EP3262672B1 - Dispositif avec un radiateur infrarouge monté d'un seul côté, pour diriger de'l infrarouge dans une chambre de traitement sous vide - Google Patents

Dispositif avec un radiateur infrarouge monté d'un seul côté, pour diriger de'l infrarouge dans une chambre de traitement sous vide Download PDF

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Publication number
EP3262672B1
EP3262672B1 EP15823162.1A EP15823162A EP3262672B1 EP 3262672 B1 EP3262672 B1 EP 3262672B1 EP 15823162 A EP15823162 A EP 15823162A EP 3262672 B1 EP3262672 B1 EP 3262672B1
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EP
European Patent Office
Prior art keywords
radiator
tube
conductor
cladding tube
accordance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Not-in-force
Application number
EP15823162.1A
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German (de)
English (en)
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EP3262672A1 (fr
Inventor
Siegfried Grob
Martin Klinecky
Thomas Piela
Sven Linow
Thomas Meyer
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Heraeus Noblelight GmbH
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Heraeus Noblelight GmbH
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Publication date
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Publication of EP3262672A1 publication Critical patent/EP3262672A1/fr
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Publication of EP3262672B1 publication Critical patent/EP3262672B1/fr
Not-in-force legal-status Critical Current
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K1/00—Details
    • H01K1/18—Mountings or supports for the incandescent body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K1/00—Details
    • H01K1/18—Mountings or supports for the incandescent body
    • H01K1/20—Mountings or supports for the incandescent body characterised by the material thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K1/00—Details
    • H01K1/40—Leading-in conductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01K—ELECTRIC INCANDESCENT LAMPS
    • H01K7/00—Lamps for purposes other than general lighting
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/0033—Heating devices using lamps
    • H05B3/0038—Heating devices using lamps for industrial applications
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B3/00—Ohmic-resistance heating
    • H05B3/40—Heating elements having the shape of rods or tubes
    • H05B3/42—Heating elements having the shape of rods or tubes non-flexible
    • H05B3/44—Heating elements having the shape of rods or tubes non-flexible heating conductor arranged within rods or tubes of insulating material

Definitions

  • the present invention relates to an irradiation device for coupling infrared radiation in a vacuum processing chamber, with a single-ended infrared radiator comprising a radiator shroud in the form of a round tube made of glass, of which a closed end protrudes into the vacuum processing chamber, and with a Vacuum feedthrough for holding and gas-tight implementation of the Strahlerhüllrohres through an opening of the vacuum processing chamber, wherein in the Strahlerhüllrohr formed as a Walkerfilament heating element and designed as a current return return conductor are arranged, wherein the heating element in the surrounded by the vacuum passage portion of the Strahlerhüllrohres has a connection element , which is led out of the Strahlerhüllrohr.
  • Lamps and infrared radiators with a heating conductor (also referred to below as heating filament) made of a conductive material with a high melting temperature are known.
  • heating filaments take the form of straight wires or sheets, or the shape of a meander, a ribbon, a helix or a loop. A voltage is applied between the ends of the heating filament so that a current can flow while generating heat.
  • An infrared radiator therefore has two electrical connection elements, one of which is connected to the Schufilament and the other to the current feedback. The connection elements are led out of the radiator tube by means of seals, also called current feedthroughs.
  • infrared radiators in vacuum or in vacuum processes with reactive atmospheres in which a considerable amount of heat is to be introduced into a substrate to be processed in a short time, presents a particular challenge to the components and materials used.
  • the radiator tube In high power infrared radiators in which the radiator tube is exposed to high thermal performance of the heating filament and which can be used in high temperature or chemically aggressive environments, the radiator tube typically consists of a high-silica glass, such as quartz glass, characterized by a very low thermal Expansion coefficient and very high temperature resistance distinguishes. Therefore, the problem arises for the heating filaments and their connections to find suitable, electrically good conductive materials, which also have a melting temperature of about 2000 ° C and a similar thermal expansion coefficient over the temperature range from room temperature to the processing temperature of quartz glass.
  • Gas-tight current feed-throughs comprise a so-called "pinch” in which a thin molybdenum foil as a conductive electrical contact and intermediate element between inner and outer terminal elements, usually in the form of pins, is melted into the crimped end of the quartz glass emitter tube.
  • a considerable radiant power is also transported in the axial direction, similar to an optical fiber, so that the thermal expansion of the heating conductor and the current return in relation to the thermal expansion of the radiator cladding may not be neglected constructively.
  • the infrared radiator mounted in the chamber wall of a vacuum process chamber, it should also be noted that it is the transition from rough vacuum to fine vacuum in the residual atmosphere and above a voltage of 80 volts with appropriate heat to flashovers between the electrical leads to each other or to the chamber wall can come.
  • the holder of the radiator in the process chamber wall is possible by attaching flanges on the radiator tube or on the process chamber wall, which form part of a vacuum feedthrough.
  • flanges must be movably mounted in the direction of the radiator axis against the process chamber wall in order not to convert small thermal expansions destructive tensile stress for the radiator tube: Since the thermal expansion of the quartz glass is about an order of magnitude lower than that of the metallic chamber wall, already small Variations in the temperature of the chamber wall or the cladding tube made of quartz glass lead to problems with regard to a pressure-resistant and thermally stable seal or current feedthrough. The installation of vacuum feedthroughs for spotlight tubes is therefore also associated with risks.
  • double-capped IR radiators with a radiator round tube or with a twin tube are known for use in a vacuum process chamber.
  • the radiators are held on both sides by vacuum feedthroughs in the chamber wall.
  • In the vacuum feedthrough is an O-ring, which fixes the spotlight in the sealing position.
  • the radiator In the area of the vacuum feedthrough, the radiator has an opaque tube section which reduces the heating power emanating from the IR radiator in the direction of the vacuum feedthrough and the outer bruises.
  • the production of such a precisely positioned, opaque pipe section is expensive. It is therefore preferable to postpone additional, opaque quartz glass tube sections to the cladding tube of the IR radiator.
  • a disadvantage of this arrangement is that an additional component in the form of the deferred pipe section is required.
  • the overall cross section of the IR radiator in the area of the seal is increased by the pushed-on pipe section, so that the opening in the vacuum process chamber wall must also be correspondingly large.
  • the opening in the vacuum process chamber wall must also be correspondingly large.
  • a single-ended IR emitter in a vacuum feedthrough of a process chamber is also in WO01 / 35699 A1 disclosed.
  • the IR radiator is arranged in a circular tube closed on one side of quartz glass, wherein the infrared radiation source is connectable to a not further disclosed energy source in the vacuum process chamber.
  • a cooling device is provided by means of air cooling within the radiator tube. The cooling acts on the entire radiator cladding tube and also reduces the heat at the radiator tube end that is open to the outside in the area of the vacuum feedthrough. The establishment of a corresponding cooling, however, is complicated, prone to failure and rather contradicts the requirement of the most effective heating power in relation to the process material in the vacuum process chamber.
  • the object of the invention is therefore to provide an irradiation device for coupling infrared radiation in vacuum process chambers, in which the disadvantages of the prior art are avoided and safe operation, in particular of long IR radiators, even at high heat output in a simple manner, is guaranteed without additional components or cooling.
  • the return conductor has a means for compensating for the thermal expansion in the part of the radiator cladding tube surrounded by the vacuum feedthrough.
  • a safe operation of the introduced into the vacuum process chamber, one-sided socketed IR emitter is ensured by a plurality of complementary features:
  • the heat transfer to the vacuum seal is reduced by guiding the connecting element of the heating conductor in this section of the lamp tube into a heat-insulating pipe section.
  • the connecting element is formed from a straight piece of wire, wherein a material for the connecting element is preferred, which has a lower thermal conductivity compared to the heating conductor.
  • the pipe section By the pushed onto the connecting element of the heating element pipe section, the temperature in the region of the vacuum feedthrough during operation of the IR emitter compared to the temperature of the set nominal power of the heating element can be reduced. At the same time the pipe section also prevents the risk that the connecting element of the heating element comes into contact with the return conductor.
  • the return conductor in the part of the radiator cladding tube surrounded by the vacuum feedthrough has a means for compensating for the thermal expansion, which prevents the return conductor from becoming twisted due to its thermal expansion, thereby coming into contact with the heating conductor or otherwise forming short circuits which are adjacent
  • the electrical interference also lead to locally particularly strong heat.
  • a centric guidance of the return conductor in a small space is made possible in this way.
  • the combination of the aforementioned features results in a total safe operation and a long life of the irradiation device with the infrared radiator according to the invention even at high power.
  • the measure for reducing the heat transfer to the vacuum feedthrough by using the pipe section around the connection element of the heating element is also to be observed. As a result, additional measures for the inventive irradiation device Cooling of the IR emitter at its ends is not required.
  • the infrared radiator according to the invention is also suitable to withstand vibrations during operation, as far as they do not exceed a deflection of 0.7 mm from the entire radiator in the range of 2 Hz to 10 Hz.
  • an acceleration of 20 m / s 2 can act harmlessly on the radiator.
  • the tube piece, through which the heating conductor is guided in the subsection of the radiator cladding tube surrounded by the vacuum feedthrough is formed as a quartz glass tube, and the connection element of the heating conductor is formed from a wire made of molybdenum or of a molybdenum compound.
  • Quartz glass is a particularly suitable material due to its heat-insulating effect. Furthermore, quartz glass has a very high temperature resistance, so that no deformation of this pipe section occurs even in the event of heat accumulation occurring in the area of the vacuum feedthrough. Basically, as an alternative to quartz glass and pipe sections made of ceramic high-temperature materials come into question. From a manufacturing point of view, however, a small variety of materials is preferred, so that quartz glass, which is also generally used for the radiator cladding tube, also represents the preferred material for the tube piece in question. Furthermore, the connecting element of the heat conductor consists of a wire made of molybdenum or of a molybdenum compound.
  • Molybdenum has lower thermal conductivity compared with tungsten, which is commonly used as a material for the heating filament, so that the use of molybdenum or a molybdenum alloy as a material for the terminal of the heating conductor contributes to a reduction in the temperature load in the area of the vacuum feedthrough.
  • the spring element of the return conductor in the part of the radiator cladding tube surrounded by the vacuum feedthrough is able to absorb significant changes in length of a few centimeters, which occur especially with long radiators and numerous switching operations during operation.
  • the spring element therefore contributes to the safe operation of the IR radiator.
  • the spring element is designed in the form of a wire winding, which is wound around the pipe section of the connecting element of the heating element.
  • the return conductor has no welds, but consists throughout as a wire made of molybdenum or a molybdenum alloy, which also serves as a connection element for the return conductor and is led out of the radiator cladding.
  • welding operations or other types of connections for connecting portions of the return conductor are avoided, which also reduces the risk of defects in the joints (welds).
  • the means for compensating the thermal expansion of the return conductor is formed as a sliding bearing made of carbon, which has at least two electrically conductive sliding bearing elements which are slidingly in contact, wherein one of the sliding bearing elements is designed as a sliding rod and the other of the sliding bearing elements as a sliding bushing ,
  • the sliding bearing forms an electrically conductive component, which allows a powerless compensation of the length expansion of the return conductor.
  • the length compensation takes place without spring action solely by a cohesive, conductive, sliding contact of the sliding elements with each other.
  • Carbon, especially graphite, is particularly suitable as a bearing material, since its abrasion acts self-lubricating. It also has good electrical conductivity.
  • a support element is guided in the closed end of the radiator cladding tube, which is connected to the heating conductor.
  • the support element is fixed on the one hand in the glass wall of the cladding tube, for example, by melting, and on the other hand so connected to the heating conductor, that this moves at a thermal change in length substantially only along its longitudinal axis and a slackening or sagging is counteracted.
  • the support element is formed as a rod of molybdenum or of a molybdenum compound, which is guided in the closed end of the radiator cladding tube in alignment with the Schufilament.
  • the rod made of molybdenum or a molybdenum compound is positively or materially connected to the heating filament and the leadership in the closed end of the radiator cladding tube by means of a pinch of the radiator cladding tube.
  • the material molybdenum (or a molybdenum alloy) has proven itself because of its temperature resistance for use in IR emitters.
  • the rod is positioned so that it runs as a support element in alignment with the Schufilament and is thereby fixed in the glass wall of the cladding tube by means of a pinch.
  • the connection to the filament is positive or cohesive, for example, a positive connection is made by a round rod is inserted into the turns of a coiled Walkerfilaments and is covered by the windings.
  • a cohesive connection is possible by welding the support element to the Schufilament.
  • crimping machines which, for example, have two burners rotating about the radiator cladding tube to be squeezed and two crimping jaws located opposite one another. Once the radiator shroud is softened, the torch rotation stops, so that the crimp jaws are moved past the burners and against the tube to compress it to enclose the support element (rods) inserted therein in the pinch.
  • the infrared radiator according to the invention proves to be particularly advantageous when the return conductor is guided in the section parallel to the heating filament in a quartz glass tube.
  • the return conductor is insulated from the heating conductor so that no electrical arcing can occur.
  • the radiation emanating from the heating filament is only slightly shadowed by the quartz glass tube surrounding the return conductor, so that practically no substantial loss of the radiant power results from this measure, but an improvement with regard to the safe operation of the IR radiator.
  • the heating filament is supported by at least one spacer with respect to the inner wall of the radiator cladding tube on the one hand and with respect to the return conductor guided in the quartz glass tube on the other hand.
  • the spacer may be in the form of a tantalum disc formed by recesses or slots to hold the heating filament and the quartz glass tube leading the return conduit at a safe distance from each other and from the inner wall of the radiator sheath tube.
  • tantalum and niobium as a material for the spacer in question.
  • Advantageous in this context is the relatively low thermal conductivity and a high specific electrical resistance of tantalum and niobium compared to tungsten or molybdenum, as materials that come for the heating element or the return conductor in question.
  • the spacer can be kept in a particular position along the longitudinal axis of the radiator, in particular in the vertical use of the IR radiator by small elevations of glass are attached to the inner wall of the radiator cladding tube.
  • spacers of Advantage to ensure an orderly leadership in particular of the heat conductor over the length of the radiator, so that the risk of short circuits is excluded by twisting or sagging of the heating element.
  • FIG. 1 schematically shows an infrared radiator 1 with an axisymmetric radiator sheath tube 2 made of quartz glass with a round cross section (outer diameter 19 mm).
  • the infrared radiator 1 is held by means of a vacuum feedthrough 3, which comprises a sealing ring 4 and a kind of stuffing box 5, in the opening of a vacuum processing chamber and protrudes with its closed end into the vacuum processing chamber.
  • the IR emitter 1 is designed for an operating temperature above 800 ° C.
  • a helical heating element 6 (heating filament) made of tungsten with a (heated) length of 140 cm and a return conductor 7 (current return) is arranged.
  • the return conductor 7 is guided parallel to the heated region of the heating conductor 6 in a quartz glass tube 8.
  • heating conductor 6 and return conductor 7 are connected to each other via a short connector 9.
  • a support member 10 which is a holder for the heating element 6 and which is fixed in the radiator sheath 2.
  • the return conductor 7 has in the region of the vacuum feedthrough 3 a spring element 14 in the form of a wire winding.
  • the wire winding comprises up to eight turns on an axial length of 15 mm and is wound around the short quartz glass tube 11, which is pushed onto the connecting element 12 of the heating conductor 6 in this section.
  • the wire winding compensates for the thermal expansion of the return conductor 7, assuming an expansion of 8 mm during operation of the IR emitter at 2,500 ° C.
  • FIG. 2 shows only the portion of the IR radiator 1, which is located in the region of the vacuum feedthrough 3.
  • a plain bearing 15 of high-purity technical carbon which is connected to the return conductor 7.
  • the sliding bearing 15 is a sanding-mounted distance compensation element with a slide bushing 16 with two through holes, which receive in pairs each a sliding rod 17 made of molybdenum in sliding fit H7 / h7.
  • the slide rods have a diameter of 1.4 mm.
  • a sliding rod is connected to the molybdenum wire of the return conductor 7 by welding, the other sliding rod is connected to the electrical connection element 12 'of the return conductor 7, which is led out of the front end of the cladding tube 2, also by welding.
  • the molybdenum wire of the return conductor 7 is wound on the weld rod at the weld with a few turns and then welded.
  • the molybdenum wire connection of the return conductor 7 and the connection to the connecting element 12 'opposite ends of the sliding rods protrude from the Gleitbuchsenteil respectively and are provided with a thickening 18, which prevents slipping of the slide rods 17 from the slide bush 16.
  • the sliding bearing 15 forms an electrically conductive component between the return conductor 7 and the connecting element 12 ', which allows a powerless compensation of the longitudinal extent of the return conductor 7 during operation.
  • the length compensation takes place without spring action solely by a cohesive, conductive, sliding contact of the sliding elements with each other.
  • FIG. 3 is the section A of FIG. 1 shown in a detail view with the closed end of the Strahlerhüllrohres 2.
  • a support element 10 designed as a round rod of molybdenum is fixed in the glass wall of the cladding tube 2 by means of a pinch 21.
  • the rod is held by a support coil 19, which is adapted to the inner diameter of the radiator sheath tube 2 and rests against the inner wall of the cladding tube 2.
  • the diameter of the rod is 0.875 mm and is tuned so that it can be positively inserted into the turns of Bankfilaments 6.
  • the rod is oriented so that the heating filament 6 does not sag even in thermal expansion and the concomitant loss of rigidity, but is guided substantially in alignment, so remains in its radial position. This minimizes the risk that the heating filament 6 in this section touches the return conductor 7 due to thermal expansion and that short circuits occur.
  • a connecting piece 9 between heating conductor 6 and return conductor 7 can be seen, which in this case is a piece of wire made of molybdenum with few windings at both ends, which are welded to the heating conductor 6 and to the return conductor 7.
  • a connector 9 is also a straight wire without windings or a otherwise sheet metal part can be used, which is welded to the heating or return conductor and meets the corresponding electrical requirements.
  • FIG. 4 shows a cross section through the radiator sheath tube 2 in the heated length, where a plurality of spacers 20 are provided from tantalum for the purpose of exact positioning of the heating element 6 and return conductor 7 in the radiator sheath tube 2.
  • the spacer 20 is supported against the inner wall of the Strahlerhüllrohres 2 on the one hand and against the run in the quartz glass tube 8 return conductor 7 on the other hand, wherein the spacer 20 has a guide slot 21 and an open, circular recess 22. In the guide slot 21 of the heating element 6 is guided and the open, circular recess 22 receives the surrounding the return conductor 7 quartz glass tube 8.
  • the heating conductor 6 and the quartz glass tube 8 leading the return conductor 7 are kept at a safe distance from each other and from the inner wall of the radiator sheath tube 2.
  • the spacer 20 is held on the inner wall of the radiator cladding tube by small elevations or nubs 23 made of glass, which fix the spacer 20 in a particular position along the longitudinal axis of the radiator, in particular during vertical use of the IR radiator.
  • One or more spacers of this type ensure an orderly guidance, in particular of the heat conductor over the length of the radiator, especially with long radiators.

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Claims (11)

  1. Dispositif d'irradiation pour l'injection de rayonnement infrarouge dans une chambre de processus sous vide, avec un émetteur à infrarouge monté sur socle d'un côté qui comprend un tube d'enveloppe d'émetteur (2) sous forme d'un tube rond en verre duquel une extrémité fermée est réalisée pour avancer dans la chambre de processus sous vide, et avec un passage sous vide (3) pour la fixation et le passage étanche au gaz du tube d'enveloppe d'émetteur (2) à travers une ouverture de la chambre de processus sous vide, dans lequel un conducteur chauffant (6) réalisé en tant que filament chauffant et un conducteur de retour (7) réalisé en tant que retour de courant sont disposés dans le tube d'enveloppe d'émetteur (2), dans lequel le conducteur chauffant (6) présente dans la section partielle entourée par le passage sous vide (3) du tube d'enveloppe d'émetteur (2) un élément de raccord qui est sorti du tube d'enveloppe d'émetteur (2), dans lequel l'élément de raccord du conducteur chauffant (6) est guidé à travers un morceau de tube, caractérisé en ce que le conducteur de retour (7) présente dans la section partielle entourée par le passage sous vide (3) du tube d'enveloppe d'émetteur (2) un moyen pour la compensation de la dilatation thermique.
  2. Emetteur à infrarouge selon la revendication 1, caractérisé en ce que le morceau de tube à travers lequel l'élément de raccord du conducteur chauffant (6) est guidé est réalisé en tant que tube en verre de quartz (8) et l'élément de raccord du conducteur chauffant (6) est réalisé à partir d'un fil en molybdène ou en un composé de molybdène.
  3. Emetteur à infrarouge selon la revendication 1 ou 2, caractérisé en ce que le moyen pour la compensation de la dilatation thermique du conducteur de retour (7) est réalisé en tant qu'élément élastique (14).
  4. Emetteur à infrarouge selon la revendication 3, caractérisé en ce que l'élément élastique (14) est réalisé sous la forme d'un enroulement de fil qui est enroulé autour du morceau de tube de l'élément de raccord du conducteur chauffant (6).
  5. Emetteur à infrarouge selon la revendication 3 ou 4, caractérisé en ce que le moyen pour la compensation de la dilatation thermique du conducteur de retour (7) et le conducteur de retour (7) sont réalisés d'une pièce en tant que fil en molybdène ou en un composé de molybdène.
  6. Emetteur à infrarouge selon une des revendications 1 à 2, caractérisé en ce que le moyen pour la compensation de la dilatation thermique du conducteur de retour (7) est réalisé en tant que palier lisse (15) en carbone qui présente au moins deux éléments de palier lisse électriquement conducteurs qui sont en contact glissant l'un sur l'autre, dans lequel un des éléments de palier lisse est conçu en tant que barre de glissement (17) et l'autre des éléments de palier lisse est conçu en tant que douille de glissement (16).
  7. Emetteur à infrarouge selon une des revendications précédentes, caractérisé en ce qu'un élément d'appui (10) est guidé dans l'extrémité fermée du tube d'enveloppe d'émetteur (2) qui est relié au conducteur chauffant (6).
  8. Emetteur à infrarouge selon la revendication 7, caractérisé en ce que l'élément d'appui (10) est réalisé en tant que barre en molybdène ou en un composé de molybdène qui est guidée dans l'extrémité fermée du tube d'enveloppe d'émetteur (2) de manière alignée avec le conducteur chauffant (6).
  9. Emetteur à infrarouge selon la revendication 8, caractérisé en ce que la barre en molybdène ou en un composé de molybdène est reliée par conjugaison de formes ou liaison de matière au conducteur chauffant (6) et le guidage dans l'extrémité fermée du tube d'enveloppe d'émetteur (2) s'effectue au moyen d'un écrasement du tube d'enveloppe d'émetteur (2).
  10. Emetteur à infrarouge selon une des revendications précédentes, caractérisé en ce que le conducteur de retour (7) est guidé dans la section parallèlement au conducteur chauffant dans un tube en verre de quartz (8).
  11. Emetteur à infrarouge selon la revendication 10, caractérisé en ce que le conducteur chauffant (6) est soutenu par au moins un écarteur (20) par rapport à la paroi interne du tube d'enveloppe d'émetteur (2) d'un côté et par rapport au conducteur de retour (7) guidé dans le tube en verre de quartz (8) de l'autre côté.
EP15823162.1A 2015-02-25 2015-12-23 Dispositif avec un radiateur infrarouge monté d'un seul côté, pour diriger de'l infrarouge dans une chambre de traitement sous vide Not-in-force EP3262672B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102015102665.1A DE102015102665A1 (de) 2015-02-25 2015-02-25 Bestrahlungsvorrichtung zur Einkopplung von Infrarot-Strahlung in eine Vakuum-Prozesskammer mit einem einseitig gesockelten Infrarotstrahler
PCT/EP2015/081155 WO2016134808A1 (fr) 2015-02-25 2015-12-23 Dispositif de rayonnement pour injecter un rayonnement infrarouge dans une chambre de traitement sous vide avec un émetteur infrarouge monté d'un seul côté

Publications (2)

Publication Number Publication Date
EP3262672A1 EP3262672A1 (fr) 2018-01-03
EP3262672B1 true EP3262672B1 (fr) 2019-02-06

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EP15823162.1A Not-in-force EP3262672B1 (fr) 2015-02-25 2015-12-23 Dispositif avec un radiateur infrarouge monté d'un seul côté, pour diriger de'l infrarouge dans une chambre de traitement sous vide

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US (1) US20180054856A1 (fr)
EP (1) EP3262672B1 (fr)
JP (1) JP2018508100A (fr)
CN (1) CN107210186B (fr)
DE (1) DE102015102665A1 (fr)
WO (1) WO2016134808A1 (fr)

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US11057963B2 (en) * 2017-10-06 2021-07-06 Applied Materials, Inc. Lamp infrared radiation profile control by lamp filament design and positioning
EP3664121A1 (fr) * 2018-12-05 2020-06-10 ASML Netherlands B.V. Traversée haute tension à vide

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EP3262672A1 (fr) 2018-01-03
WO2016134808A1 (fr) 2016-09-01
CN107210186A (zh) 2017-09-26
DE102015102665A1 (de) 2016-08-25
CN107210186B (zh) 2018-09-14
JP2018508100A (ja) 2018-03-22
US20180054856A1 (en) 2018-02-22

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