EP3217239A1 - Procédé de commande de tringle et machine-outil à commande numérique - Google Patents

Procédé de commande de tringle et machine-outil à commande numérique Download PDF

Info

Publication number
EP3217239A1
EP3217239A1 EP14902909.2A EP14902909A EP3217239A1 EP 3217239 A1 EP3217239 A1 EP 3217239A1 EP 14902909 A EP14902909 A EP 14902909A EP 3217239 A1 EP3217239 A1 EP 3217239A1
Authority
EP
European Patent Office
Prior art keywords
motion mechanism
move commands
micro
machine tool
commands
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14902909.2A
Other languages
German (de)
English (en)
Other versions
EP3217239A4 (fr
EP3217239B1 (fr
Inventor
Mitsunari Oda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Makino Milling Machine Co Ltd
Original Assignee
Makino Milling Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Makino Milling Machine Co Ltd filed Critical Makino Milling Machine Co Ltd
Publication of EP3217239A1 publication Critical patent/EP3217239A1/fr
Publication of EP3217239A4 publication Critical patent/EP3217239A4/fr
Application granted granted Critical
Publication of EP3217239B1 publication Critical patent/EP3217239B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/404—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control arrangements for compensation, e.g. for backlash, overshoot, tool offset, tool wear, temperature, machine construction errors, load, inertia
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/416—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by control of velocity, acceleration or deceleration
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P23/00—Arrangements or methods for the control of AC motors characterised by a control method other than vector control
    • H02P23/12—Observer control, e.g. using Luenberger observers or Kalman filters
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P27/00—Arrangements or methods for the control of AC motors characterised by the kind of supply voltage
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/14—Electronic commutators
    • H02P6/16—Circuit arrangements for detecting position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q15/00—Automatic control or regulation of feed movement, cutting velocity or position of tool or work
    • B23Q15/007—Automatic control or regulation of feed movement, cutting velocity or position of tool or work while the tool acts upon the workpiece
    • B23Q15/013—Control or regulation of feed movement
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41154—Friction, compensation for friction
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/42—Servomotor, servo controller kind till VSS
    • G05B2219/42225—Coarse and fine position control combined, added, superposed

Definitions

  • the invention relates to a method of controlling a feed axis of a machine tool and a numerically controlled machine tool configured to carry out the feed axis controlling method.
  • the acceleration/deceleration control includes for example a post-interpolation acceleration/deceleration control wherein move commands, from a distributing and interpolating section of a numerical control device, are passed through an acceleration/deceleration filter, whereby a feed axis is accelerated or decelerated.
  • Patent Literature 1 describes an example of a post-interpolation acceleration/deceleration control for a numerically controlled machine tool, wherein acceleration/deceleration curve parameters, corresponding to cutting feed rates of the numerically controlled machine tool are determined, whereby the acceleration and deceleration for the cutting feed is controlled based on the determined acceleration/deceleration curve parameters.
  • Patent Literature 2 describes a numerical control device including a post-interpolation acceleration/deceleration processing section for performing post-interpolation acceleration/deceleration processing on the move commands from an interpolation processing section, and axis servo-controlling sections for performing servo control for the respective feed axes, on the basis of the move commands after the post-interpolation acceleration/deceleration processing, whereby a post-interpolation acceleration/deceleration processing section performs velocity control with allowable inward-turning amount.
  • Patent Literature 3 describes a precision positioning control apparatus comprising a composite servo system, which includes a coarse positioner and a fine positioner, wherein the sum of the displacements of the coarse positioner and the fine positioner is detected so that the sum is compared with the displacement command, the difference of which is supplied to adjusters of the coarse positioner and the fine positioner, whereby the adjusters output signals to be input into the coarse positioners and the fine positioners, respectively.
  • Pre-interpolation acceleration/deceleration controls involve a problem that the acceleration/deceleration time is elongated, resulting in the longer machining time.
  • post-interpolation acceleration/deceleration controls involve a problem that when two or more feed axes are simultaneously controlled in order to machine for example a corner portion in the X-Y plane, the machining error is increased since the actual tool path extends along an inner arcuate course compared with a tool path based on the move commands before the acceleration/deceleration control.
  • the invention is directed to solve the problems of the prior art, and the object of the invention is to provide a method of controlling a feed axis and a numerically controlled machine tool configured to carry out the feed axis controlling method, improved to reduce the impact generated by the changes in the acceleration and deceleration of the feed axis, and to machine a workpiece at high speed and with high accuracy.
  • a method of controlling a feed axis of a machine tool comprising obtaining differences between move commands and output values changeable based on move commands, generating move commands for the coarse motion mechanism based on the move commands, and generating move commands for the micro-motion mechanism based on the differences is provided.
  • a method of controlling a feed axis of a machine tool configured to drive the feed axis composed of a coarse motion mechanism and a micro-motion mechanism so as to move a tool and a workpiece relatively to each other, whereby to machine the workpiece, comprising generating move commands for the coarse motion mechanism by passing move commands for the feed axis through a filter adapted to make acceleration continuous, driving the coarse motion mechanism by the move commands for the coarse motion mechanism, obtaining move commands for the micro-motion mechanism based on the differences between the move commands for the feed axis and the move commands for the coarse motion mechanism, and driving the micro-motion mechanism by the obtained move commands for the micro-motion mechanism is provided.
  • the coarse motion mechanism may be driven by the move commands for the feed axis, wherein the move commands for the micro-motion mechanism may be obtained based on the differences between the move commands for the feed axis and the feedback signals for the coarse motion mechanism so as to drive the micro-motion mechanism by the obtained move commands for the micro-motion mechanism.
  • a numerically controlled machine tool configured to run a numerical control program, from a reading and interpreting section of an NC device, in a distributing section and a servo-control section so as to drive a feed axis, composed of a coarse motion mechanism and a micro-motion mechanism, so that a tool and a workpiece are moved relative to each other, whereby the workpiece is machined, performing obtaining differences between move commands and output values changeable based on move commands, generating move commands for the coarse motion mechanism based on the move commands, and generating move commands for the micro-motion mechanism based on the differences.
  • the numerically controlled machine tool may comprise a filter adapted to make the acceleration according to the move commands continuous, means adapted to generate move commands for the coarse motion mechanism through the filter, and means adapted to generate move commands for the micro-motion mechanism based on the differences between the move commands for the feed axis and the move commands for the coarse motion mechanism.
  • the accelerations connoted in the move commands which accelerations are suppressed by the acceleration/deceleration section in the prior art, are compensated by driving the micro-motion device so that the acceleration and deceleration of the respective feed axes can be increased, enabling the machining accuracy and the cutting efficiency to be increased.
  • Figure 1 is a front view showing an example of a numerically controlled machine tool to which a method of controlling a feed axis of the present invention is applied.
  • Figure 2 is a partially enlarged illustration of a part of the numerically controlled machine tool of Figure 1 .
  • the numerically controlled machine tool 10 comprises a bed 12 providing a base, a column 14 provided on the top of the bed 12 for moving in the horizontal left-and-right direction (X-axis direction), a Y-axis slider 16 mounted to the column 14 for moving in the vertical up-and-down direction (Y-axis direction), a headstock 20 mounted to the Y-axis slider 16 for moving in the up-and-down direction, and a spindle head 22, mounted to the headstock 20 for moving in the horizontal left-and-right direction, for supporting a spindle 24 for rotation about a rotational axis extending in the horizontal front-and-rear direction.
  • the column 14 has guide blocks 28 slideable on a pair of X-axis guide rails 26 extending in the horizontal left-and-right direction (the X-axis direction) along the top of the bed 102, and therefore is provided for reciprocating along the X-axis guide rails 26.
  • a ball screw 36 ( Figures 5 and 6 ), extending in the X-axis direction, and an X-axis servomotor 28 coupled to an end of the ball screw 36 are provided on the bed 102 as an X-axis feed device for reciprocally driving the column 14 along the X-axis guide rails 26.
  • a nut 46 ( Figures 5 and 7 ), engaging the ball screw 36, is mounted to the column 14.
  • an X-axis scale 48 ( Figures 5 and 7 ), for measuring the X-axis coordinate position of the column 14, is mounted to the bed 12.
  • the Y-axis slider 16 is provided on a front face of the column 14 for reciprocating along a pair of Y-axis guide rails (not shown) extending in the vertical direction (the Y-axis direction).
  • a pair of left-and-right ball screws 30 extending in the Y-axis direction and Y-axis servomotors 32 coupled to ends of the ball screws 30 are provided on the column 14 as a Y-axis feed device for reciprocally driving the Y-axis slider 16 along the Y-axis guide rails.
  • a nut (not shown), engaging the ball screw 30, is mounted to the Y-axis slider 16.
  • a Y-axis scale (not shown), for measuring the Y-axis coordinate position of the Y-axis slider 16, is mounted to the column 14.
  • the headstock 20 is provided so as to be finely movable in the Y-axis direction relative to the column 14 via a Y-axis micro-motion device 40, while the spindle head 22 is provided so as to be finely movable in the X-axis direction relative to the headstock 20 via an X-axis micro-motion device 42.
  • the configurations of the Y-axis micro-motion device 40 and the X-axis micro-motion device 42 are selected based on the required accuracies and the weights of the headstock 20 and the spindle head 22, they may be formed by linear motors or piezoelectric devices.
  • broken lines indicate the scopes of micro-motion in the Y- and X-axis directions.
  • the micro-motion mechanism driven by the X-axis micro-motion device 42 and the Y-axis micro-motion device 40, is configured to have inertia smaller than and rigidity greater than a coarse motion mechanism.
  • the numerically controlled machine tool 10 comprises a position sensor (not shown) for detecting the relative position in the Y-axis direction of the headstock 20 relative to the Y-axis slider 16 and a position sensor 44 (refer to Figures 5 and 7 ) for detecting the relative position in the X-axis direction of the spindle head 22 relative to the headstock 20.
  • a control system 50 comprises a reading and interpreting section 52, a distributing and interpolating section 54 and X-, Y- and Z-axis servo-controlling sections 56, 58 and 60.
  • the reading and interpreting section 12 reads and interprets a machining program fed from for example a CAM device (not shown) to output move commands to the distributing and interpolating section 54.
  • the move commands include amounts of feed and feeding rates in the X-, Y- and Z-axis directions.
  • the distributing and interpolating section 54 performs the interpolation operation on the received X-, Y- and Z-axis move commands to output position commands, corresponding to interpolation functions and feed rates, to the servo-controlling sections 56, 58 and 60 of the respective axes.
  • the servo-controlling sections 56, 58 and 60 output electric current values for driving the respective X-, Y- and Z-feed axes of the machine tool 10, based on the received position commands for the respective X-, Y- and Z-axes, to the servomotors 28 and 32 and the micro-motion device 40 and 42 of the X- and Y-axes, respectively.
  • Figure 4 illustrates a tool path when cutting a corner portion in the X-Y plane by using a tool for example a ball end mill.
  • the position commands output from the distributing and interpolating section 54 are generally passed through a filter adapted to make acceleration continuous, in order to reduce the vibrations and impacts which may be generated when a moving part such as the column 14, the Y-axis slider 16, headstock 20, the spindle head 22 and the spindle 24 moves, and to ensure the continuity of the accelerations of the commands.
  • the invention approximates the tool path TP', which is based on the position commands after filtered, to the tool path TP which is based on the position commands from the distributing and interpolating section 54 by using the micro-motion devices.
  • a servo-control device 100 forming the X-axis servo-controlling section 56 of Figure 3 , will be described below. It may be understood that the Y-axis servo-controlling section 58 and the Z-axis servo-controlling section 60 can be similarly formed by the servo-control device 100.
  • the servo-control device 100 includes, similar to conventional servo-control devices, an acceleration/deceleration filter 102 for position commands Xs from the distributing and interpolating section 54, a subtractor 104 for comparing the position commands from the acceleration/deceleration filter 102 and position feedback signals from the X-axis scale 48, a position controller 106 for performing a differential operation on the outputs from the subtractor 104, a subtractor 108 for comparing the outputs from the position controller 106 and velocity feedback signals from the rotary encoder of the X-axis servomotor 28, a velocity controller 110 for performing a differential operation on the signals from the subtractor 108, a current controller 112 for controlling the electric current output to the X-axis servomotor 28 based on the outputs from the velocity controller 110, a velocity feedforward controller 114 and an acceleration feedforward controller 116 for generating velocity feedforward values and acceleration feedforward values based on the position commands from
  • the servo-control device 100 further includes subtractor 118 for comparing the position commands from the distributing and interpolating section 54 and the position commands from the acceleration/deceleration filter 102, a subtractor 120 for comparing the outputs from the subtractor 118 and the position feedback signals from the position sensor 44, a micro-motion position controller 122 for performing a differential operation on the outputs from the subtractor 120, a subtractor 124 for comparing the outputs from the micro-motion position controller 122 and the signals from the position sensor 44 after the differential operation, a micro-motion velocity controller 126 for performing a differential operation on the signals from the subtractor 124, a micro-motion current controller 128 for controlling the electric current output to the X-axis micro-motion device 42 based on the outputs from the micro-motion velocity controller 126, a micro-motion velocity feedforward controller 130 and a micro-motion acceleration feedforward controller 132 for generating micro-motion velocity feedforward values and micro-motion acceleration feedforward values based on the outputs from the subtractor 118.
  • the X-axis micro-motion device 42 is controlled so as to compensate the differences between the position commands from the distributing and interpolating section 54 and the outputs from the acceleration/deceleration filter 102. Therefore, according to this embodiment, it is possible to approximate the tool path TP' based on the position commands after being filtered to the tool path based on the position commands from the distributing and interpolating section 54. Further, in the prior art, large accelerations connoted in the position commands are suppressed by a filter. In this embodiment, the suppressed accelerations are compensated by driving the micro-motion devices, enabling the servomotors 28 and 32 of the X- and Y-axes to be increased, whereby the machining accuracy and the cutting efficiency can be increased.
  • a tool path TP extends along an arc or a curve as shown in Figure 6
  • the actual tool path may be deviated from the tool path TP, which is based on the position commands from the distributing and interpolating section, as shown by broken line TP', since delays of the feed axes are caused by changes in the friction acted on the moving parts of a machine tool.
  • a servo-controlling device 200 includes, similar to conventional servo-controlling devices, a subtractor 202 comparing the position commands X0 from the distributing and interpolating section 54 and the position feedback signals from the X-axis scale 48, a position controller 204 for performing a differential operation on the outputs from the subtractor 202, a subtractor 206 for comparing the outputs from the position controller 204 and the velocity feedback signals from the rotary encoder 28a of the X-axis servomotor 28, a velocity controller 208 for performing a differential operation on the outputs from the velocity controller 208, a current controller 210 for controlling the electric current output to the X-axis servomotor 28 based on the outputs from the velocity controller 208, a velocity feedforward controller 212 and an acceleration feedforward controller 214 for generating velocity feedforward values and acceleration feedforward values based on the position commands X0 from the distributing and interpolating section 54.
  • the servo-controlling device 200 further includes a subtractor 218 for comparing the outputs from the subtractor 202 and the position feedback signals from the position sensor 44, a micro-motion position controller 220 for performing a differential operation on the outputs from the subtractor 218, a subtractor 222 for comparing the outputs from the micro-motion position controller 220 and the signals from the position sensor 44 after the differential operation, a micro-motion velocity controller 224 for performing a differential operation on the signals from the subtractor 222, a micro-motion current controller 226 for controlling the electric current to be output to the X-axis micro-motion device 42 based on the outputs from the micro-motion velocity controller 224, a micro-motion velocity feedforward controller 228 and a micro-motion acceleration feedforward controller 230 for generating micro-motion velocity feedforward values and micro-motion acceleration feedforward values based on the outputs from the subtractor 202.
  • a subtractor 218 for comparing the outputs from the subtractor 202 and the position feedback signals from the position sensor 44
  • the servo-controlling device 200 can effectively reduce machining errors due to changes in the friction acted on the moving parts of a machine tool, as shown in Figure 6 .
  • the micro-motion device 42 may be a driving device comprising piezoelectric devices, instead of linear motors.
  • mutually interfering forces may be generated, via the piezoelectric devises, between the Y-axis slider 16, providing a coarse motion mechanism, and the spindle head 22 or the headstock 20, providing a micro-motion mechanism. Therefore, in this embodiment, the servo-controlling device 200 feeds the mutually interfering forces, acting on the coarse motion mechanism and the micro-motion mechanism, forward to the current controller 210 and the micro-motion current controller 226.
  • an interference acceleration feedforward controller 216 for generating interference acceleration feedforward values based on the outputs from the subtractor 202
  • a micro-motion interference acceleration feedforward controller 232 for generating micro-motion interference acceleration feedforward values based on the position commands X0 from the distributing and interpolating section 54, are provided.

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Mechanical Engineering (AREA)
  • Numerical Control (AREA)
EP14902909.2A 2014-09-30 2014-09-30 Procédé de commande de tringle et machine-outil à commande numérique Active EP3217239B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2014/076220 WO2016051542A1 (fr) 2014-09-30 2014-09-30 Procédé de commande de tringle et machine-outil à commande numérique

Publications (3)

Publication Number Publication Date
EP3217239A1 true EP3217239A1 (fr) 2017-09-13
EP3217239A4 EP3217239A4 (fr) 2018-09-26
EP3217239B1 EP3217239B1 (fr) 2024-06-05

Family

ID=55629633

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14902909.2A Active EP3217239B1 (fr) 2014-09-30 2014-09-30 Procédé de commande de tringle et machine-outil à commande numérique

Country Status (5)

Country Link
US (1) US10437225B2 (fr)
EP (1) EP3217239B1 (fr)
JP (1) JP6440725B2 (fr)
CN (1) CN107077127B (fr)
WO (1) WO2016051542A1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112470089B (zh) * 2018-07-24 2024-05-03 三菱电机株式会社 刀具路径修正装置、刀具路径修正方法及数控装置
JP7192735B2 (ja) * 2019-09-30 2022-12-20 ブラザー工業株式会社 数値制御装置、及び数値制御装置の制御方法

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3040448B2 (ja) * 1990-01-26 2000-05-15 三菱電機株式会社 位置決め装置
JPH0566839A (ja) * 1991-09-05 1993-03-19 Hitachi Constr Mach Co Ltd 位置決め装置の駆動制御方法
JP3243520B2 (ja) * 1992-06-23 2002-01-07 独立行政法人産業技術総合研究所 位置決め制御方法及び装置
JP3215280B2 (ja) * 1995-03-02 2001-10-02 キヤノン株式会社 ステージ位置決め制御装置
JP2735153B2 (ja) 1995-03-03 1998-04-02 工業技術院長 精密位置制御装置及び精密位置制御方法
US5751585A (en) * 1995-03-20 1998-05-12 Electro Scientific Industries, Inc. High speed, high accuracy multi-stage tool positioning system
JP3876010B2 (ja) * 1995-06-27 2007-01-31 ファナック株式会社 サーボモータの加減速制御装置
JP2001312309A (ja) * 2000-04-28 2001-11-09 Makino Milling Mach Co Ltd 数値制御工作機械及びその加減速制御方法
JP2004188541A (ja) 2002-12-11 2004-07-08 Yamazaki Mazak Corp 工作機械の送り軸パラメータ調整システム
US6706999B1 (en) * 2003-02-24 2004-03-16 Electro Scientific Industries, Inc. Laser beam tertiary positioner apparatus and method
US7038877B2 (en) * 2003-03-12 2006-05-02 Matsushita Electric Idustrial Co., Ltd. Head positioning apparatus
DE102005061570A1 (de) * 2005-12-22 2007-07-05 Siemens Ag Ermittlungsverfahren für eine lagegeführte abzufahrende Grobbahn
US7348748B2 (en) * 2006-06-02 2008-03-25 Delta Tau Data Systems, Inc. Motorized system and method of control
JP5103977B2 (ja) * 2007-03-26 2012-12-19 カシオ計算機株式会社 フレキシブル基板、手振れ補正ユニットおよび撮像装置
WO2009110599A1 (fr) * 2008-03-06 2009-09-11 国立大学法人横浜国立大学 Appareil de commande, appareil d'alignement, procédé de commande et appareil de mesure associés
US8582867B2 (en) * 2010-09-16 2013-11-12 Primesense Ltd Learning-based pose estimation from depth maps
JP5943557B2 (ja) * 2011-06-01 2016-07-05 キヤノン株式会社 位置決め装置、露光装置およびデバイス製造方法
JP2013069123A (ja) 2011-09-22 2013-04-18 Fanuc Ltd コーナ部の許容内回り量による速度制御を行う数値制御装置
JP2013157063A (ja) * 2012-01-31 2013-08-15 Toshiba Corp 磁気ディスク装置および２段アクチュエータの外乱補償方法
US10061277B2 (en) * 2012-02-08 2018-08-28 Mitsubishi Electric Corporation Servo control device with coarse and fine movement
US9903806B2 (en) * 2013-12-17 2018-02-27 Nanometrics Incorporated Focusing system with filter for open or closed loop control

Also Published As

Publication number Publication date
EP3217239A4 (fr) 2018-09-26
CN107077127B (zh) 2019-12-31
EP3217239B1 (fr) 2024-06-05
US20170220023A1 (en) 2017-08-03
JP6440725B2 (ja) 2018-12-19
JPWO2016051542A1 (ja) 2017-04-27
WO2016051542A1 (fr) 2016-04-07
CN107077127A (zh) 2017-08-18
US10437225B2 (en) 2019-10-08

Similar Documents

Publication Publication Date Title
EP2634655B1 (fr) Procédé de commande numérique d'une machine-outil et dispositif de commande numérique
JP4813912B2 (ja) 未加工品と工作機械の工具との間の相対運動の運動分割方法、および運動分割を実施するための工作機械
US8260443B2 (en) Method for the optimized movement co-ordination of measuring machines or machine tools with redundant axles having a translatory action
EP2634656B1 (fr) Méthode de correction pendant l'inversion d'un arbre d'avance
KR19990023831A (ko) 위치제어장치와 그 방법, 수치제어 프로그램 작성장치와그 방법 및 수치제어 공작기계의 제어방법
US10328542B2 (en) Tool path-generating method, drilling method, and tool path-generating device
US20130149062A1 (en) Machine Tool
CN112207628B (zh) 一种运动机构动刚度检测方法
WO2015114811A1 (fr) Procédé de coupe et dispositif de commande
JP2008126327A (ja) 移動軌跡表示装置
CN103809520A (zh) 用于多轴联动动态修正插补位置的全闭环运动控制方法
CN102156436A (zh) 激光切割机多闭环反馈控制系统
US10437225B2 (en) Feed shaft control method and numerically controlled machine tool
Yang et al. Kinematics model and trajectory interpolation algorithm for CNC turning of non-circular profiles
US9921568B2 (en) Trajectory measuring device, numerical control device, and trajectory measuring method
US20100086374A1 (en) Dynamically optimized machine tool having superimposed drive systems
JPH02160457A (ja) 工作機械の真直度補正装置
JP3445474B2 (ja) 位置制御装置および位置制御方法
JP2003211344A (ja) Ｎｃ旋盤の補正装置
JPS62176739A (ja) 工作機械の真直度補正装置
JP5616262B2 (ja) 数値制御工作機械
JP2000322116A (ja) サーボ制御装置及び位置決め装置
JPWO2018092221A1 (ja) 工作機械の送り軸制御方法および送り軸制御装置
JP2018020415A (ja) 工作機械用駆動装置
JP2001300801A (ja) Ｎｃ旋盤の制御方法

Legal Events

Date Code Title Description
STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE INTERNATIONAL PUBLICATION HAS BEEN MADE

PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: REQUEST FOR EXAMINATION WAS MADE

17P Request for examination filed

Effective date: 20170424

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

DAX Request for extension of the european patent (deleted)
A4 Supplementary search report drawn up and despatched

Effective date: 20180824

RIC1 Information provided on ipc code assigned before grant

Ipc: G05B 19/416 20060101AFI20180820BHEP

Ipc: G05B 19/4103 20060101ALI20180820BHEP

Ipc: G05B 19/404 20060101ALI20180820BHEP

Ipc: H02P 6/16 20160101ALI20180820BHEP

Ipc: B23Q 15/007 20060101ALI20180820BHEP

Ipc: H02P 27/00 20060101ALI20180820BHEP

Ipc: H02P 23/12 20060101ALI20180820BHEP

Ipc: B23Q 15/013 20060101ALI20180820BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: EXAMINATION IS IN PROGRESS

17Q First examination report despatched

Effective date: 20210628

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: GRANT OF PATENT IS INTENDED

INTG Intention to grant announced

Effective date: 20240205

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE PATENT HAS BEEN GRANTED