EP1488107B1 - Eccentric pump and method for operation of said pump - Google Patents

Eccentric pump and method for operation of said pump Download PDF

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Publication number
EP1488107B1
EP1488107B1 EP03744779A EP03744779A EP1488107B1 EP 1488107 B1 EP1488107 B1 EP 1488107B1 EP 03744779 A EP03744779 A EP 03744779A EP 03744779 A EP03744779 A EP 03744779A EP 1488107 B1 EP1488107 B1 EP 1488107B1
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EP
European Patent Office
Prior art keywords
displacer
pump according
pump
sealing element
cylinder
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Expired - Lifetime
Application number
EP03744779A
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German (de)
French (fr)
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EP1488107A1 (en
Inventor
Thomas Dreifert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
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Leybold Vakuum GmbH
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Publication date
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Publication of EP1488107A1 publication Critical patent/EP1488107A1/en
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/10—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of internal-axis type with the outer member having more teeth or tooth equivalents, e.g. rollers, than the inner member
    • F04C18/107—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of internal-axis type with the outer member having more teeth or tooth equivalents, e.g. rollers, than the inner member with helical teeth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/50—Pumps with means for introducing gas under pressure for ballasting

Definitions

  • the invention relates to a pump having a housing with inlet and outlet, with a stationary, centrally arranged to a central axis of the pump cylinder, with a cylinder eccentrically rotating displacer, with a crank drive for the displacer, with a circumferential, sickle-shaped delivery space between Cylinder and displacer and with a helical sealing element in the delivery chamber. Moreover, the invention relates to a method for operating this pump.
  • a pump with the mentioned features is known from EP-A-464 683. It has the function of a compressor and is preferably intended to compress the gas of a refrigeration cycle.
  • the present invention has for its object to make a pump of the type mentioned so that it can be used as a dry-running vacuum pump.
  • Dry-running rotary vane vacuum pumps are known.
  • the rubbing parts (slide, pump chamber inner wall) have a comparatively high relative speed. The life of the slide and thus the pump itself is therefore limited.
  • suitable vacuum pumps are scroll pumps. They comprise a stationary and a circular component carrying helical, interlocking conveyor elements. Their manufacturing costs are high. In addition, they often require maintenance to ensure reliable continuous operation. Dry piston vacuum pumps are also available on the market. Their manufacturing costs are also high, their construction volume is large. Disadvantages are further noise developments and the unavoidable vibrations.
  • dry two-shaft vacuum pumps screw, Roots, claw vacuum pumps
  • They have pumping powers from about 20 m 3 / h. Production and use of vacuum pumps this Art, however, with pumping speeds below 50 m 3 / h usually not economical.
  • the eccentric vacuum pump according to the invention no longer has the mentioned disadvantages.
  • a friction takes place substantially only in the movement of the helical sealing element in its groove. Much less is the friction between the sealing element and the inner wall of the cylinder or the outer surface of the displacer, depending on where the conveying element leading groove is located.
  • the displacer orbits the relative speeds between the rubbing partners are not high, so that their wear is negligible, especially when using suitable materials.
  • the vacuum pump 1 shown in Figure 1 has a cylindrical housing 2 with bearing caps 3 and 4. At the bearing cap 3, the drive motor 5 connects.
  • the motor shaft 6 passes through the bearing cap 3 and is supported in the bearing 7.
  • the motor shaft 6 is part of a rotating system 8, whose axis of rotation is denoted by 9 and which is supported by means of a shaft stub 11 on the bearing 12 in the bearing cap 4.
  • crank 13 Another component of the rotating system 8 is a crank 13, which is located at the level of the cylindrical housing 2.
  • E denotes the eccentricity.
  • the end portions 14 and 15 of the crank 13 are equipped with bearings 16 and 17, on which a hollow (cavity 20) circulating displacer 18 is supported.
  • the circular movement of the substantially cylindrical displacer 18 takes place about the axis of rotation 9.
  • the crank axle is designated 19.
  • To secure the axial position of the displacer 18 is one of the two bearings 16, 17 - here the bearing 16 - formed as spherical roller bearings.
  • the cylindrical housing 2 which at the same time has the function of the cylinder stator of the pump 1, is centric arranged to the rotation axis 9.
  • the diameter of the displacer 18 is selected so that it does not touch the inner wall of the housing 2.
  • the smallest distance between the housing 2 and the displacer 18 should be as small as possible, suitably much smaller than 1 mm, for example 0.2 mm.
  • an additional co-rotating eccentric is provided for this purpose and designated 21. It is supported by stumps in the displacer 18 and in the bearing cap 4. For its rotatable mounting in the displacer 18 and the bearing cap 4 z. B. dry plain bearings or grease-lubricated bearings are used (not shown). For a unique kinematics of the displacer 18 at least 2 eccentric 21 must be used, the z. B. are arranged offset by 120 °. The illustrated kinematics leads to a rotational movement of the displacer 18 relative to the crank 13 with the axis of rotation 19.
  • the central, substantially cylindrical portion 22 of the crank 13 with its axis 23 is also arranged eccentrically to the axis of rotation 9, with the eccentricity E.
  • the directions of the eccentricities e and E are directed opposite to each other.
  • the eccentricity E and the mass of the central portion 22 are selected so that the unbalance forces, the masses of the rotating crank sections 14 and 15 with the bearings 16 and 17 and the mass of the rotating displacer 18th cause during operation of the pump 1, be compensated.
  • a helical sealing element 27 forms delivery chambers, which move from the inlet 28 of the pump 1 to the outlet 29.
  • 18 closing delivery chambers are formed continuously in the circular motion of the displacer, which open again only on the outlet side.
  • the inlet 28 is located on the lid 4.
  • An outlet chamber 29 is located in the Deckel'3. An adjoining outlet is not shown.
  • the sealing element 27 is a helical flexible, elongated in cross-section, rectangular band. It is guided in a groove 30 in the displacer 18. In the relaxed state, the sealing element 27 has an outer diameter which is slightly larger than the inner diameter of the bore in the cylinder 2. As a result, it is in the mounted state under a radially outwardly acting bias, so that a tight contact of the sealing element 27 is ensured on the inner wall of the housing 2.
  • the width b of the sealing element 27 is greater than twice the amount of eccentricity e.
  • a torque is exerted on the sealing element 27 during operation of the pump 1 by the friction between the sealing element 27 and the groove 30.
  • a resulting axial displacement of the belt 27 is expediently prevented by locking.
  • Such a barrier may e.g. be formed as a stop in the groove 30 of the displacer 18.
  • an end portion of the sealing element 27 is fixed on the housing 2 or on a bearing cap 3.4 such that it can not rotate about the axis 9, but in the axial direction has slight freedom of movement (see FIG ).
  • the pitch of the groove 30 in the displacer 18, and thus also the slope of the sealing element 27, decreases continuously from the inlet 28 to the outlet 29. This also applies to the volumes of the feed chambers traveling from the inlet 28 to the outlet 29, so that a compression of the sucked-in gases takes place.
  • a relief valve 32 is provided. It is located between inlet 28 and outlet 29 and opens a bore 33 in the housing 2, when impermissibly high pressures occur. The discharge takes place via channels 34, 35, which lead directly to the outlet 29.
  • the cavity 20 of the displacer 18 forms a short circuit between inlet 28 and outlet 29 and, on the other hand, that hydrocarbons from this cavity 20 penetrate into the region of the inlet.
  • These tasks fulfill on the one hand the seals 41, 42 which seal the passages of the end portions 14, 15 of the crank 13 through the frontal openings in the displacer 18. It is expedient, moreover, to use for the lubrication of the bearings 16, 17 hydrocarbon-free grease.
  • a negative pressure, for. B. 80 mbar to maintain. This can be done via a bore 43 in the Verdrängerwandung. It opens into the delivery chamber 26, in the area in which there is the desired internal pressure in the cavity of the displacer. By this measure, the seal 42 applied pressure difference is significantly reduced.
  • the embodiment shown in Figure 2 differs from the embodiment of Figure 1, characterized in that the rotating system 8 and the displacer mounted thereon 18 are supported on the shaft 6 flying.
  • the shaft 6 itself is supported by the bearing 7 in the pump housing 2 and another bearing, not shown, in the motor housing.
  • This measure has the advantage that the hollow interior 20 of the displacer 18 can be sealed tight on the suction side (cover 44).
  • an Oldham coupling 45 is provided to prevent the rotational movement of the displacer 18, an Oldham coupling 45 is provided.
  • the sealing element 27 is fixed by means of an axial pin 46 on the cover 4.
  • the pin 46 passes through a bore 47 in the sealing element 27, which prevents rotation of the belt about the axis 9, but permits a play in the axial direction.
  • ballast gas passes through a line 51 from the outside through a bore, not shown in detail in the housing 2 in the delivery chamber 26.
  • a check valve 52 In the line 51 is a check valve 52, a check valve 53 and a differential pressure valve 54.
  • a gas ballast device of this kind is known from DE-A-199 62 445.
  • the supply of the ballast gas via the cavity 20 of the displacer 18 takes place.
  • a channel system 55 in the rotating system 8 forms the connection to the outside. Passed via the channel system ballast gas (arrows 56) passes through a bore 57 (shown in phantom) in the displacement in the delivery chamber 26.
  • the advantage of this embodiment is that the displacer is cooled from the inside by the ballast gas.
  • the gases conveyed by the pump leave the delivery chamber 26 via the bore 59 in the housing 2. This opens into the channel 34, which communicates with the outlet 29 of the pump.
  • the circular movement of the displacer 18 and the pitch of the helical groove 30 are chosen so that the individual delivery chambers in the delivery chamber 26 during operation of the pump 1 from the inlet 28 to the bore 59 to move (arrows 61).
  • the displacer 18 extends with its portion 62 beyond the bore 59 addition. This also applies to the groove 30.
  • the pitch of the groove 30 is selected so that a further, independent sealing element 27 ') forming delivery chambers, which is directed against the conveying direction between the inlet 28 and bore 59 (arrows 63).
  • the pump is double-flow. It has two pumping stages, which promote from the respective end faces in the direction of bore 61. If a connection between the cavity 20 of the displacer and the suction side of the section 62 is made (arrows 64), it is possible to keep the cavity 20 at a negative pressure. In addition, an effective cooling of the pump can be realized. Cooling gas flowing into the cavity 20 via the channel system 55 in the rotating system 8 reaches the suction side of the section 62 and is removed together with the conveyed gas through the bore 59 and the outlet 29 from the delivery chamber 26. In this way, it is also prevented that gas from the inlet 28 of the pump into the cavity 20 and to the bearings located therein 7, 16 and 17 can pass. This is desirable, for example, when corrosive or corrosive gases to be promoted.
  • Figure 3 shows a double-flow design with a central inlet 28 and two end-side, indicated only by arrows outlets 29 and 29 '.
  • Side of the inlet 28 are two pump sections, of which only one is shown.
  • the non-visible portion is formed in mirror image to the visible portion. They each convey from the inlet 28 to the outlet 29 or 29 '.
  • the rotating system 8 (axis 9) as well the circular displacer 18 extend over the entire length of the pump 1.
  • the drive is via the motor 5 and a coupling, not shown in detail.
  • the sealing elements 27, 27 'leading grooves 30, 30' in the housing 2.
  • the respective inner narrow side of the sealing elements 27, 27 ' are the cylindrical outer wall of the displacer 18 at. This is achieved in that the helical sealing elements 27, 27 'in the relaxed state have a diameter which is smaller than the outer diameter of the displacer 18.
  • a two-stage pump 1 according to the invention. It has an outer housing 2 with two helical grooves 30 and 30 ", in each of which a sealing element 27, 27" is guided.
  • the arrangement corresponds to a two-start thread.
  • crank 13 crank section 14
  • circular displacer 18 are mounted in such a manner that bearings are no longer required in the region of the end face 31.
  • the crank portion 14 has a step.
  • the displacer 18 is supported on the two bearings 16, 17 with different diameters flying.
  • the pumping stage formed by the sealing elements 27, 27 "and the outer wall of the displacer 18 is preceded by a further pumping stage, for which purpose the displacer 18 is designed in the manner of a double pot.
  • a cylindrical member 35 is fixed centrally via a flange 34 to the axis 9, which projects into the interior 36 of the displacer 18 in. Its diameter is chosen so that its outer wall and the inner wall of the displacer 18 form a further sickle-shaped delivery chamber 37.
  • the outer wall of the cylindrical member 35 (or the inner wall of the displacer 18) is equipped with a helical groove 38 in which a further sealing element 39 is guided.
  • the pumping stage formed by the component 35, displacer 18 and sealing element 39 serves as the first stage of a two-stage pump 1 according to the invention. It conveys from the bearing side in the direction of the end face 31. In this area, the delivery chambers 37 and 26 communicate with each other.
  • the inlet 28 forms a central bore 60 in the component 35.
  • the slopes of the groove 38 in the component 35 and the grooves 30, 30 'in the housing 2 are constant (easy to produce) but chosen different sizes.
  • the slope of the groove 38 is greater than the pitch of the grooves 30, 30 '.
  • a particular advantage of the described embodiment is that the high pressure stage is located outside.
  • the heat which is preferably produced in the high pressure stage can be dissipated in a simple manner, be it through cooling channels in the housing 2 or, as shown, by relatively large cooling fins 51.
  • the helical sealing element 27, 27 ', 27 ", 39 has the task of mutually sealing the delivery chambers moving from the suction side to the pressure side,
  • the frictional resistance between the sealing element and the involved components 2, 18, 35 should be minimal 5a to 5c show special configurations of the sealing element 27.
  • the sealing element 27 bears against the inside of the stator housing 2 with a substantially axially directed sealing lip 71.
  • the recess 72 located below the sealing lip 71 is to the side with the higher pressure open, leaving a flexible and safe investment of the sealing lip 71 is ensured.
  • the embodiments of the sealing element 27 according to FIGS. 5b and 5c have radially directed and differently long sealing lips 73, 74 in the region of the groove 30. They have the effect of a reduced frictional resistance between the sealing element and the groove side walls.
  • the described embodiments differ essentially in terms of their bearings as well as in terms of number, pitch and choice of the location of the guide grooves for the or the sealing elements.
  • the variants described can be implemented in each of the described embodiments.
  • the invention makes it possible to produce at low production costs a compact, dry-running, low-noise and low-vibration vacuum pump, which is economical even at low pump powers (below 50 m 3 / h). It is sufficient if the rotational speed of the rotating components is between 1500 and 3600 rpm. Cooling the pump is easy as all essential components have contact with the atmosphere.
  • the displacer 18 and / or the housing 2 and the component 35 expediently consist of an aluminum material, preferably from a hard anodised aluminum alloy, eg AlMgSi1.
  • a hard anodised aluminum alloy eg AlMgSi1.
  • speed and eccentricity are chosen so that the sliding speed between 1 and 5 m / sec, preferably 4 and 5 m / sec. lies.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Description

Die Erfindung bezieht sich auf eine Pumpe mit einem Gehäuse mit Einlass und Auslass, mit einem ortsfesten, zu einer Mittelachse der Pumpe zentrisch angeordneten Zylinder, mit einem im Zylinder exzentrisch kreisenden Verdränger, mit einem Kurbelantrieb für den Verdränger, mit einem umlaufenden, sichelförmigen Förderraum zwischen Zylinder und Verdränger und mit einem wendelförmigen Dichtelement im Förderraum. Außerdem bezieht sich die Erfindung auf ein Verfahren zum Betrieb dieser Pumpe.The invention relates to a pump having a housing with inlet and outlet, with a stationary, centrally arranged to a central axis of the pump cylinder, with a cylinder eccentrically rotating displacer, with a crank drive for the displacer, with a circumferential, sickle-shaped delivery space between Cylinder and displacer and with a helical sealing element in the delivery chamber. Moreover, the invention relates to a method for operating this pump.

Eine Pumpe mit den genannten Merkmalen ist aus der EP-A-464 683 bekannt. Sie hat die Funktion eines Kompressors und ist vorzugsweise dazu bestimmt, das Gas eines Kältekreislaufs zu komprimieren.A pump with the mentioned features is known from EP-A-464 683. It has the function of a compressor and is preferably intended to compress the gas of a refrigeration cycle.

Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Pumpe der eingangs genannten Art so zu gestalten, dass sie als trocken laufende Vakuumpumpe eingesetzt werden kann.The present invention has for its object to make a pump of the type mentioned so that it can be used as a dry-running vacuum pump.

Diese Aufgabe wird durch die kennzeichnenden Merkmale der Patentansprüche gelöst.This object is solved by the characterizing features of the claims.

In den vergangenen Jahren haben die Kunden der Hersteller von Vakuumpumpen immer häufiger trocken laufende Vakuumpumpen benötigt. Darunter sind Pumpen zu verstehen, deren Schöpfräume schmiermittelfrei sind. Bei Pumpen dieser Art besteht nicht mehr die Gefahr, dass Kohlenwasserstoffe in die von den Pumpen zu evakuierenden Kammern diffundieren und die darin ablaufenden Prozesse (Halbleiterproduktion, Bedampfungsprozesse, chemische Prozesse usw.) stören.In recent years, customers of vacuum pump manufacturers have increasingly needed dry running vacuum pumps. These are to be understood as pumps whose pump chambers are lubricant-free. With pumps of this type, there is no longer the danger that hydrocarbons will diffuse into the chambers to be evacuated by the pumps and disturb the processes running therein (semiconductor production, vapor deposition processes, chemical processes, etc.).

Trocken laufende Drehschiebervakuumpumpen sind bekannt. Die reibenden Teile (Schieber, Schöpfrauminnenwand) haben eine vergleichsweise hohe Relativgeschwindigkeit. Die Lebensdauer der Schieber und damit der Pumpen selbst ist deshalb begrenzt. Für den Trockenlauf geeignetere Vakuumpumpen sind Scrollpumpen. Sie umfassen ein ortsfestes und ein kreisendes Bauteil, die spiralförmige, ineinander greifende Förderelemente tragen. Ihre Herstellkosten sind hoch. Außerdem müssen sie häufig gewartet werden, um einen zuverlässigen Dauerbetrieb sicher zu stellen. Auch trockene Kolbenvakuumpumpen werden auf dem Markt angeboten. Ihre Herstellkosten sind ebenfalls hoch, ihr Bauvolumen ist groß. Nachteilig sind weiterhin Geräuschentwicklungen und die nicht vermeidbaren Vibrationen. Schließlich sind trockene Zweiwellen-Vakuumpumpen (Schrauben-, Roots-, Klauen-Vakuumpumpen) bekannt. Sie haben Pumpleistungen ab etwa 20 m3/h. Herstellung und Einsatz von Vakuumpumpen dieser Art sind jedoch bei Saugvermögen unter 50 m3/h meist nicht mehr wirtschaftlich.Dry-running rotary vane vacuum pumps are known. The rubbing parts (slide, pump chamber inner wall) have a comparatively high relative speed. The life of the slide and thus the pump itself is therefore limited. For the dry running more suitable vacuum pumps are scroll pumps. They comprise a stationary and a circular component carrying helical, interlocking conveyor elements. Their manufacturing costs are high. In addition, they often require maintenance to ensure reliable continuous operation. Dry piston vacuum pumps are also available on the market. Their manufacturing costs are also high, their construction volume is large. Disadvantages are further noise developments and the unavoidable vibrations. Finally, dry two-shaft vacuum pumps (screw, Roots, claw vacuum pumps) are known. They have pumping powers from about 20 m 3 / h. Production and use of vacuum pumps this Art, however, with pumping speeds below 50 m 3 / h usually not economical.

Die erfindungsgemäße Exzenter-Vakuumpumpe weist die erwähnten Nachteile nicht mehr auf. Eine Reibung findet im wesentlichen nur noch bei der Bewegung des wendelförmigen Dichtelementes in seiner Nut statt. Wesentlich geringfügiger ist die Reibung zwischen dem Dichtelement und der Innenwand des Zylinders oder der Außenfläche des Verdrängers, je nach dem wo sich die das Förderelement führende Nut befindet. Da der Displacer orbitiert, sind die Relativgeschwindigkeiten zwischen den reibenden Partnern jedoch nicht hoch, so dass ihr Verschleiß insbesondere beim Einsatz geeigneter Werkstoffe vernachlässigbar ist.The eccentric vacuum pump according to the invention no longer has the mentioned disadvantages. A friction takes place substantially only in the movement of the helical sealing element in its groove. Much less is the friction between the sealing element and the inner wall of the cylinder or the outer surface of the displacer, depending on where the conveying element leading groove is located. However, since the displacer orbits, the relative speeds between the rubbing partners are not high, so that their wear is negligible, especially when using suitable materials.

Weitere Vorteile und Einzelheiten der Erfindung sollen an Hand von in den Figuren 1 bis 5 schematisch dargestellten Ausführungsbeispielen erläutert werden. Es zeigen

  • Figur 1 einen Schnitt durch eine Vakuumpumpe nach der Erfindung in einflutiger Ausführung mit beidseitig gelagertem Verdränger,
  • Figur 2 einen Schnitt durch.eine Vakuumpumpe nach der Erfindung in einflutiger Ausführung mit fliegend gelagertem Verdränger,
  • Figur 3 einen Teilschnitt durch eine Vakuumpumpe nach der Erfindung in zweiflutiger Ausführung.
  • Figur 4 einem Teilschnitt durch eine Vakuumpumpe nach der Erfindung mit zwei Stufen und fliegend gelagertem Verdränger sowie
  • Figuren 5a, b, c Schnitte durch das wendelförmige Dichtelement.
Further advantages and details of the invention will be explained with reference to embodiments schematically illustrated in Figures 1 to 5. Show it
  • 1 shows a section through a vacuum pump according to the invention in a single-flow design with both sides mounted displacer,
  • FIG. 2 shows a section through a vacuum pump according to the invention in a single-flow design with a floating displacer,
  • 3 shows a partial section through a vacuum pump according to the invention in a double-flow design.
  • Figure 4 shows a partial section through a vacuum pump according to the invention with two stages and fly-mounted displacer and
  • Figures 5a, b, c sections through the helical sealing element.

Die in Figur 1 dargestellte Vakuumpumpe 1 besitzt ein zylindrisches Gehäuse 2 mit Lagerdeckeln 3 und 4. An den Lagerdeckel 3 schließt sich der Antriebsmotor 5 an. Die Motorwelle 6 durchsetzt den Lagerdeckel 3 und stützt sich im Lager 7 ab. Die Motorwelle 6 ist Bestandteil eines rotierenden Systems 8, dessen Drehachse mit 9 bezeichnet ist und das sich mittels eines Wellenstutzens 11 über das Lager 12 im Lagerdeckel 4 abstützt.The vacuum pump 1 shown in Figure 1 has a cylindrical housing 2 with bearing caps 3 and 4. At the bearing cap 3, the drive motor 5 connects. The motor shaft 6 passes through the bearing cap 3 and is supported in the bearing 7. The motor shaft 6 is part of a rotating system 8, whose axis of rotation is denoted by 9 and which is supported by means of a shaft stub 11 on the bearing 12 in the bearing cap 4.

Ein weiterer Bestandteil des rotierenden Systems 8 ist eine Kurbel 13, die sich in Höhe des zylindrischen Gehäuses 2 befindet. Mit e ist die Exzentrizität bezeichnet. Die Endabschnitte 14 und 15 der Kurbel 13 sind mit Lagern 16 und 17 ausgerüstet, auf denen sich ein hohler (Hohlraum 20) kreisender Verdränger 18 abstützt. Die kreisende Bewegung des im wesentlichen zylindrischen Verdrängers 18 findet um die Drehachse 9 statt. Die Kurbelachse ist mit 19 bezeichnet. Zur Sicherung der axialen Lage des Verdrängers 18 ist eines der beiden Lager 16, 17 - hier das Lager 16 - als Pendelrollenlager ausgebildet.Another component of the rotating system 8 is a crank 13, which is located at the level of the cylindrical housing 2. E denotes the eccentricity. The end portions 14 and 15 of the crank 13 are equipped with bearings 16 and 17, on which a hollow (cavity 20) circulating displacer 18 is supported. The circular movement of the substantially cylindrical displacer 18 takes place about the axis of rotation 9. The crank axle is designated 19. To secure the axial position of the displacer 18 is one of the two bearings 16, 17 - here the bearing 16 - formed as spherical roller bearings.

Das zylindrische Gehäuse 2, das gleichzeitig die Funktion des Zylinderstators der Pumpe 1 hat, ist zentrisch zur Drehachse 9 angeordnet. Der Durchmesser des Verdrängers 18 ist so gewählt, dass er die Innenwand des Gehäuses 2 nicht berührt. Der kleinste Abstand zwischen Gehäuse 2 und Verdränger 18 soll so klein wie möglich sein, zweckmäßig wesentlich kleiner als 1 mm, z.B. 0,2 mm.The cylindrical housing 2, which at the same time has the function of the cylinder stator of the pump 1, is centric arranged to the rotation axis 9. The diameter of the displacer 18 is selected so that it does not touch the inner wall of the housing 2. The smallest distance between the housing 2 and the displacer 18 should be as small as possible, suitably much smaller than 1 mm, for example 0.2 mm.

Zur Verhinderung der Drehbewegung eines kreisenden Verdrängers ist es bekannt, Drehmomentstützen (Oldham-Kupplung, Blatt-, Drahtfedern o. dgl.) einzusetzen. Bei der Ausführung nach Figur 1 ist hierfür ein zusätzlicher mitdrehender Exzenter vorgesehen und mit 21 bezeichnet. Er stützt sich über Stümpfe im Verdränger 18 und im Lagerdeckel 4 ab. Für seine drehbare Lagerung im Verdränger 18 und im Lagerdeckel 4 können z. B. trockene Gleitlager oder fettgeschmierte Wälzlager eingesetzt werden (nicht dargestellt). Für eine eindeutige Kinematik des Verdrängers 18 müssen mindestens 2 Exzenter 21 eingesetzt werden, die z. B. um 120° versetzt angeordnet sind. Die dargestellte Kinematik führt zu einer Drehbewegung des Verdrängers 18 relativ zur Kurbel 13 mit der Drehachse 19.To prevent the rotational movement of a rotating displacer, it is known to use torque arms (Oldham coupling, leaf springs, wire springs o. The like.). In the embodiment of Figure 1, an additional co-rotating eccentric is provided for this purpose and designated 21. It is supported by stumps in the displacer 18 and in the bearing cap 4. For its rotatable mounting in the displacer 18 and the bearing cap 4 z. B. dry plain bearings or grease-lubricated bearings are used (not shown). For a unique kinematics of the displacer 18 at least 2 eccentric 21 must be used, the z. B. are arranged offset by 120 °. The illustrated kinematics leads to a rotational movement of the displacer 18 relative to the crank 13 with the axis of rotation 19.

Der mittlere, im wesentlichen zylindrische Abschnitt 22 der Kurbel 13 mit seiner Achse 23 ist ebenfalls exzentrisch zur Drehachse 9 angeordnet, und zwar mit der Exzentrizität E. Die Richtungen der Exzentrizitäten e und E sind einander entgegen gerichtet. Die Exzentrizität E und die Masse des mittleren Abschnittes 22 sind so gewählt, dass die Unwucht-Kräfte, die die Massen der sich drehenden Kurbelabschnitte 14 und 15 mit den Lagern 16 und 17 sowie die Masse des kreisenden Verdrängers 18 während des Betriebs der Pumpe 1 verursachen, kompensiert werden.The central, substantially cylindrical portion 22 of the crank 13 with its axis 23 is also arranged eccentrically to the axis of rotation 9, with the eccentricity E. The directions of the eccentricities e and E are directed opposite to each other. The eccentricity E and the mass of the central portion 22 are selected so that the unbalance forces, the masses of the rotating crank sections 14 and 15 with the bearings 16 and 17 and the mass of the rotating displacer 18th cause during operation of the pump 1, be compensated.

Zwischen dem Gehäuse 2 und dem Verdränger 18 befindet sich der sichelförmige Förderraum 26. Ein wendelförmiges Dichtelement 27 bildet Förderkammern, die sich vom Einlass 28 der Pumpe 1 zum Auslass 29 bewegen. Einlassseitig werden laufend sich bei der Kreisbewegung des Verdrängers 18 schließende Förderkammern gebildet, die sich erst auslassseitig wieder öffnen. Bei der in Figur 1 dargestellten Ausführungsform befindet sich der Einlass 28 am Deckel 4. Eine Auslasskammer 29 befindet sich im Deckel'3. Ein sich daran anschließender Auslassstutzen ist nicht dargestellt.Between the housing 2 and the displacer 18 is the crescent-shaped delivery chamber 26. A helical sealing element 27 forms delivery chambers, which move from the inlet 28 of the pump 1 to the outlet 29. On the inlet side, 18 closing delivery chambers are formed continuously in the circular motion of the displacer, which open again only on the outlet side. In the embodiment shown in Figure 1, the inlet 28 is located on the lid 4. An outlet chamber 29 is located in the Deckel'3. An adjoining outlet is not shown.

Das Dichtelement 27 ist ein wendelförmiges flexibles, im Querschnitt langgestreckt, rechteckförmiges Band. Es ist in einer Nut 30 im Verdränger 18 geführt. Im entspannten Zustand hat das Dichtelement 27 einen Außendurchmesser, der etwas größer als der Innendurchmesser der Bohrung im Zylinder 2 ist. Dadurch steht es im montierten Zustand unter einer radial nach außen wirkenden Vorspannung, so dass eine dichte Anlage des Dichtelementes 27 an der Innenwand des Gehäuses 2 gewährleistet ist. Die Breite b des Dichtelementes 27 ist größer als der zweifache Betrag der Exzentrizität e. Dadurch werden der geschlossene Zustand der Förderkammern während ihrer Bewegung vom Einlass 28 zum Auslass 29 sowie eine sichere Führung des Dichtelementes 27 in der Nut 30 gewährleistet und Rückströmungen verhindert. Das Spiel des Dichtelementes 27 in der Nut 30 sollte möglichst klein sein, z.B. 0,2 mm.The sealing element 27 is a helical flexible, elongated in cross-section, rectangular band. It is guided in a groove 30 in the displacer 18. In the relaxed state, the sealing element 27 has an outer diameter which is slightly larger than the inner diameter of the bore in the cylinder 2. As a result, it is in the mounted state under a radially outwardly acting bias, so that a tight contact of the sealing element 27 is ensured on the inner wall of the housing 2. The width b of the sealing element 27 is greater than twice the amount of eccentricity e. As a result, the closed state of the delivery chambers during their movement from the inlet 28 to the outlet 29 and a secure guidance of the sealing element 27 are ensured in the groove 30 and prevents backflow. The play of the sealing element 27 in the groove 30 should be as small as possible, for example 0.2 mm.

Obwohl zwischen dem Gehäuse 2 und dem Dichtelement 27 eine maßgebliche Reibung nicht stattfindet, wird auf das Dichtungselement 27 während des Betriebs der Pumpe 1 ein Drehmoment durch die Reibung zwischen Dichtungselement 27 und Nut 30 ausgeübt. Eine daraus resultierende axiale Verschiebung des Bandes 27 wird zweckmäßig durch Sperren verhindert. Eine derartige Sperre kann z.B. als Anschlag in der Nut 30 des Verdrängers 18 ausgebildet sein. Eine andere Möglichkeit besteht darin, dass ein Endabschnitt des Dichtelementes 27 am Gehäuse 2 oder an einem Lagerdeckel 3,4 derart fixiert ist, dass es sich nicht um die Achse 9 drehen kann, in axialer Richtung jedoch geringfügigen Bewegungsspielraum aufweist (vgl. Fig. 2).Although a significant friction does not take place between the housing 2 and the sealing element 27, a torque is exerted on the sealing element 27 during operation of the pump 1 by the friction between the sealing element 27 and the groove 30. A resulting axial displacement of the belt 27 is expediently prevented by locking. Such a barrier may e.g. be formed as a stop in the groove 30 of the displacer 18. Another possibility is that an end portion of the sealing element 27 is fixed on the housing 2 or on a bearing cap 3.4 such that it can not rotate about the axis 9, but in the axial direction has slight freedom of movement (see FIG ).

Bei der in Figur 1 dargestellten Ausführung nimmt die Steigung der Nut 30 im Verdränger 18 und damit auch die Steigung des Dichtelementes 27 vom Einlass 28 zum Auslass 29 kontinuierlich ab. Dieses gilt ebenfalls für die Volumina der vom Einlass 28 zum Auslass 29 wandernden Förderkammern, so dass eine Kompression der angesaugten Gase stattfindet. Um zu Beginn einer Evakuierungsphase unzulässig hohe Überdrücke in der Pumpe zu vermeiden, ist ein Entlastungsventil 32 vorgesehen. Es befindet sich zwischen Einlass 28 und Auslass 29 und öffnet eine Bohrung 33 im Gehäuse 2, wenn unzulässig hohe Drücke auftreten. Die Entlastung findet über Kanäle 34, 35 statt, die unmittelbar zum Auslass 29 führen.In the embodiment shown in FIG. 1, the pitch of the groove 30 in the displacer 18, and thus also the slope of the sealing element 27, decreases continuously from the inlet 28 to the outlet 29. This also applies to the volumes of the feed chambers traveling from the inlet 28 to the outlet 29, so that a compression of the sucked-in gases takes place. To avoid unacceptably high pressures in the pump at the beginning of an evacuation phase, a relief valve 32 is provided. It is located between inlet 28 and outlet 29 and opens a bore 33 in the housing 2, when impermissibly high pressures occur. The discharge takes place via channels 34, 35, which lead directly to the outlet 29.

Bei der Ausführung nach Figur 1 muss verhindert werden, dass zum einen der Hohlraum 20 des Verdrängers 18 einen Kurzschluss zwischen Einlass 28 und Auslass 29 bildet und dass zum anderen Kohlenwasserstoffe aus diesem Hohlraum 20 in den Bereich des Einlasses dringen. Diese Aufgaben erfüllen zum einen die Dichtungen 41, 42, die die Durchtritte der Endabschnitte 14, 15 der Kurbel 13 durch die stirnseitigen Öffnungen im Verdränger 18 abdichten. Zweckmäßig ist es darüber hinaus, für die Schmierung der Lager 16, 17 kohlenwasserstofffreies Fett zu verwenden. Schließlich ist es vorteilhaft, im Innenraum 20 des Verdrängers einen Unterdruck, z. B. 80 mbar, aufrecht zu erhalten. Dieses kann über eine Bohrung 43 in der Verdrängerwandung geschehen. Sie mündet in den Förderraum 26, und zwar in den Bereich, in dem der im Hohlraum des Verdrängers gewünschte Innendruck herrscht. Durch diese Maßnahme wird die der Dichtung 42 anliegende Druckdifferenz erheblich reduziert.In the embodiment according to FIG. 1, it must be prevented that, on the one hand, the cavity 20 of the displacer 18 forms a short circuit between inlet 28 and outlet 29 and, on the other hand, that hydrocarbons from this cavity 20 penetrate into the region of the inlet. These tasks fulfill on the one hand the seals 41, 42 which seal the passages of the end portions 14, 15 of the crank 13 through the frontal openings in the displacer 18. It is expedient, moreover, to use for the lubrication of the bearings 16, 17 hydrocarbon-free grease. Finally, it is advantageous in the interior 20 of the displacer, a negative pressure, for. B. 80 mbar to maintain. This can be done via a bore 43 in the Verdrängerwandung. It opens into the delivery chamber 26, in the area in which there is the desired internal pressure in the cavity of the displacer. By this measure, the seal 42 applied pressure difference is significantly reduced.

Die in Figur 2 dargestellte Ausführungsform unterscheidet sich von der Ausführung nach Figur 1 dadurch, dass sich das rotierende System 8 sowie der darauf gelagerte Verdränger 18 fliegend auf der Welle 6 abstützen. Die Welle 6 selbst stützt sich über das Lager 7 im Pumpengehäuse 2 und einem weiteren, nicht dargestellten Lager im Motorgehäuse ab. Diese Maßnahme hat den Vorteil, dass der hohle Innenraum 20 des Verdrängers 18 ansaugseitig dicht abgeschlossen werden kann (Deckel 44). Zur Verhinderung der Drehbewegung des Verdrängers 18 ist eine Oldham-Kupplung 45 vorgesehen. Das Dichtelement 27 ist mittels eines Axialstiftes 46 am Deckel 4 fixiert. Der Stift 46 durchsetzt eine Bohrung 47 im Dichtelement 27, die eine Drehung des Bandes um die Achse 9 verhindert, ein Spiel in axialer Richtung jedoch zulässt.The embodiment shown in Figure 2 differs from the embodiment of Figure 1, characterized in that the rotating system 8 and the displacer mounted thereon 18 are supported on the shaft 6 flying. The shaft 6 itself is supported by the bearing 7 in the pump housing 2 and another bearing, not shown, in the motor housing. This measure has the advantage that the hollow interior 20 of the displacer 18 can be sealed tight on the suction side (cover 44). To prevent the rotational movement of the displacer 18, an Oldham coupling 45 is provided. The sealing element 27 is fixed by means of an axial pin 46 on the cover 4. The pin 46 passes through a bore 47 in the sealing element 27, which prevents rotation of the belt about the axis 9, but permits a play in the axial direction.

Zwei Varianten für eine Gasballastzufuhr sind dargestellt. Bei einer ersten gelangt das Ballastgas über eine Leitung 51 von außen durch eine im einzelnen nicht dargestellte Bohrung im Gehäuse 2 in den Förderraum 26. In der Leitung 51 befinden sich ein Absperrventil 52, ein Rückschlagventil 53 und ein Differenzdruckventil 54. Eine Gasballasteinrichtung dieser Art ist aus der DE-A-199 62 445 bekannt.Two variants for a gas ballast feed are shown. In a first, the ballast gas passes through a line 51 from the outside through a bore, not shown in detail in the housing 2 in the delivery chamber 26. In the line 51 is a check valve 52, a check valve 53 and a differential pressure valve 54. A gas ballast device of this kind is known from DE-A-199 62 445.

Bei der zweiten Variante erfolgt die Zufuhr des Ballastgases über den Hohlraum 20 des Verdrängers 18. Ein Kanalsystem 55 im rotierenden System 8 bildet die Verbindung nach außen. Über das Kanalsystem zugeführtes Ballastgas (Pfeile 56) gelangt über eine Bohrung 57 (gestrichelt dargestellt) in der Verdrängerwand in den Förderraum 26. Der Vorteil dieser Ausführungsform ist, dass der Verdränger von innen durch das Ballastgas gekühlt wird.In the second variant, the supply of the ballast gas via the cavity 20 of the displacer 18 takes place. A channel system 55 in the rotating system 8 forms the connection to the outside. Passed via the channel system ballast gas (arrows 56) passes through a bore 57 (shown in phantom) in the displacement in the delivery chamber 26. The advantage of this embodiment is that the displacer is cooled from the inside by the ballast gas.

Bei der Ausführung nach Figur 2 verlassen die von der Pumpe geförderten Gase den Förderraum 26 über die Bohrung 59 im Gehäuse 2. Diese mündet in den Kanal 34, der mit dem Auslass 29 der Pumpe in Verbindung steht. Die kreisende Bewegung des Verdrängers 18 und die Steigung der wendelförmigen Nut 30 sind so gewählt, dass sich die einzelnen Förderkammern im Förderraum 26 während des Betriebs der Pumpe 1 vom Einlass 28 bis zur Bohrung 59 bewegen (Pfeile 61). Bei der dargestellten Ausführung erstreckt sich der Verdränger 18 mit seinem Abschnitt 62 über die Bohrung 59 hinaus. Dieses gilt auch für die Nut 30. Allerdings ist die Steigung der Nut 30 so gewählt, dass ein weiteres, unabhängiges Dichtelement 27') Förderkammern bildet, die der Förderrichtung zwischen Einlass 28 und Bohrung 59 entgegen gerichtet ist (Pfeile 63). Letztlich ist die Pumpe zweiflutig ausgebildet. Sie weist zwei Pumpstufen auf, die von den jeweiligen Stirnseiten aus in Richtung Bohrung 61 fördern. Wird eine Verbindung zwischen dem Hohlraum 20 des Verdrängers und der Saugseite des Abschnittes 62 hergestellt (Pfeile 64), besteht die Möglichkeit, den Hohlraum 20 auf einem Unterdruck zu halten. Darüber hinaus kann eine wirksame Kühlung der Pumpe realisiert werden. Über das Kanalsystem 55 im rotierenden System 8 in den Hohlraum 20 einströmendes Kühlgas gelangt auf die Saugseite des Abschnittes 62 und wird gemeinsam mit dem geförderten Gas durch die Bohrung 59 und den Auslass 29 aus dem Förderraum 26 entfernt. Auf diese Weise wird zudem verhindert, dass Gas vom Einlass 28 der Pumpe in den Hohlraum 20 und zu den darin befindlichen Lagern 7, 16 und 17 gelangen kann. Das ist z.B. wünschenswert, wenn korrosive oder ätzende Gase gefördert werden sollen.In the embodiment according to FIG. 2, the gases conveyed by the pump leave the delivery chamber 26 via the bore 59 in the housing 2. This opens into the channel 34, which communicates with the outlet 29 of the pump. The circular movement of the displacer 18 and the pitch of the helical groove 30 are chosen so that the individual delivery chambers in the delivery chamber 26 during operation of the pump 1 from the inlet 28 to the bore 59 to move (arrows 61). In the illustrated embodiment, the displacer 18 extends with its portion 62 beyond the bore 59 addition. This also applies to the groove 30. However, the pitch of the groove 30 is selected so that a further, independent sealing element 27 ') forming delivery chambers, which is directed against the conveying direction between the inlet 28 and bore 59 (arrows 63). Ultimately, the pump is double-flow. It has two pumping stages, which promote from the respective end faces in the direction of bore 61. If a connection between the cavity 20 of the displacer and the suction side of the section 62 is made (arrows 64), it is possible to keep the cavity 20 at a negative pressure. In addition, an effective cooling of the pump can be realized. Cooling gas flowing into the cavity 20 via the channel system 55 in the rotating system 8 reaches the suction side of the section 62 and is removed together with the conveyed gas through the bore 59 and the outlet 29 from the delivery chamber 26. In this way, it is also prevented that gas from the inlet 28 of the pump into the cavity 20 and to the bearings located therein 7, 16 and 17 can pass. This is desirable, for example, when corrosive or corrosive gases to be promoted.

Figur 3 zeigt eine zweiflutige Ausführung mit einem mittleren Einlaß 28 und zwei stirnseitigen, nur durch Pfeile angedeuteten Auslässen 29 und 29'. Seitlich vom Einlaß 28 befinden sich zwei Pumpabschnitte, von denen nur einer dargestellt ist. Der nicht sichtbare Abschnitt ist spiegelbildlich zum sichtbaren Abschnitt ausgebildet. Sie fördern jeweils vom Einlaß 28 zum Auslass 29 bzw. 29'. Das rotierende System 8 (Achse 9) sowie der kreisende Verdränger 18 erstrecken sich über die gesamte Länge der Pumpe 1. Der Antrieb erfolgt über den Motor 5 und eine im einzelnen nicht dargestellte Kupplung. Zwei Dichtelemente 27, 27' bilden Förderkammern, die von innen nach außen wandern. Im Gegensatz zur Ausführungsform nach Figur 1 befinden sich die die Dichtelemente 27, 27' führenden Nuten 30, 30' im Gehäuse 2. Die jeweils innere Schmalseite der Dichtelemente 27, 27' liegen der zylindrischen Außenwand des Verdrängers 18 an. Dieses wird dadurch erreicht, dass die wendelförmigen Dichtelemente 27, 27' im entspannten Zustand einen Durchmesser haben, der kleiner als der Außendurchmesser des Verdrängers 18 ist.Figure 3 shows a double-flow design with a central inlet 28 and two end-side, indicated only by arrows outlets 29 and 29 '. Side of the inlet 28 are two pump sections, of which only one is shown. The non-visible portion is formed in mirror image to the visible portion. They each convey from the inlet 28 to the outlet 29 or 29 '. The rotating system 8 (axis 9) as well the circular displacer 18 extend over the entire length of the pump 1. The drive is via the motor 5 and a coupling, not shown in detail. Two sealing elements 27, 27 'form delivery chambers, which migrate from the inside to the outside. In contrast to the embodiment of Figure 1, the sealing elements 27, 27 'leading grooves 30, 30' in the housing 2. The respective inner narrow side of the sealing elements 27, 27 'are the cylindrical outer wall of the displacer 18 at. This is achieved in that the helical sealing elements 27, 27 'in the relaxed state have a diameter which is smaller than the outer diameter of the displacer 18.

Der besondere Vorteil der Ausführungsform nach Figur 3 liegt darin, dass die beiden Auslässe 29, 29' stirnseitig angeordnet sind. Die beiden Stirnseiten des Verdrängers müssen nicht mehr vakuumdicht verschlossen sein. Es besteht sogar die Möglichkeit, die Pumpe so zu modifizieren, dass ein Kühlmittel - z. B. von einem Ventilator erzeugte Kühlluft - den Hohlraum 20 durchströmt. Ein weiterer Vorteil ist, dass keine nennenswerten Axialkräfte auf die Lager ausgeübt werden, weil sich axiale Gas- und Reibkräfte jeweils kompensieren.The particular advantage of the embodiment of Figure 3 is that the two outlets 29, 29 'are arranged frontally. The two end faces of the displacer no longer have to be sealed in a vacuum-tight manner. There is even the possibility to modify the pump so that a coolant -. B. generated by a fan cooling air - the cavity 20 flows through. Another advantage is that no significant axial forces are exerted on the bearings, because axial gas and friction forces compensate each other.

Bei der in Figur 4 dargestellten Ausführung handelt es sich um eine zweistufige Pumpe 1 nach der Erfindung. Sie weist ein äußeres Gehäuse 2 mit zwei wendelförmigen Nuten 30 und 30" auf, in denen jeweils ein Dichtelement 27, 27" geführt ist. Die Anordnung entspricht einem zweigängigen Gewinde. Die Dichtelemente 27, 27" liegen der zylindrischen Außenfläche des kreisenden Verdrängers 18 an. Sie bilden Förderkammern, die im sichelförmigen Förderraum 26 von der freien Stirnseite 31 des Gehäuses 2 zum Auslass 29 der Pumpe 1 wandern.In the embodiment shown in Figure 4 is a two-stage pump 1 according to the invention. It has an outer housing 2 with two helical grooves 30 and 30 ", in each of which a sealing element 27, 27" is guided. The arrangement corresponds to a two-start thread. The sealing elements 27, 27 "are the cylindrical outer surface of the rotating displacer 18 at. They form delivery chambers which move in the crescent-shaped delivery chamber 26 from the free end face 31 of the housing 2 to the outlet 29 of the pump 1.

Sowohl die Kurbel 13 (Kurbelabschnitt 14) als auch der kreisende Verdränger 18 sind derart fliegend gelagert, dass im Bereich der Stirnseite 31 Lagerungen nicht mehr erforderlich sind. Der Kurbelabschnitt 14 weist eine Stufe auf. Der Verdränger 18 stützt sich über die beiden Lager 16, 17 mit unterschiedlichen Durchmessern fliegend ab.Both the crank 13 (crank section 14) and the circular displacer 18 are mounted in such a manner that bearings are no longer required in the region of the end face 31. The crank portion 14 has a step. The displacer 18 is supported on the two bearings 16, 17 with different diameters flying.

Bei der dargestellten zweistufigen Version ist der von den Dichtelementen 27, 27" und der Außenwand des Verdrängers 18 gebildeten Pumpstufe eine weitere Pumpstufe vorgelagert. Dazu ist der Verdränger 18 nach Art eines Doppeltopfes ausgebildet.In the illustrated two-stage version, the pumping stage formed by the sealing elements 27, 27 "and the outer wall of the displacer 18 is preceded by a further pumping stage, for which purpose the displacer 18 is designed in the manner of a double pot.

In einem der stirnseitigen Hohlräume befinden sich die Kurbel 13 sowie die Lager 16, 17. Im zweiten - gegenüber liegenden - Hohlraum 36 mit der Stirnseite 31 befindet sich die weitere Pumpstufe. Am Gehäuse 2 ist über einen Flansch 34 ein zylindrisches Bauteil 35 zentrisch zur Achse 9 befestigt, welches in den Innenraum 36 des Verdrängers 18 hinein ragt. Sein Durchmesser ist so gewählt, dass seine Außenwand und die Innenwand des Verdrängers 18 einen weiteren sichelförmigen Förderraum 37 bilden. Die Außenwand des zylindrischen Bauteils 35 (oder die Innenwand des Verdrängers 18) ist mit einer wendelförmigen Nut 38 ausgerüstet, in der ein weiteres Dichtelement 39 geführt ist.In one of the frontal cavities are the crank 13 and the bearings 16, 17. In the second - opposite - cavity 36 with the end face 31 is the other pumping stage. On the housing 2, a cylindrical member 35 is fixed centrally via a flange 34 to the axis 9, which projects into the interior 36 of the displacer 18 in. Its diameter is chosen so that its outer wall and the inner wall of the displacer 18 form a further sickle-shaped delivery chamber 37. The outer wall of the cylindrical member 35 (or the inner wall of the displacer 18) is equipped with a helical groove 38 in which a further sealing element 39 is guided.

Die vom Bauteil 35, Verdränger 18 und Dichtelement 39 gebildete Pumpstufe dient als erste Stufe einer zweistufigen Pumpe 1 nach der Erfindung. Sie fördert von der Lagerseite in Richtung Stirnseite 31. In diesem Bereich stehen die Förderräume 37 und 26 miteinander in Verbindung. Den Einlass 28 bildet eine zentrale Bohrung 60 im Bauteil 35. Die Steigungen der Nut 38 im Bauteil 35 und der Nuten 30, 30' im Gehäuse 2 sind konstant (einfach herstellbar) aber unterschiedlich groß gewählt. Die Steigung der Nut 38 ist größer als die Steigung der Nuten 30, 30'. Während ihres Durchganges durch die zweistufige Pumpe 1 findet eine Kompression der geförderten Gase statt. Ein besonderer Vorteil der beschriebenen Ausführung besteht darin, dass sich die Hochdruckstufe außen befindet. Die bevorzugt in der Hochdruckstufe entstehende Wärme kann in einfacher Weise abgeführt werden, sei es durch Kühlkanäle im Gehäuse 2 oder - wie dargestellt - durch relativ großflächige Kühlrippen 51.The pumping stage formed by the component 35, displacer 18 and sealing element 39 serves as the first stage of a two-stage pump 1 according to the invention. It conveys from the bearing side in the direction of the end face 31. In this area, the delivery chambers 37 and 26 communicate with each other. The inlet 28 forms a central bore 60 in the component 35. The slopes of the groove 38 in the component 35 and the grooves 30, 30 'in the housing 2 are constant (easy to produce) but chosen different sizes. The slope of the groove 38 is greater than the pitch of the grooves 30, 30 '. During its passage through the two-stage pump 1, a compression of the delivered gases takes place. A particular advantage of the described embodiment is that the high pressure stage is located outside. The heat which is preferably produced in the high pressure stage can be dissipated in a simple manner, be it through cooling channels in the housing 2 or, as shown, by relatively large cooling fins 51.

Das wendelförmige Dichtelement 27, 27', 27", 39 hat die Aufgabe, die sich von der Saugseite zur Druckseite bewegenden Förderkammern gegenseitig abzudichten. Außerdem soll die Reibungswiderstände zwischen dem Dichtelement und den beteiligten Bauteilen 2, 18, 35 minimal sein. In den Figuren 5a bis 5c sind besondere Gestaltungen des Dichtelementes 27 dargestellt. Bei der Ausführung nach Figur 5a liegt das Dichtelement 27 der Innenseite des Statorgehäuses 2 mit einer im wesentlichen axial gerichteten Dichtlippe 71 an. Die unter der Dichtlippe 71 befindliche Aussparung 72 ist zu der Seite mit dem höheren Druck offen, so dass eine flexible und sichere Anlage der Dichtlippe 71 sicher gestellt ist. Die Ausführungen des Dichtelementes 27 nach den Figuren 5b und 5c weisen im Bereich der Nut 30 radial gerichtete und unterschiedlich lange Dichtlippen 73, 74 auf. Sie haben die Wirkung eines verminderten Reibungswiderstandes zwischen dem Dichtelement und den Nutseitenwänden.The helical sealing element 27, 27 ', 27 ", 39 has the task of mutually sealing the delivery chambers moving from the suction side to the pressure side, In addition, the frictional resistance between the sealing element and the involved components 2, 18, 35 should be minimal 5a to 5c show special configurations of the sealing element 27. In the embodiment according to Figure 5a, the sealing element 27 bears against the inside of the stator housing 2 with a substantially axially directed sealing lip 71. The recess 72 located below the sealing lip 71 is to the side with the higher pressure open, leaving a flexible and safe investment of the sealing lip 71 is ensured. The embodiments of the sealing element 27 according to FIGS. 5b and 5c have radially directed and differently long sealing lips 73, 74 in the region of the groove 30. They have the effect of a reduced frictional resistance between the sealing element and the groove side walls.

Die beschriebenen Ausführungsbeispiele unterscheiden sich im wesentlichen in Bezug auf ihre Lagerungen sowie in Bezug auf Anzahl, Steigung und Wahl des Ortes der Führungsnuten für das bzw. die Dichtelemente. Vorsorglich wird darauf hingewiesen, das die beschriebenen Varianten bei jedem der beschriebenen Ausführungsbeispielen verwirklicht werden können. Die Erfindung erlaubt es, bei niedrigen Herstellkosten eine kompakte, trocken laufende, geräusch- und vibrationsarme Vakuumpumpe herzustellen, die auch bei kleinen Pumpleistungen (unter 50 m3/h) wirtschaftlich ist. Es reicht aus, wenn die Drehzahl der rotierenden Bauteile bei zwischen 1500 und 3600 U/min liegt. Die Kühlung der Pumpe ist einfach, da alle wesentlichen Bauteile Kontakt mit der Atmosphäre haben.The described embodiments differ essentially in terms of their bearings as well as in terms of number, pitch and choice of the location of the guide grooves for the or the sealing elements. As a precaution, it should be noted that the variants described can be implemented in each of the described embodiments. The invention makes it possible to produce at low production costs a compact, dry-running, low-noise and low-vibration vacuum pump, which is economical even at low pump powers (below 50 m 3 / h). It is sufficient if the rotational speed of the rotating components is between 1500 and 3600 rpm. Cooling the pump is easy as all essential components have contact with the atmosphere.

Von Bedeutung für die Lebensdauer der Pumpe ist die Auswahl der Werkstoffe für die reibenden Teile. Für das wendelförmige Dichtelement 27, 27', 39 haben sich PTFE oder ein PTFE-Compound bewährt, wie es auch in Kolben-oder Scrollvakuumpumpen zum Einsatz kommt. Der Verdränger 18 und/oder das Gehäuse 2 sowie das Bauteil 35 bestehen zweckmäßig aus einem Aluminiumwerkstoff, vorzugsweise aus einer hart anodisierten Aluminiumlegierung, z.B. AlMgSi1. Bei der Verwendung dieser oder ähnlicher Werkstoffe ist es möglich, trotz fehlender Schmiermittel im Förderraum hohe Gleitgeschwindigkeiten zwischen dem/den Dichtelement(en) und den zugehörigen Nuten zuzulassen. Die Gleitgeschwindigkeit hängt von der Drehzahl der Kurbel und von der Exzentrizität e ab. Je höher diese Werte sind, desto kompakter kann eine Pumpe mit einer bestimmten Pumpleistung gebaut werden. Zweckmäßig werden Drehzahl und Exzentrizität so gewählt, dass die Gleitgeschwindigkeit zwischen 1 und 5 m/sec, vorzugsweise 4 und 5 m/sec. liegt.Of importance for the life of the pump is the choice of materials for the grinding parts. For the helical sealing element 27, 27 ', 39, PTFE or a PTFE compound have proved successful, as it is also used in piston or scroll vacuum pumps. The displacer 18 and / or the housing 2 and the component 35 expediently consist of an aluminum material, preferably from a hard anodised aluminum alloy, eg AlMgSi1. When using these or similar materials, it is possible, despite the lack of lubricant in the delivery chamber high sliding speeds between the / the sealing element (s) and the associated grooves allow. The sliding speed depends on the speed of the crank and on the eccentricity e. The higher these values are, the more compact a pump can be built with a given pumping power. Suitably, speed and eccentricity are chosen so that the sliding speed between 1 and 5 m / sec, preferably 4 and 5 m / sec. lies.

Claims (40)

  1. Pump (1) having: a housing (2) with an inlet (28) and an outlet (29) ; a drive (5) ; a fixed cylinder (2) which is central to a median axis (9); a displacer (18) which revolves eccentrically within said cylinder (2); a crank drive (13) for said displacer (18); a circumferential, sickle-shaped delivery space (26) between the cylinder (2) and the displacer (18); and a helical sealing element (27, 27', 27", 39) in the delivery space (26), characterised in that said pump is designed as a dry vacuum pump and that the displacer (18) revolves within the cylinder (2) in a contact-free manner.
  2. Pump according to claim 1,
    characterised in that the smallest distance between the displacer (18) and the inner wall of the cylinder does not exceed 1 mm, preferably 0.2 mm.
  3. Pump according to claim 1 or 2,
    characterised in that the cylinder (2) is a constituent part of the pump housing.
  4. Pump according to claim 1, 2 or 3,
    characterised in that the displacer (18) has a cavity (20).
  5. Pump according to claim 4,
    characterised in that a cooling gas flows through the cavity (20).
  6. Pump according to one of claims 1 to 5,
    characterised in that means (21, 45) are provided which prevent rotation of the displacer (18) about the axis (9) of the cylinder (2).
  7. Pump according to one of claims 1 to 6,
    characterised in that means (46, 47) are provided which prevent rotation of the sealing element about the axis (9) of the cylinder (2).
  8. Pump according to one of claims 1 to 7,
    characterised in that the outer wall of the displacer (18) is equipped with a helical groove (30) for the sealing element (27).
  9. Pump according to claim 8,
    characterised in that the helical sealing element (27) has, in the relaxed state, an external diameter which is greater than the internal diameter of the cylinder (2).
  10. Pump according to one of claims 1 to 7,
    characterised in that the inner wall of the cylinder (2) is equipped with a helical groove (30) for the sealing element (27).
  11. Pump according to claim 10,
    characterised in that the helical sealing element (27) has, in the relaxed state, an internal diameter which is smaller than the external diameter of the displacer (18).
  12. Pump according to one of claims 8 to 11,
    characterised in that the sealing element (27) has, in the region of the groove (30), sealing lips (73, 74) which are directed approximately radially.
  13. Pump according to one of claims 8 to 12,
    characterised in that the sealing element (27) has, in the region of its free front end, a sealing lip (71) which is directed substantially axially.
  14. Pump according to one of claims 8 to 13,
    characterised in that two or more grooves (30, 30") are provided after the fashion of a double or multiple thread, as well as a corresponding number of sealing elements (27, 27").
  15. Pump according to one of claims 8 to 14,
    characterised in that the pitch of the groove (30, 30', 30") decreases, at least in certain sections, from the inlet (28) to the outlet (29).
  16. Pump according to claim 15,
    characterised in that it is equipped with a relief valve (32) which is located between the inlet (28) and the outlet (29).
  17. Pump according to one of claims 1 to 16,
    characterised in that a rotating system (8) is provided which is driven by a drive (5) via a shaft (6) and has a crank (13) on which the displacer (18) is supported via bearings (16, 17).
  18. Pump according to claim 17,
    characterised in that the rotating system (8) is mounted, via two crank sections (14, 15), in bearing covers (3, 4) on the pump housing (2) which are disposed on both sides.
  19. Pump according to claim 17,
    characterised in that one crank section (14) is mounted in an overhung manner and that the displacer (18) is supported in an overhung manner on said crank section (14).
  20. Pump according to claim 17, 18 or 19,
    characterised in that at least one mass-balancing weight (22) is a constituent part of the rotating system (8).
  21. Pump according to claims 4 and 20,
    characterised in that the mass-balancing weight (22) is located in the cavity (20).
  22. Pump according to one of claims 1 to 21,
    characterised in that it is of double-flow design.
  23. Pump according to claim 22,
    characterised by a central inlet (28) and outlets (29, 29') which are situated at the end faces.
  24. Pump according to one of the preceding claims,
    characterised in that it is of two-stage or multistage design.
  25. Pump according to claims 19 and 24,
    characterised in that the displacer (18) has substantially the shape of a double pot, that the bearings (16, 17) of said displacer are located in one of the cavities at the end faces, and that a second pumping stage is located in the other cavity (36).
  26. Pump according to claim 25,
    characterised in that a component (35) which projects into the cavity (36), is integral with the housing and has a cylindrical outer face, forms the other pumping stage jointly with the inner wall of the displacer (18).
  27. Pump according to Claim 26,
    characterised in that a bore (40) which passes through the component (35) forms the inlet.
  28. Pump according to one of claims 24 to 27,
    characterised in that the volumes of the delivery chambers of the stage on the intake side are greater than the volumes of the delivery chambers of the pumping stage on the pressure side.
  29. Pump according to one of the preceding claims,
    characterised in that it is designed with a gas-ballast device.
  30. Pump according to claim 29,
    characterised in that the housing (2) is equipped with a bore through which ballast gas is supplied via a line (51) equipped with a valve (52).
  31. Pump according to claims 4 and 17,
    characterised in that the rotating system (8) is equipped with a duct system (55) via which the cavity (20) in the displacer (18) is in communication with the environment.
  32. Pump according to claims 29 and 31,
    characterised in that the displacer (18) is equipped with a bore (57) and that the duct system (55) serves to supply ballast gas.
  33. Pump according to claim 31,
    characterised in that the duct system (55) serves to supply cooling air.
  34. Pump according to claims 4, 22 and 33,
    characterised by a direction of delivery of the two pumping stages from the respective end face to a common outlet bore (59), one of said pumping stages serving to remove the cooling air from the cavity (20) of the displacer (18).
  35. Pump according to one of the preceding claims,
    characterised in that the sealing element consists of a material containing PTFE, and the displacer (18) and housing (2) consist of an aluminium material.
  36. Pump according to one of the preceding claims,
    characterised in that the rotational speed and eccentricity are selected in such a way that the sliding velocity between the sealing element and the side wall of the appertaining groove lies between 1 and 5 m/sec, preferably between 3.5 and 5 m/sec.
  37. Method of operating a pump (1) having: a housing (2) with an inlet (28) and an outlet (29); a drive (5); a fixed cylinder (2) which is central to a median axis (9); a displacer (18) which revolves eccentrically within said cylinder (2); a crank drive (13) for said displacer (18); a sickle-shaped delivery space (26) between the cylinder (2) and the displacer (18); and a helical sealing element (27, 27', 27", 39) in the delivery space (26), characterised in that the pump (1) is operated as a vacuum pump, that the delivery space (26) is operated without lubricant, and that the crank drive (13) guides the displacer (18) in such a way that it revolves within the cylinder (2) in a contact-free manner.
  38. Method according to claim 37,
    characterised in that the pump (1) is operated with internal compression.
  39. Method according to claim 37 or 38 having a pump (1) whose displacer (18) has a cavity (20),
    characterised in that a negative pressure is maintained within the displacer (18).
  40. Method according to claim 37 or 38 having a pump (1) whose displacer (18) has a cavity (20),
    characterised in that cooling air or ballast gas passes through the cavity (20) of the displacer (18).
EP03744779A 2002-03-22 2003-02-18 Eccentric pump and method for operation of said pump Expired - Lifetime EP1488107B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10212940A DE10212940A1 (en) 2002-03-22 2002-03-22 Eccentric pump and method for operating this pump
DE10212940 2002-03-22
PCT/EP2003/001597 WO2003081048A1 (en) 2002-03-22 2003-02-18 Eccentric pump and method for operation of said pump

Publications (2)

Publication Number Publication Date
EP1488107A1 EP1488107A1 (en) 2004-12-22
EP1488107B1 true EP1488107B1 (en) 2006-11-29

Family

ID=27798100

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03744779A Expired - Lifetime EP1488107B1 (en) 2002-03-22 2003-02-18 Eccentric pump and method for operation of said pump

Country Status (6)

Country Link
US (1) US7186098B2 (en)
EP (1) EP1488107B1 (en)
JP (2) JP2005520988A (en)
AU (1) AU2003215561A1 (en)
DE (2) DE10212940A1 (en)
WO (1) WO2003081048A1 (en)

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Publication number Publication date
US20050163632A1 (en) 2005-07-28
JP2005520988A (en) 2005-07-14
WO2003081048A1 (en) 2003-10-02
AU2003215561A1 (en) 2003-10-08
EP1488107A1 (en) 2004-12-22
DE10212940A1 (en) 2003-10-02
US7186098B2 (en) 2007-03-06
JP2010270765A (en) 2010-12-02
DE50305843D1 (en) 2007-01-11

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