EP3020975A1 - Appareil a vide - Google Patents

Appareil a vide Download PDF

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Publication number
EP3020975A1
EP3020975A1 EP15190888.6A EP15190888A EP3020975A1 EP 3020975 A1 EP3020975 A1 EP 3020975A1 EP 15190888 A EP15190888 A EP 15190888A EP 3020975 A1 EP3020975 A1 EP 3020975A1
Authority
EP
European Patent Office
Prior art keywords
connection
accessory unit
electrical
information technology
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP15190888.6A
Other languages
German (de)
English (en)
Other versions
EP3020975B1 (fr
Inventor
Jochen BÖTTCHER
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP3020975A1 publication Critical patent/EP3020975A1/fr
Application granted granted Critical
Publication of EP3020975B1 publication Critical patent/EP3020975B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Definitions

  • the invention relates to a vacuum device with at least one connection for an accessory unit and with a control unit for the accessory unit.
  • the invention further relates to a system with at least one vacuum device and with at least one accessory unit for the vacuum device.
  • Vacuum devices such as turbomolecular pumps or forevacuum pumps, with a control device usually have connection possibilities for one or more accessory units.
  • Examples of such accessory units are flood or barrier gas valves and pressure or temperature sensors.
  • the accessory unit is mechanically connected to the vacuum device.
  • one or more connection cables are provided for a necessary electrical and / or information technology connection of the accessory unit to the control device.
  • a vacuum device having the features of claim 1, in particular in that the connection is designed both for a mechanical connection of the accessory unit with the vacuum device and for an electrical and / or information technology connection of the accessory unit to the control device.
  • the invention it is no longer necessary to provide a separate cable from the accessory unit to the control device in order to connect the accessory unit to the control device. This prevents a faulty connection, for example due to a wrong cable or a wrong connection point. Also, the invention saves the user the extra assembly step for the cable. Another advantage of the invention is that no additional space is needed due to an externally extending cable. Especially in difficult to access arrangements so the attachment of Techü is facilitated. Furthermore, it is no longer necessary to provide different cables, for example with different lengths or with differently angled connection elements. In addition, costly cable insulation and mechanical fuses, such as strain relief, omitted. Another advantage is that fewer or no connection points are needed on the control unit for accessory units via cable.
  • the mechanical connection may be or include a plug connection, wherein the connection for the mechanical connection comprises at least one socket or plug element as a mechanical connection member.
  • the attachment of an accessory unit can be further simplified.
  • the mechanical connection may be or comprise a screw connection, wherein the connection for the mechanical connection comprises at least one threaded section as a mechanical connection member. This ensures a simple and secure mechanical connection.
  • the screw connection may comprise a separate attachment member for the accessory unit, in particular a fastening screw or Befest Trentsschraubö réelle.
  • a fastening screw or Befest Trentsschraubö réelle.
  • the mechanical connection and the electrical and / or information technology connection can have a common connection axis, in particular a plug-in, sliding and / or rotation axis.
  • the mechanical connection and the electrical and / or information technology connection can be designed so that only an attachment action, such as a simple insertion or a mere screwing, is required for the attachment of an accessory unit. Thus, the attachment of an accessory unit is further simplified.
  • connection can be invariant with respect to a rotation about the connection axis, wherein the connection is technically functioning either in each or in a finite number of angular positions.
  • connection for the mechanical connection may comprise at least one mechanical connecting member, wherein at least one contact member for the electrical and / or information technology connection to the connecting member or in the immediate vicinity of the connecting member is arranged.
  • the functionality of the mechanical connection and the electrical and / or information technology connection is further integrated and simplified.
  • the contact element can be arranged on the circumference or the front side.
  • the contact member may be designed and arranged with respect to a connection axis, in particular a plug-in, sliding and / or Rotary axis, the mechanical connection and / or the electrical and / or information technology connection in the radial direction or in the axial direction to be contacted.
  • the contact member may be provided in the form of a projection or a survey or formed flat. The contact is simplified and improved. Furthermore, the contact member may be annular. In a further embodiment, the contact member may be designed or arranged yielding. In particular, it can be resiliently mounted. This ensures a safe and easy contact.
  • connection axis in particular a plug-in, sliding and / or rotation axis, the mechanical connection and / or the electrical and / or information technology connection, in particular the contact members along the connection axis and / or are distributed around the connection axis around.
  • the contact element (s) may be provided around the connection axis in the form of concentric rings, preferably in the axial direction, around the connection axis or in the form of contact rings spaced along the connection axis and preferably in the radial direction.
  • the electrical and / or information technology connection can be multichannel and / or multifunctional, wherein in particular for each channel or each function a contact member is provided.
  • connection may be an electrical power supply to the accessory unit.
  • An information technology connection the accessory unit to the control device can be designed wirelessly and / or contactless, for example by radio, sound or optical transmission.
  • the arrangement of connection lines is simplified.
  • Another advantage is that the mechanical connection is also simplified structurally.
  • connection may comprise an interface for at least one functional unit of the accessory unit, in particular for a valve or sensor unit, the interface preferably being designed as a receptacle, passage or access opening for the functional unit.
  • the connection to the vacuum device comprise a screw thread for a flood valve, wherein means for the electrical connection of the valve are provided at the same location, namely for the supply of electrical energy and / or for the transmission of signals from the valve to the control device and / or from the controller to the valve.
  • the control device can be integrated in a housing of the vacuum device or arranged on the outside of a housing of the vacuum device, wherein in particular the control device has its own housing.
  • One or more lines for connecting the connection to the control device may run at least partially and in particular at least substantially within a housing of the vacuum device.
  • connection is designed to detect the presence of the accessory unit, in particular its mechanical connection with the vacuum apparatus, and to initiate or release a measure, in particular a switching operation, only in the presence of the accessory unit.
  • the object of the invention is further achieved by a system comprising at least one vacuum device with a connection, at least one accessory unit with a connection, and an accessory unit control means, the terminals being designed to combine both a mechanical connection of the accessory unit with the one Vacuum device as well as an electrical and / or information technology connection of bayiser to the control device to effect.
  • Fig. 1 shows a vacuum device 10 with a control device 12.
  • the vacuum device 10 has a terminal 16 which is electrically and / or information technology connected to the control device 12 via a line 32.
  • the line 32 may include a plurality of individual lines, which is assigned, for example, each a function or a signal or communication channel.
  • an accessory unit 14 is shown.
  • the accessory unit 14 also has, on its side facing the connection 16, a connection 17 and in its hatched area means communicating with the connection 16 for the mechanical connection of the accessory unit 14 to the vacuum apparatus 10 and for the electrical and / or information technology connection of the accessory unit 14 the controller 12 can cooperate.
  • the line 32 extends from the terminal 16 within the housing 11 of the vacuum device 10. However, it can for example be permanently installed outside the housing 11 of the vacuum device 10.
  • the here housed in a separate housing 13 control device 12 is attached to the outside of the housing 11 of the vacuum device 10. Alternatively, it can also be integrated into the housing 11 of the vacuum device 10.
  • the controller 12 is adapted to control the accessory unit 14, which is to be understood in the broadest sense.
  • the controller may merely be to supply the accessory unit 14 with electrical energy.
  • the controller may, for example, also an information technology exchange between the control device 12 and the accessory unit 14 include.
  • the controller 12 may receive and / or evaluate sensor data from a sensor of the accessory unit 14.
  • the terminal 16 and / or the controller 12 may be configured to detect whether an accessory unit 14 is connected to the terminal 16. This may be effected, for example, by a pushbutton on port 16 which is operated by a connected accessory unit 14. Also, for example, the controller 12 may be configured to detect an internal electrical resistance of an accessory unit 14 and derive therefrom information about the presence of an accessory unit 14 at the terminal 16.
  • connection 16 is designed for the mechanical connection of an accessory unit 14 to the vacuum device 10 and for the electrical and / or information technology connection of the accessory unit 14 to a control device 12, not shown here.
  • a bore 40 with an internally threaded portion 22 is provided at the connection 16.
  • the accessory unit 14 has, on its side facing the connection 16, a connection 17 with a cylinder 38 with an externally threaded portion 24.
  • the female threaded portion 22 and the male threaded portion 24 cooperate to provide a mechanical connection.
  • the cylinder 38 and the bore 40 are arranged concentrically around a connection axis 26 in the mechanically connected state.
  • connection members 28 For electrical and / or information technology connection are at the terminal 16 of the vacuum device 10 of Fig. 2 arranged radially spaced from the connection axis 26 contact members 28.
  • the contact members 28 of the terminal 16 are formed here as a point contacts. They are each via lines 32 with the not shown control device 12 electrically and / or information technology connected. Opposite the contact members 28 of the terminal 16 contact members 28 are also arranged on the connection 17 of the accessory unit 14. These are shown in the right-hand illustration, which shows the accessory unit 14 of the middle illustration folded to the right.
  • the contact members 28 of the accessory unit 14 are designed as concentric annular surfaces. When connected, the contact members 28 of the accessory unit 14 are in contact with the contact members 28 of the terminal 16. In this embodiment, the connected state is achieved when the cylinder 38 is screwed into the bore 40 to a stop or to a desired position.
  • the contact members 28 of the accessory unit 14 are in Fig. 2 also designed as continuous annular surfaces. You can be in any angular position with the contact members 28 of the terminal 16 in contact.
  • the contact members 28 are constructed here on the principle of a slip ring.
  • the annular surfaces of the contact members 28 of the accessory unit 14 may also be segmented or arranged only over partial angle ranges.
  • the contact members 28 of the accessory unit 14 are electrically and / or information technology connected to a functional unit, not shown, of the accessory unit 14.
  • an access opening 30 designed as a centric bore is shown in the cylinder 38 of the accessory unit 18.
  • the bore 40 extends in the left-hand representation beyond the female threaded portion 22 into the interior of the housing of the vacuum device 10, not shown.
  • the access opening 30 thus ensures the access of a functional unit of the accessory unit 14 to the interior of the housing of the vacuum device.
  • This access can serve, for example, to measure a pressure in the interior of the housing of the vacuum device 10 by means of a functional unit of the accessory unit 14 designed as a pressure sensor.
  • the Fig. 3 shows for better understanding also the embodiment of Fig. 2 , but in perspective view.
  • the accessory unit 14 has, on its side facing the connection 16, not shown, a connection 17 with contact elements 28, a cylinder 38 and an access opening 30 designed as a centric bore.
  • the contact elements 28 of the accessory unit 14 rotate when the cylinder 38 is screwed into the bore 40 of the vacuum device 10 Fig. 2 around the connection axis 26 of the Fig. 2 ,
  • the contact elements 28 of Fig. 3 and / or the cylinder 38 instead of the terminal 17 of the accessory unit 14 and the terminal 16, the contact elements 28 of Fig. 3 and / or the cylinder 38.
  • the accessory unit 14 may be equipped with the bore 40.
  • the connection principle can also be reversed.
  • the Fig. 4 shows another embodiment, which is similar to the principle of, for example, known from consumer electronics jack connector is constructed.
  • a connection 16 of a vacuum device 10 is shown.
  • the connection 16 has a socket element 20.
  • contact members 28 are mounted such that they protrude into the region of the female member 20.
  • the contact members 28 are each biased by springs 34 in the contact direction, ie spring-mounted.
  • the contact members 28 are connected via lines 32 to a control device 12, not shown here, electrically and / or information technology.
  • connection 17 of an accessory unit 14 with a plug-in element 18 and contact members 28 is shown.
  • the contact members 28 are each arranged flat around the plug element 18 around.
  • the contact members 28 are connected to a functional unit of the accessory unit 14 electrically and / or information technology (not shown).
  • the contact members 28 are axially spaced and each isolated by non-conductive intermediate regions.
  • the plug-in element 18 and the socket element 20 are each cylindrical. Both are arranged concentrically on the connection axis 26.
  • the accessory unit 14 is pushed to the left and thus the plug element 18 into the socket element 20.
  • the contact members 28 of the terminal 16 are resiliently returned by the plug-in element 18.
  • the contact members 28 of the terminal 16 are opposed to the contact members 28 of the accessory unit 14 and are held in contact with them by the springs 34.
  • the mechanical connection of the accessory unit 14 with the vacuum device 10 is likewise effected jointly by the plug-in element 18 and the socket element 20.
  • the plug-in element 18 can be frictionally held in the socket element 20.
  • the plug-in element 18 may also or instead have a resilient undercut or latching element which engages or snaps an undercut of the socket element 20 in the connected state and thus secures the plug element 18 axially in the socket element 20.
  • the plug-in element 18 and the socket element 20 are designed such that after or with the insertion of the plug element 18 into the socket element 20, the accessory unit 14 is rotated into a latching position and thus secured.
  • the Fig. 5 shows a further embodiment according to the principle of the jack plug.
  • the accessory unit 14 has a connection 17 with a plug-in element 18 with four contact elements 28, which are arranged in each case axially spaced around the plug-in element 18.
  • contact members 28 of the connection 16 are shown.
  • a respective contact member 28 of the terminal 16 is located opposite an associated contact member 28 of the accessory unit 14 and is in contact with him.
  • the mechanical connection and / or the electrical and / or information technology connection in the connection according to Fig. 4 and 5 can be reversed.
  • the terminal 16 instead of the terminal 17 of the accessory unit 14, the terminal 16 may be provided.
  • the terminal 16 could comprise a male element and the accessory unit 14 a female element.
  • the contact members 28 of the female member 20 and / or the contact members 28 of the male member 18 in the Fig. 4 resiliently mounted and / or be designed annular.
  • a further embodiment of a terminal 17 according to the invention is shown schematically, which is based on the principle that a basically any accessory unit, such as a fan, or a component thereof, such as a fan grille 36, to be attached to the vacuum device and the attachment for the connection of the Accessory is used.
  • a basically any accessory unit such as a fan, or a component thereof, such as a fan grille 36, to be attached to the vacuum device and the attachment for the connection of the Accessory is used.
  • the fan grille 36 as part of the noiiser can bolted to 42 with the vacuum device 10 of Fig. 1 be screwed. So there are not shown fasteners, eg mounting screws provided.
  • the contact elements 28 are electrically and / or information technology connected as components of the fan grille 36 with the Wegü namely by the contact members are formed as contact surfaces 28 on the tabs 42 on which rest the electrically conductive mounting screws in the attached state.
  • the unrepresented counterhold of the mounting screws on the terminal 16 of the vacuum device 10 ( Fig. 1 ) also has at least one contact member which is electrically connected via the respective mounting screw with the contact surface 28 of the respective flange 42.
  • the electrical and / or information technology connection of the accessory unit 14 to the control device 12 is thus ensured here between contact members 28 by means of - generally expressed - electrically conductive connection or mounting elements.
  • An advantage of this embodiment is that a mechanical connection existing in a construction can also be used with little effort for an electrical and / or information technology connection.
  • the contact surfaces 28 of the Fig. 6 be contacted by the connecting elements directly associated with them, for example, also flat contact members of the terminal 16 of the vacuum device 10, ie here the Verschraubungslaschen 42 of the fan grille 36 are screwed against corresponding contact surfaces on the vacuum device.
  • the assembly of the accessory unit to the vacuum device is carried out with or without rotational movement.
  • the contacting between the contact members 28 of the accessory unit 14 and the contact members 28 of the terminal 16 may be performed, for example, with respect to a connection axis 26 radially or axially.
  • the electrical and / or information technology connection of the accessory unit 14 to the control device 12 may include one or more supply voltages, signal and / or communication lines, such as a data bus, for digital and / or analog signals.
  • the connection 16 can also be retrofitted, for example by guiding the rear connection point of the cable onto an assembly-side slip ring.
  • At the terminal 16 and at least one contact member 28 may be designed as a plug-in element or socket element, which is functionally separated from the mechanical connection between the accessory unit 14 and the vacuum device 10.
  • This embodiment could be, for example, that at the terminal 16, a socket element for electrical and / or information technology connection and additionally a screw-in thread for the mechanical connection of the accessory unit to the vacuum device is provided.
  • terminal 16 of the vacuum device 10 and the terminal 17 of the accessory unit 14, in particular those of Fig. 2-5 can also be arranged in reverse order.
  • a female member or a resilient contact member is conceivable either at the terminal 16 of the vacuum device 10 or on the side of the terminal 17 of the accessory unit 14.
  • the electrical and / or information technology connection of the accessory unit 14 to the control device 12 can also be carried out wirelessly, for example by a radio link or an optical data exchange.
  • the contact members 28 and the lines 32 of the Fig. 1 to 6 can be made electrically conductive. However, they can also be designed as optical transmission means for information technology connection.
  • the lines 32 may be designed as optical waveguides, the contact members 28 may be designed as coupling elements for optical fibers.
  • the accessory unit may also have its own power supply, such as by a rechargeable battery or a battery. It can also draw its energy from a radio or a carrier signal or from inductive energy transfer. However, the accessory unit may also derive its energy from the environment, for example from a temperature difference with a Peltier element, from a vibration, photovoltaic, or from another type of radiation.
  • the accessory unit includes, for example, singly or in combination, one or more valves, pressure, temperature, or vibration sensors, fans, external hour meters, or external operational data acquisition or storage devices.
  • An accessory unit 14 can be mandatory or optionally connected to the vacuum device 10. If no accessory unit 14 is connected to the connection 16 of the vacuum device 10, the connection 16 can either remain free or be closed by a blanking plug.
  • the control device 12 can be provided for controlling the accessory unit 14 and also for controlling the vacuum device 10, in particular its drive.
  • the terminal 16 may be designed such that a contacting of contact members 28 of the terminal 16 with contact members 28 of the terminal 17 in the radial direction, such as in Fig. 4 and 5 , in the axial direction, such as in Fig. 2 and 3 , and / or also takes place in the tangential direction.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Details Of Connecting Devices For Male And Female Coupling (AREA)
  • Compressor (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Coupling Device And Connection With Printed Circuit (AREA)
EP15190888.6A 2014-11-12 2015-10-21 Appareil a vide Active EP3020975B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102014116555.1A DE102014116555A1 (de) 2014-11-12 2014-11-12 Vakuumgerät

Publications (2)

Publication Number Publication Date
EP3020975A1 true EP3020975A1 (fr) 2016-05-18
EP3020975B1 EP3020975B1 (fr) 2017-12-13

Family

ID=54360004

Family Applications (1)

Application Number Title Priority Date Filing Date
EP15190888.6A Active EP3020975B1 (fr) 2014-11-12 2015-10-21 Appareil a vide

Country Status (3)

Country Link
EP (1) EP3020975B1 (fr)
JP (1) JP6257574B2 (fr)
DE (1) DE102014116555A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3617520A1 (fr) * 2018-08-31 2020-03-04 Pfeiffer Vacuum Gmbh Appareil sous vide, unité accessoire et système

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3647600B1 (fr) * 2019-10-08 2022-05-18 Pfeiffer Vacuum Gmbh Identification d'un périphérique connecté électriquement

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19511430A1 (de) * 1995-03-29 1996-10-02 Leybold Ag Umwälzgebläse, Vakuumpumpe oder dergleichen
EP1126177A2 (fr) * 2000-02-16 2001-08-22 WILO GmbH Interface électro-hydraulique
EP2290243A2 (fr) * 2009-08-28 2011-03-02 Pfeiffer Vacuum GmbH Procédé destiné au fonctionnement d'une pompe à vide
EP2628957A1 (fr) * 2010-12-17 2013-08-21 Shimadzu Corporation Pompe à vide

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10189166A (ja) * 1996-12-26 1998-07-21 Sharp Corp 電子機器接続システム
JPH1139957A (ja) * 1997-05-21 1999-02-12 Sony Corp 伝送ケーブル、この伝送ケーブルが接続されるジャック及び記録装置
JP2001332159A (ja) * 2000-05-23 2001-11-30 Hitachi Ltd 電力供給装置及びこれを用いた機器
DE20309441U1 (de) * 2003-06-16 2003-09-11 Yen Stanley Luftpumpe
JP4794236B2 (ja) * 2005-08-05 2011-10-19 三洋電機株式会社 始動リレー装置
JP3131716U (ja) * 2006-08-22 2007-05-24 光紅建聖股▲分▼有限公司 同軸ケーブルコネクタ取外し防止ブッシング

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19511430A1 (de) * 1995-03-29 1996-10-02 Leybold Ag Umwälzgebläse, Vakuumpumpe oder dergleichen
EP1126177A2 (fr) * 2000-02-16 2001-08-22 WILO GmbH Interface électro-hydraulique
EP2290243A2 (fr) * 2009-08-28 2011-03-02 Pfeiffer Vacuum GmbH Procédé destiné au fonctionnement d'une pompe à vide
EP2628957A1 (fr) * 2010-12-17 2013-08-21 Shimadzu Corporation Pompe à vide

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3617520A1 (fr) * 2018-08-31 2020-03-04 Pfeiffer Vacuum Gmbh Appareil sous vide, unité accessoire et système

Also Published As

Publication number Publication date
JP2016094940A (ja) 2016-05-26
EP3020975B1 (fr) 2017-12-13
JP6257574B2 (ja) 2018-01-10
DE102014116555A1 (de) 2016-05-12

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