EP3102910A2 - Système de capteur et procédé pour faire fonctionner un système de capteur comprenant au moins une masse sismique - Google Patents

Système de capteur et procédé pour faire fonctionner un système de capteur comprenant au moins une masse sismique

Info

Publication number
EP3102910A2
EP3102910A2 EP15700735.2A EP15700735A EP3102910A2 EP 3102910 A2 EP3102910 A2 EP 3102910A2 EP 15700735 A EP15700735 A EP 15700735A EP 3102910 A2 EP3102910 A2 EP 3102910A2
Authority
EP
European Patent Office
Prior art keywords
spatial direction
seismic mass
along
frequency
sensor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP15700735.2A
Other languages
German (de)
English (en)
Inventor
Robert Maul
Mirko Hattass
Rolf Scheben
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP3102910A2 publication Critical patent/EP3102910A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G01D21/02—Measuring two or more variables by means not covered by a single other subclass

Definitions

  • the invention relates to a sensor device. Furthermore, the invention relates to a method for operating a sensor device having at least one seismic mass.
  • PRIOR ART DE 10 2008 042 369 A1 describes coupling structures for rotation rate sensor apparatus and yaw rate sensor apparatus equipped therewith.
  • the rotation rate sensor devices described in DE 10 2008 042 369 A1 for detecting a rotation of a body both about a first axis of rotation and about a second axis of rotation have at least one first seismic mass which can be set into a harmonic with a frequency along a first spatial direction and one in one harmonic vibration with the same frequency along a second spatial direction displaceable second seismic mass.
  • the rotation rate sensor devices of DE 10 2008 042 369 A1 for detecting a rotation of the body in all three spatial directions have at least three seismic masses.
  • the invention provides a sensor device with the features of claim 1 and a method for operating a sensor device with a seismic mass having the features of claim 10.
  • Advantages of the Invention The present invention enables a reduction in the number of seismic masses needed on a sensor device. For example, by means of the present invention, a sensor device with three sensitive axes can be realized which has at most two seismic masses, in particular only one seismic mass. Specifically, by means of the present invention a
  • Yaw rate sensor device can be realized, which has at most two seismic
  • a minimization of the sensor device is therefore possible.
  • the sensor device can be made lighter. The realizable by means of the present invention minimization of the sensor device facilitates their arrangement in a measuring position.
  • the smaller and lighter sensor device can be easily attached to a body, in which a detecting or measuring his
  • the sensor device still comprises
  • the second seismic mass is displaceable in a swinging motion such that a projection of the oscillatory motion of the second seismic mass in the first spatial direction asymmetrical to the first harmonic of the first seismic mass and at the same time a projection of the oscillatory motion of the second seismic mass in the second spatial direction are asymmetric to the second harmonic of the first seismic mass.
  • asymmetric swinging motion of the second seismic mass can be
  • the first seismic mass may have at least one
  • Coupling structure to be connected to the second seismic mass. It should be noted that especially the coupling structures described in DE 10 2008 042 369 A1 can be used to connect the two seismic masses. However, the designability of the at least one coupling structure is not limited to these coupling structures.
  • the operator device is adapted to at least a first variable with respect to a periodic deflection of the first seismic mass having the first frequency along a third spatial direction inclined to the first spatial direction and the second spatial direction and / or a periodic displacement of the second seismic mass to the first Determine frequency along the third spatial direction and determine and output at least one information regarding a rotational movement of the sensor device to the second spatial direction or with respect to a aligned along the second spatial direction component of a magnetic field, taking into account the determined at least a first size.
  • a sensitive axis along the second spatial direction is realized on the sensor device, with respect to which, for example, a rate of rotation, an angular velocity, a
  • Magnetic field strength can be fixed.
  • the seismic mass is
  • the operator device can also be designed to have at least one second variable with respect to a periodic deflection of the first seismic mass with the second frequency along the third spatial direction inclined relative to the first spatial direction and the second spatial direction and / or a periodic deflection
  • the second Seismic mass with the second frequency along the third spatial direction to determine and taking into account the determined at least a second size at least one information regarding a rotational movement of the
  • Sensor device to determine the first spatial direction or with respect to a aligned along the first spatial direction component of a magnetic field and output. Especially for the previously enumerated values, therefore, another sensitive axis is also realized on the sensor device.
  • the operator device can also be designed to have at least one third variable with regard to a periodic deflection of the first seismic mass with the first frequency along the second spatial direction, a periodic deflection of the first seismic mass with the second frequency along the first spatial direction, a periodic deflection of the first seismic mass second seismic mass with the first frequency along the second spatial direction and / or a periodic deflection of the second seismic mass with the second frequency along the first spatial direction to determine and below
  • a third sensitive axis on the sensor device can be realized, which is inclined (preferably perpendicular) aligned to a plane spanned by the first spatial direction and the second spatial direction plane.
  • the operator device comprises at least one spaced apart in the first spatial direction at the first
  • Electrode at least one spaced apart in the second spatial direction of the first seismic mass and / or on the second seismic mass valve electrode and / or at least one in the third spatial direction
  • the at least one electrode can be used both for the displacement of the first seismic mass and / or the second seismic mass in the desired oscillating motion as well as for determining the above defined at least a first size, second size and / or third size are used.
  • the operator can be equipped with a multi-functional, inexpensive and easy to manufacture component.
  • the current-carrying lines are guided via the suspension springs of the seismic masses.
  • the sensor device comprises only the first seismic mass and the second seismic mass as seismic masses.
  • the sensor device is thus comparatively small and easily formable.
  • the sensor device can be a rotation rate sensor component
  • the advantageous sensor device can be designed for a variety of applications.
  • the advantages described above are also ensured when carrying out a corresponding method for operating a sensor device with at least one seismic mass.
  • the method can be further developed in accordance with the above-described embodiments of the sensor device.
  • Fig. 1 is a schematic representation of a first embodiment of
  • Fig. 2 is a schematic representation of a second embodiment of the
  • Sensor device 3 shows a schematic representation of a third embodiment of the sensor device
  • Fig. 4 is a schematic representation of a fourth embodiment of the
  • Fig. 5 is a schematic representation of a fifth embodiment of
  • FIG. 6 is a flowchart for explaining an embodiment of the present invention
  • Fig. 1 shows a schematic representation of a first embodiment of the
  • the sensor device shown schematically in FIG. 1 has only one seismic mass 10.
  • the seismic mass 10 can be understood to be a mass which has at least one (not shown) spring and / or at least one (not shown) coupling structure with a ( stationary) holder 12 is connected, that the seismic mass is adjustable with respect to the holder 12.
  • the sensor device has an operating device 14, by means of which the seismic mass 10 can be set into a swinging motion.
  • the displacement of the seismic mass 10 into its oscillating motion can be carried out by means of the operator device 14 in such a way that a projection of the oscillatory motion of the seismic mass 10 onto a first spatial direction / spatial axis 16a results in a first harmonic of the seismic mass 10 having a first frequency f1 along the first spatial direction 16a and at the same time a projection of the oscillatory motion of the seismic mass 10 onto a second spatial direction / spatial axis 16b is a second harmonic of the seismic mass 10 with a second frequency f2 along the second spatial direction 16b.
  • the second frequency f2 is not equal to the first frequency f1.
  • the second spatial direction 16b is inclined to the first spatial direction 16a.
  • the first spatial direction 16a and the second spatial direction 16b can be aligned perpendicular to one another.
  • Fig. 1 the oscillating movement of the seismic mass 10 by means of arrows 18 is shown pictorially.
  • the seismic mass 10 is preferably also connected to the holder 10 such that the seismic mass 10 is adjustable from its oscillatory movement with respect to the holder along a third spatial direction 16c oriented obliquely to the first spatial direction 16a and the second spatial direction 16b.
  • the third spatial direction / spatial axis 16 c can in particular perpendicular to one of the
  • Spaces 16a and 16b spanned plane, perpendicular to the first
  • the sensor device of FIG. 1 has only one seismic mass 10, by means of a corresponding design of the operator device 14, at least one information regarding a rotational movement of the sensor device (or the rotatable body thus investigated) or with respect to a magnetic field strength of a (not shown) magnetic field for at least two sensitive axes / spatial directions 16a, 16b and 16c, in particular for three sensitive axes / spatial directions 16a, 16b and 16c.
  • the at least one information that can be output by means of the operator device 14 can be, for example, a rate of rotation, an angular speed, a rotational speed, a rotational strength, a rotational force and / or a magnetic field strength.
  • the examples listed here for the information that can be defined by means of the operating device 14 are only examples
  • the sensor device of FIG. 1 can perform the same functions as
  • Rotary rate sensors according to the prior art with at least two harmoniously oscillating oscillating masses or conventional magnetometers, equipped with at least two harmoniously oscillating oscillating masses.
  • the simultaneous excitability of the seismic mass 10 to the first harmonic oscillation (with the first frequency f1 along the first spatial direction 16a) and to the second harmonic oscillation (with the second frequency f2 along the second spatial direction 16b) at least one more conventional manner mitbenöthne harmonic oscillating vibration mass can be saved.
  • Fig. 2 shows a schematic representation of a second embodiment of the
  • the sensor device shown schematically in Fig. 2 has a seismic mass 10 which is connected via four loop springs 20 with the holder 12.
  • the seismic mass 10 has a cuboidal basic structure, with one loop spring 22 extending from each edge running perpendicularly to the holder 12 to an anchoring region 22 on the holder 12.
  • the advantageous adjustability of the seismic mass 10 is optionally ensured along the first spatial direction 16a, along the second spatial direction 16b and along the third spatial direction 16c.
  • the reproduced in Fig. 2 connection of the seismic mass 10 to the holder 12 via the four loop springs 20 is only to be interpreted as an example.
  • the seismic mass 10 can also be connected to the holder 12 via another spring type.
  • the sensor device 10 of FIG. 2 also has the operator device 14, by means of which the seismic mass 10 can be displaced into the oscillatory movement represented by the arrows 18.
  • the seismic mass 10 shown in FIG. 2 can also be excited to oscillate such that the seismic mass 10 oscillates harmonically along the first spatial direction 16a at the first frequency f1 and harmonically along the second spatial direction 16b at the second frequency f2.
  • Fig. 3 shows a schematic representation of a third embodiment of
  • the sensor device of FIG. 3 additionally comprises a second seismic mass 10b, in addition to a first seismic mass 10a, which can be displaced by means of the operator device 14 into the oscillatory motion represented graphically by the arrows 18.
  • the second seismic mass 10b may also be understood to mean a mass which has at least one (not shown) spring and / or at least one (Not shown) coupling structure is adjustably connected to the bracket 12.
  • the second seismic mass 10b is displaceable by means of the operating device 14 into a vibrating motion represented by the arrows 24 such that a projection of the oscillating motion of the second seismic mass 10b in the first spatial direction 16a is asymmetrical to the first harmonic of the first seismic mass 10a and simultaneously Projection of the oscillatory motion of the second seismic mass 10b to the second spatial direction 16b are asymmetric to the second harmonic of the first seismic mass 10a.
  • the second seismic mass 10b displaced into the oscillatory motion reproduced by means of the arrows 24 thus oscillates harmonically with the first frequency f1 along the first spatial direction 16a and harmonically with the second frequency f2 along the second spatial direction 16b.
  • the projection of the swinging motion of the second seismic mass 10b on the first spatial direction 16a is 180 ° out of phase with the first harmonic of the first seismic mass 10a while simultaneously projecting the swinging motion of the second seismic mass 10b on the second spatial direction 16b by 180 ° out of phase with the second harmonic of the first seismic mass 10a.
  • the asymmetry of the vibrational movements of the seismic mass 10a and 10b depicted graphically by means of the arrows 18 and 24 can also be described as antiphase harmonic oscillations.
  • the asymmetry of the oscillatory movements of the seismic masses 10a and 10b facilitates a signal evaluation for determining the at least one information which can be output by means of the sensor device.
  • the asymmetry of the swinging movements of the seismic masses 10a and 10b realizes an automatic one
  • the first seismic mass 10a is connected to the second seismic mass 10b via at least one coupling structure 26.
  • the coupling structure 26 By means of the coupling structure 26, the desired asymmetry of the oscillatory movements of the seismic masses 10a and 10b can be easily accomplished.
  • the coupling structures described in DE 10 2008 042 369 A1 can be used to connect the seismic masses 10a and 10b. It should be noted, however, that the attachability of the seismic masses 10a and 10b does not depend on the use of any of them
  • FIG. 4 shows a schematic illustration of a fourth embodiment of the invention
  • each of the seismic masses 10a and 10b is connected to the holder 12 via four loop springs 20 each.
  • the seismic masses 10a and 10b are connected to one another via a coupling structure 26, which is mirror-symmetrical with respect to a first axis of symmetry 28 extending centrally between the seismic masses 10a and 10b and mirror-symmetric with respect to a second axis of symmetry 30 which centrally cuts the seismic masses 10a and 10b.
  • a first one extends
  • Web portion 32 along the second axis of symmetry 30, which is connected to a ring of eight bending springs 34 of the coupling structure 26.
  • the ring of the eight bending springs 34 is connected to the holder 12 via two second web portions 36 which extend along the first axis of symmetry 28 to one each
  • Anchoring region 38 on the bracket 12 extend. Every page on every page
  • Web section 32 and 36 each have a bending spring 34 is connected, wherein each of the connected to the first web portions 32 bending springs 34 is connected to one of the second web portions 36 connected to the bending springs 34.
  • Each spiral spring is U-shaped. The ends of all U-shaped bending springs point into the interior of the wreath.
  • the connected to the first web portions 32 bending springs 34 are by means of a
  • the bending springs 34 connected to the second web regions 36 can also be expanded by means of a comparatively small force along the second axis of symmetry 30. It should be noted, however, that not only the coupling device 26 shown in FIG. 4 ensures the desired asymmetry of the oscillatory motions of the seismic masses 10a and 10b.
  • Fig. 5 shows a schematic representation of a fifth embodiment of the
  • the operator device 14 comprises two first electrodes 40a and two second electrodes 40b, wherein one of the first electrodes 40a and one of the second electrodes 40b are spaced from the first seismic mass 10a in the first spatial direction 16a and another of the first electrodes 40a and another of the second electrodes 40b in the first spatial direction 16a are spaced from the second seismic mass 10b.
  • the first Electrodes 40a each lie on a side of the seismic masses 10a and 10b facing away from the coupling structure 26.
  • Each of the second electrodes 40b is interposed between the associated seismic mass 10a or 10b and the coupling structure 26.
  • the first and second electrodes 40a and 40b are preferably formed as plate electrodes 40a and 40b.
  • the first and second electrodes 40a and 40b are aligned as plate electrodes 40a and 40b parallel to the second spatial direction 16b and / or the (not shown) first symmetry axis 28 of the coupling structure 26.
  • the operator 14 has two third electrodes 40c and two fourth plate electrodes 40d, one of the third electrodes 40c and one of the fourth electrodes 40c
  • Electrodes 40d in the second spatial direction 16b are spaced apart on the first seismic mass 10a, and another of the third electrodes 40c and another of the fourth electrodes 40d in the second spatial direction 16b are spaced on the second seismic mass 10b.
  • the third electrodes 40c are positioned so that the seismic masses 10a and 10b simultaneously oscillate on the respectively associated third electrode 40c or at the same time oscillate away from the respective associated third electrode 40c.
  • the fourth electrodes 40d may also be arranged asymmetrically with respect to one another on the sensor device such that the seismic masses 10a and 10b act simultaneously on the respectively associated fourth
  • the third and fourth electrodes 40c and 40d may be plate electrodes 40c and 40d.
  • the third and fourth electrodes 40c and 40d are preferably parallel to the first as plate electrodes 40c and 40d
  • the operator 14 has two fifth electrodes 40e and two sixth electrodes 40f, wherein one of the fifth electrodes 40e and one of the sixth electrodes 40f are spaced apart from the first seismic mass 10a in the third spatial direction 16c and another one of the fifth electrodes 40e and another one of the sixth electrodes 40f in the third spatial direction 16c is spaced from the second seismic mass 10b.
  • the fifth electrodes 40e may also be positioned so that the seismic masses 10a and 10b simultaneously oscillate on the respectively associated fifth electrode 40e or at the same time swing away from the respective associated fifth electrode 40e.
  • the sixth electrodes 40f may be arranged such that the seismic masses 10a and 10b simultaneously oscillate on the respectively associated sixth electrode 40f or at the same time oscillate away from the respective associated sixth electrode 40f.
  • the fifth and sixth electrodes 40e and 40f may be plate electrodes 40e and 40f. In this case, the fifth and sixth electrodes 40e and 40f are preferably parallel to one of the spatial directions 16a and 16b (or the symmetry axes 28 and 30).
  • Each of the electrodes 40a to 40f realizes, together with the adjacent seismic mass 10a or 10b as a counter electrode, a capacitive plate capacitor.
  • Electrodes 40a-40d can be used both to drive the seismic masses 10a and 10b into their desired oscillatory motions and to detect / detect deflection movements of a seismic mass 10a and 10b (in addition to the ones shown in FIGS
  • the operator device 14 may be adapted to the
  • Pulsed electrodes 40a to 40d used to drive or for detecting / detecting.
  • the operator device 14 may apply to the first and / or second electrodes 40a and 40b a voltage varying at the first frequency f1 to excite the first harmonic of the seismic mass 10a and 10b and to the third and / or fourth electrodes 40c and 40d apply a voltage varying at the second frequency f2 to excite the second harmonic of the seismic masses 10a and 10b.
  • the operator device 14 may apply to the first and / or second electrodes 40a and 40b a voltage varying at the first frequency f1 to excite the first harmonic of the seismic mass 10a and 10b and to the third and / or fourth electrodes 40c and 40d apply a voltage varying at the second frequency f2 to excite the second harmonic of the seismic masses 10a and 10b.
  • Operating device 14 determine the voltage and / or capacitance present on the capacitors of the electrodes 40a to 40d. Deflection movements of the seismic masses 10a and 10b along the first spatial direction 16a can be determined by means of the first and / or second electrodes 40a and 40b. By means of the third and / or fourth electrodes 40c and 40d, deflection movements of the seismic masses 10a and 10b along the second spatial direction 16b can be recognized. As an alternative to the clocked use of the electrodes 40a to 40d as drive and detection electrodes by means of a multiplex operation, further electrodes may be formed on the sensor device. The electrodes 40e and 40f may be used to detect / detect deflection movements of the seismic masses 10a and 10b along the third
  • FIGS. 1 to 4 can also be equipped with electrodes 40a to 40f for the simultaneous multi-frequency drive and / or for the detection of the deflection movements.
  • the electrodes 40a to 40f formed as plate electrodes 40a to 40f
  • all of the embodiments described above may be equipped with another electrode type such as comb electrodes.
  • Magnetic actuators and / or piezo actuators can also be used in all embodiments for the advantageous simultaneous multi-frequency drive and / or for determining / detecting the
  • sensor devices Due to its small and easy manufacturability, sensor devices can be easily arranged / fastened to a rotatable body in such a way that the respective
  • the Coriolis force causes a deflection movement of the at least one seismic mass 10, 10a and 10b perpendicular to the drive movement and perpendicular to the axis of rotation.
  • This deflection movement of the at least one seismic mass 10, 10a and 10b can be detected / measured by means of at least one measuring element of the operator device 14.
  • At least one measuring element of the operator device 14 may e.g. a capacitive measuring element (in particular the electrodes 40a to 40f), a piezoelectric element
  • the operator device 14 may be designed, taking into account at least one variable representing the deflection movement of the at least one seismic mass 10, 10 a and 10 b, to have a yaw rate
  • Signal / warning signal can be output, which indicates that the rotatable body has rotated.
  • Signal / warning signal can be output, which indicates that the rotatable body has rotated.
  • Lorentz force-based magnetic field sensor feasible.
  • a magnetic field causes a Lorentz force on the at least one moving seismic mass 10, 10a and 10b, which likewise triggers a deflection movement of the at least one seismic mass 10, 10a and 10b oriented perpendicular to the drive movement and to the magnetic field.
  • the operator device 14 may also be designed to take into account at least one of
  • a signal / warning signal can also be output by means of the operating device as information relating to the magnetic field strength of the magnetic field. All sensor devices described above can therefore also be used (in a possibly modified form) as components for Lorentz force-based magnetic field sensors or as Lorentz force-based magnetic field sensors.
  • the operator device 14 can be formed with comparatively simple and inexpensive electronics.
  • the operator device 14 can be formed with comparatively simple and inexpensive electronics.
  • the operator device 14 may be configured to have at least a first magnitude relative to a periodic displacement of the first seismic mass 10 or 10a at the first frequency f1 along the third
  • at least one information relating to a rotational movement / partial rotational movement of the sensor device (or of the rotatable body) about the second spatial direction 16b or relative to a component of a magnetic field aligned along the second spatial direction 16b can be determined and output.
  • a harmonic oscillation of the at least one seismic mass 10, 10a and 10b with the first frequency f1 along the first spatial direction 16a cause a
  • the Coriolis force / Lorentz force (non-zero) aligned along the third spatial direction 16c triggers a periodic deflection of the at least one seismic
  • Mass 10, 10a and 10b with the first frequency f1 along the third spatial direction 16c (or out of a plane spanned by the spatial directions 16a and 16b).
  • the operator device 14 can use this physical situation.
  • the operator device 14 may be configured to have at least one second variable with respect to a periodic deflection of the first seismic mass 10 or 10a at the second frequency f2 along the third spatial direction 16c and / or a periodic deflection of the second seismic mass 10b at the second frequency f2 determine along the third spatial direction 16c and determine and output at least one information regarding a rotational movement / partial rotational movement of the sensor device about the first spatial direction 16a or with respect to a component of a magnetic field oriented along the first spatial direction 16a, taking into account the determined at least one second variable.
  • the movement of the at least one seismic mass 10, 10a and 10b with the second frequency f2 along the second spatial direction 16b in which a
  • the operator device 14 may also be designed to at least a third size with respect to a periodic deflection of the first seismic mass 10 or 10a with the first frequency f1 along the second
  • Spatial direction 16b a periodic deflection of the first seismic mass 10 or 10a with the second frequency f2 along the first spatial direction 16a, a periodic deflection of the second seismic mass 10b with the first frequency f1 along the second spatial direction 16b and / or a periodic deflection of the second seismic mass 10b with the second frequency f2 along the first spatial direction 16a to determine.
  • the operator device 14 is preferably designed to determine and output at least one information regarding a rotational movement / partial rotational movement of the sensor device around the third spatial direction 16c or with respect to a component of a magnetic field aligned along the third spatial direction 16c, taking into account the determined at least one third variable.
  • a rotational movement / partial rotational movement of the sensor device solve along the third spatial direction 16c or a magnetic field the third spatial direction 16c aligned component (non-zero) from a periodic deflection of the at least one seismic mass 10, 10a and 10b with the first frequency f1 along the second spatial direction 16b.
  • the oscillation of the at least one seismic mass 10, 10a and 10b at the second frequency f2 along the second spatial direction 16b effects a Coriolis force / Lorentz force aligned along the first spatial direction 16a, for which reason the at least one seismic mass 10, 10a and 10b performs a periodic displacement at the second frequency f2 along the first spatial direction 16a.
  • This physical situation can also be used by means of the operator device 14.
  • a difference of a capacitance existing between the first seismic mass 10a and the adjacent fifth electrode 40e may be a capacitance present between the second seismic mass 10b and the adjacent fifth electrode 40e
  • Difference capacitance signal Ce and a difference between a present between the first seismic mass 10a and the adjacent sixth electrode 40f capacitance of a present between the second seismic mass 10b and the adjacent sixth electrode 40f capacitance can be measured as differential capacitance signal Cf.
  • a demodulation of a difference of the differential capacitance signals Ce and Cf with the first frequency f1 can then be further evaluated as the at least one first variable for determining the information.
  • a demodulation of the difference of the differential capacitance signals Ce and Cf with the second frequency f2 can be determined.
  • a third size may be a difference of a capacitance existing between the first seismic mass 10a and the adjacent first electrode 40a from a capacitance present between the second seismic mass 10b and the adjacent first electrode 40a
  • Differential capacitance signal Ca and a difference between a present between the first seismic mass 10a and the adjacent second electrode 40b capacitance of a present between the second seismic mass 10b and the adjacent second electrode 40b capacitance can be measured as differential capacitance signal Cb.
  • the at least one third variable can then be determined via a demodulation of a difference of the differential capacitance signals Ca and Cb with the second frequency f2.
  • a difference between one present between the first seismic mass 10a and the adjacent third electrode 40c may also be present
  • Capacitance of a capacitance present between the second seismic mass 10b and the adjacent third electrode 40c as a differential capacitance signal Cc and a difference of a capacitance between the first seismic mass 10a and the adjacent fourth electrode 40d from one between the second seismic mass 10b and the adjacent fourth one Electrode 40d present capacity can be determined as the differential capacitance signal Cd. Also by means of a demodulation of a difference of the differential capacitance signals Cc and Cd with the first frequency f1, the at least one third variable can be fixed.
  • the oscillatory motion of the at least one seismic mass 10, 10a and 10b which is a superposition of the first harmonic (at the first frequency f1 along the first spatial direction 16a) and the second harmonic Oscillation (with the second frequency f2 along the second spatial direction 16b) can thus be used to advantage, with at most two seismic masses 10, 10a or 10b, especially with only one seismic mass 10, information / values with respect to all three spatial directions 16a , 16b and 16c.
  • each of the maximum of two seismic masses 10, 10a or 10b each of the
  • Sensor devices thus have three sensitive axes. It should also be noted that the comparatively large number of sensitive axes are ensured simultaneously with the advantages of antiparallel oscillation in all embodiments of FIGS. 3 to 5, although these only the first seismic mass 10a and the second seismic mass 10b as seismic masses 10a and 10b include / have.
  • step S1 at least one (first) seismic mass is set into oscillatory motion such that a projection of the oscillatory motion of the (first) seismic mass in a first spatial direction causes a first harmonic of the (first) seismic mass at a first frequency along the first Spatial direction and at the same time a projection of the oscillatory motion of
  • Method step S2 is still (in addition to the first seismic mass)
  • At least one second seismic mass is vibrated in such a way that a projection of the oscillatory motion of the second seismic mass in the first spatial direction oscillates asymmetrically to the first harmonic of the first seismic mass and at the same time a projection of the Oscillation of the second seismic mass in the second spatial direction asymmetric to the second harmonic of the first seismic
  • At least one of the further method steps S3 to S5 can additionally be executed.
  • a method step S3 at least one first variable with respect to a periodic deflection of the first seismic mass with the first frequency along a third spatial direction inclined relative to the first spatial direction and the second spatial direction and / or a periodic one
  • Deflection of the second seismic mass with the second frequency along the third spatial direction are determined, taking into account the determined at least one second size at least one information with respect to a
  • Spacing or with respect to a aligned along the first spatial direction component of a magnetic field is determined.
  • a method step S5 at least one third variable with respect to a periodic deflection of the first seismic mass at the first frequency along the second spatial direction, a periodic deflection of the first seismic mass with the second frequency along the first spatial direction, a periodic deflection of the second seismic mass having the first frequency along the second spatial direction, and / or a periodic displacement of the second seismic mass having the second frequency along the first spatial direction.
  • at least one information relating to a rotational movement / partial rotational movement of the sensor device about the third spatial direction or with respect to a component of a magnetic field oriented along the third spatial direction is then determined taking into account the determined at least one third variable. Examples of the at least one first, second and / or third size are already described above.
  • a yaw rate sensor or a Lorentz force-based magnetic field sensor can be operated as the sensor device

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Pressure Sensors (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

L'invention concerne un système de capteur comprenant au moins une première masse sismique (10a), et un dispositif de commande (14) permettant de produire un mouvement oscillatoire d'au moins ladite première masse sismique (10a), de telle manière qu'une projection du mouvement oscillatoire de la première masse sismique (10a) dans une première direction dans l'espace (16a) est une première oscillation harmonique de la première masse sismique (10a) à une première fréquence (F1) dans ladite première direction dans l'espace (16a), et que simultanément une projection du mouvement oscillatoire de la première masse sismique (10a) dans une seconde direction dans l'espace (16b) formant un angle avec la première direction dans l'espace (16a) est une seconde oscillation harmonique de la première masse sismique (10a) à une seconde fréquence (f2), différente de la première fréquence (f1), dans ladite seconde direction dans l'espace (16b). L'invention concerne en outre un procédé pour faire fonctionner un dispositif capteur comprenant au moins une masse sismique (10a, 10b).
EP15700735.2A 2014-02-05 2015-01-21 Système de capteur et procédé pour faire fonctionner un système de capteur comprenant au moins une masse sismique Withdrawn EP3102910A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102014202053.0A DE102014202053A1 (de) 2014-02-05 2014-02-05 Sensorvorrichtung und Verfahren zum Betreiben einer Sensorvorrichtung mit mindestens einer seismischen Masse
PCT/EP2015/051055 WO2015117817A2 (fr) 2014-02-05 2015-01-21 Système de capteur et procédé pour faire fonctionner un système de capteur comprenant au moins une masse sismique

Publications (1)

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EP3102910A2 true EP3102910A2 (fr) 2016-12-14

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EP15700735.2A Withdrawn EP3102910A2 (fr) 2014-02-05 2015-01-21 Système de capteur et procédé pour faire fonctionner un système de capteur comprenant au moins une masse sismique

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Country Link
US (1) US10260879B2 (fr)
EP (1) EP3102910A2 (fr)
JP (1) JP6273029B2 (fr)
KR (1) KR102242082B1 (fr)
DE (1) DE102014202053A1 (fr)
WO (1) WO2015117817A2 (fr)

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JP6448448B2 (ja) * 2015-04-10 2019-01-09 株式会社東芝 ジャイロセンサの角速度の取得方法及び取得装置
KR101776583B1 (ko) * 2015-07-01 2017-09-11 주식회사 신성씨앤티 멤스 자이로스코프에 사용되는 멤스 링크 기구
DE102016215975A1 (de) * 2016-08-25 2018-03-01 Robert Bosch Gmbh Verfahren zum Betrieb eines mikromechanischen Bauelements
JP7215607B2 (ja) * 2017-09-29 2023-01-31 セイコーエプソン株式会社 物理量センサー、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器および移動体
WO2023026470A1 (fr) * 2021-08-27 2023-03-02 国立大学法人東北大学 Capteur de champ magnétique et procédé de détection de champ magnétique

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Publication number Publication date
KR102242082B1 (ko) 2021-04-20
DE102014202053A1 (de) 2015-08-06
JP6273029B2 (ja) 2018-01-31
US20160356599A1 (en) 2016-12-08
JP2017506337A (ja) 2017-03-02
KR20160117464A (ko) 2016-10-10
US10260879B2 (en) 2019-04-16
WO2015117817A3 (fr) 2015-10-29
WO2015117817A2 (fr) 2015-08-13

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