EP3283864A1 - Dispositif de guidage linéaire pour un axe d'avance d'une machine-outil - Google Patents

Dispositif de guidage linéaire pour un axe d'avance d'une machine-outil

Info

Publication number
EP3283864A1
EP3283864A1 EP16703263.0A EP16703263A EP3283864A1 EP 3283864 A1 EP3283864 A1 EP 3283864A1 EP 16703263 A EP16703263 A EP 16703263A EP 3283864 A1 EP3283864 A1 EP 3283864A1
Authority
EP
European Patent Office
Prior art keywords
microsensor
linear guide
guide device
sensor
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP16703263.0A
Other languages
German (de)
English (en)
Inventor
Gerrit DUMSTORFF
Walter Lang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP3283864A1 publication Critical patent/EP3283864A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23QDETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q17/00Arrangements for observing, indicating or measuring on machine tools
    • B23Q17/09Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool
    • B23Q17/0952Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining
    • B23Q17/0966Arrangements for observing, indicating or measuring on machine tools for indicating or measuring cutting pressure or for determining cutting-tool condition, e.g. cutting ability, load on tool during machining by measuring a force on parts of the machine other than a motor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/005Guide rails or tracks for a linear bearing, i.e. adapted for movement of a carriage or bearing body there along
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L5/00Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
    • G01L5/0009Force sensors associated with a bearing
    • G01L5/0019Force sensors associated with a bearing by using strain gages, piezoelectric, piezo-resistive or other ohmic-resistance based sensors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01MTESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M13/00Testing of machine parts
    • G01M13/04Bearings
    • G01M13/045Acoustic or vibration analysis
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2233/00Monitoring condition, e.g. temperature, load, vibration
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00Apparatus used in shaping articles
    • F16C2322/39General build up of machine tools, e.g. spindles, slides, actuators
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00Bearings for parts moving only linearly
    • F16C29/04Ball or roller bearings
    • F16C29/06Ball or roller bearings in which the rolling bodies circulate partly without carrying load
    • F16C29/0633Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides
    • F16C29/0635Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides whereby the return paths are provided as bores in a main body of the U-shaped carriage, e.g. the main body of the U-shaped carriage is a single part with end caps provided at each end
    • F16C29/0638Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides whereby the return paths are provided as bores in a main body of the U-shaped carriage, e.g. the main body of the U-shaped carriage is a single part with end caps provided at each end with balls
    • F16C29/0642Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides whereby the return paths are provided as bores in a main body of the U-shaped carriage, e.g. the main body of the U-shaped carriage is a single part with end caps provided at each end with balls with four rows of balls
    • F16C29/0645Ball or roller bearings in which the rolling bodies circulate partly without carrying load with a bearing body defining a U-shaped carriage, i.e. surrounding a guide rail or track on three sides whereby the return paths are provided as bores in a main body of the U-shaped carriage, e.g. the main body of the U-shaped carriage is a single part with end caps provided at each end with balls with four rows of balls with load directions in O-arrangement

Definitions

  • the present invention relates to a linear guide device for a feed axis, preferably for a machine tool, a method for
  • Thin-film application of a microsensor on a linear guide device a method for introducing a microsensor in a linear guide device and with a computer-executable method for detecting loads in a linear guide device with at least one microsensor.
  • the invention is particularly in the field of pressing plants, in plant construction and for
  • Condition Monitoring of Rolled Profile Rail Systems and Screw Drives ", RWTH Aachen University, 2011 is a comprehensive overview of the state of the art in condition monitoring research, which will be cited in the following to explain the underlying problem statement: Condition Monitoring is designed to determine the reliability by determining a downtime of Increase wear parts that
  • Feed axes are responsible for machine tools with almost 40% [percent] of machine tools. If you break the now Causes for the failure of the feed axes further down, it turns out that the ball screws (KGT) and the profile rail guides for almost 45% of
  • Feed axis failures are responsible.
  • condition monitoring or the
  • condition monitoring is already being applied in some ways today. However, condition monitoring is currently mainly at the control level
  • the systems for bearings are sensor-based methods.
  • the work is mainly in the field of structure-borne noise measurement or measurement by means of surface acoustic waves. Naturally, the movements are periodic processes. In the case of linear guideways and ball screws, however, due to the design, they are linear and therefore not immediately periodic
  • Vibration sensors such as those used in rotating bearings, are only of limited suitability for the monitoring of linear technology elements.
  • Structure-borne sound measurement also has the great disadvantage that only damage must be present so that there is a change in the signal.
  • Vibration measurement for example, structure-borne noise
  • Vibration measurement is performed and the data obtained in this way are interpreted or the temperature is measured.
  • Vibration measurement due to structural differences between test benches and various production facilities, there is a discrepancy between the respective measured values and measurement results, so that an individual adaptation of the measuring system must take place for each component and each machine. If the operating parameters change, such as re-lubrication after a smear film break, a recalibration of the
  • two types of plant monitoring can be distinguished: First, the monitoring using the data provided by the machine control and second, the monitoring using external sensors.
  • the monitoring based on the data provided by the machine control is done by means of an appropriate software (for example, ePS Network Services of Siemens AG).
  • the main focus is on monitoring the feed axes.
  • the sampling frequency in these systems is limited by the position control clock of 250 Hz [Hertz] to 1 kHz [kilohertz]. Because signals can only be analyzed up to half the frequency bandwidth due to the Shannon theorem, higher-frequency influences can only be achieved with external sensors
  • Data preprocessing are recorded. These sensors are often structure-borne noise sensors or temperature sensors, which are attached to selected points on the machine.
  • the microchip which converts the mechanical oscillation into an electrical signal, is encapsulated in a housing for protection against environmental influences and for better handling, and then fixed on the machine or a machine component.
  • this type of surveillance is a big one
  • the software module ePS Network Services of Siemens AG supports
  • Service specialists and the responsible maintenance personnel can access the operating information and fault information of the connected machines around the clock. These services are based on an internet-based platform. It supports the cross-company service processes and support processes and enables secure communication.
  • the software tool is used by many machine tool manufacturers because it can be used as an optional feature without additional sensory effort. It is designed to optimize maintenance by indicating early on necessary maintenance activities such as cleaning, inspection and repair. The machine operator can use automated test procedures to check the condition of the machine
  • Feed axes scan cyclically and thus receives information about the current state of the machine.
  • the machine diagnostics are based exclusively on the evaluation of control-internal signals. These include the motor current and the position values, but also all in the PLC
  • the universal axis test is used to detect the state of friction.
  • the purpose of the circularity test is to detect whether misalignments of the axes are parameterized loosely or not optimally
  • the big advantage of the software-based system is that it does not need external sensors.
  • various users such as internal and external services, can access the services over the Internet.
  • Feed axes is, as shown in DE 102007038890 A1. Another disadvantage is that the measurements take place in separate measuring runs and not during operation. Especially in highly productive machines, this means lower production capacity and thus increased costs.
  • MCI Machine Condition Indicator
  • the system uses a combination of control data and sensor data to provide information about the state of the machine and the machine Generate manufacturing process.
  • an additional external acceleration sensor is used on the spindle.
  • the evaluation unit continuously records the occurring vibrations within the machine.
  • the assessment of the machine condition is carried out by forming characteristic values during the test programs.
  • the failure of a component is detected by exceeding a previously manually set limit value in the characteristic values.
  • the invention relates in a first aspect to a linear guide device for a feed axis, preferably a machine tool, having at least the following components:
  • Linear guide means is arranged for linearly guiding a carriage or a spindle nut
  • At least one microsensor preferably at least one strain gauge and / or at least one resistance temperature sensor, for detecting an expansion and / or compression and / or temperature of the at least one sensor surface.
  • the linear guide device is characterized in particular by the fact that the at least one microsensor is permanently connected to the at least one sensor surface.
  • the invention relates to a method for thin-film application of a microsensor on a linear guide device, comprising at least the following steps:
  • step b Applying an electrically insulating and mechanically robust third layer, by means of which the second layer is electrically insulated from the outside and mechanically protected, wherein the third layer is preferably formed from aluminum oxide; and e. before, during or after step b. Applying lead terminals for connecting the second layer to a measuring device.
  • the invention relates to a method for introducing a microsensor in a linear guide device, wherein the microsensor is preferably a foil sensor, comprising at least the following steps:
  • step i Positioning lead terminals on a microsensor for a measuring device.
  • the invention relates to a computer-executable method for detecting loads in a linear guide device with at least one microsensor and a computer-readable device, by means of which the method is executable, the method is characterized in particular by the fact that a plurality of strain gauges are provided and a deformation of the sensor surface causes a change in resistance of at least one of the strain gauges in the measurement alignment, wherein the shape and modulus of the linear guidance device the alignment and position of the strain gauges are stored,
  • the applied linear force and / or the applied torque is calculated on the basis of the respective changes in resistance of the strain gauges together with the stored values of shape, modulus and position, wherein preferably the lifetime is extrapolated from this and / or measures for increasing the service life are determined ,
  • the invention relates to a linear guide device for a feed axis, preferably a machine tool, comprising at least the following components:
  • Linear guide means is arranged for linearly guiding a carriage or a spindle nut
  • At least one microsensor preferably at least one strain gauge and / or at least one resistance temperature sensor, for detecting an expansion and / or compression and / or temperature of the at least one sensor surface.
  • the linear guide device is characterized in particular by the fact that the at least one microsensor is permanently connected to the at least one sensor surface.
  • a linear guide device is set up for a feed axis, as a rule at least one of the translational axes x-axis, y-axis and z-axis.
  • Such a linear guide device is for the advance of a tool, for example a milling head, and for advancing a workbench, on which a workpiece to be machined is receivable and fixable, but also for example one
  • the linear guide device is a profiled rail for guiding and moving a carriage or a spindle for a translationally movable spindle nut.
  • a sensor surface of a linear guide device is a surface, which is usually not directly involved in the storage, for example of a carriage. So usually not a contact surface for a rolling element and not an (antagonistic) surface of a hydrostatic bag. Rather, the sensor surface, for example, a rear side of a contact surface or borders, preferably at a corner, to a Contact surface on. Preferably, the sensor surface is selected so that particularly large deformations occur, preferably at one (inner or outer) end of a projecting structure. In the case of a profiled rail, the preferred sensor surface is, for example, the surface opposite the joining surface, into which the most often the
  • Another possible sensor surface is a surface laterally to the joining surface, preferably between spanning bearing surfaces. Such surfaces are close to the loads and are located on an abutment forming region of the
  • a preferred sensor surface is the outermost peripheral surface on the screw drive, that is the outer surfaces of the flanges of the spiral. These are on the one hand well accessible from the outside and on the other hand no direct requirements for bearing elements. Nevertheless, they are subject to the direct influence of stress during operation. Particularly preferably, the sensor surface is only the thread-free surface between the screw drive and a drive of the spindle. Due to the ever-present information about the location of a driven spindle nut, the location and the cause of the load are nevertheless easily ascertainable.
  • Sensor surfaces are in a specific embodiment but also bearing surfaces, which, for example, by rolling elements, are directly loaded.
  • bearing surfaces which, for example, by rolling elements, are directly loaded.
  • mechanically particularly robust microsensors are to be used.
  • Strain gauges with a meander structure in classical construction are particularly preferred.
  • C-H amorphous carbon, also called diamond-like carbon, DLC
  • the (used) measuring range of these directly loaded microsensors is in one embodiment only outside the direct load. Such a microsensor is therefore only sufficient
  • the direct load of, for example, a rolling element can be detected. In the latter case, beyond the pure mechanical stability, the
  • a microsensor is a sensor that has microstructures in the range of usually less than 1 mm [millimeter] and its physical
  • a microsensor comprises at least one strain gauge, in which the electrical resistance due to geometric deformation of the microstructure, so the geometric effect in particular at
  • a meander-shaped structure is usually selected, which meanders transversely to a single measurement orientation, that is, the tracks of the strain gauge extending along the measurement orientation and have alternately top and bottom side connectors.
  • a capacitive strain gauge can be used, which are usually not flat, so as a layer sensor, constructed and this must be considered in the placement of strain gauges.
  • strain gauge but also temperature changes measurable, because the material has a temperature-dependent resistivity.
  • Such strain gauges can be applied directly by thin-layer application, for example by sputtering, vapor deposition, lamination, printing, electrodeposition and / or spraying or
  • Strain gauges are also known as film sensors as finished microsensors or subcomponents of microsensors, for example by means of gluing, with the
  • Linear guide device connectable.
  • Foil strain gauges are preferably glued and wired manually.
  • Advantageous measuring materials are alloys such as constantan (54% copper, 45%
  • a microsensor preferably comprises a plurality of individual, preferably interconnected on the micro level, sensor elements, such as a plurality of strain gauges with a single measurement orientation and / or at least one
  • the sensor elements are preferably interconnected to produce adjusted measurement signals and / or each serve to detect a single, clearly defined measured value, for example a strain gauge for detecting an expansion or compression in a spatial direction.
  • simple resistance temperature sensors which change their resistance to changes in temperature, preferably in a proportional manner, can be used additionally or alternatively. In particular, it is therefore possible to infer increased friction in the region of a temperature increase.
  • resistance temperature sensors are used in combination with strain gauges, particularly preferably at least one additional strain gage is used as the resistance temperature sensor, in order to eliminate or eliminate temperature-related cross-influences.
  • a Wheatstone is preferred Bridge circuit used to adjust for small changes in resistance
  • the at least one microsensor is arranged close to a sensor surface, so that the deformation or temperature change of the sensor surface is transmitted in the largest possible amount to the at least one microsensor.
  • the at least one microsensor is arranged directly on the sensor surface, for example adhesively applied as a film sensor or as a surface sensor directly by thin-film technology or printed. The at least one microsensor remains over the life of the machine tool
  • Linear guide device arranged, preferably for sensor surfaces of rails and sensor surfaces on the circumference of ball screws. In this way, both a deformation and a temperature is spatially resolved and time-resolved measurable. By continuously measuring these values, the load history of a component can be completely captured.
  • the big advantage of monitoring with sensory surfaces lies on the one hand in the possible, high spatial resolution and the fact that not the damage, but directly the forces occurring at the component level can be measured.
  • the at least one microsensor has at least one strain gauge with a single Measurement alignment in at least one of the following arrangements:
  • At least two strain gauges each with the measurement orientation transverse to and equidistant to a center line between two sides of the bearing;
  • the invention comprises at least one strain gauge, preferably numerous
  • Strain gauge which is applied or manufactured on (or in) the linear guide device in order to measure the loads acting thereon during operation and to determine the remaining service life of the monitored component from these measured values.
  • a guide rail of a linear guide device is screwed either from above or from below, for example with a machine tool.
  • the carriage or slide runs on balls (ball guide), cylindrical rolling elements (roller guide) or is hydrostatically supported via the guide rail and thus performs a linear movement.
  • the deformation is proportional to the occurring force and / or the moment occurring and can be detected via the at least one strain gauge.
  • the carriage rolls around the feed axis, so tilts laterally to the feed direction.
  • the carriage yaws around the vertical axis with respect to the aforementioned axes.
  • purely translational movements in the two stored directions are possible, ie transversely to the feed direction. Accordingly, tensile loads and pressure loads occur on the guide rail.
  • a first arrangement are two strain gauges to the right and left of a central axis of the guide rail with their measurement orientation transverse to the central axis.
  • the positioning differs depending on the model of leadership and can be found out through simulations or practical tests.
  • both strain gauges are compressed, under pressure on the guide rail (load in the tightening direction of the fastening screws of the Guide rail), both strain gauges are stretched.
  • a force is introduced from the side of the guide rail (load across a fastening screw)
  • a sensor element is compressed, the other stretched; the strain gauges behave as well when a moment acts around the longitudinal axis of the guide.
  • a temperature drift can be calculated on the software side in the signal processing and is often supplied by the manufacturer of the microsensor.
  • a temperature drift has, at least initially, a relatively slow increase, while an expansion or compression due to a load with a force occurs relatively suddenly.
  • the two strain gauges are arranged as in the first arrangement left and right of a central axis, but not in a line transverse to the feed axis, but are offset in the feed direction to each other. If the guide carriage is located above the measuring point formed by the strain gauges, you can still record all measured values as in the first arrangement. In addition, in dynamic use, that is, when the carriage moves, the speed and the direction of movement of the carriage can be detected via this arrangement. Furthermore, two further strain gauges are drawn in the third arrangement, the measurement orientation is rotated by 90 ° to the other two strain gauges.
  • the individual sensor elements are then read out via a corresponding electronics. Conveniently, they are interconnected in a Wheatstone bridge.
  • the measurement is preferably readable via a two-wire measurement, three-wire measurement, four-wire measurement or six-conductor measurement.
  • the sensor elements are individually readable, with or without temperature compensation, readable (quarter bridge) or in the case of two strain gauges (first and third arrangement) in a crossed half-bridge, also with or without temperature compensation, readable.
  • readable quarter bridge
  • first and third arrangement in the case of two strain gauges (first and third arrangement) in a crossed half-bridge, also with or without temperature compensation, readable.
  • crossed half-bridge information about laterally acting forces and moments about the longitudinal axis of the guide rail is then lost.
  • the sensitivity of this interconnection is doubled compared to the second arrangement.
  • the deformations determined by means of the applied microsensors can be used to calculate the information about the carriage described above.
  • Temperatures can also be measured with the meander-shaped structure. Alternatively or additionally, thermocouples can be used for the temperature measurement. The measurement of the force can also be carried out with a piezoelectric element. At a
  • Piezoelement is usually a ceramic material used, which performs a deformation due to its special crystal structure under load, which leads to a charge shift in the crystal. This charge shift causes a proportional voltage change. This can be used as a measurement signal.
  • the at least one microsensor is fastened by means of at least one of the following manufacturing methods:
  • Linear guide device wherein the recess with the introduced microsensor is materially closed, preferably by means of partial embedding or pouring and / or by means of soldering, wherein preferably the at least one microsensor
  • Foil sensor is inserted and rolled in the recess
  • microsensors have been developed that can be used in various materials such as elastomers, epoxy resin, Carbon fiber composites, steel and aluminum can be embedded.
  • the materials required for the function of the sensor are essentially adapted to the mechanical and thermal properties of the material into which it is to be integrated.
  • the microsystem technology offers the technological advantage of using as little material as possible to manufacture a microsensor and thus introducing as little foreign material as possible into the linear guide.
  • the temperature load of the linear unit during embedding of the sensor depends on the embedding process: When using an adhesive, temperatures from room temperature up to 180 ° C can occur. When soldering, it depends on the choice of the solder. There are low-melting solders, so-called
  • the senor can be welded in or can be applied by means of injection (for example flame spraying).
  • the microsensor is mounted on a carrier substrate of a metal, preferably a metal at least similar to the solder or a steel which is at least similar to the steel of the guide rail.
  • the deformations determined by means of the material-integrated microsensors can be used to calculate the information about the carriage described above.
  • the embedding of the microsensor can be done during steel casting, but also after production by soldering, gluing or partial pouring.
  • the essential parameters are temperature and force.
  • a force acts on the area of the guide rail, in which the carriage, or carriage, is located.
  • Guide rollers and / or hydrostatic bearing pockets transfer the force from the carriage to the guide rail.
  • the meander-shaped structure of metal preferably has a layer thickness of less than 1 ⁇ [microns] and is very easy to produce by known microtechnical processes. Insulations can also be applied using microengineering techniques. This structure can be in one
  • Sensor structure which is measurable on the basis of the geometric (metal), or the piezo-resistive (semiconductor), effect in the change of the resistance.
  • a suitable position is preferred by means of a FEM [finite element method]
  • the microsensor is introduced into a depression which, for example, from the joint surface, the
  • Guide rail is open or to this side line connections are arranged to the microsensor.
  • the depression is preferably complete
  • the at least one microsensor is introduced directly during production, for example casting or continuous casting of a steel rail. Then, the microsensor is arranged in a notional recess, which coincides with the
  • Temperatures can also be measured with the meander-shaped structure. Alternatively or additionally, thermocouples can be used for the temperature measurement. The measurement of the force can also be carried out with a piezoelectric element. At a
  • Piezoelement is usually a ceramic material used, which performs a strain due to its special crystal structure under load, which leads to a Charge shift in the crystal leads. This charge shift causes a proportional voltage change. This can be used as a measurement signal.
  • At least one microsensor is applied to a surface, for example a guide rail or a threaded rod of a spindle drive of a linear guide device, namely a sensor surface.
  • a surface for example a guide rail or a threaded rod of a spindle drive of a linear guide device, namely a sensor surface.
  • Guide rail is bolted to the machine either from above or from below.
  • a carriage runs over the guide rail and thus leads to a linear
  • the deformation is proportional to the force and can be detected by strain gauges.
  • the strain gauges are glued either as finished sensor elements (film strain gauges) and manually wired or manufactured in thin-film technology directly on the guide rail or in the
  • a multiplicity of microsensors are over a length of the at least one sensor surface
  • Processing section preferably from a machine tool, is higher than in a pure transport section, preferably from a machine tool.
  • the number of measuring points in the longitudinal direction of the guide rail is variable.
  • Measuring points can be arranged equidistant to each other or in the region of greater loads in a higher density Presence, that can be arranged with a smaller compared to other lengths of the guide rail with a smaller distance from each other.
  • a machine tool it is for example possible to provide a higher density in a processing section and on a
  • Transport section between processing section and tool change to provide a lower density. Also preferred are the arrangements in the sections
  • Processing section is a section of a linear guide device, in which
  • Machining forces can occur, for example when milling, both on the
  • a feed axis is proposed with two parallel linear guide means as guide rails according to the above description, which are adapted for guiding a carriage.
  • the carriage is mounted by means of balls, rollers or other rolling elements, or stored hydrostatically.
  • This feed axis is the load of a
  • Feed movement of the carriage on the linear guide devices detectable.
  • the microsensors preferably externally interconnected, and it is used on a stored movement model of the feed axis or the carriage. This overloads are detected and it can be targeted
  • Remedial action such as reorienting a warehouse.
  • the feed axis is for feed movements of a carriage for a workpiece or for a machining tool, or for moving a
  • Tool changer each set along a translational spatial axis. In this case, incorrect loads as well as a malfunction of the machine tool can be detected.
  • the sensor data are read out in a, preferably external, measuring electronics and with the help of stored movement models of the
  • Machine tool automated and, preferably just-in-time interpreted.
  • the strain gauge is preferably mounted on the surface of the screw between the drive, ie motor or gear, and thread of the screw drive.
  • the drive ie motor or gear
  • step b Applying lead terminals for connecting the second layer to a measuring device.
  • the linear guide device forms the base substrate and the microsensor is not first manufactured separately and then has to be joined.
  • a first layer namely an electrical insulation layer
  • the second layer namely the sensor layer
  • the sensor layer is deposited thereon.
  • Advantageous are typical strain gauge alloys as stated above, namely constantan, NiCr or FW, but also layers of a semiconductor material.
  • the sensor layer is patterned. This can be done by means of etching, laser or electrochemical removal.
  • the supply lines or the line connections are preferably also produced in this step. They can either consist of the same material as the sensor layer or of another, electrically conductive material.
  • a third layer which is electrically insulating, is applied to protect the sensor layer. It is advantageous to resort to a wear protection layer such as alumina.
  • Thin layer application of a microsensor is performed before step a. in a step a1. a recess of at least the depth and at least the surface of the microsensor is introduced into the sensor surface to be detected.
  • the at least one micro-sensor is very well protected against mechanical abrasion by the side of the material of
  • Linear guide device is protected.
  • a linear guide device is to be handled normally during transport and assembly.
  • At least one recessed structure is introduced into the linear guide device in a sensor surface for arranging at least one microsensor.
  • the first layer is applied to this structure, then the second layer.
  • the portions of the second layer forming the trace, and possibly the leads for the lead terminals, are below the desired surface of the respective sensor face in the recessed structure.
  • a milling process or grinding process the parts of the second layer protruding from the recessed structures are removed.
  • the milling process and / or the grinding process are not additional steps, but are used to manufacture the linear guide device.
  • Integrate linear guide device Integrate linear guide device. Finally, the third layer is applied. According to a further aspect of the invention, a method for introducing a microsensor in a linear guide device is proposed, wherein the
  • Microsensor is preferably a film sensor, which has at least the following steps:
  • step i Positioning lead terminals on the microsensor for a measuring device.
  • microsensors have been developed that can be embedded in various materials such as elastomers, epoxy, carbon fiber composites, steel and aluminum. For this purpose, reference is made to the above description. The technological prerequisites for the production of such structures require cleanroom technology. With the help of such integrated microsensors, it is possible to get data out of a component to determine the state of the component. For example, microsensors are integrated into a guide rail to measure the thermal and mechanical stresses in the guide rail. This also conclusions can be drawn on the slide. Conclusions are for example the position,
  • Linear guide rail for example, the spring characteristics
  • the embedding of the microsensor can be done both during the steel casting, but also in the
  • a suitable position is preferably as described above by means of a FEM
  • Strain gauges are usually glued flat on the component to be examined.
  • a strain gauge is mounted in a recess, for example a bore.
  • the microsensor is introduced and fixed by means of casting of metal, plastic, preferably an epoxy, and mechanically connected to the linear guide device.
  • the film sensor preferably to the Insert shaft into the recess, rolled up. If the micro-sensor is rolled, this lies over a large area on the wall of the, preferably bore-shaped, depression.
  • the distance to the solid material of the linear guide device is low and increases the sensitivity to an integration of a disk-shaped element with a matrix material.
  • the senor is mounted on a steel substrate and is inserted into a recess.
  • a subsequent cohesive, preferably welded or cast connection a very good transfer of the deformation is achieved on the strain gauge and at the same time the weakening of the depression again (almost) completely canceled.
  • This step is preferably performed before a heat treatment of a guide rail.
  • such a strain gauge is also in one
  • Ball screw can be accommodated.
  • the microsensor is introduced into a recess which is open from the joining surface of the guide rail or to this side are arranged line connections to the microsensor.
  • the depression is preferably completely closed.
  • the at least one microsensor is introduced directly during production, for example casting or continuous casting of a steel rail. Then, the micro-sensor (in the final product) is arranged in a notional recess which coincides with the molding dimensions of the micro-sensor along with portions of the lead terminals extending out of the guide rail.
  • Temperatures can also be measured with the meander-shaped structure. Alternatively or additionally, thermocouples can be used for the temperature measurement. The measurement of the force can also be carried out with a piezoelectric element. At a
  • Piezoelement is usually a ceramic material used, which performs a deformation due to its special crystal structure under load, which leads to a charge shift in the crystal. This charge shift causes a proportional voltage change. This can be used as a measurement signal.
  • the linear guide device is before step i. already to at least one recess for at least one microsensor, preferably completely, completed, and the microsensor is in step i. positionable by means of the depression, and in step ii. the recess is closed by partial casting and / or soldering and fixed the microsensor.
  • This method allows the completion of at least one microsensor after the production of a linear guide device, without any disadvantages for the
  • a mechanical connection quality is achieved, which corresponds to a one-piece production, or at least comes very close, because the alloy for the partial casting with the material of the linear guide device is identical or at least mechanically similar, or significantly better mechanical power lines are achieved in a soldering, than this is the case with a gluing.
  • the mechanical material properties of a solder in particular during brazing, welding or injection, are often very similar to the mechanical and thermal material properties of the material of the linear guide device in the region of an operating temperature of a machine tool.
  • the linear guiding device is supplied to at least one of the following treatment steps only after step ii., Preferably after step Mi.
  • a heat treated guide rail must often not be heated above 120 ° C [Celsius], because otherwise the (martensitic) crystal structure of the guide rail will be changed and thus the mechanical properties will be worsened. In particular, the hardening properties (freezing of the martensitic crystal structure) are lost and the guide rail becomes soft and the surface holds
  • Manufacturing process of a conventional linear guide device is first produced by a forming process, the basic shape (blank), for example by forging and / or rolling. Subsequently, the functional surfaces are milled and / or ground. Preferably, the at least one microsensor is applied after the forming, preferably after milling and / or grinding. Finally, the linear guide device is fed to a corresponding heat treatment.
  • a computer-executable method for detecting stresses in a linear guide device having at least one microsensor as described above and a computer-readable device comprising this computer-executable method.
  • This computer-executable method is characterized in particular by the fact that a plurality of strain gauges are provided and a deformation of the
  • Sensor surface in the measurement alignment causes a change in resistance of at least one of the strain gauges, the shape and modulus of the linear guide device, the orientation and location of the strain gauges are stored,
  • the applied linear force and / or the applied torque is calculated on the basis of the respective changes in resistance of the strain gauges together with the stored values of shape, modulus and position, wherein preferably the lifetime extrapolated and / or determined measures to increase the life become.
  • the data of the linear guide device are preferably supplied by a manufacturer of the linear guide device and can be stored variable by hand or fixed and inaccessible. For example, based on a FEM simulation, the recorded values are calculated by the strain gauges.
  • the movement of the carriage on the linear guide device is detected, preferably together with similarly determined data of a further linear guide device of the same feed axis.
  • a mechanical movement model of the carriage is stored.
  • Damage models are generated automatically and the machines at user A automatically learn from the machines at user B.
  • the application can also be used via a company-internal intranet so that in-house know-how is not passed on to third parties.
  • Fig.2 a guide rail in cross section
  • Fig.3 a spindle drive with spindle nut
  • 4 a machine tool
  • Fig. 5 a microsensor on a sensor surface in section.
  • a linear guide device 1 is shown, here a rail for a ball bearing carriage (not shown).
  • the upper side of the profile rail between the (directly loadable) first bearing side 17 and the (here concealed, directly loadable) second bearing side 18 are here
  • micro-sensors 7 (7a, 7b, 7c) are shown with some of a plurality of strain gauges, which with partially different
  • Measuring alignments 15 are arranged.
  • the linear guide device 1 is here several times from the top along the center line 16 screwed.
  • the centerline 16 defines the x-axis 43 to which the z-axis 45 is conventionally defined as being installed upward as shown in the figure. From the usual standard, the orientation of the y-axis 44 results as shown. Because of the better representability, an x force 33 (which will have no influence because it is the only free direction) and an x torque 36 with a common double arrow are shown next to the linear guide device 1. Similarly, a y-force 34 and a y-torque 37, and a z-force 35 and a z-torque 38 is shown.
  • two strain gauges 9 and 10 are arranged to the right and left of the center line 16 with their measurement orientation 15 transverse to the center line 16.
  • tensile load z-force 35 in the arrow direction
  • pressure load z Force 35 against the arrow direction
  • both strain gauges 9 and 10 are stretched.
  • a force is introduced from the side (y-force 34)
  • a strain gauge at y-force 34 in the direction of arrow strain gauge 9
  • the other stretched is stretched.
  • the same measurement occurs at a z-torque 38 and an x-torque 36.
  • strain gage 8 oriented transversely to the center line with its measuring orientation 15 is used. This can only be between tensile load and compressive load (compression or elongation)
  • the two measuring strain gauges 9 and 10 are not in a line but are arranged offset from one another along the center line 16. In the case of the third microsensor 7c, nevertheless, all measured values can be recorded as in the case of the first microsensor 7a. In addition, in dynamic use, that is, when the carriage moves, in addition to this arrangement, the speed and the direction of movement of the Guide carriage detectable. Furthermore, in the case of the third microsensor 7c, two further strain gauges 11 and 12 are drawn, whose measuring orientation 15 is rotated by 90 ° to the measuring orientation 15 of the strain gauges 9 and 10.
  • strain gauges 11 and 12 do not measure the deformation of the linear guide device 1, because in this direction, the linear guide device 1 is very stiff. But hereby, a temperature compensation is possible because they are subject to the same thermal influences as the strain gauges 9 and 10 and serve as resistance temperature sensors 13 and 14.
  • the microsensors 7 can be read out via corresponding electronics.
  • the measurement can be carried out via a two-wire measurement, three-wire measurement, four-wire measurement or six-wire measurement.
  • microsensors 7 can be read out either individually, with or without temperature compensation (quarter bridge) or in the case of two strain gauges
  • a linear guide device 1 here a profile rail with a
  • the microsensors 7 are not disposed on the surface. Rather, here the strain gauges 9 and 10 are each arranged in a recess 19 and 20, which are here, for example, first drilled and then filled after the positioning of the strain gauges 9 and 10 by partial casting. Thus, the microsensors 7 in the
  • Linear guide device 1 embedded.
  • the measured values obtained relate approximately to the lateral sensor surfaces 4 on the bearing sides 17
  • the measurement orientation 15 is in this case in particular for the z-force 35 along the z-axis 45 (same tensile load or compressive load on both
  • Strain gauges 9 and 10 and for an x-torque 36 about the x-axis 43 (respectively opposite tensile load and compressive load on the strain gauges 9 and 10), as well as for a lateral force (y-force 34) along the y-axis 44 (respectively opposite tensile load and compressive load on the strain gauges 9 and 10).
  • the measuring signals are shown purely schematically here by means of the first and second Line terminals 27 and 28 forwarded to a measuring device 29, and there connected, for example by means of a Wheatstone bridge to a measured value.
  • a linear guide device 1 is shown as a ball screw 51, on which an axially movable spindle nut 6 is arranged.
  • the spindle nut 6 is movable in the region of the threaded portion 46.
  • the ball screw 51 is rotatable by means of a drive 48.
  • the ball screw 51 also has a
  • a micro-sensor 7 is arranged, which is preferably designed as shown here with two measuring directions 15 which are mutually orthogonal and arranged inclined by 45 ° to a vertical cross-sectional plane. This can be detected in the ball screw 51 occurring torque loads.
  • FIG. 4 shows by way of example a simplified machine tool 3, which has a first feed axis 2 for a workpiece 58 and a second feed axis 53 for a tool 57.
  • a first ball screw 51 By means of a first ball screw 51, a first carriage 5 on a first (paired) profile rails 49 along the first feed axis 2 can be moved.
  • a first spindle nut 6 with the guided first carriage 5 is firmly connected.
  • the first drive 48 the first ball screw 51 is rotated in a controlled manner for this purpose.
  • Removability or clamping of the workpiece 58 is provided.
  • a section of a linear guide device 1 is shown as a profile rail 49 in section.
  • a microsensor 7 is arranged in a sensor surface 4, in this case the bearing side 18.
  • the depth 30 and the (total) surface 31 are adapted to the (desired) size of the microsensor 7.
  • Negative structure 59 when forming the blank of the linear guide device 1 or subsequently introduced. Then the first layer 24 is applied, so that the entire structure is superimposed, but at the same time the negative structure 59 is retained. Subsequently, the second layer 25 is applied, so that the negative structure 59, usually complete, is filled. In this case, regions of the first layer 24 and the regions of the second layer 25 not belonging to the conductor track 32 now extend over the first layer 24 Level of the sensor surface 4 addition. Subsequently, for example, in a grinding process, the excess parts of the first layer 24 and the second layer 25 are removed with, so that the conductor 32, for example meandering formed. Thus, the structuring is performed simultaneously with a processing step of the linear guide device 1. Finally, the third layer 26 is applied and the
  • Lead terminal 27 preferably by means of soldering or wire bonding, connected to the second layer 25, preferably by means of etching, ultrasonic processing or
  • the first layer 24 is configured as an electrical insulator and the third layer 26 as a mechanical protection and as an electrical insulator.
  • the second layer 25 is electrically conductive and has the desired
  • Linear guide device during operation of a machine tool directly measurable.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

L'invention concerne un dispositif de guidage linéaire (1) pour un axe d'avance (2), de préférence d'une machine-outil (3), comprenant au moins les composants suivants : - au moins une surface de détection (4) du dispositif de guidage linéaire (1) servant au guidage linéaire d'un chariot (5) ou d'un écrou de broche (6); - au moins un microcapteur (7), de préférence au moins une jauge d'allongement (8, 9, 10, 11, 12) et/ou au moins une sonde de température résistive (13, 14), destiné à détecter un allongement et/ou une compression et/ou une température de ladite surface de détection (4). Ledit microcapteur (7) est relié en permanence à ladite surface de détection (4). Grâce à l'invention, il devient possible pour la première fois de mesurer directement une charge d'un dispositif de guidage linéaire lors du fonctionnement d'une machine-outil.
EP16703263.0A 2015-01-19 2016-01-14 Dispositif de guidage linéaire pour un axe d'avance d'une machine-outil Withdrawn EP3283864A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015100655.3A DE102015100655A1 (de) 2015-01-19 2015-01-19 Linearführungseinrichtung für eine Vorschubachse einer Werkzeugmaschine
PCT/EP2016/050695 WO2016116354A1 (fr) 2015-01-19 2016-01-14 Dispositif de guidage linéaire pour un axe d'avance d'une machine-outil

Publications (1)

Publication Number Publication Date
EP3283864A1 true EP3283864A1 (fr) 2018-02-21

Family

ID=55310792

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16703263.0A Withdrawn EP3283864A1 (fr) 2015-01-19 2016-01-14 Dispositif de guidage linéaire pour un axe d'avance d'une machine-outil

Country Status (4)

Country Link
US (1) US20180264614A1 (fr)
EP (1) EP3283864A1 (fr)
DE (1) DE102015100655A1 (fr)
WO (1) WO2016116354A1 (fr)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102016012803B4 (de) * 2016-10-26 2019-05-16 Horst Baltschun Presse mit gesteuerter, stabiler Stößelführung
JP6952465B2 (ja) * 2016-12-28 2021-10-20 Thk株式会社 管理システム、及び運動案内装置
NL2018393B1 (nl) * 2017-02-20 2018-09-17 Wila Bv Inrichting voor het inklemmen van een gereedschap en werkwijze voor het vervaardigen van een dergelijke inrichting
CN106990756B (zh) * 2017-03-29 2019-03-05 大连理工大学 一种数控机床几何精度在线监测方法
US10914674B2 (en) * 2017-05-03 2021-02-09 Percev Llc Monitoring and control systems
CN107860672B (zh) * 2017-10-29 2019-11-15 北京工业大学 数控机床组合直线进给单元磨损规律试验装置
CN108000236B (zh) * 2018-01-08 2020-11-27 内蒙古科技大学 一种检测机床直线导轨副加速磨损退化规律的装置
US11054000B2 (en) 2018-07-30 2021-07-06 Pi Tech Innovations Llc Polycrystalline diamond power transmission surfaces
US11187040B2 (en) 2018-07-30 2021-11-30 XR Downhole, LLC Downhole drilling tool with a polycrystalline diamond bearing
US10465775B1 (en) 2018-07-30 2019-11-05 XR Downhole, LLC Cam follower with polycrystalline diamond engagement element
US11035407B2 (en) 2018-07-30 2021-06-15 XR Downhole, LLC Material treatments for diamond-on-diamond reactive material bearing engagements
US10738821B2 (en) 2018-07-30 2020-08-11 XR Downhole, LLC Polycrystalline diamond radial bearing
US11286985B2 (en) 2018-07-30 2022-03-29 Xr Downhole Llc Polycrystalline diamond bearings for rotating machinery with compliance
US11371556B2 (en) 2018-07-30 2022-06-28 Xr Reserve Llc Polycrystalline diamond linear bearings
US11014759B2 (en) 2018-07-30 2021-05-25 XR Downhole, LLC Roller ball assembly with superhard elements
US11603715B2 (en) 2018-08-02 2023-03-14 Xr Reserve Llc Sucker rod couplings and tool joints with polycrystalline diamond elements
CA3107538A1 (fr) 2018-08-02 2020-02-06 XR Downhole, LLC Protection tubulaire en diamant polycristallin
JP7097510B2 (ja) * 2018-10-10 2022-07-07 キストラー ホールディング アクチエンゲゼルシャフト ツール及びツール力を測定するための方法
CN109443725B (zh) * 2018-11-30 2020-04-28 沈阳建筑大学 一种基于压电陶瓷的高精度电主轴加载机构
US10557504B1 (en) * 2019-01-22 2020-02-11 Hiwin Technologies Corp. Linear guideway capable of detecting abnormal circulation state
CN109773588B (zh) * 2019-03-01 2021-03-02 山东大学 一种机床数字孪生模型性能测试方法及装置
JP7278113B2 (ja) * 2019-03-13 2023-05-19 Thk株式会社 転がり案内装置のセンサ取付け構造及びそれに使用するセンサユニット
DE102019203756A1 (de) * 2019-03-20 2020-09-24 Robert Bosch Gmbh Verfahren zur Bestimmung einer auf ein Bewegungslager einwirkenden Kraft
CN114270060B (zh) * 2019-05-29 2024-05-03 Xr储备有限责任公司 用于金刚石对金刚石反应材料轴承接合的材料处理
US11614126B2 (en) 2020-05-29 2023-03-28 Pi Tech Innovations Llc Joints with diamond bearing surfaces
DE102020120113A1 (de) 2020-07-30 2021-07-22 Schaeffler Technologies AG & Co. KG Präzisionsbauteil und Verfahren zur Aufbringung eines Sensorelements auf ein Präzisionsbauteil
CN111958322B (zh) * 2020-08-19 2022-03-25 山东理工大学 用于切削加工的单轴恒力加工补偿装置
US12006973B2 (en) 2020-11-09 2024-06-11 Pi Tech Innovations Llc Diamond surface bearings for sliding engagement with metal surfaces
WO2022099184A1 (fr) 2020-11-09 2022-05-12 Gregory Prevost Paliers à surface diamantée continue pour un engagement coulissant avec des surfaces métalliques
CN113124815A (zh) * 2021-04-21 2021-07-16 上海海事大学 一种自发电旋转轴应变监测装置及系统
DE102021205838A1 (de) 2021-06-10 2022-12-15 Robert Bosch Gesellschaft mit beschränkter Haftung Verfahren und Vorrichtung zur Abschätzung der Lebensdauer eines tribologisch beanspruchten Bauteils und Computerprogrammprodukt
CN115127508B (zh) * 2022-08-31 2023-02-07 常州奥智高分子集团股份有限公司 一种扩散板表面平整度检测治具

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT394276B (de) * 1986-08-08 1992-02-25 Magyar Goerdueloecsapagy Mueve Rollenumlaufschuh mit einer einrichtung zur belastungsmessung
DE4218949A1 (de) * 1992-06-10 1993-12-16 Schaeffler Waelzlager Kg Kraftmeßlager
JP2001227537A (ja) * 2000-02-18 2001-08-24 Nsk Ltd 直動案内装置
DE10144269A1 (de) * 2001-09-08 2003-03-27 Bosch Gmbh Robert Sensorelement zur Erfassung einer physikalischen Messgröße zwischen tribologisch hoch beanspruchten Körpern
JP2003097552A (ja) * 2001-09-21 2003-04-03 Nsk Ltd 摩擦付加装置および直動案内装置
DE10307882A1 (de) * 2003-02-25 2004-09-02 Ina-Schaeffler Kg Linearwälzlager
DE50307020D1 (de) * 2003-07-26 2007-05-24 Schneeberger Holding Ag Messsystem
DE10355817A1 (de) * 2003-11-28 2005-07-21 Fag Kugelfischer Ag Wälzlager mit einem System zur Datenerfassung und zur Datenverarbeitung
DE102005020811A1 (de) * 2005-05-04 2006-11-09 Schaeffler Kg Linearwälzlager
JP4435104B2 (ja) * 2006-03-29 2010-03-17 日本トムソン株式会社 直動案内ユニットおよび直動案内ユニットの荷重判別方法
DE102007015800A1 (de) * 2007-03-30 2008-10-02 Rheinisch-Westfälische Technische Hochschule Aachen Führungswagen für Linearführungen
DE102007038890B4 (de) 2007-08-17 2016-09-15 Robert Bosch Gmbh Verfahren und Vorrichtung zur Bestimmung der Lebensdauer von im Arbeitsbetrieb befindlichen Bauteilen
DE102010007646B4 (de) * 2010-02-11 2021-11-04 Schaeffler Technologies AG & Co. KG Linearlageranordnung
DE102012001903A1 (de) * 2012-01-27 2013-08-01 Icm - Institut Chemnitzer Maschinen- Und Anlagenbau E.V. Lageranordnung für eine Werkzeugmaschinenspindel
WO2013159837A1 (fr) * 2012-04-24 2013-10-31 Aktiebolaget Skf Module permettant de déterminer une caractéristique de fonctionnement d'un roulement

Also Published As

Publication number Publication date
US20180264614A1 (en) 2018-09-20
WO2016116354A1 (fr) 2016-07-28
DE102015100655A1 (de) 2016-07-21

Similar Documents

Publication Publication Date Title
WO2016116354A1 (fr) Dispositif de guidage linéaire pour un axe d'avance d'une machine-outil
DE102012005614B4 (de) Sensorisches Verbindungselement und Herstellverfahren
DE102007001620B4 (de) Verfahren zum Betrieb einer Bearbeitungsmaschine sowie Werkzeughalterung
EP2013598B1 (fr) Dispositif de mesure de force pour mesurer la force dans le cas d'actionneurs monolithiques, procédé de mesure d'une force et utilisation du dispositif de mesure de force
EP2388565B1 (fr) Dispositif de mesure et robot
DE10017572A1 (de) Wälzlager mit fernabfragbaren Erfassungseinheiten
EP2292513B1 (fr) Actionneur doté d'un système de surveillance d'état intégré et procédé de fabrication d'un actionneur
DE19925460A1 (de) Gleit- und/oder Wälz-Paarungen mit Dünnschichtsensorik
EP1057586A2 (fr) Outil de formage, poinçonnage ou moulage par injection
EP1502700B1 (fr) Dispositif de mesure
DE19912848B4 (de) Walzenprofil-Meßverfahren
EP0625651B1 (fr) Méthode de contrÔle d'état de charge dynamique et/ou d'usure d'une transmission en opération et dispositif d'application
DE102004048649A1 (de) Verfahren zur Zustandsüberwachung und Lebensdauerprognose wenigstens eines Wälzlagers in einer wälzgelagerten Vorrichtung
WO2013110113A2 (fr) Transmission
WO2021148068A1 (fr) Procédé de contrôle d'un assemblage d'au moins trois jauges de déformation et engrenage à ondes de déformation
DE102017112399B4 (de) Getriebe mit einer an einem Wellenabschnitt angebrachten doppelten Vollbrücke zur Drehmomentbestimmung
DE3822873C1 (fr)
DE10313060A1 (de) Wälzlager mit integrierter Zustandsmessung
DE202009001099U1 (de) Einrichtung zur Messung und Kompensation thermischer Verformungen an einer Werkzeugmaschinenpinole
EP2312261A1 (fr) Dispositif de vérification de l'exactitude de machines-outils et dispositifs de mesure
EP2892791B1 (fr) Procédé de mesure de la tension d'une courroie
DE102019104791A1 (de) Verfahren zur Einstellung der Vorspannung einer zweireihigen Wälzlagerung
EP2607874A2 (fr) Dispositif de capteurs pour la surveillance d'un palier à roulement
EP2585802A1 (fr) Capteur de force piézo-résistif
EP4302059A1 (fr) Dispositif de mesure de déformations, de contraintes, de forces et/ou de couples dans une pluralité d'axes

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20170815

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAV Request for validation of the european patent (deleted)
DAX Request for extension of the european patent (deleted)
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20180803