EP3465182A4 - Method and apparatus for x-ray microscopy - Google Patents
Method and apparatus for x-ray microscopy Download PDFInfo
- Publication number
- EP3465182A4 EP3465182A4 EP17810765.2A EP17810765A EP3465182A4 EP 3465182 A4 EP3465182 A4 EP 3465182A4 EP 17810765 A EP17810765 A EP 17810765A EP 3465182 A4 EP3465182 A4 EP 3465182A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- ray microscopy
- microscopy
- ray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/041—Phase-contrast imaging, e.g. using grating interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
- G01N23/201—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials by measuring small-angle scattering
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/02—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators
- G21K1/025—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diaphragms, collimators using multiple collimators, e.g. Bucky screens; other devices for eliminating undesired or dispersed radiation
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/06—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating using diffraction, refraction or reflection, e.g. monochromators
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K7/00—Gamma- or X-ray microscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/60—Specific applications or type of materials
- G01N2223/611—Specific applications or type of materials patterned objects; electronic devices
- G01N2223/6116—Specific applications or type of materials patterned objects; electronic devices semiconductor wafer
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/044—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using laminography or tomosynthesis
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2207/00—Particular details of imaging devices or methods using ionizing electromagnetic radiation such as X-rays or gamma rays
- G21K2207/005—Methods and devices obtaining contrast from non-absorbing interaction of the radiation with matter, e.g. phase contrast
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- General Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Crystallography & Structural Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/173,711 US10401309B2 (en) | 2014-05-15 | 2016-06-05 | X-ray techniques using structured illumination |
| US201662401164P | 2016-09-28 | 2016-09-28 | |
| US201662429587P | 2016-12-02 | 2016-12-02 | |
| US201662429760P | 2016-12-03 | 2016-12-03 | |
| US201762485916P | 2017-04-15 | 2017-04-15 | |
| US15/605,957 US10352880B2 (en) | 2015-04-29 | 2017-05-26 | Method and apparatus for x-ray microscopy |
| PCT/US2017/035800 WO2017213996A1 (en) | 2016-06-05 | 2017-06-02 | Method and apparatus for x-ray microscopy |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP3465182A1 EP3465182A1 (en) | 2019-04-10 |
| EP3465182A4 true EP3465182A4 (en) | 2020-03-18 |
Family
ID=60578901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP17810765.2A Withdrawn EP3465182A4 (en) | 2016-06-05 | 2017-06-02 | Method and apparatus for x-ray microscopy |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP3465182A4 (en) |
| JP (1) | JP6775035B2 (en) |
| KR (1) | KR20190015531A (en) |
| CN (1) | CN109564176A (en) |
| WO (1) | WO2017213996A1 (en) |
Families Citing this family (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150117599A1 (en) | 2013-10-31 | 2015-04-30 | Sigray, Inc. | X-ray interferometric imaging system |
| US10297359B2 (en) | 2013-09-19 | 2019-05-21 | Sigray, Inc. | X-ray illumination system with multiple target microstructures |
| US10295485B2 (en) | 2013-12-05 | 2019-05-21 | Sigray, Inc. | X-ray transmission spectrometer system |
| US10269528B2 (en) | 2013-09-19 | 2019-04-23 | Sigray, Inc. | Diverging X-ray sources using linear accumulation |
| US10304580B2 (en) | 2013-10-31 | 2019-05-28 | Sigray, Inc. | Talbot X-ray microscope |
| USRE48612E1 (en) | 2013-10-31 | 2021-06-29 | Sigray, Inc. | X-ray interferometric imaging system |
| US10401309B2 (en) | 2014-05-15 | 2019-09-03 | Sigray, Inc. | X-ray techniques using structured illumination |
| US10352880B2 (en) | 2015-04-29 | 2019-07-16 | Sigray, Inc. | Method and apparatus for x-ray microscopy |
| US10295486B2 (en) | 2015-08-18 | 2019-05-21 | Sigray, Inc. | Detector for X-rays with high spatial and high spectral resolution |
| US10247683B2 (en) | 2016-12-03 | 2019-04-02 | Sigray, Inc. | Material measurement techniques using multiple X-ray micro-beams |
| JP6937380B2 (en) | 2017-03-22 | 2021-09-22 | シグレイ、インコーポレイテッド | Methods for performing X-ray spectroscopy and X-ray absorption spectroscopy systems |
| US10578566B2 (en) | 2018-04-03 | 2020-03-03 | Sigray, Inc. | X-ray emission spectrometer system |
| EP3804472A4 (en) * | 2018-05-25 | 2022-03-23 | Micro-X Limited | A device for applying beamforming signal processing to rf modulated x-rays |
| DE112019002822T5 (en) | 2018-06-04 | 2021-02-18 | Sigray, Inc. | WAVELENGTH DISPERSIVE X-RAY SPECTROMETER |
| JP7117452B2 (en) | 2018-07-26 | 2022-08-12 | シグレイ、インコーポレイテッド | High brightness reflection type X-ray source |
| US10656105B2 (en) | 2018-08-06 | 2020-05-19 | Sigray, Inc. | Talbot-lau x-ray source and interferometric system |
| WO2020051061A1 (en) | 2018-09-04 | 2020-03-12 | Sigray, Inc. | System and method for x-ray fluorescence with filtering |
| WO2020051221A2 (en) | 2018-09-07 | 2020-03-12 | Sigray, Inc. | System and method for depth-selectable x-ray analysis |
| CN113678025B (en) * | 2019-04-18 | 2024-07-23 | 棱镜传感器公司 | Coaxial X-ray focusing optics for manipulating X-rays in medical transmission radiography |
| US11733182B2 (en) * | 2019-12-20 | 2023-08-22 | Varex Imaging Corporation | Radiographic inspection system for pipes and other structures using radioisotopes |
| CN111221025B (en) * | 2020-01-21 | 2021-08-24 | 中国工程物理研究院流体物理研究所 | Detector with filament array as cathode, use method and calibration method |
| US11175243B1 (en) | 2020-02-06 | 2021-11-16 | Sigray, Inc. | X-ray dark-field in-line inspection for semiconductor samples |
| WO2021237237A1 (en) | 2020-05-18 | 2021-11-25 | Sigray, Inc. | System and method for x-ray absorption spectroscopy using a crystal analyzer and a plurality of detector elements |
| US11549895B2 (en) | 2020-09-17 | 2023-01-10 | Sigray, Inc. | System and method using x-rays for depth-resolving metrology and analysis |
| CN112268914B (en) * | 2020-12-07 | 2021-04-30 | 西安稀有金属材料研究院有限公司 | Nondestructive testing method for accident-resistant coating of full-size nuclear fuel cladding tube element |
| US11686692B2 (en) | 2020-12-07 | 2023-06-27 | Sigray, Inc. | High throughput 3D x-ray imaging system using a transmission x-ray source |
| WO2023177981A1 (en) | 2022-03-15 | 2023-09-21 | Sigray, Inc. | System and method for compact laminography utilizing microfocus transmission x-ray source and variable magnification x-ray detector |
| US11885755B2 (en) | 2022-05-02 | 2024-01-30 | Sigray, Inc. | X-ray sequential array wavelength dispersive spectrometer |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100260315A1 (en) * | 2009-04-10 | 2010-10-14 | Canon Kabushiki Kaisha | Source grating for talbot-lau-type interferometer |
| US20150117599A1 (en) * | 2013-10-31 | 2015-04-30 | Sigray, Inc. | X-ray interferometric imaging system |
| WO2015168473A1 (en) * | 2014-05-01 | 2015-11-05 | Sigray, Inc. | X-ray interferometric imaging system |
| WO2015176023A1 (en) * | 2014-05-15 | 2015-11-19 | Sigray, Inc. | X-ray method for measurement, characterization, and analysis of periodic structures |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3512874B2 (en) * | 1993-11-26 | 2004-03-31 | 株式会社東芝 | X-ray computed tomography equipment |
| EP0655713B1 (en) * | 1993-11-26 | 2000-08-23 | Kabushiki Kaisha Toshiba | Computerized tomography apparatus |
| US7103138B2 (en) * | 2004-08-24 | 2006-09-05 | The Board Of Trustees Of The Leland Stanford Junior University | Sampling in volumetric computed tomography |
| WO2007122770A1 (en) * | 2006-04-13 | 2007-11-01 | Shimadzu Corporation | Three-dimensional quantitatively determining method using transmitted x-rays |
| US20100012845A1 (en) * | 2006-12-22 | 2010-01-21 | Koninklijke Philips Electronics N. V. | Energy-resolving detection system and imaging system |
| US7924977B2 (en) * | 2008-03-07 | 2011-04-12 | Morpho Detection, Inc. | Methods, a processor, and a system for improving an accuracy of identification of a substance |
| JP6036321B2 (en) * | 2012-03-23 | 2016-11-30 | 株式会社リガク | X-ray composite device |
| US9129715B2 (en) * | 2012-09-05 | 2015-09-08 | SVXR, Inc. | High speed x-ray inspection microscope |
| JP2015072263A (en) * | 2013-09-09 | 2015-04-16 | キヤノン株式会社 | X-ray imaging system |
| US9449781B2 (en) * | 2013-12-05 | 2016-09-20 | Sigray, Inc. | X-ray illuminators with high flux and high flux density |
| US9390881B2 (en) * | 2013-09-19 | 2016-07-12 | Sigray, Inc. | X-ray sources using linear accumulation |
| US9874531B2 (en) * | 2013-10-31 | 2018-01-23 | Sigray, Inc. | X-ray method for the measurement, characterization, and analysis of periodic structures |
| US9719947B2 (en) * | 2013-10-31 | 2017-08-01 | Sigray, Inc. | X-ray interferometric imaging system |
| US9594036B2 (en) * | 2014-02-28 | 2017-03-14 | Sigray, Inc. | X-ray surface analysis and measurement apparatus |
| JP6495943B2 (en) * | 2014-05-09 | 2019-04-03 | ザ・ジョンズ・ホプキンス・ユニバーシティー | System and method for phase contrast x-ray imaging |
-
2017
- 2017-06-02 EP EP17810765.2A patent/EP3465182A4/en not_active Withdrawn
- 2017-06-02 JP JP2018563587A patent/JP6775035B2/en active Active
- 2017-06-02 CN CN201780045768.2A patent/CN109564176A/en active Pending
- 2017-06-02 WO PCT/US2017/035800 patent/WO2017213996A1/en unknown
- 2017-06-02 KR KR1020197000360A patent/KR20190015531A/en not_active Application Discontinuation
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100260315A1 (en) * | 2009-04-10 | 2010-10-14 | Canon Kabushiki Kaisha | Source grating for talbot-lau-type interferometer |
| US20150117599A1 (en) * | 2013-10-31 | 2015-04-30 | Sigray, Inc. | X-ray interferometric imaging system |
| WO2015168473A1 (en) * | 2014-05-01 | 2015-11-05 | Sigray, Inc. | X-ray interferometric imaging system |
| WO2015176023A1 (en) * | 2014-05-15 | 2015-11-19 | Sigray, Inc. | X-ray method for measurement, characterization, and analysis of periodic structures |
Non-Patent Citations (1)
| Title |
|---|
| See also references of WO2017213996A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2017213996A1 (en) | 2017-12-14 |
| EP3465182A1 (en) | 2019-04-10 |
| JP6775035B2 (en) | 2020-10-28 |
| CN109564176A (en) | 2019-04-02 |
| KR20190015531A (en) | 2019-02-13 |
| JP2019523871A (en) | 2019-08-29 |
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| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE |
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| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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| STAA | Information on the status of an ep patent application or granted ep patent |
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| 17P | Request for examination filed |
Effective date: 20190104 |
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| AK | Designated contracting states |
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| AX | Request for extension of the european patent |
Extension state: BA ME |
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| DAV | Request for validation of the european patent (deleted) | ||
| DAX | Request for extension of the european patent (deleted) | ||
| A4 | Supplementary search report drawn up and despatched |
Effective date: 20200217 |
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| RIC1 | Information provided on ipc code assigned before grant |
Ipc: G21K 1/02 20060101ALI20200211BHEP Ipc: G21K 1/06 20060101ALI20200211BHEP Ipc: G01N 23/04 20180101AFI20200211BHEP Ipc: G21K 7/00 20060101ALI20200211BHEP Ipc: G01N 23/201 20180101ALN20200211BHEP |
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| STAA | Information on the status of an ep patent application or granted ep patent |
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| 18D | Application deemed to be withdrawn |
Effective date: 20200916 |