EP3067560B1 - Vacuum pump with at least one pump stage - Google Patents
Vacuum pump with at least one pump stage Download PDFInfo
- Publication number
- EP3067560B1 EP3067560B1 EP15158724.3A EP15158724A EP3067560B1 EP 3067560 B1 EP3067560 B1 EP 3067560B1 EP 15158724 A EP15158724 A EP 15158724A EP 3067560 B1 EP3067560 B1 EP 3067560B1
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- EP
- European Patent Office
- Prior art keywords
- pump
- vacuum pump
- seals
- pressure
- spiral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/04—Measures to avoid lubricant contaminating the pumped fluid
- F04B39/041—Measures to avoid lubricant contaminating the pumped fluid sealing for a reciprocating rod
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/20—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00 by changing the driving speed
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
- F04C29/0085—Prime movers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/01—Pressure before the pump inlet
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/03—Pressure in the compression chamber
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/05—Speed
- F04C2270/052—Speed angular
- F04C2270/0525—Controlled or regulated
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/18—Pressure
- F04C2270/185—Controlled or regulated
Definitions
- the invention relates to a vacuum pump with at least one pump stage.
- backing pumps In vacuum technology, the term "backing pumps" is usually used to describe vacuum pumps that expel against the atmosphere. This name goes back to the fact that it is often used in combination with such vacuum pumps that can generate a high vacuum, but do not compress to atmospheric pressure.
- An example of such a high vacuum pump is the turbo molecular pump.
- Examples of backing pumps are vacuum displacement pumps, such as rotary vane pumps and piston pumps. The backing pumps are very often multi-stage, since the high vacuum pumps combined with them only generate a pressure of a few millibars at their gas outlet and therefore a large pressure range has to be bridged.
- the backing pump Both when used as a backing pump and when it is used to independently generate an ultimate vacuum in a recipient, the backing pump must first compress large amounts of gas. For the common design of a piston pump, this means that it must have a correspondingly large suction chamber. In these examples, the amount of gas that can be compressed per unit of time is dependent on the maximum pump chamber volume and the frequency with which the pump chamber is changed from its maximum to its minimum size. If there is little gas, the backing pump is oversized in terms of pump chamber volume and speed. However, the power consumption of the backing pump also depends on these values and it is desirable to minimize this.
- vacuum pumps are known, for example reciprocating piston pumps, which seals between the piston and the inner wall of the pump chamber exhibit. Since these seals create the contact between the piston and cylinder, these are so-called wear-prone seals that wear out over time. This also reduces the pumping capacity of the pump over time.
- Scroll pumps are also called spiral vacuum pumps or spiral fluid conveying devices. These pumps work on the positive displacement principle.
- a spiral vacuum pump consists of two nested spiral cylinders (e.g. Archimedes' spirals or involutes). One of these spirals is stationary, the other moves on a circular path via an eccentric drive (eccentric gear, eccentric shaft).
- the fluid to be pumped for example gas
- the fluid to be pumped for example gas
- the height of the spiral walls, their spacing and the speed define the suction power of a spiral vacuum pump.
- Seals which are in frictional contact with the stator, are arranged between the spiral cylinders forming the structure of the spiral and the bearing surface on the stator side. These seals wear out over time. When worn, the cavities become leaky and the suction power of the spiral vacuum pump decreases.
- U.S. 5,718,565 A includes a dry compressing vacuum pump, in which with pressure gauges, whose sensors are located in the inlet or outlet of the pump stages to be monitored, pressure conditions are measured. As the build-up of deposits in the pump increases, the pressure ratio increases. This is recorded by the pressure measuring devices. This prior art vacuum pump can be further improved.
- JP 2003-139055A a dry compressing vacuum pump, in which a pressure measurement is carried out in an inlet area of the pump. This pump has no seals that are prone to wear.
- JP 2006-322405A an oil-lubricated vacuum pump. This pump has no seals that are prone to wear.
- the state of the art ( CA 2752655 A1 ) a vacuum pump.
- This prior art pump has a pressure sensor which is arranged upstream of an inlet valve. The sensor detects the pressure, which indicates a defective seal.
- This prior art vacuum pump can be improved even further with regard to fault detection.
- the technical problem on which the invention is based consists in this vacuum pump, which belongs to the prior art To be further improved to the effect that the service life of wear-prone seals in the vacuum pump is increased. In addition, a method is to be specified with which the wear on seals in the vacuum pump can be detected at an early stage.
- the vacuum pump according to the invention with at least one pump stage, a motor and a motor controller, the vacuum pump being designed as a dry-running pump with seals subject to wear, in which at least one pressure sensor is arranged in front of the first pump stage and / or in at least one compression chamber of the vacuum pump and in which the Pressure sensor is connected to an evaluation unit, with a display device being provided to display a defective and / or reduced performance of the vacuum pump, is characterized in that a signal line leads from the pressure sensor to an evaluation unit, which in turn is connected to a motor control and that so that wear on the seals is detected.
- the vacuum pump according to the invention can be designed as a piston pump, for example a reciprocating piston pump.
- This reciprocating piston pump has at least one pump stage.
- the vacuum pump according to the invention can also be designed as a scroll pump with at least one pump stage.
- the inventive arrangement of the at least one pressure sensor upstream of the first pumping stage and / or in at least one compression chamber of the vacuum pump makes it possible to carry out a more precise measurement of the pressure that can be generated, thereby enabling more precise control of the speed is possible than with a pressure switch between the pump stages.
- a display device for displaying a defective and / or reduced performance of the vacuum pump. If, for example, when closing the additional valve for closing the suction opening of the vacuum pump, a predetermined final pressure is not reached, it can be assumed that the seals are subject to a certain degree of wear. This reduced output is shown in the display device so that the user of the vacuum pump can read the current pressure value.
- the user can also be informed on the display device that maintenance of the vacuum pump is necessary.
- the display device can have a display or at least one LED. Acoustic signals can also be emitted.
- the at least one pressure sensor is arranged in the suction area of the vacuum pump. This enables the speed to be controlled very precisely, since the pressure sensor can be used to detect how high the suction pressure of the vacuum pump is.
- Another particularly preferred embodiment of the invention provides that an additional valve is provided for closing a suction opening of the vacuum pump.
- the vacuum pump has a suction opening.
- the suction opening is connected to a recipient.
- this suction opening is closed by an additional valve.
- the vacuum pump can carry out an independent check of the final pressure, for example when the vacuum pump is switched on. From this final pressure, the vacuum pump can deduce the wear of the seals, i.e. the piston seals or the seals of the scroll pump.
- the final pressure is checked in the relatively limited and small space of the intake flange. The measurement takes place independently of the recipient.
- the at least one sensor is designed as a Pirani sensor. Pirani sensors are very reliable sensors.
- the vacuum pump is advantageously designed as a scroll pump.
- a scroll pump is a dry-running pump. Dry-running pumps are pumps that do not use auxiliary fluids, such as oil, in the area of the work area and in which a contamination of the working medium can be avoided.
- a method for operating a scroll pump or a vacuum pump with at least two pump stages can provide that im Pump operation of the pressure sensor a gas pressure in the suction area and / or in at least one compression chamber of the vacuum pump measures that the measured value (s) of the pressure sensor is or are evaluated by an evaluation unit and that the speed of the pump is set as a function of an evaluation result.
- the method has the advantage that by measuring the achievable pressure, i.e. the gas pressure in the suction area and / or in at least one compression chamber of the vacuum pump, the condition of the pump, in particular the seals, can be precisely recorded.
- the measured value or values of the pressure sensor are evaluated by an evaluation unit.
- the evaluation unit advantageously stores the range in which the measured values ideally lie.
- the speed of the pump is set as a function of the evaluation result.
- high speeds are set at high inlet pressures and low speeds at low inlet pressures in order to achieve optimum pumping speed.
- a method not belonging to the invention for operating a vacuum pump or a scroll pump is characterized in that when the vacuum pump is started, a valve which has a The suction area separates from a recipient, it is concluded that the pressure sensor measures a gas pressure in the suction area closed against the recipient and / or in at least one compression chamber of the vacuum pump, that the measured value or values of the pressure sensor are evaluated by an evaluation unit and that depending on an evaluation result information is output from the display unit regarding the wear of seals.
- the method has the advantage that the vacuum pump can carry out an independent check of the final pressure when it starts. From the final pressure the evaluation unit of the vacuum pump can deduce the wear of the seals.
- the speed is regulated as a function of a measured value given by the at least one pressure sensor. If the pressure sensor measures a high inlet pressure, the speed can be increased. At low inlet pressures, the speed is reduced in order to achieve an optimal pumping speed.
- a switch is made between two rotational speeds depending on the measured value given by the at least one pressure sensor.
- the speed is set depending on the evaluation result. This can be a switching process between two or more specified speeds. However, this can also be a continuous process in which the engine control electronics change the speed it generates as a function of a measured value transmitted to it.
- the vacuum pump automatically lowers the speed or changes to a standby mode.
- the speed is advantageously reduced when the signal from the pressure sensor reaches a pressure below this the atmospheric pressure corresponds.
- this pressure can be a pressure close to the ultimate pressure of the vacuum pump.
- the quantities of gas to be conveyed are particularly small here, so that the speed can be reduced further.
- the pump advantageously automatically switches to stand-by mode when the suction pressure has fallen below a certain limit value.
- Fig. 1 shows a spiral vacuum pump 1 with a first stage 2 and a second stage 3.
- the invention also works with single-stage spiral vacuum pumps.
- the first stage 2 consists of an orbiting disk 4 and a stator 5.
- the orbiting disk 4 carries a spiral 6.
- the stator 5 carries a spiral 7.
- the spirals 6 and 7 are arranged in an interlocking manner.
- the spiral 6 seals against the stator 5.
- the stator 5 can have a so-called hard coat coating or some other hard coating on a counter surface 8.
- the orbiting disk 4 is in three shafts 9, of which in Fig. 1 only two shafts are shown, orbiting.
- the shafts 9 are rotatably mounted in a stator 10 by means of ball bearings 11.
- the second stage 3 also has an orbiting disk 12 and a stator 13.
- the disk 12 carries a spiral 14, the stator 13 carries a spiral 15.
- the spirals 14, 15 are also arranged in an interlocking manner.
- the orbiting disk 12 is mounted in ball bearings by means of the shafts 9 in the stator disk 10.
- the shafts 9 have a shaft section 16 which is mounted in the stator 10.
- the shafts 9 also each have two shaft sections 17, 18 which are offset from the shaft section 16. The orbital movement of the disks 4, 12 is caused by the offset 17, 18.
- the orbiting movement is driven by means of an electric motor which consists of a motor stator 19 and a motor orbiter 20.
- the motor orbiter 20 consists according to Fig. 1 made of permanent magnets.
- the motor stator 10 has excitable electromagnets which, when supplied with current, cause the orbiting movement of the disks 4, 12 and thus the spirals 6, 14. If the electric motor, that is to say the electromagnet 19 thereof, is energized, the electric motor acts as a drive so that the in the spaces between the two spirals 6, 7; 14, 15 arranged gas is compressed. The gas is transported from an inlet 21 of each stage 2, 3 to an outlet 22 and is compressed in the process.
- a corrugated bellows 24 is provided in each pumping stage to seal off pumping spaces 23.
- the bellows can also serve as an anti-rotation mechanism if necessary.
- a check valve 25 is arranged in each of the outlets 22. The non-return valve 25 prevents the spiral vacuum pump 1 from being ventilated back after the drive 18, 19 has been switched off. Thus, the spirals 6, 7; 14, 15 against the specified direction of rotation can be avoided.
- a gas ballast valve 26 is provided in each pumping stage. Gas is pumped from the atmosphere through the gas ballast valve 26 into the pump chamber 23 in order to avoid condensation of the gas to be pumped.
- the corrugated bellows 24 serve only to seal off the pump spaces 23. In principle, the corrugated bellows 24 can also serve as a rotation-preventing mechanism.
- the scroll vacuum pump 1 has only one shaft, a rotation preventing mechanism is required. This task can be taken over by the corrugated bellows 24, for example.
- the scroll vacuum pump 1 can also have two or more shafts. With more than two shafts, an anti-rotation mechanism is usually not required.
- the shafts 9 are rotatably mounted in the disks 4, 12 via ball bearings 11.
- the electric motor 19, 20 can also be constructed in such a way that the motor orbiter 20 consists of a soft magnetic material, for example iron.
- the electromagnets arranged in the motor stator 19 can for example be designed as coils. In principle, there is also the possibility of forming the motor orbiter 20 from electromagnets and the motor stator 19 from permanent magnets or from a soft magnetic material, for example.
- the spiral 6 carries seals 29.
- the spiral 7 carries seals 30.
- Fig. 2 shows the spiral vacuum pump 1 with the spirals 6 and 7.
- the spirals 6 and 7 form compression spaces 23a, 23b; 54a, 54b; 55a, 55b.
- the pressure sensor or sensors can be located in the compression spaces 23a, 23b; 54a, 54b; 55a, 55b.
- at least one additional pressure sensor can be provided in the area of a pump inlet 21 (in Fig. 1 ).
- Fig. 3 shows a reciprocating piston pump 101 with a housing 102.
- the housing 102 receives a shaft 104 which is rotatably supported in shaft bearings 106, 107.
- the shaft 104 carries permanent magnets 108 which interact with stationary coils 110 in such a way that the shaft 104 is set in rotation. In this sense, coils 110 and permanent magnets 108 form the drive of the reciprocating piston pump 101.
- the energization of the coils 110 necessary for the rotation is done by control electronics (not shown).
- One end of the shaft 104 protrudes into a crank chamber 112.
- a crank disk 114 which carries a crank pin 116, is connected to this end of the shaft 104.
- a shaft seal 118 to the crank chamber 112 is necessary so that this can be evacuated.
- a cylinder 120 which receives a cylinder liner 122, is connected to the housing 102 in a gas-tight manner.
- the liner 122 is over part of its longitudinal axis with a Shrink fit fitted into the bore of the cylinder 120.
- a reciprocating piston 124 which is connected to the crank pin 116 via a connecting rod 126.
- the crank drive consisting of shaft 104, crank disk 114 and crank pin 116 causes a reciprocal movement between two reversal points.
- the first reversal point 127 lies between the end of the cylinder liner 122 facing the crank chamber 112 and gas inlet bores 128, which are provided distributed over the circumference of the cylinder liner 122 and produce a gas connection to an inlet channel 130.
- This inlet channel 130 surrounds the liner 122 at least in sections in the circumferential direction and is in turn in gas connection with the pump gas inlet 132.
- the second reversal point 133 lies near the end of the liner 122 facing away from the crank chamber 112. It is dimensioned such that the reciprocating piston 124 touches a valve cover 134 and lifts off the end of the liner 122. This end of the liner 122 forms the valve seat on which the valve cover 134 sits in the other phases of the reciprocating piston stroke.
- the valve cover 134 is provided with a layer 136 which dampens the contact between the valve cover 134 and the piston 124 and creates a seal.
- the valve cover 134 is pretensioned in the direction of the bushing 122 by a valve spring 138.
- a heat-conducting body 150 is in heat-transferring contact with the liner 122.
- the material of this heat-conducting body 150 has a higher coefficient of thermal conductivity than the material of the cylinder 120 receiving the liner 122.
- An aluminum alloy is typically used for the cylinder 120. Copper is a suitable material for the heat conducting body. Other materials with an even higher thermal conductivity than copper can advantageously be used.
- the heat conducting body 150 forms a thermal connection between the liner 122 and a space outside the cylinder 120. It can be cooled by convection of the ambient air or by thermal contact with an external cooling circuit (not shown).
- a space 152 to be evacuated is arranged in front of the pump gas inlet 132.
- a pressure sensor 51 is arranged directly in front of the pump gas inlet 132 (only shown schematically).
- the pressure sensor 51 is designed as a gas pressure sensitive sensor. This can be a Pirani sensor, for example.
- the vacuum pump 101 can automatically switch to a standby mode when the suction pressure has fallen below a certain limit value.
- the measurement directly in the suction area 152 enables precise control of the speed of the reciprocating piston pump 101. If the pressure cannot fall below a certain value, used piston seals 148 or seals 29 of the in the Fig. 1 and 2 scroll vacuum pump 1 shown go out.
- a signal line 52 leads from the pressure sensor 51 to an evaluation unit 53, also shown only schematically, which in turn is connected to a motor control 50.
- Fig. 4 shows a reciprocating piston pump 31 with a first pump stage 43 and a second pump stage 44.
- the reciprocating piston pump 31 has a gas inlet 45, shown schematically, as well as a gas duct 46 and a gas outlet 47.
- a drive unit 148 displaces the pistons (in Fig. 4 not shown) of the pump stages 43, 44 in a lifting movement, so that a medium to be conveyed, for example a gas, is transported from the gas inlet 45 via the gas guide 46 in the direction of the gas outlet 47.
- a medium to be conveyed for example a gas
- the drive unit 48 has a motor 49 and a motor control 50.
- a pressure sensor 51 is arranged in the area of the gas inlet 45.
- the pressure sensor 51 is designed as a gas pressure sensitive sensor. This sensor can be a Pirani sensor, for example.
- the vacuum pump 101 can automatically switch to a standby mode when the suction pressure has fallen below a certain limit value.
- An exact control of the speed of the reciprocating piston pump 101 is possible directly in the suction area 152. If the pressure cannot fall below a certain value, used piston seals of the reciprocating piston pump 101 or seals 29 of the in the Fig. 1 and 2 scroll vacuum pump 1 shown go out.
- a signal line 52 leads from the pressure sensor 51 to an evaluation unit 53, which in turn is connected to a motor control 50.
- This further embodiment has a valve 54, which, for example, on the suction flange 132 of the reciprocating piston pump 101 Fig. 3 is arranged.
- the suction flange 132 can be closed with the valve 54 so that the vacuum pump 31, 101 can carry out an independent check of the final pressure when it is started. From this final pressure the vacuum pump 31, 101 can deduce the wear of the piston seals 148.
- the valve 54 is closed by a controller 56 via a signal line 55.
- a display or an LED can be arranged in the evaluation unit 53 or separately therefrom in order to indicate that maintenance is required, that is to say that the seals 42 need to be replaced.
- Closing the valve 54 has the advantage that a final pressure in the area of the suction flange can be determined independently of the recipient.
- valve 54 is opened and the pump 31 is ready for use.
- the vacuum pump 31 in Fig. 4 is only shown as an example. It may just as well be arranged according to Fig. 4 a scroll pump can be provided as described in Fig. 1 is shown.
- the scroll pump can be constructed in one or more stages.
- Fig. 5 shows the disc 5 of the scroll pump 1 of Fig. 1 with the spiral 7 and the disk 4 with the spiral 6.
- Fig. 5 several ways of sealing the spirals 6, 7 to the disks 4, 5 are shown.
- a spiral section 242 has a structured surface.
- the surface is sawtooth-like in cross section.
- the gap seals off the spiral section 242 from a mating surface 244 of the disk 4.
- a spiral section 245 of the spiral 6 has an elastic carrier material 246 and a seal 247.
- the seal 247 rests on the opposing surface 8 and thus seals against the opposing surface 8.
- the seal 247 is adjusted by the elastic carrier material 246 when the seal 247 is worn.
- the mating surface 8 advantageously has a so-called hard coat coating in order to minimize wear.
- a spiral section 248 also has a seal 249.
- the seal 249 is arranged in a channel 250 of the spiral section 248, that is to say in the stationary one Spiral 7.
- the seal 249 seals against the mating surface 244.
- the seal 249 is rectangular in cross section, as in FIG Fig. 5 shown. A length L is greater than a width B of the seal 249. The seal 249 is arranged in the channel 250 such that a gap 251 remains in the area of the narrow side with the width B and a gap 252 remains in the area of the longitudinal side of the seal 249.
- seal 249 is designed to be more flexible in the radial direction than in the axial direction.
- the gas to be pumped and compressed arrives in column 251, 252. In this way, the seal 249 is automatically adjusted when the seal is worn, so that a sealing effect between the seal 249 and the mating surface 244 is ensured over a long period of time.
- the speed of the vacuum pumps 1, 31, 101 can be reduced so that the wear on the seals 29, 148 is additionally minimized.
Description
Die Erfindung betrifft eine Vakuumpumpe mit wenigstens einer Pumpstufe.The invention relates to a vacuum pump with at least one pump stage.
In der Vakuumtechnik werden mit dem Begriff "Vorpumpen" meist gegen Atmosphäre ausstoßende Vakuumpumpen bezeichnet. Diese Bezeichnung geht darauf zurück, dass sie oftmals in Kombination mit solchen Vakuumpumpen verwendet wird, die ein Hochvakuum erzeugen können, dabei aber nicht bis zum Atmosphärendruck verdichten. Ein Beispiel für solch eine Hochvakuumpumpe ist die Turbomolekularpumpe. Beispiele für Vorpumpen sind Vakuumverdrängerpumpen, beispielsweise Drehschieberpumpen und Kolbenpumpen. Sehr oft sind die Vorpumpen mehrstufig ausgeführt, da die mit ihnen kombinierten Hochvakuumpumpen nur einen Druck von wenigen Millibar an ihrem Gasauslass erzeugen und daher ein großer Druckbereich überbrückt werden muss.In vacuum technology, the term "backing pumps" is usually used to describe vacuum pumps that expel against the atmosphere. This name goes back to the fact that it is often used in combination with such vacuum pumps that can generate a high vacuum, but do not compress to atmospheric pressure. An example of such a high vacuum pump is the turbo molecular pump. Examples of backing pumps are vacuum displacement pumps, such as rotary vane pumps and piston pumps. The backing pumps are very often multi-stage, since the high vacuum pumps combined with them only generate a pressure of a few millibars at their gas outlet and therefore a large pressure range has to be bridged.
Sowohl in der Anwendung als Vorpumpe als auch bei der eigenständigen Erzeugung eines Endvakuums in einem Rezipienten muss die Vorpumpe zunächst große Gasmengen verdichten. Für die gängige Bauform einer Kolbenpumpe bedeutet das, dass sie einen entsprechend groß dimensionierten Schöpfraum aufweisen muss. Die pro Zeiteinheit verdichtbare Gasmenge ist bei diesen Beispielen vom maximalen Schöpfraumvolumen und der Frequenz abhängig, mit der der Schöpfraum von seiner maximalen auf die minimale Größe verändert wird. Fällt wenig Gas an, ist die Vorpumpe in Hinsicht auf Schöpfraumvolumen und Drehzahl überdimensioniert. Von diesen Werten ist allerdings auch die Leistungsaufnahme der Vorpumpe abhängig und es ist wünschenswert, diese zu minimieren.Both when used as a backing pump and when it is used to independently generate an ultimate vacuum in a recipient, the backing pump must first compress large amounts of gas. For the common design of a piston pump, this means that it must have a correspondingly large suction chamber. In these examples, the amount of gas that can be compressed per unit of time is dependent on the maximum pump chamber volume and the frequency with which the pump chamber is changed from its maximum to its minimum size. If there is little gas, the backing pump is oversized in terms of pump chamber volume and speed. However, the power consumption of the backing pump also depends on these values and it is desirable to minimize this.
Zum Stand der Technik (
Aus dem Stand der Technik (
Gleiches gilt für so genannte Scrollpumpen. Scrollpumpen werden auch Spiralvakuumpumpen oder Spiralfluidfördereinrichtungen genannt. Diese Pumpen arbeiten nach dem Verdrängerprinzip. Eine Spiralvakuumpumpe besteht aus zwei ineinander gesteckten Spiralzylindern (beispielsweise archimedische Spiralen oder Evolvente). Eine dieser Spiralen steht fest, die andere bewegt sich über einen Exzenterantrieb (Exzentergetriebe, Exzenterwelle) auf einer kreisförmigen Bahn. Man spricht von einer zentralsymmetrischen Oszillation ("Wobbeln"). Zwischen den Spiralen entstehen so einzelne abgeschlossene halbmondförmige Hohlräume, die ihr Volumen nach innen immer weiter verkleinern. Dadurch wird das zu pumpende Fluid, beispielsweise Gas, außen angesaugt, innerhalb der Pumpe verdichtet und über eine Öffnung in der Spiralmitte ausgestoßen.The same applies to so-called scroll pumps. Scroll pumps are also called spiral vacuum pumps or spiral fluid conveying devices. These pumps work on the positive displacement principle. A spiral vacuum pump consists of two nested spiral cylinders (e.g. Archimedes' spirals or involutes). One of these spirals is stationary, the other moves on a circular path via an eccentric drive (eccentric gear, eccentric shaft). One speaks of a centrally symmetrical oscillation ("wobbling"). This creates individual closed crescent-shaped cavities between the spirals, which continue to reduce their volume towards the inside. As a result, the fluid to be pumped, for example gas, is sucked in from the outside, compressed inside the pump and ejected through an opening in the center of the spiral.
Die Höhe der Spiralwände, deren Abstand sowie die Drehzahl definieren die Saugleistung einer Spiralvakuumpumpe.The height of the spiral walls, their spacing and the speed define the suction power of a spiral vacuum pump.
Zwischen den die Struktur der Spirale bildenden Spiralzylindern und der Auflagefläche auf der Statorseite sind Dichtungen angeordnet, die mit dem Stator in einem Reibkontakt stehen. Diese Dichtungen verschleißen im Laufe der Zeit. Bei einem Verschleiß werden die Hohlräume undicht und die Saugleistung der Spiralvakuumpumpe nimmt ab.Seals, which are in frictional contact with the stator, are arranged between the spiral cylinders forming the structure of the spiral and the bearing surface on the stator side. These seals wear out over time. When worn, the cavities become leaky and the suction power of the spiral vacuum pump decreases.
Zum Stand der Technik (
Weiterhin gehört zum Stand der Technik (
Darüber hinaus gehört zum Stand der Technik (
Weiterhin gehört zum Stand der Technik (
Darüber hinaus gehört zum Stand der Technik (
Weiterhin gehört zum Stand der Technik (
Darüber hinaus gehört zum Stand der Technik (
Das der Erfindung zugrunde liegende technische Problem besteht darin, diese zum Stand der Technik gehörende Vakuumpumpe dahingehend weiter zu verbessern, dass die Standzeit von verschleißbehafteten Dichtungen in der Vakuumpumpe erhöht wird. Darüber hinaus soll ein Verfahren angegeben werden, mit dem der Verschleiß von Dichtungen in der Vakuumpumpe frühzeitig detektiert werden kann.The technical problem on which the invention is based consists in this vacuum pump, which belongs to the prior art To be further improved to the effect that the service life of wear-prone seals in the vacuum pump is increased. In addition, a method is to be specified with which the wear on seals in the vacuum pump can be detected at an early stage.
Dieses technische Problem wird durch eine Vakuumpumpe mit den Merkmalen gemäß Anspruch 1 gelöst.This technical problem is solved by a vacuum pump having the features according to
Die erfindungsgemäße Vakuumpumpe mit wenigstens einer Pumpstufe, einem Motor und einer Motorsteuerung, wobei die Vakuumpumpe als trockenlaufende Pumpe mit verschleißbehafteten Dichtungen ausgebildet ist, bei der wenigstens ein Drucksensor vor der ersten Pumpstufe und/oder in wenigstens einem Verdichtungsraum der Vakuumpumpe angeordnet ist und bei der der Drucksensor mit einer Auswerteeinheit verbunden ist, wobei eine Anzeigevorrichtung zur Anzeige einer Fehl- und/oder Minderleistung der Vakuumpumpe vorgesehen ist, zeichnet sich dadurch aus, dass von dem Drucksensor eine Signalleitung zu einer Auswerteeinheit führt, die wiederum mit einer Motoransteuerung in Verbindung steht und dass damit ein Verschleiß der Dichtungen detektiert wird.The vacuum pump according to the invention with at least one pump stage, a motor and a motor controller, the vacuum pump being designed as a dry-running pump with seals subject to wear, in which at least one pressure sensor is arranged in front of the first pump stage and / or in at least one compression chamber of the vacuum pump and in which the Pressure sensor is connected to an evaluation unit, with a display device being provided to display a defective and / or reduced performance of the vacuum pump, is characterized in that a signal line leads from the pressure sensor to an evaluation unit, which in turn is connected to a motor control and that so that wear on the seals is detected.
Die erfindungsgemäße Vakuumpumpe kann als Kolbenpumpe, beispielsweise Hubkolbenpumpe ausgebildet sein. Diese Hubkolbenpumpe weist wenigstens eine Pumpstufe auf. Die erfindungsgemäße Vakuumpumpe kann auch als Scrollpumpe mit wenigstens einer Pumpstufe ausgebildet sein.The vacuum pump according to the invention can be designed as a piston pump, for example a reciprocating piston pump. This reciprocating piston pump has at least one pump stage. The vacuum pump according to the invention can also be designed as a scroll pump with at least one pump stage.
Durch die erfindungsgemäße Anordnung des wenigstens einen Drucksensors vor der ersten Pumpstufe und/oder in wenigstens einem Verdichtungsraum der Vakuumpumpe ist es möglich, eine genauere Messung des erzeugbaren Druckes durchzuführen, wodurch eine genauere Steuerung der Drehzahl möglich ist als mit einem Druckschalter zwischen den Pumpstufen.The inventive arrangement of the at least one pressure sensor upstream of the first pumping stage and / or in at least one compression chamber of the vacuum pump makes it possible to carry out a more precise measurement of the pressure that can be generated, thereby enabling more precise control of the speed is possible than with a pressure switch between the pump stages.
Kann ein bestimmter Druckwert nicht mehr unterschritten werden, kann von verbrauchten Dichtungen ausgegangen werden.If the pressure can no longer fall below a certain value, it can be assumed that the seals are used up.
Gemäß der Erfindung ist vorgesehen, dass eine Anzeigevorrichtung zur Anzeige einer Fehl- und/oder Minderleistung der Vakuumpumpe vorgesehen ist. Wird beispielsweise beim Verschließen des zusätzlichen Ventiles zum Verschließen der Ansaugöffnung der Vakuumpumpe ein vorgegebener Enddruck nicht erreicht, kann davon ausgegangen werden, dass die Dichtungen einem gewissen Grad an Verschleiß unterliegen. Diese Minderleistung wird in der Anzeigevorrichtung angezeigt, so dass der Nutzer der Vakuumpumpe den aktuellen Druckwert ablesen kann.According to the invention it is provided that a display device is provided for displaying a defective and / or reduced performance of the vacuum pump. If, for example, when closing the additional valve for closing the suction opening of the vacuum pump, a predetermined final pressure is not reached, it can be assumed that the seals are subject to a certain degree of wear. This reduced output is shown in the display device so that the user of the vacuum pump can read the current pressure value.
Auf der Anzeigevorrichtung kann der Nutzer auch darauf hingewiesen werden, dass eine notwendige Wartung der Vakuumpumpe vorzunehmen ist. Die Anzeigevorrichtung kann ein Display oder wenigstens eine LED aufweisen. Es können auch akustische Signale abgegeben werden.The user can also be informed on the display device that maintenance of the vacuum pump is necessary. The display device can have a display or at least one LED. Acoustic signals can also be emitted.
Gemäß einer vorteilhaften Ausführungsform der Erfindung ist der wenigstens eine Drucksensor im Ansaugbereich der Vakuumpumpe angeordnet. Hierdurch ist eine sehr genaue Steuerung der Drehzahl möglich, da mit dem Drucksensor erfasst werden kann, wie groß der Ansaugdruck der Vakuumpumpe ist.According to an advantageous embodiment of the invention, the at least one pressure sensor is arranged in the suction area of the vacuum pump. This enables the speed to be controlled very precisely, since the pressure sensor can be used to detect how high the suction pressure of the vacuum pump is.
Eine weitere besonders bevorzugte Ausführungsform der Erfindung sieht vor, dass ein zusätzliches Ventil zum Verschließen einer Ansaugöffnung der Vakuumpumpe vorgesehen ist.Another particularly preferred embodiment of the invention provides that an additional valve is provided for closing a suction opening of the vacuum pump.
Die Vakuumpumpe weist eine Ansaugöffnung auf. Die Ansaugöffnung ist mit einem Rezipienten verbunden.The vacuum pump has a suction opening. The suction opening is connected to a recipient.
Diese Ansaugöffnung wird gemäß der bevorzugten Ausführungsform der Erfindung durch ein zusätzliches Ventil verschlossen. Durch das Verschließen des Ventils kann die Vakuumpumpe, beispielsweise beim Anschalten der Vakuumpumpe, eine selbstständige Überprüfung des Enddruckes durchführen. Von diesem Enddruck kann die Vakuumpumpe auf den Verschleiß der Dichtungen, das heißt der Kolbendichtungen oder der Dichtungen der Scrollpumpe schließen.According to the preferred embodiment of the invention, this suction opening is closed by an additional valve. By closing the valve, the vacuum pump can carry out an independent check of the final pressure, for example when the vacuum pump is switched on. From this final pressure, the vacuum pump can deduce the wear of the seals, i.e. the piston seals or the seals of the scroll pump.
Der Enddruck wird hierbei in dem relativ begrenzten und kleinen Raum des Ansaugflansches überprüft. Die Messung erfolgt unabhängig von dem Rezipienten.The final pressure is checked in the relatively limited and small space of the intake flange. The measurement takes place independently of the recipient.
Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung ist vorgesehen, dass der wenigstens eine Sensor als Pirani-Sensor ausgebildet ist. Pirani-Sensoren sind sehr zuverlässig arbeitende Sensoren.According to a further advantageous embodiment of the invention it is provided that the at least one sensor is designed as a Pirani sensor. Pirani sensors are very reliable sensors.
Es ist jedoch auch möglich, andere Druckmessgeräte als Pirani-Sensoren einzusetzen.However, it is also possible to use other pressure measuring devices than Pirani sensors.
Die Vakuumpumpe ist vorteilhaft als Scrollpumpe ausgebildet. Bei einer Scrollpumpe handelt es sich um eine trockenlaufende Pumpe. Trockenlaufende Pumpen sind Pumpen, die im Bereich des Arbeitsraumes auf Hilfsfluide, wie zum Beispiel Öl, verzichten und bei denen dadurch eine Verunreinigung des Arbeitsmediums vermieden werden kann.The vacuum pump is advantageously designed as a scroll pump. A scroll pump is a dry-running pump. Dry-running pumps are pumps that do not use auxiliary fluids, such as oil, in the area of the work area and in which a contamination of the working medium can be avoided.
Ein Verfahren zum Betrieb einer Scrollpumpe oder einer Vakuumpumpe mit wenigstens zwei Pumpstufen kann vorsehen, dass im Pumpbetrieb der Drucksensor einen Gasdruck im Ansaugbereich und/oder in wenigstens einem Verdichtungsraum der Vakuumpumpe misst, dass der oder die Messwerte des Drucksensors von einer Auswerteeinheit ausgewertet wird oder werden und dass die Drehzahl der Pumpe in Abhängigkeit von einem Auswerteergebnis eingestellt wird.A method for operating a scroll pump or a vacuum pump with at least two pump stages can provide that im Pump operation of the pressure sensor a gas pressure in the suction area and / or in at least one compression chamber of the vacuum pump measures that the measured value (s) of the pressure sensor is or are evaluated by an evaluation unit and that the speed of the pump is set as a function of an evaluation result.
Das Verfahren weist den Vorteil auf, dass durch die Messung des erreichbaren Druckes, das heißt des Gasdruckes im Ansaugbereich und/oder in wenigstens einem Verdichtungsraum der Vakuumpumpe, der Zustand der Pumpe, insbesondere der Dichtungen genau erfasst werden kann. Der oder die Messwerte des Drucksensors werden hierzu von einer Auswerteeinheit ausgewertet. In der Auswerteeinheit ist vorteilhaft abgespeichert, in welchem Bereich die Messwerte idealerweise liegen. In Abhängigkeit von dem Auswerteergebnis wird die Drehzahl der Pumpe eingestellt.The method has the advantage that by measuring the achievable pressure, i.e. the gas pressure in the suction area and / or in at least one compression chamber of the vacuum pump, the condition of the pump, in particular the seals, can be precisely recorded. For this purpose, the measured value or values of the pressure sensor are evaluated by an evaluation unit. The evaluation unit advantageously stores the range in which the measured values ideally lie. The speed of the pump is set as a function of the evaluation result.
Beispielsweise werden bei hohen Eingangsdrücken hohe Drehzahlen und bei niedrigen Eingangsdrücken niedrige Drehzahlen eingestellt, um ein optimales Saugvermögen zu realisieren.For example, high speeds are set at high inlet pressures and low speeds at low inlet pressures in order to achieve optimum pumping speed.
Ein nicht zur Erfindung gehörendes Verfahren zum Betrieb einer Vakuumpumpe oder einer Scrollpumpe zeichnet sich dadurch aus, dass beim Start der Vakuumpumpe ein Ventil, welches einen Ansaugbereich von einem Rezipienten trennt, geschlossen wird, dass der Drucksensor einen Gasdruck im gegen den Rezipienten geschlossenen Ansaugbereich und/oder in wenigstens einem Verdichtungsraum der Vakuumpumpe misst, dass der oder die Messwerte des Drucksensors von einer Auswerteeinheit ausgewertet werden und dass in Abhängigkeit von einem Auswerteergebnis eine Information von der Anzeigeeinheit bezüglich des Verschleißes von Dichtungen ausgegeben wird.A method not belonging to the invention for operating a vacuum pump or a scroll pump is characterized in that when the vacuum pump is started, a valve which has a The suction area separates from a recipient, it is concluded that the pressure sensor measures a gas pressure in the suction area closed against the recipient and / or in at least one compression chamber of the vacuum pump, that the measured value or values of the pressure sensor are evaluated by an evaluation unit and that depending on an evaluation result information is output from the display unit regarding the wear of seals.
Das Verfahren weist den Vorteil auf, dass die Vakuumpumpe beim Start eine selbstständige Überprüfung des Enddruckes durchführen kann. Von dem Enddruck kann die Auswerteeinheit der Vakuumpumpe auf den Verschleiß der Dichtungen schließen.The method has the advantage that the vacuum pump can carry out an independent check of the final pressure when it starts. From the final pressure the evaluation unit of the vacuum pump can deduce the wear of the seals.
Gemäß einer besonders bevorzugten Ausführungsform der Erfindung wird die Drehzahl in Abhängigkeit von einem durch den wenigstens einen Drucksensor gegebenen Messwert geregelt. Wird von dem Drucksensor ein hoher Eingangsdruck gemessen, kann die Drehzahl erhöht werden. Bei niedrigen Eingangsdrücken wird die Drehzahl herabgesetzt, um ein optimales Saugvermögen zu realisieren.According to a particularly preferred embodiment of the invention, the speed is regulated as a function of a measured value given by the at least one pressure sensor. If the pressure sensor measures a high inlet pressure, the speed can be increased. At low inlet pressures, the speed is reduced in order to achieve an optimal pumping speed.
Gemäß einer weiteren vorteilhaften Ausführungsform der Erfindung ist vorgesehen, dass abhängig von dem durch den wenigstens einen Drucksensor gegebenen Messwert zwischen zwei Drehzahlen geschaltet wird.According to a further advantageous embodiment of the invention it is provided that a switch is made between two rotational speeds depending on the measured value given by the at least one pressure sensor.
In einer Motorsteuerung wird die Drehzahl abhängig von dem Auswerteergebnis eingestellt. Dies kann ein Umschaltvorgang zwischen zwei oder mehreren vorgegebenen Drehzahlen sein. Es kann sich hierbei jedoch auch um einen kontinuierlichen Vorgang handeln, bei dem die Motorsteuerungselektronik abhängig von einem ihr übermittelten Messwert die von ihr erzeugte Drehzahl verändert.In a motor control, the speed is set depending on the evaluation result. This can be a switching process between two or more specified speeds. However, this can also be a continuous process in which the engine control electronics change the speed it generates as a function of a measured value transmitted to it.
Gemäß einer besonders bevorzugten Ausführungsform der Erfindung ist vorgesehen, dass bei Unterschreiten eines vorgegebenen Ansaugdruckes die Vakuumpumpe selbsttätig eine Absenkung der Drehzahl durchführt oder dass ein Wechseln in einen Stand-by-Modus erfolgt.According to a particularly preferred embodiment of the invention, it is provided that if the suction pressure falls below a predetermined value, the vacuum pump automatically lowers the speed or changes to a standby mode.
Vorteilhaft erfolgt eine Absenkung der Drehzahl dann, wenn das Signal des Drucksensors zu einem Druck unterhalb des Atmosphärendruckes korrespondiert. Dieser Druck kann in einer vorteilhaften Weiterbildung ein Druck nahe des Enddruckes der Vakuumpumpe sein. Die zu fördernden Gasmengen sind hierbei besonders gering, so dass die Drehzahl weiter abgesenkt werden kann. Durch das Absenken der Drehzahl können die verschleißbehafteten Dichtungen geschont werden, so dass die Standzeit der Dichtungen deutlich erhöht wird.The speed is advantageously reduced when the signal from the pressure sensor reaches a pressure below this the atmospheric pressure corresponds. In an advantageous development, this pressure can be a pressure close to the ultimate pressure of the vacuum pump. The quantities of gas to be conveyed are particularly small here, so that the speed can be reduced further. By lowering the speed, the wear-prone seals can be protected, so that the service life of the seals is significantly increased.
Die Pumpe wechselt vorteilhaft selbstständig in den Stand-by-Modus, wenn der Ansaugdruck einen bestimmten Grenzwert unterschritten hat.The pump advantageously automatically switches to stand-by mode when the suction pressure has fallen below a certain limit value.
Gemäß einer weiteren vorteilhaften Ausführungsform wird bei Unterschreiten eines vorgegebenen Ansaugdruckes eine Information auf der Anzeige bezüglich des Verschleißes von Dichtungen angezeigt. Diese Ausführungsform weist den Vorteil auf, dass der Nutzer der Pumpe erkennen kann, wann die Dichtungen verschlissen sind und ausgetauscht werden müssen, um das optimale Saugvermögen der Pumpe zu gewährleisten.According to a further advantageous embodiment, if the suction pressure falls below a specified value, information on the wear of seals is displayed on the display. This embodiment has the advantage that the user of the pump can see when the seals are worn out and need to be replaced in order to ensure the optimal pumping speed of the pump.
Weitere Merkmale und Vorteile der Erfindung ergeben sich anhand der zugehörigen Zeichnung, in der mehrere Ausführungsbeispiele eines erfindungsgemäßen Gehäuses einer Wälzkolbenpumpe nur beispielhaft dargestellt sind. In der Zeichnung zeigen:
- Fig. 1
- einen Längsschnitt durch eine Scrollpumpe;
- Fig. 2
- einen Querschnitt durch zwei orbitierende Scheiben einer Scrollpumpe;
- Fig. 3
- einen Längsschnitt durch eine Hubkolbenpumpe;
- Fig. 4
- eine erfindungsgemäße Anordnung eines Druck-sensors;
- Fig. 5
- einen Querschnitt durch verschiedene Dichtungen.
- Fig. 1
- a longitudinal section through a scroll pump;
- Fig. 2
- a cross section through two orbiting disks of a scroll pump;
- Fig. 3
- a longitudinal section through a reciprocating pump;
- Fig. 4
- an inventive arrangement of a pressure sensor;
- Fig. 5
- a cross-section through various seals.
Die zweite Stufe 3 weist ebenfalls eine orbitierende Scheibe 12 sowie einen Stator 13 auf. Die Scheibe 12 trägt eine Spirale 14, der Stator 13 trägt eine Spirale 15. Die Spiralen 14, 15 sind ebenfalls ineinandergreifend angeordnet. Die orbitierende Scheibe 12 ist mittels der Wellen 9 in der Statorscheibe 10 kugelgelagert. Die Wellen 9 weisen einen Wellenabschnitt 16 auf, der in dem Stator 10 gelagert ist. Die Wellen 9 weisen darüber hinaus jeweils zwei Wellenabschnitte 17, 18 auf, die einen Versatz zu dem Wellenabschnitt 16 aufweisen. Durch den Versatz 17, 18 wird die orbitierende Bewegung der Scheiben 4, 12 verursacht.The
Der Antrieb der orbitierenden Bewegung erfolgt mittels eines Elektromotors, der aus einem Motorstator 19 und Motororbiter 20 besteht. Der Motororbiter 20 besteht gemäß
Zur Abdichtung von Pumpräumen 23 ist in jeder Pumpstufe jeweils ein Wellbalg 24 vorgesehen. Der Wellbalg kann auch, sofern erforderlich, als Drehverhinderungsmechanismus dienen. In den Auslässen 22 ist jeweils ein Rückschlagventil 25 angeordnet. Das Rückschlagventil 25 verhindert ein Zurückbelüften der Spiralvakuumpumpe 1 nach dem Ausschalten des Antriebes 18, 19. Somit kann ein Drehen der Spiralen 6, 7; 14, 15 entgegen der festgelegten Drehrichtung vermieden werden.A corrugated bellows 24 is provided in each pumping stage to seal off pumping
Darüber hinaus ist ein Gasballastventil 26 in jeder Pumpstufe vorgesehen. Durch das Gasballastventil 26 wird von Atmosphärenseite in den Pumpraum 23 Gas gepumpt, um eine Kondensation des zu pumpenden Gases zu vermeiden.In addition, a
Durch die Relativbewegung der Spiralen 5, 6; 14, 15 und der damit verbundenen Reibung entsteht in Verbindung mit der Kompression des Gases eine nicht unerhebliche Abwärme. Hohe Temperaturen tragen zu einem erhöhten Verschleiß der Bauteile, insbesondere von Dichtungen (in
Da die orbitierenden Scheiben 4, 12 mittels drei Wellen 9 gelagert sind, wird keine Drehverhinderungsvorrichtung benötigt. Die Wellbalge 24 dienen lediglich zur Abdichtung der Pumpräume 23. Grundsätzlich können die Wellbalge 24 auch als Drehverhinderungsmechanismus dienen.Since the orbiting
Weist die Spiralvakuumpumpe 1 lediglich eine Welle auf, ist ein Drehverhinderungsmechanismus erforderlich. Diese Aufgabe kann beispielsweise von dem Wellbalg 24 übernommen werden. Die Spiralvakuumpumpe 1 kann auch zwei oder mehr Wellen aufweisen. Bei mehr als zwei Wellen ist ein Drehverhinderungsmechanismus üblicherweise nicht erforderlich.If the
Die Wellen 9 sind über Kugellager 11 drehbar in den Scheiben 4, 12 gelagert.The
Der Elektromotor 19, 20 kann auch derart aufgebaut sein, dass der Motororbiter 20 aus einem weichmagnetischen Material, beispielsweise Eisen besteht. Die im Motorstator 19 angeordneten Elektromagnete können beispielsweise als Spulen ausgebildet sein. Grundsätzlich besteht auch die Möglichkeit, die Motororbiter 20 aus Elektromagneten zu bilden und den Motorstator 19 beispielsweise aus Permanentmagneten oder aus einem weichmagnetischen Material.The
Die Spirale 6 trägt Dichtungen 29. Die Spirale 7 trägt Dichtungen 30.The
Es besteht auch die Möglichkeit, jeweils einen Drucksensor in gegenüberliegenden Verdichtungsräumen 23a, 23b; 54a, 54b; 55a, 55b oder in angrenzenden Verdichtungsräumen 23a, 54a, 55a; 23b, 54b, 55b anzuordnen. Durch die jeweilige Druckdifferenz lässt sich ein entsprechendes Auswertesignal erzeugen.There is also the possibility of each having a pressure sensor in
Mit dem Gehäuse 102 ist ein Zylinder 120 gasdicht verbunden, welcher eine Laufbuchse 122 aufnimmt. Die Laufbuchse 122 ist über einen Teil ihrer Längsachse mit einem Schrumpfsitz in die Bohrung des Zylinders 120 eingepasst. In der Laufbuchse 122 befindet sich ein Hubkolben 124, der über einen Pleuel 126 mit dem Kurbelzapfen 116 verbunden ist. Durch diese Verbindung führt der Hubkolben 124 eine periodische Bewegung aus. In dem in
Der erste Umkehrpunkt 127 liegt zwischen dem dem Kurbelraum 112 zugewandten Ende der Laufbuchse 122 und Gaseinlassbohrungen 128, die über den Umfang der Laufbuchse 122 verteilt vorgesehen sind und eine Gasverbindung zu einem Einlasskanal 130 herstellen. Dieser Einlasskanal 130 umgibt die Laufbuchse 122 wenigstens abschnittsweise in Umfangsrichtung und steht wiederum in Gasverbindung mit dem Pumpengaseinlass 132.The
Der zweite Umkehrpunkt 133 liegt nahe dem dem Kurbelraum 112 abgewandten Ende der Laufbuchse 122. Er ist so bemessen, dass der Hubkolben 124 einen Ventildeckel 134 berührt und vom Ende der Laufbuchse 122 abhebt. Dieses Ende der Laufbuchse 122 bildet den Ventilsitz, auf dem der Ventildeckel 134 in den anderen Phasen des Hubkolbenhubes sitzt. Der Ventildeckel 134 ist mit einer Schicht 136 versehen, die eine Dämpfung der Berührung von Ventildeckel 134 und Hubkolben 124 und eine Abdichtung bewirkt. Der Ventildeckel 134 ist durch eine Ventilfeder 138 in Richtung Laufbuchse 122 vorgespannt. Befindet sich der Hubkolben 124 in der Nähe des zweiten Umkehrpunktes 133, wird Gas aus einem Schöpfraum 140 in eine Auslasskammer 142 ausgestoßen. Von dort gelangt es dann zu einem Pumpengasauslass 144, der zusammen mit der Auslasskammer 142, Ventildeckel 134 und Ventilfeder 138 in einem mit dem Zylinder 120 gasdicht verbundenen Zylinderdeckel 146 angeordnet ist. Zwischen Laufbuchseninnenwand und Hubkolben 124 ist eine Dichtung 148 angeordnet. Diese dichtet den Spalt zwischen Laufbuchse 122 und Hubkolben 124 und damit den Schöpfraum 140 gegen den Kurbelraum 112 ab. Diese Dichtung 148 ist durch die Reibung an der Laufbuchseninnenwand Verschleiß ausgesetzt. Ein Wärmeleitkörper 150 steht in Wärme übertragendem Kontakt mit der Laufbuchse 122. Das Material dieses Wärmeleitkörpers 150 weist eine höhere Wärmeleitzahl auf als das Material des die Laufbuchse 122 aufnehmenden Zylinders 120. Typischerweise wird für den Zylinder 120 eine Aluminiumlegierung verwendet. Als Material für den Wärmeleitkörper ist Kupfer geeignet. Andere Materialien mit noch höherer Wärmeleitzahl als Kupfer sind vorteilhaft verwendbar. Der Wärmeleitkörper 150 bildet eine Wärmeverbindung zwischen Laufbuchse 122 und einem Raum außerhalb des Zylinders 120. Er kann durch Konvektion der Umgebungsluft oder durch Wärmekontakt mit einem nicht gezeigten externen Kühlkreislauf gekühlt werden.The
Vor dem Pumpengaseinlass 132 ist ein zu evakuierender Raum 152 angeordnet. Unmittelbar vor dem Pumpengaseinlass 132 ist (lediglich schematisch dargestellt) ein Drucksensor 51 angeordnet.A
Der Drucksensor 51 ist als gasdruckempfindlicher Sensor ausgebildet. Dieser kann beispielsweise ein Pirani-Sensor sein.The
Durch die Anordnung des Drucksensors 51 im Bereich des Gaseinlasses 132 kann die Vakuumpumpe 101 selbstständig in einen Stand-by-Modus wechseln, wenn der Ansaugdruck einen bestimmten Grenzwert unterschritten hat. Durch die Messung direkt im Ansaugbereich 152 ist eine genaue Steuerung der Drehzahl der Hubkolbenpumpe101 möglich. Kann ein bestimmter Druckwert nicht unterschritten werden, kann man von verbrauchten Kolbendichtungen 148 oder Dichtungen 29 der in den
Von dem Drucksensor 51 führt eine lediglich schematisch dargestellte Signalleitung 52 zu einer ebenfalls lediglich schematisch dargestellten Auswerteeinheit 53, die wiederum mit einer Motoransteuerung 50 in Verbindung steht. Mit der bisher beschriebenen Ausführungsform ist es möglich, einen Verschleiß der Dichtungen 29, 148 zu detektieren und entweder eine Wartung durchzuführen oder die Drehzahl der Pumpe 101 herabzusetzen.A
Eine Antriebseinheit 148 versetzt die Kolben (in
Die Antriebseinheit 48 weist einen Motor 49 auf sowie eine Motoransteuerung 50.The
Im Bereich des Gaseinlasses 45 ist ein Drucksensor 51 angeordnet. Der Drucksensor 51 ist als gasdruckempfindlicher Sensor ausgebildet. Dieser Sensor kann beispielsweise ein Pirani-Sensor sein.A
Durch die Anordnung des Drucksensors 51 im Bereich des Gaseinlasses 132 kann die Vakuumpumpe 101 selbstständig in einen Stand-by-Modus wechseln, wenn der Ansaugdruck einen bestimmten Grenzwert unterschritten hat. Durch die Messung direkt im Ansaugbereich 152 ist eine genaue Steuerung der Drehzahl der Hubkolbenpumpe 101 möglich. Kann ein bestimmter Druckwert nicht unterschritten werden, kann man von verbrauchten Kolbendichtungen der Hubkolbenpumpe 101 oder Dichtungen 29 der in den
Von dem Drucksensor 51 führt eine Signalleitung 52 zu einer Auswerteeinheit 53, die wiederum mit einer Motoransteuerung 50 in Verbindung steht. Mit der bisher beschriebenen Ausführungsform ist es möglich, einen Verschleiß der Dichtungen 29, 148 zu detektieren und entweder eine Wartung durchzuführen oder die Drehzahl der Pumpe 1, 31, 101 herabzusetzen.A
Optional ist im Folgenden eine weitere Ausführungsform beschrieben. Diese weitere Ausführungsform weist ein Ventil 54 auf, welches beispielsweise am Ansaugflansch 132 der Hubkolbenpumpe 101 der
Das Verschließen des Ventiles 54 weist den Vorteil auf, dass ein Enddruck im Bereich des Ansaugflansches unabhängig von dem Rezipienten ermittelt werden kann.Closing the
Ist die Selbstdiagnose abgeschlossen, wird das Ventil 54 geöffnet und die Pumpe 31 ist einsatzbereit.Once the self-diagnosis has been completed, the
Die Vakuumpumpe 31 in
Die Scrollpumpe kann einstufig oder mehrstufig aufgebaut sein.The scroll pump can be constructed in one or more stages.
Ein Spiralabschnitt 242 weist eine strukturierte Oberfläche auf. Im vorliegenden Fall ist die Oberfläche im Querschnitt sägezahnartig ausgebildet. Durch einen entsprechend gewählten engen Spalt 243 dichtet der Spalt den Spiralabschnitt 242 gegenüber einer Gegenfläche 244 der Scheibe 4 ab.A
Ein Spiralabschnitt 245 der Spirale 6 weist ein elastisches Trägermaterial 246 auf sowie eine Dichtung 247. Die Dichtung 247 liegt an der Gegenfläche 8 an und dichtet so gegen die Gegenfläche 8 ab. Durch das elastische Trägermaterial 246 wird die Dichtung 247 bei Verschleiß der Dichtung 247 nachgeführt. Die Gegenfläche 8 weist vorteilhaft eine so genannte Hardcoat-Beschichtung auf, um den Verschleiß zu minimieren.A
Ein Spiralabschnitt 248 weist ebenfalls eine Dichtung 249 auf. Die Dichtung 249 ist in einem Kanal 250 des Spiralabschnittes 248 angeordnet, das heißt in der feststehenden Spirale 7. Die Dichtung 249 dichtet gegen die Gegenfläche 244 ab.A
Die Dichtung 249 ist im Querschnitt rechteckförmig ausgebildet, wie in
Das bedeutet, dass die Dichtung 249 in radialer Richtung flexibler ausgebildet ist als in axialer Richtung. In die Spalte 251, 252 gelangt das zu fördernde und komprimierende Gas. Hierdurch wird die Dichtung 249 bei Verschleiß der Dichtung automatisch nachgeführt, so dass eine Dichtwirkung zwischen der Dichtung 249 und der Gegenfläche 244 über einen langen Zeitraum gewährleistet ist.This means that the
Wird ein vorgegebener Eingangsdruck im Bereich des Drucksensors 51 gemessen, kann die Drehzahl der Vakuumpumpen 1, 31, 101 herabgesetzt werden, so dass der Verschleiß der Dichtungen 29, 148 zusätzlich minimiert wird.If a predetermined inlet pressure is measured in the area of the
- 11
- SpiralvakuumpumpeSpiral vacuum pump
- 22
- PumpstufePumping stage
- 33
- PumpstufePumping stage
- 44th
- orbitierende Scheibeorbiting disk
- 55
- Statorstator
- 66
- Spiralespiral
- 77th
- Spiralespiral
- 88th
- GegenflächeCounter surface
- 99
- Wellewave
- 1010
- Statorstator
- 1111
- Kugellagerball-bearing
- 1212
- orbitierende Scheibeorbiting disk
- 1313th
- Statorstator
- 1414th
- Spiralespiral
- 1515th
- Spiralespiral
- 1616
- WellenabschnittShaft section
- 1717th
- WellenabschnittShaft section
- 1818th
- WellenabschnittShaft section
- 1919th
- MotorstatorMotor stator
- 2020th
- MotororbiterMotor orbiter
- 2121st
- Einlassinlet
- 2222nd
- AuslassOutlet
- 2323
- PumpräumePumping rooms
- 23a23a
- VerdichtungsraumCompression space
- 23b23b
- VerdichtungsraumCompression space
- 2424
- WellbalgBellows
- 2525th
- Rückschlagventilcheck valve
- 2626th
- GasballastventilGas ballast valve
- 2727
- GegenflächeCounter surface
- 2828
- LüfterFan
- 2929
- Dichtungpoetry
- 3030th
- Dichtungpoetry
- 3131
- HubkolbenpumpeReciprocating pump
- 4343
- PumpstufePumping stage
- 4444
- PumpstufePumping stage
- 4545
- GaseinlassGas inlet
- 4646
- GasführungGas routing
- 4747
- GasauslassGas outlet
- 4848
- AntriebseinheitDrive unit
- 4949
- Motorengine
- 5050
- MotoransteuerungMotor control
- 5151
- DrucksensorPressure sensor
- 5252
- SignalleitungSignal line
- 5353
- AuswerteeinheitEvaluation unit
- 54a54a
- VerdichtungsraumCompression space
- 54b54b
- VerdichtungsraumCompression space
- 55a55a
- VerdichtungsraumCompression space
- 55b55b
- VerdichtungsraumCompression space
- 101101
- KolbenvakuumpumpePiston vacuum pump
- 102102
- Gehäusecasing
- 104104
- Wellewave
- 106106
- WellenlagerShaft bearing
- 107107
- WellenlagerShaft bearing
- 108108
- PermanentmagnetePermanent magnets
- 110110
- SpulenDo the washing up
- 112112
- KurbelraumCrankcase
- 114114
- KurbelscheibeCrank disc
- 116116
- KurbelzapfenCrank pin
- 118118
- WellendichtungShaft seal
- 120120
- Zylindercylinder
- 122122
- LaufbuchseLiner
- 124124
- HubkolbenReciprocating piston
- 126126
- PleuelConnecting rod
- 127127
- erster Umkehrpunktfirst turning point
- 128128
- GaseinlassbohrungenGas inlet holes
- 130130
- EinlasskanalInlet port
- 133133
- zweiter Umkehrpunktsecond turning point
- 134134
- VentildeckelValve cover
- 136136
- Schichtlayer
- 138138
- VentilfederValve spring
- 140140
- SchöpfraumLadle room
- 142142
- AuslasskammerOutlet chamber
- 144144
- PumpengasauslassPump gas outlet
- 146146
- ZylinderdeckelCylinder cover
- 148148
- Dichtungpoetry
- 150150
- WärmeleitkörperHeat conducting body
- 152152
- Rezipientrecipient
- 154154
- Leitungmanagement
- 242242
- DichtungenSeals
- 243243
- Spaltgap
- 244244
- GegenflächeCounter surface
- 245245
- SpiralabschnittSpiral section
- 246246
- elastisches Trägermaterialelastic carrier material
- 247247
- Dichtungpoetry
- 248248
- SpiralabschnittSpiral section
- 249249
- Dichtungpoetry
- 250250
- Kanalchannel
- 251251
- Spaltgap
- 252252
- Spaltgap
- AA.
- PfeileArrows
- BB.
- Breitewidth
- LL.
- Längelength
Claims (6)
- A vacuum pump with at least one pumping stage, a motor and motor control, wherein the vacuum pump is configured as a dry-running vacuum pump with seals, in which there is arranged at least one pressure sensor (51) before the first pumping stage (43) and/or in at least one sealing space (23a, 23b; 54a, 54b; 55a, 55b) of the vacuum pump, and the pressure sensor (51) is connected to an evaluation unit (53),
wherein a display device is provided for indicating a non-performance and/or underperformance of the vacuum pump (1, 31, 101),
characterised in that the seals are seals which are subject to wear and
in that a single line (52) leads from the pressure sensor (51) to an evaluation unit (53), which in turn is connected to a motor control (50) and in that a wear of the seals (29, 148) is detected thereby. - A vacuum pump according to claim 1, characterised in that the at least one pressure sensor (51) is arranged in the suction region (45) of the vacuum pump (1, 31, 101).
- A vacuum pump according to claim 1 or 2, characterised in that an additional valve (54) is provided for closing a suction opening (45) of the vacuum pump (1, 31, 101).
- A vacuum pump according to any one of the preceding claims, characterised in that the at least one sensor (51) is configured as a Pirani sensor.
- A vacuum pump according to any one of the preceding claims, characterised in that the vacuum pump (1) is configured as a scroll pump.
- A vacuum pump according to any one of claims 1 to 5, characterised in that the vacuum pump is configured as a piston pump (101).
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15158724.3A EP3067560B1 (en) | 2015-03-12 | 2015-03-12 | Vacuum pump with at least one pump stage |
JP2016039622A JP6188850B2 (en) | 2015-03-12 | 2016-03-02 | Method for operating a vacuum pump or scroll pump having at least two pump stages, and vacuum pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP15158724.3A EP3067560B1 (en) | 2015-03-12 | 2015-03-12 | Vacuum pump with at least one pump stage |
Publications (2)
Publication Number | Publication Date |
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EP3067560A1 EP3067560A1 (en) | 2016-09-14 |
EP3067560B1 true EP3067560B1 (en) | 2020-11-18 |
Family
ID=52633173
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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EP15158724.3A Active EP3067560B1 (en) | 2015-03-12 | 2015-03-12 | Vacuum pump with at least one pump stage |
Country Status (2)
Country | Link |
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EP (1) | EP3067560B1 (en) |
JP (1) | JP6188850B2 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3438460B1 (en) | 2017-08-04 | 2024-03-20 | Pfeiffer Vacuum Gmbh | Vacuum pump |
EP3754200B1 (en) * | 2019-10-07 | 2021-12-08 | Pfeiffer Vacuum Gmbh | Scroll vacuum pump and assembly method |
JP7220692B2 (en) * | 2019-10-07 | 2023-02-10 | プファイファー・ヴァキューム・ゲーエムベーハー | Vacuum pump, scroll pump and manufacturing method thereof |
DE102020128369A1 (en) | 2020-10-28 | 2022-04-28 | Leybold Gmbh | Process for operating a scroll pump and scroll pump |
Citations (5)
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US5718565A (en) | 1992-10-12 | 1998-02-17 | Leybold Aktiengesellschaft | Apparatus and process for operating a dry-compression vacuum pump |
US20010001950A1 (en) | 1998-02-18 | 2001-05-31 | Takeshi Kawamura | Vacuum exhaust system |
JP2006322405A (en) | 2005-05-19 | 2006-11-30 | Denso Corp | Evacuation system |
CA2752655A1 (en) | 2011-09-13 | 2013-03-13 | Allan R. Nelson Engineering (1997) Inc. | Pump with wear sleeve |
US20140322055A1 (en) | 2013-04-30 | 2014-10-30 | Agilent Technologies, Inc. | Scroll Vacuum Pump and Method of Maintenance Including Replacing a Tip Seal of a Scroll Vacuum Pump |
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JPH05106578A (en) * | 1991-10-15 | 1993-04-27 | Ebara Corp | Warming-up control method for screw type dry vacuum pump |
JPH05231381A (en) * | 1992-02-26 | 1993-09-07 | Hitachi Ltd | Method and device for controlling vacuum exhaust capacity of dry vacuum pump and dry vacuum pump and semiconductor manufacturing vacuum processor |
JP4365059B2 (en) * | 2001-10-31 | 2009-11-18 | 株式会社アルバック | Operation method of vacuum exhaust system |
DE10225774C1 (en) * | 2002-06-10 | 2003-12-11 | Vacuubrand Gmbh & Co Kg | Vacuum pump, for condensing and aggressive gases, is a dry pump with a membrane pump stage and a spiral scroll pump stage |
DE10354205A1 (en) * | 2003-11-20 | 2005-06-23 | Leybold Vakuum Gmbh | Method for controlling a drive motor of a vacuum displacement pump |
DE102006050943B4 (en) | 2006-10-28 | 2020-04-16 | Pfeiffer Vacuum Gmbh | Vacuum pump and method for operating the same |
DE102008061897A1 (en) | 2008-12-11 | 2010-06-17 | Pfeiffer Vacuum Gmbh | Vacuum pump |
-
2015
- 2015-03-12 EP EP15158724.3A patent/EP3067560B1/en active Active
-
2016
- 2016-03-02 JP JP2016039622A patent/JP6188850B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5718565A (en) | 1992-10-12 | 1998-02-17 | Leybold Aktiengesellschaft | Apparatus and process for operating a dry-compression vacuum pump |
US20010001950A1 (en) | 1998-02-18 | 2001-05-31 | Takeshi Kawamura | Vacuum exhaust system |
JP2006322405A (en) | 2005-05-19 | 2006-11-30 | Denso Corp | Evacuation system |
CA2752655A1 (en) | 2011-09-13 | 2013-03-13 | Allan R. Nelson Engineering (1997) Inc. | Pump with wear sleeve |
US20140322055A1 (en) | 2013-04-30 | 2014-10-30 | Agilent Technologies, Inc. | Scroll Vacuum Pump and Method of Maintenance Including Replacing a Tip Seal of a Scroll Vacuum Pump |
Also Published As
Publication number | Publication date |
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JP2016169731A (en) | 2016-09-23 |
EP3067560A1 (en) | 2016-09-14 |
JP6188850B2 (en) | 2017-08-30 |
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