DE102009028190A1 - Cold plasma beam producing device i.e. plasma hand-held device, for microplasma treatment of materials for e.g. cosmetic purpose, has high frequency-generator, coil, body and high voltage-electrode integrally arranged in metal housing - Google Patents
Cold plasma beam producing device i.e. plasma hand-held device, for microplasma treatment of materials for e.g. cosmetic purpose, has high frequency-generator, coil, body and high voltage-electrode integrally arranged in metal housing Download PDFInfo
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- DE102009028190A1 DE102009028190A1 DE102009028190A DE102009028190A DE102009028190A1 DE 102009028190 A1 DE102009028190 A1 DE 102009028190A1 DE 102009028190 A DE102009028190 A DE 102009028190A DE 102009028190 A DE102009028190 A DE 102009028190A DE 102009028190 A1 DE102009028190 A1 DE 102009028190A1
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/36—Circuit arrangements
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2245/00—Applications of plasma devices
- H05H2245/30—Medical applications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H2245/00—Applications of plasma devices
- H05H2245/60—Portable devices
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- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Plasma Technology (AREA)
Abstract
Description
Die Erfindung betrifft eine Vorrichtung zur Erzeugung eines kalten Plasmas unter Atmosphärendruckbedingungen, die vorteilhaft für die Plasmabehandlung von Materialien für kosmetische und medizinische Zwecke eingesetzt werden kann. Die Erfindung ermöglicht es, durch die Integration von Plasmadüse und erforderlicher Ansteuerelektronik in einem miniaturisierten Handgerät, eine Einhaltung der Richtlinien der elektromagnetischen Verträglichkeit (EMV) zu gewährleisten, die Verlustleistung zu minimieren, sowie zusätzlich einen Batteriebetrieb, und damit eine autonome Arbeitsweise, zu realisieren.The The invention relates to a device for generating a cold plasma under atmospheric pressure conditions, which are beneficial for the plasma treatment of materials for cosmetic and medical purposes can be used. The invention allows it, through the integration of plasma nozzle and required Control electronics in a miniaturized handset, Compliance with Electromagnetic Compatibility (EMC) Directives to ensure that minimize power loss, as well in addition a battery operation, and thus an autonomous Working method, to realize.
Stand der TechnikState of the art
Niedertemperatur-Plasmen werden bereits seit geraumer Zeit zur Behandlung von Oberflächen zum Zweck der Oberflächenaktivierung, des Ätzens, der Polymerisation, zur Schichtabscheidung, zur Reinigung sowie zur Keimreduzierung eingesetzt. Zunächst wurden dafür vorrangig Niederdruckplasmen genutzt, in denen die für die Prozesse erforderlichen reaktiven Spezies durch die Wahl geeigneter Prozessparameter in definiertem Maße erzeugt werden können. Da Niederdruckplasma-Verfahren sowohl aus Kostengründen als auch aus verfahrenstechnischen Gründen für zahlreiche industrielle Prozesse ungeeignet sind, wurden alternative Plasmaverfahren entwickelt, die bei Atmosphärendruck arbeiten, somit wesentlich kostengünstiger sind und sich in entsprechende Fertigungsstrecken einfacher integrieren lassen. Eine Möglichkeit, die für die Anwendbarkeit von Atmosphärendruck-Plasmenverfahren erforderliche Homogenität der Plasmen zu erreichen, besteht darin, durch eine gerichtete Strömung des Arbeitsgases (Prozessgases) einen Plasmastrahl außerhalb des Entladungsraumes zu erzeugen.Low temperature plasmas have been used for some time now for the treatment of surfaces Purpose of surface activation, etching, etching Polymerization, for layer deposition, for cleaning and for Germ reduction used. At first, it was for that Priority used low pressure plasmas, in which the for the processes required reactive species by choosing appropriate Process parameters can be generated to a defined extent. Because low-pressure plasma method both for cost reasons as well as procedural reasons for Numerous industrial processes were unsuitable, became alternative Developed plasma processes that operate at atmospheric pressure, thus are much cheaper and in appropriate Make production lines easier to integrate. A possibility, for the applicability of atmospheric pressure plasmas to achieve the required homogeneity of the plasmas exists therein, by a directed flow of the working gas (process gas) to generate a plasma jet outside the discharge space.
Anwendungen
von derartigen Strahlplasmen werden in zahlreichen Patentschriften
beschrieben. In der Offenlegungsschrift
Die
Erfindung bezieht sich auf eine Vorrichtung der in der Patentschrift
des Anmelders ”
Die Verbindung von Plasmadüse und HF-Generator durch ein längeres Kabel führt dazu, dass die Werte der beim Betrieb einer Vorrichtung entsprechend des Standes der Technik auftretenden elektromagnetischen Störstrahlung in der Regel das durch die europäischen Richtlinien zur elektromagnetischen Verträglichkeit (EMV) festgelegte Limit überschreiten. Vorrichtungen dieser Art können nicht ohne einen größeren technischen Aufwand. zur Sicherung der Einhaltung dieser Richtlinien eingesetzt werden. Das bedeutet, dass ihr Einsatz auf Anwendungen in Industrieanlagen beschränkt ist, die durch spezielle Maßnahmen hinsichtlich der elektromagnetischen Störstrahlung nach außen abgeschirmt sind. Für den mobilen Einsatz in öffentlichen Bereichen, beispielsweise für medizinische, zahnmedizinische oder kosmetische Zwecke, ist eine Nutzung dieser Vorrichtung nur möglich, wenn sie den EMV-Anforderungen entspricht. Aufgabe der Erfindung ist es, ein Plasmawerkzeug auf der Grundlage eines kalten, HF-angeregten Plasmastrahls zu realisieren, das diesen EMV-Anforderungen genügt und somit für den mobilen Einsatz in Bereichen der Medizin, Zahnmedizin und Kosmetik geeignet ist.The Connection of plasma nozzle and HF generator by a longer one Cable causes the values of the operation of a Device according to the prior art occurring electromagnetic Stray radiation usually through the European Guidelines for electromagnetic compatibility (EMC) exceed fixed limit. Devices of this type can not do without a bigger technical Effort. to ensure compliance with these guidelines. That means their use on industrial equipment applications is limited by special measures in terms of electromagnetic interference after are shielded outside. For mobile use in public areas, for example for medical, dental or cosmetic purposes, is one Use of this device only possible if it meets the EMC requirements equivalent. The object of the invention is to provide a plasma tool to realize the basis of a cold, RF-excited plasma jet, that meets these EMC requirements and thus for the mobile use in areas of medicine, dentistry and cosmetics suitable is.
Aufgabe der ErfindungObject of the invention
Die Aufgabe der Erfindung bestand darin, die Nachteile der im Stand der Technik genannten Lösungen zu beseitigen.The object of the invention was the Disadvantages of the solutions mentioned in the prior art.
Lösung der AufgabeSolution of the task
Der Erfindung liegt die Idee zugrunde, alle für den Betrieb des Plasmawerkzeuges erforderlichen Baugruppen, einschließlich HF-Generator, derart zu miniaturisieren, dass sie in einem miniaturisierten Handgerät integriert werden können und damit ein Gerät zu schaffen, das für den mobilen Einsatz in den Bereichen Medizin, Zahnmedizin und Kosmetik geeignet ist. Die erforderliche Gleichspannungsversorgung kann dabei entweder von einem externen Gerät oder intern erfolgen.Of the Invention is based on the idea, all for the operation of the plasma tool, including HF generator to miniaturize such that it is in a miniaturized handheld device can be integrated and thus a device too create that for mobile use in the fields Medicine, dentistry and cosmetics is suitable. The required DC voltage supply can either from an external Device or internally.
Die Aufgabe wurde gemäß den Merkmalen der Patentansprüche gelöst.The Task has been in accordance with the features of the claims solved.
Die Hauptursache für eine erhöhte elektromagnetische Störabstrahlung ist die lange Kabelverbindung zwischen der Plasmadüse und einem externen HF-Generator. Der Vorteil der Erfindung besteht vor allem darin, dass durch die Integration von Plasmadüse, Hochspannungsspule und HF-Generator in einem handlichen Plasmawerkzeug diese Kabelverbindung entfällt und damit das Problem der elektromagnetischen Verträglichkeit gelöst wird, so dass die technischen Voraussetzungen für eine Zulassung für den mobilen Einsatz, beispielsweise für medizinische, zahnmedizinische und kosmetische Zwecke, erfüllt ist. Als ein weiterer Vorteil ergibt sich aus der Miniaturisierung eine bessere Handhabbarkeit des Plasmawerkzeuges, das damit vor allem für punktgenaue, lokale Mikroplasmabehandlungen geeignet ist. Darüber hinaus wird durch die Erfindung eine weitgehende Reduzierung der Verlustleistung erreicht. Das hat zur Folge, dass die Erwärmung des Plasmawerkzeuges auf ein Minimum reduziert wird und die im Plasma umgesetzte Leistung, und damit die Länge des Plasmastrahls, allein durch Regelung der dem integrierten HF-Generator extern zugeführten Gleichspannung deutlich variiert werden kann.The Main cause of increased electromagnetic Noise emission is the long cable connection between the plasma nozzle and an external RF generator. The advantage The invention consists primarily in that through the integration of plasma nozzle, high voltage coil and RF generator in one handy plasma tool this cable connection is eliminated and thus the problem of electromagnetic compatibility is resolved, so that the technical conditions for an authorization for mobile use, for example for medical, dental and cosmetic purposes is. As a further advantage results from the miniaturization a better handling of the plasma tool that so before especially suitable for pinpoint local microplasma treatments is. In addition, by the invention is a substantial Reduction of power loss achieved. This has the consequence that the heating of the plasma tool is reduced to a minimum and the power converted in the plasma, and thus the length of the Plasma beam, solely by regulation of the integrated RF generator externally supplied DC voltage can be varied significantly can.
Die
Erzeugung der für eine Zündung des Plasmas notwendigen
Hochfrequenzspannung erfolgt in den, in der Patentschrift des Anmelders ”
Zur Vermeidung dieses Effektes wird in dem erfindungsgemäßen Plasmawerkzeug eine Spule mit einem für die Hochfrequenz geeigneten, geschlossenen Ferritkern verwendet, der ein Heraustreten des von der Spule erzeugten Magnetfeldes verhindert.to Avoidance of this effect is in the inventive Plasma tool a coil with one for high frequency suitable closed ferrite core used, a stepping out prevents the magnetic field generated by the coil.
Gegenstand der Patentanmeldung ist eine Vorrichtung zur Erzeugung eines kalten, HF-angeregten Plasmas unter Atmosphärendruckbedingungen, umfassend einen Hohlkörper für die Zuführung eines Prozessgases, einen Reihenresonanzkreis zur Erzeugung der benötigten Hochspannung und einen HF-Generator, dadurch gekennzeichnet, dass durch die Miniaturisierung und Integration der dafür erforderlichen elektronischen Baugruppen (HF-Generator mit Leistungstreiber, Leistungsschalter, HF-Resonanzspule und HF-Filter) und einer, gegebenenfalls auch als Wechseldüse mit verschiedenen Elektrodenanordnungen gestalteten, Plasmadüse in einem handlichen, metallischen Gehäuse die Einhaltung der Richtlinien der elektromagnetischen Verträglichkeit (EMV) gewährleistet werden kann sowie ein mobiler Einsatz des Gerätes ermöglicht wird.object The patent application is a device for producing a cold, HF-excited plasma under atmospheric pressure conditions, comprising a hollow body for the supply of a Process gas, a series resonant circuit for generating the required High voltage and an RF generator, characterized in that through the miniaturization and integration of the necessary electronic components (HF generator with power driver, circuit breaker, RF resonant coil and RF filter) and one, optionally also as Alternating nozzle designed with different electrode arrangements, Plasma nozzle in a handy, metallic housing compliance with the guidelines of electromagnetic compatibility (EMC) can be guaranteed as well as a mobile use of the device is enabled.
Die
Erfindung soll nachfolgend anhand der
Ausführungsbeispiele:EXAMPLES
Mit
den nachfolgend in
BezugszeichenlisteLIST OF REFERENCE NUMBERS
- 11
- Plasmaplasma
- 22
- Elektrode (geerdetes Gehäuse)electrode (grounded case)
- 33
- Hochspannungs-ElektrodeHigh-voltage electrode
- 44
- Isolierkörper/GasdüseInsulator / gas nozzle
- 55
- HF-ResonanzspuleRF resonance coil
- 66
- Prozessgasprocess gas
- 77
- Gehäuse (Metall)casing (Metal)
- 88th
- HF-Generator/LeiterplatteRF generator / PCB
- 99
- dc-Spannungsanschlussdc-voltage connection
- 1010
- Steckkontaktplug contact
Das
in
Im
Fall des Betriebes mit Molekülgasen (z. B. Luft bzw. N2) als Prozessgas werden Plasmadüsen verwendet,
bei denen die geerdete Elektrode nicht gegenüber dem Gasraum
isoliert ist. Beispiele für Ausführungsformen
dieser Art von Plasmadüsen sind in
ZITATE ENTHALTEN IN DER BESCHREIBUNGQUOTES INCLUDE IN THE DESCRIPTION
Diese Liste der vom Anmelder aufgeführten Dokumente wurde automatisiert erzeugt und ist ausschließlich zur besseren Information des Lesers aufgenommen. Die Liste ist nicht Bestandteil der deutschen Patent- bzw. Gebrauchsmusteranmeldung. Das DPMA übernimmt keinerlei Haftung für etwaige Fehler oder Auslassungen.This list The documents listed by the applicant have been automated generated and is solely for better information recorded by the reader. The list is not part of the German Patent or utility model application. The DPMA takes over no liability for any errors or omissions.
Zitierte PatentliteraturCited patent literature
- - DE 3733492 A1 [0003] - DE 3733492 A1 [0003]
- - DE 19532412 C2 [0003] - DE 19532412 C2 [0003]
- - US 6194036 B1 [0003] - US 6194036 B1 [0003]
- - US 6262523 B1 [0003] - US 6262523 B1 [0003]
- - US 4781175 A [0003] US 4781175 A [0003]
- - US 4060088 A [0003] - US 4060088 A [0003]
- - DE 19513338 A1 [0003] DE 19513338 A1 [0003]
- - DE 102006019664 A1 [0004, 0010] - DE 102006019664 A1 [0004, 0010]
Zitierte Nicht-PatentliteraturCited non-patent literature
- - Ohl A., Schröder K.: Plasma assisted surface modification of biointerfaces. In: Hippler R., Kersten H., Schmidt M., Schoenbach K. H. (ed.). Low Temperature Plasmas, Vol. 2. 803–820. Wiley-VCH, Weinheim 2008 [0003] - Ohl A., Schröder S .: Plasma assisted surface modification of biointerfaces. In: Hippler R., Kersten H., Schmidt M., Schoenbach KH (ed.). Low Temperature Plasma, Vol. 2. 803-820. Wiley-VCH, Weinheim 2008 [0003]
- - R. Brandenburg et al.: Contrib. Plasma Phys. 2007, 47, (1–2), 72–79 [0003] R. Brandenburg et al .: Contrib. Plasma Phys. 2007, 47, (1-2), 72-79 [0003]
- - I. E. Kieft et al.: IEEE Transactions on Plasma Science 2005, 33, (2), 771–775 [0003] IE Kieft et al .: IEEE Transactions on Plasma Science 2005, 33, (2), 771-775 [0003]
Claims (10)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102009028190A DE102009028190A1 (en) | 2009-08-03 | 2009-08-03 | Cold plasma beam producing device i.e. plasma hand-held device, for microplasma treatment of materials for e.g. cosmetic purpose, has high frequency-generator, coil, body and high voltage-electrode integrally arranged in metal housing |
ES10771669.8T ES2528734T3 (en) | 2009-08-03 | 2010-07-31 | Device for generating a cold plasma jet |
JP2012523304A JP5848705B2 (en) | 2009-08-03 | 2010-07-31 | Cold plasma jet generator |
US13/388,605 US8994271B2 (en) | 2009-08-03 | 2010-07-31 | Device for generating a non-thermal atmospheric pressure plasma |
PCT/EP2010/061166 WO2011015538A1 (en) | 2009-08-03 | 2010-07-31 | Device for generating a non-thermal atmospheric pressure plasma |
EP10771669.8A EP2462785B1 (en) | 2009-08-03 | 2010-07-31 | Device for generating a non-thermal atmospheric pressure plasma |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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DE102009028190A DE102009028190A1 (en) | 2009-08-03 | 2009-08-03 | Cold plasma beam producing device i.e. plasma hand-held device, for microplasma treatment of materials for e.g. cosmetic purpose, has high frequency-generator, coil, body and high voltage-electrode integrally arranged in metal housing |
Publications (1)
Publication Number | Publication Date |
---|---|
DE102009028190A1 true DE102009028190A1 (en) | 2011-02-10 |
Family
ID=43429942
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DE102009028190A Withdrawn DE102009028190A1 (en) | 2009-08-03 | 2009-08-03 | Cold plasma beam producing device i.e. plasma hand-held device, for microplasma treatment of materials for e.g. cosmetic purpose, has high frequency-generator, coil, body and high voltage-electrode integrally arranged in metal housing |
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Cited By (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102010030294A1 (en) | 2010-06-21 | 2011-12-22 | Leibniz-Institut für Plasmaforschung und Technologie e.V. | Cold high frequency-excited plasma beam producing device for e.g. medical purpose, has high frequency generator, resonance coil, insulating body and high-voltage electrode arranged in housing so that components are circulated by process gas |
DE102012003549A1 (en) | 2012-02-23 | 2013-08-29 | Dräger Medical GmbH | Device for mechanical ventilation of patient, has gas-carrying bypass unit, by which gas outlet and gas inlet are coupled with each other for bypassing gas delivery device, where plasma generator is coupled in bypassed gas delivery device |
DE102012003555A1 (en) | 2012-02-23 | 2013-08-29 | Dräger Medical GmbH | Incubator for neonatal care and method for deinfecting same |
DE102012003563A1 (en) | 2012-02-23 | 2013-08-29 | Dräger Medical GmbH | Device for disinfecting wound treatment |
DE102012003557A1 (en) | 2012-02-23 | 2013-08-29 | Dräger Safety AG & Co. KGaA | Drying cupboard for hygienic preparation of e.g. respiratory protective mask for patient, has fluid-flow machine for production of air flow, heating device i.e. heating wire, for heating air flow, and generator mixing plasma into air flow |
DE102012025082B3 (en) * | 2012-08-31 | 2014-01-16 | NorthCo Ventures GmbH & Co. KG | Device for treatment of biological tissue with low pressure plasma, has transformer for generating high-frequency electromagnetic field and probe electrically coupled with transformer |
DE102013107448A1 (en) | 2013-07-15 | 2015-01-15 | Reinhausen Plasma Gmbh | Arrangement for germ reduction by means of plasma |
DE102015101315B3 (en) * | 2015-01-29 | 2016-04-21 | Inp Greifswald E.V. | Plasma treatment apparatus and method for plasma treatment |
DE102015001624A1 (en) * | 2015-02-09 | 2016-08-11 | Kuka Roboter Gmbh | robot system |
DE102015112200A1 (en) * | 2015-07-27 | 2017-02-02 | Hochschule Für Angewandte Wissenschaft Und Kunst Hildesheim/Holzminden/Göttingen | Electrode assembly and plasma treatment device for a surface treatment of a body |
DE102016010619A1 (en) | 2016-09-05 | 2018-03-08 | bdtronic GmbH | Apparatus and method for generating an atmospheric plasma |
WO2019238863A1 (en) * | 2018-06-15 | 2019-12-19 | Terraplasma Gmbh | Plasma device for treating body surfaces |
CN115637401A (en) * | 2022-09-26 | 2023-01-24 | 北京金轮坤天特种机械有限公司 | Water-electricity switching device for plasma spraying and monitoring method thereof |
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