EP3396171B1 - Vacuum device having a shaft seal - Google Patents
Vacuum device having a shaft seal Download PDFInfo
- Publication number
- EP3396171B1 EP3396171B1 EP17168193.5A EP17168193A EP3396171B1 EP 3396171 B1 EP3396171 B1 EP 3396171B1 EP 17168193 A EP17168193 A EP 17168193A EP 3396171 B1 EP3396171 B1 EP 3396171B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- lubricant
- stator
- rotor element
- vacuum device
- accordance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000314 lubricant Substances 0.000 claims description 110
- 238000007789 sealing Methods 0.000 claims description 36
- 238000010276 construction Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 description 8
- 230000007704 transition Effects 0.000 description 7
- 230000005012 migration Effects 0.000 description 5
- 238000013508 migration Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 210000000078 claw Anatomy 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
- F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
- F04C27/009—Shaft sealings specially adapted for pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/02—Lubrication; Lubricant separation
- F04C29/028—Means for improving or restricting lubricant flow
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/06—Lubrication
- F04D29/063—Lubrication specially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/10—Shaft sealings
- F04D29/102—Shaft sealings especially adapted for elastic fluid pumps
Definitions
- the present invention relates to a vacuum device, in particular a vacuum pump, with a lubricant-free space and a lubricant-containing space and with a rotatably mounted shaft which is arranged at least in sections in the two spaces.
- Vacuum pumps for the fore-vacuum range are, for example, single-stage or multi-stage Roots pumps, which are also known as Roots pumps or multi-stage Roots pumps, screw pumps, claw pumps, scroll pumps or rotary vane pumps.
- rooms in which the lubricant is located can also be evacuated. This creates a flow of a mixture of lubricant and gas into spaces of the vacuum device in which the lubricant is not desired, for example into a suction space of a vacuum pump. If such a suction chamber is connected to a high vacuum area of a vacuum system, contamination of the high vacuum area can occur due to the flow of the mixture of lubricant and gas or the migration of the lubricant into the suction chamber of the vacuum pump. Technological processes or scientific investigations that require a lubricant-free high vacuum range can therefore be severely disrupted by the migration of the lubricant into the suction chamber of the vacuum pump.
- the migration of the lubricant causes a deterioration in the lubricating properties in the areas in which the shaft of the vacuum device is supported. This will shorten the life of the vacuum device. In extreme cases, the component to be lubricated and thus the vacuum device as a whole can even fail completely.
- labyrinth seals are often used. These seals have a gap between the two spaces, the length of which is deliberately increased in order to lengthen the flow path for the lubricant or for a mixture of lubricant and gas. Reliably sealing labyrinth seals therefore require considerable axial and radial installation space.
- a vacuum device with the features of claim 1 and in particular in that a sealing device is provided between a lubricant-free space and a lubricant-containing space in which a rotatably mounted shaft is arranged at least in sections, through which the Shaft passes through.
- the sealing device comprises a rotor element which is connected to the shaft in a rotationally fixed manner, and a first stator element which is arranged in a rotationally fixed manner between the spaces.
- a first gap with an inlet opening which is open to the space containing the lubricant is formed between the first stator element and the rotor element.
- the first gap also has an outlet opening which is opposite the inlet opening and is connected to a first expansion space which has a larger cross-sectional area than the first gap and which is formed by wall sections of the rotor element and the stator element.
- the first expansion space is also connected to a lubricant sump.
- the connection between the first expansion space and the lubricant sump can be a direct connection if the first expansion space and the lubricant sump adjoin one another, or an indirect connection in which further elements and spaces of the sealing device are between the first expansion space and the lubricant sump and possibly lubricant channels are arranged.
- the sealing device is thus designed to separate a lubricant that originates from the space containing the lubricant and to divert it into the lubricant sump. Consequently, the sealing device also acts as a lubricant separator.
- a transition from the first gap to the first expansion space is thus provided, in which the cross-sectional area preferably increases abruptly. According to Bernoulli's law, this reduces the speed of the molecules of the lubricant which pass through the first gap from the space containing a lubricant into the first expansion space. They also occur in the first expansion room local negative pressure areas during operation of the vacuum device, which lead to turbulence in the flow of the molecules of the lubricant.
- the sealing device according to the invention Due to the presence of the first expansion space with an enlarged cross-sectional area compared to the first gap, no extension of the first gap is required in the sealing device according to the invention in order to improve the sealing effect of the sealing device.
- the rotor element and the first stator element, between which the first gap and the first expansion space are located, are therefore smaller in size compared to corresponding sealing devices from the prior art.
- the sealing device comprises a second stator element which is arranged on that side of the rotor element that faces the lubricant-free space, while the first stator element is arranged on the opposite side of the rotor element that faces the space that contains the lubricant.
- the rotor element is thus arranged between two stator elements which each face the lubricant-free space and the space with lubricant.
- With the second stator element further gaps and expansion spaces are formed between wall sections of the rotor element and the second stator element.
- the second stator element thus almost doubles the probability that a molecule of the lubricant, which enters the sealing device from the space with lubricant, hits a wall section of the rotor element or of the first or second stator element. Furthermore, the path that a molecule of the lubricant has to cover from the space with lubricant to the lubricant-free space is considerably lengthened by the second stator element. Overall, the second stator element thus additionally improves the seal between the two spaces with lubricant or without lubricant.
- the first and the second stator element are structurally identical. Alternatively or additionally, the first and the second stator element are constructed and / or arranged symmetrically with respect to the rotor element. A structurally identical and / or symmetrical design of the two stator elements simplifies their manufacture and their assembly on the vacuum device.
- the rotor element is alternatively or additionally constructed symmetrically with respect to the first and the second stator element.
- the rotor element thus has the same geometry both in the direction of the first and the second stator element, in particular with the constrictions or constrictions described above, between which sections of the two stator elements are located. This doubles the number of gaps and expansion spaces between the rotor element and the stator elements, which further improves the effect of the sealing device.
- a second gap is formed between the first stator element and the rotor element, the inlet opening of which coincides with the first Expansion space communicating.
- the second gap has an outlet opening opposite the inlet opening, which is connected to a second expansion space, which in turn has a larger cross-sectional area than the second gap and, like the first expansion space, is formed by wall sections of the rotor element and the stator element.
- the sealing device thus has two transitions between a gap with a smaller cross-sectional area and an expansion space with a larger cross-sectional area along the path that molecules of the lubricant travel between the space containing a lubricant and the lubricant-free space.
- This double transition between a gap and an expansion space and the associated reduction in the velocity of the lubricant molecules thus further increases the probability that the gas molecules will hit wall sections of the rotor element or the stator element and be diverted into the lubricant sump.
- gaps and expansion spaces connected to them can be formed between the first stator element and the rotor element, so that overall there is a "cascading" of successive gaps and expansion spaces between the first stator element and the rotor element.
- the effect of the transition between the respective columns and expansion spaces is multiplied with their number.
- the rotor element preferably has an inner section through which the shaft passes in an axial direction, a central section which adjoins the inner section in a radial direction with respect to the shaft, and an outer section which joins in the radial direction adjoins the middle section.
- the middle section has a smaller extension in the axial direction than the inner and outer sections.
- the rotor element has an enlarged surface with which the molecules of the lubricant can come into contact. Furthermore, due to the constriction, the molecules of the lubricant are reflected on an outer surface of the inner section, so that they are deflected in the direction of an inner surface of the outer section and impinge on the inner surface of the outer section. This in turn increases the likelihood that the molecules of the lubricant will hit wall sections of the rotor element and be guided in the direction of the lubricant sump.
- An inner portion of the first stator element is preferably arranged in the radial direction between the inner and outer portions of the rotor element. Wall sections of the respective inner section of the first stator element and of the rotor element form the first gap.
- the first stator element and the rotor element thus have an "interlocking" arrangement. This leads to a lengthening of the path for the molecules of the lubricant between the space containing the lubricant and the lubricant-free space. This in turn improves the seal between these two spaces.
- the first expansion space is formed in particular by wall sections of the inner section of the first stator element and by wall sections of the inner, middle and outer sections of the rotor element.
- the first expansion space has, for example, three moving wall sections which are formed by the rotor element.
- the movement of the wall sections increases the turbulence in the first expansion space.
- the molecules of the lubricant as a whole preferentially move in a radial direction Direction, because due to the larger area of the outer section located further out in the axial direction compared to the inner section of the rotor element, they are more likely to impinge on the outer section of the rotor element and adhere to or be diverted from it.
- the middle section of the rotor element preferably comprises an inner, a middle and an outer section, the middle section having a greater extent in the axial direction than the inner and the outer section.
- the middle section of the rotor element which is constricted in comparison to the inner and outer sections of the rotor element, is thus divided into three further subsections, of which the middle subsection is widened in the axial direction compared to the two further subsections.
- the rotor element thus has two constrictions, seen in the radial direction, which are located in the area of the inner and outer subsections of the central section.
- the first stator element has at least one axial recess within which a recess extending in the axial direction Section of the rotor element is arranged.
- the first stator element and the rotor element thus in turn have an "interlocking" arrangement in which the path for the molecules of the lubricant between the space with lubricant and the lubricant-free space is lengthened. This in turn improves the seal between the two spaces, since the molecules of the lubricant are more likely to hit wall sections.
- the rotor element preferably has at least one constriction in a direction that is axial with respect to the shaft, in which an axial projection of the stator element is arranged in such a way that the first and second gap and the first and the second gap as well as the first and the second expansion space are formed.
- the meshing of the rotor element and the stator element thus leads to the formation of two gaps and two expansion spaces. This gives the sealing device a compact structure in which, however, two transitions are provided between a respective gap and an expansion space.
- the sealing device still has the advantage described above, due to the two transitions between a respective gap and expansion space, that the probability of molecules of the lubricant hitting wall sections is increased and thereby the seal between the lubricant-free space and the space is increased Lubricant is improved.
- the first stator element also preferably has at least one drain opening which is in communication with the lubricant sump.
- the outflow opening is arranged in particular on an outer circumference of the stator element.
- the first expansion space which is formed by wall sections of both the rotor element and the stator element, is only indirectly connected to the lubricant sump in this embodiment.
- the lubricant is thus by means of the Drain opening canalized in the direction of the lubricant sump, in particular the rotational movement of the rotary element and the associated preferred direction of the lubricant in the radial direction is used.
- the vacuum device has, in particular, a housing within which the first and / or the second stator element are arranged in a rotationally fixed manner and the rotor element is rotatably arranged.
- the housing also has an outflow channel for the lubricant, which is in connection with at least one outflow opening of the first and / or the second stator element and with the lubricant sump.
- the drainage channel of the housing thus serves to “collect” the lubricant, in particular when the first and / or the second stator element have several drainage openings.
- the first and / or the second stator element and / or the rotor element preferably have inclined surfaces which are provided for guiding and / or for dripping off the lubricant.
- the inclined surfaces can also enlarge the expansion space or the expansion spaces between the rotor element and the two stator elements.
- the inclined surfaces can be arranged in such a way that they support the transport of the lubricant due to the rotation of the rotor element in the radial direction.
- an edge can be formed between an inclined surface and a straight surface, on which the lubricant drips off in a preferred direction.
- a section of a vacuum device is shown, which is, for example, a vacuum pump, for example a Roots pump.
- a shaft 13 which can be rotated about a shaft axis 14, is arranged in a housing 11 of the vacuum device.
- the shaft 13 is supported by a bearing 15 which is shown in Figure 3B is shown schematically and which is located in a space 17 containing a lubricant within the housing 11.
- the shaft 13 extends through a lubricant-free space 19 which is connected to a suction chamber, not shown, of the vacuum device or the vacuum pump.
- a lubricant-free space 19 which is connected to a suction chamber, not shown, of the vacuum device or the vacuum pump.
- the shaft 13 is driven to rotate by means of a motor in order, for example, to convey a gas from an inlet of the vacuum device or the vacuum pump to an outlet.
- the pump chamber and also the lubricant-free chamber 19 are evacuated during the operation of the vacuum device or the vacuum pump.
- the pressure in the lubricant-free space 19 is consequently lower than in the space 17 containing the lubricant.
- a sealing device 21 is provided through which the shaft 13 passes and which is arranged between the two spaces 17, 19.
- the sealing device 21 comprises a first stator element 23 and a second stator element 25, which are arranged non-rotatably in the housing 11.
- the sealing device 21 comprises a rotor element 27 which is connected to the shaft 13 in a rotationally fixed manner.
- the rotor element 27 is arranged in the axial direction between the first and the second stator element 23, 25 and is enclosed by these after the assembly of the sealing device 21.
- the first and the second stator element 23, 25 as well as the rotor element 27 are ring-shaped and are arranged centered with respect to the shaft axis 14 (cf. Figures 1 to 3B ).
- the first and second stator elements 23, 25 have a plurality of drainage openings 29 for the lubricant on the outer circumference, which are dimensioned and distributed in such a way that at least one drainage opening 29 is connected to a drainage channel 31 in the housing 11. This facilitates assembly, since the relative angular position of the stator elements 23, 25 is then only of subordinate importance. Via the outflow openings 29 of the first and second stator elements 23, 25, lubricant passes from the sealing device 21 into the outflow channel 31 and further into a lubricant sump (not shown).
- the rotor element 27 has an inner section 33 which is connected to the shaft 13. In the area of the inner In section 33, the rotor element 27 has the greatest extent or width in an axial direction, ie parallel to the shaft axis 14. In a radial direction with respect to the shaft axis 14, the inner section 33 of the rotor element 27 is adjoined by a central section 35, in which the rotor element 27 has the smallest extension or width in the axial direction.
- the rotor element 27 comprises an outer section 37 which, compared to the central section 35, in turn has a greater extension or width in the axial direction, but which is smaller than the extension of the inner section 33 in the axial direction.
- the outer section 37 of the rotor element 27 also has a stepped profile on the outside, i.e. viewed in the radial direction, which is formed by inclined surfaces 39 and surfaces 41 running in the radial direction.
- the first and the second stator element 23, 25 each have an inner section 43 with a projection 45 on the inner circumference (cf. Figure 3C , 3D and 3E ), which extends in the axial direction and in the direction of the central section 35 of the rotor element 27.
- the projection 45 of the first and second stator elements 23, 25 each has an extension 47 which extends radially outward from the projection 45 of the stator element 23, 25 .
- the inner section 43 of the first and the second stator element 23, 25 thus has an L-shape which comprises the projection 45 and the extension 47.
- the projection 45 and the extension 47 of the respective stator element 23, 25 are thus arranged in the area of a constriction of the rotor element 27, which is formed by the central section 35 of the rotor element 27.
- the outer section 37 of the rotor element 27 is also arranged in a recess 49 of the respective stator element 23, 25.
- a first gap 51 is formed between the projection 45 of the first stator element 23 and the inner section 33 of the rotor element 27, which gap 51 has a small cross-sectional area and an inlet opening 53 and an outlet opening 55.
- the inlet opening 53 of the first gap 51 is open to the space 17 containing the lubricant, while the outlet opening 55 is connected to a first expansion space 57.
- the first expansion space 57 has a larger cross-sectional area than the first gap 51. Furthermore, the first expansion space 57 is formed by a respective wall section of the inner, middle and outer sections 33, 35, 37 of the rotor element 27 and by a wall section of an inner section 43 of the first stator element 23, this wall section being formed by the projection 45 and the extension 47 is formed.
- FIG. 8 shows an enlarged area of the rotor element 27 and the first stator element 23, which is shown in FIG Figure 3D is denoted by B.
- the mixture of gas and lubricant emerges from the outlet opening 55 of the first gap 51 in the sealing device 21 according to the invention, its speed is reduced according to Bernoulli's law, since the cross-sectional area of the first expansion space 57 is larger than the cross-sectional area of the first gap 51. Furthermore, turbulence occurs in the first expansion space 57 due to local negative pressure areas. This leads to the fact that in the first expansion space 57 the probability of molecules of the lubricant impinging on the wall sections of the rotor element 27 or of the first stator element 23 is significantly increased compared to the first gap 51.
- a second gap 59 is also formed between an inner surface of the outer section 37 of the rotor element 27 and the extension 47 on the projection 45 of the first stator element 23.
- An inlet opening 61 of the second gap 59 is connected to the first expansion space 57, while an outlet opening 63 of the second gap 59 is connected to a second expansion space 65.
- the second expansion space 65 again has a larger cross-sectional area than the second gap 59, so that the speed of the mixture of gas and lubricant is again reduced when it enters the second expansion space 65. Furthermore, turbulence also occurs in the second expansion space 65 due to local negative pressure areas.
- the second expansion space 65 is formed by wall sections of the outer section 37 of the rotor element 27 and by opposing wall sections of the first stator element 23. Due to the profiled outer surface of the outer Section 37 of the rotor element 27 with surfaces 41 running in the radial direction and inclined surfaces 39, the second expansion space 65 has an inner structure with constrictions and widenings, each of which has cross-sectional areas of different sizes. As a result, the turbulence within the second expansion space 65 is additionally increased compared to the first expansion space 57.
- the second expansion space 65 is also adjoined by one of the outflow openings 29 of the first and second stator elements 23, 25 in the radial direction and by a further expansion space of the second stator element 25 in the axial direction.
- the first and the second stator element 23, 25 are structurally identical and are only arranged on different sides of the rotor element 27.
- the first and the second stator element 23, 25 are also arranged symmetrically to one another with respect to the rotor element 27. How to get in Figure 3C and 3D can see, the sequence of two further expansion spaces and two further gaps is repeated between the rotor element 27 and the second stator element 25 as between the rotor element 27 and the first stator element 23, but in the reverse order.
- the molecules of the flow of gas and lubricant that enter the inlet opening 53 of the first gap 51 must go through a comparatively long and labyrinth-like path on the way to entering the lubricant-free space, within which several transitions between a respective gap with a small cross-sectional area and a respective expansion space with a larger cross-sectional area are arranged.
- the probability within the sealing device 21 according to the invention is therefore significantly increased that molecules of the lubricant will strike a wall section of the rotor element 27 or the first or second stator element 23, 25.
- the molecules of the lubricant are also driven by the rotational movement of the rotor element 27 is accelerated outward in the radial direction.
- the sealing device 21 thus improves the separation of gas and lubricant which enter the sealing device 21 from the space 17 containing the lubricant.
- FIGs 4A, 4B and 4C a second embodiment of the vacuum device according to the invention is shown.
- This differs from the in Figures 1 to 3E illustrated embodiment on the one hand in that the middle section 35 of the rotor element 27 is divided into three sections, namely into an inner section 71, a middle section 73 and an outer section 75 greater width than the inner and outer subsections 71, 75. Since the first and the second stator element 23, 25 have corresponding projections, a structure with a total of ten columns and ten expansion spaces is thus formed overall between the rotor element 27 and the first or second stator element 23, 25.
- the expansion spaces of the second embodiment have additional inclined surfaces which are formed by corresponding wall sections of the first and second stator elements 23, 25, respectively. Due to the larger number of gaps and expansion spaces compared to the first embodiment, the probability of molecules of the lubricant hitting wall sections of the rotor element 27 or of the first or second stator element 23, 25 is further increased in the second embodiment. This will make the seal of the lubricant * Free space 19 compared to the space 17 containing the lubricant with the sealing device 21 according to the second embodiment improved again.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Description
Die vorliegende Erfindung betrifft ein Vakuumgerät, insbesondere eine Vakuumpumpe, mit einem schmiermittelfreien Raum und einem ein Schmiermittel enthaltenden Raum sowie mit einer drehbar gelagerten Welle, die zumindest abschnittsweise in den beiden Räumen angeordnet ist.The present invention relates to a vacuum device, in particular a vacuum pump, with a lubricant-free space and a lubricant-containing space and with a rotatably mounted shaft which is arranged at least in sections in the two spaces.
Viele Vakuumgeräte, wie beispielsweise Vakuumpumpen im Vorvakuumbereich einer Vakuumanlage, weisen Lager- und Getriebeteile auf, die mit einem Schmiermittel geschmiert werden. Vakuumpumpen für den Vorvakuumbereich sind beispielsweise einstufige oder mehrstufige Wälzkolbenpumpen, die auch als Rootspumpen bzw. Multi-Stage-Rootspumpen bekannt sind, Schraubenpumpen, Klauenpumpen, Scrollpumpen oder Drehschieberpumpen.Many vacuum devices, such as vacuum pumps in the fore-vacuum area of a vacuum system, have bearing and gear parts that are lubricated with a lubricant. Vacuum pumps for the fore-vacuum range are, for example, single-stage or multi-stage Roots pumps, which are also known as Roots pumps or multi-stage Roots pumps, screw pumps, claw pumps, scroll pumps or rotary vane pumps.
Im Betrieb des Vakuumgeräts können auch Räume, in denen sich das Schmiermittel befindet, evakuiert werden. Dadurch entsteht eine Strömung eines Gemischs aus Schmiermittel und Gas in Räume des Vakuumgeräts hinein, in denen das Schmiermittel nicht erwünscht ist, beispielsweise in einen Schöpfraum einer Vakuumpumpe. Wenn ein solcher Schöpfraum mit einem Hochvakuumbereich einer Vakuumanlage verbunden ist, kann durch die Strömung des Gemischs aus Schmiermittel und Gas bzw. die Migration des Schmiermittels in den Schöpfraum der Vakuumpumpe eine Kontamination des Hochvakuumbereichs auftreten. Technologische Prozesse oder wissenschaftliche Untersuchungen, die einen schmiermittelfreien Hochvakuumbereich erfordern, können somit durch die Migration des Schmiermittels in den Schöpfraum der Vakuumpumpe empfindlich gestört werden.When the vacuum device is in operation, rooms in which the lubricant is located can also be evacuated. This creates a flow of a mixture of lubricant and gas into spaces of the vacuum device in which the lubricant is not desired, for example into a suction space of a vacuum pump. If such a suction chamber is connected to a high vacuum area of a vacuum system, contamination of the high vacuum area can occur due to the flow of the mixture of lubricant and gas or the migration of the lubricant into the suction chamber of the vacuum pump. Technological processes or scientific investigations that require a lubricant-free high vacuum range can therefore be severely disrupted by the migration of the lubricant into the suction chamber of the vacuum pump.
Außerdem bewirkt die Migration des Schmiermittels eine Verschlechterung der Schmiereigenschaften in den Bereichen, in denen die Welle des Vakuumgeräts gelagert ist. Dadurch wird die Lebensdauer des Vakuumgeräts verkürzt. Im Extremfall kann sogar ein Totalausfall der zu schmierenden Komponente und somit des Vakuumgeräts insgesamt auftreten.In addition, the migration of the lubricant causes a deterioration in the lubricating properties in the areas in which the shaft of the vacuum device is supported. This will shorten the life of the vacuum device. In extreme cases, the component to be lubricated and thus the vacuum device as a whole can even fail completely.
Um einen Raum, in dem ein Schmiermittel nicht erwünscht ist, in einem Vakuumgerät von einem Raum mit Schmiermittel zu trennen und die Migration des Schmiermittels zu unterbinden, gelangen häufig Labyrinthdichtungen zum Einsatz. Diese Dichtungen weisen zwischen den beiden Räumen einen Spalt auf, dessen Länge bewusst vergrößert wird, um dadurch den Strömungsweg für das Schmiermittel bzw. für ein Gemisch aus Schmiermittel und Gas zu verlängern. Zuverlässig dichtende Labyrinthdichtungen benötigen daher erheblichen axialen und radialen Bauraum.In order to separate a space in which a lubricant is not desired in a vacuum device from a space with lubricant and to prevent the migration of the lubricant, labyrinth seals are often used. These seals have a gap between the two spaces, the length of which is deliberately increased in order to lengthen the flow path for the lubricant or for a mixture of lubricant and gas. Reliably sealing labyrinth seals therefore require considerable axial and radial installation space.
Aus der
Die
Eine Aufgabe der Erfindung besteht darin, ein Vakuumgerät mit einer kompakten Dichtvorrichtung zu schaffen, bei welchem eine Migration eines Schmiermittels aus einem Raum mit Schmiermittel in einen Raum, in welchem das Vorhandensein eines Schmiermittels nicht erwünscht ist, zuverlässig verhindert wird.It is an object of the invention to provide a vacuum device with a compact sealing device in which migration of a lubricant from a space with lubricant into a space in which the presence of a lubricant is undesirable is reliably prevented.
Diese Aufgabe wird durch ein Vakuumgerät mit den Merkmalen des Anspruchs 1 gelöst und insbesondere dadurch, dass in diesem zwischen einem schmiermittelfreien Raum und einem ein Schmiermittel enthaltenden Raum, in welchen zumindest abschnittsweise eine drehbar gelagerte Welle angeordnet ist, eine Dichtvorrichtung vorgesehen ist, durch welche die Welle hindurchtritt. Die Dichtvorrichtung umfasst ein Rotorelement, das mit der Welle drehfest verbunden ist, und ein erstes Statorelement, das drehfest zwischen den Räumen angeordnet ist.This object is achieved by a vacuum device with the features of
Erfindungsgemäß ist zwischen dem ersten Statorelement und dem Rotorelement ein erster Spalt mit einer Eintrittsöffnung gebildet, welche zu dem das Schmiermittel enthaltenden Raum offen ist. Der erste Spalt weist ferner eine Austrittsöffnung auf, welche der Eintrittsöffnung gegenüberliegt und mit einem ersten Expansionsraum verbunden ist, der eine größere Querschnittsfläche als der erste Spalt aufweist und der durch Wandabschnitte des Rotorelements und des Statorelements gebildet ist.According to the invention, a first gap with an inlet opening which is open to the space containing the lubricant is formed between the first stator element and the rotor element. The first gap also has an outlet opening which is opposite the inlet opening and is connected to a first expansion space which has a larger cross-sectional area than the first gap and which is formed by wall sections of the rotor element and the stator element.
Der erste Expansionsraum steht ferner mit einem Schmiermittelsumpf in Verbindung. Bei der Verbindung zwischen dem ersten Expansionsraum und dem Schmiermittelsumpf kann es sich um eine unmittelbare Verbindung handeln, wenn der erste Expansionsraum und der Schmiermittelsumpf aneinander angrenzen, oder um eine mittelbare Verbindung, bei welcher zwischen dem ersten Expansionsraum und dem Schmiermittelsumpf weitere Elemente und Räume der Dichtvorrichtung und eventuell Schmiermittelkanäle angeordnet sind. Insgesamt ist die Dichtvorrichtung somit ausgebildet, um ein Schmiermittel, das aus dem das Schmiermittel enthaltenden Raum stammt, abzuscheiden und in den Schmiermittelsumpf abzuleiten. Folglich wirkt die Dichtvorrichtung auch als Schmiermittel-Abscheidevorrichtung.The first expansion space is also connected to a lubricant sump. The connection between the first expansion space and the lubricant sump can be a direct connection if the first expansion space and the lubricant sump adjoin one another, or an indirect connection in which further elements and spaces of the sealing device are between the first expansion space and the lubricant sump and possibly lubricant channels are arranged. Overall, the sealing device is thus designed to separate a lubricant that originates from the space containing the lubricant and to divert it into the lubricant sump. Consequently, the sealing device also acts as a lubricant separator.
In der Dichtvorrichtung des erfindungsgemäßen Vakuumgeräts ist somit ein Übergang vom ersten Spalt zum ersten Expansionsraum vorgesehen, bei welchem die Querschnittsfläche bevorzugt abrupt zunimmt. Dadurch verringert sich gemäß dem Bernoullischen Gesetz die Geschwindigkeit der Moleküle des Schmiermittels, welche durch den ersten Spalt aus dem ein Schmiermittel enthaltenden Raum in den ersten Expansionsraum gelangen. Darüber hinaus treten im ersten Expansionsraum während des Betriebs des Vakuumgeräts lokale Unterdruckbereiche auf, die zu Turbulenzen in der Strömung der Moleküle des Schmiermittels führen.In the sealing device of the vacuum device according to the invention, a transition from the first gap to the first expansion space is thus provided, in which the cross-sectional area preferably increases abruptly. According to Bernoulli's law, this reduces the speed of the molecules of the lubricant which pass through the first gap from the space containing a lubricant into the first expansion space. They also occur in the first expansion room local negative pressure areas during operation of the vacuum device, which lead to turbulence in the flow of the molecules of the lubricant.
Die Verringerung der Geschwindigkeit der Moleküle des Schmiermittels und die Turbulenzen führen zu einer deutlichen Erhöhung der Wahrscheinlichkeit für ein Auftreffen der Moleküle des Schmiermittels auf Wandabschnitte des Rotorelements und des Statorelements, die den ersten Expansionsraum bilden. Dadurch wird im Vergleich zu ähnlich kompakten Dichtvorrichtungen aus dem Stand der Technik eine größere Menge an Schmiermittel abgeschieden und in den Schmiermittelsumpf geleitet. Umgekehrt ist die Wahrscheinlichkeit erheblich verringert, dass Moleküle des Schmiermittels durch die Dichtvorrichtung insgesamt hindurch in den schmiermittelfreien Raum gelangen.The reduction in the speed of the molecules of the lubricant and the turbulence lead to a significant increase in the probability of the molecules of the lubricant impinging on wall sections of the rotor element and of the stator element which form the first expansion space. As a result, in comparison to similarly compact sealing devices from the prior art, a larger amount of lubricant is separated and fed into the lubricant sump. Conversely, the probability is considerably reduced that molecules of the lubricant will pass through the sealing device as a whole and into the lubricant-free space.
Aufgrund des Vorhandenseins des ersten Expansionsraums mit im Vergleich zum ersten Spalt vergrößerter Querschnittsfläche ist bei der erfindungsgemäßen Dichtvorrichtung keine Verlängerung des ersten Spalts erforderlich, um die Dichtwirkung der Dichtvorrichtung zu verbessern. Das Rotorelement und das erste Statorelement, zwischen denen sich der erste Spalt und der erste Expansionsraum befinden, weisen daher im Vergleich zu entsprechenden Dichtvorrichtungen aus dem Stand der Technik eine kleinere Baugröße auf.Due to the presence of the first expansion space with an enlarged cross-sectional area compared to the first gap, no extension of the first gap is required in the sealing device according to the invention in order to improve the sealing effect of the sealing device. The rotor element and the first stator element, between which the first gap and the first expansion space are located, are therefore smaller in size compared to corresponding sealing devices from the prior art.
Ferner umfasst die Dichtvorrichtung ein zweites Statorelement, das an derjenigen Seite des Rotorelements angeordnet ist, die dem schmiermittelfreien Raum zugewandt ist, während das erste Statorelement an der gegenüberliegenden Seite des Rotorelements angeordnet ist, die dem Raum zugewandt ist, der das Schmiermittel enthält. Das Rotorelement ist somit zwischen zwei Statorelementen angeordnet, die jeweils dem schmiermittelfreien Raum und dem Raum mit Schmiermittel zugewandt sind. Mit dem zweiten Statorelement werden weitere Spalte und Expansionsräume zwischen Wandabschnitten des Rotorelements und des zweiten Statorelements gebildet.Furthermore, the sealing device comprises a second stator element which is arranged on that side of the rotor element that faces the lubricant-free space, while the first stator element is arranged on the opposite side of the rotor element that faces the space that contains the lubricant. The rotor element is thus arranged between two stator elements which each face the lubricant-free space and the space with lubricant. With the second stator element, further gaps and expansion spaces are formed between wall sections of the rotor element and the second stator element.
Durch das zweite Statorelement wird somit die Wahrscheinlichkeit nahezu verdoppelt, dass ein Molekül des Schmiermittels, das aus dem Raum mit Schmiermittel in die Dichtvorrichtung eintritt, auf einen Wandabschnitt des Rotorelements oder des ersten bzw. zweiten Statorelements auftrifft. Ferner wird der Weg, den ein Molekül des Schmiermittels vom Raum mit Schmiermittel bis zum schmiermittelfreien Raum zurücklegen muss, durch das zweite Statorelement erheblich verlängert. Insgesamt verbessert somit das zweite Statorelement zusätzlich die Abdichtung zwischen den beiden Räumen mit Schmiermittel bzw. ohne Schmiermittel.The second stator element thus almost doubles the probability that a molecule of the lubricant, which enters the sealing device from the space with lubricant, hits a wall section of the rotor element or of the first or second stator element. Furthermore, the path that a molecule of the lubricant has to cover from the space with lubricant to the lubricant-free space is considerably lengthened by the second stator element. Overall, the second stator element thus additionally improves the seal between the two spaces with lubricant or without lubricant.
Das erste und das zweite Statorelement sind baugleich. Alternativ oder zusätzlich sind das erste und das zweite Statorelement bezüglich des Rotorelements symmetrisch aufgebaut und/oder angeordnet. Eine baugleiche und/oder symmetrische Ausführung der beiden Statorelemente vereinfacht deren Herstellung sowie deren Montage am Vakuumgerät.The first and the second stator element are structurally identical. Alternatively or additionally, the first and the second stator element are constructed and / or arranged symmetrically with respect to the rotor element. A structurally identical and / or symmetrical design of the two stator elements simplifies their manufacture and their assembly on the vacuum device.
Ferner ist das Rotorelement alternativ oder zusätzlich bezüglich des ersten und des zweiten Statorelements symmetrisch aufgebaut. Das Rotorelement weist somit sowohl in Richtung des ersten als auch des zweiten Statorelements die gleiche Geometrie auf, insbesondere mit den vorstehend beschriebenen Verengungen bzw. Einschnürungen, zwischen denen sich jeweils Abschnitte der beiden Statorelemente befinden. Dadurch wird die Anzahl der Spalte und Expansionsräume zwischen dem Rotorelement und den Statorelementen verdoppelt, wodurch die Wirkung der Dichtvorrichtung weiter verbessert wird.Furthermore, the rotor element is alternatively or additionally constructed symmetrically with respect to the first and the second stator element. The rotor element thus has the same geometry both in the direction of the first and the second stator element, in particular with the constrictions or constrictions described above, between which sections of the two stator elements are located. This doubles the number of gaps and expansion spaces between the rotor element and the stator elements, which further improves the effect of the sealing device.
Vorteilhafte Ausführungen der Erfindung sind in den Unteransprüchen, der Beschreibung und in der Zeichnung angegeben.Advantageous embodiments of the invention are specified in the subclaims, the description and in the drawing.
Gemäß einer Ausführungsform ist zwischen dem ersten Statorelement und dem Rotorelement ein zweiter Spalt gebildet, dessen Eintrittsöffnung mit dem ersten Expansionsraum in Verbindung steht. Der zweite Spalt weist gegenüberliegend zu der Eintrittsöffnung eine Austrittsöffnung auf, die mit einem zweiten Expansionsraum verbunden ist, der wiederum eine größere Querschnittsfläche als der zweite Spalt aufweist und ebenso wie der erste Expansionsraum durch Wandabschnitte des Rotorelements und des Statorelements gebildet ist.According to one embodiment, a second gap is formed between the first stator element and the rotor element, the inlet opening of which coincides with the first Expansion space communicating. The second gap has an outlet opening opposite the inlet opening, which is connected to a second expansion space, which in turn has a larger cross-sectional area than the second gap and, like the first expansion space, is formed by wall sections of the rotor element and the stator element.
Die Dichtvorrichtung verfügt bei dieser Ausführungsform somit entlang des Weges, den Moleküle des Schmiermittels zwischen dem ein Schmiermittel enthaltenden Raum und dem schmiermittelfreien Raum zurücklegen, über zwei Übergänge zwischen jeweils einem Spalt mit einer kleineren Querschnittsfläche und einem Expansionsraum mit größerer Querschnittsfläche. Durch diesen doppelten Übergang zwischen jeweils einem Spalt und einem Expansionsraum und der mit diesem Übergang verbundenen Verringerung der Geschwindigkeit der Moleküle des Schmiermittels wird somit die Wahrscheinlichkeit weiter vergrößert, dass die Gasmoleküle auf Wandabschnitte des Rotorelements oder des Statorelements auftreffen und in den Schmiermittelsumpf abgeleitet werden.In this embodiment, the sealing device thus has two transitions between a gap with a smaller cross-sectional area and an expansion space with a larger cross-sectional area along the path that molecules of the lubricant travel between the space containing a lubricant and the lubricant-free space. This double transition between a gap and an expansion space and the associated reduction in the velocity of the lubricant molecules thus further increases the probability that the gas molecules will hit wall sections of the rotor element or the stator element and be diverted into the lubricant sump.
Ferner können zwischen dem ersten Statorelement und dem Rotorelement weitere Spalte und mit diesen verbundene Expansionsräume gebildet sein, so dass insgesamt zwischen dem ersten Statorelement und dem Rotorelement eine "Kaskadierung" jeweils aufeinanderfolgender Spalte und Expansionsräume vorhanden ist. Dadurch wird entsprechend die Wirkung des Übergangs zwischen den jeweiligen Spalten und Expansionsräumen mit deren Anzahl vervielfacht.Furthermore, further gaps and expansion spaces connected to them can be formed between the first stator element and the rotor element, so that overall there is a "cascading" of successive gaps and expansion spaces between the first stator element and the rotor element. As a result, the effect of the transition between the respective columns and expansion spaces is multiplied with their number.
Vorzugsweise weist das Rotorelement einen inneren Abschnitt, durch welchen die Welle in einer axialen Richtung hindurchtritt, einen mittleren Abschnitt, der sich in einer bezogen auf die Welle radialen Richtung an den inneren Abschnitt anschließt, und einen äußeren Abschnitt auf, der sich in der radialen Richtung an den mittleren Abschnitt anschließt. Der mittlere Abschnitt weist in der axialen Richtung eine kleinere Erstreckung als der innere und der äußere Abschnitt auf. Mit anderen Worten ist das Rotorelement bei dieser Ausführungsform in der radialen Richtung gesehen im mittleren Abschnitt eingeschnürt.The rotor element preferably has an inner section through which the shaft passes in an axial direction, a central section which adjoins the inner section in a radial direction with respect to the shaft, and an outer section which joins in the radial direction adjoins the middle section. The middle section has a smaller extension in the axial direction than the inner and outer sections. With In other words, in this embodiment, the rotor element is constricted in the central section when viewed in the radial direction.
Durch diese Einschnürung bzw. kleinere Erstreckung des mittleren Abschnitts in der axialen Richtung weist das Rotorelement eine vergrößerte Oberfläche auf, mit der die Moleküle des Schmiermittels in Kontakt gelangen können. Ferner werden die Moleküle des Schmiermittels aufgrund der Einschnürung an einer Außenfläche des inneren Abschnitts reflektiert, so dass sie in Richtung einer Innenfläche des äußeren Abschnitts umgelenkt werden und auf die Innenfläche des äußeren Abschnitts auftreffen. Dadurch wird wiederum die Wahrscheinlichkeit erhöht, dass die Moleküle des Schmiermittels auf Wandabschnitte des Rotorelements auftreffen und in Richtung des Schmiermittelsumpfs geleitet werden.As a result of this constriction or smaller extension of the central section in the axial direction, the rotor element has an enlarged surface with which the molecules of the lubricant can come into contact. Furthermore, due to the constriction, the molecules of the lubricant are reflected on an outer surface of the inner section, so that they are deflected in the direction of an inner surface of the outer section and impinge on the inner surface of the outer section. This in turn increases the likelihood that the molecules of the lubricant will hit wall sections of the rotor element and be guided in the direction of the lubricant sump.
Ein innerer Abschnitt des ersten Statorelements ist bevorzugt in der radialen Richtung zwischen dem inneren und dem äußeren Abschnitt des Rotorelements angeordnet. Dabei bilden Wandabschnitte des jeweiligen inneren Abschnitts des ersten Statorelements und des Rotorelements den ersten Spalt. Das erste Statorelement und das Rotorelement weisen somit eine "ineinandergreifende" Anordnung auf. Dies führt zu einer Verlängerung des Weges für die Moleküle des Schmiermittels zwischen dem das Schmiermittel enthaltenden Raum und dem schmiermittelfreien Raum. Dadurch wird wiederum die Abdichtung zwischen diesen beiden Räumen verbessert.An inner portion of the first stator element is preferably arranged in the radial direction between the inner and outer portions of the rotor element. Wall sections of the respective inner section of the first stator element and of the rotor element form the first gap. The first stator element and the rotor element thus have an "interlocking" arrangement. This leads to a lengthening of the path for the molecules of the lubricant between the space containing the lubricant and the lubricant-free space. This in turn improves the seal between these two spaces.
Der erste Expansionsraum ist insbesondere durch Wandabschnitte des inneren Abschnitts des ersten Statorelements und durch Wandabschnitte des inneren, des mittleren und des äußeren Abschnitts des Rotorelements gebildet. Der erste Expansionsraum weist beispielsweise drei sich bewegende Wandabschnitte auf, die durch das Rotorelement gebildet sind. Durch die Bewegung der Wandabschnitte wird einerseits die Turbulenz im ersten Expansionsraum vergrößert. Andererseits bewegen sich die Moleküle des Schmiermittels insgesamt bevorzugt in radialer Richtung, da sie aufgrund der größeren Fläche des in axialer Richtung weiter außen liegenden äußeren Abschnitts im Vergleich zum inneren Abschnitt des Rotorelements mit größerer Wahrscheinlichkeit auf den äußeren Abschnitt des Rotorelements auftreffen und an diesem anhaften bzw. abgeleitet werden.The first expansion space is formed in particular by wall sections of the inner section of the first stator element and by wall sections of the inner, middle and outer sections of the rotor element. The first expansion space has, for example, three moving wall sections which are formed by the rotor element. On the one hand, the movement of the wall sections increases the turbulence in the first expansion space. On the other hand, the molecules of the lubricant as a whole preferentially move in a radial direction Direction, because due to the larger area of the outer section located further out in the axial direction compared to the inner section of the rotor element, they are more likely to impinge on the outer section of the rotor element and adhere to or be diverted from it.
Der mittlere Abschnitt des Rotorelements umfasst vorzugsweise einen inneren, einen mittleren und einen äußeren Teilabschnitt, wobei der mittlere Teilabschnitt in der axialen Richtung eine größere Erstreckung als der innere und der äußere Teilabschnitt aufweist. Der mittlere Abschnitt des Rotorelements, der im Vergleich zum inneren und äußeren Abschnitt des Rotorelements eingeschnürt ist, ist somit in drei weitere Teilabschnitte unterteilt, von denen der mittlere Teilabschnitt im Vergleich zu den beiden weiteren Teilabschnitten in axialer Richtung verbreitert ist. Das Rotorelement weist somit bei dieser Ausführungsform in radialer Richtung gesehen zwei Einschnürungen auf, die sich im Bereich des inneren und des äußeren Teilabschnitts des mittleren Abschnitts befinden.The middle section of the rotor element preferably comprises an inner, a middle and an outer section, the middle section having a greater extent in the axial direction than the inner and the outer section. The middle section of the rotor element, which is constricted in comparison to the inner and outer sections of the rotor element, is thus divided into three further subsections, of which the middle subsection is widened in the axial direction compared to the two further subsections. In this embodiment, the rotor element thus has two constrictions, seen in the radial direction, which are located in the area of the inner and outer subsections of the central section.
Durch diese Einschnürungen und eine entsprechende Anordnung von Abschnitten des ersten Statorelements können somit weitere Spalte und Expansionsräume zwischen dem ersten Statorelement und dem Rotorelement gebildet werden. Außerdem ist wiederum der Weg zwischen dem Raum, der das Schmiermittel enthält, und dem schmiermittelfreien Raum durch die zwei Einschnürungen verlängert. Durch die mehreren Spalte und Expansionsräume zwischen dem ersten Statorelement und dem Rotorelement sowie durch die Verlängerung des Weges zwischen den beiden Räumen wird wiederum die Wahrscheinlichkeit vergrößert, dass Moleküle des Schmiermittels auf Wandabschnitte des ersten Statorelements oder des Rotorelements auftreffen, so dass die Abdichtung des schmiermittelfreien Raums gegenüber dem Raum mit Schmiermittel verbessert ist.As a result of these constrictions and a corresponding arrangement of sections of the first stator element, further gaps and expansion spaces can thus be formed between the first stator element and the rotor element. In addition, the path between the space containing the lubricant and the lubricant-free space is again lengthened by the two constrictions. The multiple gaps and expansion spaces between the first stator element and the rotor element, as well as the extension of the path between the two spaces, in turn increase the likelihood that molecules of the lubricant will hit wall sections of the first stator element or the rotor element, so that the lubricant-free space is sealed is improved over the space with lubricant.
Gemäß einer weiteren Ausführungsform weist das erste Statorelement zumindest eine axiale Aussparung auf, innerhalb derer ein sich in axialer Richtung erstreckender Abschnitt des Rotorelements angeordnet ist. Das erste Statorelement und das Rotorelement weisen somit wiederum eine "ineinandergreifende" Anordnung auf, bei welcher der Weg für die Moleküle des Schmiermittels zwischen dem Raum mit Schmiermittel und dem schmiermittelfreien Raum verlängert ist. Dadurch wird wiederum die Abdichtung zwischen den beiden Räumen verbessert, da die Moleküle des Schmiermittels mit größerer Wahrscheinlichkeit auf Wandabschnitte auftreffen.According to a further embodiment, the first stator element has at least one axial recess within which a recess extending in the axial direction Section of the rotor element is arranged. The first stator element and the rotor element thus in turn have an "interlocking" arrangement in which the path for the molecules of the lubricant between the space with lubricant and the lubricant-free space is lengthened. This in turn improves the seal between the two spaces, since the molecules of the lubricant are more likely to hit wall sections.
Bevorzugt weist das Rotorelement in einer bezogen auf die Welle axialen Richtung zumindest eine Verengung auf, in der ein axialer Vorsprung des Statorelements derart angeordnet ist, dass durch die Verengung des Rotorelements und den axialen Vorsprung des Statorelements der erste und der zweite Spalt sowie der erste und der zweite Expansionsraum gebildet sind. Bei dieser Ausführungsform führt somit das Ineinandergreifen des Rotorelements und des Statorelements zur Ausbildung zweier Spalte und zweier Expansionsräume. Dadurch erhält die Dichtvorrichtung einen kompakten Aufbau, in welchem jedoch zwei Übergänge zwischen einem jeweiligen Spalt und einem Expansionsraum vorgesehen sind. Trotz des kompakten Aufbaus weist die Dichtvorrichtung weiterhin aufgrund der zwei Übergänge zwischen einem jeweiligen Spalt und Expansionsraum den vorstehend beschriebenen Vorteil auf, dass die Wahrscheinlichkeit für das Auftreffen von Molekülen des Schmiermittels auf Wandabschnitte vergrößert ist und dadurch die Abdichtung zwischen dem schmiermittelfreien Raum und dem Raum mit Schmiermittel verbessert wird.The rotor element preferably has at least one constriction in a direction that is axial with respect to the shaft, in which an axial projection of the stator element is arranged in such a way that the first and second gap and the first and the second gap as well as the first and the second expansion space are formed. In this embodiment, the meshing of the rotor element and the stator element thus leads to the formation of two gaps and two expansion spaces. This gives the sealing device a compact structure in which, however, two transitions are provided between a respective gap and an expansion space. Despite the compact design, the sealing device still has the advantage described above, due to the two transitions between a respective gap and expansion space, that the probability of molecules of the lubricant hitting wall sections is increased and thereby the seal between the lubricant-free space and the space is increased Lubricant is improved.
Das erste Statorelement weist ferner vorzugsweise zumindest eine Abflussöffnung auf, die mit dem Schmiermittelsumpf in Verbindung steht. Die Abflussöffnung ist insbesondere an einem Außenumfang des Statorelements angeordnet. Der erste Expansionsraum, der durch Wandabschnitte sowohl des Rotorelements als auch des Statorelements gebildet ist, steht bei dieser Ausführungsform nur mittelbar mit dem Schmiermittelsumpf in Verbindung. Das Schmiermittel wird somit mittels der Abflussöffnung in Richtung des Schmiermittelsumpfs kanalisiert, wobei insbesondere die Drehbewegung des Rotationselements und die damit verbundene Vorzugsrichtung des Schmiermittels in radialer Richtung ausgenutzt wird.The first stator element also preferably has at least one drain opening which is in communication with the lubricant sump. The outflow opening is arranged in particular on an outer circumference of the stator element. The first expansion space, which is formed by wall sections of both the rotor element and the stator element, is only indirectly connected to the lubricant sump in this embodiment. The lubricant is thus by means of the Drain opening canalized in the direction of the lubricant sump, in particular the rotational movement of the rotary element and the associated preferred direction of the lubricant in the radial direction is used.
Das Vakuumgerät weist insbesondere ein Gehäuse auf, innerhalb dessen das erste und/oder das zweite Statorelement drehfest sowie das Rotorelement drehbar angeordnet sind. Das Gehäuse weist ferner einen Abflusskanal für das Schmiermittel auf, der mit zumindest einer Abflussöffnung des ersten und/oder des zweiten Statorelements und mit dem Schmiermittelsumpf in Verbindung steht. Der Abflusskanal des Gehäuses dient somit zum "Aufsammeln" des Schmiermittels, insbesondere dann, wenn das erste und/oder das zweite Statorelement mehrere Abflussöffnungen aufweisen.The vacuum device has, in particular, a housing within which the first and / or the second stator element are arranged in a rotationally fixed manner and the rotor element is rotatably arranged. The housing also has an outflow channel for the lubricant, which is in connection with at least one outflow opening of the first and / or the second stator element and with the lubricant sump. The drainage channel of the housing thus serves to “collect” the lubricant, in particular when the first and / or the second stator element have several drainage openings.
Das erste und/oder das zweite Statorelement und/oder das Rotorelement weisen vorzugsweise Schrägflächen auf, die zum Führen und/oder für das Abtropfen des Schmiermittels vorgesehen sind. Die Schrägflächen können außerdem den Expansionsraum bzw. die Expansionsräume zwischen dem Rotorelement und den beiden Statorelementen vergrößern. Ferner lassen sich die Schrägflächen derart anordnen, dass sie den Transport des Schmiermittels aufgrund der Rotation des Rotorelements in radialer Richtung unterstützen. Außerdem kann zwischen einer Schrägfläche und einer geraden Fläche eine Kante gebildet sein, an welcher das Schmiermittel in eine bevorzugte Richtung abtropft.The first and / or the second stator element and / or the rotor element preferably have inclined surfaces which are provided for guiding and / or for dripping off the lubricant. The inclined surfaces can also enlarge the expansion space or the expansion spaces between the rotor element and the two stator elements. Furthermore, the inclined surfaces can be arranged in such a way that they support the transport of the lubricant due to the rotation of the rotor element in the radial direction. In addition, an edge can be formed between an inclined surface and a straight surface, on which the lubricant drips off in a preferred direction.
Die Erfindung wird nachfolgend rein beispielhaft anhand möglicher Ausbildungen der Erfindung unter Bezugnahme auf die beigefügte Zeichnung erläutert. Es zeigen:
- Fig. 1
- eine Explosionsansicht eines Abschnitts einer ersten Ausführungsform eines erfindungsgemäßen Vakuumgeräts,
- Fig. 2
- eine vergrößerte Perspektivansicht einer Dichtvorrichtung des Vakuumgeräts von
Fig. 1 , - Fig. 3A
- eine Vorderansicht auf den Abschnitt des Vakuumgeräts von
Fig. 1 , - Fig. 3B
- eine Schnittansicht entlang der in
Fig. 3A dargestellten Linie, - Fig. 3C und 3D
- einen vergrößerten Ausschnitt von
Fig. 3B , der dort mit A bezeichnet ist, - Fig. 3E
- einen vergrößerten Ausschnitt von
Fig. 3D , der dort mit B bezeichnet ist, - Fig. 4A
- eine Vorderansicht auf einen Abschnitt einer zweiten Ausführungsform eines erfindungsgemäßen Vakuumgeräts,
- Fig. 4B
- eine Schnittansicht entlang der in
Fig. 4A dargestellten Linie und - Fig. 4C
- einen vergrößerten Ausschnitt von
Fig. 4B , der dort mit A bezeichnet ist.
- Fig. 1
- an exploded view of a portion of a first embodiment of a vacuum device according to the invention,
- Fig. 2
- FIG. 8 is an enlarged perspective view of a sealing device of the vacuum device of FIG
Fig. 1 , - Figure 3A
- FIG. 3 is a front view of the portion of the vacuum device of FIG
Fig. 1 , - Figure 3B
- a sectional view along the in
Figure 3A shown line, - Figures 3C and 3D
- an enlarged section of
Figure 3B , which is designated there by A, - Figure 3E
- an enlarged section of
Figure 3D , which is designated there with B, - Figure 4A
- a front view of a section of a second embodiment of a vacuum device according to the invention,
- Figure 4B
- a sectional view along the in
Figure 4A shown line and - Figure 4C
- an enlarged section of
Figure 4B , which is labeled A there.
In
Ferner erstreckt sich die Welle 13 durch einen schmiermittelfreien Raum 19 hindurch, der mit einem nicht dargestellten Schöpfraum des Vakuumgeräts bzw. der Vakuumpumpe in Verbindung steht. Bei Betrieb des Vakuumgeräts bzw. der Vakuumpumpe wird die Welle 13 mittels eines Motors drehend angetrieben, um beispielsweise ein Gas von einem Einlass des Vakuumgeräts bzw. der Vakuumpumpe zu einem Auslass zu fördern. Dadurch werden der Schöpfraum und auch der schmiermittelfreie Raum 19 während des Betriebs des Vakuumgeräts bzw. der Vakuumpumpe evakuiert. Im schmiermittelfreien Raum 19 herrscht folglich ein geringerer Druck als in dem das Schmiermittel enthaltenden Raum 17.Furthermore, the
Zur Abdichtung des schmiermittelfreien Raums 19 gegenüber dem Raum 17 mit Schmiermittel ist eine Dichtvorrichtung 21 vorgesehen, durch welche die Welle 13 hindurchtritt und die zwischen den beiden Räumen 17, 19 angeordnet ist. Die Dichtvorrichtung 21 umfasst ein erstes Statorelement 23 und ein zweites Statorelement 25, die drehfest in dem Gehäuse 11 angeordnet sind. Ferner umfasst die Dichtvorrichtung 21 ein Rotorelement 27, das drehfest mit der Welle 13 verbunden ist. Das Rotorelement 27 ist in axialer Richtung zwischen dem ersten und dem zweiten Statorelement 23, 25 angeordnet und wird nach der Montage der Dichtvorrichtung 21 von diesen umschlossen. Das erste und das zweite Statorelement 23, 25 sowie das Rotorelement 27 sind ringförmig ausgebildet und bezüglich der Wellenachse 14 zentriert angeordnet (vgl.
Das erste und das zweite Statorelement 23, 25 weisen am Außenumfang mehrere Abflussöffnungen 29 für das Schmiermittel auf, die so dimensioniert und verteilt angeordnet sind, dass zumindest eine Abflussöffnung 29 mit einem Abflusskanal 31 im Gehäuse 11 in Verbindung steht. Dies erleichtert die Montage, da die relative Winkellage der Statorelemente 23, 25 dann nur von untergeordneter Bedeutung ist. Über die Abflussöffnungen 29 des ersten und des zweiten Statorelements 23, 25 gelangt Schmiermittel aus der Dichtvorrichtung 21 in den Abflusskanal 31 und weiter in einen nicht dargestellten Schmiermittelsumpf.The first and
Wie in
Darüber hinaus umfasst das Rotorelement 27 einen äußeren Abschnitt 37, der im Vergleich zum mittleren Abschnitt 35 in axialer Richtung wiederum eine größere Erstreckung bzw. Breite aufweist, die jedoch geringer ist als die Erstreckung des inneren Abschnitts 33 in axialer Richtung. Der äußere Abschnitt 37 des Rotorelements 27 weist ferner an der Außenseite, d.h. in radialer Richtung gesehen, ein gestuftes Profil auf, das durch Schrägflächen 39 und in radialer Richtung verlaufende Flächen 41 gebildet ist.In addition, the
Das erste und das zweite Statorelement 23, 25 weisen jeweils am Innenumfang einen inneren Abschnitt 43 mit einem Vorsprung 45 auf (vgl.
Der Vorsprung 45 und der Fortsatz 47 des jeweiligen Statorelements 23, 25 sind somit im Bereich einer Einschnürung des Rotorelements 27 angeordnet, die durch den mittleren Abschnitt 35 des Rotorelements 27 gebildet ist. Umgekehrt ist auch der äußere Abschnitt 37 des Rotorelements 27 in einer Aussparung 49 des jeweiligen Statorelements 23, 25 angeordnet. Nach der Montage der Dichtvorrichtung 21 bilden somit Wandabschnitte des Rotorelements 27 mit Wandabschnitten des ersten und des zweiten Statorelements 23, 25 eine labyrinthartige Struktur mit unterschiedlich großen Querschnittsflächen.The
Zwischen dem Vorsprung 45 des ersten Statorelements 23 und dem inneren Abschnitt 33 des Rotorelements 27 ist ein erster Spalt 51 gebildet, der eine kleine Querschnittsfläche sowie eine Eintrittsöffnung 53 und eine Austrittsöffnung 55 aufweist. Die Eintrittsöffnung 53 des ersten Spalts 51 ist zu dem das Schmiermittel enthaltenden Raum 17 offen, während die Austrittsöffnung 55 mit einem ersten Expansionsraum 57 verbunden ist.A
Der erste Expansionsraum 57 weist eine größere Querschnittsfläche als der erste Spalt 51 auf. Ferner ist der erste Expansionsraum 57 durch einen jeweiligen Wandabschnitt des inneren, mittleren und äußeren Abschnitts 33, 35, 37 des Rotorelements 27 und durch einen Wandabschnitt eines inneren Abschnitts 43 des ersten Statorelements 23 gebildet, wobei dieser Wandabschnitt durch den Vorsprung 45 und den Fortsatz 47 gebildet ist.The
Da bei Betrieb des Vakuumgeräts bzw. der Vakuumpumpe in dem schmiermittelfreien Raum 19 ein geringerer Druck vorliegt als in dem das Schmiermittel enthaltenden Raum 17, tritt aufgrund der Druckdifferenz zwischen den beiden Räumen 17, 19 ein Gemisch aus einem Gas und Schmiermittel in die Eintrittsöffnung 53 des ersten Spalts 51 ein, wie dies in
Es wurde erkannt, dass innerhalb des ersten Spalts 51 eine nahezu laminare Strömung des Gemischs aus Gas und Schmiermittel vorliegt. Beim Vorbeiströmen von Molekülen des Schmiermittels an Wänden des ersten Spalts 51 setzen sich zwar Moleküle des Schmiermittels an diesen Wänden ab. Aufgrund der nahezu laminaren Strömung des Gemischs aus Schmiermittel und Gas treffen jedoch die Moleküle des Schmiermittels, die sich in einem mittleren Bereich des ersten Spalts 51 zwischen den Wänden bewegen, nicht auf die Wände. Diese Moleküle des Schmiermittels würden folglich weiterhin in den schmiermittelfreien Raum 19 gelangen, wenn die Räume 17, 19 lediglich durch einen Spalt mit konstanter Querschnittsfläche verbunden wären, wie dies im Stand der Technik üblich ist.It was recognized that there is an almost laminar flow of the mixture of gas and lubricant within the
Wenn das Gemisch aus Gas und Schmiermittel jedoch bei der erfindungsgemäßen Dichtvorrichtung 21 aus der Austrittsöffnung 55 des ersten Spalts 51 austritt, verringert sich dessen Geschwindigkeit gemäß dem Bernoullischen Gesetz, da die Querschnittsfläche des ersten Expansionsraums 57 größer als die Querschnittsfläche des ersten Spalts 51 ist. Ferner treten aufgrund lokaler Unterdruckbereiche Turbulenzen im ersten Expansionsraum 57 auf. Dies führt dazu, dass im ersten Expansionsraum 57 die Wahrscheinlichkeit für ein Auftreffen von Molekülen des Schmiermittels auf die Wandabschnitte des Rotorelements 27 bzw. des ersten Statorelements 23 im Vergleich zum ersten Spalt 51 deutlich erhöht ist.However, if the mixture of gas and lubricant emerges from the outlet opening 55 of the
Zwischen einer Innenfläche des äußeren Abschnitts 37 des Rotorelements 27 und dem Fortsatz 47 am Vorsprung 45 des ersten Statorelements 23 ist ferner ein zweiter Spalt 59 gebildet. Eine Eintrittsöffnung 61 des zweiten Spalts 59 steht mit dem ersten Expansionsraum 57 in Verbindung, während eine Austrittsöffnung 63 des zweiten Spalts 59 mit einem zweiten Expansionsraum 65 verbunden ist. Der zweite Expansionsraum 65 weist wiederum eine größere Querschnittsfläche als der zweite Spalt 59 auf, so dass die Geschwindigkeit des Gemischs aus Gas und Schmiermittel wiederum beim Eintreten in den zweiten Expansionsraum 65 verringert wird. Ferner treten wiederum auch im zweiten Expansionsraum 65 Turbulenzen aufgrund lokaler Unterdruckbereiche auf.A
Der zweite Expansionsraum 65 ist durch Wandabschnitte des äußeren Abschnitts 37 des Rotorelements 27 und durch gegenüberliegende Wandabschnitte des ersten Statorelements 23 gebildet. Aufgrund der profilierten Außenfläche des äußeren Abschnitts 37 des Rotorelements 27 mit in radialer Richtung verlaufenden Flächen 41 und Schrägflächen 39 weist der zweite Expansionsraum 65 eine innere Struktur mit Verengungen und Erweiterungen auf, die jeweils unterschiedlich große Querschnittsflächen aufweisen. Dadurch wird die Turbulenz innerhalb des zweiten Expansionsraums 65 im Vergleich zum ersten Expansionsraum 57 zusätzlich erhöht. An den zweiten Expansionsraum 65 schließt ferner in radialer Richtung eine der Abflussöffnungen 29 des ersten und des zweiten Statorelements 23, 25 sowie in axialer Richtung ein weiterer Expansionsraum des zweiten Statorelements 25 an.The
Das erste und das zweite Statorelement 23, 25 sind baugleich und lediglich auf unterschiedlichen Seiten des Rotorelements 27 angeordnet. Das erste und das zweite Statorelement 23, 25 sind ferner bezüglich des Rotorelements 27 symmetrisch zueinander angeordnet. Wie man in
Im Vergleich zu einem oder mehreren Spalten mit einer konstanten Querschnittsfläche ist somit innerhalb der erfindungsgemäßen Dichtvorrichtung 21 die Wahrscheinlichkeit deutlich erhöht, dass Moleküle des Schmiermittels auf einen Wandabschnitt des Rotorelements 27 bzw. des ersten oder zweiten Statorelements 23, 25 auftreffen. Die Moleküle des Schmiermittels werden ferner auch durch die Rotationsbewegung des Rotorelements 27 in radialer Richtung nach außen beschleunigt. Dadurch bewegen sie sich entlang der in radialer Richtung verlaufenden Flächen 41, entlang der Schrägflächen 39 des äußeren Abschnitts 37 des Rotorelements 27 und entlang einer Schrägfläche 67 des ersten bzw. zweiten Statorelements 21, 23 zur Abflussöffnung 29 des Statorelements 23, 25 und in den Abflusskanal 31 im Gehäuse 11, der wiederum mit dem nicht dargestellten Schmiermittelsumpf in Verbindung steht. Die erfindungsgemäße Dichtvorrichtung 21 verbessert somit die Trennung von Gas und Schmiermittel, welche aus dem das Schmiermittel enthaltenden Raum 17 in die Dichtvorrichtung 21 eintreten.Compared to one or more gaps with a constant cross-sectional area, the probability within the sealing
In
Darüber hinaus weisen die Expansionsräume der zweiten Ausführungsform im Gegensatz zur ersten Ausführungsform zusätzliche Schrägflächen auf, die durch entsprechende Wandabschnitte des ersten bzw. zweiten Statorelements 23, 25 gebildet sind. Aufgrund der größeren Anzahl von Spalten und Expansionsräumen im Vergleich zur ersten Ausführungsform ist somit bei der zweiten Ausführungsform die Wahrscheinlichkeit für das Auftreffen von Molekülen des Schmiermittels auf Wandabschnitte des Rotorelements 27 bzw. des ersten oder zweiten Statorelements 23, 25 weiter erhöht. Dadurch wird die Abdichtung des schmiermittel* freien Raums 19 gegenüber dem das Schmiermittel enthaltenden Raum 17 mit der Dichtvorrichtung 21 gemäß der zweiten Ausführungsform nochmals verbessert.In addition, in contrast to the first embodiment, the expansion spaces of the second embodiment have additional inclined surfaces which are formed by corresponding wall sections of the first and
- 1111
- Gehäusecasing
- 1313th
- Wellewave
- 1414th
- WellenachseShaft axis
- 1515th
- Lagercamp
- 1717th
- Schmiermittel enthaltender RaumSpace containing lubricant
- 1919th
- schmiermittelfreier Raumlubricant-free space
- 2121
- DichtvorrichtungSealing device
- 2323
- erstes Statorelementfirst stator element
- 2525th
- zweites Statorelementsecond stator element
- 2727
- RotorelementRotor element
- 2929
- Abflussöffnung des StatorelementsOutflow opening of the stator element
- 3131
- AbflusskanalDrainage channel
- 3333
- innerer Abschnitt des Rotorelementsinner portion of the rotor element
- 3535
- mittlerer Abschnitt des Rotorelementsmiddle section of the rotor element
- 3737
- äußerer Abschnitt des Rotorelementsouter portion of the rotor element
- 3939
- Schrägfläche des RotorsInclined surface of the rotor
- 4141
- in radialer Richtung verlaufende Fläche des Rotorssurface of the rotor extending in the radial direction
- 4343
- innerer Abschnitt des Statorelementsinner section of the stator element
- 4545
- Vorsprung des StatorelementsProjection of the stator element
- 4747
- FortsatzAppendix
- 4949
- Aussparung des StatorelementsRecess of the stator element
- 5151
- erster Spaltfirst gap
- 5353
- Eintrittsöffnung des ersten SpaltsEntry opening of the first gap
- 5555
- Austrittsöffnung des ersten SpaltsExit opening of the first gap
- 5757
- erster Expansionsraumfirst expansion room
- 5959
- zweiter Spaltsecond gap
- 6161
- Eintrittsöffnung des zweiten SpaltsEntry opening of the second gap
- 6363
- Austrittsöffnung des zweiten SpaltsOutlet opening of the second gap
- 6565
- zweiter Expansionsraumsecond expansion space
- 6767
- Schrägfläche des StatorsInclined surface of the stator
- 7171
- innerer Teilabschnittinner section
- 7373
- mittlerer Teilabschnittmiddle section
- 7575
- äußerer Teilabschnittouter section
Claims (15)
- A vacuum device, in particular a vacuum pump, comprising a lubricant-free space (19); a space (17) including a lubricant; and a rotatably supported shaft (13) which is at least sectionally arranged in the two spaces (17, 19), wherein a sealing apparatus (21), through which the shaft (13) passes, is provided between the spaces (17, 19), wherein the sealing apparatus comprises:a rotor element (27) which is rotationally fixedly connected to the shaft (13);a first stator element (23) which is rotationally fixedly arranged between the spaces (17, 19);wherein a first gap (51) having an inlet opening (53) is formed between the first stator element (25) and the rotor element (27), said inlet opening (53) being open toward the space (17) including the lubricant,wherein the first gap (51) has an outlet opening (55) disposed oppositely to the inlet opening (53), said outlet opening (55) being connected to a first expansion space (57) which has a larger cross-sectional surface than the first gap (51) and which is formed by wall sections of the rotor element (27) and of the first stator element (23), andwherein the first expansion space (57) is in connection with a lubricant sump,wherein the sealing apparatus (21) comprises a second stator element (25) which is arranged at that side of the rotor element (27) which faces the lubricant-free space (19), while the first stator element (23) is arranged at the oppositely disposed side of the rotor element (27) which faces the space (17) including a lubricant,
characterized in thatthe first and second stator elements (23, 25) are of the same construction. - A vacuum device in accordance with the preamble of claim 1,
characterized in that
the first and second stator elements (23, 25) are designed and/or arranged symmetrically with respect to the rotor element (27). - A vacuum device in accordance with the preamble of claim 1,
characterized in that
the rotor element (27) is designed symmetrically with respect to the first and second stator elements (23, 25). - A vacuum device in accordance with claim 1,
characterized in that
the first and second stator elements (23, 25) are designed and/or arranged symmetrically with respect to the rotor element (27). - A vacuum device in accordance with claim 1 or claim 2,
characterized in that
the rotor element (27) is designed symmetrically with respect to the first and second stator elements (23, 25). - A vacuum device in accordance with at least one of the preceding claims,
characterized in that
a second gap (59), whose inlet opening (61) is in connection with the first expansion space (57), is formed between the first stator element (23) and the rotor element (27), and in that the second gap (59) has an outlet opening (63) disposed oppositely to the inlet opening (61), said outlet opening (63) being connected to a second expansion space (65) which has a larger cross-sectional surface than the second gap (59) and which is formed by wall sections of the rotor element (27) and of the first stator element (23). - A vacuum device in accordance with at least one of the preceding claims,
characterized in that
the rotor element (27) has an inner section (33) through which the shaft (13) passes in an axial direction, a central section (35) which adjoins the inner section (33) in a direction which is a radial direction with respect to the shaft (13), and an outer section (37) which adjoins the central section (35) in the radial direction, with the central section (35) having a smaller extent in the axial direction than the inner and outer sections (33, 37). - A vacuum device in accordance with claim 7,
characterized in that
an inner section (43) of the first stator element (23) is arranged between the inner and outer sections (33, 37) of the rotor element (27) in the radial direction and wall sections of the respective inner section (43) of the first stator element (23) and of the rotor element (27) form the first gap (51). - A vacuum device in accordance with claim 7 or claim 8,
characterized in that
the first expansion space (57) is formed by wall sections of the inner section (43) of the first stator element (23) and by wall sections of the inner, central and outer sections (33, 35, 37) of the rotor element (27). - A vacuum device in accordance with at least one of the claims 7 to 9,
characterized in that
the central section (35) of the rotor element (27) comprises an inner, a central and an outer part section (71, 73, 75), with the central part section (73) having a greater extent in the axial direction than the inner and outer part sections (71, 75). - A vacuum device in accordance with at least one of the preceding claims,
characterized in that
the first stator element (23) has at least one axial cut-out (49) within which a section (37) of the rotor element (27) extending in the axial direction is arranged. - A vacuum device in accordance with at least one of the claims 6 to 11,
characterized in that
the rotor element (27) has, in a direction which is an axial direction with respect to the shaft (13), at least one constriction (35) in which an axial projection (45) of the first stator element (23) is arranged such that the first and second gaps (51, 59) and the first and second expansion spaces (57, 65) are formed by the constriction (35) of the rotor element (27) and by the axial projection (45) of the first stator element (23). - A vacuum device in accordance with at least one of the preceding claims,
characterized in that
the first stator element (23) has at least one outflow opening (29) which is in connection with the lubricant sump and which is in particular arranged at an outer periphery of the stator element (23). - A vacuum device in accordance with at least one of the preceding claims,
characterized by
a housing (11) within which the first and/or second stator element (23, 25) is/are rotationally fixedly arranged and the rotor element (27) is rotatably arranged and which has an outflow passage (31) for the lubricant which is in connection with at least one outflow opening (29) of the first and/or second stator element (23, 25) and with the lubricant sump. - A vacuum device in accordance with at least one of the preceding claims,
characterized in that
the rotor element (27) and/or the first and/or second stator element (23, 25) have inclined surfaces (39, 67) which are provided for guiding and/or for dripping the lubricant.
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EP17168193.5A EP3396171B1 (en) | 2017-04-26 | 2017-04-26 | Vacuum device having a shaft seal |
JP2018082060A JP6778231B2 (en) | 2017-04-26 | 2018-04-23 | Vacuum pump |
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---|---|---|---|---|
JPS6250378U (en) * | 1985-09-17 | 1987-03-28 | ||
JPS63112625U (en) * | 1987-01-16 | 1988-07-20 | ||
JPH0251768U (en) * | 1988-10-05 | 1990-04-12 | ||
JPH02110764U (en) * | 1989-02-23 | 1990-09-05 | ||
JP4617615B2 (en) * | 2001-07-05 | 2011-01-26 | 株式会社豊田自動織機 | Oil leakage prevention structure in vacuum pump |
DE102005015212A1 (en) * | 2005-04-02 | 2006-10-05 | Leybold Vacuum Gmbh | Shaft sealing for e.g. rotary screw pump, has seal gap connected with locking gas chamber, and discharge opening connected with gas chamber and suction chamber, where seal gap is arranged between inner and outer sealing rings |
JP2008002576A (en) * | 2006-06-22 | 2008-01-10 | Hitachi Ltd | Sealing device |
DE102010045881A1 (en) * | 2010-09-17 | 2012-03-22 | Pfeiffer Vacuum Gmbh | vacuum pump |
-
2017
- 2017-04-26 EP EP17168193.5A patent/EP3396171B1/en active Active
-
2018
- 2018-04-23 JP JP2018082060A patent/JP6778231B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP6778231B2 (en) | 2020-10-28 |
EP3396171A1 (en) | 2018-10-31 |
JP2018184955A (en) | 2018-11-22 |
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