EP3675604A4 - Method for producing ceramic substrate, and ceramic substrate - Google Patents

Method for producing ceramic substrate, and ceramic substrate Download PDF

Info

Publication number
EP3675604A4
EP3675604A4 EP18848939.7A EP18848939A EP3675604A4 EP 3675604 A4 EP3675604 A4 EP 3675604A4 EP 18848939 A EP18848939 A EP 18848939A EP 3675604 A4 EP3675604 A4 EP 3675604A4
Authority
EP
European Patent Office
Prior art keywords
ceramic substrate
producing
producing ceramic
substrate
ceramic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP18848939.7A
Other languages
German (de)
French (fr)
Other versions
EP3675604B1 (en
EP3675604A1 (en
Inventor
Ji-Hyung Lee
Ik-Seong Park
Hyeon-Choon Cho
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Amosense Co Ltd
Original Assignee
Amosense Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Amosense Co Ltd filed Critical Amosense Co Ltd
Publication of EP3675604A1 publication Critical patent/EP3675604A1/en
Publication of EP3675604A4 publication Critical patent/EP3675604A4/en
Application granted granted Critical
Publication of EP3675604B1 publication Critical patent/EP3675604B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/0271—Arrangements for reducing stress or warp in rigid printed circuit boards, e.g. caused by loads, vibrations or differences in thermal expansion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4871—Bases, plates or heatsinks
    • H01L21/4882—Assembly of heatsink parts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36—Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/373—Cooling facilitated by selection of materials for the device or materials for thermal expansion adaptation, e.g. carbon
    • H01L23/3735—Laminates or multilayers, e.g. direct bond copper ceramic substrates
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/06—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding the conductive material being removed chemically or electrolytically, e.g. by photo-etch process
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/08—Shaping or machining of piezoelectric or electrostrictive bodies
    • H10N30/082—Shaping or machining of piezoelectric or electrostrictive bodies by etching, e.g. lithography
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00—Printed circuits
    • H05K1/02—Details
    • H05K1/03—Use of materials for the substrate
    • H05K1/0306—Inorganic insulating substrates, e.g. ceramic, glass
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03—Conductive materials
    • H05K2201/0332—Structure of the conductor
    • H05K2201/0335—Layered conductors or foils
    • H05K2201/0355—Metal foils
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/03—Metal processing
    • H05K2203/0353—Making conductive layer thin, e.g. by etching
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H05K3/022—Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
EP18848939.7A 2017-08-24 2018-08-23 Method for producing ceramic substrate, and ceramic substrate Active EP3675604B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR20170107002 2017-08-24
PCT/KR2018/009722 WO2019039883A1 (en) 2017-08-24 2018-08-23 Method for producing ceramic substrate, and ceramic substrate

Publications (3)

Publication Number Publication Date
EP3675604A1 EP3675604A1 (en) 2020-07-01
EP3675604A4 true EP3675604A4 (en) 2020-10-07
EP3675604B1 EP3675604B1 (en) 2023-02-22

Family

ID=65761682

Family Applications (1)

Application Number Title Priority Date Filing Date
EP18848939.7A Active EP3675604B1 (en) 2017-08-24 2018-08-23 Method for producing ceramic substrate, and ceramic substrate

Country Status (5)

Country Link
US (1) US11355355B2 (en)
EP (1) EP3675604B1 (en)
KR (1) KR20190022383A (en)
CN (1) CN110945971B (en)
WO (1) WO2019039883A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200127511A (en) * 2019-05-02 2020-11-11 주식회사 아모센스 Ceramic substrate and manufacturing method for the same
WO2021095843A1 (en) * 2019-11-15 2021-05-20 デンカ株式会社 Ceramic substrate, composite substrate, circuit board, method for producing ceramic substrate, method for producing composite substrate, method for producing circuit board, and method for producing plurality of circuit boards
US11582866B1 (en) * 2021-07-22 2023-02-14 Toyota Motor Engineering & Manufacturing North America, Inc. Systems including a power device-embedded PCB directly joined with a cooling assembly and method of forming the same
CN116504683B (en) * 2023-06-25 2023-08-25 江苏富乐华半导体科技股份有限公司 Method for controlling warpage of copper DBC (copper-nickel) product

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0786703A (en) * 1993-09-10 1995-03-31 Toshiba Corp Ceramic circuit board
EP0670667A1 (en) * 1994-02-24 1995-09-06 Plessey Semiconductors Limited Direct copper bonded substrates
EP1345480A2 (en) * 2002-03-15 2003-09-17 Dowa Mining Co., Ltd. Ceramic circuit board and power module
US20130186677A1 (en) * 2008-09-08 2013-07-25 Samsung Electro-Mechanics Co., Ltd. Printed circuit board and method of manufacturing the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4839461B2 (en) * 2001-02-23 2011-12-21 Ｄｏｗａメタルテック株式会社 Method for manufacturing aluminum oxide circuit board
JP4969738B2 (en) * 2001-06-28 2012-07-04 株式会社東芝 Ceramic circuit board and semiconductor module using the same
JP2004207587A (en) 2002-12-26 2004-07-22 Dowa Mining Co Ltd Metal-ceramics bonding substrate and its manufacturing method
KR100731604B1 (en) 2006-06-16 2007-06-22 삼성전기주식회사 Method for manufacturing printed circuit board with high stiffness
JP2008235852A (en) * 2007-02-23 2008-10-02 Hitachi Metals Ltd Ceramic substrate and semiconductor module using the same
KR101053141B1 (en) 2009-06-08 2011-08-02 서울과학기술대학교 산학협력단 Dummy pattern design method to suppress warpage of printed circuit board
JP5047315B2 (en) * 2010-01-26 2012-10-10 株式会社東芝 Ceramic circuit board
JP5522263B2 (en) * 2010-09-28 2014-06-18 株式会社村田製作所 Piezoelectric device and method for manufacturing piezoelectric device
JP5821389B2 (en) * 2011-04-20 2015-11-24 三菱マテリアル株式会社 Power module substrate manufacturing method and power module substrate
JP5725178B2 (en) * 2011-06-30 2015-05-27 日立金属株式会社 Brazing material, brazing material paste, ceramic circuit board, ceramic master circuit board and power semiconductor module

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0786703A (en) * 1993-09-10 1995-03-31 Toshiba Corp Ceramic circuit board
EP0670667A1 (en) * 1994-02-24 1995-09-06 Plessey Semiconductors Limited Direct copper bonded substrates
EP1345480A2 (en) * 2002-03-15 2003-09-17 Dowa Mining Co., Ltd. Ceramic circuit board and power module
US20130186677A1 (en) * 2008-09-08 2013-07-25 Samsung Electro-Mechanics Co., Ltd. Printed circuit board and method of manufacturing the same

Also Published As

Publication number Publication date
US20200357660A1 (en) 2020-11-12
EP3675604B1 (en) 2023-02-22
CN110945971B (en) 2023-09-26
CN110945971A (en) 2020-03-31
EP3675604A1 (en) 2020-07-01
WO2019039883A1 (en) 2019-02-28
US11355355B2 (en) 2022-06-07
KR20190022383A (en) 2019-03-06

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