EP3291651B1 - Device and method for creating atmospheric plasma - Google Patents

Device and method for creating atmospheric plasma Download PDF

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Publication number
EP3291651B1
EP3291651B1 EP17001337.9A EP17001337A EP3291651B1 EP 3291651 B1 EP3291651 B1 EP 3291651B1 EP 17001337 A EP17001337 A EP 17001337A EP 3291651 B1 EP3291651 B1 EP 3291651B1
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Prior art keywords
plasma
medium
wall
plasma head
housing
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EP17001337.9A
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German (de)
French (fr)
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EP3291651A1 (en
Inventor
Manuel Kunz
André Hellinger
Sudarsan Vedantha
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Bdtronic GmbH
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Bdtronic GmbH
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Priority to SI201731291T priority Critical patent/SI3291651T1/en
Priority to RS20230008A priority patent/RS63874B1/en
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/28—Cooling arrangements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/36—Circuit arrangements

Definitions

  • the invention relates to a device for generating an atmospheric plasma according to the features of claim 1.
  • the invention also relates to a method for generating an atmospheric plasma according to claim 5.
  • a plasma head with a transformer and a plasma nozzle is used to generate an atmospheric plasma.
  • a process gas in the plasma nozzle is ionized by a discharge due to the high voltage generated by the transformer.
  • the process gas then exits the nozzle as a directed plasma jet or plasma flame.
  • the power loss of the transformer which accumulates as heat in the housing of the plasma head, has proven to be particularly disadvantageous in this compact design. This heat generation can be so great that the transformer fails or is damaged. The generation of plasma is thus influenced by this heat development.
  • the invention is therefore based on the object of creating a device and a method for generating an atmospheric plasma, with which stable and reliable operation is ensured.
  • a device for solving this problem has the features of claim 1.
  • a plasma head to which a transformer and at least one plasma nozzle is assigned, the transformer and the plasma nozzle forming a spatial unit, having a supply line for a medium flowing through for active temperature control of the plasma head and being in a wall of a housing of the plasma head at least one channel for guiding the medium is arranged.
  • the channel extends at least in regions over the wall of the plasma head, being connected to at least one inlet.
  • the medium is the process gas.
  • the plasma head can be actively tempered by the flowing medium. Accordingly, depending on the design or the size and the operation of the plasma head, it can be actively temperature-controlled.
  • the flowing medium constantly transports heat away from the plasma head.
  • the plasma head can be kept at a stable temperature during the entire operating time due to the subsequent flow of the medium.
  • a temperature can thus be generated in the plasma head via the medium flowing through, at which a maximum yield of plasma is achieved and at the same time the plasma head works in a particularly stable and reliable manner.
  • the invention provides that as a medium for temperature control, in particular for cooling, the plasma head, preferably the transformer, an electrode or a Plasma nozzle the process gas itself can be used.
  • the plasma head preferably the transformer, an electrode or a Plasma nozzle the process gas itself can be used.
  • the process gas as a cooling medium is particularly advantageous since it has to be fed to the plasma head anyway.
  • the process gas first flows through the area around the transformer before it is fed to the plasma nozzle for plasma generation.
  • the temperature of the process gas which is increased by absorbing the thermal energy, has no effect whatsoever on the efficiency of the plasma formation.
  • the process gas is mixed with another medium which has proven to be particularly good as a cooling medium. In this way, the heat can be dissipated quickly from the plasma head and a plasma flame can be generated at the same time, without having to install an additional line for the cooling medium on the plasma head.
  • a particularly advantageous embodiment of the present invention can provide that in a housing, preferably in a wall of the housing, a channel, in particular meandering, for guiding the medium is arranged, which at least partially extends over the wall of the housing and is connected to the at least connected to a supply line.
  • a channel in particular meandering, for guiding the medium is arranged, which at least partially extends over the wall of the housing and is connected to the at least connected to a supply line.
  • the second end of the channel can either be free, so that the gas is fed into the atmosphere, or it can be connected to the supply line for the plasma nozzle, so that the medium is used directly as a process gas for plasma generation. With this design, the compact design of the plasma head can be maintained.
  • the meandering channel for the medium can be realized by parallel, perpendicular, in particular parallel to a longitudinal axis of the housing, bores in the wall of the housing.
  • the channels can initially be open to the end faces of the hollow-cylindrical housing.
  • These openings can be designed to be closable by a base or cover part of the housing in such a way that alternately two adjacent openings are connected to each other or isolated from each other, so that the meandering channel is formed in the wall.
  • the base or cover part of the housing is, for example, screwed or glued to the housing.
  • a further exemplary embodiment can provide for the channel to be designed as a screw in the wall of the housing.
  • Such a housing with a screw-like channel in the wall can be produced, for example, using an additive process such as a 3D printer.
  • the channel is designed as an evaporator for a liquid medium.
  • a liquid medium is first fed into the channel in order to then be fed into the plasma nozzle as a gas. Since liquid media generally have a higher heat capacity than gases, the heat transfer between the transformer or the wall and the medium can be increased and at the same time the medium can be used at least partially as a process gas. This also enables layer deposition.
  • the present invention can further provide that at least one heat sink, in particular cooling ribs, along which the medium can be guided, is arranged on an outside of the wall or the housing.
  • at least one heat sink in particular cooling ribs, along which the medium can be guided, is arranged on an outside of the wall or the housing.
  • it can also have cooling bodies on the outside.
  • These heat sinks can then in turn be actively cooled by applying a cooling medium, preferably by a fan.
  • a method for solving the problem mentioned at the outset has the measures of claim 5 . Accordingly, it is provided that a plasma head, in whose housing a transformer and at least one plasma nozzle is arranged, is actively temperature-controlled by a flowing medium, the medium being guided through a channel in a wall of a housing of the plasma head for the active temperature control of the plasma head , whereby the process gas is used as the medium.
  • process heat from the transformer can be actively and efficiently dissipated.
  • a different heat development of the transformer is to be expected.
  • the heat dissipation from the plasma head can be actively controlled so that the plasma head can be operated at an optimal operating temperature. At the optimum operating temperature, the plasma head is particularly reliable and stable.
  • a further exemplary embodiment of the present invention can provide that for the active temperature control, preferably cooling, of the plasma head, the medium is guided through the housing, preferably through a wall of the housing, of the plasma head, in particular through a channel in the wall of the plasma head and the passage of the medium is controlled by a valve so that the flow depends on the temperature of the plasma head.
  • the present invention can further provide that, for the active temperature control, the medium guided through the wall is preheated and/or is guided through the wall under a predetermined pressure.
  • a temperature sensor is arranged in the plasma head, which measures the temperature and transmits it to a control unit, which accordingly pre-cools or heats the medium.
  • the pressure can also be varied. For example, when there is a large amount of thermal energy to be dissipated, the pressure of the medium can be increased to control the temperature of the plasma head. By increasing the pressure of the medium, the flow is increased, so that the thermal energy to be absorbed per unit of time is increased. Likewise, the pressure of the medium with which it is guided through the channel can be reduced if only a small amount of thermal energy has to be removed from the plasma head. This pre-temperature control and varying the pressure ensure particularly efficient and therefore reliable and stable operation of the plasma head.
  • a further advantageous exemplary embodiment of the present invention can provide that the medium for tempering the plasma head is applied to an outside of the wall. Applying the medium to the outside of the housing or the wall in this way creates a particularly simple way of cooling the plasma head.
  • FIG 1 An embodiment of a plasma head 10 according to the invention is shown in FIG 1 shown highly schematized in cross section.
  • the plasma head 10 consists of a housing 11, inside which a transformer 12 and a plasma nozzle 13 are arranged.
  • the transformer 12 is enclosed by an insulator 14 and connected to a voltage source 15 .
  • the high voltage required to ignite the plasma is generated by the transformer 12 and the voltage source 15 .
  • a wall 23 of the housing 11 of the plasma head 10 is connected to a ground 29 .
  • the plasma nozzle 13 has an electrode 16 which is coupled to the transformer 12 .
  • the tip of this needle-shaped electrode 16 points in the direction of a ring electrode 17 serving as an outlet for the plasma.
  • Process gas is conducted into the nozzle volume 19 through a process gas inlet 18 .
  • the process gas is shown schematically as arrow 20 here. In reality, the nozzle volume 19 is filled almost homogeneously by a permanent flow of the process gas 18 .
  • An electrical discharge between the electrode 16 and the ring electrode 17 causes the process gas to be ionized, symbolically represented here as a lightning bolt 21 .
  • the ionized gas leaves the plasma nozzle 13 through the ring electrode 17 as a plasma jet 22 or as a plasma flame.
  • At least one channel 24 is formed in the wall 23 of the plasma head 10 .
  • this channel 24 extends in a meandering manner through the entire wall 23.
  • a rolled-up wall 23 of the plasma head 10 is shown schematically, so that the meandering course of the channel 24 in the wall 23 becomes clear.
  • the channel 24 has an inlet 25 and an outlet 26 .
  • a medium is let into the inlet 25 via a valve (not shown) or from a storage volume, so that the medium flows at a predetermined pressure through the channel 24 in the direction of the outlet 26 (see arrow 27).
  • the medium flowing through which is the process gas, dissipates the heat developed by the transformer 12 .
  • This process gas After this process gas has flowed through the channel 24 and has absorbed heat energy from the transformer 12 , it is conducted through the process gas inlet 18 into the nozzle volume 19 by a connecting means 28 shown here in broken lines.
  • the connecting means 18 can be, for example, a hose or a short piece of pipe. This connecting means 18 can also be integrated in the housing 11 or the plasma head 10 .
  • the channel 24 is integrated into the housing 11 or into the wall 23 .
  • a control device which determines the temperature in the plasma head 10 via a temperature sensor, also not shown, in the plasma head 10 and controls the inflow of the process gas in the channel 24 accordingly.
  • FIG. 1 shows the 3 another embodiment of a channel 30.
  • the medium as previously at the in 1 described embodiment described, fed to the channel 30 through an inlet, not shown, and fed to the nozzle volume 19 via a connecting means 28 in the manner described above.
  • the channel 30 is arranged in the wall 23 of the plasma head 10 in the manner of a screw. This screw-like arrangement of the channel 30 allows a particularly long contact surface to be produced between the medium and the wall 23, so that the thermal energy is transferred to the medium in a particularly efficient manner.
  • the wall 23 may be assigned cooling bodies (not shown), such as cooling fins, on its outer side 31 .
  • the thermal energy of the transformer 12 is also effectively dissipated from the plasma head 10 through these cooling ribs, around which a medium for cooling can also flow, for example.

Description

Die Erfindung betrifft eine Vorrichtung zur Erzeugung eines atmosphärischen Plasmas gemäß den Merkmalen des Anspruchs 1. Des Weiteren betrifft die Erfindung ein Verfahren zur Erzeugung eines atmosphärischen Plasmas gemäß Anspruch 5.The invention relates to a device for generating an atmospheric plasma according to the features of claim 1. The invention also relates to a method for generating an atmospheric plasma according to claim 5.

Zur Behandlung von beispielsweise Oberflächen aus Kunststoff, Metall, Keramik usw. zum Zwecke der Reinigung, Oberflächenaktivierung, Polymerisation, Keimreduzierung und dergleichen ist es bekannt, diese mit einem atmosphärischen Plasma zu beaufschlagen. Durch die Reinigung und/oder Aktivierung der Oberfläche mittels eines atmosphärischen Plasmas kann diese beispielsweise mit einer Flüssigkeit oder einem Klebstoff besser benetzt werden.For the treatment of, for example, surfaces made of plastic, metal, ceramics, etc. for the purpose of cleaning, surface activation, polymerisation, germ reduction and the like, it is known to apply an atmospheric plasma to them. By cleaning and/or activating the surface by means of an atmospheric plasma, it can be better wetted with a liquid or an adhesive, for example.

Zur Erzeugung eines atmosphärischen Plasmas wird ein Plasmakopf mit einem Transformator und einer Plasmadüse verwendet. Durch die von dem Transformator erzeugte Hochspannung wird ein Prozessgas in der Plasmadüse durch eine Entladung ionisiert. Das Prozessgas tritt sodann als gerichteter Plasmastahl oder Plasmaflamme aus der Düse aus.A plasma head with a transformer and a plasma nozzle is used to generate an atmospheric plasma. A process gas in the plasma nozzle is ionized by a discharge due to the high voltage generated by the transformer. The process gas then exits the nozzle as a directed plasma jet or plasma flame.

Um Probleme wie beispielsweise Kabelbrüche, Durchschläge oder Verlustleistungen zu vermeiden, ist es bekannt, den Transformator und die Plasmadüse in einem gemeinsamen Plasmakopf zu integrieren. Durch diese kompakte Bauweise des Plasmakopfes kann auf lange Kabel sowie Elektronik verzichtet werden, was die Gefahr eines Kabelbruches oder von Durchschlägen reduziert.In order to avoid problems such as cable breaks, breakdowns or power losses, it is known to integrate the transformer and the plasma nozzle in a common plasma head. Due to this compact design of the plasma head, long cables and electronics can be dispensed with, which reduces the risk of cable breaks or breakdowns.

Als besonders nachteilig bei dieser kompakten Bauweise hat sich die Verlustleistung des Transformators erwiesen, welche sich als Wärme in dem Gehäuse des Plasmakopfes staut. Diese Wärmeentwicklung kann derart groß sein, dass der Transformator ausfällt oder beschädigt wird. Durch diese Wärmeentwicklung wird somit die Plasmaerzeugung beeinflusst.The power loss of the transformer, which accumulates as heat in the housing of the plasma head, has proven to be particularly disadvantageous in this compact design. This heat generation can be so great that the transformer fails or is damaged. The generation of plasma is thus influenced by this heat development.

Bekannte Plasmasysteme, wie beispielsweise in US 2015/0054405 A1 beschrieben, weisen eine Kühlung auf, bei der die Wärme durch Konvektion vom Gehäuse des Plasmakopfes abgeführt wird. Diese Art der Kühlung reicht jedoch nur für bestimmte Bauformen bzw. Größen sowie Einbaulagen des Plasmakopfes aus. Beispielsweise erweist sich die Kühlung des Transformators durch reine Konvektion bei Dauereinsatz des Plasmakopfes als nicht ausreichend.Known plasma systems, such as in U.S. 2015/0054405 A1 described, have a cooling in which the heat is dissipated by convection from the housing of the plasma head. However, this type of cooling is only sufficient for certain designs or sizes and installation positions of the plasma head. For example, the cooling of the transformer by pure convection proves to be insufficient when the plasma head is used continuously.

Der Erfindung liegt daher die Aufgabe zugrunde, eine Vorrichtung sowie ein Verfahren zur Erzeugung eines atmosphärischen Plasmas zu schaffen, mit dem ein stabiler und zuverlässiger Betrieb gewährleistet wird.The invention is therefore based on the object of creating a device and a method for generating an atmospheric plasma, with which stable and reliable operation is ensured.

Eine Vorrichtung zur Lösung dieser Aufgabe weist die Merkmale des Anspruchs 1 auf.A device for solving this problem has the features of claim 1.

Demnach ist es vorgesehen, dass einem Plasmakopf dem ein Transformator und mindestens eine Plasmadüse zugeordnet ist, wobei der Transformator und die Plasmadüse eine räumliche Einheit bilden, eine Zuleitung für ein durchströmendes Medium zur aktiven Temperierung des Plasmakopfes aufweist und wobei in einer Wandung eines Gehäuses des Plasmakopfes mindestens ein Kanal zur Führung des Mediums angeordnet ist. Dabei erstreckt sich der Kanal wenigstens bereichsweise über die Wandung des Plasmakopfes, wobei er mit mindestens einem Einlass verbunden ist. Bei dem Medium handelt es sich um das Prozessgas. Durch das strömende Medium lässt sich der Plasmakopf aktiv temperieren. Demnach kann in Abhängigkeit von der Bauform bzw. der Größe und des Betriebes des Plasmakopfes dieser aktiv temperiert werden. Durch das strömende Medium wird permanent Wärme aus dem Plasmakopf abtransportiert. Durch das Nachströmen des Mediums kann der Plasmakopf während der gesamten Betriebszeit auf einer stabilen Temperatur gehalten werden. Somit lässt sich über das durchströmende Medium eine Temperatur in dem Plasmakopf erzeugen, bei der eine maximale Ausbeute an Plasma erzielt wird und zeitgleich der Plasmakopf besonders stabil und zuverlässig arbeitet.Accordingly, it is provided that a plasma head to which a transformer and at least one plasma nozzle is assigned, the transformer and the plasma nozzle forming a spatial unit, having a supply line for a medium flowing through for active temperature control of the plasma head and being in a wall of a housing of the plasma head at least one channel for guiding the medium is arranged. In this case, the channel extends at least in regions over the wall of the plasma head, being connected to at least one inlet. The medium is the process gas. The plasma head can be actively tempered by the flowing medium. Accordingly, depending on the design or the size and the operation of the plasma head, it can be actively temperature-controlled. The flowing medium constantly transports heat away from the plasma head. The plasma head can be kept at a stable temperature during the entire operating time due to the subsequent flow of the medium. A temperature can thus be generated in the plasma head via the medium flowing through, at which a maximum yield of plasma is achieved and at the same time the plasma head works in a particularly stable and reliable manner.

Die Erfindung sieht es vor, dass als Medium zur Temperierung, insbesondere zur Kühlung, des Plasmakopfes, vorzugsweise des Transformators, eine Elektrode oder einer Plasmadüse das Prozessgas selbst verwendbar ist. DieThe invention provides that as a medium for temperature control, in particular for cooling, the plasma head, preferably the transformer, an electrode or a Plasma nozzle the process gas itself can be used. the

Verwendung des Prozessgases als Kühlmedium ist besonders vorteilhaft, da dieses sowieso dem Plasmakopf zugeführt werden muss. Erfindungsgemäß durchströmt daher das Prozessgas zunächst den Bereich um den Transformator, bevor es für die Plasmaerzeugung der Plasmadüse zugeführt wird. Die durch die Aufnahme der thermischen Energie erhöhte Temperatur des Prozessgases hat keinerlei Auswirkungen auf die Effizienz der Plasmabildung. Für eine besonders effiziente Arbeitsweise des Plasmakopfes kann es erfindungsgemäß außerdem vorteilhaft sein, wenn das Prozessgas mit einem weiteren Medium, welches sich besonders gut als Kühlmedium erwiesen hat, gemischt wird. Auf diese Weise lässt sich die Wärme aus dem Plasmakopf schnell abführen und gleichzeitig eine Plasmaflamme erzeugen, ohne dass eine zusätzliche Leitung für das Kühlmedium an dem Plasmakopf installiert werden muss.The use of the process gas as a cooling medium is particularly advantageous since it has to be fed to the plasma head anyway. According to the invention, the process gas first flows through the area around the transformer before it is fed to the plasma nozzle for plasma generation. The temperature of the process gas, which is increased by absorbing the thermal energy, has no effect whatsoever on the efficiency of the plasma formation. For a particularly efficient mode of operation of the plasma head, it can also be advantageous according to the invention if the process gas is mixed with another medium which has proven to be particularly good as a cooling medium. In this way, the heat can be dissipated quickly from the plasma head and a plasma flame can be generated at the same time, without having to install an additional line for the cooling medium on the plasma head.

Ein besonders vorteilhaftes Ausführungsbeispiel der vorliegenden Erfindung kann es vorsehen, dass in einem Gehäuse, vorzugsweise in einer Wandung des Gehäuses, ein, insbesondere mäanderförmiger, Kanal zur Führung des Mediums angeordnet ist, der sich wenigstens bereichsweise über die Wandung des Gehäuses erstreckt und mit der mindestens einen Zuleitung verbunden ist. Durch die Führung des Kanals durch die Wandung des Plasmakopfes bleibt das Medium besonders lange mit der Wandung in Kontakt, was dazu führt, dass das Medium besonders viel Wärmeenergie des Transformators aufnehmen kann. Insbesondere eine mäanderförmige Ausgestaltung des Kanals hat sich als besonders effizient für den Transfer von Wärmeenergie auf das Medium erwiesen. Ein Ende des Kanals stellt eine Zuleitung für das Medium, beispielsweise für das Prozessgas, dar. Das zweite Ende des Kanals kann entweder frei sein, sodass das Gas in die Atmosphäre geleitet wird, oder mit der Zuleitung für die Plasmadüse verbunden sein, sodass das Medium als Prozessgas direkt für die Plasmaerzeugung verwendet wird. Durch diese Bauart kann die kompakte Bauweise des Plasmakopfes beibehalten werden.A particularly advantageous embodiment of the present invention can provide that in a housing, preferably in a wall of the housing, a channel, in particular meandering, for guiding the medium is arranged, which at least partially extends over the wall of the housing and is connected to the at least connected to a supply line. By guiding the channel through the wall of the plasma head, the medium remains in contact with the wall for a particularly long time, which means that the medium can absorb a particularly large amount of thermal energy from the transformer. In particular, a meandering configuration of the channel has proven to be particularly efficient for the transfer of thermal energy to the medium. One end of the channel represents a supply line for the medium, for example for the process gas. The second end of the channel can either be free, so that the gas is fed into the atmosphere, or it can be connected to the supply line for the plasma nozzle, so that the medium is used directly as a process gas for plasma generation. With this design, the compact design of the plasma head can be maintained.

Der mäanderförmige Kanal für das Medium kann durch parallele, senkrechte, insbesondere parallel zu einer Längsachse des Gehäuses, Bohrungen in der Wandung des Gehäuses realisiert werden. Die Kanäle können zunächst zu den Stirnseiten des hohlzylindrischen Gehäuses offen sein. Diese Öffnungen können durch ein Boden- bzw. Deckelteil des Gehäuses verschließbar ausgebildet sein und zwar derart, dass abwechselnd zwei benachbarte Öffnungen miteinander verbunden bzw. voneinander isoliert sind, so dass sich der mäanderförmige Kanal in der Wandung ausbildet. Das Boden- bzw. Deckelteil des Gehäuses wird mit dem Gehäuse beispielsweise verschraubt oder verklebt. Ein weiteres Ausführungsbeispiel kann es vorsehen, dass der Kanal als Schraube in der Wandung des Gehäuses ausgebildet ist. Ein derartiges Gehäuse mit einem schraubenartigen Kanal in der Wandung lässt sich beispielsweise mit einem generativen Verfahren, wie etwa einem 3D-Drucker, herstellen.The meandering channel for the medium can be realized by parallel, perpendicular, in particular parallel to a longitudinal axis of the housing, bores in the wall of the housing. The channels can initially be open to the end faces of the hollow-cylindrical housing. These openings can be designed to be closable by a base or cover part of the housing in such a way that alternately two adjacent openings are connected to each other or isolated from each other, so that the meandering channel is formed in the wall. The base or cover part of the housing is, for example, screwed or glued to the housing. A further exemplary embodiment can provide for the channel to be designed as a screw in the wall of the housing. Such a housing with a screw-like channel in the wall can be produced, for example, using an additive process such as a 3D printer.

Es kann außerdem vorgesehen sein, dass der Kanal als Verdampfer für ein flüssiges Medium ausgebildet ist. Bei diesem Ausführungsbeispiel wird zunächst ein flüssiges Medium in den Kanal geleitet, um sodann als Gas in die Plasmadüse geleitet zu werden. Da flüssige Medien in der Regel eine höhere Wärmekapazität haben als Gase kann dadurch der Wärmeübertrag zwischen dem Transformator bzw. der Wandung und dem Medium erhöht werden und gleichzeitig das Medium zumindest teilweise als Prozessgas verwendet werden. Dadurch wird zudem eine Schichtabscheidung ermöglicht.It can also be provided that the channel is designed as an evaporator for a liquid medium. In this exemplary embodiment, a liquid medium is first fed into the channel in order to then be fed into the plasma nozzle as a gas. Since liquid media generally have a higher heat capacity than gases, the heat transfer between the transformer or the wall and the medium can be increased and at the same time the medium can be used at least partially as a process gas. This also enables layer deposition.

Vorzugsweise kann es die vorliegende Erfindung weiter vorsehen, dass an einer Außenseite der Wandung bzw. des Gehäuses mindestens ein Kühlkörper, insbesondere Kühlrippen, angeordnet sind, entlang denen das Medium führbar ist. Alternativ zur Ausbildung von Kanälen in der Wandung kann diese auch Kühlkörper an der Außenseite aufweisen. Diese Kühlkörper lassen sich sodann wiederum aktiv durch die Beaufschlagung eines Kühlmediums kühlen, vorzugsweise durch einen Lüfter.Preferably, the present invention can further provide that at least one heat sink, in particular cooling ribs, along which the medium can be guided, is arranged on an outside of the wall or the housing. As an alternative to the formation of channels in the wall, it can also have cooling bodies on the outside. These heat sinks can then in turn be actively cooled by applying a cooling medium, preferably by a fan.

Ein Verfahren zur Lösung der eingangs genannten Aufgabe weist die Maßnahmen des Anspruchs 5 auf. Demnach ist es vorgesehen, dass ein Plasmakopf, in dessen Gehäuse ein Transformator und mindestens eine Plasmadüse angeordnet ist, durch ein strömendes Medium aktiv temperiert wird, wobei für die aktive Temperierung des Plasmakopfes das Medium durch einen Kanal in einer Wandung eines Gehäuses des Plasmakopfes geleitet wird, wobei als Medium das Prozessgas verwendet wird. Durch diese aktive Temperierung des Plasmakopfes lässt sich Prozesswärme des Transformators aktiv und effizient abführen. Je nach Größe und Bauform des Plasmakopfes ist mit einer anderen Wärmeentwicklung des Transformators zu rechnen. Durch Regelung des Flusses des Mediums kann die Wärmeabfuhr aus dem Plasmakopf aktiv gesteuert werden, sodass der Plasmakopf bei einer optimalen Betriebstemperatur betrieben werden kann. Bei der optimalen Betriebstemperatur verhält sich der Plasmakopf besonders zuverlässig und stabil.A method for solving the problem mentioned at the outset has the measures of claim 5 . Accordingly, it is provided that a plasma head, in whose housing a transformer and at least one plasma nozzle is arranged, is actively temperature-controlled by a flowing medium, the medium being guided through a channel in a wall of a housing of the plasma head for the active temperature control of the plasma head , whereby the process gas is used as the medium. With this active temperature control of the plasma head, process heat from the transformer can be actively and efficiently dissipated. Depending on the size and design of the plasma head, a different heat development of the transformer is to be expected. By regulating the flow of the medium, the heat dissipation from the plasma head can be actively controlled so that the plasma head can be operated at an optimal operating temperature. At the optimum operating temperature, the plasma head is particularly reliable and stable.

Ein weiteres Ausführungsbeispiel der vorliegenden Erfindung kann es vorsehen, dass für die aktive Temperierung, vorzugsweise Kühlung, des Plasmakopfes das Medium durch das Gehäuse, vorzugsweise durch eine Wandung des Gehäuses, des Plasmakopfes, insbesondere durch einen Kanal in der Wandung, des Plasmakopfes geleitet wird und das Durchleiten des Mediums durch ein Ventil geregelt wird, sodass der Durchfluss in Abhängigkeit von der Temperatur des Plasmakopfes erfolgt.A further exemplary embodiment of the present invention can provide that for the active temperature control, preferably cooling, of the plasma head, the medium is guided through the housing, preferably through a wall of the housing, of the plasma head, in particular through a channel in the wall of the plasma head and the passage of the medium is controlled by a valve so that the flow depends on the temperature of the plasma head.

Bevorzugt kann es die vorliegende Erfindung weiter vorsehen, dass für die aktive Temperierung das durch die Wandung geführte Medium vortemperiert und/oder unter einem vorbestimmten Druck durch die Wandung geführt wird. Dazu kann es vorgesehen sein, dass in dem Plasmakopf ein Temperatursensor angeordnet ist, welcher die Temperatur misst und an eine Steuereinheit überträgt, welche das Medium dementsprechend vorkühlt oder erhitzt. Neben der Temperatur des Mediums lässt sich auch der Druck variieren. So kann beispielsweise bei einer großen Menge abzuführender thermischer Energie der Druck des Mediums zum Temperieren des Plasmakopfes erhöht werden. Durch Erhöhung des Druckes des Mediums wird der Durchfluss erhöht, sodass die aufzunehmende thermische Energie pro Zeiteinheit vergrößert wird. Gleichermaßen kann der Druck des Mediums, mit dem dieses durch den Kanal geführt wird, reduziert werden, wenn nur eine geringe Menge thermische Energie aus dem Plasmakopf abgeführt werden muss. Durch dieses Vortemperieren sowie Variieren des Druckes lässt sich ein besonders effizienter und somit zuverlässiger wie auch stabiler Betrieb des Plasmakopfes gewährleisten.Preferably, the present invention can further provide that, for the active temperature control, the medium guided through the wall is preheated and/or is guided through the wall under a predetermined pressure. For this purpose, it can be provided that a temperature sensor is arranged in the plasma head, which measures the temperature and transmits it to a control unit, which accordingly pre-cools or heats the medium. In addition to the temperature of the medium, the pressure can also be varied. For example, when there is a large amount of thermal energy to be dissipated, the pressure of the medium can be increased to control the temperature of the plasma head. By increasing the pressure of the medium, the flow is increased, so that the thermal energy to be absorbed per unit of time is increased. Likewise, the pressure of the medium with which it is guided through the channel can be reduced if only a small amount of thermal energy has to be removed from the plasma head. This pre-temperature control and varying the pressure ensure particularly efficient and therefore reliable and stable operation of the plasma head.

Außerdem kann es ein weiteres vorteilhaftes Ausführungsbeispiel der vorliegenden Erfindung vorsehen, dass eine Außenseite der Wandung mit dem Medium zum Temperieren des Plasmakopfes beaufschlagt wird. Durch diese Beaufschlagung der Außenseite des Gehäuses bzw. der Wandung mit dem Medium wird eine besonders einfach Art und Weise geschaffen, den Plasmakopf zu kühlen.In addition, a further advantageous exemplary embodiment of the present invention can provide that the medium for tempering the plasma head is applied to an outside of the wall. Applying the medium to the outside of the housing or the wall in this way creates a particularly simple way of cooling the plasma head.

Ein bevorzugtes Ausführungsbeispiel der vorliegenden Erfindung wird nachfolgend anhand der Zeichnungen näher erläutert. In dieser zeigen:

Fig. 1
einen Querschnitt durch einen schematisch dargestellten Plasmakopf,
Fig. 2
einen Querschnitt durch eine schematische Darstellung einer Wandung des Plasmakopfes, und
Fig. 3
einen Querschnitt durch ein weiteres Ausführungsbeispiel eines Plasmakopfes.
A preferred embodiment of the present invention is explained in more detail below with reference to the drawings. In this show:
1
a cross section through a plasma head shown schematically,
2
a cross section through a schematic representation of a wall of the plasma head, and
3
a cross section through another embodiment of a plasma head.

Ein Ausführungsbeispiel eines erfindungsgemäßen Plasmakopfes 10 ist in der Fig. 1 stark schematisiert im Querschnitt dargestellt. Im Wesentlichen besteht der Plasmakopf 10 aus einem Gehäuse 11, in dessen Inneren ein Transformator 12 und eine Plasmadüse 13 angeordnet sind. Der Transformator 12 ist von einem Isolator 14 umschlossen und an eine Spannungsquelle 15 angeschlossen. Durch den Transformator 12 und die Spannungsquelle 15 wird die für die Zündung des Plasmas erforderliche Hochspannung erzeugt. Eine Wandung 23 des Gehäuses 11 des Plasmakopfes 10 ist an eine Masse 29 angeschlossen.An embodiment of a plasma head 10 according to the invention is shown in FIG 1 shown highly schematized in cross section. Essentially, the plasma head 10 consists of a housing 11, inside which a transformer 12 and a plasma nozzle 13 are arranged. The transformer 12 is enclosed by an insulator 14 and connected to a voltage source 15 . The high voltage required to ignite the plasma is generated by the transformer 12 and the voltage source 15 . A wall 23 of the housing 11 of the plasma head 10 is connected to a ground 29 .

Die Plasmadüse 13 weist eine Elektrode 16 auf, welche mit dem Transformator 12 gekoppelt ist. Diese nadelförmige Elektrode 16 weist mit ihrer Spitze in Richtung einer als Ausgang für das Plasma dienenden Ringelektrode 17. Durch einen Prozessgaseinlass 18 wird Prozessgas in das Düsenvolumen 19 geleitet. Das Prozessgas ist hier schematisch als Pfeil 20 dargestellt. In der Realität wird das Düsenvolumen 19 nahezu homogen von einem permanenten Fluss des Prozessgases 18 gefüllt.The plasma nozzle 13 has an electrode 16 which is coupled to the transformer 12 . The tip of this needle-shaped electrode 16 points in the direction of a ring electrode 17 serving as an outlet for the plasma. Process gas is conducted into the nozzle volume 19 through a process gas inlet 18 . The process gas is shown schematically as arrow 20 here. In reality, the nozzle volume 19 is filled almost homogeneously by a permanent flow of the process gas 18 .

Durch eine elektrische Entladung zwischen der Elektrode 16 und der Ringelektrode 17 kommt es zu einer hier symbolisch als Blitz 21 dargestellten Ionisierung des Prozessgases. Das ionisierte Gas verlässt die Plasmadüse 13 durch die Ringelektrode 17 als Plasmastrahl 22 bzw. als Plasmaflamme.An electrical discharge between the electrode 16 and the ring electrode 17 causes the process gas to be ionized, symbolically represented here as a lightning bolt 21 . The ionized gas leaves the plasma nozzle 13 through the ring electrode 17 as a plasma jet 22 or as a plasma flame.

In der Wandung 23 des Plasmakopfes 10 ist mindestens ein Kanal 24 ausgebildet. Dieser Kanal 24 erstreckt sich bei dem hier dargestellten Ausführungsbeispiel mäanderförmig durch die gesamte Wandung 23. In Fig. 2 ist schematisch eine aufgerollte Wandung 23 des Plasmakopfes 10 dargestellt, sodass der mäanderförmige Verlauf des Kanals 24 in der Wandung 23 deutlich wird. Der Kanal 24 weist einen Einlass 25 und einen Auslass 26 auf. Erfindungsgemäß wird über ein nicht dargestelltes Ventil bzw. von einem Vorratsvolumen ein Medium in den Einlass 25 eingelassen, sodass das Medium mit einem vorbestimmten Druck durch den Kanal 24 in Richtung Auslass 26 strömt (siehe Pfeile 27).At least one channel 24 is formed in the wall 23 of the plasma head 10 . In the exemplary embodiment shown here, this channel 24 extends in a meandering manner through the entire wall 23. In 2 a rolled-up wall 23 of the plasma head 10 is shown schematically, so that the meandering course of the channel 24 in the wall 23 becomes clear. The channel 24 has an inlet 25 and an outlet 26 . According to the invention, a medium is let into the inlet 25 via a valve (not shown) or from a storage volume, so that the medium flows at a predetermined pressure through the channel 24 in the direction of the outlet 26 (see arrow 27).

Das durchströmende Medium, bei dem es sich um das Prozessgas handelt, führt die durch den Transformator 12 entwickelte Wärme ab. Dieses Prozessgas wird nachdem es den Kanal 24 durchströmt und Wärmeenergie des Transformators 12 aufgenommen hat, durch ein hier gestrichelt dargestelltes Verbindungsmittel 28 durch den Prozessgaseinlass 18 in das Düsenvolumen 19 geleitet. Bei dem Verbindungsmittel 18 kann es sich beispielsweise um einen Schlauch oder ein kurzes Rohrstück handeln. Dieses Verbindungsmittel 18 kann auch in dem Gehäuse 11 oder dem Plasmakopf 10 integriert sein. Der Kanal 24 ist in das Gehäuse 11 bzw. in die Wandung 23 integriert.The medium flowing through, which is the process gas, dissipates the heat developed by the transformer 12 . After this process gas has flowed through the channel 24 and has absorbed heat energy from the transformer 12 , it is conducted through the process gas inlet 18 into the nozzle volume 19 by a connecting means 28 shown here in broken lines. The connecting means 18 can be, for example, a hose or a short piece of pipe. This connecting means 18 can also be integrated in the housing 11 or the plasma head 10 . The channel 24 is integrated into the housing 11 or into the wall 23 .

In Abhängigkeit von der Größe bzw. Bauform oder der von dem Transformator 12 entwickelten thermischen Energie können unterschiedliche Medien als Kühlmittel benutzt werden. Darüber hinaus, ist es denkbar, dass in Abhängigkeit von der entwickelten thermischen Energie das Prozessgas vorgekühlt wird oder mit einem erhöhten Druck in den Kanal 24 eingelassen wird. Dazu dient erfindungsgemäß eine nicht dargestellte Steuereinrichtung, die über einen ebenfalls nicht dargestellten Temperatursensor in dem Plasmakopf 10 die Temperatur im Plasmakopf 10 ermittelt und den Zufluss des Prozessgases im Kanal 24 entsprechend steuert.Depending on the size or design or the thermal energy developed by the transformer 12, different media can be used as a coolant. In addition, it is conceivable that, depending on the thermal energy developed, the process gas is pre-cooled or is admitted into the channel 24 at an increased pressure. According to the invention, a control device, not shown, is used for this purpose, which determines the temperature in the plasma head 10 via a temperature sensor, also not shown, in the plasma head 10 and controls the inflow of the process gas in the channel 24 accordingly.

Neben der in den Fig. 1 und 2 dargestellten Ausgestaltung eines Kanals 24 zeigt die Fig. 3 ein weiteres Ausführungsbeispiel für einen Kanal 30. Bei dem in Fig. 3 dargestellten Kanal 30 wird das Medium, wie zuvor an dem in Fig. 1 dargestellten Ausführungsbeispiel beschrieben, durch einen nicht dargestellten Einlass dem Kanal 30 zugeführt und über ein Verbindungsmittel 28 in der zuvor beschriebenen Art und Weise dem Düsenvolumen 19 zugeführt. Der Kanal 30 ist in dem zweiten Ausführungsbeispiel schraubenartig in der Wandung 23 des Plasmakopfes 10 angeordnet. Durch diese schraubenartige Anordnung des Kanals 30 kann eine besonders lange Kontaktfläche zwischen dem Medium und der Wandung 23 erzeugt werden, sodass ein Übertrag der Wärmeenergie an das Medium besonders effizient gestaltet wird.Next to the in the Figures 1 and 2 illustrated embodiment of a channel 24 shows the 3 another embodiment of a channel 30. In the in 3 illustrated channel 30, the medium, as previously at the in 1 described embodiment described, fed to the channel 30 through an inlet, not shown, and fed to the nozzle volume 19 via a connecting means 28 in the manner described above. In the second exemplary embodiment, the channel 30 is arranged in the wall 23 of the plasma head 10 in the manner of a screw. This screw-like arrangement of the channel 30 allows a particularly long contact surface to be produced between the medium and the wall 23, so that the thermal energy is transferred to the medium in a particularly efficient manner.

Neben den hier dargestellten Ausführungsbeispielen ist es außerdem denkbar, dass die Wandung 23 auf seiner Außenseite 31 nicht dargestellte Kühlkörper wie beispielsweise Kühlrippen zugeordnet sind. Durch diese Kühlrippen, die beispielsweise ebenfalls mit einem Medium zum Kühlung umströmt werden können, wird ebenfalls die thermische Energie des Transformators 12 effektiv aus dem Plasmakopf 10 abgeleitet.In addition to the exemplary embodiments shown here, it is also conceivable for the wall 23 to be assigned cooling bodies (not shown), such as cooling fins, on its outer side 31 . The thermal energy of the transformer 12 is also effectively dissipated from the plasma head 10 through these cooling ribs, around which a medium for cooling can also flow, for example.

Claims (7)

  1. Apparatus for generating an atmospheric plasma with a plasma head (10) which has a transformer (12) for generating a high voltage and at least one plasma nozzle (13) which can be supplied with a process gas for plasma generation, wherein the transformer (12) and at least one plasma nozzle (13) form a spatial unit and wherein the plasma head (10) has at least one supply line for a medium that is flowing through, the medium being the process gas, for active temperature control of the plasma head (10), characterized in that in a wall (23) of a housing (11) of the plasma head (10) there is arranged at least one channel (24, 30) for guiding the medium, which extends at least in regions over the wall (23) of the plasma head (10) and which is connected to at least one inlet (25).
  2. Apparatus for generating an atmospheric plasma according to Claim 1, wherein in the wall (23) of the plasma head (10) there is arranged at least one meandering channel (24, 30) for guiding the medium, which extends at least in regions over the wall (23) of the plasma head (10) and which is connected to at least one inlet (25).
  3. Apparatus for generating an atmospheric plasma according to Claim 1 or 2, wherein the channel (24, 30) is in the form of parallel bores, in particular bores arranged parallel to a longitudinal axis of the housing (11), in the wall (23) of the housing (11), wherein the open bores at the face sides of the, in particular hollowcylindrical, housing (11) are connectable or isolatable from one another by way of a base or cover part, so that the meandering channel (24) is formed in the wall (23).
  4. Apparatus for generating an atmospheric plasma according to any of the preceding claims, wherein on an outer side (31) of housing (11) there are arranged at least one cooling body, particular cooling fins, along which the medium can be guided.
  5. Method for generating an atmospheric plasma with a transformer (12) for generating a high voltage and with at least one plasma nozzle (13) which is supplied with a process gas for generation of the plasma, wherein the transformer (12) and the at least one plasma nozzle (13) form a plasma head (10) and the plasma head (10) is actively temperature-controlled by a flowing medium, wherein the medium used is the process gas, characterized in that for the active temperature control of the plasma head (10) the medium is conducted through a channel (24, 30) in a wall (23) of a housing (11) of the plasma head (10) .
  6. Method for generating an atmospheric plasma according to Claim 5, wherein, for the active temperature control, the medium guided through the wall (23) is preadjusted to a temperature and/or guided through the channel (24, 30) under a predetermined pressure.
  7. Method for generating an atmospheric plasma according to Claim 5 or 6, wherein an outer side (31) of the housing (11) is exposed to the medium for temperature control of the plasma head (10).
EP17001337.9A 2016-09-05 2017-08-04 Device and method for creating atmospheric plasma Active EP3291651B1 (en)

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DE19900128B4 (en) * 1998-12-21 2012-01-26 Sulzer Metco Ag Nozzle and nozzle arrangement for a burner head of a plasma spray gun

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DE60201387T2 (en) 2000-04-10 2005-11-17 Tetronics Ltd., Faringdon DOUBLE PLASMA BURNER DEVICE
AT503646B1 (en) 2006-09-15 2007-12-15 Fronius Int Gmbh Water vapor plasma burner for cutting a workpiece, comprises a feed line for a liquid, a heating device, an evaporator for forming a gas from the liquid, a cathode detachably connected to a movably mounted piston rod, and a nozzle
DE102009028190A1 (en) 2009-08-03 2011-02-10 Leibniz-Institut für Plasmaforschung und Technologie e.V. Cold plasma beam producing device i.e. plasma hand-held device, for microplasma treatment of materials for e.g. cosmetic purpose, has high frequency-generator, coil, body and high voltage-electrode integrally arranged in metal housing
DE102012103938A1 (en) 2012-05-04 2013-11-07 Reinhausen Plasma Gmbh Plasma module for a plasma generating device and plasma generating device
DE102013100617B4 (en) 2013-01-22 2016-08-25 Epcos Ag Device for generating a plasma and handheld device with the device
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DE19900128B4 (en) * 1998-12-21 2012-01-26 Sulzer Metco Ag Nozzle and nozzle arrangement for a burner head of a plasma spray gun

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DE102016010619A1 (en) 2018-03-08
ES2935577T3 (en) 2023-03-08
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FI3291651T3 (en) 2023-01-31

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