body.
- The hermetic terminal according to claim 5, wherein the flange is provided with a second recessed part on the side of the second tube body, a collar part having a U-shaped cross section along an axial direction of the second tube body is attached to the second recessed part, and the second tube body and the flange are connected to each other via the collar part, and wherein the flange is provided with a first recessed part at the side of the first tube body, and a connecting part between the ceramic substrate and the first tube body is located away from the second tube body than a bottom surface of the first recessed part.
- The hermetic terminal according to claim 6, wherein the collar part comprises an austenitic stainless steel with a nickel content of 10.4 mass% or more.
- The hermetic terminal according to any one of claims 1 to 7, wherein a plurality of the conductive members are individually inserted into a plurality of the through holes, and the ceramic substrate is provided with step parts recessed from at least one of the main surfaces around the through holes.
- The hermetic terminal according to claim 8, wherein the ceramic substrate comprises the step parts recessed from both of the main surfaces around the through holes, one of the step parts is further provided with a metallized layer on the step surface, and the step part on the side provided with the metallized layer is deeper than the step part on the side not provided with the metallized layer.
- The hermetic terminal according to claim 9, wherein a depth of the step part on the side provided with the metallized layer is 45% or less of a thickness of the ceramic substrate.
- The hermetic terminal according to any one of claims 1 to 7, wherein the plurality of conductive members are individually inserted into the plurality of through holes, and the ceramic substrate is provided with a protrusion part extending from at least one of the main surfaces around the through holes.
- The hermetic terminal according to any one of claims 9 to 11, wherein the ceramic substrate is provided with a plurality of open pores on the step surface provided with the metallized layer or a tip end surface of the protrusion part, and a value obtained by subtracting an average value of equivalent circle diameters of the open pores from a distance between centers of gravity of the open pores is 20 µm or more and 50 µm or less.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018169868 | 2018-09-11 | ||
PCT/JP2019/035503 WO2020054703A1 (en) | 2018-09-11 | 2019-09-10 | Hermetic terminal |
Publications (3)
Publication Number | Publication Date |
---|---|
EP3852199A1 true EP3852199A1 (en) | 2021-07-21 |
EP3852199A4 EP3852199A4 (en) | 2022-06-08 |
EP3852199B1 EP3852199B1 (en) | 2023-08-30 |
Family
ID=69776783
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP19861121.2A Active EP3852199B1 (en) | 2018-09-11 | 2019-09-10 | Hermetic terminal |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP3852199B1 (en) |
JP (1) | JP7037662B2 (en) |
WO (1) | WO2020054703A1 (en) |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6074479U (en) * | 1983-10-28 | 1985-05-25 | 京セラ株式会社 | vacuum terminal |
JPH0212682A (en) * | 1988-06-30 | 1990-01-17 | Canon Inc | Storage medium |
JP2543759Y2 (en) * | 1991-04-10 | 1997-08-13 | 京セラ株式会社 | Vacuum terminal |
JP2519642B2 (en) | 1992-11-24 | 1996-07-31 | 日立原町電子工業株式会社 | Airtight connector manufacturing method |
JPH07282621A (en) * | 1994-04-06 | 1995-10-27 | Rohm Co Ltd | Electrode material, chip-shaped electronic part using this electrode material and surface treating method for electrode layer |
JP2005235577A (en) | 2004-02-19 | 2005-09-02 | Kyocera Corp | Airtight terminal |
JP2005235576A (en) | 2004-02-19 | 2005-09-02 | Kyocera Corp | Airtight terminal |
JP4439389B2 (en) | 2004-12-22 | 2010-03-24 | 京セラ株式会社 | Airtight terminal |
JP4614905B2 (en) | 2005-04-18 | 2011-01-19 | 京セラ株式会社 | Airtight terminal |
JP4684110B2 (en) | 2006-01-30 | 2011-05-18 | 京セラ株式会社 | Airtight terminal |
US10633733B2 (en) | 2010-02-04 | 2020-04-28 | Harumatu Miura | High-nitrogen stainless-steel pipe with high strength high ductility, and excellent corrosion and heat resistance |
-
2019
- 2019-09-10 EP EP19861121.2A patent/EP3852199B1/en active Active
- 2019-09-10 JP JP2020546024A patent/JP7037662B2/en active Active
- 2019-09-10 WO PCT/JP2019/035503 patent/WO2020054703A1/en unknown
Also Published As
Publication number | Publication date |
---|---|
EP3852199A4 (en) | 2022-06-08 |
WO2020054703A1 (en) | 2020-03-19 |
JP7037662B2 (en) | 2022-03-16 |
EP3852199B1 (en) | 2023-08-30 |
JPWO2020054703A1 (en) | 2021-08-30 |
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