Classifications

• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
  • B23K26/0622—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
  • B23K26/0624—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
  • B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
  • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
  • B23K26/0652—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising prisms
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
  • B23K26/0673—Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/073—Shaping the laser spot
  • B23K26/0734—Shaping the laser spot into an annular shape
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/073—Shaping the laser spot
  • B23K26/0736—Shaping the laser spot into an oval shape, e.g. elliptic shape
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
  • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
  • B23K26/073—Shaping the laser spot
  • B23K26/0738—Shaping the laser spot into a linear shape
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
  • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
  • B23K26/08—Devices involving relative movement between laser beam and workpiece
  • B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
  • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
  • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
  • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
  • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
  • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
  • G02B26/10—Scanning systems
  • G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
  • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
  • G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
• • G—PHYSICS
  • G02—OPTICS
  • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
  • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
  • G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
  • G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another

Definitions

• the invention relates to a method for providing at least two spatially offset laser beams from an input laser beam.
• the invention relates to an optical device for implementing the method according to the first aspect.
• the invention relates to a machining system.
• Drilling and laser cutting methods are known. In order to traverse the surface to be machined with the laser beam, these methods now use more scanning heads (for example: deflection means, scanner) rather than means for moving the target. This choice is primarily followed for reasons of ease of use and speed of machining. Due to the Gaussian distribution of the laser beam, the use of a scanner results in machining operations with conical cutting faces, that is to say, they are not straight. For some applications, this is not acceptable.
• precession heads In order to control or remove the taper of the cutting faces, precession heads have been developed. These precession heads are used to control the angle of attack of the laser beam on the target to be machined. This control of the angle of attack allows better control of the taper of the cutting faces.
• one of the aims of the present invention is to provide a method making it possible to exploit a powerful laser source for precession machining without generating or reducing harmful thermal effects.
• the inventors propose a method for providing at least a first and a second laser beam spatially offset with respect to an input laser beam (for example laterally offset) and comprising the following steps:
• a spatial offset unit for providing a laser beam offset (for example laterally offset) relative to said input laser beam, said offset laser beam having a main propagation axis A and being able to describe a circle in a plane perpendicular to this main propagation axis A, said spatial shift unit being able to maintain the same polarization between said input laser beam and said offset laser beam;
• a separation unit comprising a first separation module comprising a first polarization separation means for obtaining from said offset laser beam:
• the first laser beam spatially offset by transmission (for example laterally offset) having a first main axis of propagation
• the second laser beam spatially offset by reflection having a second main axis of propagation; said separation unit being configured so that said first and second spatially offset laser beams are capable of describing a circle in a plane perpendicular to said first and second main axes of propagation respectively.
• the method according to the invention further comprises providing (for example after step a.) A system for adjusting the collimation (this makes it easier to adapt to different thicknesses of target, sample).
• the method according to the invention is preferably intended for laser machining of parts, more preferably, to laser micro-machining of parts.
• the method of the invention allows to obtain from a laser source and a lateral shift unit, two laser beams offset laterally so as to be able to perform two machining operations with two separate laser beams from a single source and laterally offset by a single lateral offset unit. Thanks to the invention, it is possible to exploit a powerful laser source without generating or reducing harmful thermal effects because the source laser beam is subdivided into several laser beams downstream.
• the lateral offset imposed by the spatial offset unit can be kept for the first and second laser beams offset laterally. This conservation of the offset is possible thanks to the combination of the lateral offset unit capable of maintaining the same polarization between the input laser beam and the offset laser beam and the polarization separation unit.
• the optical device of the invention is capable of generating a lateral offset in one dimension, that is to say that the offset light beam describes a line in a plane perpendicular to the main direction of propagation of the beam offset laser.
• the lateral offset unit allows an offset in two dimensions, that is to say that the offset light beam describes a circle, an ellipse, ... in a plane perpendicular to the main direction of propagation. of the offset laser beam.
• the lateral offset means that the laser beam is always offset laterally with respect to a main propagation direction of the offset laser beam.
• the offset laser beam propagates parallel to a main direction of propagation.
• the offset laser beam propagates parallel to the main propagation axis A. Therefore, when the lateral offset unit generates an offset such that the offset laser beam is able to describe a circle in a plane perpendicular to said axis of main propagation A, the offset laser beam propagates by turning around the main propagation axis A.
• An advantage of the invention is that the separation unit allows the conservation of the lateral offset around a main propagation direction A.
• the separation unit allows separation towards a first and towards a second laser beams offset laterally along a first and a second main axis of propagation respectively so that the laser beams offset laterally and the main axis of propagation maintain their respective lateral offsets.
• Such a result is obtained through the use of a lateral shift unit which is able to maintain the same polarization between the input laser beam and the offset laser beam and which does not induce any angular offset of the offset laser beam. This is essential in order to be able to separate the beam while keeping the lateral offset with great fidelity.
• the separation unit is relatively simple and compact. The separation unit also offers good control over the power distribution of the separate beams.
• Another advantage of being able to separate a laser beam offset by the method of the invention is to be able to carry out several machining operations by precession using the same precession module (spatial shift unit) and by modulating the flux (intensity ) of each spatially offset laser beam. It is also easy, with the solution of the invention, to stack several separation units to generate 2, 3, 4 or more offset laser beams.
• a circle described by the offset laser beam is centered on the intersection of the main axis A with the plane perpendicular to the main axis A.
• the spatial shift unit is downstream from the laser source.
• the separation unit is positioned downstream of the spatial shift unit.
• An advantage of the method of the invention is to provide an offset unit which does not modify the polarization of the offset laser beam. Therefore, it is possible to use polarization means, for example a polarizing cube, a polarization blade, a brewster blade ... to separate the offset laser beam into at least two offset laser beams.
• the advantage of the spatial shift unit of the invention is that it does not rotate the polarization of the laser beam. Indeed, there are spatial shift units which induce a rotation of the polarization, which makes the separation of the beam with polarizing optics particularly complex, unless there are polarization separation means which would rotate in synchronism with the beam. Thanks to the spatial shift unit included in the invention, it is therefore possible to shift the beam spatially (for example laterally) without the beam rotating on itself, so that its polarization remains constant over time.
• the spatial offset unit is able to modify a spatial offset between the input laser beam and the offset laser beam.
• said first main axis of propagation is perpendicular to said second axis of propagation.
• a polarizing cube or a polarizing plate makes it possible to transmit and reflect a light beam with an angle of 90 °, preferably when the laser beam offset at an incidence of 45 ° with the surface of the polarizing element.
• the first separation module comprises a polarization management means upstream of the first polarization separation means.
• the advantage of using polarization management means for the separation of an offset laser beam is to be able to adjust / control the power of the offset laser beam which is reflected and the power which is transmitted thanks to at least one delay blade.
• the polarization management means (a delay plate for example) is positioned in upstream of the polarization separation means making it possible to separate the offset laser beam.
• a rotation of this at least one delay plate around its optical axis makes it possible to modify the polarization of the offset laser beam so as to modify the transmitted fraction and the reflected fraction.
• Such separation means comprising a polarizing means associated with at least one delay plate can be used in cascade in order to obtain more than two beams offset laterally.
• the polarization management means comprises a delay plate, preferably a half-wave plate, so that a rotation of said delay plate modulates a transmitted power and a reflected power by the first polarization separation means.
• said polarization management means comprises two delay blades, preferably two quarter wave blades, so that a rotation of at least one of the two quarter wave blades induces a modulation of a transmitted power. and of a power reflected by said first polarization separation means.
• the polarization management means comprises two quarter-wave plates.
• the use of two quarter-wave plates makes it possible to separate an offset laser beam having a circular polarization with a polarization means so as to obtain 50% of the power of the laser beam offset towards the transmitted beam and 50% towards the reflected beam by estimating that 100% of the offset laser beam is transmitted and reflected.
• by rotating one and / or the other quarter-wave plate it is possible to distribute 75% or 2/3 towards the reflected beam and 25% or 1/3 respectively towards the beam transmitted or vice versa.
• Such a distribution makes it possible to carry out beam separation in cascade so as to be able to obtain from the laser source and the shift unit, three or four separate laser beam having an equal power so as to be able to carry out machining operations simultaneously with equal laser powers. This is particularly advantageous from the point of view of productivity and quality.
• the advantage of the two quarter-wave plates is that it can distribute in a controlled manner an offset laser beam having an elliptical polarization.
• the at least one delay blade is a half wave blade.
• a half-wave plate makes it possible to separate an offset laser beam having a linear polarization with a polarization means so as to obtain 50% of the power of the laser beam offset towards the transmitted beam and 50% towards the beam reflected by estimating that 100% of the offset laser beam is transmitted and reflected.
• a slight modification makes it possible to fine-tune the transmitted and reflected powers so that they are a value strictly equal to or corresponding to a predefined value.
• By rotating the half-wave plate it is possible to distribute 75% or 2/3 towards the reflected beam and 25% or 1/3 respectively towards the transmitted beam or vice versa.
• Such a distribution makes it possible to carry out beam separation in cascade so as to be able to obtain from the laser source and the shift unit, three or four separate laser beam having an equal power so as to be able to carry out machining operations simultaneously with equal laser powers. This is particularly advantageous from the point of view of the productivity and quality of a machining system comprising the present device.
• the method according to the invention comprises the following additional steps:
• first and second deflection means positioned downstream of said separation unit for orienting said first and second laser beams spatially offset towards at least one workpiece
• first and second focusing means positioned downstream of said first and second deflection means respectively, so as to focus said first and second laser beams spatially offset on said at least one workpiece.
• deflection means for example galvanometric heads, scanners, motorized mirrors for deflecting an offset laser beam from the separation is possible with the combination of the lateral offset unit and the unit of seperation. This is made possible because neither the lateral offset unit nor the separation unit induces an angular offset relative to a main propagation axis around which the laser beam is offset and describes a circular path parallel to these axes. spread main. Thus the use of a scanner head is particularly suitable.
• the focusing means allow machining by precession using the angular offset induced by the laser beam focusing means offset laterally and describing a circle on the focusing means, for example a F-theta optics.
• one of the aims of the present invention is to provide an optical device for increasing the productivity of a laser system while guaranteeing machining with a controlled taper.
• Another object of the present invention is to provide a device for supplying several laser beam offset laterally from a laser beam offset laterally in order to be able to carry out several machining operations simultaneously from a single laser beam offset laterally.
• an optical device for laser machining comprising:
• a spatial shift unit for obtaining from an input laser beam an offset laser beam having a main propagation axis A and capable of describing a circle in a plane perpendicular to this main propagation axis A;
• a separation unit comprising a first separation module comprising a first polarization separation means for obtaining from said offset laser beam:
• said spatial shift unit being able to maintain the same polarization between said input laser beam and said offset laser beam;
• said separation unit being configured so that said first and second spatially offset laser beams are capable of describing a circle in a plane perpendicular to said first and second main axes of propagation respectively.
• the optical device of the invention further comprises a collimation adjustment system which makes it easier to adapt to different thicknesses of target, sample.
• the optical device of the invention uses a spatial shifting unit (for example lateral) which when associated with focusing means is well suited for drilling and cutting.
• the advantage of the spatial displacement unit of the device of the invention is that it can be used with mechanical displacement means of a part as well as with deflection means, ie a scanner, a galvanometric head with the same ease of use than conventional deflection means.
• An advantage of the spatial displacement (for example lateral) unit included in the invention is that it is compatible with the use of scanners and F-Theta objectives.
• the device of the invention therefore makes it possible to perform machining with machining fields up to 30 x 30 mm, with a controlled taper (positive, zero or negative) only with the deflection device.
• the device of the invention comprises a separation unit placed after the lateral shift unit so as to be able to carry out several machining operations with laser precession simultaneously using scanners with a single laser source and a single lateral shift unit .
• the optical device of the invention allows the machining of at least two parts with a single laser source and a single lateral shift unit making it possible to generate the precession of at least two laser beams on at least one part to be machined.
• the advantage of the optical device of the invention is that it makes it possible to machine at least two parts or substrates simultaneously without requiring a lateral displacement unit per part machined simultaneously, thus allowing identical or even different machining operations at a lower cost.
• the advantage of the machining device of the invention is that the spatial offset (for example lateral) unit does not modify the polarization of the offset laser beam. Therefore, it is possible to use polarization means, for example a polarizing cube, a polarization blade, a brewster blade ... to separate the offset laser beam into at least two offset laser beams.
• the advantage of the spatial shift unit of the device of the invention is that it does not rotate the polarization of the laser beam. This is particularly advantageous in comparison with other existing spatial shifting devices which induce a rotation of the polarization, and therefore of an impossibility of separating the beam with polarizing optics, unless there are polarization separation means which would rotate. completely synchronized with the beam (very difficult to implement). Thanks to the spatial shift unit included in the invention, it is therefore possible to shift the beam spatially (for example laterally) without the beam rotating on itself, so that its polarization remains constant over time.
• said first separation module comprises: a first polarization separation means to obtain:
• the optical device of the invention further comprises a mirror for reflecting said first or second spatially offset laser beam.
• Such a mirror makes it possible to have the first and the second laser beam spatially offset parallel in fine so that they can be sent in the same direction, preferably towards two deflection means positioned side by side.
• said first polarization separation means is chosen from one of the following polarization means:
• the first separation module comprises a polarization management means upstream of said first polarization separation means.
• said polarization management means comprises a delay plate, preferably a half-wave plate, so that a rotation of said delay plate modulates a transmitted power and a reflected power by said first polarization separation means.
• the rotation of a delay plate is carried out by rotating the plate on itself, that is to say around its optical axis.
• said polarization management means comprises two delay plates, preferably two quarter wave plates, so that a rotation of at least one of the two quarter wave plates induces a modulation of a power transmitted and a power reflected by said first polarization separation means.
• the spatial shift unit comprises:
• a first lateral shift unit for obtaining a laser beam offset in a direction X in a plane perpendicular to said main propagation axis A;
• a second lateral offset unit for obtaining a laser beam offset in a direction Y in a plane perpendicular to said main propagation axis A;
• said first and said second lateral shift unit being optically coupled so that they are capable of shifting an input laser beam to obtain an offset laser beam capable of describing a circle in a plane perpendicular to this main propagation axis A.
• said first and said second lateral offset unit comprises a blade capable of being rotated so as to shift a laser beam to obtain a laser beam offset in an X and Y direction respectively in a plane perpendicular to said main propagation axis A.
• said first or said second lateral shift unit comprises a blade capable of being rotated so as to shift a laser beam to obtain a laser beam offset in an X or Y direction respectively in a plane perpendicular to said main propagation axis A.
• the first and the second lateral offset unit comprises:
• an optical feedback system configured to redirect a first input reflection of the laser beam on said movable mirror to said movable mirror so as to obtain, for all the possible positions and orientations of said movable mirror, a beam offset in a direction X and Y respectively.
• the first or the second lateral shift unit comprises:
• an optical feedback system configured to redirect a first input reflection of the laser beam on said movable mirror to said movable mirror so as to obtain, for all the possible positions and orientations of said movable mirror, a beam offset in a direction X or Y respectively.
• the first and / or the second lateral shift unit comprises:
• a fourth output reflection on said movable mirror makes it possible to obtain, for all the possible positions and orientations of the movable mirror, a beam offset in a direction X and / or Y respectively.
• the optical return system comprises:
• a fourth output reflection on the movable mirror makes it possible to obtain, for all the possible positions and orientations of the movable mirror, a beam offset in a direction X and / or Y respectively.
• the first and / or the second lateral shift unit comprises:
• said normal of said first and second movable mirrors being parallel for all the possible positions and orientations of the first and second movable mirrors, and, the first and second movable mirrors being configured so:
• said first and said second lateral offset unit comprises:
• the normals of said first and second movable mirrors being parallel for all the possible positions and orientations of the first and second movable mirrors, and, the first and second movable mirrors being configured so:
• the spatial shift unit comprises:
• a first lateral shift unit comprising:
• a first movable mirror so that its normal is able to describe a trajectory in a two-dimensional space
• o a second movable mirror so that its normal is able to describe a trajectory in said two-dimensional space
• the normals of the first and second movable mirrors being parallel for all the possible positions and orientations of the first and second movable mirrors, and, the first and second movable mirrors being configured so:
• a second lateral shift unit comprising:
• a blade capable of being rotated so as to offset a laser beam to obtain a laser beam offset in an X or Y direction respectively in a plane perpendicular to the main axis of propagation A;
• the first and second side shift units are configured so that the blade is positioned between the first and second movable mirror so that the first reflection on the first movable mirror is directed to the second movable mirror passing through the blade .
• the spatial shift unit comprises:
• the normals of the first and second movable mirrors being parallel for all the possible positions and orientations of the first and second movable mirrors, and, the first and second movable mirrors being configured so:
• the spatial shift unit comprises:
• an optical feedback system configured to redirect a first input reflection of the laser beam on the movable mirror towards the movable mirror so as to obtain for all possible positions and orientations of the movable mirror, an offset laser beam capable of describing a circle in a plane perpendicular to this main axis of propagation A.
• the optical feedback system is a retro-reflection system, preferably a retroreflector.
• said spatial shift unit comprises:
• said spatial shift unit being configured so that said input laser beam and said normal of said mirror are separated by an angle between 0 ° and 15 °, preferably between 0.01 ° and 10 °, preferably between 0, 1 ° and 8 ° and even more preferably between 0.1 ° and 3 °, for all the possible positions and orientations of said movable mirror;
• An advantage of this embodiment is that it is particularly well suited to using polarization to modulate the flux (or intensity) on each of the channels, that is to say towards the first, second, third , ... spatially offset laser beams. It is then possible and easily feasible to stack different beam separation systems to generate 2, 3, 4 spatially offset laser beams. So we have something very modular.
• the spatial shift unit of this embodiment retains the output polarization. Obtaining the different spatially offset laser beams using a polarization separation principle is therefore possible. This is not the case with other known systems.
• the retro-reflection system is movable in translation relative to the mirror. It is also possible to provide a mirror movable in translation relative to the retro-reflection system.
• the advantage of the shift unit included in the invention is that it is relatively light and compact.
• the offset upstream of the separation unit, deflection means and focusing means and therefore the angle of attack on the substrate can be easily controlled by the relative positioning of the mirror with the retro-reflection system.
• the shift unit of the invention could be called a two-dimensional (2D) shift unit.
• the offset laser beam can represent a trajectory (or movement) in a three-dimensional space upstream of the separation unit.
• the lateral offset unit of the invention is capable of imposing a 2D offset (in at least two non-parallel directions) between an offset laser beam and a direction of main propagation of the laser beam (and not just in a way).
• This 2D property for the offset is possible with the offset unit of the invention because the normal to the mirror is able to represent a trajectory in a three-dimensional space, and also thanks to the use of the retro-reflector (or retroreflector).
• the retroreflection system is capable of providing a second incident laser beam to the movable mirror which is parallel to a first reflected laser beam for all possible positions and orientations of the movable mirror. It is possible, with the shift unit of the invention, to have a second incident laser beam on the movable mirror parallel to a first reflected laser beam whatever the plane defined by the first incident laser beam and the normal mirror to mobile. This is possible thanks to the use of the retro-reflection system. Since a first reflected laser beam and a second incident laser beam have opposite directions along the same line, it could be said that the first reflected laser beam and the second incident laser beam are antiparallel. Two flat mirrors do not constitute a retro-reflection system because they are not capable of providing a second incident laser beam on the movable mirror parallel to the first reflected laser beam whatever the plane defined by the first incident laser beam and the normal to the mirror mobile.
• the device further comprises:
• a second separation module for obtaining from said first laser beam offset laterally or from said second laser beam offset laterally, a third laser beam offset laterally.
• the second separation module comprises:
• the second separation module comprises at least one delay plate positioned between said first separation module and said second polarizing plate such that a rotation thereof causes modulation of the distribution of light power from said first or second laser beam offset laterally towards said first and second or towards said second and third laser beam offset laterally.
• the device of the invention further comprises:
• a third separation module to obtain from said one of the following offset laser beams: o first laser beam shifted laterally,
• the third separation module comprises:
• said fourth laser beam offset laterally.
• the third separation module comprises a third half-wave plate positioned between said first separation module and said third polarizing blade or between said second separation module and said third polarizing blade such as a rotation thereof.
• ci causes a modulation of the distribution of a light power of said second or third laser beam offset laterally towards said third and fourth laser beam offset laterally.
• one of the aims of the present invention is to provide an optical machining system for performing precession machining with at least two laser beams coming from a single laser source and spatially separated (for example laterally ) by a single spatial offset unit, so that several machining operations can be carried out simultaneously from a single offset laser beam.
• a multiple machining system comprising:
• a laser source for generating an input laser beam
• first and second deflection means positioned downstream of said separation unit so as to impose an angular offset on said first and second spatially offset laser beams
• the machining system of the invention further comprises a deflection means control unit capable of transmitting a signal to a deflection means, said control unit being configured to emit a common control signal towards each of the deflection means.
• the advantage of the optical system of the invention is that it can control at least two scanners with the same controller in order to be able to carry out identical machining on the same part or on at least two separate parts. This is advantageous because the inventors have demonstrated that a single controller can control at least two scanners with the same signal.
• the system allows a reduced number of scanner controllers to be carried on board. Alternatively, it is possible to control the scanners with different controllers.
• the machining system of the invention comprises a deflection means control unit capable of transmitting a different control signal to said first deflection means and to said second deflection means.
• the machining system of this preferred embodiment further comprises power modulators after the separation unit in order to be able to have different firing signals.
• said focusing means are F-theta lenses.
• the F-theta focusing means are known to those skilled in the art and allow focusing in the same plane of the light beam offset with a controlled angle of incidence on the workpiece, whatever the orientation imposed. by the scanner.
• FIG. 1 shows an embodiment of the optical device according to the invention
• FIG. 1 shows an embodiment of the optical system according to the invention
• FIG.3a, 3b, 4a, 4b and 4c show preferred embodiments of the device and the optical system according to the invention
• FIG. 5 shows an embodiment of the device and the optical system according to the invention
• FIG. 6a and 6b show embodiments of the device and the optical system according to the invention
• FIG. 7a, 8a, 8b, 8c, 8d, 8e show embodiments of the spatial shift unit
• Figs. 7b, 7c, 7d show embodiments of the lateral shift unit.
• Figure 1 shows an exemplary embodiment of the optical device according to the invention.
• the optical device according to the invention comprises a lateral offset unit 1 making it possible to offset laterally a laser beam relative to a main axis A.
• An example of offset which is particularly useful for laser machining applications is an offset relative to the main axis A having a constant radius and making a revolution around the main axis A without cutting it.
• the offset laser beam 7 is then parallel to the main axis A for any position of the offset laser beam 7 around the axis principal A.
• a projection of the offset laser beam 7 in a plane perpendicular to the principal axis A describes a circle.
• Such a projection can also describe an ellipse or a line.
• the offset laser beam 7 Downstream of the lateral displacement unit, the offset laser beam 7 is directed towards a separation unit 2 of the beam 7 so that from the offset beam 7, it is possible to obtain two laterally offset beams, namely a first beam offset laterally 10 and a second beam offset laterally 20.
• These two beams 10 and 20 separated by the separation unit 2 are for example sent to deflection means and / or focusing means.
• the separation unit comprises a first separation module 50 comprising at least one delay plate 55 and a polarizing cube 51, so that the offset laser beam 7 passes through the at least one delay plate 55 and then enters the polarizing cube so that the offset laser beam 7 is separated into a fraction of reflected beam 20 and a fraction of transmitted beam.
• the first laterally offset beam 10 which corresponds to the transmitted fraction is transmitted so that it is always laterally offset with respect to a first main propagation axis 11.
• the second laterally offset laser beam 20 corresponds to the reflected fraction so that it is always offset laterally with respect to a second main propagation axis 21.
• the lateral offset of the first 10 and second 20 laser beams separated laterally is kept with respect to their propagation axis respectively first 11 and second 21.
• the propagation axis principal of the offset laser beam 7 before it enters the separating cube 51 corresponds to the first main axis of propagation of the transmitted offset laser beam.
• the main propagation axes are transmitted and reflected in the same way as a laser beam offset by the polarizing cube 51.
• Figure 2 shows an embodiment of the optical machining system according to the invention.
• the optical system according to the invention comprises, in the direction of propagation of a laser beam, a laser source 3 upstream of a collimator 6 which is optional, a lateral shift unit 1, a separation unit 2.
• a first offset laser beam 10 leaves the separation unit 2 and is directed towards a first deflection means 15 so as to be directed towards a workpiece 201, 211 in passing through first focusing means 17.
• a second offset laser beam 20 which leaves the separation unit 2 is directed towards a second deflection means 25 so as to be directed towards a workpiece 201, 211 passing through through first focusing means 24.
• a preferred embodiment comprises a mirror 4 positioned with an angle of 45 ° between its normal and the second axis main propagation of the offset laser beam 20 in order to make the first 10 and second 20 offset laser beams parallel.
• the separation unit 2 comprises a second separation module 60.
• the second separation module 60 is identical to the first separation module 50 and in fact comprises at least one delay blade 65 and a separation means for polarization 61.
• the second separation module 60 is positioned so as to separate the second offset laser beam 20 into a second offset laser beam 20 and into a third offset laser beam 30 about a main propagation axis 31.
• the second separation module 60 is positioned so as to separate the first offset laser beam 10 into a third offset laser beam 30 around a main propagation axis 31.
• the embodiments described in FIG. 3a and 3b describe two embodiments of the separation unit 2 allowing a separation of an initial offset laser beam towards three offset laser beams 10, 20 and 30.
• the three offset laser beams being intended to be used for performing three machining operations simultaneously.
• FIGS. 4a, 4b and 4c are based on the embodiments of FIGS. 3a and 3b, so that the separation unit 2 comprises a third separation means 70 for separating an incident offset laser beam 7 into four offset laser beams 10, 20, 30 and 40.
• a third separation module 70 is identical to the first separation module 50 and in fact comprises at least one delay plate 75 and a biasing means 71.
• the second separation module 60 is positioned so as to separate the second offset laser beam 20 into a second offset laser beam 20 and into a third offset laser beam 30 around a main propagation axis 31.
• the third separation module 70 is positioned so as to separate the third offset laser beam 30 into a fourth offset laser beam 40 about a main propagation axis 41.
• the second separation module 60 is positioned so as to separate the first offset laser beam 10 into a third offset laser beam 30 about a main propagation axis 31.
• the third separation module 70 is positioned so as to separate the second offset laser beam 20 into a fourth offset laser beam 40 about a main propagation axis 41.
• the second separation module 60 is positioned so as to separate the first offset laser beam 10 into a third offset laser beam 30 around a main propagation axis 31.
• the third separation module 70 is positioned so as to separate the first offset laser beam 10 into a fourth offset laser beam 40 about a main propagation axis 41.
• FIG. 4a, 4b and 4c describe three embodiments of the separation unit 2 allowing a separation of an initial offset laser beam towards four offset laser beams 10, 20, 30 and 40.
• the four offset laser beams being intended to be used to carry out four machining operations simultaneously.
• FIG. 5 shows an exemplary embodiment of the optical device and in particular of the optical machining system.
• the optical machining device comprises a spatial (lateral) shift unit 1 capable of spatially shifting the incident light beam 301 so that it describes a circle in a plane perpendicular to this main propagation axis A.
• the particularity of this unit spatial (lateral) offset 1 is to allow conservation of the same polarization between said input laser beam 301 and the offset laser beam 7, that is to say that the spatial (lateral) offset of the laser beam does not not turn it on itself.
• the offset laser beam 7 is then separated by the separation unit 2 as described in one of the previous figures.
• the optical machining device also comprises one or more focusing means 17, 27 for focusing the outgoing light beam 7 after its separation by the separation unit 2 on a part or a workpiece 201, 211.
• the rotational movement of the outgoing light beam 7 generated by the rotation of the mirror 119 upstream of the focusing means 17, 27 enables the precession movement of the outgoing light beam 7 to be produced downstream of the focusing means 17, 27.
• the precession movement of the light beam outgoing 7 is preferably produced at a point, a spot or a small surface on a substrate 201, 211 intended to be structured or machined.
• the precession movement is illustrated in Figures 2, 3a, 3b, 4a, 4b, 4c, 5, 6a and 6b by arrows describing a portion of a circle.
• the device comprises displacement means 160 making it possible to move at least part or part 201, 211 relatively with respect to the outgoing light beam 7.
• the displacement means 160 allow for example to move the substrate in directions 101, 102 and 103
• Directions 101, 102 and 103 preferably define a three-dimensional Cartesian coordinate system.
• the directions 101 and 102 defining for example an X direction and a Y direction.
• the Z direction defining the direction of the main axis A.
• Figures 6a and 6b show embodiments of the optical device and in particular of the optical machining system of Figure 5.
• the incoming light beam 14 in the lateral shift unit 1 is a light beam generated by the laser source 3 and preferably traveling outside the lateral shift unit 1 before entering it.
• the lateral displacement unit 1 comprises a mirror 119 which makes it possible to obtain a first reflected light beam 123 by the reflection of the incident light beam 14.
• the lateral shifting unit 1 also comprises a retro-reflection system 121 which makes it possible to redirect the first reflected light beam 123 to the mirror 119.
• the second incident light beam 18 towards the mirror 119 is obtained by the passage of the first reflected light beam 123 through the retro-reflection system 121.
• the second incident light beam 18 is then reflected by the mirror 119 and forms an outgoing light beam 7.
• the unit lateral offset 1 is configured so that the outgoing light beam 7 can be spatially offset with respect to the incoming light beam 14 while remaining parallel to the direction of the incoming light beam 14 upstream of a focusing means 17, 27.
• the incoming light beam 14 and the outgoing light beam 7 are offset transversely.
• the mirror 119 can rotate completely around an axis of rotation 150 and drive means 16 allow the mirror 119 to rotate around its axis of rotation 150.
• the lateral shift unit 1 is configured so that the first incident light beam 14 and the normal 126 to the mirror 19 are separated by an angle 115 of between 0 ° and 15 ° for all the possible positions and orientation of the movable mirror 119. This angle 115 is not shown to scale in Figures 6a and 6b for reasons of clarity of the figures.
• the lateral offset unit 1 is configured so that a change in position between the mirror 119 and the retro-reflection system 121 makes it possible to induce a variation in the offset between the incoming light beams 14 and outgoing light 7.
• the optical system is for example mounted on a displacement plate 160 which can move in both directions 101 and 102. In the embodiments shown in FIG.
• the optical machining device also comprises one or more focusing means 17, 27 for focusing the outgoing light beam 7 after its separation by the separation unit 2 on a part or a workpiece 201, 211.
• the rotational movement of the outgoing light beam 7 generated by the rotation of the mirror 119 upstream of the focusing means 17, 27 enables the precession movement of the outgoing light beam 7 to be produced downstream of the focusing means 17, 27.
• the precession movement of the light beam outgoing 7 is preferably produced at a point, a spot or a small surface on a substrate 201, 211 intended to be structured or machined.
• the precession movement is illustrated in Figures 2, 3a, 3b, 4a, 4b, 4c, 5, 6a and 6b by arrows describing a portion of a circle.
• the device comprises displacement means 160 making it possible to move at least part or part 201, 211 relatively with respect to the outgoing light beam 7.
• the displacement means 160 allow for example to move the substrate in directions 101, 102 and 103
• Directions 101, 102 and 103 preferably define a three-dimensional Cartesian coordinate system.
• means for imposing a translational movement of the movable mirror 119 and or means for modifying the inclination of the movable mirror 119 may be present (mirror 119 tiltable in two or more non-parallel directions and drive means capable of modifying the inclination of mirror 119, these drive means being for example a piezoelectric system).
• the advantage of combining a translational movement and a rotational movement of the mirror 19 is to generate, by the relative rotation movement between the mirror 119 and the retro-reflection system 121, a precession of the outgoing light beam 7 downstream of the means of focusing 17, 27, and, by the relative translational movement between the mirror 119 and the retro-reflection system 121, modifying the angle of attack 107, 20 7 with the surface 202, 212 of the part 201, 211.
• drive means are electric motors, brushless motors.
• the retro-reflection system 121 included in the shift unit 1 comprises for example a Dove prism and an isosceles prism at right angles.
• Another embodiment of a retro-reflection system includes, for example, a Dove prism, a right-angle isosceles prism, a half-wave plate, a roof prism and a semi-reflecting polarizing mirror.
• FIGS. 5, 6a and 6b also include a separation unit making it possible to separate the beam towards a first 10 and a second 20 offset laser beams which are then directed towards first 15 and second 25 deflection means so as to direct the first 10 and a second 20 laser beams shifted towards one or more workpieces 201, 211.
• the focusing means 17, 27 make it possible to focus the first 10 and a second 20 laser beams offset on the surface 202, 212 of the parts 201, 211 with a angle of attack 107, 207 with respect to a normal 106, 206 to the surface 202, 212 of the parts 201, 211 respectively.
• FIG. 7a shows a spatial (lateral) shift unit 1 for spatially (laterally) shifting an incoming light beam (laser) 301 into an offset light beam (laser) 7 having a main propagation axis A and capable of describing a circle in a plane perpendicular to this main propagation axis A.
• This spatial (lateral) shift unit 1 comprises a first lateral shift unit 1X and a second lateral shift unit 1 Y configured so that:
• the first lateral shift unit 1X makes it possible to offset the incoming beam 301 into a beam shifted laterally 302 in a direction X or Y in a plane perpendicular to the main propagation axis A, and,
• the second lateral offset unit 1Y makes it possible to offset the laterally offset beam 302 in the X or Y direction not offset by the first lateral offset unit 1X into an offset beam 7 having a main propagation axis A and capable of describing a circle in a plane perpendicular to this main axis of propagation A.
• the laterally offset beam 302 describes a line in a plane perpendicular to this main propagation axis A.
• Figure 7b shows a first or a second lateral shift unit 1X, 1Y comprising a blade 410 having a refractive index greater than air or vacuum.
• the blade 410 is tilted so that for all its orientations, the incoming light beam 301 or the laterally offset light beam 302 is transmitted by the blade 410.
• the light beam 301, 302 is laterally offset 302, 7 along a line, or in a circle if the beam 302 was already offset along a line when it passed through the blade 7.
• the tilt corresponds to tilt the blade so that the beam 301 , 302 has an angle of incidence on the blade 410 which varies.
• the rounded arrow represents the tilt of the blade 410.
• the solid line blade represents a first blade position and the dashed line blade represents a second position of the blade 410.
• the offset light beam 302, 7, when it is offset by the blade 410 in the first position is shown in solid lines and when it is offset by the blade 410 in broken lines is shown in broken lines.
• Figure 7c shows a first or a second lateral shift unit 1X, 1Y comprising a movable mirror 401 (the movable mirror is preferably tiltable, that is to say orientable about an axis), a first 402 and a second 403 fixed mirror configured so:
• a fourth output reflection on said movable mirror 401 make it possible to obtain, for all the possible positions and orientations of the movable mirror, a laser beam offset 302, 7 in a direction X and / or Y respectively.
• the laser beams are for example in the same plane.
• the orientations of the mirrors can be adjusted so as to modify the trajectories of the incoming beams 301, 302 and outgoing beams 302, 7.
• Figure 7d shows a first or a second lateral shift unit 1X, 1Y comprising a first movable mirror 421 and a second movable mirror 422 so that their normals are able to describe a trajectory in a two-dimensional space.
• the first 421 and second 422 movable mirrors are movable so that their surfaces or their normals are always parallel.
• the displacement of the mirrors 421, 422 takes place in a synchronized manner so that for any displacement of the mirrors 421, 422, the outgoing beams 302, 7 are always parallel in them.
• An incoming beam 301, 302 directed towards the first movable mirror 421 undergoes a first input reflection of the laser beam on said first movable mirror 421, this reflection is directed towards said second movable mirror 422, so that a second reflection on said second movable mirror 422 makes it possible to obtain an offset laser beam 302, 7.
• the offset laser beam 302, 7 is obtained for all the possible positions and orientations of said first 421 and second 422 movable mirrors.
• the beam offset obtained is preferably along a line, that is to say that a scanning of the offset laser beam 302, 7 occurs along a straight line.
• FIG. 8a shows an embodiment of a spatial shift unit 1 comprising two lateral shift units 1X, 1Y as described in FIG. 7d.
• the incoming beam 301 is offset laterally by a first lateral offset unit 1X, into a laterally offset beam 302.
• the laterally offset beam 302 is offset such that for all the positions of the mirrors 421 X, 422X, the laterally offset beam 302 scans a straight line. This straight line follows an axis X in a plane perpendicular to the propagation of the offset beam 302.
• the laterally offset beam 302 then enters a second lateral offset unit 1Y making it possible to offset it in the direction Y which has not been offset by the first 1X side shift unit.
• the offset beam 302 is offset laterally by the second lateral offset unit 1Y, into an offset beam 7 following the reflection of the laterally offset beam 302 on the first 421 Y and second 422Y movable mirrors.
• a spatially offset beam 7 is then obtained so that it can describe a circle in a plane perpendicular to the main propagation axis A.
• This embodiment makes it possible to maintain the same polarization between the input laser beam 301 and the offset laser beam 7.
• Figure 8b shows an embodiment of a spatial shift unit 1 comprising a first movable mirror 431 and a second movable mirror so that their normals are capable of describing a trajectory in a three-dimensional space.
• the first 431 and second 432 movable mirrors are movable so that their surfaces or their normals are always parallel.
• An incoming beam 301 directed towards the first movable mirror 431 undergoes a first input reflection of the laser beam on said first movable mirror 431, this reflection is directed towards said second movable mirror 432, so that a second reflection on said second mirror mobile 432 makes it possible to obtain an offset laser beam 7 having a main axis of propagation A and being able to describe a circle in a plane perpendicular to this main propagation axis A.
• the offset laser beam 7 is obtained for all the possible positions and orientations of said first 421 and second 422 movable mirrors.
• the beam offset obtained is preferably in a circle, that is to say that a scanning of the offset laser beam 7 occurs around a circle.
• the normals of the first 431 and second 432 movable mirrors each describe a circle when the mirror 431, 432 is displaced.
• This embodiment makes it possible to maintain the same polarization between said input laser beam 301 and said offset laser beam 7 .
• FIG. 8c shows an embodiment of a spatial shift unit 1 comprising the lateral displacement unit 1X, 1 Y of FIG. 7d in which, a tiltable blade 410 is inserted between the first 421 and second 422 mobile mirrors (tiltable).
• a tiltable blade 410 is inserted between the first 421 and second 422 mobile mirrors (tiltable).
• the first 421 and second 422 tiltable mirrors make it possible to move the light beam in a direction X (Y)
• the tiltable blade then makes it possible to move the same light beam in a direction Y (X).
• This configuration could be envisaged by positioning the blade 410 upstream of the first movable mirror 421 or downstream of the second movable mirror 422.
• the configuration shown in FIG. 8c is nevertheless particularly compact.
• the combination of the two movable (tiltable) mirrors 421, 422 and the movable blade (410) (tiltable) makes it possible to obtain an offset laser beam 7 having a main propagation axis A and being able to describe a circle in a perpendicular plane to this main axis of propagation A, thanks to the synchronization of the displacement of the movable mirrors 421, 422 and of the movable blade 410.
• This embodiment allows the same polarization to be maintained between said input laser beam 301 and said offset laser beam 7.
• the embodiment of FIG. 8c is a combination of the embodiments of FIGS. 7b and 7d.
• FIG. 8d shows an embodiment of a spatial shift unit 1 comprising an improvement of the lateral shift unit 1X, 1Y shown in FIG. 7b.
• the improvement is in the setting in motion of the blade 410.
• the blade 410 is set in motion so that its normal describes a trajectory in three-dimensional space, for example such that its normal describes a circle.
• its normal describes a circle around an axis passing through the point of incidence of the incoming beam 301 with the blade 410, the axis not being parallel to the incoming beam 301, that is to say, not coincident with the incoming beam 301.
• Such an axis is represented by the dashed line.
• This embodiment of a spatial shift unit 1 makes it possible to obtain an offset laser 7 having a main propagation axis A and being capable of describing a circle in a plane perpendicular to this main propagation axis A, in particular when the blade normal 410 describes a circular path around the axis.
• This embodiment makes it possible to maintain the same polarization between said input laser beam 301 and said offset laser beam 7.
• Figure 8e shows an embodiment of a spatial shift unit 1 comprising a first wedge prism 441 and a second wedge prism 442, each of the two wedge prisms 441, 442 being able to be rotated around an axis as shown in FIG. 8th.
• the two wedge prisms 441, 442 are rotated synchronously. Preferably, they are rotated so that the sum of their thicknesses at any point in a direction parallel to their axis of rotation is equal.
• the two wedge prisms 441, 442 have identical wedge prism angles.
• the first spatially offset laser beam 10 by transmission and
• said first 10 and second 20 spatially offset laser beams being able to each describe a circle.

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• 2018
  • 2018-07-24 BE BE20185535A patent/BE1026484B1/fr active IP Right Grant
• 2019
  • 2019-07-24 CN CN201980048506.0A patent/CN112469527A/zh active Pending
  • 2019-07-24 US US17/261,657 patent/US20210260691A1/en active Pending
  • 2019-07-24 BR BR112021000976-0A patent/BR112021000976A2/pt not_active Application Discontinuation
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