EP3759261A1 - VERSCHLEIßSCHUTZBESCHICHTETES METALLISCHES BAUTEIL INSBESONDERE FÜR EIN KUGELVENTIL UND VERFAHREN ZUM AUFBRINGEN EINER MEHRSCHICHTIGEN VERSCHLEIßSCHUTZSCHICHT ZUR ERZEUGUNG EINES SOLCHEN BAUTEILS - Google Patents
VERSCHLEIßSCHUTZBESCHICHTETES METALLISCHES BAUTEIL INSBESONDERE FÜR EIN KUGELVENTIL UND VERFAHREN ZUM AUFBRINGEN EINER MEHRSCHICHTIGEN VERSCHLEIßSCHUTZSCHICHT ZUR ERZEUGUNG EINES SOLCHEN BAUTEILSInfo
- Publication number
- EP3759261A1 EP3759261A1 EP19701769.2A EP19701769A EP3759261A1 EP 3759261 A1 EP3759261 A1 EP 3759261A1 EP 19701769 A EP19701769 A EP 19701769A EP 3759261 A1 EP3759261 A1 EP 3759261A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- layer
- wear
- carbide
- gradient
- metallic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 50
- 239000002184 metal Substances 0.000 title claims abstract description 50
- 238000000034 method Methods 0.000 title claims abstract description 24
- 238000000576 coating method Methods 0.000 title claims abstract description 14
- 239000011248 coating agent Substances 0.000 title abstract description 8
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 30
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 19
- 239000010410 layer Substances 0.000 claims description 257
- 239000002347 wear-protection layer Substances 0.000 claims description 37
- 239000002318 adhesion promoter Substances 0.000 claims description 36
- 239000012790 adhesive layer Substances 0.000 claims description 34
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 17
- 229910052719 titanium Inorganic materials 0.000 claims description 17
- 239000010936 titanium Substances 0.000 claims description 17
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 9
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 7
- 239000001257 hydrogen Substances 0.000 claims description 7
- 229910052739 hydrogen Inorganic materials 0.000 claims description 7
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 claims description 6
- 238000002347 injection Methods 0.000 claims description 6
- 239000007924 injection Substances 0.000 claims description 6
- 229910039444 MoC Inorganic materials 0.000 claims description 5
- 229910026551 ZrC Inorganic materials 0.000 claims description 5
- OTCHGXYCWNXDOA-UHFFFAOYSA-N [C].[Zr] Chemical compound [C].[Zr] OTCHGXYCWNXDOA-UHFFFAOYSA-N 0.000 claims description 5
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims description 5
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 5
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 5
- 229910003468 tantalcarbide Inorganic materials 0.000 claims description 5
- INZDTEICWPZYJM-UHFFFAOYSA-N 1-(chloromethyl)-4-[4-(chloromethyl)phenyl]benzene Chemical compound C1=CC(CCl)=CC=C1C1=CC=C(CCl)C=C1 INZDTEICWPZYJM-UHFFFAOYSA-N 0.000 claims description 4
- QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 claims description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 4
- 229910033181 TiB2 Inorganic materials 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- 239000011651 chromium Substances 0.000 claims description 4
- WHJFNYXPKGDKBB-UHFFFAOYSA-N hafnium;methane Chemical compound C.[Hf] WHJFNYXPKGDKBB-UHFFFAOYSA-N 0.000 claims description 4
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims description 4
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 2
- 229910052735 hafnium Inorganic materials 0.000 claims description 2
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052750 molybdenum Inorganic materials 0.000 claims description 2
- 239000011733 molybdenum Substances 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 239000010937 tungsten Substances 0.000 claims description 2
- 229910052720 vanadium Inorganic materials 0.000 claims description 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 238000003672 processing method Methods 0.000 claims 1
- 239000000463 material Substances 0.000 description 10
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 7
- 229910052796 boron Inorganic materials 0.000 description 7
- 238000005240 physical vapour deposition Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 239000011241 protective layer Substances 0.000 description 6
- 238000001755 magnetron sputter deposition Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- VQTUBCCKSQIDNK-UHFFFAOYSA-N Isobutene Chemical compound CC(C)=C VQTUBCCKSQIDNK-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910003481 amorphous carbon Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000007767 bonding agent Substances 0.000 description 2
- -1 carbon ions Chemical class 0.000 description 2
- RKTYLMNFRDHKIL-UHFFFAOYSA-N copper;5,10,15,20-tetraphenylporphyrin-22,24-diide Chemical compound [Cu+2].C1=CC(C(=C2C=CC([N-]2)=C(C=2C=CC=CC=2)C=2C=CC(N=2)=C(C=2C=CC=CC=2)C2=CC=C3[N-]2)C=2C=CC=CC=2)=NC1=C3C1=CC=CC=C1 RKTYLMNFRDHKIL-UHFFFAOYSA-N 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 description 2
- 229910052743 krypton Inorganic materials 0.000 description 2
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 229910052756 noble gas Inorganic materials 0.000 description 2
- 239000013077 target material Substances 0.000 description 2
- 102000002322 Egg Proteins Human genes 0.000 description 1
- 108010000912 Egg Proteins Proteins 0.000 description 1
- 241000196324 Embryophyta Species 0.000 description 1
- 235000010627 Phaseolus vulgaris Nutrition 0.000 description 1
- 244000046052 Phaseolus vulgaris Species 0.000 description 1
- 230000001464 adherent effect Effects 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- QDMRQDKMCNPQQH-UHFFFAOYSA-N boranylidynetitanium Chemical compound [B].[Ti] QDMRQDKMCNPQQH-UHFFFAOYSA-N 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 210000003278 egg shell Anatomy 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000009499 grossing Methods 0.000 description 1
- 239000001282 iso-butane Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 235000021251 pulses Nutrition 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
- C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
- C23C28/343—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one DLC or an amorphous carbon based layer, the layer being doped or not
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/36—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including layers graded in composition or physical properties
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
- F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
- F02M61/166—Selection of particular materials
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M61/00—Fuel-injectors not provided for in groups F02M39/00 - F02M57/00 or F02M67/00
- F02M61/16—Details not provided for in, or of interest apart from, the apparatus of groups F02M61/02 - F02M61/14
- F02M61/18—Injection nozzles, e.g. having valve seats; Details of valve member seated ends, not otherwise provided for
- F02M61/1886—Details of valve seats not covered by groups F02M61/1866 - F02M61/188
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M63/00—Other fuel-injection apparatus having pertinent characteristics not provided for in groups F02M39/00 - F02M57/00 or F02M67/00; Details, component parts, or accessories of fuel-injection apparatus, not provided for in, or of interest apart from, the apparatus of groups F02M39/00 - F02M61/00 or F02M67/00; Combination of fuel pump with other devices, e.g. lubricating oil pump
- F02M63/0012—Valves
- F02M63/007—Details not provided for in, or of interest apart from, the apparatus of the groups F02M63/0014 - F02M63/0059
- F02M63/0077—Valve seat details
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
- F16K25/005—Particular materials for seats or closure elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
- F16K25/04—Arrangements for preventing erosion, not otherwise provided for
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M2200/00—Details of fuel-injection apparatus, not otherwise provided for
- F02M2200/90—Selection of particular materials
- F02M2200/9038—Coatings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
- F02M—SUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
- F02M2200/00—Details of fuel-injection apparatus, not otherwise provided for
- F02M2200/90—Selection of particular materials
- F02M2200/9046—Multi-layered materials
Definitions
- Wear protection coated metallic component in particular for a ball valve and method for applying a multi-layer wear protection layer for producing such a component
- the invention relates to a wear-resistant coated metallic component in particular for a ball valve whose tribologically stressed surface is at least partially provided with a multi-layer wear protection layer. Furthermore, the invention relates to a method for applying a wear protective layer on a metallic substrate for producing such a construction part. Moreover, the invention relates to a ball valve with such a component.
- DE 10 2008 040 766 A1 discloses a wear protection layer arrangement, in particular for components exposed to high pressures and temperatures of a fuel injection system.
- the wear protection layer arrangement has a tetragonal bound amorphous carbon formed or egg nen share of tetragonal bonded amorphous carbon having protective layer.
- the wear protection layer arrangement has a first adhesion promoter layer formed from chromium or having a chromium content.
- the wear protection layer arrangement has at least one second adhesion promoter layer adjacent to the first adhesion promoter layer and having a carbon content.
- the vorlie lowing invention has the object, a wear-resistant coated me- metallic component and a method for applying a multilayer Ver wear protection layer for the production of such a component to further develop, and in particular to improve an adhesion between the individual layers of the wear protection layer Ver, further a thermal and mechanical cal load capacity of the component to be increased.
- the object is solved by the subject matter of patent claims 1, 5 and 8.
- Preferred Ausrete insurance forms are given in the dependent claims.
- a wear-resistant coated metallic component according to the invention for an injection valve has its tribologically stressed surface a more layered wear protection layer, wherein the wear protection layer at least one metallic adhesive layer, a primer layer and at least one first cover layer, wherein the primer layer is a carbide-forming hydrogen-free metal or a boride-forming Metal comprises, and wherein the at least first cover layer comprises a hydrogen-free tetrahedral carbon.
- the wear protection layer is constructed such that a thermally stable adhesion of the individual layers is achieved with each other and is thus produced with a high resistance to tribological stresses.
- the metallic adhesive layer has a layer thickness between 10 nm and 1 pm, and consists of a metal selected from the group comprising titanium, chromium, molybdenum, tungsten, vanadium, hafnium, tantalum, zirconium or combinations thereof. Other metals and other combinations of these are also conceivable.
- the adhesion promoter layer preferably has a layer thickness of between 10 nm and 10 ⁇ m, preferably a layer thickness of less than 1 ⁇ m, and consists of a metal selected from the group comprising silicon carbide SiC, tungsten carbide WC, vanadium carbide VC, tantalum carbide TaC, hafnium carbide HfC, zirconium carbide ZrC, molybdenum carbide MoC, titanium carbide TiC, titanium boride TiB, titanium boride TiB 2 or combinations thereof.
- the adhesion promoter layer comprises a hydrogen-free carbide-forming metal
- the adhesion promoter layer with the hydrogen-free carbide-forming metal then has a stoichiometric layer.
- the ratio between metal and carbon can also be in a ratio range between 10: 1 and 1: 3.
- the primer layer comprises a boride-forming metal
- the primer layer preferably comprises titanium to form a chemically inert boron-containing titanium layer or a titanium boride layer.
- the adhesion promoter layer with the boride-forming metal preferably has a stoichiometric ratio between metal and boron of 1: 2, in which case a titanium diboride is present.
- the ratio between metal and boron can also be in a ratio range between 10: 1 and 1:10.
- the boride-containing primer layer acts as a diffusion barrier, whereby oxidation or contamination by thermal diffusion of the substrate and the individual components of the coating is prevented. Furthermore, by the chemical and structural similarity of titanium boride and titanium carbide, a comparatively stable and adherent bonding of the adhesive mediator layer to the first cover layer.
- the first cover layer has a layer thickness between 0.1 mhh and 10 mhh.
- the first cover layer of the wear protection layer is preferably a hydrogen-free tetrahedral carbon layer (ta-C), which has a high thermal stability even at temperatures above 600 ° C compared to the metallic adhesive layer and the adhesive layer.
- the metallic adhesive layer and the primer layer are essentially hen vorgese, a better gradient in modulus and / or hardness between a sub strate, so to realize the base material of the component to be coated, and the first cover layer. Consequently, the eggshell effect of the wear-resistant layer is counteracted by the layers adhering well.
- the wear protection layer at least consisting of the adhesive layer, the primer layer and the first cover layer thus has a relatively high adhesion ability even at high operating temperatures and aggressive oxidizing gas atmospheres. This has a particularly positive effect on the resistance of the wear protection layer, and thus on the lifetime of the wear-coated metal component ver.
- the anti-wear layer has a first gradient layer formed between the metallic adhesive layer and the primer layer to produce a concentration gradient between the metallic adhesive layer and the primer layer, the first gradient layer comprising a metal and a layer thickness between 1 nm and 10 pm.
- the first Graisten für on a boride-forming metal wherein the boride-forming metal is in particular a titanium boride or a titanium diboride.
- the boron content within the first gradient layer preferably increases with increasing layer thickness.
- the first gradient layer comprises a carbide-forming metal, wherein the carbide-forming metal is selected from the group consisting of silicon carbide, tungsten carbide, vanadium carbide, tantalum carbide, hafnium carbide, zirconium carbide, molybdenum carbide, titanium carbide, or combinations thereof.
- the Kolhenstoffanteil within the first Gradi enten slaughter increases with increasing layer thickness preferably.
- the wear protection layer has a second gradient layer formed between the adhesion promoter middle layer and the first cover layer to produce a concentration gradient between the adhesion promoter layer and the first cover layer, wherein the second gradient layer is a hydrogen-free tetrahedral carbon includes.
- the carbon content within the second gradient layer preferably increases. It is conceivable entwe the form the first gradient layer between the metallic adhesive layer and the adhesive layer or the second gradient layer between the Haftvermitt ler harsh and the first cover layer.
- the wear protection layer then has four individually applied layers. But it is also possible both a first and a second gradient layer between tween the metallic adhesive layer, the adhesive layer and the first cover layer preference.
- the wear protection layer has five layers applied separately.
- the gradient in the modulus of elasticity and / or hardness is realized more uniformly by the first and / or second gradient layer, and the adhesiveness of the wear-resistant layer is thus improved.
- the wear protection layer further comprises a second cover layer comprising an amorphous hydrogen-containing carbon, wherein the two te cover layer is at least partially disposed on the first cover layer.
- the second cover layer is an inlet layer of amorphous hydrogen-containing carbon (aC: H)., which serves the smoothing of the technical surface at the beginning of tribological contact.
- the substrate is initially provided, a metallic adhesive layer by means of a plasma coating process, in particular with a layer thickness between 10 nm and 1 pm, at least partially applied to the substrate, wherein a primer layer comprising a hydrogen free carbide-forming metal or a boride-forming metal, by means of a Plas mabe Anlagenungsvons, in particular with a layer thickness between 10 nm and 10 pm, preferably having a layer thickness less than 1 pm, at least partially applied to the metallic adhesive layer, and wherein a first cover layer comprising a hydrogen-free tetrahedral carbon, by means of a plasma coating method, in particular with a layer thickness between 0.1 pm and 10 pm, at least partially applied to the primer layer.
- the individual layers of the wear protective layer are applied by means of a physical vapor deposition method on the substrate of the component.
- a physical vapor deposition process in English: Physical Vapor Deposition
- a starting material is transferred by means of physical processes in the gas phase and then led to the substrate to be coated, where it condenses and forms the respective layer.
- the application of the metallic adhesive layer to the substrate preferably takes place by means of magnetron sputtering, the respective layer material being sputtered directly from a target material in a noble gas atmosphere, for example in an argon, neon, krypton or xenonate mops. Furthermore, it preferably follows the sputtering of the layer material to produce the metallic adhesion Layer preferably by means of high-energy pulse magnetron sputtering (HiPIMS) in combination with a bias voltage, whereby a comparatively dense metal adhesive layer is formed from the sputtered ions.
- HiPIMS high-energy pulse magnetron sputtering
- Biashoven be used, wherein the primer layer vorzugswei se deposited directly in stoichiometric composition of the respective target material.
- the bias voltage is in the range up to 10 kV, preferably between 0.1 and 2 kV.
- a reactive deposition can alternatively be carried out by adding kohlenstoff ambiencen gases.
- the first covering layer consisting of the amorphous tedraedischen carbon (ta-C) is preferably produced by means of vacuum arc evaporation of a carbon target.
- the resulting carbon ions are accelerated by means of egg ner preferably pulsed bias voltage to the component and form there the first cover layer with the respective layer thickness.
- the bias voltage is selected such that the mean internal energy of the carbon ions is between 40 and 100 eV.
- the invention includes the teaching that a first and / or second gradient layer is formed between the metallic adhesion layer and the adhesion promoter layer and / or between the adhesion promoter layer and the first cover layer in order to achieve a concentration gradient between the metallic adhesion layer and the adhesion promoter layer and / or between the
- Bonding agent layer and the first cover layer to produce wherein the first and / or second gradient layer is also formed by means of a plasma coating process and a layer thickness between 1 nm and 10 pm.
- the first and / or second gradient layer is preferably applied by PVD method, particularly preferably by vacuum arc evaporation on the me-metallic adhesive layer and / or the adhesion promoter layer.
- a second cover layer is at least partially applied to the first cover layer by means of a PECVD method and a layer thickness between 0.1 pm and 10 pm, wherein the second cover layer is an amorphous hydrogen-containing carbon.
- PECVD plasma-enhanced chemical vapor deposition
- the gases produced by means of the hydrocarbon-containing gas for example by means of isobutane, isobutene or methane, are then accelerated by means of a pulsed bias voltage to the surface of the component to be coated, where they form an aC: H layer.
- the layer thicknesses indicated above are preferably produced by plasma coating in such a way that the application of the material takes place until the respective desired layer thickness is reached. During or after the plasma coating, the applied layer thickness is monitored by a layer thickness test.
- the wear-resistant coated metallic component is preferably used in injection technology to injectors, especially for Hochtikan applications of hydraulic valves or pneumatic valves.
- the wear-resistant coated metallic component is used in a Ku gelventil, wherein the ball valve a spherical counter-body to summarizes, which is intended to come to the wear-resistant coated metallic component sealingly to the plant.
- the wear-resistant coated metallic component has in particular an inner cone-shaped seat for at least partially receiving the counter body, wherein at least the innenke gel-shaped seat has a wear protection layer.
- the inner cone-shaped seat advantageously has an opening angle of less than 90 °, preferably before 60 °.
- FIG. 1 is a detail sectional view of a metallic component according to the invention to illustrate a layer structure of a wear protection layer according to a first embodiment
- FIG. 2 is a detail sectional view of the metallic component for Veran illustration of the layer structure of the wear protection layer according to a two-th embodiment
- Fig. 3 is a detail sectional view of the metallic component for Veran illustration of the layer structure of the wear protection layer according to a th third embodiment
- FIG. 4 is a simplified schematic sectional view of a ball valve with the wear-resistant coated metallic component according to the invention according to FIG. 3.
- FIG. 1 to 3 three embodiments of a wear-coated metallic component 1 are shown.
- the Ver provided with a wear protective layer 2 metallic component 1 is presently used in a ball valve 6 shown in more detail in Figure 4, wherein by wear protective layer 2 in particular the wear of the tribologically stressed component 1 is lowered.
- the wear protection layer 2 form a metallic adhesive layer 3a, a primer layer 3b and a first cover layer 3c, wherein the primer layer 3b comprises a carbide-forming hydrogen-free metal, and wherein the first cover layer 3c comprises a hydrogen-free tetrahedral carbon.
- the metallic adhesion layer 3a, the adhesion promoter layer 3b and the first cover layer 3c are each provided with Made a PVD process, for example, by magnetron sputtering or vacuum umbogenverdampfung.
- the metallic adhesion layer 3 a is applied over the entire surface of a substrate 9 of the component 1.
- the Haftver is mitler layer 3b applied over the entire surface of the metallic adhesive layer 3a and finally coated over the entire surface with the first cover layer 3c, wherein the ers te cover layer has a layer thickness of 1 pm.
- the adhesive metal layer 3 a comprises titanium as a layer material and has a layer thickness of 100 nm.
- the adhesion promoter layer 3 b, or else carbide hard layer, has a layer thickness of 200 nm and in the first embodiment comprises a titanium carbide, the stoichiometric ratio of the titanium carbide between Carbon and metal is 1: 1, so that a stable and comparatively well adhering Haftvermitler für 3b is formed.
- a stoichiometric ratio of titanium carbide between carbon and metal in a range between 3: 1 and 1:10 can be chosen.
- the ers te cover layer 3c protects the component 1 from wear and reduces in particular the coefficient of friction between the component 1 and a tribologically bean spruchenden the component counter body.
- the wear protection layer 2 of the second embodiment shown in Figure 2 has a metallic adhesive layer 3a, a Haftvermitler Anlagen 3b, and a first cover layer 3c, wherein between the metallic adhesive layer 3a and the Haftvermitler Anlagen 3b, a first gradient layer 4 is arranged to a concentration gradient between the metallic adhesion layer 3a and the adhesion promoter layer 3b.
- the adhesion promoter layer 3b comprises a boride-forming metal
- the first covering layer 3c comprises a hydrogen-free tetrahedral carbon.
- the metallic adhesion layer 3a, the first gradient layer 4, the adhesion promoter layer 3b and the first cover layer 3c are each prepared by a PVD process, for example by magnetron sputtering or vacuum arc evaporation.
- the metallic adhesion layer 3 a is applied over the entire surface of a substrate 9 of the component 1.
- the first gradient layer 4 is applied to the metallic adhesion layer 3a.
- the adhesion promoter layer 3 b is applied over the entire surface to the first gradient layer 4 and, finally, over the full area with the first gradient layer 4 Cover layer 3c coated, wherein the first cover layer has a layer thickness of 1 mhh.
- the metallic adhesion layer 3a here comprises titanium as a layer material and has a layer thickness of 100 nm.
- the adhesion promoter layer 3b has a layer thickness of 200 nm and in the second embodiment comprises a titanium boride, wherein the stoichiometric ratio of the titanium boron between Me tall and boron at 1: 2, so that a stable and comparatively well adhering primer layer 3b is formed.
- a stoichiometric ratio of the titanium boride between titanium and boron may also be in one range
- the first gradient layer 4 also comprises titanium boride as the layer material, the concentration of the boron fraction increasing linearly with increasing layer thickness of the first gradient layer 4 from the metallic adhesion layer 3 a to the adhesion promoter layer 3 b.
- the first gradient layer 4 has a layer thickness of 50 nm.
- the first cover layer 3c protects the component 1 from wear and, in particular, reduces the coefficient of friction between the component 1 and a component tribologically
- the wear protection layer 2 has a metallic adhesive layer 3a, a bonding agent layer 3b, and a first cover layer 3c. Between the adhesive layer 3b and the first cover layer 3c, a second gradient layer 5 is arranged to produce a concentration gradient between the adhesive layer 3b and the first cover layer.
- the adhesion promoter layer 3b comprises a carbide-forming metal and the first covering layer 3c comprises a hydrogen-free tetrahedral carbon.
- the adhesion promoter layer 3b may also comprise a boride-forming metal.
- the metallic adhesion layer 3a, the adhesion promoter layer 3b, the second gradient layer 5, and the first cover layer 3c are each produced by means of a PVD process, for example by means of magnetron sputtering or vacuum evaporation.
- the metallic adhesive layer 3a is all over on one Substrate 9 of the component 1 applied.
- the bonding mediator layer 3b is applied over the entire surface of the metallic adhesive layer 3a.
- the second gradient layer 5 is applied to the adhesion promoter layer 3b and finally beschich Tet with the first cover layer 3c beschich tet, wherein the first cover layer has a layer thickness of 1 mhh.
- the wear protection layer 2 further comprises a second cover layer 3d, which is applied to the first cover layer 3c and in the present case has a layer thickness of also 1 mhh.
- the second cover layer is produced in the present case by means of a PECVD method.
- the metallic adhesion layer 3a here comprises titanium as the layer material and has a layer thickness of 100 nm.
- the adhesion promoter layer 3b has a
- Adhesive layer 3b from.
- a titanium boride as
- Adhesive layer 3b be provided.
- the second gradient layer 5 to summarizes a hydrogen-free tetrahedral carbon as a layer material, wherein the concentration of the carbon content with increasing layer thickness of the second gradient layer 5 of the primer layer 3b to the first cover layer 3c increases linearly.
- the second gradient layer 5 has a layer thickness of 50 nm.
- the second cover layer 3d comprises an amorphous hydrogen-containing carbon as the layer material.
- the first and second cover layer 3c, 3d protect the component 1 from wear and in particular reduces the coefficient of friction between the component 1 and a component 1 tribologically
- the chemical and structural similarity of the layers ensures that the first and second cover layers 3 c, 3 d are firmly seated and firmly adhering to the substrate 9.
- a ball valve 6 comprises a wear-resistant metallic component 1 according to FIG. 3 as well as a spherical counter body 7.
- the counter body 7 is intended to seal against the wear-resistant metallic component 1, a surface 10 of the component 1 in particular on an inner cone-shaped Seat 8 is tribologically stressed by the counter body 7.
- the inner cone-shaped seat 8 is used for partially receiving the counter body 7 and in this case has a Publ opening angle 11 of 60 °.
- the wear-resistant coated metallic component 1 has on the surface 10 a on a substrate 9 of the component 1 applied wear protection layer 2 according to Figure 3, to the wear in the sealing area between the mating body 7 and the inner cone-shaped seat
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Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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DE102018202842.7A DE102018202842A1 (de) | 2018-02-26 | 2018-02-26 | Verschleißschutzbeschichtetes metallisches Bauteil insbesondere für ein Kugelventil und Verfahren zum Aufbringen einer mehrschichtigen Verschleißschutzschicht zur Erzeugung eines solchen Bauteils |
PCT/EP2019/050236 WO2019161981A1 (de) | 2018-02-26 | 2019-01-07 | VERSCHLEIßSCHUTZBESCHICHTETES METALLISCHES BAUTEIL INSBESONDERE FÜR EIN KUGELVENTIL UND VERFAHREN ZUM AUFBRINGEN EINER MEHRSCHICHTIGEN VERSCHLEIßSCHUTZSCHICHT ZUR ERZEUGUNG EINES SOLCHEN BAUTEILS |
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EP3759261A1 true EP3759261A1 (de) | 2021-01-06 |
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EP19701769.2A Pending EP3759261A1 (de) | 2018-02-26 | 2019-01-07 | VERSCHLEIßSCHUTZBESCHICHTETES METALLISCHES BAUTEIL INSBESONDERE FÜR EIN KUGELVENTIL UND VERFAHREN ZUM AUFBRINGEN EINER MEHRSCHICHTIGEN VERSCHLEIßSCHUTZSCHICHT ZUR ERZEUGUNG EINES SOLCHEN BAUTEILS |
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US (1) | US11753728B2 (de) |
EP (1) | EP3759261A1 (de) |
CN (1) | CN111757949A (de) |
DE (1) | DE102018202842A1 (de) |
WO (1) | WO2019161981A1 (de) |
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EP4061977A4 (de) * | 2019-11-21 | 2023-04-26 | Callidus Process Solutions Pty Ltd | Zweischichtige schutzüberzüge für metallbauteile |
DE102020003847A1 (de) * | 2020-06-26 | 2021-12-30 | KSB SE & Co. KGaA | Kreiselpumpe zur Förderung feststoffhaltiger Medien |
DE102021206765A1 (de) | 2021-06-29 | 2022-12-29 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verschleißschutzbeschichtetes Metallbauteil |
CN113957402A (zh) * | 2021-09-28 | 2022-01-21 | 西安交通大学 | 提高压缩机滑片、缝纫机针筒等运动部件使用寿命的方法 |
US20240175506A1 (en) * | 2022-11-29 | 2024-05-30 | Dresser, Llc | Coatings for valve parts to prevent erosion |
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DE10038954A1 (de) * | 2000-08-09 | 2002-02-28 | Siemens Ag | Ventil, insbesondere Einspritzventil |
DE10355030A1 (de) * | 2003-11-25 | 2005-06-23 | Robert Bosch Gmbh | Ventil, insbesondere für eine Hochdruckpumpe einer Kraftstoffeinspritzeinrichtung für eine Brennkraftmaschine |
JP4805255B2 (ja) | 2004-04-29 | 2011-11-02 | エリコン・トレーディング・アクチェンゲゼルシャフト,トリュープバッハ | 銅含有軸受材料のdlc硬質コーティング |
DE102004041235A1 (de) * | 2004-08-26 | 2006-03-02 | Ina-Schaeffler Kg | Verschleißfeste Beschichtung und Verfahren zur Herstellung derselben |
JP5143571B2 (ja) * | 2005-02-10 | 2013-02-13 | エーリコン・トレイディング・アーゲー・トリューバッハ | 切削工具のための高耐摩耗三重被覆 |
JP5503145B2 (ja) * | 2005-08-18 | 2014-05-28 | スルザー メタプラス ゲーエムベーハー | 四面体炭素層および軟質外層を備える層状構造によって被覆された基板 |
DE102008040766A1 (de) | 2008-07-28 | 2010-02-11 | Robert Bosch Gmbh | Verschleißschutzschichtanordnung sowie Bauelement mit Verschleißschutzschichtanordnung |
DE102008040768A1 (de) | 2008-07-28 | 2010-02-11 | Robert Bosch Gmbh | Verschleißschutzschichtanordnung sowie Bauelement mit einer Verschleißschutzschichtanordnung |
US9620150B2 (en) | 2014-11-11 | 2017-04-11 | Seagate Technology Llc | Devices including an amorphous gas barrier layer |
WO2017148582A1 (de) | 2016-03-01 | 2017-09-08 | Oerlikon Surface Solutions Ag, Pfäffikon | Wasserstofffreie kohlenstoffbeschichtung mit zirkonium haftschicht |
DE102016107874A1 (de) | 2016-04-28 | 2017-11-16 | Federal-Mogul Burscheid Gmbh | Gleitelement, insbesondere Kolbenring |
US10626834B2 (en) | 2016-05-03 | 2020-04-21 | GM Global Technology Operations LLC | Fuel injector for an internal combustion engine |
-
2018
- 2018-02-26 DE DE102018202842.7A patent/DE102018202842A1/de active Pending
-
2019
- 2019-01-07 US US16/975,834 patent/US11753728B2/en active Active
- 2019-01-07 EP EP19701769.2A patent/EP3759261A1/de active Pending
- 2019-01-07 CN CN201980015401.5A patent/CN111757949A/zh active Pending
- 2019-01-07 WO PCT/EP2019/050236 patent/WO2019161981A1/de unknown
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US11753728B2 (en) | 2023-09-12 |
WO2019161981A1 (de) | 2019-08-29 |
US20200407856A1 (en) | 2020-12-31 |
DE102018202842A1 (de) | 2019-08-29 |
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