EP3112315A4 - Method for filling, on wafer, chip-level atomic clock absorption bubbles with high-purity alkali metal - Google Patents

Method for filling, on wafer, chip-level atomic clock absorption bubbles with high-purity alkali metal Download PDF

Info

Publication number
EP3112315A4
EP3112315A4 EP14884030.9A EP14884030A EP3112315A4 EP 3112315 A4 EP3112315 A4 EP 3112315A4 EP 14884030 A EP14884030 A EP 14884030A EP 3112315 A4 EP3112315 A4 EP 3112315A4
Authority
EP
European Patent Office
Prior art keywords
wafer
filling
chip
alkali metal
atomic clock
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14884030.9A
Other languages
German (de)
French (fr)
Other versions
EP3112315A1 (en
EP3112315A8 (en
EP3112315B1 (en
Inventor
Jian Zhu
Erwin HELL
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CETC 55 Research Institute
Original Assignee
CETC 55 Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CETC 55 Research Institute filed Critical CETC 55 Research Institute
Publication of EP3112315A1 publication Critical patent/EP3112315A1/en
Publication of EP3112315A4 publication Critical patent/EP3112315A4/en
Publication of EP3112315A8 publication Critical patent/EP3112315A8/en
Application granted granted Critical
Publication of EP3112315B1 publication Critical patent/EP3112315B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G04—HOROLOGY
    • G04F—TIME-INTERVAL MEASURING
    • G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
    • G04F5/14—Apparatus for producing preselected time intervals for use as timing standards using atomic clocks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Engineering & Computer Science (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
EP14884030.9A 2014-02-27 2014-09-02 Method for filling csac absorption cells with high-purity alkali metal Active EP3112315B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201410067976.0A CN103864007B (en) 2014-02-27 2014-02-27 The high purity alkali metal fill method that chip-scale atomic clock absorbs bubble is realized at sheet
PCT/CN2014/000816 WO2015127577A1 (en) 2014-02-27 2014-09-02 Method for filling, on wafer, chip-level atomic clock absorption bubbles with high-purity alkali metal

Publications (4)

Publication Number Publication Date
EP3112315A1 EP3112315A1 (en) 2017-01-04
EP3112315A4 true EP3112315A4 (en) 2017-03-08
EP3112315A8 EP3112315A8 (en) 2017-06-28
EP3112315B1 EP3112315B1 (en) 2021-07-14

Family

ID=50903111

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14884030.9A Active EP3112315B1 (en) 2014-02-27 2014-09-02 Method for filling csac absorption cells with high-purity alkali metal

Country Status (4)

Country Link
EP (1) EP3112315B1 (en)
KR (1) KR101824789B1 (en)
CN (1) CN103864007B (en)
WO (1) WO2015127577A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103864007B (en) 2014-02-27 2016-03-30 中国电子科技集团公司第五十五研究所 The high purity alkali metal fill method that chip-scale atomic clock absorbs bubble is realized at sheet
CN104609364B (en) * 2015-01-28 2016-05-11 中国科学院上海光学精密机械研究所 Preparation method and the system of high accuracy mixed buffer gas alkali metal atom steam bubble
CN107840305B (en) * 2017-11-13 2019-05-10 北京无线电计量测试研究所 A kind of production method of the MEMS Atom-Cavity of chip atomic clock
CN111855579A (en) * 2019-04-28 2020-10-30 核工业理化工程研究院 Alkali metal atom vapor absorption cell and spectral measurement method thereof
CN114477074A (en) * 2021-12-22 2022-05-13 北京自动化控制设备研究所 Wafer-level atomic gas chamber processing method and device based on MEMS technology

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7893780B2 (en) * 2008-06-17 2011-02-22 Northrop Grumman Guidance And Electronic Company, Inc. Reversible alkali beam cell
EP2362281A2 (en) * 2010-02-04 2011-08-31 Honeywell International Inc. Fabrication techniques to enhance pressure uniformity in anodically bonded vapor cells
US20120243088A1 (en) * 2011-03-23 2012-09-27 Seiko Epson Corporation Gas cell, gas cell manufacturing apparatus, and gas cell manufacturing method
JP2013125907A (en) * 2011-12-15 2013-06-24 Ricoh Co Ltd Atomic oscillator manufacturing method

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050007118A1 (en) * 2003-04-09 2005-01-13 John Kitching Micromachined alkali-atom vapor cells and method of fabrication
US7666485B2 (en) * 2005-06-06 2010-02-23 Cornell University Alkali metal-wax micropackets for alkali metal handling
DE102007034963B4 (en) * 2007-07-26 2011-09-22 Universität des Saarlandes A cell having a cavity and a wall surrounding the cavity, a process for producing such a cell, the use thereof, and a wall with a recess which can be formed therein
US8258884B2 (en) * 2009-12-22 2012-09-04 Teledyne Scientific & Imaging, Llc System for charging a vapor cell
CN102259825B (en) * 2011-06-17 2015-04-08 清华大学 Preparation method for micro-electro-mechanical system (MEMS) atomic vapor chamber and atomic vapor chamber
JP6031787B2 (en) * 2011-07-13 2016-11-24 株式会社リコー Method for manufacturing atomic oscillator
CN102323738B (en) * 2011-07-20 2014-04-02 中国科学院上海微系统与信息技术研究所 Groove type atomic gas cavity and atomic clock physical system formed by same
CN102515083A (en) * 2011-12-30 2012-06-27 东南大学 Miniature atom cavity with light incidence plane, miniature atomic clock chip and preparation methods
CN102515084A (en) * 2011-12-30 2012-06-27 东南大学 Microfluidic atom cavity, on-chip atomic clock chip and preparation method
CN102491259A (en) * 2011-12-30 2012-06-13 东南大学 MEMS miniature atom-cavity, miniature atomic clock chip and preparation method
CN103342335B (en) * 2013-06-21 2015-10-07 中国科学院上海微系统与信息技术研究所 A kind of inflation of miniature CPT atomic clock vapour of an alkali metal chamber and plugging system and method
CN103864007B (en) 2014-02-27 2016-03-30 中国电子科技集团公司第五十五研究所 The high purity alkali metal fill method that chip-scale atomic clock absorbs bubble is realized at sheet

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7893780B2 (en) * 2008-06-17 2011-02-22 Northrop Grumman Guidance And Electronic Company, Inc. Reversible alkali beam cell
EP2362281A2 (en) * 2010-02-04 2011-08-31 Honeywell International Inc. Fabrication techniques to enhance pressure uniformity in anodically bonded vapor cells
US20120243088A1 (en) * 2011-03-23 2012-09-27 Seiko Epson Corporation Gas cell, gas cell manufacturing apparatus, and gas cell manufacturing method
JP2013125907A (en) * 2011-12-15 2013-06-24 Ricoh Co Ltd Atomic oscillator manufacturing method

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
M. HASEGAWA ET AL: "Microfabrication of cesium vapor cells with buffer gas for MEMS atomic clocks", SENSORS AND ACTUATORS A: PHYSICAL, vol. 167, no. 2, 1 June 2011 (2011-06-01), pages 594 - 601, XP055006155, ISSN: 0924-4247, DOI: 10.1016/j.sna.2011.02.039 *

Also Published As

Publication number Publication date
CN103864007B (en) 2016-03-30
KR101824789B1 (en) 2018-02-01
CN103864007A (en) 2014-06-18
EP3112315A1 (en) 2017-01-04
EP3112315A8 (en) 2017-06-28
KR20160013122A (en) 2016-02-03
EP3112315B1 (en) 2021-07-14
WO2015127577A1 (en) 2015-09-03

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