EP3227640A1 - Détermination de position inductive - Google Patents

Détermination de position inductive

Info

Publication number
EP3227640A1
EP3227640A1 EP15804761.3A EP15804761A EP3227640A1 EP 3227640 A1 EP3227640 A1 EP 3227640A1 EP 15804761 A EP15804761 A EP 15804761A EP 3227640 A1 EP3227640 A1 EP 3227640A1
Authority
EP
European Patent Office
Prior art keywords
coil
voltage
signal generator
wave signal
square wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP15804761.3A
Other languages
German (de)
English (en)
Inventor
Thomas Erdmann
Ajoy Palit
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZF Friedrichshafen AG
Original Assignee
ZF Friedrichshafen AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ZF Friedrichshafen AG filed Critical ZF Friedrichshafen AG
Publication of EP3227640A1 publication Critical patent/EP3227640A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B5/00Near-field transmission systems, e.g. inductive or capacitive transmission systems
    • H04B5/70Near-field transmission systems, e.g. inductive or capacitive transmission systems specially adapted for specific purposes
    • H04B5/73Near-field transmission systems, e.g. inductive or capacitive transmission systems specially adapted for specific purposes for taking measurements, e.g. using sensing coils
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/2013Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by a movable ferromagnetic element, e.g. a core
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/2006Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils
    • G01D5/202Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the self-induction of one or more coils by movable a non-ferromagnetic conductive element
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B60VEHICLES IN GENERAL
    • B60LPROPULSION OF ELECTRICALLY-PROPELLED VEHICLES; SUPPLYING ELECTRIC POWER FOR AUXILIARY EQUIPMENT OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRODYNAMIC BRAKE SYSTEMS FOR VEHICLES IN GENERAL; MAGNETIC SUSPENSION OR LEVITATION FOR VEHICLES; MONITORING OPERATING VARIABLES OF ELECTRICALLY-PROPELLED VEHICLES; ELECTRIC SAFETY DEVICES FOR ELECTRICALLY-PROPELLED VEHICLES
    • B60L2250/00Driver interactions
    • B60L2250/16Driver interactions by display
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F38/00Adaptations of transformers or inductances for specific applications or functions
    • H01F38/14Inductive couplings
    • H01F2038/143Inductive couplings for signals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F38/00Adaptations of transformers or inductances for specific applications or functions
    • H01F38/14Inductive couplings
    • H01F2038/146Inductive couplings in combination with capacitive coupling
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B5/00Near-field transmission systems, e.g. inductive or capacitive transmission systems
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B5/00Near-field transmission systems, e.g. inductive or capacitive transmission systems
    • H04B5/70Near-field transmission systems, e.g. inductive or capacitive transmission systems specially adapted for specific purposes
    • H04B5/72Near-field transmission systems, e.g. inductive or capacitive transmission systems specially adapted for specific purposes for local intradevice communication

Definitions

  • the invention relates to an inductive position determination.
  • the invention relates to the determination of a position of a device on board a motor vehicle.
  • a position sensor for detecting such a position may be constructed inductively, wherein a coil is attached to one of the elements and a conductive element is attached to the other.
  • the coil can be acted upon by a sinusoidal voltage of a predetermined frequency, wherein the coil sets a complex voltage, which is dependent on the inductance of the coil.
  • the inductance of the coil is thereby adversely affected, so that the voltage drops across the coil.
  • the position of the elements can be determined to each other on the basis of the coil voltage setting.
  • An apparatus for inductive position determination comprises a signal generator, a coil connected to the signal generator, an element for influencing the inductance of the coil as a function of a distance to the coil and an evaluation device for determining the position of the element relative to the coil on the basis of a voltage on the coil ,
  • the signal generator provides a square wave signal.
  • the signal generator provides the square wave signal to excite the coil.
  • the square wave signal of the signal generator can thus act on the coil directly and / or by means of exclusively passive electrical components, and the production costs of such a device can thus be reduced.
  • the scored coil voltage also does not necessarily have to be amplified.
  • the square-wave signal can be realized for example by means of a digital logic circuit or by means of a programmable microcomputer.
  • the voltage of the square wave signal can correspond to usual logic levels, for example, 0 volts and +5 volts, so that the square wave signal can be strong enough to cause a voltage on the coil, which can be clearly identified and detected by the evaluation.
  • An amplifier for the square wave signal can be dispensed with as well as an amplifier for the voltage of the coil.
  • this settling time is as short as possible.
  • the settling time is dependent, among other things, on the signal processing effort which is carried out between signal generation and signal arrival at the coil and on an ambient temperature.
  • the elimination of a low-pass filter and a signal amplifier can be described as a reduction of the signal processing effort. Therefore, the inventive idea, the settling time is massively reduced, massive in this context, for example, a factor of ten may mean.
  • the settling time is also shortened over the entire operating temperature range of the device by a reduction of the active components.
  • the operating temperature range for electronics which is used in automotive engineering, for example, between -40 degrees Celsius and +1 10 degrees Celsius.
  • the square wave signal may include a number of harmonics to a fundamental frequency, wherein the harmonics may each affect the voltage on the coil in the same way, so that the voltage signal on the coil with improved accuracy can point to the position of the element.
  • the voltage may have a shortened rise or fall time, so that the position of the element can be determined more quickly.
  • a conventional measurement related to a sinusoidal voltage may require a measurement time of about 300 microseconds, while the proposed device may manage with a measurement time in the range of about 10 microseconds.
  • a current limiting resistor is connected downstream of the signal generator in series with the coil.
  • the current flowing through the coil can thus be limited to a predetermined maximum current value, and the life of the device can be increased.
  • the coil is designed as a single-layer planar coil. By eliminating energy losses in the sensed voltage across the coil, it is no longer necessary to make the planar coil multilayer in such a device. Thus, the production costs can be further reduced, because the cost of producing multi-layer coils is considerably greater than the effort in the production of single-layer coils. For example, in the manufacture of multi-layer coils it is necessary to check each coil individually. In particular, it must be ensured that there is an electrical connection between the layers of the multilayer coil. In contrast, the integrity or functionality of a single-layer coil can be checked visually or visually automatically, because the entire coil is visible on a surface.
  • the voltage at the coil preferably comprises an alternating voltage with the frequency of the square wave signal and at least one further alternating voltage (harmonic wave) with an odd multiple frequency of the square wave signal.
  • the further AC voltage usually has a lower amplitude than the first AC voltage.
  • the square wave signal of infinitely many Sinus. Cosine functions with frequencies that are multiples of the fundamental frequency, be composed. This synthesis is also known as Fourier series.
  • the individual signals that make up the square-wave voltage can contribute to an increased voltage, which can be sampled as a measurement signal on the coil. The position of the element can thus be determined with greater sensitivity or greater speed. If an evaluation of the voltage by means of a programmable microcomputer, it may have a lower performance because of the shortened measurement time.
  • an AC voltage applied to the coil is integrated by means of a low-pass filter into a DC voltage.
  • a low-pass filter is integrated by means of a low-pass filter into a DC voltage.
  • the coil is a planar coil.
  • the planar coil may be formed, for example, as a printed circuit on the surface of a circuit board or other suitable carrier material.
  • the planar coil is multi-layered, in particular double-layered.
  • the planar coil usually has only a few turns, for example in the range of about 9 to 30 turns. Accordingly, the basic inductance of the coil is relatively low. Due to the low inductance, the coil can influence voltage components of higher frequencies better, so that more harmonics of the fundamental can be evaluated.
  • the planar coil can be easily handled, in particular in the area of the motor vehicle, due to its small thickness.
  • a controllable switching device for connecting one end of the coil to a predetermined potential.
  • the coil can be easily connected to the predetermined potential to perform a measurement with respect to the coil. Since the switching device leads to the predetermined potential, it does not have to be made suitable for high frequency, so that instead of a costly high-frequency transistor, for example, a low-cost low-cost transistor can be used as a switching device.
  • the predetermined potential may in particular be a ground potential.
  • a control device is provided, which is adapted to always close only one of the switching devices to perform a position determination with respect to the associated coil.
  • the position of the element can thus be carried out successively with respect to a plurality of coils, so that an exact positioning is also possible over an enlarged range of movement of the element.
  • the evaluation device comprises an analog-to-digital converter and a microcomputer, wherein the microcomputer comprises a digital output, which is adapted to provide the square wave signal.
  • the microcomputer may be configured to control one or more controllable switching devices.
  • the element comprises an electrically conductive damping element.
  • the inductance of the coil is reduced when approaching the damping element, as formed by the alternating magnetic field in the damping element eddy currents that reduce the energy of the alternating magnetic field.
  • the element comprises a ferromagnetic and electrically insulating reinforcing element.
  • the reinforcing element when brought close to the coil, can increase the magnetic field strength in the region of the coil and thus increase the inductance of the coil.
  • the device forms part of a switching device for selecting a gear stage of a motor vehicle.
  • Fig. 1 is a schematic representation of a device for inductive position determination
  • Fig. 2 is a schematic representation of an extended device according to the
  • Pattern of Fig. 1 represents.
  • FIG. 1 shows a device 100 for the inductive determination of the position of an element 105.
  • the device can in particular be used on board a motor vehicle used to determine a position or position of a movable element. For example, the position of a selector lever for a gear ratio of a transmission can be scanned with respect to a console. In another embodiment, a steering angle between the motor vehicle and a trailer coupled by means of a trailer hitch can be determined.
  • the magnetic element 105 is generally an element that affects an alternating magnetic field to which it is exposed.
  • the element 105 may in particular be electrically conductive in order to weaken the alternating magnetic field in the region of the coil 15, or ferromagnetically and electrically insulating, in order to reinforce the magnetic alternating field in the region of the coil 15.
  • the element 105 may comprise, for example, copper or aluminum, in the second case, for example, iron, nickel or cobalt.
  • the device 100 comprises in addition to the element 105 a signal generator 1 10 for providing a square wave signal, a coil 15 and an evaluation device 120, and a resistor R for current limiting, which is connected downstream of the signal generator 1 10 in series with the coil 15. The current flowing through the coil 15 can thus be limited to a predetermined maximum current value, and the life of the device can be increased.
  • the signal generator 1 10 provides at its output a square wave voltage with respect to a fixed potential, in the illustration of Figure 1 with respect to ground.
  • the coil 15 is connected at a first end to the output of the signal generator 110 and at the other end to a further fixed potential, which may correspond to the other fixed potential.
  • the evaluation device 120 is connected to the coil 15 and is adapted to sample a voltage which results at the coil 15 as a function of the rectangular signal of the signal generator 110.
  • an integrator or low-pass filter 125 is preferably provided between the coil 15 and the evaluation device 120.
  • a diode 130 in the forward direction of the coil 1 15 lead to the low-pass filter 125.
  • the low-pass filter 125 integrates high-frequency signals on the coil 15 for a predetermined period of time and provides the evaluation device 120 with a corresponding voltage.
  • the position of element 105 with respect to coil 15 affects its inductance. Depending on the material of the element 105, the inductance of the coil 15 can be increased or decreased as the element 105 approaches the coil 15.
  • the coil 15 is preferably designed as a flat coil, wherein it has a limited extent to remain manageable. The inductance of the coil 1 15 is therefore relatively low.
  • the extent of the element 105 is usually in the range of the extent of the flat coil 1 15th
  • the square wave signal of the signal generator 1 10 can be regarded as a superposition of sine or cosine signals of different frequencies and amplitudes.
  • a first sine signal has as a fundamental frequency the frequency of the square wave signal.
  • Other sinusoidal signals have frequencies that correspond to integer multiples of the fundamental frequency. The higher the frequency, the lower is usually the amplitude of the frequency.
  • Odd multiples of the fundamental frequency are mutually reinforcing, so that the coil 1 15 - especially if its inductance is small - can react to several of the sinusoidal signals, so that the voltage dropping across it can be influenced several times by the position of the element 105. A voltage difference on the coil 15 with presence and absence of the element 105 can therefore be maximized.
  • the measurement signal can have an improved signal-to-noise ratio and an amplifier for the measurement signal can be saved.
  • the evaluation device 120 may in particular comprise a digital-to-analog converter. This may provide a numerical value, for example, to a programmable microcomputer. However, another signal processing of the measuring voltage is also possible.
  • FIG. 2 shows a schematic representation of an expanded device 100 according to the pattern of FIG. 1.
  • a plurality of coils 1 15 are provided, one end of which is connected to the signal generator 1 10 via the resistor R.
  • the respective other end can be connected by means of a switching device 205 with the predetermined, constant potential.
  • the switching devices 205 can in particular be formed by transistors. Since the switching devices 205 do not have to transmit high frequencies regardless of the frequency of the rectangular signal of the signal generator 110, cost-effective low-frequency transistors, for example, can be used for this purpose.
  • the switching devices 205 are controlled by a control device 210, which may in particular comprise a programmable microcomputer.
  • the control device 210 is configured to close only one of the switching devices 205 at any one time in order to carry out a measurement of the position of the element 105-or of several elements 105-with respect to the respective associated coil 15.
  • the control device 210 can also carry out a further processing of the voltage determined by the evaluation device 120.
  • the evaluation may include numerical or statistical operations.
  • control device 210 is also designed to provide the square-wave signal and thus also operates as a signal generator 1 10.
  • a serial or parallel interface of the controller 210 can be used, the rectangular signal with a relatively high amplitude, for example between 0 and 3, 3 volts or between 0 and 5 volts.
  • limiters or amplifiers can be used.
  • the controller 210 may comprise a commercially available 8-bit microcomputer in a common application with up to about 20 coils 15. A 32-bit microcomputer, as required for sinusoidal-based measurement methods, can be saved.
  • the element 105 may be designed in its dimensions with respect to the arrangement of coils 1 15 so that it can affect several coils 1 15 simultaneously. Since the inductance of each coil 15 is more or less influenced depending on the spacing of the element 105, the exact position of the element 105 can then be estimated from ratios of the voltages provided by the affected coils 15 to the low-pass filters 125.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Signal Processing (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Mechanical Control Devices (AREA)

Abstract

L'invention concerne un dispositif de détermination de position inductive, comprenant un générateur de signal, une bobine reliée au générateur de signal, un élément destiné à influencer l'inductance de la bobine en fonction de sa distance par rapport à la bobine et un appareil d'interprétation destiné à déterminer la position de l'élément par rapport à la bobine en fonction d'une tension aux bornes de la bobine. Le générateur de signal délivre ici un signal rectangulaire. Fig.
EP15804761.3A 2014-12-04 2015-12-03 Détermination de position inductive Withdrawn EP3227640A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014224859.0A DE102014224859A1 (de) 2014-12-04 2014-12-04 Induktive Positionsbestimmung
PCT/EP2015/078461 WO2016087562A1 (fr) 2014-12-04 2015-12-03 Détermination de position inductive

Publications (1)

Publication Number Publication Date
EP3227640A1 true EP3227640A1 (fr) 2017-10-11

Family

ID=54396886

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15804761.3A Withdrawn EP3227640A1 (fr) 2014-12-04 2015-12-03 Détermination de position inductive

Country Status (6)

Country Link
US (1) US20170310118A1 (fr)
EP (1) EP3227640A1 (fr)
JP (1) JP2017538937A (fr)
CN (1) CN107003150A (fr)
DE (1) DE102014224859A1 (fr)
WO (1) WO2016087562A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017212052A1 (de) * 2017-07-13 2019-01-17 Zf Friedrichshafen Ag Induktive Positionsbestimmung

Citations (11)

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JPS56162010A (en) * 1980-04-26 1981-12-12 Lucas Industries Ltd Displacement measuring transducer
JPS59100865A (ja) * 1982-11-13 1984-06-11 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 回転数検出装置
DE4427990A1 (de) * 1994-08-08 1996-02-15 Becker Wolf Juergen Univ Prof Induktiver Näherungssensor zur materialunabhängigen Abstandsmessung
JPH11287606A (ja) * 1998-02-12 1999-10-19 Hydraulik Ring Gmbh 測定対象特に自動車変速機の変速軸の位置を非接触測定する装置
DE10022821A1 (de) * 2000-05-10 2001-11-15 Schultz Wolfgang E Messeinrichtung mit induktivem Wegsensor
EP1382938A1 (fr) * 2001-04-23 2004-01-21 Levex Corporation Detecteur de position
DE202004019489U1 (de) * 2004-12-17 2005-05-25 Cherry Gmbh Induktive Sensoreinheit
DE102007055155A1 (de) * 2007-11-18 2009-05-28 Rudolf Schubach Induktiver Näherungssensor, Inkrementalgeber mit Richtungserkennung und Auswerteschaltung
US20120104999A1 (en) * 2010-11-02 2012-05-03 Triune Ip Llc Multiple Coil System
DE102011102796A1 (de) * 2011-05-23 2012-11-29 Trw Automotive Electronics & Components Gmbh Positionssensor, Aktor-Sensor-Vorrichtung und Verfahren zur induktiven Erfassung einer Position
US20130336362A1 (en) * 2012-06-19 2013-12-19 Kenichi Onishi Measuring apparatus

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ITBO20010269A1 (it) * 2001-05-07 2002-11-07 Marposs Spa Dispositivo di condizionamento per un trasduttore analogico
DE102004033085B4 (de) * 2004-07-08 2014-07-24 Robert Bosch Gmbh Integrator-Auswerteeinheit für Wirbelstromsensoren
JP2008509418A (ja) * 2004-08-09 2008-03-27 センソパッド リミテッド 検知装置及び検知方法
JP2011525236A (ja) * 2008-06-05 2011-09-15 オックスフォード アールエフ センサーズ リミテッド 位置センサ
CN103620350B (zh) * 2012-06-19 2016-03-30 株式会社利倍库斯 测定装置
JP6233641B2 (ja) * 2014-01-31 2017-11-22 パナソニックIpマネジメント株式会社 位置センサ

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Publication number Priority date Publication date Assignee Title
JPS56162010A (en) * 1980-04-26 1981-12-12 Lucas Industries Ltd Displacement measuring transducer
JPS59100865A (ja) * 1982-11-13 1984-06-11 ロ−ベルト・ボツシユ・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング 回転数検出装置
DE4427990A1 (de) * 1994-08-08 1996-02-15 Becker Wolf Juergen Univ Prof Induktiver Näherungssensor zur materialunabhängigen Abstandsmessung
JPH11287606A (ja) * 1998-02-12 1999-10-19 Hydraulik Ring Gmbh 測定対象特に自動車変速機の変速軸の位置を非接触測定する装置
DE10022821A1 (de) * 2000-05-10 2001-11-15 Schultz Wolfgang E Messeinrichtung mit induktivem Wegsensor
EP1382938A1 (fr) * 2001-04-23 2004-01-21 Levex Corporation Detecteur de position
DE202004019489U1 (de) * 2004-12-17 2005-05-25 Cherry Gmbh Induktive Sensoreinheit
DE102007055155A1 (de) * 2007-11-18 2009-05-28 Rudolf Schubach Induktiver Näherungssensor, Inkrementalgeber mit Richtungserkennung und Auswerteschaltung
US20120104999A1 (en) * 2010-11-02 2012-05-03 Triune Ip Llc Multiple Coil System
DE102011102796A1 (de) * 2011-05-23 2012-11-29 Trw Automotive Electronics & Components Gmbh Positionssensor, Aktor-Sensor-Vorrichtung und Verfahren zur induktiven Erfassung einer Position
US20130336362A1 (en) * 2012-06-19 2013-12-19 Kenichi Onishi Measuring apparatus

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Title
See also references of WO2016087562A1 *

Also Published As

Publication number Publication date
JP2017538937A (ja) 2017-12-28
DE102014224859A1 (de) 2016-06-09
CN107003150A (zh) 2017-08-01
US20170310118A1 (en) 2017-10-26
WO2016087562A1 (fr) 2016-06-09

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