EP3163749A3 - Design and fabrication of acoustic wave filters having plate modes - Google Patents

Design and fabrication of acoustic wave filters having plate modes Download PDF

Info

Publication number
EP3163749A3
EP3163749A3 EP16180904.1A EP16180904A EP3163749A3 EP 3163749 A3 EP3163749 A3 EP 3163749A3 EP 16180904 A EP16180904 A EP 16180904A EP 3163749 A3 EP3163749 A3 EP 3163749A3
Authority
EP
European Patent Office
Prior art keywords
acoustic wave
design
plate modes
saw
admittances
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP16180904.1A
Other languages
German (de)
English (en)
French (fr)
Other versions
EP3163749A2 (en
Inventor
Sean Mchugh
Neal Fenzi
Mike Eddy
Patrick Turner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Resonant Inc
Original Assignee
Resonant Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Resonant Inc filed Critical Resonant Inc
Publication of EP3163749A2 publication Critical patent/EP3163749A2/en
Publication of EP3163749A3 publication Critical patent/EP3163749A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/205—Constructional features of resonators consisting of piezoelectric or electrostrictive material having multiple resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02866—Means for compensation or elimination of undesirable effects of bulk wave excitation and reflections
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/25—Constructional features of resonators using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/644—Coupled resonator filters having two acoustic tracks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves
    • H03H9/6423—Means for obtaining a particular transfer characteristic
    • H03H9/6433—Coupled resonator filters
    • H03H9/6483—Ladder SAW filters

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
EP16180904.1A 2015-10-28 2016-07-22 Design and fabrication of acoustic wave filters having plate modes Withdrawn EP3163749A3 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US14/925,603 US9369111B1 (en) 2015-10-28 2015-10-28 Fabrication of surface acoustic wave filters having plate modes

Publications (2)

Publication Number Publication Date
EP3163749A2 EP3163749A2 (en) 2017-05-03
EP3163749A3 true EP3163749A3 (en) 2017-08-16

Family

ID=56100677

Family Applications (1)

Application Number Title Priority Date Filing Date
EP16180904.1A Withdrawn EP3163749A3 (en) 2015-10-28 2016-07-22 Design and fabrication of acoustic wave filters having plate modes

Country Status (5)

Country Link
US (2) US9369111B1 (ko)
EP (1) EP3163749A3 (ko)
JP (1) JP6194072B2 (ko)
KR (1) KR101777584B1 (ko)
CN (1) CN106656096A (ko)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9948277B2 (en) 2015-09-02 2018-04-17 Resonant Inc. Method of optimizing input impedance of surface acoustic wave filter
US9369111B1 (en) 2015-10-28 2016-06-14 Resonant Inc. Fabrication of surface acoustic wave filters having plate modes
DE112017001943T5 (de) 2016-04-08 2019-04-25 Resonant Inc. Funkfrequenzfilter, Triplexer hoher Selektivität und Kommunikationsvorrichtung
US9825611B2 (en) * 2016-04-15 2017-11-21 Resonant Inc. Dual passband radio frequency filter and communications device
US10230350B2 (en) 2016-06-15 2019-03-12 Resonant Inc. Surface acoustic wave filters with extracted poles
DE102016114071B3 (de) * 2016-07-29 2018-01-25 Snaptrack, Inc. Elektroakustisches Filter mit reduzierten Plattenmoden
FR3079101B1 (fr) * 2018-03-16 2020-11-06 Frecnsys Structure de transducteur pour suppression de source dans les dispositifs de filtres a ondes acoustiques de surface
CN110138355A (zh) * 2019-05-16 2019-08-16 江苏卓胜微电子股份有限公司 双滤波器芯片制作方法、芯片及双滤波器
KR102577710B1 (ko) * 2020-12-30 2023-09-12 (주)와이팜 Saw 전송선 모델을 이용한 saw 공진기의 특성 정보 산출방법 및 이를 기록한 컴퓨팅 장치에 의해 판독 가능한 기록매체
KR20230101025A (ko) * 2021-12-29 2023-07-06 (주) 와이팜 Saw 공진기의 설계방법 및 이를 기록한 컴퓨팅 장치에 의해 판독 가능한 기록매체

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4163201A (en) * 1976-11-09 1979-07-31 Tokyo Shibaura Electric Co., Ltd. Elastic surface wave device
US20060022768A1 (en) * 2004-07-28 2006-02-02 Kyocera Corporation Surface acoustic wave device, surface acoustic wave apparatus, and communications equipment
US20080252394A1 (en) * 2007-04-16 2008-10-16 Fujitsu Media Devices Limited Surface acoustic wave device and duplexer
US20100293770A1 (en) * 2008-01-24 2010-11-25 Murata Manufacturing Co., Ltd. Method for manufacturing acoustic wave device
US20140320234A1 (en) * 2012-02-03 2014-10-30 Murata Manufacturing Co., Ltd. Surface acoustic wave device and composite module including same

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54108551A (en) * 1978-02-14 1979-08-25 Matsushita Electric Ind Co Ltd Elastic surface wave device
JP3509764B2 (ja) * 2001-03-23 2004-03-22 株式会社村田製作所 弾性表面波装置、通信装置
JP2002288227A (ja) * 2001-03-28 2002-10-04 Sanyo Electric Co Ltd 弾性表面波フィルタの設計方法、コンピュータプログラム及び記録媒体
JP2006025396A (ja) * 2004-06-09 2006-01-26 Seiko Epson Corp 弾性表面波装置、その製造方法、および電子機器
US8115365B2 (en) 2008-04-15 2012-02-14 Ngk Insulators, Ltd. Surface acoustic wave devices
US7911111B2 (en) 2008-04-15 2011-03-22 Ngk Insulators, Ltd. Surface acoustic wave devices
JP5384313B2 (ja) 2008-12-24 2014-01-08 日本碍子株式会社 複合基板の製造方法及び複合基板
JP2010187373A (ja) 2009-01-19 2010-08-26 Ngk Insulators Ltd 複合基板及びそれを用いた弾性波デバイス
US8035464B1 (en) * 2009-03-05 2011-10-11 Triquint Semiconductor, Inc. Bonded wafer SAW filters and methods
US8862192B2 (en) 2010-05-17 2014-10-14 Resonant Inc. Narrow band-pass filter having resonators grouped into primary and secondary sets of different order
US9541973B2 (en) 2012-10-11 2017-01-10 Monolithic Power Systems, Inc. Digitally calibrated voltage regulators for power management
US8990472B2 (en) 2012-10-24 2015-03-24 Mellanox Technologies, Ltd Methods and systems for running network protocols over peripheral component interconnect express
US9208274B2 (en) * 2013-03-15 2015-12-08 Resonant Inc. Network synthesis design of microwave acoustic wave filters
US9325294B2 (en) 2013-03-15 2016-04-26 Resonant Inc. Microwave acoustic wave filters
US9038005B2 (en) * 2013-03-15 2015-05-19 Resonant Inc. Network synthesis design of microwave acoustic wave filters
US8751993B1 (en) 2013-03-15 2014-06-10 Resonant Llc Element removal design in microwave filters
US8990742B2 (en) * 2013-03-15 2015-03-24 Resonant Inc. Network synthesis design of microwave acoustic wave filters
US9331669B2 (en) 2014-07-25 2016-05-03 Resonant Inc. High rejection surface acoustic wave duplexer
US9374061B1 (en) 2015-09-02 2016-06-21 Resonant Inc. Method of optimizing input impedance of surface acoustic wave filter
US9369111B1 (en) 2015-10-28 2016-06-14 Resonant Inc. Fabrication of surface acoustic wave filters having plate modes
US9608595B1 (en) 2015-11-13 2017-03-28 Resonant Inc. Acoustic wave filter with enhanced rejection
US9525393B1 (en) 2015-11-13 2016-12-20 Resonant Inc. Technique for designing acoustic microwave filters using lcr-based resonator models

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4163201A (en) * 1976-11-09 1979-07-31 Tokyo Shibaura Electric Co., Ltd. Elastic surface wave device
US20060022768A1 (en) * 2004-07-28 2006-02-02 Kyocera Corporation Surface acoustic wave device, surface acoustic wave apparatus, and communications equipment
US20080252394A1 (en) * 2007-04-16 2008-10-16 Fujitsu Media Devices Limited Surface acoustic wave device and duplexer
US20100293770A1 (en) * 2008-01-24 2010-11-25 Murata Manufacturing Co., Ltd. Method for manufacturing acoustic wave device
US20140320234A1 (en) * 2012-02-03 2014-10-30 Murata Manufacturing Co., Ltd. Surface acoustic wave device and composite module including same

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
MCHUGH S ET AL: "Lamb plate modes and surface acoustic wave resonator microwave filters", 2015 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS), IEEE, 21 October 2015 (2015-10-21), pages 1 - 4, XP032799632, DOI: 10.1109/ULTSYM.2015.0058 *
YU JIN: "Excitation of higher-order ultrasonic Lamb wave modes in piezoelectric plates", THE JOURNAL OF THE ACOUSTICAL SOCIETY OF AMERICA, vol. 92, no. 2, 1 January 1992 (1992-01-01), New York, NY, US, pages 914, XP055330808, ISSN: 0001-4966, DOI: 10.1121/1.403961 *

Also Published As

Publication number Publication date
CN106656096A (zh) 2017-05-10
JP6194072B2 (ja) 2017-09-06
US10110200B2 (en) 2018-10-23
KR101777584B1 (ko) 2017-09-13
JP2017085542A (ja) 2017-05-18
KR20170049451A (ko) 2017-05-10
US9369111B1 (en) 2016-06-14
US20170126203A1 (en) 2017-05-04
EP3163749A2 (en) 2017-05-03

Similar Documents

Publication Publication Date Title
EP3163749A3 (en) Design and fabrication of acoustic wave filters having plate modes
GB2573052A (en) Acoustic wave filter including two types of acoustic wave resonators
EP4072013A4 (en) BULK WAVE RESONATOR WITH ELECTRODE WITH CAVITY LAYER, FILTER AND ELECTRONIC DEVICE
EP3506501A3 (en) Notch filters based on coupled acoustic resonators
WO2014150503A8 (en) Ceramic filters
WO2012121946A3 (en) Methods of forming polycrystalline tables and polycrystalline elements and related structures
WO2008136898A3 (en) Methods and apparatus for making honeycomb structures with chamfered after-applied skin and honeycomb structures produced thereby
EP3866998A4 (en) METHOD AND APPARATUS FOR MANUFACTURING OPTIMIZED PANELS AND OTHER COMPOSITE STRUCTURES
EP4016841A4 (en) RESONATOR HAVING A COMPOSITE ANNULAR STRUCTURE, FILTER AND ELECTRONIC DEVICE
AU2015241796A1 (en) Nonwoven fabric
EP3896851A4 (en) PIEZOELECTRIC ACOUSTIC FILTER
WO2010124213A3 (en) A method for processing a substrate having a non-planar substrate surface
EP2568691A3 (en) Mobile terminal and method for fabricating case thereof
TWD174921S (zh) 複合基板之部分
EP2995995A3 (en) Pattern structure and method of manufacturing the pattern structure
EP3804852A4 (en) NAY MOLECULAR SIEVE WITH ALUMINUM-RICH SURFACE AND ASSOCIATED PREPARATION METHOD
SG11202009517QA (en) Hybrid structure for surface acoustic wave device and associated manufacturing process
MY163310A (en) Method for manufacturing diagonal plywood
EP3901097A4 (en) Piezoelectric laminate, piezoelectric element, and piezoelectric laminate manufacturing method
FI20115485A (fi) Akustiikkalevy
EP4016842A4 (en) VOLUME ACOUSTIC RESONATOR WITH CENTRAL DEFAULT STRUCTURE, FILTER, AND ELECTRONIC DEVICE
EP3040322A3 (en) Process and formulation to join ceramic foams while maintaining structural and physical characteristics across the bond surface
EP3859971A4 (en) COMPOSITE SUBSTRATE, PIEZOELECTRIC ELEMENT AND METHOD FOR MAKING A COMPOSITE SUBSTRATE
EP3761506A4 (en) COMPOSITE SUBSTRATE AND PIEZOELECTRIC ELEMENT
EP2233223A3 (en) A method of forming an internal structure in a hollow component

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN PUBLISHED

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

RIC1 Information provided on ipc code assigned before grant

Ipc: H03H 9/64 20060101ALI20170707BHEP

Ipc: H03H 9/02 20060101AFI20170707BHEP

Ipc: H03H 3/08 20060101ALI20170707BHEP

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20180217