EP3620662A1 - Appareil utilisateur pour un dispositif à vide - Google Patents

Appareil utilisateur pour un dispositif à vide Download PDF

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Publication number
EP3620662A1
EP3620662A1 EP18192923.3A EP18192923A EP3620662A1 EP 3620662 A1 EP3620662 A1 EP 3620662A1 EP 18192923 A EP18192923 A EP 18192923A EP 3620662 A1 EP3620662 A1 EP 3620662A1
Authority
EP
European Patent Office
Prior art keywords
vacuum
central unit
functional
user device
view
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
EP18192923.3A
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German (de)
English (en)
Inventor
Jochen BÖTTCHER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP18192923.3A priority Critical patent/EP3620662A1/fr
Publication of EP3620662A1 publication Critical patent/EP3620662A1/fr
Pending legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Definitions

  • the present invention relates to a user device for at least one vacuum device and to a vacuum arrangement equipped with such a user device.
  • Vacuum devices are typically operated via user devices, which can be designed as display and operating devices.
  • Such display and control devices are conventionally designed for the connection of only one specific type of vacuum device.
  • a display and operating device can be designed for connecting a specific vacuum pump or a specific measuring tube.
  • known display and control devices only offer limited and fixed options for display. Depending on the particular system configuration, this can result in a high level of operating effort or also a high level of device technology.
  • the object of the present invention is to provide a user device for at least one vacuum device, which ensures increased versatility or a reduction in the technical outlay in the operation of vacuum devices.
  • the task also consists in specifying a vacuum arrangement with such a user device.
  • a vacuum arrangement according to the invention is the subject of claim 15.
  • a user device is designed for use with at least one vacuum device.
  • a user device can in particular be a display and / or control device.
  • the user device can thus be designed to display vacuum device-specific contents and / or can be configured to operate a vacuum device connected to the user device.
  • a vacuum device in question can in particular be a vacuum pump, a vacuum measuring device, a vacuum analyzer, a leak detector and / or a vacuum valve.
  • a vacuum device can also be a vacuum chamber device.
  • a vacuum pump can advantageously be designed as a turbomolecular pump.
  • a vacuum pump can be a backing pump, in particular for a vacuum pump arrangement which also has a turbomolecular pump.
  • the term “vacuum device” is also intended to extend to pumps which are only designed to deliver incompressible fluids. The invention thus also relates to user devices for pumps which do not necessarily have to be designed to generate a vacuum.
  • a user device has at least one central unit for user interaction with at least one vacuum device and at least one interface for establishing a data connection between the central unit and a vacuum device.
  • the central unit is equipped with a display and / or input device for displaying at least one functional view equipped with at least one functional object.
  • the at least one functional view can be configured without programming.
  • program-free is to be understood here to mean that any configurations can be made free of source code access or free of source code changes. A separate programming by adapting or reformulating source codes is therefore not necessary with a programmable configurability.
  • the flexibility of use of the user device can thus be improved by the programmable configuration of the at least one functional view.
  • the operating effort or the equipment expense for different operating conditions can be reduced in this way.
  • the programmable configurability provided according to the invention enables the user device to be adapted in a particularly simple manner or the user device to be prepared for the intended operating conditions.
  • the user device is therefore versatile. In particular, this extends the area of use of the user device and improves the user-friendliness, since a restriction to predefined functional views, which can only be selected by the respective user, is no longer necessary.
  • the at least one functional object of the functional view can be an operating element for operating a vacuum device that is in data connection with the central unit.
  • the function object can accordingly as Input field or be designed as an input surface.
  • Such an operating element can enable input by different methods, for example by pressing, releasing and / or wiping by a user.
  • the functional object can be a graphic display for displaying any content, in particular context-specific content.
  • This can particularly preferably be device-specific contents of vacuum devices which are in data connection with the central unit.
  • the functional object can advantageously be used to represent data content which relates to all possible information or data sources present in a vacuum device, for example meta information, in particular hardware and / or software versions and / or names, process information, in particular current, voltage, power, temperature, pressure and / or speed, and / or configuration settings, in particular operating modes and / or accessories.
  • the data content can also relate to variable data points and / or commands for initiating certain process steps, in particular data sinks, for example commands for switching a drive on and / or off, specifications for process parameters such as power, speed, pressure and / or flow, and / or configuration settings.
  • the data content can also concern combinations of data sources and data sinks.
  • the data contents can be known to the user and / or the user device, in particular the central unit, and / or can be named by appropriate nomenclature, for example process value # 1 of a vacuum pump at serial address # 2 via RS485 connection # 3 optional module # 4.
  • it can also provide information about the data content present in a connected vacuum device via a serial Interface can be obtained and displayed for selection, especially if the connected vacuum device supports this.
  • the data content can also be described by meta information, for example addressing the data content (e.g. parameter number), name, physical unit, handling options (reading, writing, access restrictions), data type, minimum / maximum values for input and / or display.
  • the at least one functional view can be configured by programming-free new generation.
  • a desired or required functional view can thus be generated, a functional view to be generated being configurable according to the invention without programming.
  • the new function view can be generated without access to or modification of the source code, which can be stored in a storage unit of the central unit. Compared to the mere selection of a view, the function view is generated in an original way when it is created.
  • the at least one functional view can be configured by programming-free adaptation of an existing functional view.
  • An already stored or predefined function view can therefore be configured or reconfigured by adaptation.
  • individual functional elements can be added and / or removed. The effort on the part of the user for setting up the user device for the desired operating conditions can be reduced in this way.
  • the at least one functional view can be completely and / or partially configurable by programming-free creation and / or be configurable by programming-free adaptation of an existing functional view.
  • Configurability accordingly relates to part of the function view or to the entire function view.
  • the possibility of programmable configuration of the entire function view enables particularly high flexibility of use.
  • the possibility of partial configurability of the functional view can reduce the effort on the part of the user for setting up the user device for the respective intended use or prevent the removal of safety-relevant functional elements.
  • parts of the functional view can be predefined unchangeably or permanently, as a result of which, for example, assistance for a user or safety-relevant functional elements can be kept constantly available.
  • the functional view can be configurable without programming by generating, selecting and / or adapting a functional object and / or a plurality of functional objects.
  • the function view can be configurable without programming by compiling a plurality of selectable function objects.
  • Function objects can be compiled from existing function objects. For example, it is possible to compile individual function views from different predefined function views in a newly configured function view. In this way, for example, an overview of selected functional elements can be created in just one functional view. The requirement to switch between different functional views during operation can thereby be avoided or at least reduced. This applies in particular to case designs in which the user needs frequent access to functional elements of different preset functional views.
  • the type, position, shape, size and / or type of representation of the at least one functional object can be selected and / or adapted without programming.
  • the configuration flexibility of the at least one functional view can be further improved in this way.
  • the type of the respective functional object can be, for example, the form as a text display, graphic display, indicator, button, controller and / or graph.
  • the position, shape or size of a functional object can, for example, be changed temporarily, in particular a temporary enlargement to a maximum representation can take place, as a result of which a special signal effect or particularly good legibility for a user can be achieved.
  • the type of representation of a functional object can relate to a text form, a symbol form or orientations of text and symbol displays.
  • the representation type can likewise comprise constant and / or dynamic representations. For example, foreground or background colors or color adaptations can be predefined depending on predefined conditions, such as, for example, parameter threshold values.
  • the function objects are linked and / or linkable to data objects in the same way as the function views, in particular in a fixed, automatic and / or manual manner.
  • Data objects as data sources and / or data sinks can be present both in connected vacuum devices, for example as the actual pressure value of a measuring tube, and / or in parts of the user device, for example in or at a digital output in an expansion module.
  • Graphic properties of the functional object such as size, position, foreground / background color, shape, text, icons, or the like, can be both statically defined or definable or determined or determinable by one or more conditions.
  • a functional element can be linked to the actual pressure of a connected vacuum measuring tube and the color of the functional element colored depending on application-specific threshold values ("process pressure reached”: green, “process pressure not reached “: yellow,” process pressure critical ": red) and provided with appropriate texts.
  • the central unit is set up for automatic detection of a device and / or system configuration.
  • the central unit can recognize the prevailing device and / or system configuration automatically, in particular without further input from a user, and, if appropriate, also recognize the purpose of the device and / or system configuration that is expediently to be expected.
  • Such a detection can be used to support the programming-free configuration of the at least one function view.
  • the functional view can be configurable in a context-specific manner, in particular depending on a recognized device and / or system configuration.
  • the central unit can first carry out a recognition process for the respective device and / or system configuration.
  • a programming-free configuration of at least one functional view can then be carried out. If the configuration is dependent on a device and / or system configuration, it is a context-specific configuration.
  • the central unit can further preferably be set up for the automated configuration of the at least one functional view, in particular as a function of a recognized device and / or system configuration. Accordingly, a recognized device and / or system configuration can automatically trigger a configuration of the function view. Such a configuration based on a recognized device and / or system configuration can, in particular, be carried out without user input, so that the outlay on setting up such a user device can be further reduced.
  • the function view can be configured by the user according to preset specifications or also free of preset specifications without any programming.
  • a configuration according to preset specifications or free of preset specifications can take place independently of the respective device and / or system configuration.
  • the customization of the user device according to the ideas of the respective user can hereby be improved and thus the application flexibility can be further increased.
  • the interface can be provided on the central unit or on an expansion module connected to the central unit.
  • the interface can be set up for the connection of different device types. It is also possible to provide a plurality of interfaces which can be designed for the same device type or also for different device types. Two interfaces can be designed identically and / or differently. Different interfaces can be provided in particular for the connection of different types of devices. Different device types can also be connected to the same interface. Finally, a plurality of interfaces can be provided on the central unit, in particular directly on the central unit. Furthermore, at least one interface can be provided on the central unit and at least one further interface on an expansion module.
  • At least one interface of the central unit can be designed as a so-called default interface, via which an initial programming or configuration of the central unit can be carried out, in particular by connection to an external computer.
  • the central unit can also have an interface or a plurality of interfaces for establishing a data connection with a vacuum device.
  • the central unit can be expandable by at least one expansion module, preferably by a plurality of expansion modules.
  • expansion module the functionality of the central unit can be designed flexibly and depending on the user's ideas.
  • a respective device configuration can be determined by arranging and / or omitting at least one expansion module.
  • a device configuration can be defined by the type of expansion module and / or by the number of expansion modules. The device configuration thus relates to the compilation of the central unit and any existing expansion modules.
  • the at least one expansion module can advantageously be designed as an interface module for establishing a data connection with a vacuum device.
  • the interface of the user device can thus be provided on such an interface module.
  • the user device can have a plurality of interfaces. Multiple interfaces can be provided on one or more interface modules. It is also possible to provide a plurality of interface modules, each of which has an interface or a plurality of interfaces.
  • At least one expansion module can be used as a module for the input, acquisition and / or output of digital and / or analog signals.
  • a signal module can be used, for example, to measure environmental parameters and / or technical operating parameters, such as pressure in a medium to be conveyed.
  • At least one expansion module can be designed as a module for communication with higher-level controls.
  • a module is, for example, a so-called Ethernet module.
  • Ethernet module any other type of suitable interface for process control is also conceivable, for example DeviceNet, CANopen, Profibus, Ethernet with additional protocols and profiles, in particular EtherCAT, Profinet, Ethernet / IP, TCP / IP, UDP, MTTQ, OPC UA or similar.
  • vacuum devices of an older design for example, or a group of vacuum devices with a separate control can be controlled.
  • This is advantageous, for example, if the vacuum devices cannot be addressed directly by the higher-level control system, but rather are connected directly to the user device via interfaces and / or expansion modules and the higher-level control system then accesses them via the user device. In this way, a higher degree of compatibility of the user device can be created.
  • At least one of the expansion modules can be designed as a module for controlling storage media, in particular fixed storage media and / or removable storage media. It is also possible that at least one of the expansion modules contains a memory device. Relevant operating data can be safely stored in this way or made available for further use, which can ensure improved and safe operation of vacuum devices.
  • At least one expansion module can be designed as a power supply module, in particular for supplying current and / or voltage to the central unit, a vacuum device connected to the central unit and / or an additionally provided expansion module.
  • a power supply module thus supplies the central unit, a vacuum device and / or a further expansion module with current or voltage.
  • a total of one power supply module or a plurality of power supply modules can be provided. If a single power supply module is arranged, it can be set up to supply the central unit with current or voltage. Furthermore, the power supply module can indirectly ensure a current or voltage supply for connected vacuum devices or additional expansion modules via the central unit. This applies in particular to the case of a low current or voltage requirement of connected vacuum devices or additional expansion modules.
  • a plurality of power supply modules can also be provided, each of the power supply modules supplying different units. One of the power supply modules can be provided for supplying current and / or voltage to the central unit and another power supply module for supplying current and / or voltage to a connected vacuum device.
  • at least one power supply module is arranged externally, for example as part of a connected vacuum device. An external power supply module can in turn be arranged to supply current or voltage to the central unit and / or an expansion module.
  • the system configuration can be determined by establishing a data connection between the central unit and at least one vacuum device, in particular by the type of the vacuum device and / or by the number of vacuum devices.
  • the user device can thus establish a data connection with the vacuum device or a plurality of vacuum devices via the central unit.
  • a system configuration results from the entire arrangement of the user device and vacuum devices which are connected to the central unit of the user device.
  • Such a system configuration can depend on the existing one technical requirements are selected and implemented.
  • the user device can be suitable for a particularly large number of different system configurations, in particular due to the programmable configuration of the at least one functional view.
  • the programming-free configuration of the at least one functional view can be carried out as a function of the prevailing system configuration consisting of the user device and the vacuum device connected in each case.
  • the at least one functional object is linked to a data object of the central unit, an expansion module and / or a vacuum device which is connected to the central unit or is set up for the link.
  • a functional object provided in the functional view can thus be generated on the basis of data from the central unit, an expansion module and / or a vacuum device or can be in a permanent link for ongoing updating. In this way, a suitable access to data objects of the central unit, an optionally provided expansion module or a connected vacuum device can be guaranteed by a user.
  • the display and / or input device of the central unit is set up to display a plurality of function views and / or different function views.
  • the different function views can be configured without any programming according to different requirements. It is also possible for at least one functional view and / or at least one functional object of a functional view to be predetermined or predefined.
  • the respective functional view or the respective functional object can be designed to be unchangeable or also reconfigurable. Through a constant training, for example, security-relevant representations remain permanently displayed, which can reduce the risk of incorrect operation or prevent the occurrence of dangerous situations. Reconfigurability can make it possible to adapt predefined views or functional objects according to user ideas.
  • the functional view can be generated in a context-specific manner depending on a recognized pumping station configuration.
  • the context-specific functional view can preferably have functional objects that are necessary or suitable for the identified pumping station configuration.
  • a detected pumping station configuration can in particular be a pumping station with a turbomolecular pump and / or with a backing pump.
  • Context-specific generation of a functional view as a function of a recognized pumping station configuration can ensure the setup of a user device for a pumping station in a particularly simple manner.
  • the pumping station configuration can be recognized and, depending on the detection, a programming-free configuration of the functional view can be carried out.
  • Providing required or suitable functional objects for the respective pumping station configuration in particular reduces the effort on the part of the user for the configuration of the central unit or the respective functional view.
  • the central unit can be set up to display a configuration view.
  • the operating mode of the central unit itself can be adjustable via such a configuration view.
  • Such a configuration view can accordingly be a temporary view that is used to set or configure the central unit becomes.
  • the configuration view can also be used to configure or generate a function view without programming.
  • Such a configuration view can preferably have a list of functional objects and / or of data objects, in particular of data objects of the central unit, of an expansion module and / or of a vacuum device connected to the central unit. It can also be data and device-independent data objects. Such data objects are accordingly independent of the design of the central unit, any expansion modules provided and / or the vacuum device connected to the central unit. Such independent data objects can be, for example, web content or help information.
  • Another aspect of the present invention relates to a vacuum arrangement with a user device described above and at least one vacuum device which is in data connection via the interface of the user device with the central unit of the user device.
  • Such a vacuum arrangement can be configured or put together in a particularly simple manner and the respective user device can be set up with little effort or adapted to the respective configuration of the vacuum arrangement. This simplifies the operation of the overall application. An intervention in the source code of the central unit of the user device is not necessary for the setup.
  • a user device described above can be suitable for operation with vacuum devices and / or general devices or components of the respective application or the respective vacuum arrangement.
  • a display for example in the form of a warning lamp, can be controlled.
  • the Fig. 1 shows a schematic representation of a vacuum arrangement 10.
  • the vacuum arrangement 10 has a user device 12 and at least one vacuum device 14.
  • a total of five vacuum devices 14 are indicated schematically, although a different number of vacuum devices 14 can also be provided.
  • the vacuum devices 14 can be, for example, vacuum pumps, in particular turbomolecular pumps, vacuum measuring devices, vacuum analysis devices, leak detection devices and / or vacuum valves. Likewise, a vacuum device 14 can also be a vacuum chamber device.
  • a vacuum arrangement 10 can have a plurality of identical vacuum devices 14 or also different types of vacuum devices 14. Vacuum arrangements 10 with one or more vacuum devices 14 and one or more user devices 12 are also possible.
  • a user device 12 according to the invention for a vacuum device 14 has a central unit 16 for user interaction with at least one vacuum device 14 and at least one interface 18 for establishing a data connection between the central unit 16 and a vacuum device 14.
  • the interface 18 can be provided on the central unit 16, for example.
  • the user device 12 can also be equipped with at least one expansion module 20, in particular with a plurality of expansion modules 20.
  • the expansion modules 20 serve to expand the functions of the central unit 16 and can be connected to the central unit 16 via a bus connection 22.
  • the central unit 16 can be equipped with an internal interface 24.
  • the bus connection 22 can in particular be a CAN bus. Other bus connections can also be provided, for example I2C, RS485 and / or LVDS.
  • the expansion modules 20 can provide different functionalities.
  • interface modules 26 can be provided, each of which is equipped with an interface 28 for establishing a data connection between the central unit 16 and a vacuum device 14.
  • the interface 28 can be provided in addition or as an alternative to the interface 18.
  • a module 30 can be provided for input, acquisition and / or output of digital and / or analog signals.
  • a module 32 can be provided for communication with a higher-level controller 34.
  • a higher-level controller 34 can in turn control a vacuum device or a plurality of vacuum devices.
  • a module 36 for controlling storage media can also be provided.
  • the module 36 can be, for example, a module with a USB interface.
  • Other interfaces to storage media can also be provided, for example MMC, SD and / or ⁇ SD.
  • the central unit 16 can finally be equipped with a so-called default interface 38, via which the central unit can be preconfigured in the factory or an initial configuration can be carried out by installing software.
  • the default interface 38 can, however, also be implemented via the interface 18, so that, in the minimal configuration, only the interface 18 is used for software updates and other accesses in the course of production can.
  • the interface 18 can thus be used as the default interface.
  • At least one expansion module can be designed as a power supply module 40.
  • the power supply module 40 is used to supply the central unit 16 with current or voltage.
  • the central unit 16 can also supply current or voltage to vacuum devices 14, in particular if they only have a low current or voltage requirement.
  • a further power supply module 42 can also be provided for the direct current and / or voltage supply of a vacuum device or a plurality of vacuum devices.
  • a single power supply unit 40 or 42 can also supply the central unit 16, the extension modules 20, the vacuum devices 14 connected to the central unit 16 and / or the extension modules 20 and a vacuum device 14 connected directly to the user device 12.
  • individual expansion modules 20 can also be supplied with current or voltage via the power supply module 40, indirectly via the central unit 16.
  • the module 36 for controlling storage media can be supplied with current or voltage via the power supply module 40.
  • the central unit 16 can also have an internal storage device 44, on which operating software or other data can be stored.
  • operating software can in particular be a computer program product.
  • the central unit 16 also has a display and / or input device 46 for displaying at least one functional view 48.
  • the functional view 48 in turn has at least one functional object 50 or also a plurality of functional objects 50.
  • the functional elements 50 can be, for example, graphic displays for displaying any content or vacuum device-specific content.
  • the functional objects 50 can be input fields which ensure flexible operation of a vacuum device 14.
  • the display and / or input device 46 can in particular be designed as a touch panel, so that graphic displays and input fields can be combined together in one representation.
  • the at least one functional view 48 can now be configured without programming.
  • individual function objects 50 or more function objects 50 can be created, selected and / or adapted. It is also possible to suitably compile predefined function objects 50 in a function view 48 and thereby carry out a configuration.
  • the functional objects 50 can, for example, be selected from a plurality of different predefined views and can be suitably combined in a newly configured view, as a result of which the user requirements can be implemented flexibly.
  • the programmable configurability ensures, in particular, adjustments or new creation of a function view free of access to a source code. No programming effort at source code level is required to adapt the respective function view 48.
  • the central unit 16 can be set up to recognize a device configuration consisting of the compilation of the central unit 16 and any expansion modules 20 provided. Depending on such a detection, the respective functional view 48 can be configured or generated. Such generation can take place with or without user input, in particular automatically.
  • the central unit 16 is set up to recognize a system configuration which is formed by the user device 12 and the vacuum devices 14 which are in data communication with the central unit 16.
  • a function view 48 can be configured or generated depending on such a recognition. The recognition of the respective system configuration can lead to the configuration of a function view 48 which contains the functional objects 50 which are useful for the system configuration provided in each case.
  • the functional view 48 is configurable by the user free of presets or also through certain presets.
  • functional objects 50 can also be provided that represent or contain content that is independent of the operating device 12 or connected vacuum devices 14.
  • the programmable configuration of the at least one functional view 48 ensures good adaptability of the user device 12 to different circumstances.
  • the installation and operability of a vacuum device system 10 is thereby facilitated overall and the expenditure on equipment is reduced.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Stored Programmes (AREA)
EP18192923.3A 2018-09-06 2018-09-06 Appareil utilisateur pour un dispositif à vide Pending EP3620662A1 (fr)

Priority Applications (1)

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EP18192923.3A EP3620662A1 (fr) 2018-09-06 2018-09-06 Appareil utilisateur pour un dispositif à vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP18192923.3A EP3620662A1 (fr) 2018-09-06 2018-09-06 Appareil utilisateur pour un dispositif à vide

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EP3620662A1 true EP3620662A1 (fr) 2020-03-11

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4174321A1 (fr) * 2021-10-29 2023-05-03 Pfeiffer Vacuum Technology AG Pompe à vide

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030014160A1 (en) * 2001-07-13 2003-01-16 Helix Technology Corporation Vacuum system central control information server
DE202018102484U1 (de) * 2018-04-04 2018-05-18 Vacuubrand Gmbh + Co Kg Vorrichtung zur Steuerung und/oder Regelung eines Gasdrucks

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030014160A1 (en) * 2001-07-13 2003-01-16 Helix Technology Corporation Vacuum system central control information server
DE202018102484U1 (de) * 2018-04-04 2018-05-18 Vacuubrand Gmbh + Co Kg Vorrichtung zur Steuerung und/oder Regelung eines Gasdrucks

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP4174321A1 (fr) * 2021-10-29 2023-05-03 Pfeiffer Vacuum Technology AG Pompe à vide
JP2023067727A (ja) * 2021-10-29 2023-05-16 プファイファー・ヴァキューム・テクノロジー・アクチエンゲゼルシャフト 真空ポンプ

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