EP3071903A1 - Cold head for cryogenic refrigerating machine - Google Patents

Cold head for cryogenic refrigerating machine

Info

Publication number
EP3071903A1
EP3071903A1 EP14798872.9A EP14798872A EP3071903A1 EP 3071903 A1 EP3071903 A1 EP 3071903A1 EP 14798872 A EP14798872 A EP 14798872A EP 3071903 A1 EP3071903 A1 EP 3071903A1
Authority
EP
European Patent Office
Prior art keywords
cold head
cryogenic
working space
pressure port
control valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP14798872.9A
Other languages
German (de)
French (fr)
Other versions
EP3071903B1 (en
Inventor
Gerhard Wilhelm Walter
Holger Dietz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Oerlikon Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum GmbH filed Critical Oerlikon Leybold Vacuum GmbH
Publication of EP3071903A1 publication Critical patent/EP3071903A1/en
Application granted granted Critical
Publication of EP3071903B1 publication Critical patent/EP3071903B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2309/00—Gas cycle refrigeration machines
    • F25B2309/006—Gas cycle refrigeration machines using a distributing valve of the rotary type

Definitions

  • the invention relates to a cold head for a cryogenic refrigerator.
  • WO 94/29653 describes a cold head for a cryogenic refrigerator operated with helium as a working gas and connected to a high pressure source and a low pressure source.
  • the cold head includes a multi-channel control valve that controls the connection of a high-pressure inlet and a low-pressure inlet, each with a piston-cylinder unit and with a hot-side working space of the cold finger.
  • the displacer which may include a regenerator, defines at its one end a hot side working space and at the opposite end a cold side working space. As the displacer is periodically reciprocated by the piston-cylinder unit, heat is continuously withdrawn from the housing of the coldhead. With a cold head with single-stage displacer, temperatures can be down to about 30 K produce.
  • the process gas usually helium
  • a thermodynamic cyclic process (Stirling process or Gifford-McMahon process)
  • the process gas is circulated in a closed circuit.
  • the result is that heat is extracted from the one end region of the housing enclosing the displacer.
  • the cold head is connected to a compressor. Because it is a closed circuit, both the high pressure port and the low pressure port of the cold head are connected to the compressor.
  • Such compressors usually have an overflow valve. This is arranged in a arranged between the high pressure side and the low pressure side return flow.
  • overflow valves are spring-loaded check valves, which are usually designed for a differential pressure between high and low pressure of the compressor of, for example, 18 bar. If the compressor is connected to a cold head whose resistance is very high, the working pressure on the high pressure side of the compressor will be increased. In order to dissipate this excess energy, the overflow valve opens, so that the cooling medium, in particular helium, flows via the return flow line to the low-pressure side of the compressor. Due to the cyclic process of the cold head, a pulsed gas supply from the compressor to the cold head occurs. This can set gas vibrations. This can, in particular over a long period of time, lead to frequent opening and closing of the overflow valve. As a result, considerable overloads of the overflow occur.
  • the object of the invention is to reduce the load on the overflow valve.
  • a cold head according to claim 1 for a cryogenic refrigerator has a working space in an optionally multi-part housing. In the working space a single or multi-stage displacer is arranged. Furthermore, the cold head has a high-pressure connection for the supply of highly compressed refrigerant medium to the working space and a low-pressure connection for the discharge of expanded or low-pressure refrigerant medium. Furthermore, a control valve device is provided. The control valve device is used to control the supply and removal of refrigerant in or out of the working space. In this case, the control device may have a plurality of valves, such as an inlet and an outlet valve.
  • control valve device has a multi-channel control valve, by means of which the connection between the high-pressure connection, the low-pressure connection and the working space is controlled.
  • the cold head has a bypass channel arranged between the high-pressure connection and the low-pressure connection or connecting the two connections. If necessary, excess cooling medium can flow directly from the high-pressure connection to the low-pressure connection without it passing through the cold head. Such occurring energy surpluses can thus be derived via the bypass.
  • the overflow valve integrated in the compressor is relieved.
  • the overflow valve in the compressor even eliminated completely or only be provided as a safety device. As a result, at least one significantly more cost-effective overflow valve can be used.
  • a flow regulation device is arranged in the bypass channel.
  • This is, for example, a nozzle and / or a valve.
  • the flow regulation device can be adjustable. In this case, it is possible that a fixed adjustment takes place before operation, so that the valve opens, for example, when a pressure difference is exceeded. It is further possible to allow an adjustment of the flow control device from the outside, ie from outside the cold head. In this respect, it may be possible to make the appropriate settings during operation.
  • the cold head has a movement device for moving the displacer.
  • the moving device may be a motor.
  • the motor which may be, for example, an electric motor
  • a movement of the displacer can be done by means of a slotted guide. This can be done for example via an eccentric, so that the rotational movement of the motor is converted in a simple manner in a linear movement of the displacer.
  • a piston-cylinder unit may be provided for moving the displacer.
  • the piston-cylinder unit can be operated for example via a separate hydraulic system.
  • the cold head has a distributor body in which at least one first connection channel is provided.
  • the first Connecting channel is used to connect the high-pressure connection with the working space.
  • this connection is made via the control valve device, so that the first connection channel is arranged between the control valve device and the working space.
  • the distributor body additionally has a second connection channel which is arranged between the control valve device and the low-pressure connection.
  • the valve body is designed such that it also has a control channel.
  • the control channel serves to supply and discharge of control medium to the moving means, d. H. in particular to the piston-cylinder unit.
  • the control medium is preferably the refrigeration medium.
  • FIG. 1 shows a schematic representation of a cryogenic refrigerator according to the prior art
  • FIG. 2 is a schematic representation of a cryogenic refrigerator according to the invention.
  • Figure 3 is a schematic sectional view of an inventive
  • Embodiment of a cold head Embodiment of a cold head.
  • a cryogenic refrigerator of the prior art has a compressor 10 through which refrigeration medium, such as helium, is compressed. High-pressure side, the compressor 10 is connected via a line 12 to a high pressure port 14 of a cold head 16. One Low pressure port 18 of the cold head 16 is connected via a line 20 to the low pressure side of the compressor 10. To avoid overloading of the compressor 10, a check valve 24 is disposed in a return line 22 connecting the high pressure side of the compressor 10 to the low pressure side of the compressor 10.
  • refrigeration medium such as helium
  • a working space 26 is provided, in which a displacer, not shown in Figure 1 is arranged.
  • An inlet valve 28 is connected to the high-pressure port 14, so that compressed refrigerant medium flows into the working space 26 when the inlet valve 28 is open. Via an outlet valve 30, expanded refrigerant medium can be led to the low pressure port 18.
  • a bypass channel 32 is provided in a schematic representation between the inlet valve 28 of the cold head 16 and the outlet valve 30 of the cold head 16, in which optionally a flow regulating device is arranged. As shown by dashed lines in Figure 2, by providing the bypass channel 32 according to the invention, the return line 22 and the overflow valve 24 can be omitted.
  • a preferred embodiment of the cold head 16 is shown in a schematic sectional view in FIG.
  • the cold head 16 has a housing which consists of the two housing parts 34 and 36. In the housing part 34 two cylindrical cold-side working spaces 38 and 40 for the two displacement stages 42 and 44 are housed.
  • the upper displacer 42 defines a hot side working dream 46 and is equipped with a drive piston 48 housed in a cylinder 50 of a distributor 52.
  • the displacer 42, 44 is thus arranged in a work space 38, 40, 46 consisting of several subspaces.
  • the first connection channel 56 opens into the working space 46 and serves to supply this space with the working gas. All three channels are controlled by the control valve 58.
  • the first connection channel 56 connects the control valve 58 to the hot side working space 46
  • the control channel 54 connects the valve 58 to the cylinder 50
  • the second 57 connects the valve 58 to a low pressure port 60.
  • the control valve 58 is further connected to a space 62 which communicates with a high pressure port 64.
  • the high pressure port 64 supplies helium gas at a pressure of about 20 bar, while at the low pressure port 18 helium is present at a pressure of about 5 bar.
  • Through the space 62 and the second connecting channel 57 both pressures corresponding (not shown) terminals of the control valve 58 are supplied. All lines lead into the top of the distributor body 52 and from there to the valve 58th
  • a motor 66 is housed, which drives the control valve 58 via a shaft 68. This is under the action of a compression spring 70th
  • the process gas that is subjected to the thermodynamic cycle and the drive gas for the piston-cylinder unit 48, 50 are identical. Appropriately, helium is used. It is also possible to use a gas other than the process gas as the driving gas.
  • a gas other than the process gas as the driving gas.
  • for movement of the displacer 72, 76 arranged piston-cylinder unit 48, 50 can also be a motorized movement of the displacer 72, 76, for example by means of an electric motor, take place.
  • the electric motor may be provided with an eccentric and a slide guide, so that the rotation of the eccentric is converted into a linear movement.
  • the displacer 42 has in the cylindrical working space 46 a tubular displacer 72 which is filled with a thermal regenerator 74 which is gas-permeable.
  • the regenerator 74 is used for cold storage and the release of stored cold to the inflowing warm gas.
  • the displacer 44 which has a smaller diameter than the displacer 42, a in the cylindrical working space 40 axially displaceable tubular displacer 76, which is connected to the displacer 72 and also filled with a gas-permeable regenerator 78.
  • the hot-side working chamber 46 is first connected to the high-pressure connection 64 via the first connection channel 56 and the control valve 58.
  • the high pressure in cylinder 50 is admitted via the control channel 54.
  • the displacers 72 and 76 are moved to the cold side (down).
  • the high pressure gas also flows through the regenerators 74 and 78 to the cold side. It relaxes under cooling, with further relaxation by heat exchange with the regenerators.
  • control channel 54 is connected to the low pressure port.
  • the displacers 72 and 76 are displaced toward the warm side, so that the hot side working space 46 decreases and gas flows through the regenerators 74 and 78 in the cold side working space 40.
  • control valve 58 causes the working chamber 40 is connected via the line 56 to the low pressure port 60.
  • the gas relaxes in all working spaces of the cold head under cooling.
  • the displacers 72 and 76 are moved to the cold side, whereby the volume of the cold side working space 40 is reduced to be prepared for the next cycle.
  • the cold gas flows from the working space 40 into the regenerators 74 and 78, which are thereby further cooled.
  • the frequency of the described duty cycle is about 2 Hz.
  • a bypass channel 80 according to the invention is provided in the distributor body 52.
  • the bypass channel 80 connects the second connection channel 57 to the space 62.
  • the bypass channel 80 thus connects the high-pressure connection 64 with the low-pressure connection 60.
  • a pressure-flow regulation device, such as a valve 82, is schematically shown within the bypass channel 80.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Thermal Sciences (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

A cold head for cryogenic machines comprises a displacer (72, 76) mounted in a working chamber (38, 40, 46) of a housing (34, 36). The cold head also has a high-pressure connection (64) for supplying highly compressed refrigerant and a low-pressure connection (60) for discharging expanded refrigerant. Also provided is a control valve arrangement (58) for controlling the supply and discharge of refrigerant. According to the invention there is a bypass channel (80) connecting the high-pressure connection to the low-pressure connection.

Description

Kaltkopf für Tieftemperatur-Kältemaschine  Cold head for cryogenic refrigerator
Die Erfindung betrifft einen Kaltkopf für eine Tieftemperatur-Kältemaschine. The invention relates to a cold head for a cryogenic refrigerator.
WO 94/29653 beschreibt einen Kaltkopf für eine Tieftemperatur- Kältemaschine, der mit Helium als Arbeitsgas betrieben wird und an einer Hochdruckquelle und einer Niederdruckquelle angeschlossen ist. Der Kaltkopf enthält ein mehrkanaliges Steuerventil, das die Verbindung eines Hochdruck- Einlasses und eines Niederdruck-Einlasses jeweils mit einer Kolben-Zylinder- Einheit und mit einem warmseitigen Arbeitsraum des Kaltfingers steuert. Der Verdränger, der einen Regenerator enthalten kann, begrenzt an seinem einen Ende einen warmseitigen Arbeitsraum und am gegenüberliegenden Ende einen kaltseitigen Arbeitsraum. Während der Verdränger durch die Kolben-Zylinder- Einheit periodisch hin- und herbewegt wird, wird dem Gehäuse des Kaltkopfs ständig Wärme entzogen. Mit einem Kaltkopf mit einstufigem Verdränger lassen sich Temperaturen bis herunter zu etwas 30 K erzeugen. Mit zwei- oder dreistufigen Verdrängern können Temperaturen bis unter 1 K erzeugt werden. In dem Kaltkopf wird mit dem Prozessgas, in der Regel Helium, ein thermo- dynamischer Kreisprozess (Stirling Prozess oder Gifford-McMahon-Prozess) durchgeführt, wobei das Prozessgas in einem geschlossenen Kreislauf geführt wird . Die Folge ist, dass dem einen Endbereich des den Verdränger umschließenden Gehäuses Wärme entzogen wird . Der Kaltkopf ist mit einem Kompressor verbunden. Da es sich um einen geschlossenen Kreislauf handelt, ist sowohl der Hochdruckanschluss als auch der Niederdruckanschluss des Kaltkopfs mit dem Kompressor verbunden. Derartige Kompressoren weisen üblicherweise ein Überströmventil auf. Dieses ist in einem zwischen der Hochdruckseite und der Niederdruckseite angeordneten Rückströmkanal angeordnet. Üblicherweise handelt es sich bei Überströmventilen um federbelastete Rückschlagventile, die üblicherweise auf eine Differenzdruck zwischen Hoch- und Niedrigdruck des Kompressors von beispielsweise 18 bar ausgelegt sind. Ist an den Kompressor ein Kaltkopf angeschlossen, dessen Widerstand sehr groß ist, kommt es zu einer Überhöhung des Arbeitsdrucks auf der Hochdruckseite am Kompressor. Zur Abfuhr dieser überschüssigen Energie öffnet das Überströmventil, so dass das Kältemedium, wie insbesondere Helium, über die Rückströmleitung zur Niederdruckseite des Kompressors strömt. Aufgrund des zyklischen Prozesses des Kaltkopfs erfolgt eine gepulste Gaszufuhr von dem Kompressor zu dem Kaltkopf. Hierbei können sich Gasschwingungen einstellen. Dies kann, insbesondere über einen langen Zeitraum, zu einem häufigen Öffnen und Schließen des Überströmventils führen. Hierdurch treten erhebliche Überlastungen des Überströmventils auf. Diese können zu einer Beschädigung oder sogar Zerstörung des Ventilsitzes des Überströmventils führen. Des Weiteren treten hierbei erhebliche Geräuschentwicklungen und Leistungsverluste auf. Bei einem beschädigten Überströmventil kann es ferner vorkommen, dass Öl in den Kältekreislauf gelangt. Ein weiterer Nachteil besteht darin, dass Leistungsverluste aufgrund der bestehenden Hysterese des Überströmventils zwischen Öffnungs- und Schließdruck auftreten . WO 94/29653 describes a cold head for a cryogenic refrigerator operated with helium as a working gas and connected to a high pressure source and a low pressure source. The cold head includes a multi-channel control valve that controls the connection of a high-pressure inlet and a low-pressure inlet, each with a piston-cylinder unit and with a hot-side working space of the cold finger. The displacer, which may include a regenerator, defines at its one end a hot side working space and at the opposite end a cold side working space. As the displacer is periodically reciprocated by the piston-cylinder unit, heat is continuously withdrawn from the housing of the coldhead. With a cold head with single-stage displacer, temperatures can be down to about 30 K produce. With two- or three-stage displacers temperatures below 1 K can be generated. In the cold head, the process gas, usually helium, is used to carry out a thermodynamic cyclic process (Stirling process or Gifford-McMahon process), in which the process gas is circulated in a closed circuit. The result is that heat is extracted from the one end region of the housing enclosing the displacer. The cold head is connected to a compressor. Because it is a closed circuit, both the high pressure port and the low pressure port of the cold head are connected to the compressor. Such compressors usually have an overflow valve. This is arranged in a arranged between the high pressure side and the low pressure side return flow. Usually, overflow valves are spring-loaded check valves, which are usually designed for a differential pressure between high and low pressure of the compressor of, for example, 18 bar. If the compressor is connected to a cold head whose resistance is very high, the working pressure on the high pressure side of the compressor will be increased. In order to dissipate this excess energy, the overflow valve opens, so that the cooling medium, in particular helium, flows via the return flow line to the low-pressure side of the compressor. Due to the cyclic process of the cold head, a pulsed gas supply from the compressor to the cold head occurs. This can set gas vibrations. This can, in particular over a long period of time, lead to frequent opening and closing of the overflow valve. As a result, considerable overloads of the overflow occur. These can lead to damage or even destruction of the valve seat of the overflow valve. Furthermore, considerable noise developments and power losses occur here. With a damaged overflow valve, it may also happen that oil enters the refrigeration cycle. Another disadvantage is that power losses due to the existing hysteresis of the spill valve between opening and closing pressure occur.
Aufgabe der Erfindung ist es, die Belastung des Überströmventils zu verringern. The object of the invention is to reduce the load on the overflow valve.
Erfindungsgemäß wird diese Aufgabe durch einen Kaltkopf gemäß Anspruch 1 gelöst. Der erfindungsgemäße Kaltkopf für eine Tieftemperatur-Kältemaschine weist in einem gegebenenfalls mehrteiligen Gehäuse einen Arbeitsraum auf. In dem Arbeitsraum ist ein ein- oder mehrstufiger Verdränger angeordnet. Ferner weist der Kaltkopf einen Hochdruckanschluss zur Zufuhr von hochkomprimiertem Kältemedium zu dem Arbeitsraum sowie einen Niederdruckanschluss zur Abfuhr von entspanntem bzw. einen niedrigen Druck aufweisenden Kältemedium auf. Des Weiteren ist eine Steuerventileinrichtung vorgesehen. Die Steuerventileinrichtung dient zum Steuern der Zu- und Abfuhr von Kältemedium in bzw. aus dem Arbeitsraum. Hierbei kann die Steuereinrichtung mehrere Ventile, wie beispielsweise ein Einlass- und ein Auslassventil, aufweisen . Bevorzugt ist es, dass die Steuerventileinrichtung ein mehrkanaliges Steuerventil aufweist, durch das die Verbindung zwischen dem Hochdruckanschluss, dem Niedrigdruckanschluss sowie dem Arbeitsraum gesteuert wird. Erfindungsgemäß weist der Kaltkopf einen zwischen dem Hochdruckanschluss und dem Niederdruckanschluss angeordneten bzw. die beiden Anschlüsse verbindenden Bypasskanal auf. Hierüber kann erforderlichenfalls überschüssiges Kältemedium unmittelbar von dem Hochdruckanschluss zum Niederdruckanschluss strömen, ohne dass es den Kaltkopf durchströmt. Derartige auftretende Energieüberschüsse können somit über den Bypass abgeleitet werden. Dies führt dazu, dass das in den Kompressor integrierte Überströmventil entlastet wird . Gegebenenfalls kann das Überströmventil in dem Kompressor sogar vollständig entfallen oder lediglich nur noch als Sicherheitseinrichtung vorgesehen werden. Dies führt dazu, dass zumindest ein deutlich kostengünstigeres Überströmventil verwendet werden kann . According to the invention, this object is achieved by a cold head according to claim 1. The cold head according to the invention for a cryogenic refrigerator has a working space in an optionally multi-part housing. In the working space a single or multi-stage displacer is arranged. Furthermore, the cold head has a high-pressure connection for the supply of highly compressed refrigerant medium to the working space and a low-pressure connection for the discharge of expanded or low-pressure refrigerant medium. Furthermore, a control valve device is provided. The control valve device is used to control the supply and removal of refrigerant in or out of the working space. In this case, the control device may have a plurality of valves, such as an inlet and an outlet valve. It is preferred that the control valve device has a multi-channel control valve, by means of which the connection between the high-pressure connection, the low-pressure connection and the working space is controlled. According to the invention, the cold head has a bypass channel arranged between the high-pressure connection and the low-pressure connection or connecting the two connections. If necessary, excess cooling medium can flow directly from the high-pressure connection to the low-pressure connection without it passing through the cold head. Such occurring energy surpluses can thus be derived via the bypass. As a result, the overflow valve integrated in the compressor is relieved. Optionally, the overflow valve in the compressor even eliminated completely or only be provided as a safety device. As a result, at least one significantly more cost-effective overflow valve can be used.
Bei einer besonders bevorzugten Weiterbildung der Erfindung ist in dem Bypasskanal eine Durchflussregulierungseinrichtung angeordnet. Hierbei handelt es sich beispielsweise um eine Düse und/oder ein Ventil. Die Durchflussregulierungseinrichtung kann einstellbar sein. Hierbei ist es möglich, dass vor dem Betrieb eine Festeinstellung erfolgt, so dass das Ventil beispielsweise bei Überschreiten einer Druckdifferenz öffnet. Ferner ist es möglich, eine Einstellung der Durchflussregulierungseinrichtung von außen, d. h. von außerhalb des Kaltkopfes, zu ermöglichen. Insofern ist es gegebenenfalls möglich, entsprechende Einstellungen auch während des Betriebs vorzunehmen . In a particularly preferred development of the invention, a flow regulation device is arranged in the bypass channel. This is, for example, a nozzle and / or a valve. The flow regulation device can be adjustable. In this case, it is possible that a fixed adjustment takes place before operation, so that the valve opens, for example, when a pressure difference is exceeded. It is further possible to allow an adjustment of the flow control device from the outside, ie from outside the cold head. In this respect, it may be possible to make the appropriate settings during operation.
Aufgrund des erfindungsgemäßen Vorsehens eines vorzugsweise eine Druckregulierungseinrichtung aufweisenden Bypasses in dem Kaltkopf, kann eine erhebliche Kostenreduzierung bei den verwendeten Kompressoren erzielt werden. Ferner kann die Betriebssicherheit der Kompressoren verbessert und eine Erhöhung der Kompressorleistung erzielt werden. Auch die Gefahr von Oldurchbrüchen aufgrund eines beschädigten Überströmventils im Kompressor ist reduziert. Des Weiteren sind die Standzeiten erhöht und ein gleichbleibendes Geräuschverhalten kann erzielt werden. Due to the provision according to the invention of a preferably a pressure regulating device having bypass in the cold head, a significant cost reduction in the compressors used can be achieved. Furthermore, the reliability of the compressors can be improved and an increase in compressor performance can be achieved. The risk of Oldurchbrüchen due to a damaged spill valve in the compressor is reduced. Furthermore, the service life is increased and a consistent noise behavior can be achieved.
Bei einer bevorzugten Weiterbildung der Erfindung weist der Kaltkopf eine Bewegungseinrichtung zum Bewegen des Verdrängers auf. Bei der Bewegungseinrichtung, kann es sich um einen Motor handeln. Mit Hilfe des Motors, bei dem es sich beispielsweise um einen Elektromotor handeln kann, kann eine Bewegung des Verdrängers mit Hilfe einer Kulissenführung erfolgen. Dies kann beispielsweise über einen Exzenter erfolgen, so dass die Drehbewegung des Motors auf einfache Weise in eine Linearbewegung des Verdrängers überführt wird. Alternativ kann zur Bewegung des Verdrängers eine Kolben-Zylinder-Einheit vorgesehen sein. Die Kolben-Zylinder-Einheit kann beispielsweise über ein gesondertes Hydrauliksystem betrieben werden. Bevorzugt ist es jedoch, die Kolben-Zylinder-Einheit zur Betätigung mit dem Hochdruckanschluss und dem Niederdruckanschluss zu verbinden. Das Betätigen der Kolben-Zylinder-Einheit und somit das Bewegen des Verdrängers, erfolgt somit in bevorzugter Ausführungsform mittels des Kältemediums. In a preferred development of the invention, the cold head has a movement device for moving the displacer. The moving device may be a motor. With the help of the motor, which may be, for example, an electric motor, a movement of the displacer can be done by means of a slotted guide. This can be done for example via an eccentric, so that the rotational movement of the motor is converted in a simple manner in a linear movement of the displacer. Alternatively, a piston-cylinder unit may be provided for moving the displacer. The piston-cylinder unit can be operated for example via a separate hydraulic system. However, it is preferred to connect the piston-cylinder unit for actuation with the high-pressure port and the low-pressure port. The actuation of the piston-cylinder unit and thus the movement of the displacer, thus takes place in a preferred embodiment by means of the refrigeration medium.
Des Weiteren ist es bevorzugt, dass der Kaltkopf einen Verteilkörper aufweist, in dem zumindest ein erster Verbindungskanal vorgesehen ist. Der erste Verbindungskanal dient zur Verbindung des Hochdruckanschlusses mit dem Arbeitsraum. Vorzugsweise erfolgt diese Verbindung über die Steuerventileinrichtung, so dass der erste Verbindungskanal zwischen der Steuerventileinrichtung und dem Arbeitsraum angeordnet ist. Vorzugsweise weist der Verteilkörper zusätzlich einen zweiten Verbindungskanal auf, der zwischen der Steuerventileinrichtung und dem Niederdruckanschluss angeordnet ist. Furthermore, it is preferred that the cold head has a distributor body in which at least one first connection channel is provided. The first Connecting channel is used to connect the high-pressure connection with the working space. Preferably, this connection is made via the control valve device, so that the first connection channel is arranged between the control valve device and the working space. Preferably, the distributor body additionally has a second connection channel which is arranged between the control valve device and the low-pressure connection.
In besonders bevorzugter Ausführungsform ist der Ventilkörper derart ausgebildet, dass er auch einen Steuerkanal aufweist. Der Steuerkanal dient zur Zu- und Abfuhr von Steuermedium zu der Bewegungseinrichtung, d. h. insbesondere zu der Kolben-Zylinder-Einheit. Bei dem Steuermedium handelt es sich vorzugsweise um das Kältemedium. In a particularly preferred embodiment, the valve body is designed such that it also has a control channel. The control channel serves to supply and discharge of control medium to the moving means, d. H. in particular to the piston-cylinder unit. The control medium is preferably the refrigeration medium.
Nachfolgend wird die Erfindung anhand einer bevorzugten Ausführungsform unter Bezugnahme auf die anliegenden Zeichnungen näher erläutert. The invention will be explained in more detail with reference to a preferred embodiment with reference to the accompanying drawings.
Es zeigen : Show it :
Figur 1 eine schematische Darstellung einer Tieftemperatur- Kältemaschine nach dem Stand der Technik, 1 shows a schematic representation of a cryogenic refrigerator according to the prior art,
Figur 2 eine schematische Darstellung einer Tieftemperatur- Kältemaschine gemäß der Erfindung und Figure 2 is a schematic representation of a cryogenic refrigerator according to the invention and
Figur 3 eine schematische Schnittansicht einer erfindungsgemäßen Figure 3 is a schematic sectional view of an inventive
Ausführungsform eines Kaltkopfes.  Embodiment of a cold head.
Eine Tieftemperatur-Kältemaschine nach dem Stand der Technik (Figur 1) weist einen Kompressor 10 auf, durch den Kältemedium, wie Helium, komprimiert wird . Hochdruckseitig ist der Kompressor 10 über eine Leitung 12 mit einem Hochdruckanschluss 14 eines Kaltkopfs 16 verbunden. Ein Niedrigdruckanschluss 18 des Kaltkopfes 16 ist über eine Leitung 20 mit der Niedrigdruckseite des Kompressors 10 verbunden. Zur Vermeidung von Überlastungen des Kompressors 10 ist in einer Rückströmleitung 22, die die Hochdruckseite des Kompressors 10 mit der Niedrigdruckseite des Kompressors 10 verbindet, ein Rückschlagventil 24 angeordnet. A cryogenic refrigerator of the prior art (Figure 1) has a compressor 10 through which refrigeration medium, such as helium, is compressed. High-pressure side, the compressor 10 is connected via a line 12 to a high pressure port 14 of a cold head 16. One Low pressure port 18 of the cold head 16 is connected via a line 20 to the low pressure side of the compressor 10. To avoid overloading of the compressor 10, a check valve 24 is disposed in a return line 22 connecting the high pressure side of the compressor 10 to the low pressure side of the compressor 10.
Innerhalb des Kaltkopfes 16 ist ein Arbeitsraum 26 vorgesehen, in dem ein in Figur 1 nicht dargestellter Verdrängerkolben angeordnet ist. Ein Einlassventil 28 ist mit dem Hochdruckanschluss 14 verbunden, so dass bei geöffnetem Einlassventil 28 komprimiertes Kältemedium in den Arbeitsraum 26 strömt. Über ein Auslassventil 30 kann expandiertes Kältemedium zum Niederdruckanschluss 18 geführt werden. Within the cold head 16, a working space 26 is provided, in which a displacer, not shown in Figure 1 is arranged. An inlet valve 28 is connected to the high-pressure port 14, so that compressed refrigerant medium flows into the working space 26 when the inlet valve 28 is open. Via an outlet valve 30, expanded refrigerant medium can be led to the low pressure port 18.
Bei dem in Figur 2 dargestellten prinzipiellen Aufbau eines erfindungsgemäßen Systems sind ähnliche und identische Bauteile mit denselben Bezugszeichen gekennzeichnet. In the illustrated in Figure 2 basic structure of a system according to the invention similar and identical components are identified by the same reference numerals.
Erfindungsgemäß ist in schematischer Darstellung zwischen dem Einlassventil 28 des Kaltkopfes 16 und dem Auslassventil 30 des Kaltkopfes 16 ein Bypasskanal 32 vorgesehen, in der gegebenenfalls eine Durchflussregulierungseinrichtung angeordnet ist. Wie in Figur 2 gestrichelt dargestellt, können durch Vorsehen des erfindungsgemäßen Bypasskanals 32 die Rückströmleitung 22 sowie das Überströmventil 24 entfallen. According to the invention, a bypass channel 32 is provided in a schematic representation between the inlet valve 28 of the cold head 16 and the outlet valve 30 of the cold head 16, in which optionally a flow regulating device is arranged. As shown by dashed lines in Figure 2, by providing the bypass channel 32 according to the invention, the return line 22 and the overflow valve 24 can be omitted.
Eine bevorzugte Ausführungsform des Kaltkopfes 16 ist in schematischer Schnittansicht in Figur 3 dargestellt. A preferred embodiment of the cold head 16 is shown in a schematic sectional view in FIG.
Der Kaltkopf 16 hat ein Gehäuse, welches aus den beiden Gehäuseteilen 34 und 36 besteht. Im Gehäuseteil 34 sind zwei zylindrische kaltseitige Arbeitsräume 38 und 40 für die beiden Verdrängerstufen 42 und 44 untergebracht. Die obere Verdrängerstufe 42 begrenzt einen warmseitigen Arbeitstraum 46 und sie ist mit einem Antriebskolben 48 ausgerüstet, der in einem Zylinder 50 eines Verteilkörpers 52 untergebracht ist. Der Verdränger 42, 44 ist somit in einem aus mehreren Teilräumen bestehen Arbeitsraum 38, 40, 46 angeordnet. The cold head 16 has a housing which consists of the two housing parts 34 and 36. In the housing part 34 two cylindrical cold-side working spaces 38 and 40 for the two displacement stages 42 and 44 are housed. The upper displacer 42 defines a hot side working dream 46 and is equipped with a drive piston 48 housed in a cylinder 50 of a distributor 52. The displacer 42, 44 is thus arranged in a work space 38, 40, 46 consisting of several subspaces.
Der Verteilkörper 52 begrenzt den warmseitigen Arbeitsraum 46. Er ist mit Bohrungen ausgestattet, die einen Steuerkanal 54, einen ersten Verbindungskanal 56 sowie einen zweiten Verbindungskanal 57 bilden. Der erste Verbindungskanal 56 mündet in den Arbeitsraum 46 und dient der Versorgung dieses Raumes mit dem Arbeitsgas. Alle drei Kanäle werden von dem Steuerventil 58 gesteuert. Der erste Verbindungskanal 56 verbindet das Steuerventil 58 mit dem warmseitigen Arbeitsraum 46, der Steuerkanal 54 verbindet das Ventil 58 mit dem Zylinder 50 und der zweite 57 verbindet das Ventil 58 mit einem Niederdruckanschluss 60. Das Steuerventil 58 ist ferner mit einem Raum 62 verbunden, der mit einem Hochdruckanschluss 64 in Verbindung steht. Der Hochdruckanschluss 64 liefert Helium-Gas mit einem Druck von ca. 20 bar, während an dem Niederdruck-Anschluss 18 Helium mit einem Druck von etwa 5 bar ansteht. Durch den Raum 62 bzw. den zweiten Verbindungskanal 57 werden beide Drücke entsprechenden (nicht dargestellten) Anschlüssen des Steuerventils 58 zugeführt. Sämtliche Leitungen führen in die Oberseite des Verteil körpers 52 und von dort zu dem Ventil 58. It is equipped with bores which form a control channel 54, a first connection channel 56 and a second connection channel 57. The first connection channel 56 opens into the working space 46 and serves to supply this space with the working gas. All three channels are controlled by the control valve 58. The first connection channel 56 connects the control valve 58 to the hot side working space 46, the control channel 54 connects the valve 58 to the cylinder 50 and the second 57 connects the valve 58 to a low pressure port 60. The control valve 58 is further connected to a space 62 which communicates with a high pressure port 64. The high pressure port 64 supplies helium gas at a pressure of about 20 bar, while at the low pressure port 18 helium is present at a pressure of about 5 bar. Through the space 62 and the second connecting channel 57 both pressures corresponding (not shown) terminals of the control valve 58 are supplied. All lines lead into the top of the distributor body 52 and from there to the valve 58th
In dem Gehäuseteil 36 ist ein Motor 66 untergebracht, der über eine Welle 68 das Steuerventil 58 antreibt. Dieses steht unter der Wirkung einer Druckfeder 70. In the housing part 36, a motor 66 is housed, which drives the control valve 58 via a shaft 68. This is under the action of a compression spring 70th
Bei dem dargestellten Ausführungsbeispiel sind das Prozessgas, das dem thermodynamischen Kreisprozess unterworfen ist und das Antriebsgas für die Kolben-Zylinder-Einheit 48, 50 identisch. Zweckmäßig wird Helium eingesetzt. Man kann auch als Antriebsgas ein anderes Gas als das Prozessgas benutzen. Anstelle der im dargestellten Ausführungsbeispiel zur Bewegung der Verdränger 72, 76 angeordneten Kolben-Zylinder-Einheit 48, 50 kann auch eine motorische Bewegung der Verdränger 72, 76, beispielweise mit Hilfe eines Elektromotors, erfolgen. Hierzu kann der Elektromotor mit einem Exzenter und einer Kulissenführung versehen sein, so dass die Drehung des Exzenters in eine Linearbewegung überführt wird . In the illustrated embodiment, the process gas that is subjected to the thermodynamic cycle and the drive gas for the piston-cylinder unit 48, 50 are identical. Appropriately, helium is used. It is also possible to use a gas other than the process gas as the driving gas. Instead of in the illustrated embodiment, for movement of the displacer 72, 76 arranged piston-cylinder unit 48, 50 can also be a motorized movement of the displacer 72, 76, for example by means of an electric motor, take place. For this purpose, the electric motor may be provided with an eccentric and a slide guide, so that the rotation of the eccentric is converted into a linear movement.
Die Verdrängerstufe 42 weist in dem zylindrischen Arbeitsraum 46 einen rohrförmigen Verdränger 72 auf, der mit einem thermischen Regenerator 74 ausgefüllt ist, der gasdurchlässig ist. Der Regenerator 74 dient der Kältespeicherung und der Abgabe von gespeicherter Kälte an das nachströmende warme Gas. The displacer 42 has in the cylindrical working space 46 a tubular displacer 72 which is filled with a thermal regenerator 74 which is gas-permeable. The regenerator 74 is used for cold storage and the release of stored cold to the inflowing warm gas.
In gleicher Weise enthält die Verdrängerstufe 44, die einen kleineren Durchmesser hat als die Verdrängerstufe 42, einen in dem zylindrischen Arbeitsraum 40 axial verschiebbaren rohrförmigen Verdränger 76, der mit dem Verdränger 72 verbunden und ebenfalls mit einem gasdurchlässigen Regenerator 78 gefüllt ist. In the same way, the displacer 44, which has a smaller diameter than the displacer 42, a in the cylindrical working space 40 axially displaceable tubular displacer 76, which is connected to the displacer 72 and also filled with a gas-permeable regenerator 78.
Beim Betrieb des Kaltfingers wird zunächst der warmseitige Arbeitsraum 46 über den ersten Verbindungskanal 56 und das Steuerventil 58 mit dem Hochdruckanschluss 64 verbunden. Gleichzeitig wird über den Steuerkanal 54 der Hochdruck in Zylinder 50 eingelassen. Die Verdränger 72 und 76 werden zur Kaltseite (nach unten) verschoben. Das unter Hochdruck stehende Gas strömt durch die Regeneratoren 74 und 78 ebenfalls zur Kaltseite. Dabei entspannt es sich unter Abkühlung, wobei eine weitere Entspannung durch Wärmeaustausch mit den Regeneratoren erfolgt. During operation of the cold finger, the hot-side working chamber 46 is first connected to the high-pressure connection 64 via the first connection channel 56 and the control valve 58. At the same time, the high pressure in cylinder 50 is admitted via the control channel 54. The displacers 72 and 76 are moved to the cold side (down). The high pressure gas also flows through the regenerators 74 and 78 to the cold side. It relaxes under cooling, with further relaxation by heat exchange with the regenerators.
In der zweiten Phase wird der Steuerkanal 54 mit dem Niederdruck-Anschluss verbunden. Unter der Wirkung des Hochdrucks werden die Verdränger 72 und 76 zur Warmseite hin verschoben, so dass der warmseitige Arbeitsraum 46 sich verkleinert und Gas durch die Regeneratoren 74 und 78 in den kaltseitigen Arbeitsraum 40 strömt. In the second phase, the control channel 54 is connected to the low pressure port. Under the action of the high pressure, the displacers 72 and 76 are displaced toward the warm side, so that the hot side working space 46 decreases and gas flows through the regenerators 74 and 78 in the cold side working space 40.
In der dritten Phase bewirkt das Steuerventil 58, dass der Arbeitsraum 40 über die Leitung 56 mit dem Niederdruck-Anschluss 60 verbunden wird . Dadurch entspannt sich das Gas in sämtlichen Arbeitsräumen des Kaltkopfes unter Abkühlung. In the third phase, the control valve 58 causes the working chamber 40 is connected via the line 56 to the low pressure port 60. As a result, the gas relaxes in all working spaces of the cold head under cooling.
Anschließend werden die Verdränger 72 und 76 zur Kaltseite bewegt, wodurch sich das Volumen des kaltseitigen Arbeitsraumes 40 verkleinert, um für den nächsten Zyklus vorbereitet zu sein . In dieser Phase strömt das kalte Gas aus dem Arbeitsraum 40 in die Regeneratoren 74 und 78, die dadurch weiter abgekühlt werden. Subsequently, the displacers 72 and 76 are moved to the cold side, whereby the volume of the cold side working space 40 is reduced to be prepared for the next cycle. In this phase, the cold gas flows from the working space 40 into the regenerators 74 and 78, which are thereby further cooled.
Die Frequenz des beschriebenen Arbeitszyklus beträgt etwa 2 Hz. The frequency of the described duty cycle is about 2 Hz.
Ferner ist in dem dargestellten Ausführungsbeispiel in dem Verteilkörper 52 ein erfindungsgemäßer Bypasskanal 80 vorgesehen. Der Bypasskanal 80 verbindet den zweiten Verbindungskanal 57 mit dem Raum 62. Der Bypasskanal 80 verbindet somit den Hochdruckanschluss 64 mit dem Niederdruckanschluss 60. Innerhalb des Bypasskanals 80 ist schematisch dargestellt eine Druckflussregulierungseinrichtung, wie ein Ventil 82, angeordnet. Bei einem in dem Raum 62 ungewollt hohen Druckanstieg strömt somit ein Teil des Kältemediums unmittelbar durch den Bypasskanal 80 zurück in den mit dem Niedrigdruckanschluss 60 verbundenen Kanal 57. Furthermore, in the illustrated exemplary embodiment, a bypass channel 80 according to the invention is provided in the distributor body 52. The bypass channel 80 connects the second connection channel 57 to the space 62. The bypass channel 80 thus connects the high-pressure connection 64 with the low-pressure connection 60. A pressure-flow regulation device, such as a valve 82, is schematically shown within the bypass channel 80. With an unintentionally high pressure rise in the space 62, therefore, a portion of the refrigerant medium flows directly through the bypass passage 80 back into the channel 57 connected to the low-pressure port 60.

Claims

Ansprüche  claims
Kaltkopf für Tieftemperatur-Kältemaschinen, mit Cold head for cryogenic refrigerators, with
Einem in einem Arbeitsraum (38, 40, 46) eines Gehäuses (34, 36) angeordneten Verdränger (72, 76), einem Hochdruckanschiuss (64) zur Zufuhr von hochkomprimiertem Kältemedium in den Arbeitsraum (38, 40, 46), einem Niederdruckanschluss (60) zur Abfuhr entspannten Kältemediums aus dem Arbeitsraum (38, 40, 46) und einer Steuerventileinrichtung (28, 30; 58) zum Steuern der Zu- und Abfuhr von Kältemedium in bzw. aus dem Arbeitsraum (38, 40, 46), gekennzeichnet durch einen den Hochdruckanschiuss (64) mit dem Niederdruckanschluss (60) verbindenden Bypasskanal (80). A displacer (72, 76) arranged in a working space (38, 40, 46) of a housing (34, 36), a high pressure port (64) for supplying highly compressed cryogen into the working space (38, 40, 46), a low pressure port ( 60) for discharging expanded refrigerant medium from the working space (38, 40, 46) and a control valve device (28, 30, 58) for controlling the supply and removal of refrigerant medium into and out of the working space (38, 40, 46) by a bypass channel (80) connecting the high-pressure connection (64) to the low-pressure connection (60).
Kaltkopf für Tieftemperatur-Kältemaschinen nach Anspruch 1, dadurch gekennzeichnet, dass in dem Bypasskanal (80) eine Durchflussregulierungseinrichtung (82) angeordnet ist. Cold head for cryogenic refrigerating machines according to claim 1, characterized in that in the bypass channel (80) a flow regulating device (82) is arranged.
Kaltkopf für Tieftemperatur-Kältemaschinen nach Anspruch 2, dadurch gekennzeichnet, dass die Durchflussregulierungseinrichtung (82) insbesondere während des Betriebs einstellbar ist. Cold head for cryogenic refrigerating machines according to claim 2, characterized in that the flow regulating device (82) is adjustable, in particular during operation.
4. Kaltkopf für Tieftemperatur-Kältemaschinen nach einem der Ansprüche 1 - 3, gekennzeichnet durch eine Bewegungseinrichtung (48, 50) zum Bewegen des Verdrängers (72, 76). 4. Cold head for cryogenic refrigerating machines according to one of claims 1 - 3, characterized by a movement device (48, 50) for moving the displacer (72, 76).
5. Kaltkopf für Tieftemperatur-Kältemaschinen nach Anspruch 4, dadurch gekennzeichnet, dass die Bewegungseinrichtung als Kolben-Zylinder- Einheit (48, 50) ausgebildet ist, die zur Betätigung vorzugsweise mit dem Hochdruckanschluss (64) und dem Niederdruckanschluss (60) verbunden ist. 5. Cold head for cryogenic refrigerators according to claim 4, characterized in that the movement device as a piston-cylinder unit (48, 50) is formed, which is preferably connected to the operation of the high pressure port (64) and the low pressure port (60).
6. Kaltkopf für Tieftemperatur-Kältemaschinen nach Anspruch 4, dadurch gekennzeichnet, dass die Bewegungseinrichtung einen Motor, insbesondere einen Elektromotor, aufweist. 6. Cold head for cryogenic refrigerating machines according to claim 4, characterized in that the movement device comprises a motor, in particular an electric motor.
7. Kaltkopf für Tieftemperatur-Kältemaschinen nach Anspruch 6, dadurch gekennzeichnet, dass der Elektromotor einen Exzenter antreibt, der auf eine Kulissenführung einwirkt um eine Linearbewegung des Verdrängers (72, 76) zu bewirken. 7. Cold head for cryogenic refrigerators according to claim 6, characterized in that the electric motor drives an eccentric, which acts on a slotted guide to a linear movement of the displacer (72, 76) to effect.
8. Kaltkopf für Tieftemperatur-Kältemaschinen nach einem der Ansprüche 1 - 7, dadurch gekennzeichnet, dass die Steuerventileinrichtung (28, 30; 58) ein zyklisch arbeitendes mehrkanaliges Steuerventil (58) aufweist, das den Anschluss eines Arbeitsraums (38, 40 ,46) an einen Hochdruckanschluss (64) und einen Niederdruckanschluss (60) steuert. 8. Cold head for cryogenic refrigerators according to one of claims 1-7, characterized in that the control valve device (28, 30, 58) has a cyclically operating multi-channel control valve (58), the connection of a working space (38, 40, 46) to a high pressure port (64) and a low pressure port (60).
9. Kaltkopf für Tieftemperatur-Kältemaschinen nach Anspruch 8, dadurch gekennzeichnet, dass das Steuerventil (58) den Anschluss der Kolben- Zylinder-Einheit (48, 50) steuert. 9. Cold head for cryogenic refrigerators according to claim 8, characterized in that the control valve (58) controls the connection of the piston-cylinder unit (48, 50).
10. Kaltkopf für Tieftemperatur-Kältemaschinen nach einem der Ansprüche 1 - 9, gekennzeichnet durch einen Verteilkörper (52), in dem zumindest ein erster Verbindungskanal (56) zur Verbindung des Hochdruckanschlusses (64) mit dem Arbeitsraum (38, 40, 46) vorgesehen ist. 10. Cold head for cryogenic refrigerating machines according to one of claims 1 - 9, characterized by a distributor body (52), in which at least a first connecting channel (56) for connecting the High-pressure port (64) with the working space (38, 40, 46) is provided.
11. Kaltkopf für Tieftemperatur-Kältemaschinen nach Anspruch 10, dadurch gekennzeichnet, dass der erste Verbindungskanal (56) zwischen dem Steuerventil (58) und dem Arbeitsraum (38, 40, 46) angeordnet ist. 11. Cold head for cryogenic refrigerating machines according to claim 10, characterized in that the first connecting channel (56) between the control valve (58) and the working space (38, 40, 46) is arranged.
12. Kaltkopf für Tieftemperatur-Kältemaschinen nach Anspruch 10 oder 11, dadurch gekennzeichnet, dass der Verteilkörper (52) einen zweiten Verbindungskanal (57) zwischen dem Steuerventil (58) und dem Niedrigdruckanschluss (60) aufweist. 12. Cold head for cryogenic refrigerators according to claim 10 or 11, characterized in that the distributor body (52) has a second connecting channel (57) between the control valve (58) and the low pressure port (60).
13. Kaltkopf für Tieftemperatur-Kältemaschinen nach einem der Ansprüche 10 - 12, dadurch gekennzeichnet, dass der Verteilkörper (52) einen Steuerkanal (54) zur Zu- und/oder Abfuhr von Steuermedium, insbesondere Kältemedium, zu der Kolben-Zylinder-Einheit (48, 50) aufweist. 13. Cold head for cryogenic refrigerators according to any one of claims 10 - 12, characterized in that the distributor body (52) has a control channel (54) for supplying and / or removal of the control medium, in particular cryogenic medium, to the piston-cylinder unit ( 48, 50).
EP14798872.9A 2013-11-18 2014-11-14 Cold head for cryogenic refrigerating machine Active EP3071903B1 (en)

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DE202013010352.3U DE202013010352U1 (en) 2013-11-18 2013-11-18 Cold head for cryogenic refrigerator
PCT/EP2014/074623 WO2015071418A1 (en) 2013-11-18 2014-11-14 Cold head for cryogenic refrigerating machine

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US20160273809A1 (en) 2016-09-22
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JP6525998B2 (en) 2019-06-05
CN105814375A (en) 2016-07-27
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CN105814375B (en) 2017-11-24
KR20160086841A (en) 2016-07-20

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