EP2997624A1 - Adaptateur d'impedance reglable a inductance et capacite variables simultanement - Google Patents
Adaptateur d'impedance reglable a inductance et capacite variables simultanementInfo
- Publication number
- EP2997624A1 EP2997624A1 EP14725415.5A EP14725415A EP2997624A1 EP 2997624 A1 EP2997624 A1 EP 2997624A1 EP 14725415 A EP14725415 A EP 14725415A EP 2997624 A1 EP2997624 A1 EP 2997624A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- adapter
- coaxial
- dcoax
- shield
- slider
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000013519 translation Methods 0.000 claims abstract description 13
- 239000011810 insulating material Substances 0.000 claims description 16
- 238000009413 insulation Methods 0.000 claims description 7
- 238000006073 displacement reaction Methods 0.000 claims description 5
- 239000012530 fluid Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 2
- 230000006978 adaptation Effects 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 8
- 230000001419 dependent effect Effects 0.000 description 4
- 238000001816 cooling Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000012777 electrically insulating material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P5/00—Coupling devices of the waveguide type
- H01P5/04—Coupling devices of the waveguide type with variable factor of coupling
Definitions
- An adjustable impedance adapter and more specifically, an impedance adapter comprising variable inductance and capacitance simultaneously.
- Impedance matching is a technique for optimizing the transfer of electrical power between a transmitter and a receiver
- the transmitter can be an electrical source, a radio transmitter or a microwave generator
- the receiver may be a radiating antenna, a plasma or any load of variable impedance.
- a circuit including inductance and capacitance is generally used to simulate the matching of the receiver impedance.
- the frequencies transmitted without attenuation are those for which adaptation between the transmitter and the receiver is performed.
- FIG 1 is a block diagram of an impedance adapter moving insulators in translation, well known as the impedance adapter type "slug".
- the impedance adapter 1 comprises a coaxial line portion 2 extending in a longitudinal direction d
- the coaxial line section 2 comprises a conductive central core 5, an electrically insulating medium 6 surrounding the central core 5, a conductive shield 7, and at least one insulating part 8a called "quarter wave" movable in translation in the direction longitudinal d
- the electrically insulating medium 6 is air or vacuum.
- the use of a single mobile part 8a can compensate for an impedance difference between the transmitter 3 and the receiver 4 between 25 and 100 ohms.
- the use two moving parts 8a; 8b can compensate for a difference in impedance between the transmitter and the receiver of the order of a few ohms. to several hundred ohms.
- the moving parts 8a; 8b have a length in the longitudinal direction
- AANN aaddaappttaatteeuurr dd''iimmptigspiddaannccee ,, , sseelloonn ll''aarrtt ccoonnnnuu ppeeuutt êêttrree mmooddéélliisséé àà ll''aaiiddee iioo dd''uunn cciirrccuuiitt éélleeccttrriiqquuee ccoommpprreennaanntt uunnee iinndduuccttaannccee vvaarriiaabbllee aanndd ddeeuuxx ccaappaacciittééss ffiixxeess ..
- a first distance between the slider and the second end makes it possible to vary the inductance of the impedance adapter.
- a third distance in a direction transverse to the coaxial direction between the outer walls of the conductive slide and the inner walls of the shield is variable between the two ends of the coaxial line section and allows a capacitance of the impedance adapter to be varied.
- the inductance and a capacity of the impedance adapter depend on the position of the slider on the coaxial line section.
- a single translation movement of the slider inside the coaxial line section makes it possible to vary the inductance and the capacitance simultaneously on at least part of the coaxial line section.
- the slider is movable in translation in the coaxial direction.
- the shielding comprises at least one frustoconical portion extending in the coaxial direction allowing a variation of a capacity in a continuous manner.
- the coaxial line section comprises two cylindrical portions of different diameters extending in the coaxial direction and joined by a shoulder allowing a modulation of the capacity in a discrete manner between two previously defined values.
- a third distance between the outer walls of the conductive slide in the transverse direction and the inner walls of the shield is greater than a threshold value to maintain sufficient insulation between the slide and the shield.
- the slider is connected to an insulating operating finger opening into a groove of the walls of the shield, the groove extending in the coaxial direction, the insulating finger being intended to be connected to a displacement system in the coaxial direction.
- the operating finger is connected to an insulating ring to maintain sufficient insulation between the conductive slide and the shield.
- the central core comprises at least one frustoconical portion.
- the central core comprises two cylindrical portions having different diameters joined by a shoulder and allowing a modulation of the capacity according to two previously defined values.
- a third distance between the inner walls of the conductive slide and the outer walls of the central core is greater than a threshold value for maintaining sufficient insulation.
- the electrically insulating medium is a dielectric fluid advantageously allowing the cooling of the adapter.
- an insulating window is disposed at the second end, between the outer walls of the central core and the inner walls of the shield, the insulating window corresponds to a fixed capacity of the impedance adapter.
- the insulating window comprises an insulating material having a dielectric constant greater than the dielectric constant of the insulating material.
- FIG. 1 already described, represents a block diagram of a "slug" type impedance adapter according to the known art
- FIG. 2 represents a first embodiment of an impedance adapter according to the invention
- FIG. 4 represents an electrical circuit equivalent to the impedance adapter, according to the invention
- FIG. 5 represents a second embodiment of an impedance adapter, according to the invention.
- FIG. 6 represents a particular case of the second embodiment presented in FIG. 5, according to the invention.
- FIG. 7 represents a measurement of the reflection coefficient as a function of the frequency between a transmitter and a receiver, the adaptation being carried out using an impedance adapter according to the invention.
- Fig. 2 shows an embodiment of an impedance adapter.
- the impedance adapter 1 is intended to be connected at a first end 9a to a transmitter 3 and at its second end 9b to a receiver 4, the transmitter 3 and the receiver 4 not being shown in Figure 2.
- the impedance adapter 1 comprises a coaxial line section 12, extending in a coaxial direction dcoax, within which a conductive slide 13 is movable in translation.
- the coaxial line section 12 comprises a central conductive core 14, an electrically insulating medium 15 surrounding the central core 14 and a conductive shield 16 surrounding the insulating material 15.
- the precise parameterization of the dimensions of the impedance adapter 1 according to the invention depends on the type of application.
- the adaptation to be made is a function of the power of the microwave generator, the nature of the gas used to generate the plasma or pressure of the enclosure in which the plasma is lit.
- An inner wall 16a and an outer wall 16b of the shielding 16 have at least one groove 17, not visible in FIG. 2, of direction parallel to the coaxial direction dcoax allowing the handling of the slider 13.
- the electrically insulating material 15 is a dielectric fluid, which may be air, a gas, or vacuum, that is, a gas at a pressure below atmospheric pressure.
- the insulating material 15 may be a fluid advantageously allowing the cooling of the coaxial line section 12.
- the fluid may be relatively viscous allowing lubrication of the friction zones of the slider 13 with the central core 14 or the shield 16 of the coaxial line section 12 which facilitates the displacement of the slider 13 inside the coaxial line section 12.
- the slider 13 is an element comprising a conductive material of symmetry of convolution around the central core 14. It is movable in translation inside the line section in the coaxial direction.
- the length of the slide 13 in the coaxial direction is less than one quarter wave.
- a first distance d1 between the second end 9b of the coaxial line section 12 and the slider 13 makes it possible to adjust an inductance L1 of the impedance adapter 1.
- the slide 13 is connected to an insulating operating finger 18 opening into the groove 17 of the walls 16a; 16b of the shield 16 and allowing the displacement of the slider 13.
- the operating finger 18 is connected to an insulating ring 18b surrounding the slider 13 and to ensure insulation between the slider 13 and the shield 16 over the entire length of the section line 12.
- a third distance d3 in a direction transverse to the coaxial direction between the outer walls 13b of the slider 13 and the inner walls 16a of the shield 16 is greater than a Seui i d2 threshold value thereby to isolate electrically the central conductive core 14 of the conductive shield 16.
- the movement of the slider 13 can be performed manually or automatically.
- the automatic displacement of the slider 13 can be achieved by means of a micromotor, not shown in FIG. 2.
- the micromotor is slaved in position allowing rapid movement of the slider 13, and consequently a rapid adaptation, typically of the order of 50 to 100 ms.
- at least a portion of the coaxial line section 12 has inner walls 16a and outer 16b of the frustoconical shield 16.
- the walls 16a and 16b of the shielding 16 may have a frustoconical shape along the entire length of the section 12 in the coaxial direction dcoax.
- only the walls internal 16a of the shielding 16 may have at least one portion of frustoconical shape.
- the adapter according to the invention has a second distance between the inner walls 16a of the shield and the walls of the central core, the second distance varying between the first and the second end 9a; 9b.
- the third distance d3 between the outer walls 13b of the slider 13 and the inner walls 16a of the shield 16, in the transverse direction, is dependent on the first distance d1 between the slider 13 and the second end 9b of the coaxial line section 12.
- the shield 16 of the coaxial line section 12 has at least two cylindrical portions, extending in the coaxial direction dcoax, the at least two cylindrical portions having different diameters. The at least two cylindrical portions being interconnected by at least one shoulder 20.
- the third distance d3 can then vary between two values.
- the third distance d3 between the outer walls 13b of the slider 13 and the inner walls 16a of the shield 16 makes it possible to adjust a first capacitor C1 of the impedance adapter 1 according to the invention.
- the coaxial line section 12 comprises an insulating window 19 at the second end 9b located between the outer walls 14b of the central core 14 and the inner walls 16a of the shield 16.
- the dielectric constant of the material of the insulating window 19 has a dielectric constant greater than the dielectric constant of the insulating material 15.
- the insulating window 19 corresponds to a fixed capacitance C2 of the impedance adapter 1, this fixed capacitance C2 being not adjustable.
- the insulating window 19 may advantageously act as a vacuum-tight window when the impedance adapter 1 is used between a microwave generator and a plasma chamber.
- the impedance matching 1 using an impedance adapter 1 according to the invention can be modeled using an electric circuit shown in FIG. 4 comprising a variable inductance L1, a variable capacitor C1 and a fixed capacitor C2.
- the coaxial line section 12 comprises a cylindrical part and a frustoconical part in the coaxial direction dcoax.
- the variable inductance L1 depends on the first distance d1 in the coaxial direction dcoax between the slider 13 and the second end 9b
- the variable capacitance C2 depends on the third distance d3 between the outer walls 13b of the slider 13 in the transverse direction and the internal walls 16a of the shielding 16
- the fixed capacitance C2 corresponds to the capacitance induced by the presence of the insulating window 19.
- the third distance d3 between the outer walls 13b of the slider 13 and the inner walls 16a of the shield 16 in the transverse direction of the rear is dependent on the first distance d1 between the slider 13 and the second end 9b.
- the capacitance C1 and the inductance L1 are variable parameters, the capacitor C1 being dependent on the inductance L1.
- the dependence between the values of the capacitance and the inductance induces a limitation of the possible adaptation interval. It is therefore necessary to carefully choose the range of values according to the chosen application. Limiting the adaptation interval allows for faster impedance matching.
- the third distance d3 is independent of the first distance d1. In other words, it is possible to vary only the value of the inductance L1 without changing the value of the variable capacitor C1.
- the electrical circuit modeling the impedance adapter 1 according to the invention comprises two capacitors in parallel, one variable C1 and the other fixed C2 and a variable inductance L1, the variable capacitance C1 being dependent on the inductance L1 on the frustoconical portion of the coaxial line section 12. On the cylindrical portion of the coaxial line section 12, the variable capacitor C1 is constant.
- an adjustable adapter having a second constant distance from one end to another, the third distance in the transverse direction in the coaxial direction between the outer walls of the slider 13b and the inner walls 16a shielding 16 is variable.
- the slide moves in translation inside the line section in a direction not parallel to the coaxial direction for varying the inductance and a capacitor simultaneously.
- Fig. 5 shows a second embodiment of the impedance adapter, according to one aspect of the invention.
- the impedance adapter 1 comprises, as previously, a coaxial line section 12 comprising a central core 14, an insulating material 15 surrounding the central core 14 and a shield 16 surrounding the insulating material 15.
- the adapter 1 further comprises a slider 13 movable in translation within the coaxial line section, and optionally an insulating window 19 located at the second end 9b.
- the embodiment described in this example differs from the previous embodiment in that the shield 16 is cylindrical over the entire length of the line section in the coaxial direction dcoax.
- the central core 14 is frustoconical in the coaxial direction.
- the entire length of the walls the central core 14 in the coaxial direction dcoax is of frustoconical shape.
- the slider 13 is of symmetry of revolution, it is advantageously disposed near the internal walls 16a of the shielding 16.
- the first distance d1 between the slider 13 and the second end 9b corresponds to the variable inductance L1 of the adapter impedance 1
- the insulating window 19 makes it possible to achieve the fixed capacitance C2.
- the third distance d3 is between the internal walls 13a in the transverse direction of the slider 13 and the walls of the central core 14.
- the central core of the coaxial line section 12 has at least two cylindrical portions, extending in the coaxial direction dcoax, the at least two cylindrical portions having diameters different.
- the at least two cylindrical portions are interconnected by at least one shoulder.
- the third distance d3 can vary between two values.
- the impedance adapter 1 is sized to propagate the energy in a Trans-Electro-Magnetic or TEM mode, that is, a mode providing the same propagation at all frequencies below a maximum frequency. max .
- variable inductance L1 and variable capacitance C1 can be calculated as follows:
- ⁇ ⁇ permittivity of the insulating material between the slider 13 and the shield 16.
- fmax the maximum frequency.
- Figure 7 shows the reflection coefficient as a function of frequency.
- This graph was obtained by measuring the power reflected at the input of an impedance adapter 1 made according to the invention.
- reflection coefficient is the ratio between the incident power and the reflected power. On this graph, the reflection coefficient is expressed in decibels.
- the measurement is made for an impedance adapter 1 arranged between a 50 ohm impedance transmitter Z E and a 10 ohm impedance receiver Z R , the impedance adapter 1 used being made according to the first proposed embodiment ( Figure 2).
- the working frequency is 350 MHz.
- the shielding 16 of the adapter 1 is of frustoconical shape along the entire length in the coaxial direction Dcoax of the coaxial line section 12.
- the adapter 1 has a length in the coaxial direction dcoax of 40 mm, the radius of the frustoconical portion at the level of the first end measure 10.1 mm and the radius of the frustoconical portion at the second end measures 9.76 mm.
- the curve shown in FIG. 6 has a peak for a frequency of 350 MHz.
- the reflection coefficient is lower - 20 dB. This reflection coefficient corresponds to an almost perfect adaptation, the reflected power representing less than 1% of the incident power.
Abstract
Description
Claims
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1301141A FR3005814B1 (fr) | 2013-05-17 | 2013-05-17 | Adaptateur d'impedance a inductance et capacite variables |
PCT/EP2014/060118 WO2014184359A1 (fr) | 2013-05-17 | 2014-05-16 | Adaptateur d'impedance reglable a inductance et capacite variables simultanement. |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2997624A1 true EP2997624A1 (fr) | 2016-03-23 |
EP2997624B1 EP2997624B1 (fr) | 2020-09-23 |
Family
ID=49322421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP14725415.5A Active EP2997624B1 (fr) | 2013-05-17 | 2014-05-16 | Adaptateur d'impedance reglable a inductance et capacite variables simultanement |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2997624B1 (fr) |
FR (1) | FR3005814B1 (fr) |
WO (1) | WO2014184359A1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SE539387C2 (en) * | 2015-09-15 | 2017-09-12 | Cellmax Tech Ab | Antenna feeding network |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3697902A (en) * | 1971-04-14 | 1972-10-10 | Cit Alcatel | Slotted microstrip line for impedance matching having two stops to prevent ohmic contact between the movable reactive element and the center strip |
US3792385A (en) * | 1972-11-06 | 1974-02-12 | Rca Corp | Coaxial magnetic slug tuner |
US7449893B1 (en) * | 2006-07-17 | 2008-11-11 | Christos Tsironis | Harmonic load pull tuner with resonant prematching module |
JP5064969B2 (ja) * | 2007-10-26 | 2012-10-31 | オリンパス株式会社 | コネクタ |
FI125596B (en) * | 2010-11-12 | 2015-12-15 | Intel Corp | Customizable resonator filter |
FR2972858B1 (fr) * | 2011-03-18 | 2014-01-03 | Arnaud Curutchet | Synthetiseur d'impedance coaxial |
-
2013
- 2013-05-17 FR FR1301141A patent/FR3005814B1/fr not_active Expired - Fee Related
-
2014
- 2014-05-16 EP EP14725415.5A patent/EP2997624B1/fr active Active
- 2014-05-16 WO PCT/EP2014/060118 patent/WO2014184359A1/fr active Application Filing
Non-Patent Citations (1)
Title |
---|
See references of WO2014184359A1 * |
Also Published As
Publication number | Publication date |
---|---|
EP2997624B1 (fr) | 2020-09-23 |
FR3005814B1 (fr) | 2016-12-23 |
FR3005814A1 (fr) | 2014-11-21 |
WO2014184359A1 (fr) | 2014-11-20 |
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