EP3064775A1 - Pompe à vide et procédé de détection d'un contact entre au moins un rotor et un stator d'une pompe à vide - Google Patents

Pompe à vide et procédé de détection d'un contact entre au moins un rotor et un stator d'une pompe à vide Download PDF

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Publication number
EP3064775A1
EP3064775A1 EP15157105.6A EP15157105A EP3064775A1 EP 3064775 A1 EP3064775 A1 EP 3064775A1 EP 15157105 A EP15157105 A EP 15157105A EP 3064775 A1 EP3064775 A1 EP 3064775A1
Authority
EP
European Patent Office
Prior art keywords
contact
vacuum pump
shaft
stator
annular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15157105.6A
Other languages
German (de)
English (en)
Other versions
EP3064775B1 (fr
Inventor
Peter Huber
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Priority to EP15157105.6A priority Critical patent/EP3064775B1/fr
Publication of EP3064775A1 publication Critical patent/EP3064775A1/fr
Application granted granted Critical
Publication of EP3064775B1 publication Critical patent/EP3064775B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F04C2230/602—Gap; Clearance
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/60—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/80—Other components
    • F04C2240/81—Sensor, e.g. electronic sensor for control or monitoring

Definitions

  • the invention relates to a vacuum pump and a method for detecting a contact between at least one rotor and a stator of a vacuum pump.
  • twin-shaft vacuum pump is for example from the DE 10 2008 060 540 A1 known.
  • Two-shaft vacuum pumps are, for example, Roots vacuum pumps or screw vacuum pumps.
  • Roots vacuum pumps and screw vacuum pumps are cooled over the surface of their housings. Heat is thus released from the pump surface to the environment. In continuous operation and for constant conditions, an equilibrium is established for the introduced power and the waste heat.
  • the various components the length of which depends on the temperature, have in this state a constant gap size between the moving parts and the stationary parts.
  • the gaps between piston or screw and housing, in particular bearing plate, thereby determine the reliability against so-called runners as well as the height of the vacuum characteristics such as pumping speed, compressibility and final pressure.
  • a first problem here is that because of the reduced thermal conductivity in a vacuum, rapid changes in the input variables lead to contactors between the rotor and the housing or end shield.
  • a second problem is that the gap size between pump-effective rotor and stationary housing components (stator) is of particular importance for the reliability of these pumps. Deposits and impurities in the pump chamber make direct measurement of the gap size difficult.
  • the technical problem underlying the invention is to provide a vacuum pump, in the early so-called runners are detectable, as well as to provide a method for detecting a contact between at least one rotor and a stator of a vacuum pump, with the early contact can be detected, so that the vacuum pump is completely protected against consequential damage of these so-called Anêtr.
  • the vacuum pump according to the invention with a stator, two arranged in the stator, rotatably driven by a drive shaft and a shaft coupled to the transmission is characterized in that the at least one shaft in the axial direction has at least one annular or circular surface and that annular or circular surface in the axial direction opposite to the stator at least one braking element is arranged.
  • the heating shaft or a cooling housing reduces the bearing gap, preferably bearing clearance between piston and bearing plate
  • the annular or circular surface of the shaft is pressed against a braking element, which is arranged on the stator, preferably on the bearing plate, before the piston and bearing plate in contact reach.
  • the friction power leads to a further expansion in the area of the brake and increases the braking effect before the waste heat is distributed over other components.
  • a bearing designed for this purpose preferably a fixed bearing, absorbs the axial forces.
  • the waste heat concentrates in a narrow volume and can be handled more easily.
  • In the volume in the immediate vicinity of the at least one annular or circular surface and the at least one associated brake element devices are advantageously arranged to dissipate the waste heat effectively, for example, a cooling channel, a heat pipe or the like.
  • the at least one brake element is designed as a wearing part.
  • the braking element is advantageously exchangeable.
  • the low peripheral speed of the annular or circular surface compared to the piston outer contour or the outer contour of the screw favors a time-extended braking.
  • the at least one annular or circular surface is arranged at a shaft end.
  • the at least one annular or circular surface may also be arranged at both shaft ends.
  • the at least one annular or circular surface may be arranged on at least one shoulder of the shaft. It is also possible to arrange the at least one annular or circular surface on a disc arranged on the shaft. This gives an embodiment in the manner of a brake disc.
  • a further advantageous embodiment of the invention provides that the at least one annular or circular surface is arranged on a floating bearing side of the shaft.
  • a floating bearing and a fixed bearing are used to support the shafts of a Roots vacuum pump or a screw vacuum pump.
  • the sizes of the column change due to thermal change of the components. For this reason, it makes sense to arrange the at least one annular or circular surface on the floating bearing side of the shaft.
  • At least one further braking element is arranged on the at least one annular or circular surface.
  • the at least one brake element is designed to be interchangeable.
  • the brake element is thus designed as a wearing part and is replaced in the event of wear. This makes it possible, a relatively inexpensive component, namely to replace the brake element regularly before damage to the piston and / or on the screws of the vacuum pump occurs.
  • the annular or circular surface may be arranged on one or both shaft ends, but advantageously on the shaft end on the floating bearing side. This allows waste heat to be dissipated more easily.
  • This embodiment is also suitable if paragraphs on the shaft are structurally unworkable.
  • Another embodiment of the invention provides that at least one shoulder is arranged in the shaft, and that an annular or circular surface arranged on the at least one shoulder in the axial direction is arranged opposite the at least one brake element. This embodiment is advantageous because it provides a larger friction surface.
  • At least one further brake element is additionally arranged on the annular or circular surface, two brake surfaces are located opposite one another. The distance can be greater than the length of the pump chamber. At both shaft ends can be located on the shaft remote annular or circular surface. With sufficient expansion of the shaft or shrinkage of the housing engage all arranged in the axial direction brake elements into each other and protect the bearing from resulting axial forces.
  • the vacuum pump has a housing, and that the housing is formed symmetrically in the region of the receptacle of the two waves. This symmetrical design of the housing supports and simplifies the design.
  • the transmission has gear wheels and the transmission gears are formed as gears with a straight toothing.
  • the transmission gears are formed as gears with a straight toothing.
  • the at least one brake element and / or the at least one annular or circular surface has a surface structure.
  • This embodiment has the advantage that upon engagement of the braking element and the annular or circular surface for the contact of the two components characteristic vibrations are generated, which can be detected by a sensor, whereby an evaluation unit has the ability to detect the contact early and To effect appropriate measures, for example, the braking or switching off the drive motor or cooling of the shaft and the piston.
  • the at least one brake element has a designated abrasion surface.
  • This embodiment has the advantage that in contact the abrasion surface wears off.
  • the abrasion surface is advantageously made smaller in area than, for example, the annular or circular surface, so that a reduced frictional heat is created.
  • Another vacuum pump according to the invention with a housing, two arranged in the housing, rotatably driven by a drive shafts and a coupled to the shafts gearbox is characterized in that between a arranged on the shaft piston or a shaft arranged on the screw and a Inside the housing or an inner side of a stator at least one sensor and / or at least one stop element and / or at least one abrading element is arranged.
  • the pistons or the screws strike the stop element, which in turn can be detected by a vibration sensor. If a sensor is arranged in the gap, the sensor is damaged by the contact, which can be detected by an evaluation unit. If a contact detected accordingly, the predetermined measures can be taken, for example, an additional cooling can be provided or the drive motor is braked or turned off.
  • the at least one sensor and / or the at least one stop element and / or at least an abrading element has a lower height than the intended normal operation gap height between the piston or screw and the inside of the housing or stator. This means that in normal operation, a stop of the piston or the screw on the stop element or the sensor or the abrading element does not occur.
  • the vacuum pump is designed such that at least one temperature sensor and / or at least one acceleration sensor and / or at least one vibration sensor is provided.
  • These sensors serve to detect contact between the piston or screw and the inside of the housing or stator.
  • the inventive method for detecting a contact between at least one rotor and a stator of a vacuum pump is characterized in that at least one acceleration and / or at least one vibration sensor is provided which at a contact between the annular or circular surface of the shaft and the at least a brake element or, in the case of a contact between the piston or the screw and the abutment element or the abrading element, detects a signal characteristic of the contact.
  • a signal is detected by the at least one acceleration sensor and / or at least one vibration sensor. If this signal exceeds a threshold value at one or more fixed frequencies for the respective rotational speed, this means that there is an imbalance or bearing damage or the like.
  • an annular or circular surface is provided and at least one braking element associated with the annular or circular surface and at least one of the two surfaces has a surface structure
  • the contact with the surface structure produces a signal having a frequency dependent on the rotational speed and the number of the structures over the circumference.
  • the structure may be configured such that a unique frequency results as an indication of contact between the surfaces. This frequency is advantageously in a different frequency range than the commonly occurring frequencies of the motor due to a rotor imbalance, due to a rolling bearing kinematics (rollover frequency) or the like.
  • An evaluation unit determines the incipient contact of the surfaces before the contact-induced friction power becomes too large.
  • measures are taken to avoid or at least reduce consequential damage, such as braking or shutting off the engine, rotor cooling or the like.
  • the surface structures may be formed to face outwardly substantially radially from the center of the surfaces. You can also alternatively or additionally be punctiform on one side. It is advantageous in this embodiment that the structures produce a typical vibration when in contact with the mating surface.
  • Another embodiment of the method according to the invention for detecting a contact between at least one rotor and a stator of a vacuum pump is characterized in that at least one temperature sensor is provided, which at a contact between the annular or circular surface of the shaft and the at least a brake element detects a characteristic of the contact temperature rise.
  • the signal exceeds a threshold or the slope of the waveform exceeds a certain magnitude.
  • a temperature sensor is arranged in the immediate vicinity of the at least one brake element. During a contact, the at least one brake element will heat up first and very quickly, which is detected early by the temperature sensor, and the corresponding measures already described can be taken.
  • the contact surfaces of the at least one braking element and the annular or circular surface and the at least one arranged on the annular or circular surface braking element may be formed relatively small according to another embodiment, so that only a minimal friction power occurs.
  • Another embodiment of the method according to the invention for detecting a contact between at least one rotor and a stator of a vacuum pump is characterized in that upon contact of the piston or the screw with the at least one sensor, an evaluation unit detects contact and / or destruction of the sensor ,
  • an evaluation unit which evaluates signals of the at least one acceleration sensor and / or the at least one vibration sensor and / or the at least one temperature sensor.
  • This evaluation unit is advantageous in order to detect a contact according to the various possibilities and to initiate the necessary measures to avoid consequential damage.
  • the evaluation unit triggers measures to prevent damage when a starting contact between rotor and stator is detected. These measures may be, for example, the braking or shutting off the drive motor, a rotor cooling or the like.
  • the piston and / or the screws advantageously in the region between the largest diameter of the rotor (Übercraft Schlabstreifer) or target contour of the piston or the screw and the inside of the housing or stator on or more additional elements.
  • These elements can be introduced into the piston or into the screw as well as into the housing or into the stator. The elements create the narrowest gap between rotor and housing, which in case of disturbances of the temperature equilibrium shrinks and generates a striking signal at a multiple of the rotational frequency of the rotor upon contact.
  • Another embodiment provides that a vibration sensor on the opposite side of the sensor measures a particularly strong signal, which stands out clearly from the background noise of the same frequency.
  • the beat frequency can be moved to a more suitable for the detection area. This can be dispensed with complex frequency analyzes.
  • the invention relates advantageously to twin-shaft pumps. These may be Roots pumps or screw pumps.
  • Fig. 1 shows in section a vacuum pump 1, whose housing 2 essentially comprises two housing parts 3 and 4, namely pump chambers 3 and a gear 4 provided with a lubricant reservoir.
  • the illustrated vacuum pump is a Roots vacuum pump.
  • two shafts 6 and 7 are arranged horizontally rotatably supported by rolling bearings 8.
  • the shaft 6 is driven by a drive (not shown), for example an asynchronous motor.
  • the not shown asynchronous motor acts on a clutch 9.
  • On the drive shaft 9, not shown by the drive shaft 6 is part of a transmission 10 in the gear compartment 4, a gear 11 is arranged, which in the illustrated embodiment of a two-shaft vacuum pump 1 with a on the shaft 7 mounted second gear 12 is engaged.
  • Fig. 1 how to continue Fig. 1 it can be seen that the housing part 4 having the gear 10 can be closed to the environment via a gear cover 13 that can be fixed to the rest of the housing 2.
  • pistons 14 and 15 are arranged, which cause the pump effect during rotation of the shafts 6 and 7 and at least one suction port (not shown) sucking fluid into the pump chambers 3 and at least one Discharge opening (not shown) again from the pump chambers 3.
  • the pistons 14, 15 are designed as double-bow rotors.
  • the cross-sectional shape of the pistons 14, 15 has approximately the shape of the numeral "8".
  • the pistons 14, 15 are arranged in a rotor chamber formed by the housing part 3 with a minimum distance between a circumferential surface of the housing part 3 and In addition, the pistons 14, 15, when engaged with each other, have a minimum clearance therebetween to prevent them from interfering directly with each other.
  • the drive shaft 6 is rotated by the drive, such as an electric motor.
  • the output shaft 7 is rotated in the opposite direction to the drive shaft 6 by the engagement relationship between a drive gear 11 and a driven gear 12 and the drive rotor with piston 15 and the output rotor with piston 14 are consequently rotated.
  • both the gears 11 and 12 and the rolling bearings 8 must be supplied with a lubricant in order to cool them and to avoid increased wear.
  • the gear chamber 4 has a lubricant reservoir 5 filled with a lubricant.
  • a lubricant reservoir 5 a arranged on the shaft 6 slinger 16 immersed, which distributes the lubricant in the entire gear chamber 4 and in particular the rolling bearings 8 and the gears 11 and 12 supplies.
  • Fig. 2 shows the shaft 6 with the piston 14.
  • the shaft 6 has a shoulder 21.
  • the shoulder 21 carries an annular surface 22.
  • the annular surface 22 opposite to the stator, which is part of the housing 2, a brake element 23 is arranged.
  • a gap 24 is greater than or equal to a gap 25. If the shaft 6 expands or shrinks the housing 2, first a stop of the annular surface 22 on the brake member 23, whereby the movable bearing gap 25 is reduced and the annular surface 22 comes into contact with the brake element 23.
  • the friction leads to a further expansion in the region of the brake element 23 and increases the braking effect before the waste heat is distributed over other components.
  • On the opposite shaft side 26 takes a fixed bearing (not shown), the axial forces.
  • the waste heat concentrates on a narrow volume and can be handled more easily.
  • the shaft 6 and the brake element 23 appropriate measures can be taken.
  • the shaft 6 can be cooled in order to avoid contact of the piston 14 with the housing 2.
  • Fig. 3 shows a further embodiment with a shaft 6 which carries a piston 14. Only indicated schematically are a loose bearing 27 and a fixed bearing 28.
  • the shaft 6 has in this embodiment on both sides each have a paragraph 21.
  • the paragraphs 21 opposite brake elements 23 are arranged. With an expansion of the shaft 6 or shrinkage of the housing 2, the annular surfaces 22 come into contact with the brake elements 23. As a result, the bearing 28 is protected from resulting axial forces.
  • Fig. 4 shows an abrasion element 31, which is arranged in a housing 2 on a housing inner side 32.
  • the piston 14 additionally has a further abrading element 33. If the piston 14 expands in the radial direction, the abrading elements 31, 33 come into contact and generate a striking signal which is detected by a vibration sensor (not shown).
  • Fig. 5 shows the abrasion element 31, in which, for example, a wire 34 may be arranged.
  • the abrasion element 31 consists of a base body 35, which consists for example of plastic or ceramic.
  • the wire 34 is embedded in the main body 35. If the main body 35 is sheared off during contact between the abrading element 33 and the abrading element 31, an electrical contact made by the wire 34 is interrupted. This interruption is detected by an evaluation unit (not shown) and suitable measures can be taken, for example, a drive motor is slowed down or turned off.
  • Fig. 6 shows a brake element 23, which in the embodiments according to Fig. 2 or Fig. 3 can be used.
  • the brake element 23 is designed as an annular brake element and has radially outwardly extending projections 36.
  • the projections are arranged to extend radially outwards. However, it can also be provided point-shaped projections.
  • the 8 and 9 show the braking element 23 with spiral surface structures 37th
  • the brake element 23 may also have only a point-shaped projection 36.
  • Fig. 12 shows a modified embodiment of the brake element 23 with a single radially outwardly extending projection 36th
  • the frequency is a function of the number of revolutions and the number of structures over the circumference of the brake element 23. In the construction, a unique frequency can be selected as an indication of the contact between the surface 22 and the brake element 23.
  • annular surface 22 in addition to a brake element 23, as in the 6 to 12 shown, equip. It is also possible to directly design the annular surface 22 with at least one projection.
  • the surface structures of the annular surface 22 and the brake element 23 come into contact with one another when the device structures expand and produce a typical oscillation.
  • the frequency of this oscillation is ideally apart from the usually occurring vibrations (engine vibrations, engine imbalance, rolling bearing kinematics and the like).
  • Fig. 13 shows the piston 14 which is arranged on the shaft 6.
  • an abrading element 31 is arranged on the housing inner wall 32.
  • a signal with an acceleration and / or vibration sensor is detected. If the signal exceeds a threshold at one or more fixed frequencies for the respective speed, this is an indication that a contact is occurring.
  • the drive motor can be turned off in this case. This avoids that there is a so-called runner between the piston 14 and the housing inner wall 32 and the vacuum pump is damaged.
  • Fig. 14 shows a modified embodiment in which the piston 14 carries an abrading element 31.
  • the housing 2 with the housing inner side 32 no additional element.
  • abrasion element 31 As in Fig. 15 shown to form the abrasion element 31 as a sensor, such as in Fig. 5 shown.
  • an abrading element 33 may be arranged on the piston 14. It is also possible to design the abrasion element 31 as a simple abrasion element without training as a sensor.
  • Fig. 16 shows the piston 14 with the abrasive element 33.
  • the abrasive element may be formed cuboid, as in Fig. 17 shown.
  • Abrasion member 33 may have rounded edges, as in FIG Fig. 18 shown.
  • the abrasion element 33 may also be cylindrical, as in Fig. 19 shown.
  • the piston 14, which is arranged on the shaft 6, carries an abrading element 33 and a sensor 38.
  • the vibration sensor 38 is arranged on the side opposite the abrading element 33 and measures a signal when a contact with a housing inner wall 32 of the housing 2 occurs.
  • Fig. 21 shows two pistons 14, 15 which are mounted on shafts 6, 7 and are arranged in the housing 2.
  • a housing inner wall 32 On a housing inner wall 32 a plurality of abrasion elements 31 are arranged. With an adapted number of abrasion elements 31 on the side of the housing 2, as in FIG Fig. 21 shown, the beat frequency can be moved to a good range for the detection. This can also be done dispensed with complex frequency analyzes.
  • the housing 2 has an inlet 39 and an outlet 40.
  • Fig. 22 shows a temperature curve of a temperature sensor, for example, in the region of a brake element 23 in the housing 2 ( Fig. 2 ) is arranged. If contact occurs between the annular surface 22 and the brake element 23, locally the temperature rises very sharply. This temperature increase is in Fig. 22 shown. If the temperature exceeds a threshold x or decreases the slope, as in Fig. 23 shown, a certain value, a so-called An devisr is detected, and the appropriate measures to protect the vacuum pump are caused.
  • FIGS. 24 and 25 show the abrasion element 33, which is arranged for example on the piston 14.
  • the abrasion element 33 has a small contact surface 41. Due to the fact that the possible contact surface 41 with the housing 2 is very small, this leads to a minimum of frictional loss and a low waste heat for the contact detection in contact. The main focus here is the detection and not the improved damage tolerance.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
EP15157105.6A 2015-03-02 2015-03-02 Pompe à vide et procédé de détection d'un contact entre au moins un rotor et un stator d'une pompe à vide Active EP3064775B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP15157105.6A EP3064775B1 (fr) 2015-03-02 2015-03-02 Pompe à vide et procédé de détection d'un contact entre au moins un rotor et un stator d'une pompe à vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP15157105.6A EP3064775B1 (fr) 2015-03-02 2015-03-02 Pompe à vide et procédé de détection d'un contact entre au moins un rotor et un stator d'une pompe à vide

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EP3064775A1 true EP3064775A1 (fr) 2016-09-07
EP3064775B1 EP3064775B1 (fr) 2022-01-26

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018115815A1 (fr) * 2016-12-19 2018-06-28 Edwards Limited Joint d'étanchéité de pompe
WO2021079087A1 (fr) * 2019-10-23 2021-04-29 Edwards Limited Ensemble capteur

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4049098A (en) * 1975-08-23 1977-09-20 Shimadzu Seisakusho Ltd. Hydraulic motor with a mechanical brake device
EP0136617A2 (fr) * 1983-09-20 1985-04-10 Air Products And Chemicals, Inc. Système double d'étanchéité pour souffleur roots
JPS61104187A (ja) * 1984-10-29 1986-05-22 Hitachi Ltd 真空ポンプ用軸封装置
FR2812041A1 (fr) * 2000-07-20 2002-01-25 Cit Alcatel Principe de refroidissement de pompe a vide
DE102008060540A1 (de) 2008-12-04 2010-06-10 Pfeiffer Vacuum Gmbh Wälzkolbenvakuumpumpe
US20110169651A1 (en) * 2010-01-12 2011-07-14 Mitchell David J Open Circuit Wear Sensor For Use With A Conductive Wear Counterface
EP2348218A1 (fr) * 2008-10-22 2011-07-27 Mayekawa Mfg. Co., Ltd. Compresseur à vis de ravitaillement
US20120258000A1 (en) * 2011-04-07 2012-10-11 Imo Industries Inc. System and Method for Monitoring Pump Lining Wear

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US4049098A (en) * 1975-08-23 1977-09-20 Shimadzu Seisakusho Ltd. Hydraulic motor with a mechanical brake device
EP0136617A2 (fr) * 1983-09-20 1985-04-10 Air Products And Chemicals, Inc. Système double d'étanchéité pour souffleur roots
JPS61104187A (ja) * 1984-10-29 1986-05-22 Hitachi Ltd 真空ポンプ用軸封装置
FR2812041A1 (fr) * 2000-07-20 2002-01-25 Cit Alcatel Principe de refroidissement de pompe a vide
EP2348218A1 (fr) * 2008-10-22 2011-07-27 Mayekawa Mfg. Co., Ltd. Compresseur à vis de ravitaillement
DE102008060540A1 (de) 2008-12-04 2010-06-10 Pfeiffer Vacuum Gmbh Wälzkolbenvakuumpumpe
US20110169651A1 (en) * 2010-01-12 2011-07-14 Mitchell David J Open Circuit Wear Sensor For Use With A Conductive Wear Counterface
US20120258000A1 (en) * 2011-04-07 2012-10-11 Imo Industries Inc. System and Method for Monitoring Pump Lining Wear

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018115815A1 (fr) * 2016-12-19 2018-06-28 Edwards Limited Joint d'étanchéité de pompe
US11421689B2 (en) 2016-12-19 2022-08-23 Edwards Limited Pump assembly with sealing protrusion on stator bore portion
WO2021079087A1 (fr) * 2019-10-23 2021-04-29 Edwards Limited Ensemble capteur

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