EP2955789A1 - Fenêtres électro-optiques - Google Patents

Fenêtres électro-optiques Download PDF

Info

Publication number
EP2955789A1
EP2955789A1 EP14275136.1A EP14275136A EP2955789A1 EP 2955789 A1 EP2955789 A1 EP 2955789A1 EP 14275136 A EP14275136 A EP 14275136A EP 2955789 A1 EP2955789 A1 EP 2955789A1
Authority
EP
European Patent Office
Prior art keywords
grid
window
channels
liquid
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
EP14275136.1A
Other languages
German (de)
English (en)
Inventor
designation of the inventor has not yet been filed The
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BAE Systems PLC
Original Assignee
BAE Systems PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BAE Systems PLC filed Critical BAE Systems PLC
Priority to EP14275136.1A priority Critical patent/EP2955789A1/fr
Priority to PCT/GB2015/050261 priority patent/WO2015189553A1/fr
Priority to EP15702582.6A priority patent/EP3155691B1/fr
Priority to US15/314,652 priority patent/US10570659B2/en
Publication of EP2955789A1 publication Critical patent/EP2955789A1/fr
Ceased legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/204—Filters in which spectral selection is performed by means of a conductive grid or array, e.g. frequency selective surfaces
    • E—FIXED CONSTRUCTIONS
    • E06—DOORS, WINDOWS, SHUTTERS, OR ROLLER BLINDS IN GENERAL; LADDERS
    • E06B—FIXED OR MOVABLE CLOSURES FOR OPENINGS IN BUILDINGS, VEHICLES, FENCES OR LIKE ENCLOSURES IN GENERAL, e.g. DOORS, WINDOWS, BLINDS, GATES
    • E06B5/00—Doors, windows, or like closures for special purposes; Border constructions therefor
    • E06B5/10—Doors, windows, or like closures for special purposes; Border constructions therefor for protection against air-raid or other war-like action; for other protective purposes
    • E06B5/18—Doors, windows, or like closures for special purposes; Border constructions therefor for protection against air-raid or other war-like action; for other protective purposes against harmful radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q5/00—Arrangements for simultaneous operation of antennas on two or more different wavebands, e.g. dual-band or multi-band arrangements
    • H01Q5/20—Arrangements for simultaneous operation of antennas on two or more different wavebands, e.g. dual-band or multi-band arrangements characterised by the operating wavebands
    • H01Q5/22—RF wavebands combined with non-RF wavebands, e.g. infrared or optical
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00—Screening of apparatus or components against electric or magnetic fields
    • H05K9/0073—Shielding materials
    • H05K9/0094—Shielding materials being light-transmitting, e.g. transparent, translucent

Definitions

  • This invention relates to electro-optic (EO) windows which pass radiation in the infra-red waveband and/or optical and/or UV bands but which either absorb or reflect RF/microwave radiation and to methods of their production.
  • EO electro-optic
  • an infra-red transparent window is positioned in the optical path of EO equipment to protect the equipment during use.
  • windows are used on military vehicles, they can give unwanted radar returns if they pass a substantial proportion of any incident RF transmission, and particularly in the microwave band, which is understood to refer to radiation in the waveband of from a few MHz - 300 GHz.
  • microwave band which is understood to refer to radiation in the waveband of from a few MHz - 300 GHz.
  • 'window' is used broadly herein to mean an element capable of transmitting radiation in the optical and/or infra-red wavebands, said window being with or without optical power, and so includes lenses as well as refractive and diffractive elements generally.
  • 'transparent' is used to mean that the window transmits a usable amount of radiation at the mid value of the infra-red and/or optical wavebands.
  • the metal mesh may have the drawback that, where the window is exposed to the environment, to air, water or sand abrasion, the thickness of the metal mesh can deflect water droplets or sand particles so as to accelerate abrasion of the window.
  • zinc sulphide windows that exhibit low RF/MICROWAVE transmission are used in EO sensors.
  • Current designs incorporate fine metal grids close to the surfaces of the zinc sulphide windows in order to reflect microwave radiation.
  • the bulk zinc sulphide windows are manufactured by chemical vapour deposition and the grid is then produced by sputtering/chemical vapour deposition onto the surface of the window, so producing large areas is a problem.
  • Such designs are not cost effective; it is difficult to ensure uniformity of the metal grids, and there is a high risk of environmental damage to the metal grids.
  • Encapsulation of the grids by overgrowing with ZnS may circumvent the problems of environmental degradation, but this also suffers from scale-up difficulties and from induced defects in the surface topography caused by the grid sitting proud of the window surface and delamination or weaknesses at the interfaces. This problem can therefore create the need for additional post-fabrication machining or polishing in order to flatten the outer surface of the grown on ZnS.
  • an EO window made of a material substantially transparent to at least one of infra-red, visible and UV radiation and treated to have reduced RF/MICROWAVE transmission characteristics by the provision of a grid pattern set into a surface thereof the grid being formed of a material selected to be one of reflective and absorptive to RF/MICROWAVE radiation.
  • this invention provides a method of making an electro-optic window formed from a material substantially transparent to at least one of infra-red, visible and UV radiation whereby to render the window capable of reduced RF/MICROWAVE transmission characteristics, the method including the steps of forming on a surface of the window a grid of channels, creating a corresponding grid pattern of a material having one of electrically conductive and dielectric properties within the channels whereby to render the window non transmissive to RF/MICROWAVE radiation and treating the material as required to render the grid usable to reduce the RF/MICROWAVE transmission characteristics of the window.
  • More than one window may include a said grid and each window may have a grid set into more than one surface thereof, for example into opposed surfaces thereof.
  • the grid may be set into channels in the window whereby to fill the channels no more than substantially flush with the said surface of the window. If the grid is flush with the surface of the window, then a smooth surface will be offered to any cover layer or to the atmosphere, if the window is to be used without a cover.
  • the effect of the channels not being entirely filled with the grid material may be advantageous in that the grid may then effectively form a micro-structured surface having an anti-reflection effect.
  • the electro-optic window may include a capping layer covering the grid and attached to the said window surface.
  • a capping layer will offer protection from weather erosion.
  • the capping layer may be fusion bonded or adhered to the surface of the window, may be formed on the surface of the window or may be spun coated or spray coated onto the surface of the window.
  • the grid may be at least partly formed of a liquid and the grid may include a closable port adapted to allow passage of liquid, when open, into and out of the grid during the operational life of the window.
  • the grid may be formed of both liquid and solid, thus a metal or other solid may be deposited so that it is disconnected then connected electrically by flowing liquid through it.
  • an adaptive window may be created, using this method, having RF/MICROWAVE reflective/absorptive characteristics which are variable according to the liquid forming, or partly forming, the grid at any one time.
  • the step of treating the material as required to render the grid usable to reduce the RF/MICROWAVE transmission characteristics of the window may comprise solidifying the liquid.
  • the liquid may be colloidal having particles therein to render the window non transmissive to RF/MICROWAVE radiation and the step of treating the material as required to render the grid usable to reduce the RF/MICROWAVE transmission characteristics of the window may include evaporating off the liquid to leave the said particles within the channels.
  • the step of evaporating off the liquid may include sealing the colloidal liquid within the channels of the grid, forming a port for evaporation having a size less than the particulate size of the said particles and then evaporating off the liquid through the port.
  • the step of treating the material as required to render the grid usable to reduce the RF/MICROWAVE transmission characteristics of the window may include covering the channels of the grid and confining the liquid within the covered channels and the step of confining the liquid within the channels may comprise confining an electroless plating solution within the channels and may include the step of electrolessly plating the channels with a metal contained in the solution.
  • the step of covering the channels of the grid may include growing a layer of protective material over the grid or attaching a protective layer to the surface of the window.
  • the step of causing a liquid having one of electrically conductive and dielectric properties to RF/MICROWAVE radiation substantially to fill the channels may be carried out after the channels of the grid have been covered and the step of causing the liquid to substantially fill the channels of the grid may thus include introducing the liquid to the grid and continuously making the liquid available to the grid while capillary action draws the liquid throughout the grid. Alternatively or in addition, suction and/or pressure may be applied to the grid to urge or draw the liquid therethrough.
  • the step of causing a material having one of electrically conductive and dielectric properties to RF/MICROWAVE radiation substantially to fill the channels may include the steps of covering the surface of the window defining the grid with a layer of the liquid to substantially fill the channels of the grid and then wiping the surface of the window whereby to remove the liquid from the surface while leaving the channels of the grid substantially filled with the liquid.
  • the step of causing a material having one of electrically conductive and dielectric properties to RF/MICROWAVE radiation substantially to fill the channels may include the steps of covering the surface of the window defining the grid with a layer of liquid metal to substantially fill the channels of the grid, allowing the liquid metal to solidify and polishing the surface of the window whereby to remove the metal from the surface while leaving the channels of the grid substantially filled with the metal.
  • the step of causing a material having one of electrically conductive and dielectric properties to RF/MICROWAVE radiation substantially to fill the channels may include the steps of sputtering over the surface of the window defining the grid a layer of metal to substantially fill the channels of the grid and selectively etching the surface of the window whereby to remove the sputtered metal from the surface while leaving the channels of the grid substantially filled with the metal.
  • the step of forming on a surface of the window a grid of channels may include forming the grid of channels by laser etching or chemically etching the window material.
  • the step of forming on a surface of the window a grid of channels may include the following steps: forming a mould in the shape of an EO window, the mould defining a positive grid formation whereby to impart to a moulded window a negative grid formation on one surface of the window, forming a sol of a material suitable for sintering and pouring the sol into the mould, converting the sol to a gel by the application of heat, drying the gel whereby to impart to the gel a permanent shape corresponding to that of the mould, and vitrifying the gel by sintering whereby to form a sintered EO window having the grid of channels formed on one surface thereof.
  • the step of forming a capping layer for the window may include the following steps: forming a mould in the shape of the layer, forming a sol and pouring the sol into the mould, converting the sol to a gel by the application of heat, drying the gel whereby to impart to the gel a permanent shape reflecting that of the mould, and vitrifying the gel by sintering whereby to form a said capping layer.
  • Optically suitable materials for an EO window according to the invention are well-known. Work has been done by the inventors on sapphire (aluminium oxide, Al2O3) and spinel (magnesium aluminium oxide, MgAl2O4).
  • Synthetic sapphire can be grown in several of its crystal orientations including the "A”, “C”, “R” and “M” plane.
  • the 'C' or 'A' plane axes may be used.
  • Sapphire crystals are grown using a variety of crystal growth techniques and then machined and polished into the finished window geometry. Sapphire can be processed to a very high optical specification of flatness and surface quality. For example, scratch/dig (S/D) of 20/10 can be achieved for flatness of ⁇ /4, which is suitable for almost all optical applications.
  • S/D scratch/dig
  • Magnesium aluminate or magnesium aluminium oxide, or spinel is a durable polycrystalline transparent ceramic.
  • Spinel blanks may be made using conventional ceramic processing techniques. A powder of the raw constituent materials is prepared (usually to a proprietary formulation), compacted and can be dry-isostatically pressed, slip cast or injection moulded into the required shape. This is followed by a heat treatment to densify the material. The blanks may then be ground and polished to specification.
  • Spinel can also be produced by crystal growth methods, chemical vapour deposition and chemical synthesis routes, including sol gel synthesis, as described below.
  • the EO window was made of sapphire or spinel, between 5-20mm thick, with a planar edge of 300-500mm.
  • FIG. 1 an embodiment of the invention is shown.
  • a sub-surface grid 1 is shown flush with a surface 2 of a window 3; the grid 1 is positioned within the window 3 rather than on it. This reduces the exposure of the grid to impacts and abrasion and still renders electrical connection to the grid very accessible.
  • Figure 2 shows a further embodiment with a grid 1 completely protected from the elements.
  • the grid 1 is located, as in Figure 1 , within the window 3.
  • both the grid 1 and the upper surface 2 of the window are covered with a capping layer 4.
  • This design will completely protect the grid from a harsh aerospace environment.
  • electrical connection to the grid 1, in this embodiment is through the exposed cross-section of the embedded grid.
  • electrical connection can be made through vias from the back of the window or from top or edge surfaces, with bus bars or electrical connections surrounding the edge.
  • FIG. 3 shows the manufacturing steps required to make a window according to the invention, by two alternative routes.
  • On the left side of the diagram is shown one route, on the right, another.
  • channels 5 of a grid are etched into a surface 2 of a sapphire or spinel window 3 by any suitable etching process.
  • the channels 5 are then metallised, again, by any suitable process.
  • capping layer 4 which may also be of spinel or of another suitably hard material having transparent properties, is attached to the upper surface 2 of the window 3 by one of several methods described below.
  • a grid has been etched in a window using a laser system suitable for both glass and sapphire substrates.
  • the laser etching system uses a 200KHz pulsed excimer laser with a 193nm lens and a chrome on quartz mask of the required grid.
  • a glass wafer etched by this method is shown in Figure 4 . This technique is also applicable to etching spinel.
  • This method of etching has potential to be scaled up, but this may be at significant cost.
  • the throughput of such a process may be of the order of ⁇ 10mm/s.
  • Vacuum processing techniques have been developed for achieving mirror finishes on laser etched arrays.
  • Chemical etching has also been used to etch glass wafers, see Figures 5a, b and c , and may be used according to the invention to etch sapphire.
  • the channels 5 are 3 ⁇ m deep, 7 ⁇ m wide and with a 100 ⁇ m separation.
  • aluminium was sputtered over a gridded sample 6 and then selectively etched to leave metal 7 within the channels 5 of the grid 1, see Figures 6a and 6b .
  • FIG. 6c Cross sectional image analysis of this sample was used to evaluate the channel metallisation, see Figure 6c .
  • a channel 5 in the glass 8 is filled with aluminium 9.
  • the initial channel 5 was 7 ⁇ m wide and 3 ⁇ m in depth. Variability across the grid can lead to over etched patches of metal. To mitigate this, the grid channels 5 were deepened to ensure the grid could be etched back from the surface 10 without affecting the continuity of the grid.
  • An electroless gold plating process occurs in the liquid phase at elevated temperatures ( ⁇ 50C). Therefore it is important that the electroless solution is contained, to avoid evaporation during heating.
  • a section of pre-cavitated glass wafer was placed face down (cavities side down) on a glass slide.
  • the electroless gold plating solution was introduced to the edge of the wafer section by pipette and was observed to be drawn into the channels by capillary action. Once the sample was fully wetted with plating solution it was placed in an oven at 50C for -15 minutes to activate the plating process.
  • the wafer section was removed from the carrier slide and examined. A thin layer of gold was seen to be plated across the entire top surface of the wafer (visible as a transparent purple film) in addition to the metal filling the trenches. The surface gold film was wiped off leaving the metal in the trenches intact.
  • the present invention is partly concerned with methods of forming metal coatings within channels embedded within window structures.
  • Optically transparent spinel is manufactured using ceramic processing techniques.
  • a metallic mesh or conductive grid may be embedded within the window during manufacture by embedding a mesh of a sacrificial material in any suitable window bulk material.
  • suitable sacrificial materials are: polymers, some low melting-point metals, eutectics, carbon nanotubes, and wax.
  • the mesh or grid is then removed by, for example, melting the sacrificial material to leave a grid of channels in the manufactured window for receiving a conductive or dielectric grid, as desired, for use in operation.
  • Figures 9a and 9b illustrate forming, with an expanded metal foil, see Figure 9a , subsurface carbon grids in a pre-sintered ceramic compact. Carbon particles or nanotubes can then be distributed in the grid channels as required and the ceramic sintered. Figure 9b illustrates the result, with carbon residing in the channels.
  • absorptive materials include ferrites such as nickel zinc, manganese zinc and cobalt ferrites; magnetites; ceramics, and carbon based materials as above.
  • Fluids may also be used to form the grid material, in use.
  • electrolyte solutions such as potassium ferrocyanate; ethylene glycol; methanol, and acids.
  • Colloids such as magnetic colloids like ferro-fluids are also suitable to act as the grid material.
  • Spinel can be made using sol gel techniques, allowing for optically transparent thin films to be synthesized. These may be used to protect surface or sub-surface grids.
  • spinel films are deposited using chemical vapour deposition methods but that method is presently limited to relatively small areas (a few cm 2 ). According to the present invention, the use of sol gel methods for manufacturing large area capping layers of spinel is proposed.
  • FIG. 11 a and 11 b show examples of good continuous solvent free films of mixed metal nitrates on silicon wafer substrates produced by spin coating.
  • an uncoated Si wafer 18 is shown on the left and a spin coated and dried wafer 19, on the right.
  • Figure 11 b shows a coated wafer 20, after high temperature processing.
  • Figure 12 shows sapphire windows before and after coating and subsequent heat treatment, with 21 being an uncoated sapphire window and 22 being a sapphire window having a spin coating of mixed Mg and Al nitrates, with polymer.
  • Figures 13a, b and c show the importance of the choice of polymer for aiding film formation.
  • Figure 13a and 13b show films prepared from a precursor with a good choice of polymer
  • Figure 13c shows film prepared from a poor choice of polymer where the nitrates have crystallised from solution.
  • Quantitative analysis of the composition of the coating on silicon shows that the ratio of magnesium to aluminium (as oxide) is the expected 1:2, see Table 1, above.
  • the ratio of the coating on the sapphire window shows a higher amount of aluminium but this is to be expected because of contributions from the aluminium oxide present in the structure of the sapphire substrate, see Figure 15 .
  • the uncoated window transmits ⁇ 85% of light from 1100nm to ⁇ 270nm at which point the transmission falls rapidly to ⁇ 55% at 190nm.
  • Transmission through a spinel coated sample has similar transmission from 100nm to -270 nm but thereafter the fall in transmission is faster than in the control sample and the final transmission is ⁇ 35% at 190nm, see also Figure 15 .
  • Figure 16 shows the IR transmission spectra of an uncoated sapphire window, a sapphire window coated with the dried precursor and the same window after full thermal treatment.
  • the transmission window for all samples is ⁇ 3 ⁇ m to 5 ⁇ m and at 5 ⁇ m and higher the transmission is essentially zero.
  • the OH stretch arising from the presence of a polymer can clearly be seen.
  • This absorption band disappears following thermal treatment.
  • the presence of the final coating does not significantly attenuate transmission in the 3 to 5 ⁇ m band. In all samples transmission falls below ⁇ 50% at ⁇ 4 ⁇ m. Thus, there is little degradation in the optical and IR transmission spectra of a capped window.
  • Fusion bonding is a method of joining materials including ceramics to each other through the application of pressure and heat without the use of adhesives. It has been successfully used by the inventors on several materials such as silicon and glass to form strong bonds. If fusion bonding is possible with gridded windows, then grids could potentially be protected by a layer of the substrate material without a glue line. Such glue lines can severely compromise the optical and mechanical properties of the structure. Fusion bonding can create optically transparent bonds under the right conditions.
  • Fusion bonding requires flat, clean surfaces.
  • the surfaces are mated under pressure and at elevated temperatures.
  • the surfaces of the material are prepared using a proprietary process to degrease, clean and chemically activate the surface of a wafer.
  • the surfaces are then bonded using wafer bonding equipment and post treated in a vacuum oven.
  • Interferences fringes 27 (known as Newton's rings) indicate there is a bond gap; the gap can be estimated using the separation between the interference fringes, as indicated by the tips of the arrows.
  • fusion bonding techniques may be used to create a window according to the invention with an embedded grid by fusion bonding a capping layer onto the gridded window.
  • a gridded pattern was etched into a glass wafer and a second glass wafer was fusion bonded onto the surface.
  • An image of the resulting structure is shown in Figure 19 .
  • the interference fringes 30 indicate the central area has not properly bonded.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Civil Engineering (AREA)
  • Structural Engineering (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Surface Treatment Of Glass (AREA)
EP14275136.1A 2014-06-12 2014-06-12 Fenêtres électro-optiques Ceased EP2955789A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP14275136.1A EP2955789A1 (fr) 2014-06-12 2014-06-12 Fenêtres électro-optiques
PCT/GB2015/050261 WO2015189553A1 (fr) 2014-06-12 2015-02-02 Fenêtres électro-optiques
EP15702582.6A EP3155691B1 (fr) 2014-06-12 2015-02-02 Fenêtres électro-optiques
US15/314,652 US10570659B2 (en) 2014-06-12 2015-02-02 Method of making electro-optic window by sputtering material to fill channels of a grid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP14275136.1A EP2955789A1 (fr) 2014-06-12 2014-06-12 Fenêtres électro-optiques

Publications (1)

Publication Number Publication Date
EP2955789A1 true EP2955789A1 (fr) 2015-12-16

Family

ID=50972606

Family Applications (1)

Application Number Title Priority Date Filing Date
EP14275136.1A Ceased EP2955789A1 (fr) 2014-06-12 2014-06-12 Fenêtres électro-optiques

Country Status (1)

Country Link
EP (1) EP2955789A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018206594A1 (fr) 2017-05-12 2018-11-15 Magna Powertrain Bad Homburg GmbH Composant doté d'une protection cem et destiné à une platine électronique
CN111180898A (zh) * 2020-01-16 2020-05-19 吉林大学 多值电阻集成的超构宽带光学透明微波吸波器件

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6028699A (en) * 1997-01-13 2000-02-22 Exotic Electrooptics Electromagnetically shielded window, sensor system using the window, and method of manufacture
US20030042045A1 (en) * 2001-08-28 2003-03-06 Koskenmaki David C. Embedded electrical traces and method for making
US20050017905A1 (en) * 2003-07-24 2005-01-27 Rawnick James J. Conductive fluid ground plane
EP2009976A1 (fr) * 2006-04-05 2008-12-31 Toray Industries, Inc. Procede pour produire un substrat conducteur et substrat conducteur
US20110109519A1 (en) * 2009-11-12 2011-05-12 Clifton Quan Switchable microwave fluidic polarizer
US20140054067A1 (en) * 2012-08-21 2014-02-27 Jason C. Heikenfeld Pressure reconfigured electromagnetic devices

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6028699A (en) * 1997-01-13 2000-02-22 Exotic Electrooptics Electromagnetically shielded window, sensor system using the window, and method of manufacture
US20030042045A1 (en) * 2001-08-28 2003-03-06 Koskenmaki David C. Embedded electrical traces and method for making
US20050017905A1 (en) * 2003-07-24 2005-01-27 Rawnick James J. Conductive fluid ground plane
EP2009976A1 (fr) * 2006-04-05 2008-12-31 Toray Industries, Inc. Procede pour produire un substrat conducteur et substrat conducteur
US20110109519A1 (en) * 2009-11-12 2011-05-12 Clifton Quan Switchable microwave fluidic polarizer
US20140054067A1 (en) * 2012-08-21 2014-02-27 Jason C. Heikenfeld Pressure reconfigured electromagnetic devices

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018206594A1 (fr) 2017-05-12 2018-11-15 Magna Powertrain Bad Homburg GmbH Composant doté d'une protection cem et destiné à une platine électronique
DE102017208075A1 (de) * 2017-05-12 2018-11-15 Magna Powertrain Bad Homburg GmbH Bauteil mit EMV Schutz für elektronische Platine
CN111180898A (zh) * 2020-01-16 2020-05-19 吉林大学 多值电阻集成的超构宽带光学透明微波吸波器件
CN111180898B (zh) * 2020-01-16 2021-05-07 吉林大学 多值电阻集成的超构宽带光学透明微波吸波器件

Similar Documents

Publication Publication Date Title
Diedenhofen et al. Broad‐band and omnidirectional antireflection coatings based on semiconductor nanorods
Iwasawa et al. Plasma‐resistant dense yttrium oxide film prepared by aerosol deposition process
Bahuguna et al. Thin film coating
CN108348998B (zh) 附加制造方法和设备
EP2266711B1 (fr) Plaque de résine transparente et son procédé de fabrication
EP1940748B1 (fr) Structure composite pour microlithographie et disposition optique
US11733507B2 (en) Optical device, method of using the same, and method of making the same
WO2011022423A2 (fr) Polariseurs à grille de nanofils et procédés pour la fabrication de ceux-ci
EP3155691B1 (fr) Fenêtres électro-optiques
Park et al. Superhydrophilic transparent titania films by supersonic aerosol deposition
EP2955789A1 (fr) Fenêtres électro-optiques
JP2918860B2 (ja) 鏡面体
CN111051929A (zh) 能量控制涂层、结构、装置及其制造方法
WO2001071394A1 (fr) Article antireflet et procédé de production
TW202246809A (zh) 光學製品及光學製品之製造方法
Li et al. Design and infrared spectral modulation properties of Cu/CuO one-dimensional photonic crystals
GB2529609A (en) Electro-optic windows
JP2003183848A (ja) 複合構造物およびその製造方法
CN113631529A (zh) 氧化铝烧结体的制造方法及氧化铝烧结体
TWI656231B (zh) Method for preparing polycrystalline aluminum nitride high reflection mirror
KR101766970B1 (ko) 기능성 코팅막 제조방법 및 기능성 코팅막
JP4963009B2 (ja) 透明性が改良された無機質膜−基板複合材料及びその製造方法
De Hosson et al. Nanoceramic caotings produced by laser treatment
Park et al. Surface plasmon resonance in novel nanocomposite gold/lead zirconate titanate films prepared by aerosol deposition method
Bougdid et al. Transmittance of TiO2 nanoparticle-based films deposited by CO2 laser heating

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AL AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HR HU IE IS IT LI LT LU LV MC MK MT NL NO PL PT RO RS SE SI SK SM TR

AX Request for extension of the european patent

Extension state: BA ME

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION HAS BEEN REFUSED

18R Application refused

Effective date: 20160401